1360611 九、發明說明： 【發明所屬之技術領域】 本發明係關於將例如運輸自動機械或精確工作工具之轉 移系統所產生之反作用力抵銷因而降低振動之裝置、設定反作 用力抵銷裝置之質量體之方法、利用反作用力抵銷裝置抵銷反 作用力之料、以及具有反侧力抵魏置之塗佈機。 【先前技術】 -般而言，包含轉難造設備或LCD製造設備之精確 工作自動顧或包含運輸機ϋ之精確裝置，配備有線性系統， 其精確地移動工作頭(於後稱「可移動體」）於Χ轴或γ轴方 向以執行工柞。 舉例而言，例如LCD製造設備所包含之塗佈機之設備， 建構成於，行頭單元之噴嘴及平台上之基板間之相對移動 =，形成贫封圖案或滴落液晶。塗佈機配備有線性系統，其通 系稱為線性馬達(LM)導引件，以移動噴嘴或平台於χ、γ、及 Ζ轴方向。 立％操作各線性系統，亦即線性移動單元，使可移動體(移動 4)/。支撐體(固定部)線性移動時，移動或轉移工作工具。當可 移動體沿支龍移細增加或降低速度時’根據牛頓第三定律 (作用與反作帛定律)不可戦地產生反制力於支雜。所產 生的反作帛力傳遞到安裝支#體之整個設備 ’而產生振動，因 5 1360611 此阻礙了更精確地控制及驅動工作工具β 因此’已進打了各種對於採用線性系統之精確工作自動機 械及裝置的研究’以降低因系統操作躺所產生之反作用力造 成之振動。 降低振動的方法利用機械反作用力系統以及軟體(s/w)振 動控制祕。機械反_力錢為_具有比可雜體質量大 玉倍或更多倍質#之質量體來抵銷反作用力而降低振動之系 統。再者’軟體振動控制系統為添加特定輸入到線性系統之既 有輸入成為S後輸入，來㈣可軸體飾崎低可移動體操 作所，生之振動之系統。亦即，軟體振動控制系統利用控制方 法中农〗化振動之方法，其巾額外輸人對應控制並驅動可移動 體時之自然頻率之新反向頻率。 ί 設備僅具有機械反仙力系統或軟 體振動控制系統其令之一，來降低娜 統很難得到更完美的振動降低效應。 種系 五質 利用具有比可移動體質量大 設備====：:嫩㈣而使整個 6 1360611 【發明内容】 因此’本發明有鑒於習知技術發生的問題，本發明目的之 一為提供一種反作用力抵銷裝置，以利用軟體振動控制方法及 機械反作用力抵銷方法來，更完美地降低加速系統中所產生之 振動，本發明同時提供設定反作用力抵銷裝置之質量體之方 法，利用反作用力抵銷裝置抵銷反作用力之方法，以及具有反 作用力抵銷裝置之塗佈機。 〃1360611 IX. Description of the Invention: [Technical Field] The present invention relates to a device for offsetting a reaction force generated by a transfer system such as a transport robot or a precision work tool, thereby reducing vibration, and setting the quality of the reaction force canceling device The body method, the reaction force offsetting device counteracts the reaction force material, and the coating machine having the opposite side force. [Prior Art] - In general, the precise work of a transfer-to-hard device or an LCD manufacturing device, or a precise device including a transporter, is equipped with a linear system that precisely moves the work head (hereinafter referred to as "movable body" ”) Perform the work in the Χ or γ axis direction. For example, a device such as a coater included in an LCD manufacturing apparatus is constructed such that a relative movement between a nozzle of a line head unit and a substrate on a stage forms a poor seal pattern or a drop liquid crystal. The coater is equipped with a linear system called a linear motor (LM) guide to move the nozzle or platform in the χ, γ, and Ζ directions. The % operation operates each linear system, that is, a linear moving unit, to make the movable body (moving 4)/. Move or transfer the work tool when the support (fixed portion) moves linearly. When the movable body moves along the branch to increase or decrease the speed, the counter-force is generated in accordance with Newton's third law (action and the law of the reverse). The resulting counter-force is transmitted to the entire device of the mounting body' to generate vibration, as 5 1360611 hinders more precise control and actuation of the working tool. Therefore, 'there has been a variety of precise work for linear systems. Research on automatic machinery and equipment 'to reduce the vibration caused by the reaction force generated by the system operation lying. The method of reducing vibration utilizes a mechanical reaction force system and a soft body (s/w) vibration control secret. The mechanical anti-force is a system that reduces the vibration by offsetting the reaction force by the mass of the jade or more. Furthermore, the software vibration control system is a system that adds a specific input to the linear system and inputs the input to the S, and then (4) the shaft body is decorated with a low-movable gymnastics. That is, the soft body vibration control system utilizes the method of controlling the vibration in the control method, and the towel additionally inputs a new reverse frequency corresponding to the natural frequency of the movable body when controlling and driving the movable body. ί The device has only one of the mechanical anti-Shenli system or the soft vibration control system, which is difficult to achieve a more perfect vibration reduction effect. The use of the germplasm has a higher mass than the movable mass device ====:: tender (four) and makes the whole 6 1360611. [Inventive content] Therefore, the present invention has problems in view of the prior art, and one of the objects of the present invention is to provide A reaction force canceling device for more accurately reducing vibration generated in an acceleration system by using a soft body vibration control method and a mechanical reaction force offset method, and the present invention also provides a method for setting a reaction force to cancel a mass body of the device, A method of counteracting a reaction force by a counter force offsetting device, and a coater having a reaction force canceling device. 〃
本發明之另一目的在於提供一種反作用力抵銷裝置，其檢 =體振動控鮮元降低觸的能力，而最小化構成機械㈣ 單元之質量體之質量，因而簡化整個自動機械及機器 联大錄崎佩應，本發_啸倾定反作用力抵 之質量體之方法，利用反作用力抵齡置抵銷反作用力 方法，以及具有反作用力抵銷裝置之塗佈機。Another object of the present invention is to provide a reaction force canceling device which can reduce the ability of the body to reduce the touch, and minimize the quality of the mass body constituting the mechanical (four) unit, thereby simplifying the entire automatic machine and machine joint Recording Qi Pei Ying, the hair _ 倾 倾 反 反 反 反 反 反 反 反 反 反 反 反 反 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。
作用的’根據本發明之一方面提供一種抵銷反 對於可移動財設於可雜虹撐件，以相 線性移動於X財向；軟體振=單可移輔’沿支樓體 校正驅動可移祕早H輸场正方法 正之修正法校 體時所產生之振動;以及二動 體，以及利用質量體抵銷可移動體 辦肖早凡’耗接支揮 於支撐體之反作用力。 σ牙體加速或減速時施加 7 1360611 本裝置更包含振動感測部，用以侧於驅動可移 生之振動。軟體振動控制單元因應於驅動 期間振動_部所_及所產生之實際振動_ : 正命令並輸出命令。 仅正修 之質^反作用力抵銷單元包含經由連接單喊接到支撐體 體==:=，反 :=控制方法降低振動的產生丄 目ί»"Λ值，WA b)si疋機械反作力抵銷單元之質量體之 可:動體期間所產生之振動’以及利 二==_於χ軸抑加速或減糾啦生之反= =:b=二編r__ 測 开.，、，n彳及將縣㈣饋給軟贿動控制單 令二步二?1饋之資料，校正軟體振動控制單元 乂控制刻、化驅動可移動體_所產生之振動。 8 1360611 為 ^達成上述目的’根據本發明之一方面提供一種塗佈 ^包^框架，用以支·上奴有基板之平台；頭支樓件， =於框^之上部轉動於γ財向；支撐體，安裝於頭支 =件’以相對於頭支料移動於X轴方向；頭單元，由支樓 ^所支撐以㈣於X軸方向，且具有喷嘴以塗佈密封劑或液 :於裝設於平台之基板；X軸驅動單元，肋沿支撐體移動頭 早7L於^轴方向；軟體振動控制單元，以輸入修正方法校正According to one aspect of the present invention, an offset against a movable asset is provided in the miscellaneous rainbow support member, and the phase shift is linearly in the X financial direction; the soft body vibration=single movable auxiliary function is corrected along the support body. The movement of the early H-field is correcting the vibration generated by the method; and the two-moving body, as well as the use of the mass body to offset the movable body Xiao Xiaofan's reaction to the supporting body. σ tooth acceleration or deceleration application 7 1360611 The device further includes a vibration sensing portion for driving the movable vibration. The software vibration control unit responds to the vibration during the drive and the actual vibration generated by the _: positive command and outputs the command. Only the quality of the positive repair ^ reaction force offset unit includes a single connection to the support body via the connection ==:=, reverse:= control method to reduce the vibration generated by the ί»"Λ, WA b) si疋 mechanical anti The quality of the force offsetting unit can be: the vibration generated during the moving body' and the profit of the second ==_ in the axis of the axis to accelerate or reduce the error of the raw ==:b=2nd edition r__ measurement open.,, , n彳 and the county (four) to the soft bribery control single order two-step two? 1 feed data, the correction software vibration control unit 乂 control engraving, driving the movable body _ generated vibration. 8 1360611 To achieve the above object, 'in accordance with one aspect of the present invention, a coating package is provided for supporting a platform on which a slave substrate is provided; a head support member, = a top portion of the frame is rotated by a gamma The support body is mounted on the head support member to move in the X-axis direction with respect to the head support; the head unit is supported by the support structure (4) in the X-axis direction and has a nozzle to apply the sealant or liquid: The substrate mounted on the platform; the X-axis driving unit, the rib moves along the support body 7L in the direction of the ^ axis; the soft vibration control unit is corrected by the input correction method
驅動頭單元之參考命令組，以及輸出哺场正方法校正之修 正命令，以控制頭單元之驅動’因而降低驅動頭單元時所產生 之振動；以及機械反作用力抵銷單元，利用耦接支撐體之質量 體’用以抵_單元移動於X財向雜加於支碰之反作 用力，即使頭支撐件移動於Y軸方向而於γ軸方向改變支撐 體及頭單元之位置。 塗佈機更包含振動感測部，用以偵測於驅動頭單元時頭單 元所產生之振動。軟體振動控制單元因應於驅動頭單元期間振 • 動感測部所偵測及所產生之實際振動感測結果，校正修正命令 並輸出命令。 機械反作用力抵銷單元包含：質量體，安裝於與框架相隔 之位置；以及連接單元，連接於質量體及支撐體之間，以自支 撐體傳遞反作用力到質量體。 【實施方式】 9 1360611 根據本發明之反作用力抵銷裝置多方面地應用於精確機 器，例如運輸裝置或例如半導體製造設備&LCD製造設備之 精確工作之自動機械。 將參考伴隨圖式說明本發明較佳實施例。 圖1為根據本發明實施例之反作用力抵銷裝置之基 構之示意圖。 〃 參考圖1’娜本伽之反侧力鋪裝錄設於包含平 ° 1、框架2、可軸財料3、以及可軸體5之設備。 於此’平台1建構成作為一般工作台。框 平台1或與平台1分離。再者，可移 件 = 架2所支樓。可移動體5為供工具裝設之框 作業於工作台上之物件，且件卫具實貝執仃 性移動於可移動體支#件3上。 建構成於X軸方向線 於此將省略 結構魅構為細鶴者所熟知， 安裝於可移爐5，㈣定部絲㈣移動部 10 ι^ουόΐι 為了建構本發明之反作用力抵銷定 ==樓件3移動。因此，可移動體5於 標件3 ΐ框架^生之反仙力’不會傳遞到包含可移動難支 ^類較部可直接絲成相對於可轉體支料3移 1由額外結構安裝成相對於可移動體支撐件3移動。於 4固疋4及支樓固定部之額外結構將表示為支撑體心、 用動體5移動於x軸方向’施加於支碰4之反作 魅1、可移域5之雜方向減。因反侧力而發生了 振動。為了降鎌動，絲了反伽力抵·置。 6以之反仙力抵齡置_賴鋪控制單元 以及機械反侧力抵解元9, _更完美崎低振動。 ，詳、:說明中’本發明之反作用力抵銷裝置包含軟體振動 以及機械反作用力抵銷單元9。軟體振動控制單元 之法(mPUt ShaPmg meth〇d)校正驅動可移動體5 2考m組，並輪出修正命令以控制可移動體5的驅動，因 麟低驅動可移動體5期間所產生之振動。機械反作用力抵銷 11 ^量體7，抵銷可移動體5 _支龍4並沿狀 時增加或降低速度而施加於支樓體4上之反作用力。 動可測部5a於可移動體5,且偵測驅 移動體5期間所產生之振動，以執行回饋控制。 將說明根據本發明之反作用力抵銷裝置之個別部件。 動辦触躺糊單元6 _#购可飾體5時可移 -本身之振動，並_降低可移動體5移 用力’因此最小化纽的織。 m乍 $圖2 ’、軟體振動控制單元6 _輸人修正器計算並輸 八兩 >正方法之控制訊號，以輸出驅動可移動體$之修正 i老實施是㈣於輸场正財魏—相脈衝及 ，考命令。然舰繞所致的修正命令用動可移動體5。 於此’輸人修正ϋ之脈衝可由自然鮮資料及可移動 之降低比綱歧之脈_财及時_置所奴。 ，可考慮*酵數來決定，包含可移動體5之_ : 速及減速區段的數目。 j 如此一來，由於利用軟體振動控制單元6控制可移 的驅動，而於最小化鶴可移動體5所產生之振動的狀態下 12 5 1360611 驅動可移動體5。因此’如上所述，降低可移動體自己的振動， 且降低施加於支撐體4之反作用力。 同時，利用振動感測部5a，偵測驅動可移動體5時所產 生之可移動體5之振動，然後回饋。因此，當再次校正修正命 令時’輸出新的修正命令，可進一步降低驅動可移動體5時所 產生之振動。 此類振動制部5a #測於輸人修正輯算之修正命令驅 動可移動體5之狀態下，可移動體5之實際振動量。當振動量 超過預絲度(亦即參考振動量）’哺給輸人修正器，以 於脈衝錢㈣的修正命令，因續低可移動體5 可移 動 ㈣讀，__計算:表動= 1360611 此類機械反作用力抵銷單元9提供於*传μ 連接單元8箱接質量體7- # — 4之—側，而藉由 方法時，將 於下說明設定反作用力抵銷裝置之 說明設定質量體7之較佳質量之方法。質體7之 純如ίΓ ’彻軟體振動控制單元6降低可移動體自身的 ，。同時’利用機械反作用力抵銷單元9降 2的5 於X轴方向加速或減速移動所產生之反作 加於系統之振_可更完美地控制。 可取小化細 校正ί 5a 之可移動體5之振動量， 而改的修正命令’並透過回饋控制再次控制， 裝置3及圖4 ’說明根據本發明設定反作用力抵銷 力之=妓’以及_反_力抵触置抵銷反作用 圖3為根據本發明設定反作用力抵銷裝置之 質量體之方 法之、、*和m 且、貝里脰心刀 圖。"丨也圖’而圖4為根據本發明抵銷反作用力之方法之流程 百先，將參考圖3說明設定反作用力抵銷裝置之質量體之 14 械反作用力抵銷單元9之狀態下’軟體振動控 可移:體ί 巧可移動體5。此時，於降低 依助之狀惡下，夏測可移動體之加速度值。 接著’基於軟體振動控制單元6降低可移動體5之加速度 值^根據質曰量體7之目標加速度值，決定機械反作用力抵銷單 =之質量體7之質量1此方式決定之質量體7,藉 早το 8耦接支撐體4。 於此’將以具體範例顯示根據本發明設定反作用力抵銷裝 置之質量體之方法。 —假設驅動可移動體5時所產生之加速度知為1〇，透過軟 體振動控鮮元6之洲方法而可將可移細$之加速度由 1G降β低至約〇 4G。當然，這些為大約的數值並非絕對的加速 度減量。 。基於可移動體5之加速度為0.4G，其為透過軟體振動控 制單元6降低的，決定機械反作用力抵銷單元9之質量體7 之質量。 質量體之質量根據支撐體以及與其耦接之質量體之設定 1360611 目標加速度而變化。於此’以目標加速度設為0.2G作為說明 範例。 於此’ 0.2G表示支撐體及質量體之最大容許加速度值， 其已預先由能使系統最穩操作之實驗決定。若輕接質量體之支 撐體(固定部)4以0.2G或更高的加速度移動，則可移動體(移 動部)5及支挣體4間之相對移動範圍過度地增加，而發生強 烈地振動，導致整個系統不穩定操作。為此原由，將說明目標 加速度設為0.2G之案例。 決定質量體7尺寸之質量及加速度間之關係將根據以下 方程式： 「方程式」 F = m^i = m2a2 一於此，F表示可移動體移動時所產生之反作用力，叫表 不可移動體f量，ai表示可移紐加速度(㈣縣控制 降低了的加速度）’ m2表示f4體之，以及力表示 體目標加速度(質量體的加速度）。 里 於透過上述方程式決定質量體尺寸之案例 體5由軟體振動控制單元6降低了的加速度&為Q4g了= 加速，a2設為0.2G，以及可移動體5之質量％為】，: 以下异式計算質量體7之質量％。 用 之質量m2等於2。 亦即，lx〇.4=m2X〇.2,所以質量體7 兩供:此it f '體7之質量約為可移動體5之質量ml的 鶴體5移树職生之反侧力，因 單元3低5之加速度ai進-步由軟體振動控制 早兀6降低時’質量體7之質量⑽亦可設得更小。 控制丨t明在僅安裝f 4體7軟體振動 所聽衫統穩定 』刀口迷度，而设計質量體之程序。 算式 了可移動體之加速度為1G，於相同條件下將朗於以下 於5 於此案例t ’⑷池奶。此時，f量體之質量⑽ 因此，若僅由機械反作用力抵銷單 低反作用力，則當包含支撐體之之‘ 7 7來降 咖時’必須提供比可移縮” 降低為約 因此可知所需的皙&鱗口一貝里直五倍貝里的質量體7。 機械反_力_單元9降做_力_好如以及 17 1360611 如上所述’若I測由軟體振動控制單元6降低的可移動體 之加速度’基於加速度決定機械反作用力抵銷單元9之質量體 尺寸而建構反作用力抵銷裝置，使得具有最小化質量體 之尺寸時可移動體5於x軸方向加速及減速移動之反作用 所產生之質量體加速度a2降低為Q2G或更少錢乎消除。 因此可Hth控制振細及輕易又精確地操作系統。 圖1虛線所示之❹體7A尺寸降低到實線所示之質量體 尺寸，以簡化整個系統之機械架構，且可有可靠又精確的操 說明本發明之反作用力抵銷方 以及基於控制單元6設定之機 如上所述，將參考圖4, 法’其利用軟體振動控制單元6 械反作用力抵銷單元9。 η口田軟體振動控制單元6校正之修正命令輪出到χ轴驅動 •而驅動可移動體5於X軸方向時，於可移動體5之振 以輪场正方法校正讀正命令最小化之狀態下可移動 :5移動於χ軸方向。同時，機械反作用力抵銷單元9消除 可轉體5加速或_騎職生域械反侧力。 ’、 ，利用軟體振動控制單元6以及機械反作用力抵銷單元9， 抵銷於可移動體5移動時所產生之振動，以及反翻力所產生 之振動，而更有效地降低整個系統的振動。 之工自然_由_於可移動體5 剩部5a時貞ί驅動可移動體5時之實際振動量之振動感 超出參考5 = i °當量_振動量 新修正命令，控财飾體5 顿修正命令。因應 此:來’錯由量測可移動體5之實際振動量以及執行回 ^降低^動可雜體5時可能產生之振動，可持續又更完 現將說明根據本發明彻反作用力抵魏置之塗佈機。 圖5為根據本發明利用反作用力抵銷裝置之塗佈機之 視圖。 根據本發明之塗佈機為具有上述反作用力抵銷裝置之塗 佈機。 參考圖5 ’根據本發明之塗佈機建構成形成密封圖案或液 晶層於構成LCD之基板S上’並包含平台15、框架10、頭支 撐件20、以及頭單元30。基板S裝設於平台15上。框架1〇 支樓平台15。頭支撐件20安裝於框架1〇，以移動於γ車由方 向。頭單元30由頭支撐件20所支撐以移動於χ軸方向，並 配備有喷嘴，因而塗佈密封劑或液晶到裝設於平台15之基板 頭支撐件20橫越放置於平台15之上部，且兩端由框架 10之上部所支撐。頭支樓件2〇安裝成藉由提供於頭支標件 由框架10支樓的兩端之γ轴驅動單元25(例如線性 ，移動於^方向。當各γ轴驅動單元25包含線性馬達時， 軸驅動單元25包含裝設於框架1Q之@定部％以及 頭支撐件20之移動部27。 又於 複數個頭單元3G安裝於頭支料2卜各頭單元％配 有噴嘴，其塗佈或滴落密封劑到褒設於平台15之基板S上。a reference command group of the drive head unit, and a correction command for correcting the positive feedback method of the feed field to control the driving of the head unit' thus reducing the vibration generated when the head unit is driven; and the mechanical reaction force canceling unit using the coupling support The mass body' is used to counteract the reaction force of the unit in the X-axis, and the head support changes the position of the support body and the head unit in the γ-axis direction even if the head support moves in the Y-axis direction. The coater further includes a vibration sensing portion for detecting vibration generated by the head unit when the head unit is driven. The software vibration control unit corrects the correction command and outputs a command in response to the actual vibration sensing result detected by the vibration sensing unit during the driving of the head unit. The mechanical reaction force canceling unit comprises: a mass body installed at a position apart from the frame; and a connecting unit connected between the mass body and the support body to transmit the reaction force to the mass body from the support body. [Embodiment] 9 1360611 The reaction force canceling device according to the present invention is applied in various aspects to a precision machine such as a transport device or an automatic machine such as a semiconductor manufacturing device & Preferred embodiments of the present invention will be described with reference to the accompanying drawings. BRIEF DESCRIPTION OF THE DRAWINGS Figure 1 is a schematic illustration of the structure of a reaction force canceling device in accordance with an embodiment of the present invention. 〃 Refer to Figure 1 for the reverse side force pavement of Nabine Gaga, which is recorded on the equipment including the flat 1, frame 2, the shaft material 3, and the shaft 5. The platform 1 is constructed as a general workbench. Box Platform 1 is separate from platform 1. Furthermore, the movable parts = 2 buildings. The movable body 5 is a frame for the tool to be mounted on the workbench, and the implement is moved to the movable body support member 3. The construction of the X-axis direction line will be omitted here. The structure is omitted from the crane, and is installed in the movable furnace 5, (4) fixed wire (4) moving part 10 ι^ουόΐι In order to construct the reaction force of the present invention, offset = = Floor 3 moves. Therefore, the movable body 5 is attached to the frame 3 ΐ frame ^ 之 力 force 'will not be transmitted to contain the movable difficult branch ^ class can be directly wired to the movable body 3 Moving relative to the movable body support 3. The additional structure of the fixed portion 4 and the fixed portion of the branch will be expressed as the support body center, and the movement direction of the movable body 5 in the x-axis direction is applied to the opposite side of the bump 4, and the misalignment direction of the movable region 5 is reduced. Vibration occurred due to the opposite side force. In order to reduce the swaying, the anti-Galli force is set. 6 反 力 抵 抵 _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ DETAILED DESCRIPTION OF THE INVENTION The reaction force canceling device of the present invention includes a soft body vibration and a mechanical reaction force canceling unit 9. The method of the soft vibration control unit (mPUt ShaPmg meth〇d) corrects the driving of the movable body, and rotates the correction command to control the driving of the movable body 5, which is generated during the driving of the movable body 5 by Lin low. vibration. The mechanical reaction force counteracts the 11 ^ body 7, which counteracts the reaction force exerted on the branch body 4 by the movable body 5 _ the dragon 4 and increasing or decreasing speed along the shape. The measurable portion 5a is on the movable body 5, and the vibration generated during the driving of the moving body 5 is detected to perform feedback control. The individual components of the reaction force canceling device according to the present invention will be explained. When the movable unit 6 is purchased, the vibration can be moved by itself, and the movement of the movable body 5 can be reduced, thereby minimizing the weaving of the new one. m乍$Fig. 2', the software vibration control unit 6 _ input corrector calculates and loses the control signal of the positive method, and the output is driven by the movable body $. The old implementation is (4) in the field of Zheng Weiwei - Phase pulse and test commands. However, the correction command caused by the ship winding uses the movable body 5. In this case, the pulse of the human error correction can be reduced by the natural fresh data and the movable. It can be determined by considering the number of yeasts, including the number of _: speed and deceleration sections of the movable body 5. In this manner, since the movable vibration control unit 6 controls the movable drive, the movable body 5 is driven in a state where the vibration generated by the crane movable body 5 is minimized. Therefore, as described above, the vibration of the movable body itself is lowered, and the reaction force applied to the support body 4 is lowered. At the same time, the vibration of the movable body 5 generated when the movable body 5 is driven is detected by the vibration sensing portion 5a, and then fed back. Therefore, when a new correction command is outputted when the correction command is corrected again, the vibration generated when the movable body 5 is driven can be further reduced. Such a vibrating portion 5a # measures the actual amount of vibration of the movable body 5 in a state where the correction command of the input correction is used to drive the movable body 5. When the amount of vibration exceeds the pre-filament (that is, the reference vibration amount) 'feeds the input corrector, to correct the command of the pulse money (four), because the movable body 5 can be moved (four) to read, __ calculation: movement = 1360611 Such a mechanical reaction force canceling unit 9 is provided on the side of the boxing mass body 7-#-4, and the method of setting the reaction force canceling device will be described below. A method of better quality of mass body 7. The mass body 7 is as pure as the 'soft body vibration control unit 6 lowers the movable body itself. At the same time, the reverse of the acceleration/deceleration movement of the 5 in the X-axis direction by the mechanical reaction force counter 9 is more perfectly controlled. It is preferable to reduce the amount of vibration of the movable body 5 of the fine correction ί 5a, and the modified correction command 'is again controlled by the feedback control, and the device 3 and FIG. 4' illustrate the setting of the reaction force offset force 妓' according to the present invention. _Reverse-force-to-contact offset action diagram FIG. 3 is a diagram showing the method of setting the mass of the reaction force canceling device according to the present invention, * and m, and the Belli knives. And FIG. 4 is a flow chart of the method for offsetting the reaction force according to the present invention, and the state of the 14-force reaction force canceling unit 9 for setting the mass of the reaction force canceling device will be described with reference to FIG. 'Soft body vibration control can be moved: body ί smart body 5. At this time, in the case of reducing the help, the acceleration value of the movable body is measured in summer. Then, based on the soft body vibration control unit 6, the acceleration value of the movable body 5 is lowered. According to the target acceleration value of the mass body 7, the mechanical reaction force is offset by the mass of the mass body 7 = the quality body 7 determined in this manner. The support body 4 is coupled by the early το 8 . Here, a method of setting the mass of the reaction force canceling device according to the present invention will be shown by way of a specific example. - Assume that the acceleration generated when the movable body 5 is driven is known to be 1 〇, and the acceleration of the shiftable $ can be lowered from 1G to β to about 4G by the method of the soft vibration control unit 6. Of course, these approximate values are not absolute acceleration reductions. . The acceleration based on the movable body 5 is 0.4 G, which is lowered by the soft body vibration control unit 6, and determines the mass of the mass body 7 of the mechanical reaction force canceling unit 9. The mass of the mass varies depending on the support and the mass to which it is coupled. 1360611 Target acceleration. Here, the target acceleration is set to 0.2G as an illustrative example. Here, '0.2G indicates the maximum allowable acceleration value of the support and the mass, which has been determined in advance by an experiment that enables the most stable operation of the system. When the support body (fixed portion) 4 of the mass body is moved at an acceleration of 0.2 G or higher, the relative movement range between the movable body (moving portion) 5 and the support body 4 is excessively increased, and the occurrence is strongly Vibration causes unstable operation of the entire system. For this reason, the case where the target acceleration is set to 0.2G will be explained. The relationship between the mass and the acceleration of the mass 7 is determined according to the following equation: "Equation" F = m^i = m2a2 Here, F represents the reaction force generated when the movable body moves, called the table immovable body f Quantity, ai indicates the movable acceleration ((4) County reduced control acceleration) 'm2 indicates f4 body, and force indicates body target acceleration (acceleration of mass body). In the case body 5 in which the mass body size is determined by the above equation, the acceleration & reduced by the soft vibration control unit 6 is Q4g = acceleration, a2 is set to 0.2G, and the mass % of the movable body 5 is:, below The mass % of the mass body 7 is calculated in a different form. The mass m2 used is equal to two. That is, lx〇.4=m2X〇.2, so the mass body 7 is supplied: the mass of this it f 'body 7 is about the mass of the movable body 5, and the opposite side force of the crane body 5 The acceleration of unit 3 is lower than 5, and the step (by step) is controlled by soft vibration. The mass of mass 7 (10) can also be set smaller. The control 丨t is clearly installed in the f 4 body 7 software vibration, the system is stable, and the quality of the program is designed. The acceleration of the movable body is 1G, which will be less than 5 in this case t ’(4) pool milk under the same conditions. At this time, the mass of the body is measured (10). Therefore, if only the mechanical reaction force is used to offset the single low reaction force, then when the support body contains the '7 7 to reduce the coffee, the 'must provide the ratio of the shrinkable amount' is reduced to about It can be seen that the required 皙& scale is one Berry straight five times the mass of the body 7. The mechanical inverse _ force _ unit 9 is reduced _ force _ as good as 17 1360611 as described above 'If I measured by software vibration control The acceleration of the movable body reduced by the unit 6 constructs a reaction force canceling device based on the mass body size of the acceleration determining mechanical reaction force canceling unit 9, so that the movable body 5 is accelerated in the x-axis direction when the size of the mass body is minimized And the mass acceleration a2 generated by the reaction of the deceleration movement is reduced to Q2G or less. Therefore, the Hth can control the vibration and easily and accurately operate the system. The size of the body 7A shown in the dotted line of Figure 1 is reduced to the solid line. The mass size shown to simplify the mechanical structure of the entire system, and can be reliably and accurately described. The reaction force cancellation side of the present invention and the setting based on the control unit 6 are as described above, and will be referred to FIG. 'Using the soft body vibration control unit 6 to counteract the force canceling unit 9. The correction command corrected by the η mouth field soft body vibration control unit 6 is rotated to the χ axis drive and the movable body 5 is driven in the X-axis direction to the movable body The vibration of 5 is movable in the state where the correction of the positive command is minimized by the positive method of the wheel field: 5 moves in the direction of the x-axis. At the same time, the mechanical reaction force canceling unit 9 eliminates the acceleration of the swivel 5 or the opposite side of the occupational field ', , using the soft body vibration control unit 6 and the mechanical reaction force canceling unit 9, offsetting the vibration generated when the movable body 5 moves, and the vibration generated by the reverse turning force, thereby effectively reducing the entire system The vibration of the workmanship _ from the _ to the movable body 5 remaining part 5a 贞ί The vibration of the actual vibration amount when driving the movable body 5 exceeds the reference 5 = i ° equivalent _ vibration amount new correction command, control financial body 5 correction command. In response to this: the error is measured by the actual vibration amount of the movable body 5 and the vibration that may be generated when the operation of the movable body 5 is performed, and the vibration can be generated continuously and more fully. Thorough reaction Figure 5 is a view of a coater using a reaction force canceling device according to the present invention. The coater according to the present invention is a coater having the above-described reaction force canceling device. The coating machine of the invention is constructed to form a seal pattern or a liquid crystal layer on the substrate S constituting the LCD and includes a stage 15, a frame 10, a head support 20, and a head unit 30. The substrate S is mounted on the platform 15. The support platform 15 is mounted on the frame 1 to move in the direction of the gamma vehicle. The head unit 30 is supported by the head support 20 to move in the direction of the x-axis and is equipped with a nozzle, thereby applying a seal. The substrate or liquid crystal is placed across the upper portion of the platform 15 across the substrate head support 20 mounted on the platform 15, and the ends are supported by the upper portion of the frame 10. The head support member 2 is mounted to be driven by the γ-axis driving unit 25 at both ends of the frame 10 by the head support member (for example, linearly, moving in the ^ direction. When each γ-axis driving unit 25 includes a linear motor) The shaft drive unit 25 includes a fixed portion % of the frame 1Q and a moving portion 27 of the head support 20. Further, the plurality of head units 3G are attached to the head support 2, and each head unit % is provided with a nozzle for coating Or dripping the sealant onto the substrate S disposed on the platform 15.
-方ί單二3°提供成移動於頭支料2G之縱長方向，亦即X 動於i ιΓ方 =30猎由包含線性馬達之x轴驅動單元35，移 ί’x軸驅動單元35較佳包含線性馬達。 於此案例，動私35包含妓 = 於此，固定部36安裝成相對於頭 方向，而避免將包含移動部37之 牛移動於X軸 作用力傳遞辆切件2〇。 70雜所產生之反 20 或液晶到基板 於如此建構之_機巾，當解元3G沿頭支餅2〇移動 轴方向，⑽頭战物於_ U)上移練Y軸方向 ?，噴嘴誠於基板軸於X轴及Y财向，喊佈密封劑 銷單塗軟體振動控制單7^6,以及機械反作用力抵 銷早70 50，以最小化各頭單元30移動於X轴方向時之振動。 於此，軟體振動控制單元6,建構 部5a，之職，錄伽饋 ^輸人動感測 3〇所產生之振動。饋控制。振動感測較_各頭單元 1所制單元及振動感測部5a，具有與參考圖 部5a相同的芊構及Iff置之軟體振動控制單元6及振動感測 门㈣構物作，因此省略重複的說明。 降低之機械反作用力抵銷單元9,建構成 力，其t支沖4 統之—個轴移崎產生之反作用 輪方向。同於/轴方向，僅可移動體5移動於χ 移動於Y舳方/ 3施例之塗佈機建構成當頭支撐件20 财向，岭部如及各頭單元3G移動於Y轴方向。 5〇，建構成彳^=發·佈機之频反作用力抵鎖單元 、馬降低各頭單元30移動時所產生之乂軸反作 1360611 用力，即使頭單元30的γ軸位置改變。 於如上建構之機械反作用力抵銷單元5〇中 之質量設定於在軟體振動控制單元6，之控 #體^ 元30之振動的狀態下’而降低驅動頭單元％時所產生^ 轴反作用力。 於下’將詳細·應麟塗佈機之機械反_力抵銷單元 機械反作用力抵銷單元50包含安農成與框架1〇相隔 量體51，以及耦接於質量體51及固定部％間之連接單元μ、， 以從支撐體傳遞反作用力到質量體51。 較佳地，各質量體51安裝於與框架1〇相隔之位置。 各質罝體51之質量及數量可透過本發明設定質量體之方 法來決定。 、 連接單元55安裝成利用各質量體51，抵銷各頭單元3〇 之X軸移動所產生之反作用力，即使頭單元3〇之γ軸位置改 變0 亦即’於本發明之塗佈機中’各頭單元3〇沿固定部％ 22 1360611 耦接器7。安裝成從相關的:::：件6。。各 令祸接器 ，…六四…因疋邵36之一 =，並包含強度足以能傳遞各頭單元3G移動時二生 =用力到質量體51之結構。於圖式卜頭單元3〇 =- square 单 2 2° is provided to move in the longitudinal direction of the head support 2G, that is, X moves in i ιΓ square = 30 hunts by the x-axis drive unit 35 including the linear motor, and the 'x-axis drive unit 35 A linear motor is preferably included. In this case, the whistle 35 includes 妓 = where the fixing portion 36 is mounted with respect to the head direction, and the movement of the cow including the moving portion 37 to the X-axis force transmission member 2 避免 is prevented. The anti-20 or liquid crystal generated by the 70 miscellaneous material is transferred to the substrate in the so-called machine towel. When the solution 3G moves along the moving axis of the head cake 2, (10) the head warfare moves the Y-axis direction on the _ U)? Since the substrate axis is on the X-axis and the Y-axis, the shim sealant pin single-coated soft vibration control unit 7^6, and the mechanical reaction force offset early 70 50 to minimize the movement of each head unit 30 in the X-axis direction. Vibration. Here, the software vibration control unit 6, the construction unit 5a, records the vibration generated by the gamma feed. Feed control. The vibration sensing unit _ the head unit 1 and the vibration sensing unit 5a have the same structure as the reference pattern portion 5a, and the soft body vibration control unit 6 and the vibration sensing door (four) structure are omitted, and thus are omitted. Repeated instructions. The reduced mechanical reaction force cancels the unit 9, and builds the force, and the t-branch is the reaction direction of the wheel. In the same direction as the /axis direction, only the movable body 5 is moved to the 涂布. The coating machine that moves to the Y 舳 / 3 embodiment constitutes the head support 20, and the ridge portion and the head unit 3G move in the Y-axis direction. 5〇, the frequency 反 = = = = = = 布 布 布 布 布 布 = = = = = = = = = = = = 13 13 13 13 13 13 13 13 13 606 606 606 606 606 606 606 606 606 606 606 606 606 606 606 606 The mass in the mechanical reaction force canceling unit 5' constructed as described above is set in the state of vibration of the control unit #30 in the soft vibration control unit 6, and the shaft reaction force generated when the drive head unit % is lowered . In the following, the mechanical anti-force counteracting unit mechanical reaction force canceling unit 50 of the lining coater includes an Annon and the frame 1 〇 spacer body 51, and is coupled to the mass body 51 and the fixed portion%. The connecting unit μ is connected to the mass body 51 by transmitting a reaction force from the support. Preferably, each of the mass bodies 51 is mounted at a position spaced apart from the frame 1A. The mass and quantity of each mass 51 can be determined by the method of setting the mass of the present invention. The connecting unit 55 is installed to offset the reaction force generated by the X-axis movement of each head unit 3〇 by using the mass bodies 51, even if the γ-axis position of the head unit 3〇 is changed to 0, that is, the coating machine of the present invention In the 'head unit 3' along the fixed part% 22 1360611 coupler 7. Installed from the relevant :::: piece 6. . Each of the obstacles, ... June 4... because of one of Shao 36 =, and contains enough strength to transfer the head unit 3G when moving 2 = the force to the mass body 51 structure. In the figure head unit 3〇
=單元以及贿齡佈料元，其分顺供1 成H :相對側。因此，耦接器7〇耦接提供於頭支撐件2〇=:Γ 對應的固定部36。 妨件2〇相對側之= unit and bribe-age fabric element, its distribution is 1% H: opposite side. Therefore, the coupling 7〇 is coupled to the fixed portion 36 corresponding to the head support 2〇=:Γ. Hook 2 〇 opposite side
以延伸於Υ軸方 連接導引件60提供於框架1〇之一側 向，並具有耦接器70可耦接的高度。 母耦接方法彼此耦 使得耦接器70相 且容許耦接器70 輕接盗70及連接導引件60較佳透過公 接。於此，耦接器70耦接連接導引件6〇, 6G之χ軸義受到限制， 相對於連接導浙60 it行γ轴移動。 23 1360611 再者’連接導引件60安裒成由質量體si所支樓。於此， 由於連接導引件60於Υ轴方向定向為長的 了 地^^接導引件60，較 不女裝_f㈣5! ’且連接導餅6()讀 之上端之架構。 w貝里蒞w 同時:雛絲姆料7G贿料餅6〇間之 接器7〇m眞地執行γ轴的相對雜。軸承提供於各輕 器70之：® μ i件6〇之溝槽62間之接觸面’例如各耦接 雜之祕P/表面、或下表面。只要軸承最小化執行相對 用^TB B H並容許各雛11 7G平順地移動，可使 用任何熟知的轴承。 件2〇ϋϋ明如上建構之塗佈機操作如下。亦即’當頭支撐 雜下11 7G之—端插人連接料件6G之溝槽62之狀 ΐ連接導軸方向時，_器7G触對應固定部36之端， 二移動Μ二，溝槽&移動。於此狀態下，#各頭單元 各叙接哭％ #方向’且施加反作用力於固定部36時，傳遞到 引件6〇 韻她接㈣之錢接的連接導 反作用力 ，藉由質量體51的動能抵銷 6,以來’根據本發明之塗佈機可利用軟體振動控制單元 ”有連接單元％及質量體51之機械反作用力抵銷單元 24 1360611 50 ’持續地降低χ軸反作用力造成的振動，即使頭單元3〇移 動於Y轴方向。 如上所述’本發明提供抵銷反作用力之裝置、設定此裝置 之質量體之方法、利用此裝置抵銷反作用力之方法、以及具有 此裝置之塗佈機，其利用軟體振動控制單元以及機械反作用力 抵銷單元，因而更完美地降低可移動體X轴驅動時所產生之 反作用造成的振動’因此達到更精確的作業。 —再者，本發明基於軟體振動控制單元降低振動的能力，設 疋構成機械反作用力抵銷單元之質量體之質量，因此最小化質 量體，因而簡化整自動機械及機器結構，並最大化振動降低效 應0 雖然已未說明目的揭露本發明較佳實施例，熟此技術領域 者應明瞭在不悻離本發明巾請專利範圍界定之精神與範嘴下 可有各種修改、添加、及替換。 【圖式簡單說明】 、本發明上述及其他目的、特徵及其他優點，參考詳細說明 並配合伴隨圖式，將更加清楚了解，其中： 圖1為根據本發明實施例之抵銷反作用力裝置之基本架 構之示意圖； ， 圖2為根據本發明輸人修正校正之軟H振動控制單元之 25 1360611 方塊圖； =為根據本發明狀反個力輪錄置之質量體之方 法之流知圖； 圖4為根據本發明抵銷反作用力之方法之流程圖；以及 圖5為根據本發明利用反作用力抵銷裝置之塗佈機之 視圖。 【主要元件符號說明] 1 平台 2 框架 3 可移動體支撐件 4 支撐體 5 可移動體 5a 振動感測部 5a， 振動感測部 6 軟體振動控制單元 6， 軟體振動控制單元 7 質量體 7A 質量體 8 連接單元 9 機械反作用力抵銷 10 框架 15 平台 20 頭支撐件 26 1360611The connecting guide 60 is provided on one side of the frame 1 延伸 and extends to a height at which the coupler 70 can be coupled. The female coupling methods are coupled to each other such that the coupling 70 is coupled to the coupling 70 and the connecting guide 60 is preferably permeable. Here, the coupling 70 is coupled to the connecting guide 6〇, and the axis of the 6G is limited, and moves relative to the connecting guide 60 y axis. 23 1360611 Furthermore, the connecting guide 60 is mounted in a building supported by the mass body si. Here, since the connecting guide 60 is oriented to be long in the direction of the x-axis, the guiding member 60 is worn, and the structure of the upper end is not read by the female _f (four) 5!' and the connecting guide 6 (). w Berry's w at the same time: the young silk material 7G bribe cake 6 之 之 〇 执行 执行 执行 执行 执行 执行 执行 执行 执行 执行 执行 执行 执行 执行 执行 执行 执行 执行 执行 执行 执行Bearings are provided in each of the lighters 70: the contact faces between the grooves 62 of the <RTI ID=0.0>>>> Any well-known bearing can be used as long as the bearing is minimized to perform relative use of ^TB B H and allows each of the chicks to move smoothly. Item 2 The coating machine constructed as above is operated as follows. That is, when the head supporting the interstitial 11 7G is inserted into the direction of the guide shaft of the groove 62 of the connecting member 6G, the _ 7G touches the end of the corresponding fixing portion 36, the second moves the second, the groove &;mobile. In this state, each head unit is connected to the crying % direction and the reaction force is applied to the fixing portion 36, and is transmitted to the connecting member 6 to convey the connection force of the money connected by the (4) by the mass body. The kinetic energy of 51 is offset by 6, since the "software vibration control unit of the coating machine according to the present invention" has the connection unit % and the mechanical reaction force canceling unit 24 1360611 50 ' of the mass body 51 'continuously reduces the yaw shaft reaction force The vibration, even if the head unit 3 〇 is moved in the Y-axis direction. As described above, the present invention provides a device for offsetting a reaction force, a method for setting a mass body of the device, a method for offsetting a reaction force by the device, and the like The coating machine of the device utilizes the soft vibration control unit and the mechanical reaction force to cancel the unit, thereby more perfectly reducing the vibration caused by the reaction generated when the X-axis of the movable body is driven, thus achieving a more precise operation. The invention is based on the ability of the soft vibration control unit to reduce vibration, and the mass of the mass body constituting the mechanical reaction force offsetting unit is set, thereby minimizing the mass body Thus, the simplification of the entire automatic machine and machine structure, and the maximum vibration reduction effect is achieved. Although the preferred embodiment of the present invention has not been disclosed, it should be apparent to those skilled in the art that the spirit of defining the patent scope of the invention is not limited. Various modifications, additions, and substitutions are possible under the scope of the present invention. [Simplified Description of the Drawings] The above and other objects, features and other advantages of the present invention will become more apparent from the detailed description and accompanying drawings. 2 is a block diagram of a soft-H vibration control unit of a modified correction correction according to the present invention; Figure 4 is a flow chart of a method for offsetting a reaction force according to the present invention; and Figure 5 is a view of a coater for counteracting a force canceling device according to the present invention. Main component symbol description] 1 Platform 2 Frame 3 Movable body support 4 Support body 5 Movable body 5a Vibration sensing part 5a, Vibration sensing part 6 Soft vibration control unit 6, soft body vibration control unit 7 Mass body 7A Mass body 8 Connection unit 9 Mechanical reaction force offset 10 Frame 15 Platform 20 Head support 26 1360611
25 Y轴驅動單元 26 固定部 27 移動部 30 頭單元 .35 X軸驅動單元 36 固定部 37 移動部 50 機械反作用力抵銷單元 51 質量體 55 連接單元 60 連接導引件 62 溝槽 7025 Y-axis drive unit 26 Fixing part 27 Moving part 30 Head unit .35 X-axis drive unit 36 Fixing part 37 Moving part 50 Mechanical reaction force canceling unit 51 Mass body 55 Connecting unit 60 Connecting guide 62 Groove 70