TWI356439B - An optical properties restoration apparatus, the r - Google Patents

Description

1356439 IX. Description of the Invention: [Technical Field] The present invention relates to an apparatus and method for improving the reliability and fate of optical characteristics of an optical system by preventing, suppressing, or improving the output light. a deterioration of the optical properties of the optical system in or in the light path of the output light, wherein the optical system is located in a near vacuum region in which the organic component can be decomposed, the degradation being deposited or accumulated in the optical system Light is caused by carbon on the surface, the light reflecting surface, and the light emitting surface (generally referred to as the "light emitting surface"), and the surfaces face the vacuum region. More specifically, the present invention relates to an optical property restoring device and a method of using the same, and the use of the optical property restoring device to improve photon characteristics of various optical systems located outside the light transmissive window of various optical devices.荨 Various optical devices use high photon energy light (such as conventional ultraviolet light or vacuum ultraviolet light) to generate light transmission, refraction, reflection, spectrum generation, and interference. Further, the present invention relates to an optical system in various optical devices and a method of using the same. These optical systems improve the optical properties of the light-transmissive windows located in various optical devices. These various optical devices produce light transmission, refraction, reflection, spectral generation, and interference, etc., and the optical systems are located in high photon energy light. In the light path (for example, conventional ultraviolet light or vacuum ultraviolet light). More specifically, the present invention can be applied to an optical system equipped with a plurality of lenses, windows, interferometers, primary masks, and reflecting mirrors, and to high photons equipped with such optical systems. In the energy lamp. In addition, the present invention can be applied not only to optical measuring instruments (for example, 92980.doc 1356439 spectrometer, fluorometer, interferometer, diffractometer) but also to a standard light source using vacuum ultraviolet light to excite chemical reactions. The light source, the light source used in printing plates and photographic applications, and various optical instruments using various light sources for experimental applications. [Prior Art] Fig. 14 is a view for explaining a case in which a component of a microwave excited hydrogen ultraviolet lamp as an example of a conventional optical output device to which the present invention is applicable is used. This device is described in Non-Patent Publication No. 4, which was written by "a and R. Samson, by 〇f (4), published in 1967 by Nebraska, Unc〇in".

Ultraviolet Spectrosc〇py", page 159' Figure 5 %. The microwave oscillator 4 embodiment has a "seal tubular assembly" having two ends made of the same electrically conductive material. The inner diameter and length of the tube depend on the frequency of the microwave used and the electromagnetic field distribution of the microwave oscillator to be excited. The microwave tuner tuner 18 is a tubular component which is an essential component of the microwave oscillator, which allows adjustment of the microwave electromagnetic field distribution of the microwave oscillator, and its inner diameter allows it to surround the discharge tube. Inserted in a manner concentric with the end surface of the microwave oscillator 4, along the x-axis of both, and structured to slide in the "heling axis direction while maintaining the electric conduit as the microwave oscillator 4. The same system as the microwave oscillator 4, the material used to form the tuning benefit 18 is copper or brass. An embodiment of the function of adjusting the microwave electromagnetic field distribution by the tuner 18 is to adjust the insertion depth while generating the discharge plasma 7, thereby placing the microwave concentration 6 in the desired generation position. In addition, the discharge tube 1 is mounted in such a manner that it passes through the two oscillators of the microwave oscillator 4, and the movement of the tube 4 is tied to the swelling axis of the discharge tube 1 (the system is located in the micro-^ The largest electric field is generated in the 膛 axis, but it does not necessarily

Although the cross section of the discharge tube i is circular, it is not square. j J &# force is used as a vacuum boundary ' as a flow path of the discharge gas, and as a space for generating discharge electricity. In the example of Fig. 14, the space for generating the discharge plasma 'the inner tube of the conductor extends along the discharge tube 1 from the end surface of the microwave vibration m to the inside of the microwave (four). According to the crucible, the discharge plasma 7 can be generated in the space between the end of the microwave vibrator spectrometer 18 and the end of the aforementioned inner tube. The microwave pulsator 4 is interconnected with a microwave supply connector 5 which supplies a microwave of material. Here, the connection (4) is coaxial in shape, but it may also be of the waveguide type. Whether it is a coaxial cord or a coaxial tube, it can serve as a transmission feed path to the coaxial connector. The flange 17 is attached through a beak ring 13 for securing the lamp to the correct position on the end of the discharge tube at the side of the microwave oscillating state tuner 18. The aforementioned flange 17 has an opening at the center thereof, the inner diameter of which corresponds to the inner diameter of the discharge tube, so that the light 0 emitted from the discharge plasma 7 in the axial direction of the discharge tube 1 is allowed to be placed in the foregoing. The light transmissive window 8 of the aperture card of the flange 17 has two functions. One of them serves as a vacuum boundary between the inside of the discharge tube 1 and the environment. The second function allows the light emitted by the discharge plasma 7 to be drawn outside the vacuum. The aforementioned microwave oscillator is described in detail in Non-Patent Publication 2, which is written by E. L. Ginzton, "Microwave Measurements" published by McGraw-Hill, New York, 1957 92980.doc, 1356439. The discharge lamp having the above configuration has the problems described below, and the definition of the terms used will be clearly explained before the explanation. Vacuum ultraviolet light has a wavelength range of 0-2 to 200 nm. Light in this range will be referred to as ultraviolet light or vacuum ultraviolet light. Conventional UV wavelengths range from 200 to 380 nm (see "Dicti〇nary 〇f" by Baifukan

Physics" and "Rika" published by National Observatory of Japan

Nenpyo"). In Fig. 14, 'is to distinguish the surfaces of the light-transmitting window, the surface facing the discharge electrode 7 should be referred to as the inner surface 10, and the surface on the side should be referred to as the outer surface 11. Problem of deterioration of optical characteristics outside the light-transmitting window In Fig. 14, when the discharge plasma 7 generates light, especially ultraviolet light and vacuum ultraviolet light, it will illuminate through the inner surface of the light-transmitting window 8 to wear The light transmissive window 8' passes through and exits from the outer surface U of the light transmission window 8. ^ When the field emits ultraviolet light or vacuum ultraviolet light in the clothing environment, causing the light to absorb oxygen, carbon dioxide, water vapor and the like, it is generally shown on the left side of the flange 17 as shown in FIG. There is a mechanism to help maintain the vacuum outside the light transmissive window 8. The area in which the vacuum is maintained is hereinafter referred to as the "vacuum area". If you are here, you can use any of the various vacuum pumps as a mechanism to maintain your true work. Although there are a variety of suitable oil-free dry pumps (which emit almost no organic gases), the rotary pump is the most common, and the vacuum zone 14 contains the oil used in the pump. 92980.doc 1356439 Organic gas produced by steam. In addition, stainless steel or rubber-knee seals (such as 〇-rings) are also included in the vacuum zone 14, and depending on the application, t Μ may contain money (4) components. For example, county = domain 遽, 遽 器, light transmission window, mirror table, or other positioning elements =

All materials in the second vacuum zone 14 on Sr (ie, these good steels..., 0-rings and other sealing materials, optical components: 2: adjustment mechanism, and similar materials) should be oil-free (1 tone) The bright person itself should hardly emit any organic gas). ~ In the case of the semiconductor industry 'Because the processing size (the degree of circuit) is getting finer and finer, the wavelength of the exposure pattern used to fabricate the circuit = (4) the vacuum material. For example, for this: the wavelength of a denier argon excimer laser used as a light source is 193 ev when converted to energy, but in recent years, the development of laser stepper devices has been able to produce 157 nm. wavelength. In practice, however, it is difficult to avoid the emission of organic gases in the vacuum region 14, which may be caused by various factors, such as the 'defective dyeing of the sample of the mechanical transmission structure, the gas from which the gas rings out. The gas is released from the plastic parts, the degreasing or cleaning work of the parts is insufficient, or the 3 is dyed by the A & Therefore, in practical applications, it must be considered that organic gases are present in the aforementioned vacuum region. The organic gas in the vacuum region 14 has a specific probability of being absorbed on the outer surface 11 of the light-transmissive window 8 . This rate of absorption varies with the material (which includes/transmission of the type of organic gas such as the chimney and 6 hai), but the absorption itself is absolutely present in the image of 92980.doc 1356439 itself. When the organic gas is absorbed on the outer surface 11, the ultraviolet light (especially vacuum ultraviolet light) generated by the plasma will illuminate the organic gases, thereby directly exciting the organic gas molecules and promoting them to the active status. In this way, a reaction occurs which takes out hydrogen (in the dehydrogenation reaction, which is a constituent element of the organic gas), and finally the absorbed organic gas is converted into carbon (graphite). When this state is reached, it is no longer a gas, but a solid which itself adheres and accumulates on the outer surface u outside the light-transmitting window 8. Then, the carbon accumulation will absorb the new organic gas, and they will be converted into carbon after being irradiated by ultraviolet light (especially vacuum ultraviolet light), so that it will continue to grow. The outer surface U of the window 8 is covered by a carbon film. Since the carbon is black, it absorbs light of various wavelengths' and as the carbon continues to accumulate on the outer surface, the transmittance through the light transmissive window 8 becomes smaller and smaller. Here, for the convenience of explanation, we assume that the organic gases are hydrocarbon gases, and that the nitrogen removal reaction causes them to be converted into graphite. However, in practice, the organic gases T can include other elements than hydrocarbons. For example, oxygen, gas, iodine, fluorine, chlorine, etc., and like hydrocarbon gas, these organic gases can be absorbed on the outer surface 11 of the light-transmitting window 8, and then transmitted through ultraviolet light (especially vacuum ultraviolet light). The effect is converted and residual non-gas components. Therefore, strictly speaking, the growth part is not graphite, but an amorphous solid with carbon as its main component. For the purpose of illustrating the invention, the solid consisting essentially of carbon should be referred to as "carbon." The phenomenon of carbon growth requires the absorption of organic gases and the use of ultraviolet light (especially 92980.doc -12-1356439 vacuum ultraviolet light) to illuminate it. As the carbon continues to accumulate, the intensity of ultraviolet light (especially vacuum ultraviolet light) emitted from the outer surface 11 which already has carbon accumulation is significantly weakened. Carbon will continue to grow until all light intensity has disappeared. At this time, a new hydrogen removal reaction cannot occur, and the accumulation of the carbon film stops. Accordingly, this method is not a method in which the carbon film can be made indefinitely, and once the phenomenon is stopped, the film thickness of the limit is reached. It is understood that the phenomenon of carbon growth on the outer surface 11 of the light-transmitting window 8 does not proceed quickly. This problem is one of the problems caused by the smaller and smaller transmittance of the light-transmitting window 8 after a long period of time. In spectral imaging applications, when the amount of light from the source is reduced, it will drift, affecting the accuracy of the measurements, in applications involving surface treatment with ultraviolet light, due to weakened illumination. A problem arises when the relationship is insufficient. One way to solve the problem of carbon growth is to try to obtain an oil-free vacuum area. 14 However, once the organic matter has contaminated the vacuum area 14, the cleaning process is very difficult. Accordingly, conventional countermeasures for reducing the transmittance reduction caused by carbon accumulation on the outer surface of the light-transmitting window 8 involve removing the carbon by using a cleaning agent or a grinding process to restore the light-transmitting window 8 to its original state. Or completely replace the light-transmissive window 8. In the prior art, the light transmittance of the light-transmitting window 8 is reduced (i.e., deteriorated) as a determining factor for the life of the lamp. A lamp that has reached the end of its life will clean or replace its light-transmissive window 8, which requires breaking the vacuum zone 14 or the vacuum inside the lamp. This operation takes several hours, and the lamp cannot be used during this period. 0 92980.doc -13 - 1356439 Next, the conventional countermeasure for responding to the deterioration of the light transmission window due to carbon growth will be explained. The technique disclosed in Japanese Patent Application Laid-Open No. Hei. _ In this example, the source of light is a hydrogen lamp. When hydrogen gas is introduced into the 'discharge g', the halogen is sealed therein as the elemental-organic-based compound in which the square of the lamp is sealed. This means that an organic halogen substance has been introduced into the discharge region. Then, when the lamp is operated, the organic material decomposes and causes a lubricated material (mainly carbon) film to adhere to the inner protective wall of the discharge tube. The inner retaining wall functions as the light transmissive window, and adhering the material to its retaining wall results in a reduction in the amount of light generated. In the case of a countermeasure, the above-mentioned patent publication, the pre-shipment treatment of the lamps, forces a carbon film to adhere to the area as the light-transmitting window, where the carbon system is supposed to be during the operation of the lamp. The growth 'follows' will not cause any additional carbon growth during the normal operation of the lamp. This technology takes into account the fact that the generation of organic materials is limited and that this countermeasure can effectively create an environment in which no new growth occurs during the operation of the lamp. However, as explained above for the vacuum zone 14, if the device used must be open to the environment or vacuumed (for example, in a spectral imaging application where the sample must be replaced, the optical component must be adjusted. In the middle or during the surface treatment, the work piece must be replaced, etc., then the & ' specification requires no organic pollution during the assembly and adjustment process, but it is actually difficult to avoid such pollution, so It is not possible to use the tool of the plate treatment. The purpose of the plate treatment is not only different from the present invention, because the surface of the substrate must be under saturated conditions, so it is assumed that the water system is in a liquid state under the reaction conditions. Therefore, the method can only be used in an environment near near normal atmospheric pressure. Under vacuum conditions, it cannot perform optical 7L cleaning of light-transmissive windows and the like, and it does not solve the problem that must be broken when vacuum is broken. . Although the explanation so far is limited by the phenomenon occurring on the outer surface 11 of the light-transmitting window 8 but such a carbon growth phenomenon is not limited to the outer surface of the light-transmitting window 8. Usually, the phenomenon of carbon growth occurs on the surface of an object located in the vacuum region 14 which is illuminated by ultraviolet light (especially vacuum ultraviolet light) emitted from the light transmission window 8. As long as the conditions under which the organic gas appears and the conditions under which the ultraviolet light (especially the external light) occurs simultaneously, this phenomenon cannot be avoided. The "object" referred to in the explanation of the month includes the use of switching the spectroscopic application. a mirror of the light path; a filter; a condensing lens; and a diffractive element used in spectroscopic applications; a concentrating lens; and various filters and mirrors used in surface treatment applications, in other words, Any of a variety of optical components. In the following, any of these objects will be collectively referred to as "optical components". When carbon accumulates on the optical components, serious problems are caused by lowering the light transmittance and the light reflectance. In fact, it reduces or causes a total loss of functionality of the device used in the vacuum zone. In the past, in order to solve such light transmission and reflection degradation, it was necessary to replace it with a new photonic element. However, this method leads to very high maintenance costs, and the device cannot operate during the time when maintenance is necessary. The problem of lamp life caused by the deterioration of the light-transmitting window 8 is not limited. 92980.doc • 16-1356439 The microwave-excited hydrogen ultraviolet lamp described in the above example has the same problem in the following lamps: use Lamps of He, Ne, Ar, Kr, Xe, 02, N2, D2 (heavy molecule), Hg, etc. use high frequency discharge, arc discharge, glow discharge, inductive barrier discharge, or flash discharge in their discharge mode A lamp or a halogen or carbon lamp that uses a current to heat the filament as a light-emitting method. Problems of deterioration of optical characteristics in an optical system The problem of reduction in light transmission characteristics of short-wavelength ultraviolet light is not limited to deterioration of optical characteristics outside the light-transmitting window, and deterioration of optical characteristics in the light-transmitting window. In recent years, in order to obtain a preferable light transmission property of short-wavelength ultraviolet light, it has been developed to use Si〇2 as the aforementioned light-transmitting window. In addition, the problem of mercury vapor lamps, which use quartz glass internally and lose clarity, is more serious than before. The function of quartz glass in a mercury vapor lamp is used as the vacuum boundary inside the lamp, and can also be used to transmit the ultraviolet light generated by the mercury light, but the loss of sharpness deteriorates the light transmission property, and A factor that determines the life of a lamp. For example, in the patent application No. Hei 5_325893 (patent=opening 4), it is proposed to use a light-emitting tube as a metal vapor discharge arc tube to solve the problem of losing clarity, which adopts a surface grain size at The rough inner surface of the glass bulb below 丄 micron. This will prevent the crystallization of the arc tube (loss of clarity), even if it has been operating for a long time - the same time, thus preventing the luminous flux (illuminance maintenance rate) from falling, making the shadow type display a long time It can still maintain bright images and words. Quality display effect. ° 929S0.doc •17· 1356439 This technology has been applied to quartz glass or kaolinite glass used in arc tubes, and although it can also be applied to conventional UV-light applications in the 250-360 nm wavelength range. However, the reduction of the transmittance of quartz glass used for vacuum ultraviolet light at a wavelength of 190 nm is remarkable. Further, in the Japanese Patent Application Laid-Open No. Hei 3-77258 (Patent Publication No. 6), a technique for a 254 nm ultraviolet normal pressure mercury vapor lamp is disclosed, in which the inner surface of the synthetic quartz glass is coated with 1 to A solution of 3% of metal oxide particles (having an average particle diameter of 1 μm or less, which in these examples consists of a metal oxide having an average particle diameter of 20 / im). Further, in Japanese Patent Application Laid-Open No. Hei 8-2 12976 (Patent Publication No. 7), an arc tube (which is composed of a quartz glass tube which is sealed with mercury inside each end) is disclosed. a discharge lamp sealed with a plurality of electrodes, and a thin film coating composed of ai2o3 is used inside the tube, wherein the film is thicker than other regions at the inner surface of the arc tube near the center of the tube, The thick film region on the inner surface of the arc tube is 1/3 to 1/2 of the length of the effective light emission length (the distance between the electrodes on either end of the arc tube), and the thick film is as described above. The film thickness in the region ranges from 〇_2 μιη to 0.3 μηη, while the film thickness in other regions ranges from 0.1 #111 to 〇15 μιη. However, this prior art is related to quartz glass (especially for low-pressure mercury discharge; quartz glass in k), and it adjusts the thickness of the barrier film in which the mercury molecules are located, as the treated mercury is deposited on the inner wall of the arc tube. The method of lowering the transmittance of the quartz glass and causing the discharge lamp to become dark (which further reduces its irradiation efficiency). 92980.doc -18- 1356439 Furthermore, the lower limit of Si〇2 which transmits good light transmittance is about 2 〇〇 nm, and the shorter the wavelength of vacuum ultraviolet light (wavelength is less than 200 nm), the more obvious the light transmittance decreases. Furthermore, by using extremely short wavelengths of vacuum ultraviolet light near 150 nm (for example, wavelengths used for high-energy fluorine lasers), not only the aforementioned decrease in light transmittance occurs, but the material cannot be used in this application, and Will lose its clarity. In addition, in view of the fact that the transmittance of the synthetic shisha glass is significantly reduced in the range of ultraviolet light passing through the window material for illuminating the light, the patent application No. Hei 8-315771 (patent In publication 5), a fluorine-doped technique is disclosed for synthetic alumina glass, the goal of which is to improve the operational life. However, the use of a fluorine compound to dope the alumina glass base precursor allows a transmission range of only about 5% in the wavelength range of 160-190 nm, and it is not used in the low wavelength of vacuum ultraviolet light. Accordingly, an alkaline earth metal halide material (e.g., CaFy LiF, MgF2, etc.) is generally regarded as a light transmission window precursor when it is necessary to pass ultraviolet light in a vacuum ultraviolet range. A convenient example in the prior art is the aforementioned microwave excited hydrogen ultraviolet lamp, which produces vacuum ultraviolet light at a wavelength of 122 nm. The only known materials that can be used as the light-transmitting window are CaFz, LiF, and MgF2. Since the light transmittance of LiF and CaF2 is significantly reduced from the center of the color, the most commonly used is MgF2. However, no report has revealed a solution to the loss of clarity. That is, when magnesium fluoride is used as the material for the light-transmissive window, the life of the window of the 9280.doc -19-1356439 window is lower than that of other window materials, and compared with lamps using other window materials. Its life expectancy is only about half or less. When light having an S sub-energy higher than an absorption wavelength of a material used in the light-transmitting window 8 (especially light in vacuum ultraviolet light) is used, when light originating from the discharge electropolymer is irradiated on the light-transmitting window 8 At this time, the view f8 will have defects, resulting in a so-called color center, which will reduce the light transmittance. This phenomenon is a common phenomenon of CaF2, LiF, MgF2, and other soiled metallographic materials, and is caused by a slight shift of the fluorine atom from its correct position in the crystal lattice. Further, all of the above-mentioned conventional techniques have been solved in connection with the problem of synthetic quartz, in particular, a synthetic quartz optical system using conventional wavelength ultraviolet light as a light source. No one has proposed a practical technique to effectively prevent the problem of light transmittance passing through MgF2. The material used in the light transmission window used for the 122 nm wavelength vacuum ultraviolet light generated by the MgF2 microwave excited hydrogen ultraviolet lamp. Due to this situation, when the transmittance is lowered, the only solution is to replace the light transmission window. In the prior art, the above-described light transmission window 8 is subject to the determinant of the life of the deteriorated lamp. In this prior art, once the life of the light transmissive window 8 of the lamp reaches its end, it must be replaced with a new light transmission window to restore the light emission intensity of the lamp. Replacing the light transmissive window 8 requires breaking the vacuum of the lamp and requires several individual labor hours during which the lamp cannot be used. In addition, the output intensity of the light source is constantly changing during the replacement cycle. Whenever the light transmission window is replaced, the light intensity correction operation is required. Therefore, in applications that require long-term monitoring, these lamps have difficulties in use (such as those used in environmental measurements). SUMMARY OF THE INVENTION 92980.doc • 20-1356439 The development of the present invention reflects problems associated with prior art, and relates to a method for recovering optical systems for transmitting light transmission, diffraction, reflection, spectrum generation, interference, and the like. Apparatus and methods for effecting and utilizing such optical characteristics in various devices of high photon energy light, such as conventional ultraviolet light or vacuum ultraviolet light. In particular, it is an object of the present invention to prevent or avoid degradation of the light (4) system that determines the life of the aforementioned devices, and thereby reduce the frequency of maintenance operations (e.g., window replacement) and reduce the cost of such operations.

More specifically, in accordance with a first preferred embodiment of the present invention, the object is to provide a device for preventing or suppressing degradation of such optical systems and a method for use thereof, thereby reducing (4) repair operations (10) such as such optics The frequency of the replacement of the system, and reduces the cost of such operations by preventing or inhibiting the accumulation of carbon on the surface of the optical system (e.g., the optical system located outside of the light transmissive window 8) (for example, accumulated in Figure 14) The outer surface of the light transmissive window 8 is shown above). An additional object of the present invention is to prevent or inhibit carbon build-up in a vacuum

The light path in the area ^ the illuminated surface of the optical element and the I-light surface make it possible to extend the life of the optical instrument and improve the reliability of the devices. In addition, according to the second preferred embodiment of the present invention, after reflecting the problems described in the prior art, the object is in various devices using a combined effect of light transmission diffraction, reflection, frequency, and interference. A light drying system and method for use therefor are provided in a light path of a high photon energy source such as plasma light and vacuum ultraviolet light. The optical system can suppress the optical instrument (for example, the aforementioned lens, window, interference film, cymbal, main mask, 92980.doc -21 · 1356439

Reflective mirrors and class *|>Twisted V-cover WW-like first-hand instrument, all of these instruments are located inside the light-transmissive viewing frame 8 'For example, in the light-transmitting window 8 shown in Figure 14 The inner surface 10 is degraded so that it can maintain a stable and very similar light wheeling intensity after the passage of time, and utilizes various optical systems to extend the life of the device. [First Preferred Embodiment] In order to solve the above problems, the inventors of the present invention continued to study the following route. First, in the first preferred embodiment, the deterioration of the outer surface of the light-transmissive chamber 8 facing the vacuum region 丨 4 (e.g., the outer surface 11) will be analyzed in detail. The apparatus used in the experiment was the apparatus shown in Fig. 14, in which the light-transmitting window 8 was attached to the electric (four) exposed side of the flange 17 through the shaped ring 13. The analysis is performed on the outer surface S11 of the light-transmitting window 8, that is, the surface facing the vacuum region 14, which is a surface that emits ultraviolet light. Since no deposit is found on the inner surface 10 on the opposite side, no detailed analysis of the light transmissive window 8 material conventionally used for the beta magnesium fluoride (MgF2) single crystal system is performed on the surface, and The crystal axis (c-axis) is perpendicular to the surface of the transmission window. The crystal size is thick and thick in the inch. The uv grade product manufactured by the crystal system Ohyo Koken Kogyo Co., Ltd. Several such crystals can be obtained from the same batch, and the crystal quality and surface conditions of the crystals used are the same. The crystals can be analyzed after the 4 曰a body is used in the lamp, and every effort is made to eliminate any erroneous predisposing factors caused by any changes in the batch. In this experiment, the first work was to observe the outer surface of the light-transmissive window 8 92980.doc -22- 1356439 11 ' using an optical microscope in the center φ8 mm area (the ultraviolet light has penetrated the area) to observe the possible adhesion. Any membranous material. Next, using plastic ore to remove any adhesive material, a weak material is adhered to the outer surface of the crucible. Then, an elemental analysis is performed on the adhesive material. ΕΡΜΑ (Electron Detection X-Ray Microanalyzer) can be used to perform elemental analysis on the outer surface of the light-transmitting window 8 . (Analytical conditions: accelerating voltage 丨5 kv, irradiation current 5Ε_8Α, measurement method: qualitative analysis, finite analysis, reflection analysis.) After the ΕΡΜΑ analysis, we found that the center is φ8 mm (the ultraviolet light has penetrated the area) A lot of carbon will be detected. The donut-shaped area outside the Φ 8 mm area where the ultraviolet light has penetrated will fall in the shadow of the flange 17, and the area will not have any ultraviolet light penetration, but in the shape of the doughnut Carbon contamination levels are detected in the zone. The "pollution level" in this Ερμα analysis refers to a weak carbon detection signal that is generated even when analyzing a roughly clean surface. Therefore, carbon sticking that would cause such an nickname cannot be avoided. Accordingly, the measurement limit for carbon in the enthalpy analysis will depend on the carbon contamination level of the analytical device. When the carbon signal-number from the center of the φ 8 mm area is compared with the level of the pollution signal, we find that the former is significantly higher, which confirms that a film is present on the outer surface of the light-transmitting window. Carbon accumulation. As described above, reference is made to FIG. In the illustrated apparatus, the mechanism of carbon growth involves the presence of organic gases in the vacuum region 14 and when the organic gases are absorbed on the surface 11 outside the smectic light, then the vacuum ultraviolet light penetrates. When the light is transmitted through the window 8, the organic gases are subjected to a hydrogen removal reaction, which is converted into carbon, which accumulates on the outer surface 11. 92980.doc •23- 1356439 When the light-transmissive window 8 continues to be used in the above environment, the carbon will continue to accumulate ▲, which will reduce the light transmittance as time passes. Accordingly, since the transmittance of the light-transmitting window 8 has become smaller as compared with its initial state, it is apparent that a specific mechanism is required to remove the accumulated carbon from the outer surface W. Since we have found that the membranous carbon accumulation on the outer surface U is the main cause of deterioration of the light transmission window, the inventors of the present invention continue to study countermeasures, which in turn derives the complete result of the present invention as described below.

The inventor of the present invention has experimentally confirmed the solution to the problem described below. The carbon raw material is the organic gas, but it is virtually eliminated by the beneficial method. In addition, if it is not irradiated by vacuum ultraviolet light, then no hydrogen removal reaction will occur, and the device will not function as a light-emitting device. The location of the carbon deposits will exactly match where the vacuum ultraviolet light passes to illuminate. The vacuum ultraviolet light directly excites the organic gases, forcing a hydrogen removal reaction, but this high photon energy not only excites the organic gas, but also many kinds of molecules can (4) emit and enter an active state.

Referring to FIG. 1 as an example, the light output device in this example is a 122-wavelength vacuum ultraviolet light output, (4) (4) hydrogen injection method, and the photon energy of the vacuum ultraviolet light is 1 G. 2 e ^ photon energy of this level It will excite oxygen, h2 helium gas (vapor), and can produce groups with strong oxidizing power. The reason for maintaining the vacuum region 14 is because atmospheric oxygen, carbon dioxide, water vapor, and other components absorb the vacuum ultraviolet light and weaken its strength. Accordingly, a vacuum pump is used to eliminate the absorption "free (i.e., atmospheric composition) to create a vacuum region 14. 92980.doc -24- 1356439 However, even if these are atmospheric components, because they contain 〇2, water vapor and similar ingredients, we have found that appropriately reducing their concentration (reducing the pressure) can produce oxidative capacity. The group does not substantially weaken the vacuum ultraviolet light. When the light output device operates under the condition that the concentration-adjusted atmospheric components coexist and when the rear-stage vacuum region 14 is designed, the carbon adherend on the outer surface 11 of the light-transmitting window 8 can be removed. Additionally, carbon adhering to the surface of all of the optical components within the vacuum region 14 can be removed. The reason why carbon can be removed in this way is that while the carbon adheres to the surface of the light-transmissive window 8, the groups also undergo carbon decomposition and removal operations, and the groups are decomposed and removed. The rate of carbon removal exceeds the rate of carbon formation. Since the decomposition of carbon by a group converts carbon into volatile molecules such as carbon dioxide and water vapor, the vacuum pump can be used to quickly remove the molecules from the system. The group produced in this case is an elemental oxygen and ozone generated by exciting oxygen molecules, an OH group generated by exciting water vapor, and the like. Further, when the light output device operates in the presence of the concentration-adjusted atmospheric components and when pre-existing carbon is deposited on the outer surface 11 of the light-transmitting window 8, the carbon is gradually decomposed and Remove, and finally, all of the carbon is completely removed and the light transmissive window 8 is restored to its original transmission rate. The light output device then operates with optical elements that already have carbon accumulation without having to operate the post vacuum region function and remove carbon from the surfaces of the optical components that have been located in the vacuum region 14. According to the discovery of the present invention, it is possible to avoid deteriorating the transmission window of the light output device, so that the light intensity generated by the light output device is not weakened, and the absorption function of the light does not hinder the target. The partial pressure of the job. Specifically, if oxygen is present, basically the upper limit should be 10 mt rr (2 () mt 〇 rr or less). If the partial pressure level is exceeded, the oxygen absorption of the vacuum ultraviolet light will reach a position that cannot be ignored, and it will begin to impede the functional target of the vacuum region 14. However, if the length of the light path through the vacuum region 14 is very short, then the effect of the oxygen concentration at the upper limit can be ignored. The precise setting of this upper limit may depend on filling the vacuum zone 14 with a particular gas partial pressure and checking if these functional targets are obstructed. To be sure, the degree of vacuum ultraviolet light can be checked to check the amount of vacuum ultraviolet light. The lower limit of the gas partial pressure should be set above the processing capacity of the load to be used. Here, the "load" refers to the rate at which the carbon accumulates on the outer surface 11 of the light-transmitting window 8, depending on the type and concentration of the existing organic gas, and the vacuum ultraviolet light passing through the light-transmitting window 8 Strength of. "Processing power" refers to the rate at which the groups generated by the vacuum ultraviolet light excitation of the gas can decompose and remove carbon. The experiments carried out by the inventors of the present invention cover various situations of the vacuum region 14, some of which are unknown, for example, in the case of utilizing the vacuum region 14 produced by the conventional accelerated molecular pump and the dry pump exhaust system. The lower limit of oxygen is about (4) to mtG1T. If there is this level of oxygen, it will exhibit sufficient processing power for this load. Water vapor can provide much higher processing capacity than oxygen, and its actual lower limit should be in the order of 0.005 to 〇·〇ιtorr. In order to accurately set this lower limit, oxygen can be used to fill the vacuum actually used. 92980.doc -27-1356439 is characterized in that at least a film thickness of 2-20 is formed on the light irradiation side (inside) of the optical system. A protective film of nm prevents the fluorine atoms from remaining from the surface of the optical system. The difference between the present invention and Patent Publication 4 will now be explained. ◎ Patent Publication 4 relates to a mercury discharge lamp in which mercury is sealed in an arc tube. This technique prevents mercury from adhering to the inner wall of the curved tube by a 0.1 private 111 to 0.15 //111 aluminum protective film or the like. On the contrary, the present invention relates to a vacuum ultraviolet light range in which an ultra-thin film of 2 nm 2 〇 11111 is coated on a surface irradiated with vacuum ultraviolet light to prevent fluorine peeling, which is used to replace the coating layer. The initial degradation caused by optical characteristics. The reason for limiting the film thickness to 20 nm or less is that if it is thicker, it absorbs the vacuum ultraviolet light, making it impossible to maintain its function as an optical element. The lower limit of 2 n m or more is because it is necessary to ensure uniform coverage of the protective film on the surface of the crystal. Since 8丨02 or human 1203, Mg0, Ti〇2 or Zr〇2 has a molecular diameter of about 1-nm, if the thickness of the coating is less than at least 2 molecules, it cannot be provided on the surface of the crystal. A uniform protective film to achieve the function of the present invention. When the film thickness is sufficient, although the target is to protect the surface of the optical system, however, because of metal oxides (e.g., 81 〇 2 or au 〇 3, Mg 〇, Ti 〇 2

Zr〇2) is not an intrinsic material that allows vacuum ultraviolet light to pass through, so the presence of such protective films causes the vacuum ultraviolet light to be absorbed within the film and weakens through the substrate material as shown in FIG. The amount of ultraviolet light. At 2 〇 nm thickness 92980.doc • 33· 1356439, the transmittance is only 1% of the transmittance without any film. The initial transmittance of not (4)% greatly degrades the optical characteristics of the base material' and at the extent of the deterioration, it cannot be used as an optical system, and may be provided by absorbing the ultraviolet light to deteriorate the protective film itself. And it may cause it to peel off from the surface of the light system or cause other damage due to the degree: 虞. Accordingly, the thickness of 12 nm or less (preferably, less than 1 nm) will maintain the light of the basic precursor (4), so that in the worst case, the optical characteristics of 10% or more can be maintained. Accordingly, due to the relationship of absorption of infrared light, it is expected that a film thickness exceeding 2 Gnm may not provide the intended function of the optical system. Further, when the lock is oxidized, the fluorine atoms are simultaneously peeled off. Therefore, it is preferred to form a film thickness of 2-20 nm at least on the light-irradiating side (inner side) of the optical system (preferably 2 · 12 nm, more awkward system 2 ι〇 (4), a protective layer consisting of Si〇2 or a metal oxide to prevent the fluorine atoms from being peeled off from the surface of the optical system. Simultaneously suppressing fluorine atom peeling and suppressing oxidation of the surface of the aforementioned optical system to avoid deterioration of light transmittance of the optical systems. Various gas phase growth methods (for example, vapor deposition method, ion plating method, CVD method) And a similar method) can be used to form the thin film protective film, but the preferred film forming method is ion beam sputtering and plasma CVD, because these methods can be produced along the grinding process of the optical systems. The dimples and projections produce a very uniform film thickness. The first suggestion of the present invention relates to an optical system containing a vapor compound, 92980.doc - 34-1356439, having a plurality of surface faces and exposed to an optical instrument a plasma in the inner region where the plasma is located, wherein a 2 nm to 20 nm protection consisting of a highly plasma resistant material is formed on the surface of the fluoride compound exposed to the plasma. This proposal can suppress the decrease of the light transmittance of the optical system by suppressing the peeling of the fluorine atoms or suppressing the oxidation of the surface of the optical system, or the light transmittance may be deteriorated due to the plasma environment.

In this case, the foregoing protective film may be any metal oxide such as si〇d Al2〇3, Mg0, Ti〇2, Zr〇2, which is the same as the above protective film by forming the optical system The foregoing protective film, wherein the optical system is composed of a single crystal fluoride material, the crystal axis of which is along the direction in which the light is irradiated, and (4) the vertical surface of the protective crucible is coated with a scratch or metal oxide. It is possible to prevent deterioration due to vacuum ultraviolet light irradiation as the basic matrix time elapses, which is a trade-off due to the initial deterioration of the fluoride optical system due to the coating.

In addition, since the above-mentioned metal oxides have a higher resistance to plasma than the other metal oxides, it is possible to prevent fluorine peeling or inhibit oxidation of metal atoms, and because of itself It is a telluride. Therefore, when it is used as an optical system made of a fluoride material, it can be prevented from further deteriorating with the mother's "degraded" after it is subjected to initial deterioration. "UV light" causes deterioration. I & π..., ^ The second recommendation of this month is based on the fact that the elements of the elements are used, which will use the optical properties of the aforementioned opticals, and that; 92980.doc -35-1356439 A 2 nm-20 nm protective film consisting of a metal oxide (which is selected from Si〇2 or Al2〇3, MgO, Ti02, Zr〇2) is applied to an optical system in advance. Suppressing the detachment of a structural element from the surface of the basic matrix or oxidizing on the surface of the basic matrix due to long-time exposure of the vacuum ultraviolet light or plasma exposure of the basic matrix; and incorporating the optical system into one Having a vacuum ultraviolet light source or a plasma light source (the photon of which is about the absorption wavelength of the basic matrix of the optical system). According to the present invention, the initial deterioration of the characteristics due to the metal oxide protective film is caused by The film can suppress the basic matrix of the optical system caused by the vacuum ultraviolet light irradiation or being exposed to the electropolymer to cause a plurality of elements to be peeled off from the basic matrix or oxidized on the surface of the basic matrix. A situation in which the day and the day are deteriorated, which means that after the first start of operation, the optical output of the basic matrix will not be further weakened, so that the reflecting mirror of the aforementioned light output elements can be extended. The life of the light-transmissive window. This method can also extend the interval between the replacement windows of the light-transmissive windows or the mirrors to improve the operating speed of the light-emitting elements and reduce the operating cost. In this case, It is only necessary to use a light source that provides sufficient light output as a component to compensate for the initial deterioration of the optical system due to the aforementioned protective film, which makes it possible to extend the life of the component without causing a decrease in the transmittance of the entire system. (transmittance, reflectance) - In the case of Putian, the optical system was previously coated with the above protective film to suppress the exposure of vacuum ultraviolet light or bare in the electric monnel, as a result of the lapse of the test. It will be stripped or oxidized with (4) ^a a lot of elements from the mother body, and the light is compensated by the light output of the π piece due to the protective film. The initial deterioration situation. For example, the light output element t of the light source is used to: the above optical system (for example, broken, coated on the side.... light transmission window or reflective mirror) ), you can get a stable light output for a long time, and can be used for the light output component, and maintain the stable light transmittance that will not be reduced. = Use this to stabilize the control operation of the component and measure the sensitivity ^. Embodiments & [First Preferred Embodiment]: In the following examples, a first preferred embodiment of the present invention will be described with reference to the drawings, which can suppress or shift from the outer surface U of the light-transmitting window 8. In addition to the stone anti-adhesive material, in addition, the East Office 41, Γ will also refer to the specific map to explain the use of the optical wire located in the vacuum region 14 to remove or remove the carbon adhesive from the system. Preferred Embodiments of the Invention The present invention is not limited to the exemplary embodiments, and can be effectively applied to lamps or laser devices that generate light by electrical discharge or heating. Example 1 Figure 1 is a schematic view for explaining the structure of a microwave-excited hydrogen ultraviolet lamp used in the first example of the first preferred embodiment of the present invention. The fixing member (flange) 17 to which the light-transmitting window 8 is attached is in the shape of a dish, and its center discharges the inner cavity of it, and it contains an opening having a diameter larger than the inner diameter of the discharge tube. The window flange 17 includes a meandering annular groove, which is sealed by a 92980.doc -37-1356439 opening on the opening of the light transmissive window 8, and also has a hollow visor-like frame 20 (attached thereto) There are a plurality of bolt holes) and a ring-shaped annular groove which is connected to the discharge tube 1 for maintaining the vacuum by the window flange 17. The internal structure of the frame 20 is a two-stage concentric circle and is connected to a space for mounting the light-transmitting window 8 and a space surrounded by the discharge tube 1. On the end surrounding the discharge tube 1, the face has been cut at an angle so that the ring 13 can be fixed in the correct place by pressure. The spiral not shown in the drawing is further cut into the outer peripheral surface of the end, and the vacuum boundary of the discharge tube J is formed by the locking cap 21 above the cylindrical opening by the sealing of the dome ring 3. The window attachment flange 17, the frame 20, and the lock cap 21 are all made of metal, and generally used are low-pollution stainless steel or aluminum, but the material is not limited to the metals. The operation of the microwave-excited hydrogen ultraviolet lamp having the above structure will now be explained. First, hydrogen gas is discharged from the discharge gas supply opening 2 in the discharge tube i by 2 〇 sccm. The gas has been diluted with helium to ι/ι〇〇. The discharge gas is discharged from the vent hole 3 by a vacuum pump (not shown). The exhaust behavior can be adjusted by adjusting the aperture of the discharge gas vent 3 and the valve (not shown) installed between the vacuum pumps to maintain the interior of the discharge tube (10) at approximately 5 Torr (665 Pa). . The reason why the t-flow is generated in the direction from the light-transmitting window toward the discharge tube is to reduce the source of contamination on the window 8 by minimizing the material generated by the electric device inside the discharge tube 1. Next, a microwave of 2 45 GHz and 5 〇 w is supplied from the microwave supply connector to the microwave oscillator 4. The microwaves may be supplied continuously or intermittently: 92980.doc -38 - 1356439. A regulator (not shown) (which is mounted in the power line connected to the microwave power source and the microwave oscillator) can be used to adjust the microwave power output between the power source and the load (discharge plasma) for A discharge plasma 7 is generated in the discharge tube. The hydrogen atoms excited by the discharge plasma 7 emit light at a wavelength of 1 〇 3 nm and 122 nm vacuum ultraviolet light. Because MgF2 is used as the material of the light-transmissive window 8, as explained below, the 103 nm light will enter the vacuum region 丨4 by the vacuum ultraviolet light of MgF2 and the wavelength of only 122 nm, which is used as the output light (vacuum ultraviolet light). 9. In this case, the opening in the mounting flange 17 of the light transmission window 8 is Φ8ππη, so the output into the vacuum region 14 is a luminous flux of Φ8 mm.

The MgF2 (magnesium fluoride) single crystal is a conventional light transmissive window 8 material which is perpendicular to the surface of the transmission window. The crystal size is 〇5 inches 吋(127 mm Φ)χ1 . The crystal system 0hyo K〇ken K〇gy〇 c〇, a UV grade crystal made by Ud. A plurality of crystals can be obtained from the same batch, and the 5 Hai aa experience is sorted so that the crystal quality and surface conditions are consistent, so that any changes in the batch can be eliminated to the extent that the effect of the protective film can only be verified. - In addition, the position of the photodiode 12 can receive the lamp output light 9 for monitoring the light output of the lamp. Oxygen can be supplied to the vacuum zone 14 by the method described below while adjusting the gas to a prescribed partial pressure. The oxygen cylinder 23 (manufactured by Nippon Sanso Corporation) is filled with pure oxygen (purity 4N)' and is connected to the regulator 22. Adjust the gas pressure to kg1 kg/cm2 and adjust the hole of the variable leakage valve 19 connected to the passage conveying pipe 16c. 92980.doc •39-1356439 猥The gas will pass through the atmosphere side. The tube 16b is then passed through a channel sealing mechanism (not shown) and is fed into the vacuum region 14 from the delivery tube 16a in the vacuum region 14" is supplied in an amount of about 1 sccm 〇 through an accelerated molecular pump (headroom rate 50 L/min, model TP-50 manufactured by Mitsubishi Heavy Industries, Ltd., was used to evacuate the vacuum region 14, and the downstream end of the vacuum region 14 was connected to a dry pump (not shown). In this case, the partial pressure of oxygen in the vacuum region is balanced at 丨mt〇rr (丨米塔尔). Therefore, the conditions are such that the partial pressure of oxygen in the vacuum zone 4 is at least 1 mtorr (and less than 1 〇 mtorr). At the same time, the valve aperture is adjusted to provide 5 mt〇rr, 2 plus beats and 〇丨mt〇rr for experimentation, but as explained later, the same carbon removal effect can be obtained. The variable liquid leakage referred to in this interpretation is not a specially regulated item's. It is only a mechanism for fine-aperture adjustment, and such a mechanism can be used under any name. The receiver can use the photodiode 12 to measure the amount of light output by the microwave excited chlorine gas ultraviolet lamp having the aforementioned structure as a function of time. First, the discharge plasma 7 is used to excite the hydrogen atoms to generate vacuum ultraviolet light for a period of 9 hours (about 7 minutes (about 4 days). Then, repeat the test. , Renbu / there is oxygen supply, as a reading eight early as a control group, that is, operating the aforementioned addition results. Yi brother (〇·001 plus Yang·), and then compare the results show that during the operation of the lamp When the oxygen is fed, the transmittance through the translucent window 8 is significantly lowered and it is not caused by the carbon. Conversely, in the control group of 92880.doc 1356439, if the original transmittance is 100%, then The transmittance after the test was reduced to 35% due to the accumulation of carbon on the light transmission -8. Figure 1 shows that carbon 15 was observed to accumulate and adhere in a film-like manner for this control experiment. When operating under a stream of oxygen, the carbon 15 shown in the figure will not adhere to the light-transmissive window 8. When using the optical microscope to observe the light-transmissive window 8 after use, it will not be in the sample with oxygen feed. Found any adhesive; but in the control sample 'There will be a film adhered to the center Φ8 mm in a film-like manner (vacuum ultraviolet light has penetrated the area). The adhesive material can be peeled off by scraping the surface ii with a plastic tweezers, and we found that the material is a film. The material "has a weak bonding force adhered to the outer surface of the crucible. Then the elemental analysis of the adhesive material is carried out. An epma (electron detection X-ray microanalyzer) (JXA manufactured by Nippon Densh) can be used. -8200) Perform elemental analysis on the outer surface of the light-transmitting window 8 for the control sample. The analysis conditions are: acceleration voltage 15 kv, illumination current 5 £ _8 VIII, measurement method: qualitative analysis, linear analysis 'reflection analysis. A large amount of carbon is detected in the center φ8 mm area of the surface u outside the surface of the light transmission layer (the ultraviolet light has penetrated the area). The annular area outside the 8 mm area of the center umbrella is at the flange 17 In the shadow, according to this, there will be no UV light penetration in the area, and although the ΕΡΜΑ analysis shows that there is a polluted level of carbon in this area, it does not have any large amount of carbon binder β Ε. The “pollution level” in the ΜΑ analysis refers to the weak slave number obtained when analyzing the rough surface. Using an electron beam to illuminate a clean surface is bound to make 92980.doc 1356439 carbon Adhesion' and this signal level is based on the adhered carbon. According to this, the pollution level of the knife-removing device itself determines the lower limit of the measurement of ερμα analysis. Compared with the pollution signal level, it originates from the center, φ8 surface. The range of 紫外§ (the ultraviolet light has passed through the n) is significantly higher, and this finding confirms that carbon accumulates on the surface n outside the light-transmitting window in a film-like manner. The linear analysis results of the control experiment obtained by EPMA were used. The unit of the axis in Fig. 7 is millimeter, which represents the analysis position on the diameter of the MgF2 crystal, and the linear analysis of the crystal is carried out in an edge-to-edge manner. The vertical axis represents the intensity of the carbon k detected at the spectrally generated crystal LDE2. The main analysis conditions are listed outside the diagram of Figure 7. As can be seen from Fig. 7, there is a very high signal intensity in the carbon of the φ8 mm region (where ultraviolet light has penetrated the region), which clearly indicates that there is a film-like adhesive in the center φ8 mm region. Conversely, when the lamp is operated under a flow of oxygen, no significant carbon signal exceeding the level of contamination can be detected from the surface of the light transmissive window. By operating the lamp under oxygen feed as described above, it is possible to prevent or suppress the occurrence of carbon growth on the light transmission window 8. By realizing such a countermeasure, the decrease in transmittance through the light-transmitting window can be suppressed, thereby reducing the maintenance work cost for replacing the window and shortening the operation downtime of the lamp. This embodiment is exemplified by a light transmissive window, however, this embodiment can also be applied to a device employing a mirror (view). Examples of such reflective mirrors are reflective mirrors and lamp concentrating mirrors for use with laser oscillators. 92980.doc • 42· 6439 The specific embodiment described below can also be applied to the case of a reflective mirror. Example 2 FIG. 2 is a schematic diagram of a microwave excited hydrogen ultraviolet lamp, which will be used to illustrate the first according to the present invention. A second example of a preferred embodiment. Further details of the structural elements and operational elements that are identical to the example 1 will be omitted. The detailed description of the light transmission window 8 is the same as that explained in the example 1. Alternatively, the position of the photodiode 12 can receive the light output of the illuminating lamp 9 for monitoring the amount of light output from the lamp. It supplies water vapor to the vacuum zone 14 by the following method and adjusts to a specific gas partial pressure. The glass tube 24 (tube diameter φ ό mm) in which 1 mL of water 25 is charged, which is distilled, ion-exchanged and filtered, is connected to the delivery tube 16d through the flange 17. The structure of the flange 17 contains a 〇-shaped portion for sealing the glass tube from the atmosphere and all atmospheric components are previously discharged out of the tube. The water 25 is maintained at room temperature (25 ° C), and the internal β 卩 steaming pressure is 24 torr (calculated value). This vapor pressure is supplied through the delivery pipe 16d at its main vapor pressure, and after adjusting the orifice of the variable leakage valve 19, it passes through the delivery pipe 16b on the atmospheric side and then through the sealing mechanism (not shown). ) enters the vacuum region 14 via the transfer tube 16a. The supply is about 0.1 seem. The vacuum zone 14 can be evacuated through an accelerated molecular pump (headroom rate of 5 〇 L/min, model TP-50 manufactured by Mitsubishi Heavy Industries, Ltd.) and a dry pump (not shown) downstream. In this case, the partial pressure of water vapor in the vacuum region is balanced at 〇1 mt rrrr (〇丨m Torr). Accordingly, the conditions in the vacuum region 14 are at least the partial pressure of water vapor. 1 mtorr (but below 1 mtorr). 92980.doc -43- 1356439 It is also wrong to adjust the valve's pore size with a partial pressure of water of 1 mtorr and 〇.〇 1 mtorr, but as explained later, the same carbon removal effect can be obtained. Next, the photodiode 12 can be used to measure the change in the light output of the microwave excited hydrogen ultraviolet lamp with time. First, the discharge plasma 7 is used to excite hydrogen atoms for generating vacuum ultraviolet light for a period of 90 hours (about 4 days). Next, the lamp was operated without supplying steam, that is, the experiment was carried out using the aforementioned accelerated molecular pump to maintain a pressure environment of 0.001 mtorr, and then the results of the two tests were compared. As a result, it was revealed that when the lamp was operated while supplying water vapor, any deterioration of the transmittance through the light transmission window 8 due to carbon growth was not observed. Conversely, in this control experiment, if the initial transmittance is 100%, then after the measured period, the carbon adhesion will reduce the transmittance to 35%. The carbon 15 in Fig. 2 shows the film-like carbon adhesion observed in the control experiment. However, when the water vapor is supplied during the operation of the lamp, there will be no light transmission window 8 as shown in Fig. 2. Carbon 15 adhesive. When an optical microscope is used to observe the outer surface 11 of the light-transmitting window 8 after use, no adhesive is observed when water vapor is supplied to the lamp, but in the control window, there is a substance to the film. Adhesively adhered to the center Φ8 mm area (vacuum ultraviolet light has penetrated the area. When the surface 11 is scraped off with plastic tweezers, the adhesive material can be peeled off, and we find that a weakly bonded material adheres to the outer surface. 92980.doc • 44 · 1356439 / At this point, elemental analysis can be performed on the adhesive material. The results of the elemental analysis using ΕΡΜΑ are similar to those explained in the sample 。. As detailed above, when When the lamp is operated with water vapor, it is confirmed that the carbon can be prevented or inhibited from adhering to the light transmission window. This countermeasure can suppress the decrease of the transmittance of the light transmission window, thereby reducing the window displacement. Related maintenance costs, and shorten the operational downtime caused by the maintenance of the lamp. Example 3 Figure 3 is a schematic diagram of a microwave and hydrogen gas ultraviolet light, which will be used A third example of a first preferred embodiment of the present invention will be omitted. Further details of the structural 7G member and operating element identical to that of Example 1 will be omitted. The detailed description of the light transmissive window 8 is the same as that explained in Example 1. Similarly, the position of the photodiode 12 can receive the light output of the button 9 for monitoring the light output of the lamp. It supplies the atmospheric component to the vacuum region 14 and adjusts to a specific gas using the method specified below. Partial pressure. The tube can be supplied to the vacuum region 14 by means of a tube that is open to the atmosphere. After adjusting the aperture of the variable leakage valve 19, the atmospheric components can be moved through the delivery tube 16b and passed through the seal. The mechanism (not shown) is introduced into the vacuum zone 14 through the conveying pipe 16a. The supplied S is about 1 Sccm. It can be passed through an accelerated molecular pump (the clearance rate of 5 〇 L/min, manufactured by Mitsubishi Heavy industdes, Ltd.). Model τρ_5〇) and a dry pump (not shown) downstream to clear the vacuum zone 14. In this case, the atmospheric components in the vacuum zone will be balanced at lmt〇rr (i mota) 92980.doc • 45- 1356439. Accordingly, the conditions in the vacuum zone u are such that the partial pressure of the atmospheric components is at least 1 mtorr (the helium is only 0.2 mtorr). Aperture adjustment to produce (M mt〇rr (oxygen only 〇〇 2

The call of the coffee is not as effective as the description after the manuscript. J Next, the photodiode 12 can be used to measure the change in light output during operation of the microwave excited hydrogen ultraviolet lamp having the above structure. First, the discharge plasma 7 is used to excite hydrogen atoms, and vacuum ultraviolet light is generated for a period of 90 hours (about 4 days). Next, during operation: the atmospheric components were supplied as control groups, and the aforementioned accelerated molecular pump was used to generate an environment of 0.001 mtorr, and then the results of the two tests were compared. When the atmosphere is supplied while the lamp is operating, no decrease in the transmittance through the light transmission window 8 due to carbon growth will be observed. In this control test, carbon growth will pass through. The transmittance of the light-transmitting window 8 is reduced from the initial value of 100% to the transmittance of 35%. The carbon 15 in Fig. 3 reflects the film-like carbon adhesion observed in the control group, however, when the lamp If the atmospheric components are supplied during operation, there will be no carbon 15 adhesive as shown in Figure 3 on the light-transmissive window 8. When an optical microscope is used to observe the outer surface 11 of the light-transmitting window 8 after use, no adhesive is observed when an atmospheric component is supplied to the lamp; however, in the control window, there is a substance to the film. The pattern is adhered to the center Φ8 mm area (vacuum ultraviolet light has penetrated the area). When the plastic tweezers are used to remove the surface 11, the adhesive material can be peeled off, and U.S. 92980.doc -46-1356439 finds that a weakly bonded material adheres to the outer surface u. / At this point, an elemental analysis of the adhesive material can be performed. The results of the π-analysis using Ερμα are similar to those explained in the example i. As mentioned in the above fabric, "when it is used in (4) when the atmospheric component is sent, it is confirmed that it can prevent or inhibit the adhesion of carbon to the light transmission window. This countermeasure can prevent the light transmittance of the light transmission window from being lowered, thereby Reducing the maintenance cost associated with window replacement and shortening the operation downtime caused by the maintenance of the lamp. Example 4 FIG. 4 is a schematic structural view of a microwave excited hydrogen ultraviolet lamp, which is used to explain the first comparison according to the present invention. A fourth example of a preferred embodiment, which illustrates the use of output light to remove carbon adhered to the optical system located in the vacuum region. The structural elements and operating elements of Example 1 are similar to those of the operating elements. The details will be omitted. The detailed description of the light-transmissive window 8 is the same as that of the example ^. The optical part of Figure 4 will be illuminated by the illuminating lamp 9. The carbon Μ has already been placed on the optical-element 27 The side 'and is generated by the vacuum ultraviolet light 9 illuminating the light-drying element 27. At the same time, organic gas is present in the vacuum region 14. Since the carbon 15 is adhered, the transmittance of the optical element is lowered. Drop 1 and must be repaired. The reason why the optical element 27 will reach this state is because the lamp operates in a vacuum state. An example of a dry (four) optical material optics 27 of the true external light will be used herein to illustrate the carbon removal scenario. The vacuum ultraviolet light interference optic can be viewed as a -MgF2 substrate having a multilayer optical film coating on its surface. 92980.doc • 47 1356439 This is the usual structure for optical components such as this interference filter. This interference chopper is used as a bandpass filter because it only allows light having a specific wavelength band to pass through 'but when the carbon 15 is adhered to its surface, its transmittance as an interfering chopper is reduced. Moreover, its function as an optical element is thus deteriorated. Accordingly, the carbon must be removed or replaced at a particular stage of reduced transmission. In general, cleaning the optical filter (e.g., interference filter) with an optical film coating is difficult to clean. Cleaning operations may alter the properties of the optical film and can easily cause defects during cleaning, such as injury. Therefore, basically no effective cleaning method is available, so we must choose to replace the part. However, in general, interference filters are expensive. The cost, so cost will be an issue. In Example 4, in order to confirm the effect of the present invention, the lamp will operate in a gas-free supply until the transmittance of the interference level is reduced from the original 100% value to 50%, and the transmittance is intentionally halved. Element 27 is placed in vacuum zone 14. The method of Example 1 is used to supply oxygen to the vacuum zone 14 under the condition that the partial pressure of oxygen in the vacuum zone 14 is maintained at 丨mt〇rr. At the same time, the valve aperture is adjusted to provide 10 mtorr, 5 mtorr, 2 mtorr, 0.1 mtorr and 0.05 mt rrrr for the experiment, which can achieve the same carbon removal effect. Next, the discharge plasma is used to excite the hydrogen atoms to emit vacuum ultraviolet light for a period of 90 hours (about 4 days). When oxygen is supplied during operation of the lamp, the adhering carbon 15 can be removed from the surface of the optical member 27, and in fact the transmittance of the optical member 27 is restored to its original state. When the surface of the optical element was observed under an optical microscope, the adhesive of any of 92980.doc -48-1356439 was not found. * As explained above, the carbon adhered to the optical element 27 can be removed by operating with oxygen. This method prevents the light transmittance of the optical element from being lowered, thereby reducing the maintenance cost associated with photonic element replacement and shortening the operational downtime of the lamp due to maintenance. Example 5 Figure 5 is a schematic view of the microwave-excited hydrogen ultraviolet lamp, which is used to explain a fifth example according to the first preferred embodiment of the present invention, which illustrates the use of the emission light to remove the adhesion to the location. The method of carbon on the optical system within the vacuum region. Further details of the structural and operational elements that are identical to the examples will be omitted. The detailed description of the light transmission window 8 is the same as that explained in the example. In Figure 5, the position of the optical element 27 receives the light emitted by the lamp 9. Further explanation of the optical element will be omitted because it is identical to the explanation in Example 4. In Example 5, in order to confirm the effect of the present invention, the lamp was operated in a gas-free supply until the transmittance of the interference level decreased from the original value of 1% to 50%. The transmissivity is halved and the optical element is placed in the vacuum region 14. The method of Example 2 was used to supply water vapor to the vacuum zone 14 under the condition that the partial pressure of water vapor in the vacuum zone 14 was maintained at 1 mtorr. At the same time, the wide door aperture is adjusted to provide 5mtorr, 2mtorr, 〇.〇1 mtorr and 0.005 mtorr for experiments, which can achieve the same carbon removal effect. 92980.doc -49· 1356439 Next, the discharge plasma is used to excite the hydrogen atoms to emit vacuum ultraviolet light for a period of 90 hours (about 4 days). When the water vapor is supplied during the operation of the lamp, the adhesive carbon 15 can be removed from the surface of the optical member 27, and in fact the transmittance of the optical member 27 is restored to its original state. When the surface of the optical element was observed under an optical microscope, it was found that any adhesive "as explained above" operates in the case of feeding water vapor, and the carbon 15 adhered to the optical member 27 can be removed. This method recovers the deteriorated optical component, thereby reducing the maintenance costs associated with the replacement of the optical component and reducing the operational downtime of the lamp due to maintenance. Example 6 FIG. 6 is a schematic view of the microwave-excited hydrogen ultraviolet lamp, which is used to explain a sixth example according to the first preferred embodiment of the present invention, which illustrates the use of the emission light to remove the adhesion to the location. A method of carbon 15 on an optical system within vacuum zone 14. Further details of the structural components and operational components that are identical to the examples will be omitted. The detailed description of the light transmission window 8 is the same as that explained in the example i. In Figure 6, the position of the optical element 27 receives the light emitted by the lamp 9. Further explanation of the optical element will be omitted because it is identical to the explanation in Example 4 in Example 6. To confirm the effect of the present invention, the lamp will operate in a gas-free supply until the transmittance of the interference level is from the original The value of 1% is lowered to 50% and the transmittance is intentionally halved, and then the optical element 27 is placed in the vacuum region 14 at 92580.doc 1356439. The method of Example 3 is for supplying atmospheric components to the vacuum zone 14 under the condition that the atmospheric component partial pressure gauges in the vacuum zone 14 are held at 1 mt rr. At the same time, the width of the wide door is adjusted to provide 2 mtorr & 〇 1 claw (7) atmospheric partial pressure to carry out the experiment, which can obtain the same carbon removal effect. The discharge plasma is then used to excite the hydrogen atoms to emit a vacuum 1 external light for a period of 9 hours (about 4 days). When the atmospheric component is supplied during the operation of the lamp, the adhesive carbon 15 can be removed from the surface of the optical member 27, and in fact the transmittance of the optical member 27 is restored to its original state. When the surface of the optical element is observed under an optical microscope, no dots are found. As explained above, the operation of the atmospheric component can remove the carbon adhering to the optical element 25. This method can restore the deteriorated optical element, thereby reducing the maintenance cost associated with the replacement of the optical element. And shorten the operational downtime caused by the maintenance of the lamp. [Second Preferred Embodiment] A second preferred embodiment of the present invention will be explained hereinafter with reference to the accompanying drawings in which a protective film is applied over the light-transmitting window to prevent or suppress the window from being damaged. To deterioration. However, the present invention is not limited to such a configuration, and it is naturally applicable to lamps and laser elements that emit light by electrical discharge or heating. Figure 8 is a schematic illustration of a microwave excited hydrogen ultraviolet lamp which will be used to illustrate specific embodiments 1-3 of the present invention. The flange 17 of the light-transmitting window 8 is in the shape of a dish, and the center thereof will have an inner lining of the discharge tube, and it has an opening. The diameter of the opening is 92980.doc -51· 1356439 »the diameter of the opening is larger than that of the discharge tube diameter. The window flange 17 includes a ring-shaped annular groove 13b as a member for sealing the light-transmitting window 8 on the opening, and also includes a hollow-shaped cap-shaped frame 2 (which includes a plurality of attachments for attachment purposes) A bolt hole) and a meandering annular groove 13a for attaching to the discharge tube i and further allowing the flange 17 to maintain a vacuum. The inner surface of the frame 20 is composed of a two-stage concentric hollow cylinder which encloses a space for mounting the light-transmitting window 8 and the discharge tube 1. On the end surface of the side surrounding the discharge tube 1, an O-ring 13c is attached, which is mounted in a corresponding U-diagonal cutting surface. In addition, a plurality of spirals (not shown) are cut on the outer peripheral surface of the end, allowing the installation of a columnar, open cap 21 which secures the beak ring 13c in the correct place and defines the discharge tube. Vacuum boundary. The window attachment flange 17, the frame 2, and the cap 21 are all made of metal, usually stainless steel or aluminum (which is not a good source of contamination), although the material is not limited to the metals. The operation of the microwave-excited hydrogen ultraviolet lamp having the above structure will be explained. First, 1/1 〇〇 hydrogen dilution gas in helium gas was supplied to the discharge vessel at a rate of 20 sccm via the discharge gas supply opening 2. The discharge gas is discharged from the discharge gas vent hole 3 by a vacuum pump (not shown), and by adjusting the aperture of the discharge gas vent hole 3 and a valve (not shown) installed between the vacuum pumps Controlling the exhaust behavior to maintain the interior of the discharge vessel at about 5 Torr (665 Pah, the discharge gas flowing from the light transmission window side toward the discharge tube i is as far as possible away from the light transmission window 8 Discharge any material generated by the discharge plasma 7 inside the discharge tube to reduce the source of contamination on the window 8 of the 92980.doc • 52-1356439. The microwave oscillation is the shape of the column 18, which is the microwave oscillation. a structure, which allows adjustment of the microwave electromagnetic field distribution within the microwave oscillator, and whose inner diameter is such that it can surround the discharge tube 1. In addition, its structure allows the month b to be inserted and aligned with the microwave In the axial direction of the end surface of the oscillator 4, it can slide in the axial direction while maintaining electrical conductivity with the microwave oscillator 4. The tuner 18 is made of copper or brass, and is used by the microwave blue 4 Same material The function of the tuner 18 is to adjust the microwave electromagnetic field distribution based on its insertion depth to generate a plasma 7 to concentrate the microwave generation at the center 6. Next, the microwave supply connector 5 is supplied with 2.45 GHz, 5 The microwave of 〇w is supplied to the microwave oscillator 4. The microwaves may be continuously supplied, or may be intermittently supplied. A regulator (not shown) is incorporated in the power transmission line connecting the microwave power source and the microwave oscillator. It can be adjusted to control the microwave power between the power source and the load (discharge plasma) for generating a discharge plasma in the discharge tube 1 and the hydrogen atoms excited by the discharge plasma 7 will generate 1〇3111. ^ A vacuum ultraviolet beam with a wavelength of 122 nm that passes through the light transmission window 8 and allows the emitted light 9 to be sent outside.

A MgF2 (magnesium fluoride) single crystal can be used to fabricate the light-transmissive window 8, and its crystal axis (c-axis) is perpendicular to the surface β of the light-transmitting window before the light-transmitting window 8 is mounted at the position shown in FIG. An ABo(R) Alumina) film coating is applied over the surface 10 as a protective film 10 Α. The coating is applied by a film formation method of an ion beam sputtering type. The ion beam film formation method will now be explained. Ar 92980.doc • 53-1356439 % maintained at a pressure of 〇1匕 as a film forming gas, and a sintered a 12〇3 target (purity 4N) of 3 吋Φ with a 20 kV Ar ion accelerating voltage. So that Al 2 〇 3 derived from the target is sputtered onto the surface 1 透光 of the light-transmitting window 8 to produce the film. The film thickness control can be carried out using a quartz oscillator in such a manner that a calibration curve is first generated to describe in detail the relationship between the variation in the number of quartz crystal oscillators and the thickness of the film. Thereby, the film is formed to a desired thickness by varying the oscillation time accordingly. The coating method for producing the protective film 10A is not limited to the above-described ion beam coating forming method. The method and components can be selected correctly to produce a film composed of the desired composition. Other possible methods include gas phase processes such as vapor deposition, ionization, CVD, and the like. The correct film thickness of the film UU depends on the surface coverage of the optical system and the desired transmittance of the 122 nm vacuum ultraviolet light. The relationship between the thickness of the film is compared. As shown in Figure 13, the figure is compared to the initial state without any coating.

The surface can be shown that the substrate must be covered to 2 Figure 13 is the relationship between the change of the transmittance and the thickness of the protective film when applying ai2〇3 as the light-transmissive window coating, and the pseudo-pickup & a & ... human microscope) to observe the film thickness above the nm, 92980.doc -54 - 1356439 to form a flat, smooth film. In addition, in terms of a very thick film thickness of 20 nm or more produced for the purpose of effectively protecting the surface of the optical system, we have found that if Si〇2 or

The protective enamel made of AhO3, Mg〇, Ti0^Zr〇2 has a very high absorption rate of vacuum ultraviolet light, so the characteristics of these optical systems are substantially degraded when using these optical systems. Moreover, the deterioration of the protective film itself and the heat cause the peeling thereof, which may cause problems on the surface of the optical system. Since the absorption of vacuum ultraviolet light causes the optical system to fail to operate as expected, the upper limit of the film thickness is set to be 2 nm or more, preferably 12 nm or more, more preferably 10 nm or more. In the current example, a 6 nm protective film thickness was used. At the thickness of the protective film, the transmittance of light at a wavelength of 122 nm was 5 %, and the transmittance of the initial state in which no protective film was used was assigned as 1 〇〇〇 /. . In addition, the position of the photodiode 12 can receive the light emitted by the lamp 9 for monitoring the light output of the lamp. Then, the photodiode 12 can be used to measure any change in the light output of the microwave excited hydrogen violet-external lamp having the above structure. First, the plasma 7 is used to excite the hydrogen atoms, and light in the ultraviolet ultraviolet wavelength range is generated for a period of 9 hours (about 4 days). Next, the light-transmitting window 8 was replaced with a light-transmissive window having no protective film as a control group, and the test was repeated and the results were compared. The following estimation method can be used: The initial transmittance of the light transmission window is Tl (in the case of the control experiment, T., after use (that is, the lower transmittance after 2 hours is 2, then The following equation (4) can be used to calculate the transmission change Δτ [%]: δ Τ = (Τι - Τ 2) / 90 Equation (1) At the same time, as defined by the following equation, the degradation rate K can also be [%/hr.] to indicate the change. Rate. Κ=1〇〇. ΔΤ/Τ〇 Equation (2) Comparing the magnitude of the degradation rate κ, it is possible to quickly quantify and estimate the deterioration of the light-transmitting window 8. Of course, The lower the enthalpy value, the slower the deterioration of the light-transmissive window, the longer the life of the light-transmissive window, and the lower the frequency at which replacement is required. The result shows that a protective film (Al2〇3) is used on the light-transmitting window 8. When the 'degradation rate is 〇 〇 4% / Hr. Conversely, the deterioration rate κ of the control group is 0.46% / Hr, which is about 丨丨 times the coated window. Based on this estimation, the fifth It was found that the protective film l〇A on the light-transmitting window 8 can improve the life by about 1 较 compared to no coating used. The effect of the protective film 10A is explained by the results of the xps surface analysis before and after use of the light-transmitting window 8 for coating A12〇3 as the protective film 10A; and for the light-transmitting window without the protective film The surface of the table _ is explained before use and the XPS surface analysis results after use as the control group. Figure 9 shows the analysis results before use of the control group. The horizontal axis is argon time, its size and sputtering The depth is proportional to. The sputter time is zero minutes, which indicates the initial state before sputtering, and the analysis of the corresponding crystal surface. Generally speaking, using XPS analysis, the information obtained for the initial state reflects The natural contamination of matter, which is the result of the absorption of carbon, oxygen or similar gases. However, since there is actually no gas, it can be omitted from the analysis data 92980.doc -56-1356439. Vertical axis representation The ratio of the various elements found in the XPS. Figure 9 shows that the control window does not have any fluorine loss before use. Although traces of oxygen are found on the surface, No oxygen is found in the crystal. The reason why the oxygen in the contaminated material is naturally absorbed on the surface is because argon sputtering pushes it into the crystal. For the presence or absence of oxygen in the crystal, the amount of oxygen shown in Figure 9 should be interpreted as a small amount that should be used as a basis for correcting other analytical results. Figure 10 shows the results of the analysis after use of the control group. 10 clearly shows that there is fluorine loss in the surface of the control sample. A large amount of oxygen is also found in the crystal at the same depth as the IL-deficient layer. Therefore, in the control sample after use, the surface layer is displayed. Fracture F and oxidation. This surface condition is the main cause of the decrease in the transmittance of vacuum ultraviolet light at 122 nm: Now, a protective film 10 made of Al2〇3 and having a thickness of about $ nm is applied over the light-transmitting window 8, and FIG. The results of the analysis before use are shown. The coordinate axis and interpretation of the diagram are the same as in Figure 9, and further details will be omitted. A1 (aluminum) has been newly added to the diagram, which is one of the protection components. Figure 11 shows that the synchronization curve of magnesium and magnesium extends from the surface to the inside, and the synchronization curve of oxygen and inscription extends from the surface layer to the inside. Therefore, despite the protective film coating, the XPS analysis is based on the fact that the signal from the surface layer (4) and the town is signaled because the resolution of the XPS analysis is several in the depth direction. Therefore, even if you try to measure the ideal boundary distribution, the shape of the resolution width is very wide, so the curve of the curve will not appear as a step 92980.doc -57· 1356439. In addition, in the case of a protective film thickness of 5 nm, if the sputtering of about 汕 minute is not performed, the MgF2 crystal of the substrate will remain bare. This is due to the difference in sputtering efficiency between Alz〇3 and MgF2. Focus on this point to understand the areas where F and Mg, 0 and gossip curves are synchronized. Thereafter, the graph shown in Fig. 12 has been coated with a light-transmissive window 8 of about 6 nm thick a丨2〇3 as a protective film after use. The coordinate axes and explanations are the same as in Fig. 9, and further details will be omitted. Figure 12 shows that the oxygen and aluminum curves extending from the surface to the inside are synchronized. In addition, the presence of oxygen in the crystal was not confirmed in the figure. This result shows that the protective film has prevented oxygen from intruding into the interior of the crystal. Conversely, the curve of fluorine and magnesium from the surface into the center is not synchronized. We can clearly see that fluorine has penetrated into the protective film... into the person 丨 2... However, because of the relationship of the protective film 10A, although fluorine is present inside the protective film, fluorine is not completely discharged as in the control group (which can be easily replaced with oxygen intrusion by this mechanism). The situation led to a lack of fluoride. In fact, if the case of the absence of any protective film in Fig. 12 is considered, the formation results of the fluorine-deficient layer and the oxide layer described in Fig. 10 can be easily explained. As explained above, by using the protective film 1A as a coating on the light-transmissive window 8, it is possible to suppress the formation of the fluorine-deficient layer and prevent or suppress the presence of oxygen (oxide layer) in the crystal, and when and control When the group is compared, the deterioration rate K of the light-transmitting window having the protective film coating is reduced by about 1 times. Further, when the si〇2 coating (film thickness: 6 nm) was used as the protective film of the light-transmitting window 8, the deterioration rate K was about 0.06%/Hr. Conversely, the deterioration rate K of the control is about 0.46% / Ηι *. This result confirms that even if s is used in the protective film, 92980.doc -58-1356439 can achieve the same degree of protection, and the deterioration rate K has an improvement effect of about 8 times. β is also the same as Ah〇3. Metal oxides such as 〇, 1^〇2'&〇2 are used as materials for the protective films, and the metal oxides do not change color under ultraviolet light irradiation as compared with fluorine compounds. As described above, the optical characteristics of the optical system on which the protective film is formed according to the present invention (for example, if it is a light-transmitting window, the characteristic is light transmittance) is not provided by the protective film in the pre-coated state. Optical properties. However, it is not suitable to evaluate these optical systems separately. The more important one is to evaluate the effectiveness of being incorporated into a light output component that uses a prior art component of a light output component. That is, the aforementioned initial shortcomings of the optical systems in the optical output element can be compensated for, and the light output is such that the system can maintain the output of the optical output element and increase its lifetime. Therefore, the purpose of providing the optical output component can be achieved, wherein the maintenance frequency and the maintenance cost of the light transmission window can be reduced. Furthermore, it is particularly advantageous to use the invention as a light source in measurement applications. One of them (4) implements long-term monitoring or similar operations on the generation of environmental pollutants. In general, when making such measurements, the measured signal size and sensitivity are proportional to the square of the light output. As described above, in the prior art, improving the output of the light source can improve the measurement sensitivity of the light source, but the final deterioration of the optical lines makes it necessary to suppress the deterioration of the optical system so that the light output is not lowered and Reduce measurement sensitivity. The optical system used in the present invention extends the life of the light wheeled component and maintains a more stable output characteristic over a long period of time in order to solve the aforementioned problem of 92980.doc -59-1356439 and to provide a suitable for long-term environmental monitoring. Light output element. The above implementation example uses a light-transmissive window as an example, but it can also be used in components that utilize a mirror (view). Examples of such mirrors are the mirrors used in laser oscillators and the concentrating mirrors used in lamps. Therefore, these mirrors can be used in the same implementation example. Effect of the Invention As described above, the present invention can prevent or suppress deterioration of an optical system, particularly due to deterioration caused by carbon growth, which reduces transmittance and determines the life of the front system and the optical element, so that the present invention can be applied High optical photon energy (such as conventional ultraviolet light or vacuum ultraviolet light) in various optical devices to reduce replacement light, maintenance (4) frequency and reduce operating costs, when used in systems using multiple optical components, when The transmissive or reflective optical element is located at the boundary of the near vacuum region where the decomposable organic component is located (4), such as transmission, refraction, spectrum generation, interference, etc., or a combination of optical effects can be used as diffraction, refraction, and spectrum. The optical element in the light path in the generated, transmitted vacuum region is degraded, or there is an analytical position adjustment optical element or other surface to be illuminated, including 70 pieces of optical H, sealing material and position adjustment instrument, For example, an exposure device (stepper) used in the semiconductor industry using vacuum ultraviolet light And swatches. Clearly 4' by preventing or suppressing the decrease in the transmittance of the photosystem caused by the carbon growth on the surface of the optical system, it is possible to prevent or suppress the deterioration of the optical system, thereby reducing the maintenance operation frequency of the replacement optical system. , 92980.doc 1356439 and reduce operating costs. In addition, by preventing or suppressing the growth of the under-illuminated surface and the emitting surface in the optical system in the optical path in the vacuum region, the life of the downstream instrument can be extended and the reliability of the instrument can be improved. In particular, since the present invention can prevent or suppress the decrease in light transmittance due to the carbon enthalpy on the light-transmitting window and its light-emitting element, the necessary maintenance interval for cleaning or replacing the light-transmitting window can be extended. It can improve the operating speed of the instrument and reduce maintenance costs. In addition, by preventing or suppressing the growth of the optical component and the illuminated surface and the emitting surface of the optical system used in the vacuum region where the light output device can emit light, the life of the downstream device can be extended, and the instrument can be improved. Guilty. Additionally, the method of the present invention can be used to illuminate optical components that have previously been degraded by carbon growth to illuminate the optical components that have been degraded and restore them to their original condition. Therefore, with the present invention, it is possible to extend the cleaning or replacement maintenance cycle of the optical member used in the aforementioned vacuum region, thereby improving the operating rate of the instrument and reducing the maintenance cost. As described above, since the present invention can prevent or suppress deterioration of the optical system and extend the maintenance cycle in which it must be replaced, the operating speed of the apparatus can be improved and the maintenance cost can be reduced. Furthermore, incorporating the optical system of the present invention into an instrument that utilizes light can extend the life of the instrument and ensure that the instrument will still have stable output characteristics over time. BRIEF DESCRIPTION OF THE DRAWINGS Fig. 1 is a schematic view showing the structure of a microwave excited hydrogen ultraviolet lamp for explaining a first example according to a first preferred embodiment of the present invention. Fig. 2 is a schematic view showing the structure of a microwave excited hydrogen ultraviolet lamp for explaining a second example of the first preferred embodiment of the present invention. Fig. 3 is a schematic view showing the structure of a microwave excited hydrogen ultraviolet lamp for explaining a third example of the first preferred embodiment of the present invention. Fig. 4 is a schematic view showing the structure of a microwave excited hydrogen ultraviolet lamp for explaining a fourth example according to the first preferred embodiment of the present invention. Fig. 5 is a schematic view showing the structure of a microwave excited hydrogen ultraviolet lamp for explaining a fifth example of the first preferred embodiment of the present invention. Fig. 6 is a schematic view showing the structure of a microwave excited hydrogen ultraviolet lamp for explaining a sixth example of the first preferred embodiment of the present invention. Figure 7 is a graph showing the results of enthalpy analysis for carbon adhered to the permeable window in accordance with a first preferred embodiment of the present invention. Figure 8 is a schematic view showing the structure of a microwave excited hydrogen ultraviolet lamp for explaining a second preferred embodiment of the present invention. Figure 9 is a plot of XPS depth profile measurement for a non-transparent window with a protective film coating before being used. Figure 10 is a graph showing the XPS depth distribution measurement relationship of the light-transmitting window without the protective film coating after being used. Fig. 11 is a graph showing the relationship of XPS depth distribution measurement of a light-transmitting window having a protective film coating before being used. Fig. 12 is a graph showing the XPS depth distribution measurement relationship of the light-transmitting window having the protective film coating after being used. 92980.doc 1356439 Figure 13 is a graph showing the relationship between the light transmittance in the initial state of an optical system and the thickness of various protective films. Figure 14 is a schematic illustration of a conventional microwave excited hydrogen gas ultraviolet lamp according to the prior art. [Main component symbol description] 1 Discharge tube 2 Discharge gas supply opening 3 Exhaust hole 4 Microwave oscillator 5 Microwave supply connector 6 Microwave concentration 7 Discharge plasma 8 Light transmission window 9 Vacuum ultraviolet light 10 Inner surface 10A Protective film 11 Outer surface 12 photodiode 13 〇 ring 13a Ο ring groove 13b Ο ring groove 13c Ο ring 14 vacuum area 15 carbon 92980.doc -63- 1356439 16a duct 16b duct 16c duct

16d duct 17 flange 18 microwave oscillator tuner 19 leak valve

20 frame 21 locking cap 22 adjuster 23 oxygen cylinder 24 glass tube 25 water 27 optical components

92980.doc -64-

Claims (1)

1356439 | 0 card * loan ^ 0 曰 Amendment 093112330 Patent application Chinese patent application scope replacement (May 100) Ten, patent application scope: An optical property restoration device, by preventing, suppressing, or improving Reliability in the output light or in the optical path of the output light to improve the optical characteristics of the optical system, wherein the optical system is located in a near vacuum region where an organic component can be decomposed - the degradation is due to deposition or accumulation In the illumination of the optical system: the surface, the light reflecting surface, the light emitting surface (referred to as the "light emitting surface"), and the surfaces are facing the vacuum region, the characteristic restoring device comprises: For generating a near vacuum region, which is capable of exciting an oxidation reaction of carbon in the presence of active energy, the near vacuum region being facing a light emitting surface of the optical system; a member for generating a 0H basis in the near vacuum region Unstable chemical species containing oxygen atoms such as lumps, oH-ions, ozone, 02-ions, ruthenium-groups; a component promotes in the near vacuum region Between the oxygen atom and other labile chemical species with the oxidation reaction of carbon; and wherein the restoration means removes the optical properties or reduce the accumulation of carbon deposited on the light emitting surface by the oxidation reaction. 2. An optical property restoring device that improves the reliability and lifetime of optical properties of an optical system by preventing, suppressing, or improving the optical characteristics of an optical system located in or outputting an optical path of the output light. The optical system is located in a near vacuum region in which an organic component can be decomposed. The metamorphosis is deposited or accumulated on the light-illuminating surface, the light-reflecting surface, and the light-emitting surface (referred to as a "light-emitting surface") of the optical system. The optical property recovery device includes: a member for generating a near vacuum region to excite an oxidation reaction of carbon, the near vacuum region being oriented, and the surface of the surface is oriented to the vacuum region. The light emitting surface of the optical system; a member for generating water vapor, oxygen, hydrogen peroxide, ozone, or a mixed gas of the gas and the inert gas (including air) in the near vacuum region a gas stream; a component supplies active energy in the near vacuum region to cause the water, oxygen, hydrogen peroxide, ozone, or the Oxidizing a reactant gas and an inert gas (including air containing) between the mixed gas and carbon; and wherein the optical characteristic of the accumulated carbon will be removed by the restoration means or oxidation reduction reaction is deposited on the surface of the light emitting. An optical property restoration (4) 'improving the reliability and lifetime of the optical characteristics of an optical system by preventing, suppressing, or improving the optical characteristics of an optical system located in or out of the optical path of the output light, wherein the optical The system is located in a near vacuum region where an organic component can be decomposed, the degradation being due to carbon deposited or accumulated on the light-irradiating surface, the light-reflecting surface, and the light-emitting surface (referred to as the "light-emitting surface") of the optical system. And the surface is oriented to the vacuum region, the optical property recovery method comprising the steps of: generating a near vacuum region that excites an oxidation reaction of carbon in the presence of active energy, the near vacuum region facing the optical system An illuminating surface; an unstable chemical species containing an oxygen atom such as a 0H group, an oh-ion, an ozone, a 〇2-92980-1000520.doc 1356439 ion, an ο- group, etc. in the near vacuum region; Removing or reducing deposition on the luminescent surface by reacting the deposited carbon with the unstable chemical species of the oxygen-containing atoms Carbon deposits. The light characteristic recovery method improves the reliability and lifetime of the optical characteristics of the optical system by preventing, suppressing, or improving the optical characteristics of the optical system located in the pulverized light or in the optical path of the output light, wherein The optical system is located in a near vacuum region where the organic component can be decomposed. The degradation is due to carbon deposited or accumulated on the light-irradiating surface, the light-reflecting surface, and the light-emitting surface (referred to as the "light-emitting surface") of the optical system. The optical property restoring method comprises the steps of: generating a near vacuum region, exciting an oxidation reaction of carbon in the presence of active energy, wherein the near vacuum region faces the optical system And the supply of active energy 'while supplying a gas stream containing oxygen atom gas to the near vacuum region to remove or reduce accumulated carbon deposited on the light emitting surface, wherein the oxygen atomic gas system Water vapor, I, peroxygen gas Φ, ozone, or such gases and inert gases (including air in Inside) a mixture of gases. 5. The optical property recovery method according to claim 3, wherein the beam forming the light path is ordinary ultraviolet light having a wavelength of 38 〇 or less or vacuum ultraviolet light having a wavelength of 200 nm or less, and is used for The optical system that outputs the ultraviolet light or is located in the optical path of the output light is an optical material comprising one of: or a combination thereof: fluoride (eg, fluorinated 92980-I 〇〇〇 520doc 1356439 magnesium, fluorine) Calcium, barium fluoride, aluminum fluoride, cryolite, Thi〇Hte or other fluoride compounds), metal fluorides (such as barium fluoride, uranium fluoride fluoride, barium fluoride) or high purity oxides (eg synthetic quartz glass or sapphire). 6. The optical property recovery method according to claim 4, wherein in the case where the carbon generated by decomposing the organic component in the near vacuum region has grown on the surface of the optical system and the opposite surface, the The lower limit of the partial pressure of the oxygen-containing atom gas supplied to the near-vacuum region is set to be higher than the rate of carbon growth. 7. The optical property recovery method of claim 4, wherein in the case where the vacuum ultraviolet light is irradiated to or irradiated by the optical system to restore the optical characteristics of the optical system, The upper limit of the partial pressure of the oxygen-containing atom gas supplied to the near-vacuum region is set lower than the absorption of the vacuum ultraviolet light by the oxygen-containing atomic gas, and the function is performed in the near-vacuum region. The degree can not be ignored below. 8. The optical property recovery method according to claim 7, wherein the upper limit value of the partial pressure of the oxygen-containing atomic gas is set to a certain value by actually filling a partial vacuum region by a specific partial pressure of the oxygen-containing atomic gas. To a certain extent, the amount of vacuum ultraviolet light on the light path is then measured to check the degree of attenuation. 9. The optical characteristic recovery method according to claim 3, wherein the light beam forming the light path is a light beam having a specific wavelength within a wavelength range of vacuum ultraviolet light. 10 as claimed in claim 3 or 4 The optical property recovery method, wherein the beam of the light path is a vacuum ultraviolet light having a high photon energy. For example, in the optical property recovery method of claim 4, when the oxygen atom-containing gas is oxygen, the range between the lower limit and the upper limit of the partial pressure of the gas is set to be between 0.02 mtorr and 20 mtorr. 12. The optical property recovery method according to claim 4, wherein when the oxygen atom-containing gas is water vapor, the range between the lower limit and the upper limit of the partial pressure of the gas is set between 0.005 mtorr and 20 mtorr. 13. An optical system comprising a fluoride compound exposed to an environment of vacuum ultraviolet light or plasma light having a photon energy higher than an absorption wavelength of a basic matrix of the optical system, the optical system comprising being located in the near vacuum An optical element composed of a plurality of light transmissive members or a plurality of light reflecting members at a boundary of the region, an optical element for diffraction, refraction, spectrum generation, transmission, and diffraction position adjustment in the light path of the vacuum region, by irradiation An optical object that is surface-treated, and a position adjusting mechanism or a holding mechanism of the optical element or optical object, a container, a sealing material, wherein at least a film thickness of 2 is formed on a light-irradiating side (inside) of the optical system A 20 nm Si〇2 or metal oxide protective film prevents the fluorine atoms from being peeled off from the surface of the optical system by the irradiation of light. 14. An optical system comprising a telluride compound exposed to an environment of vacuum ultraviolet light or plasma light having a photon energy higher than an absorption wavelength of a basic matrix of the optical system, the optical system comprising being located in the near vacuum An optical element consisting of a plurality of light transmissive members or a plurality of light reflecting members at a boundary of the region, in the optical path of the vacuum region of 92980-1000520.doc 丄*356439, diffraction, refraction, spectrum generation, transmission, and diffraction position An optical element for conditioning, an optical object surface-treated by irradiation of light, and a position adjusting mechanism or a holding mechanism, a container, and a sealing material of the optical element or the optical object, wherein at least the light-irradiating side (inside) of the optical system A ruthenium 2 or metal oxide protective film having a film thickness of 2-20 11 „1 is formed thereon to prevent oxidation of the surface of the optical system by irradiation of light. 15. An optical system including fluoride having The optical device in which the internal space of the plasma exists is disposed facing the position exposed to the plasma, and the optical system includes An optical element composed of a plurality of light transmissive members or a plurality of light reflecting members at a boundary of a vacuum region, an optical element for diffracting, refraction, spectrum generation, transmission, and diffraction position adjustment in a light path of the vacuum region, An optical object' surface-treated by irradiated light and a position adjusting mechanism or a holding mechanism, a container, and a sealing material of the optical element or the optical object, wherein a surface formed on the surface of the plasma is formed by electroforming resistance An optical system of any of the materials of the present invention, wherein the optical system is composed of a single crystal fluoride material, The crystal axis (one) axis is along the direction in which the light is irradiated, and a Si〇2 or metal oxide protective film is formed on a surface perpendicular to the crystal axis. 17. As in any of claims 丨3 to 丨5 The optical system of the item, wherein the metal oxide protective film is selected from the group consisting of Al2〇3, MgO, TiCh, Zr02. 92980-1000520.doc 1356439 18. The optical system of claim 16 of the patent application, The optical oxide protective film is selected from the group consisting of A12〇3, MgO, TiO2, and Zr〇2. The optical system according to any one of claims 13 to 15, wherein the protective film is The optical system of the invention of claim 16 wherein the protective film is formed by ion beam sputtering or plasma CVD. The optical system of claim 17 wherein the protective film is formed by an ion beam sputtering method or a plasma CVD method. [22] The optical system of claim 8 wherein the protective film is Formed by ion beam sputtering or plasma CVD. 23. A method of using an optical device comprising the steps of: coating an optical system consisting of a metal oxide selected from Si 〇 2 or a 1 203, MgO, TiO 2 , and Zr 〇 2 a protective film of nm-20 nm, wherein the film inhibits deterioration of the basic matrix due to vacuum ultraviolet light exposure or exposure to the electric paddle, causing the basic parent structural element to be peeled off from the base matrix surface or substantially oxidized on the surface of the parent substrate; The xenon optical system incorporates a device having the purpose of a vacuum ultraviolet light source or a plasma light source having a photon energy higher than the absorption wavelength of the basic matrix of the optical system. 24. The method of using an optical device according to claim 23, wherein the light source such as helium provides sufficient light output to compensate for initial deterioration of transmittance of the optical system due to the protective film, and the optical system is disposed on Above the optical path of the light source, to suppress degradation of optical characteristics after initial degradation. 92980-1000520.doc