1363862 ___ jq7 11 2 7 • y7年月曰修(更)正替換頁 九、發明說明： 【發明所屬之技術領域】 本發明係關於一種例如在製造電漿顯示板之烘烤過程 中所使用之連續燒成爐，此外，亦係有關一種在會產生脫 出的結合劑氣體（binder gas)之處理過程中所使用之連續 燒成爐。 脫出的結合劑氣體，係指在烘烤過程中，由工件（work) * 所產生之有機成分或有機物、或是依其等之燃燒或分解所 • 產生的氣體。 【先前技術】 以往’作爲該種連續燒成爐，可知係在用以處理脫出 的結合劑氣體之未達觸媒活化溫度的溫度領域中，設置可 吸收脫出的結合劑氣體之排氣箱，並以排氣管自排氣箱引 導於爐外，位於爐外之排氣管設有內建加熱器之觸媒單元 ’用以將脫出的結合劑氣體加熱至能以觸媒分解之溫度（以 下稱觸媒活化溫度）（例如，參照專利文獻1 )。 ® 在上述之以往的連續燒成爐中，因係藉加熱器對脫出 的結合劑氣體加熱，故浪費甚多的電力。此外，因觸媒單 元設於爐外，故藉來自觸媒單元表面之放熱而使爐外部之 周圍的溫度上升。又’近年隨著材料之改革，脫出的結合 劑氣體已進展至高分子化，若未更高溫來加熱脫出的結合 劑氣體則變得難以觸媒分解，因而增加了 ’·脫出的結合劑氣 體分解的困難度。 [專利文獻1]:特開2004-316987號公報。 1363862 97年142¾釈更)正替換頁 【發明內容】 (發明擬解決之課題） 本發明之目的，係提供一種連續燒成爐 處理在未達觸媒活化溫度的溫度領域所捕集 劑氣體。 依本發明之連續燒成爐，係使工件於爐 可隨著預定之溫度分佈而被加熱，其特徵爲 箱，用以捕集由工件所產生之脫出的結合劑 元，用以在爐內分解處理所捕集之脫出的結 、排氣管，係由排氣箱朝向觸媒單元而伸入 媒單元係位於運送方向比排氣箱更下游側， 所產生之脫出的結合劑氣體會依觸媒而分解 上的爐內區域中。 在依本發明之連續燒成爐中，可在由工 脫出的結合劑氣體在爐內擴散污染之前即予 ，以維持爐內環境的清淨。又，因爲所捕集 劑氣體係藉由排氣管引導於爐內之運送方向 設在成爲觸媒活化溫度以上之區域中的觸媒 觸媒單元用的加熱器，因而達成省能源化。 此外，把觸媒單元設置在比工件會產生 氣體更爲高溫之高溫側區域時，不僅亦可確 難以較低溫進行分解之脫出的結合劑氣體， 管內之堵塞。 又，排氣管之出口端係導出爐外，當噴 ，其可於爐內 之脫出的結合 內運送期間， 具備有：排氣 氣體；觸媒單 合劑氣體；及 於爐內。該觸 且設於由工件 活化之溫度以 作件所放出之 以有效的捕集 之脫出的結合 下游側而到達 單元，故無需 脫出的結合劑 實地分解處理 還能防止排氣 射器（ej ector) 1363862 -rr t · .. . — - ·Wi修(更)正替換 一-. - { 之入口端連接於排氣管之出口端時，可藉噴射器一邊控制 處理後的脫出的結合劑氣體一邊強制性地排氣。 又，排氣箱係作成複數個，當各排氣箱分別位在不同 溫度之處所時，可將脫出的結合劑氣體於其產生源附近有 效地捕集，能使爐內空氣之污染程度減到最小。 又，當排氣管具備有對應所有的排氣箱而分岐之分岐 管時，複數個排氣箱可共用1個觸媒單元，故可節省爐內 空間，降低設備成本，並可令維護容易化等。 (發明之效果） 依據本發明，可於爐內處理在未達觸媒活化溫度的溫 度區域所捕集之脫出的結合劑氣體，故可達成省電化。 【實施方式】 茲一邊參照附圖一邊說明本發明之實施方式。 連續燒成爐具有爐體11。爐體11之橫剖面是方形者， 且由成對的兩側壁2 1、頂壁2 2及底壁2 3所形成。兩側壁 21、頂壁22及底壁23係由陶瓷纖維製保溫材料作成。頂壁 22及底壁23設有加熱器（未圖示）。又，在爐內，於爐長方 向取預定間隔設置複數個水平運送滾輪（未圖示）。被烘烤基 板（工件）載放於定位器（setter)而藉運送滾輪在爐長方向 運送。 第1圖中之左側爲爐入口側，右側則爲爐出口側。從 爐入口至出口係依次形成預備加熱區域、主加熱區域、及 緩冷區域。在基板通過預備加熱區域的期間，會從基板產 生脫出的結合劑氣體。預備加熱區域之溫度係隨著進到基1363862 ___ jq7 11 2 7 • y7 year 曰 repair (more) replacement page IX, invention description: [Technical field of invention] The present invention relates to, for example, used in the baking process for manufacturing a plasma display panel The continuous firing furnace is also a continuous firing furnace used in the process of producing a binder gas which is released. The binder gas that is taken out refers to the organic component or organic matter produced by the work* during the baking process, or the gas generated by the combustion or decomposition of the workpiece. [Prior Art] As a continuous firing furnace of the present type, it is understood that an exhaust gas capable of absorbing and removing the binder gas is provided in a temperature range for treating the binder gas which is not released to the catalyst activation temperature. The tank is guided by the exhaust pipe from the exhaust box to the outside of the furnace, and the exhaust pipe located outside the furnace is provided with a catalyst unit built-in heater for heating the extracted binder gas to be decomposed by the catalyst. The temperature (hereinafter referred to as the catalyst activation temperature) (for example, refer to Patent Document 1). ® In the above-mentioned conventional continuous firing furnace, a large amount of electric power is wasted because the binder gas is heated by the heater. Further, since the catalyst unit is disposed outside the furnace, the temperature around the outside of the furnace rises by the heat release from the surface of the catalyst unit. In addition, in recent years, with the reform of materials, the binder gas that has been released has progressed to macromolecularization, and if the binder gas which is not heated at a higher temperature is more difficult to be decomposed by the catalyst, the combination of '·extraction is increased. The difficulty of decomposition of the gas. [Patent Document 1]: JP-A-2004-316987. 1363862 97. 1413⁄4釈) Replacement Page [SUMMARY OF THE INVENTION [Problem to be Solved by the Invention] An object of the present invention is to provide a continuous firing furnace for treating a trap gas in a temperature range in which the catalyst activation temperature is not reached. The continuous firing furnace according to the present invention is characterized in that the workpiece is heated in the furnace along with a predetermined temperature distribution, and is characterized by a box for trapping the bonding agent element generated by the workpiece for use in the furnace. The knot and the exhaust pipe which are collected by the internal decomposition treatment are extended from the exhaust box toward the catalyst unit into the medium unit, and are located in the transport direction further downstream than the exhaust box, and the resulting release agent is released. The gas will be decomposed in the furnace area according to the catalyst. In the continuous firing furnace according to the present invention, it is possible to maintain the environment inside the furnace before the binder gas which is released from the work is diffused and contaminated in the furnace. Further, since the trap gas system is guided by the exhaust pipe in the direction in which the furnace is transported in the furnace, the heater for the catalyst cell is provided in a region equal to or higher than the catalyst activation temperature, thereby achieving energy saving. Further, when the catalyst unit is disposed in a high temperature side region where the gas is generated at a higher temperature than the workpiece, it is not only difficult to remove the binder gas which is decomposed at a lower temperature, but also clogging in the tube. Further, the outlet end of the exhaust pipe is led out of the furnace, and when it is sprayed, it can be supplied with exhaust gas, catalyst monomer gas, and furnace inside during the transfer in the furnace. The contact is set at the temperature activated by the workpiece to reach the unit by the combined downstream side of the effective trapping of the extraction, so that the solid decomposition treatment of the bonding agent without the extraction can be prevented ( Ej ector) 1363862 -rr t · .. . — - · Wi repair (more) is replacing a -. - { When the inlet end is connected to the outlet end of the exhaust pipe, the injector can be controlled by the injector. The binder gas is forcibly exhausted while being forced. Moreover, the exhaust box is formed in plural numbers, and when the exhaust boxes are respectively located at different temperatures, the extracted binder gas can be effectively trapped near the source thereof, and the degree of contamination of the air in the furnace can be made. Minimize to a minimum. Moreover, when the exhaust pipe is provided with a branch pipe corresponding to all the exhaust boxes, the plurality of exhaust boxes can share one catalyst unit, thereby saving the space inside the furnace, reducing the equipment cost, and making maintenance easy. And so on. (Effect of the Invention) According to the present invention, the binder gas which is trapped in the temperature region which does not reach the activation temperature of the catalyst can be treated in the furnace, so that power saving can be achieved. [Embodiment] An embodiment of the present invention will be described with reference to the drawings. The continuous firing furnace has a furnace body 11. The cross section of the furnace body 11 is square and is formed by a pair of side walls 21, a top wall 22 and a bottom wall 23. The two side walls 21, the top wall 22 and the bottom wall 23 are made of a ceramic fiber insulation material. The top wall 22 and the bottom wall 23 are provided with a heater (not shown). Further, a plurality of horizontal transport rollers (not shown) are provided in the furnace at predetermined intervals in the direction of the furnace. The baked substrate (workpiece) is placed on a setter and transported by the transport roller in the direction of the length of the furnace. In the first figure, the left side is the furnace inlet side, and the right side is the furnace outlet side. A preliminary heating zone, a main heating zone, and a slow cooling zone are sequentially formed from the furnace inlet to the outlet. The binder gas that is released from the substrate is generated while the substrate passes through the preliminary heating zone. The temperature of the preheating zone is followed by the temperature
1363862 板運送方向下游側而慢慢地持續上升。產生脫出的結合劑 氣體之溫度係依結合劑之成分而異，例如100〜14(TC。而 例如在300 °C之溫度區域會產生最多脫出的結合劑氣體。 爐內設有排氣箱3 1。排氣箱3 1係至少設在產生最多 脫出的結合劑氣體之溫度區域上，且爲使爐內高度之上側 處所在爐寬方向上延伸之水平直方體箱形。排氣箱31之底 壁形成有分散的複數個排氣吸引孔32。 2個水平排氣管3 3係由排氣箱3 1長度方向之2個位 置朝向運送方向下游側相互平行之延伸。在排氣管3 3之運 送方向下游側的端部中，排氣管3 3係朝向近側的側壁2 1 折曲成L字形並穿通該側壁21。排氣管33之出口端爲朝 上，噴射器34之人口則連接於排氣管33之出口端。 在排氣管33連接觸媒單元41。觸媒單元41係將載持 著觸媒之載持體（未圖示）收容在殻體42內。觸媒最好是活 化溫度（依脫出的結合劑氣體之種類而不同）爲200°C〜500 °C之Pt、Pd、Ag20等較佳。載持體係由陶瓷、或耐熱金屬 性蜂巢構造體、或顆粒（pellet)構造體所形成。又，在殻體 42內之載持體上游側亦可設置過濾器。 觸媒單元4 1係配置在使觸媒活化之溫度區域，但爲比 主加熱區域更靠近基板運送方向之上游側。例如，設預備 加熱區域之到達溫度爲3 00 °C、主加熱區域之到達溫度爲 600 °C時，觸媒單元41最好是配置在400〜500 °C之溫度區 域。 藉由加熱器之加熱，爐內即形成對應於從外氣到主加 1363862 _ ， 9 修(更)正替換頁 熱區域爲止的溫度區域。含有殼體42之觸媒單元41整體 ' 被加熱到接近爐內的溫度。所產生之脫出的結合劑氣體係 通過排氣吸引孔32被吸引於排氣箱31內。雖成爲自排氣 箱31藉由排氣管33排氣至爐外，但在其中途，脫出的結 合劑氣體和觸媒接觸而被氧化分解（燃燒）。此時之觸媒的 溫度約爲450〜500 °C。處理後之脫出的結合劑氣體則由排 氣管33之出口端藉噴射器34強制排氣。 ' 第4圖爲在爐內配置複數個排氣箱31之例示圖。此實 ® 施例中，係設2個排氣箱3 1。排氣管3 3具有在基板運送 方向下游側之排氣箱31的近下游部分被分岐的分岐管51 ，其迂迴該下游側之排氣箱3 1並延伸至上游側之排氣箱 3 1 〇 【圖式簡單說明】 第1圖爲依本發明連續燒成爐之垂直縱剖面圖。 第2圖爲該連續燒成爐之水平縱剖面圖。 第3圖爲該連續燒成爐之垂直橫剖面圖。 ® 第4圖爲該連續燒成爐之排氣箱變形例，爲與第2圖 相當之剖面圖。 【主要元件符號說明】 11 爐體 2 1 兩側壁 22 頂壁 23 底壁3 1排氣箱 33 排氣管 1363862 |9^-π 2 7- • 年月曰修(更)正替換頁 34 噴射器 4 1 觸媒單元 42 殼體 5 1 分岐管1363862 The board is transported in the direction of the downstream side and slowly rises continuously. The temperature at which the binder gas is generated varies depending on the composition of the binder, for example, 100 to 14 (TC. For example, in the temperature region of 300 ° C, the most out of the binder gas is generated. The tank 3 1 is provided at least in a temperature region where the binder gas which is most detached is generated, and is a horizontal rectangular box shape extending in the furnace width direction at the upper side of the furnace height. The bottom wall of the tank 31 is formed with a plurality of dispersed exhaust suction holes 32. The two horizontal exhaust pipes 3 3 extend in parallel from the two positions in the longitudinal direction of the exhaust box 31 toward the downstream side in the transport direction. In the end portion on the downstream side in the conveying direction of the air pipe 3 3, the exhaust pipe 3 3 is bent in an L-shape toward the proximal side wall 2 1 and passes through the side wall 21. The outlet end of the exhaust pipe 33 is upward, and is sprayed The population of the device 34 is connected to the outlet end of the exhaust pipe 33. The catalyst unit 41 is connected to the exhaust pipe 33. The catalyst unit 41 houses the carrier (not shown) carrying the catalyst in the casing. 42. The catalyst is preferably activated at a temperature of 200 ° C depending on the type of binder gas that is released. Pt, Pd, Ag20, etc. at 500 ° C. The carrier system is formed of a ceramic or a heat-resistant metallic honeycomb structure or a pellet structure. Further, on the upstream side of the carrier in the casing 42 A filter unit may be disposed. The catalyst unit 41 is disposed in a temperature region in which the catalyst is activated, but is closer to the upstream side in the substrate transport direction than the main heating region. For example, the temperature of the preheating region is set to 300°. C. When the reaching temperature of the main heating zone is 600 ° C, the catalyst unit 41 is preferably disposed in a temperature range of 400 to 500 ° C. By heating by the heater, the furnace is formed corresponding to the air from the outside to the main Adding 1363862 _, 9 repairs (more) the temperature zone up to the hot area of the page. The catalyst unit 41 containing the housing 42 is heated to a temperature close to the furnace. The resulting binder gas system passes through The exhaust suction hole 32 is sucked into the exhaust case 31. Although the exhaust gas is exhausted from the exhaust pipe 31 to the outside of the furnace, the binder gas and the catalyst that come out are in contact with each other. Oxidative decomposition (combustion). At this time, the temperature of the catalyst is about 450~50. 0 ° C. The binder gas which has been taken out after the treatment is forcibly exhausted by the ejector 34 from the outlet end of the exhaust pipe 33. Fig. 4 is a view showing an example in which a plurality of exhaust boxes 31 are arranged in the furnace. In the embodiment, two exhaust boxes 31 are provided. The exhaust pipe 33 has a branching pipe 51 branched in the near downstream portion of the exhaust box 31 on the downstream side in the substrate transport direction, which is bypassed to the downstream side. The exhaust box 31 extends to the upstream side of the exhaust box 3 1 〇 [Simplified description of the drawings] Fig. 1 is a vertical longitudinal sectional view of the continuous firing furnace according to the present invention. Fig. 2 is a view of the continuous firing furnace Horizontal longitudinal section view. Fig. 3 is a vertical cross-sectional view of the continuous firing furnace. ® Fig. 4 is a cross-sectional view similar to Fig. 2, showing a modification of the exhaust box of the continuous firing furnace. [Main component symbol description] 11 Furnace body 2 1 Two side walls 22 Top wall 23 Bottom wall 3 1 Exhaust box 33 Exhaust pipe 1363862 |9^-π 2 7- • Yearly repair (more) Replacement page 34 Spray 4 1 catalyst unit 42 housing 5 1 manifold
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