TWI366223B - Method of removing particles from wafer - Google Patents

Method of removing particles from wafer

Info

Publication number
TWI366223B
TWI366223B TW096138494A TW96138494A TWI366223B TW I366223 B TWI366223 B TW I366223B TW 096138494 A TW096138494 A TW 096138494A TW 96138494 A TW96138494 A TW 96138494A TW I366223 B TWI366223 B TW I366223B
Authority
TW
Taiwan
Prior art keywords
wafer
removing particles
particles
Prior art date
Application number
TW096138494A
Other languages
Chinese (zh)
Other versions
TW200917345A (en
Inventor
yi wei Chen
Bao Tzeng Huang
An Chi Liu
Chao Ching Hsieh
Nien Ting Ho
Kuo Chih Lai
Original Assignee
United Microelectronics Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by United Microelectronics Corp filed Critical United Microelectronics Corp
Priority to TW096138494A priority Critical patent/TWI366223B/en
Publication of TW200917345A publication Critical patent/TW200917345A/en
Application granted granted Critical
Publication of TWI366223B publication Critical patent/TWI366223B/en

Links

TW096138494A 2007-10-15 2007-10-15 Method of removing particles from wafer TWI366223B (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
TW096138494A TWI366223B (en) 2007-10-15 2007-10-15 Method of removing particles from wafer

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
TW096138494A TWI366223B (en) 2007-10-15 2007-10-15 Method of removing particles from wafer

Publications (2)

Publication Number Publication Date
TW200917345A TW200917345A (en) 2009-04-16
TWI366223B true TWI366223B (en) 2012-06-11

Family

ID=44726371

Family Applications (1)

Application Number Title Priority Date Filing Date
TW096138494A TWI366223B (en) 2007-10-15 2007-10-15 Method of removing particles from wafer

Country Status (1)

Country Link
TW (1) TWI366223B (en)

Also Published As

Publication number Publication date
TW200917345A (en) 2009-04-16

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