TWI365167B - Assembly method of 3d micro structures - Google Patents

Assembly method of 3d micro structures

Info

Publication number
TWI365167B
TWI365167B TW098103836A TW98103836A TWI365167B TW I365167 B TWI365167 B TW I365167B TW 098103836 A TW098103836 A TW 098103836A TW 98103836 A TW98103836 A TW 98103836A TW I365167 B TWI365167 B TW I365167B
Authority
TW
Taiwan
Prior art keywords
assembly method
micro structures
micro
structures
assembly
Prior art date
Application number
TW098103836A
Other languages
Chinese (zh)
Other versions
TW201029914A (en
Inventor
Yi Chiu
Wei Zhi Huang
Chang Shiou Wu
Original Assignee
Univ Nat Chiao Tung
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Univ Nat Chiao Tung filed Critical Univ Nat Chiao Tung
Priority to TW098103836A priority Critical patent/TWI365167B/en
Publication of TW201029914A publication Critical patent/TW201029914A/en
Application granted granted Critical
Publication of TWI365167B publication Critical patent/TWI365167B/en

Links

TW098103836A 2009-02-06 2009-02-06 Assembly method of 3d micro structures TWI365167B (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
TW098103836A TWI365167B (en) 2009-02-06 2009-02-06 Assembly method of 3d micro structures

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
TW098103836A TWI365167B (en) 2009-02-06 2009-02-06 Assembly method of 3d micro structures

Publications (2)

Publication Number Publication Date
TW201029914A TW201029914A (en) 2010-08-16
TWI365167B true TWI365167B (en) 2012-06-01

Family

ID=44854170

Family Applications (1)

Application Number Title Priority Date Filing Date
TW098103836A TWI365167B (en) 2009-02-06 2009-02-06 Assembly method of 3d micro structures

Country Status (1)

Country Link
TW (1) TWI365167B (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TWI729066B (en) * 2017-02-03 2021-06-01 光環科技股份有限公司 High speed multi-channel transmitter optical module and method for fabricating the same

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TWI488801B (en) * 2011-02-23 2015-06-21 Univ Nat Chiao Tung A three dimensional oblique microstructure built up by a pressing downward method is provided

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TWI729066B (en) * 2017-02-03 2021-06-01 光環科技股份有限公司 High speed multi-channel transmitter optical module and method for fabricating the same

Also Published As

Publication number Publication date
TW201029914A (en) 2010-08-16

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