TWI365167B - Assembly method of 3d micro structures - Google Patents
Assembly method of 3d micro structuresInfo
- Publication number
- TWI365167B TWI365167B TW098103836A TW98103836A TWI365167B TW I365167 B TWI365167 B TW I365167B TW 098103836 A TW098103836 A TW 098103836A TW 98103836 A TW98103836 A TW 98103836A TW I365167 B TWI365167 B TW I365167B
- Authority
- TW
- Taiwan
- Prior art keywords
- assembly method
- micro structures
- micro
- structures
- assembly
- Prior art date
Links
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
TW098103836A TWI365167B (en) | 2009-02-06 | 2009-02-06 | Assembly method of 3d micro structures |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
TW098103836A TWI365167B (en) | 2009-02-06 | 2009-02-06 | Assembly method of 3d micro structures |
Publications (2)
Publication Number | Publication Date |
---|---|
TW201029914A TW201029914A (en) | 2010-08-16 |
TWI365167B true TWI365167B (en) | 2012-06-01 |
Family
ID=44854170
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
TW098103836A TWI365167B (en) | 2009-02-06 | 2009-02-06 | Assembly method of 3d micro structures |
Country Status (1)
Country | Link |
---|---|
TW (1) | TWI365167B (en) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
TWI729066B (en) * | 2017-02-03 | 2021-06-01 | 光環科技股份有限公司 | High speed multi-channel transmitter optical module and method for fabricating the same |
Families Citing this family (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
TWI488801B (en) * | 2011-02-23 | 2015-06-21 | Univ Nat Chiao Tung | A three dimensional oblique microstructure built up by a pressing downward method is provided |
-
2009
- 2009-02-06 TW TW098103836A patent/TWI365167B/en active
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
TWI729066B (en) * | 2017-02-03 | 2021-06-01 | 光環科技股份有限公司 | High speed multi-channel transmitter optical module and method for fabricating the same |
Also Published As
Publication number | Publication date |
---|---|
TW201029914A (en) | 2010-08-16 |
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