TWI352886B - - Google Patents
Download PDFInfo
- Publication number
- TWI352886B TWI352886B TW95132465A TW95132465A TWI352886B TW I352886 B TWI352886 B TW I352886B TW 95132465 A TW95132465 A TW 95132465A TW 95132465 A TW95132465 A TW 95132465A TW I352886 B TWI352886 B TW I352886B
- Authority
- TW
- Taiwan
- Prior art keywords
- control device
- flow rate
- valve
- supply system
- pressure
- Prior art date
Links
- 230000005856 abnormality Effects 0.000 claims description 65
- 238000000034 method Methods 0.000 claims description 65
- 230000008569 process Effects 0.000 claims description 47
- 239000012530 fluid Substances 0.000 claims description 41
- 238000003745 diagnosis Methods 0.000 claims description 34
- 230000002159 abnormal effect Effects 0.000 claims description 31
- 230000007246 mechanism Effects 0.000 claims description 27
- 238000011144 upstream manufacturing Methods 0.000 claims description 23
- 238000004092 self-diagnosis Methods 0.000 claims description 22
- 238000004140 cleaning Methods 0.000 claims description 9
- 230000008859 change Effects 0.000 claims description 8
- 238000010926 purge Methods 0.000 claims description 8
- 238000001514 detection method Methods 0.000 claims description 5
- 239000000126 substance Substances 0.000 claims description 5
- 238000006073 displacement reaction Methods 0.000 claims description 3
- 239000007789 gas Substances 0.000 description 117
- 239000007787 solid Substances 0.000 description 12
- 238000004364 calculation method Methods 0.000 description 10
- 238000012937 correction Methods 0.000 description 8
- 238000007689 inspection Methods 0.000 description 7
- 230000009471 action Effects 0.000 description 6
- 238000010586 diagram Methods 0.000 description 5
- 238000006243 chemical reaction Methods 0.000 description 4
- 238000012360 testing method Methods 0.000 description 4
- 230000006837 decompression Effects 0.000 description 3
- 230000007423 decrease Effects 0.000 description 3
- 238000004519 manufacturing process Methods 0.000 description 3
- 230000008439 repair process Effects 0.000 description 3
- 239000004065 semiconductor Substances 0.000 description 3
- 238000004891 communication Methods 0.000 description 2
- 230000007257 malfunction Effects 0.000 description 2
- 238000012806 monitoring device Methods 0.000 description 2
- 238000002360 preparation method Methods 0.000 description 2
- 206010036790 Productive cough Diseases 0.000 description 1
- 238000004458 analytical method Methods 0.000 description 1
- 230000001174 ascending effect Effects 0.000 description 1
- 230000007797 corrosion Effects 0.000 description 1
- 238000005260 corrosion Methods 0.000 description 1
- 230000002950 deficient Effects 0.000 description 1
- 230000000994 depressogenic effect Effects 0.000 description 1
- 238000009826 distribution Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 235000013305 food Nutrition 0.000 description 1
- 239000011261 inert gas Substances 0.000 description 1
- 238000005259 measurement Methods 0.000 description 1
- 238000011045 prefiltration Methods 0.000 description 1
- 238000012545 processing Methods 0.000 description 1
- 210000003660 reticulum Anatomy 0.000 description 1
- 235000015067 sauces Nutrition 0.000 description 1
- 210000003802 sputum Anatomy 0.000 description 1
- 208000024794 sputum Diseases 0.000 description 1
Landscapes
- Examining Or Testing Airtightness (AREA)
- Flow Control (AREA)
- Pipeline Systems (AREA)
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2005253996 | 2005-09-01 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| TW200717212A TW200717212A (en) | 2007-05-01 |
| TWI352886B true TWI352886B (enExample) | 2011-11-21 |
Family
ID=46728051
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| TW095132465A TW200717212A (en) | 2005-09-01 | 2006-09-01 | Method of detecting abnormality in fluid supply system, using flow rate control device having pressure sensor |
Country Status (1)
| Country | Link |
|---|---|
| TW (1) | TW200717212A (enExample) |
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US9939299B2 (en) | 2009-06-11 | 2018-04-10 | University Of Washington | Sensing events affecting liquid flow in a liquid distribution system |
| US10094095B2 (en) | 2016-11-04 | 2018-10-09 | Phyn, Llc | System and method for leak characterization after shutoff of pressurization source |
| TWI648453B (zh) * | 2014-12-24 | 2019-01-21 | 日商化學漿股份有限公司 | Site improvement device and determination method |
| US10352814B2 (en) | 2015-11-10 | 2019-07-16 | Phyn Llc | Water leak detection using pressure sensing |
-
2006
- 2006-09-01 TW TW095132465A patent/TW200717212A/zh unknown
Cited By (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US9939299B2 (en) | 2009-06-11 | 2018-04-10 | University Of Washington | Sensing events affecting liquid flow in a liquid distribution system |
| US11493371B2 (en) | 2009-06-11 | 2022-11-08 | University Of Washington | Sensing events affecting liquid flow in a liquid distribution system |
| TWI648453B (zh) * | 2014-12-24 | 2019-01-21 | 日商化學漿股份有限公司 | Site improvement device and determination method |
| US10352814B2 (en) | 2015-11-10 | 2019-07-16 | Phyn Llc | Water leak detection using pressure sensing |
| US10962439B2 (en) | 2015-11-10 | 2021-03-30 | Phyn, Llc | Water leak detection using pressure sensing |
| US11709108B2 (en) | 2015-11-10 | 2023-07-25 | Phyn, Llc | Water leak detection using pressure sensing |
| US10094095B2 (en) | 2016-11-04 | 2018-10-09 | Phyn, Llc | System and method for leak characterization after shutoff of pressurization source |
Also Published As
| Publication number | Publication date |
|---|---|
| TW200717212A (en) | 2007-05-01 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| CN101258456B (zh) | 使用具有压力传感器的流量控制装置的流体供给系统的异常检测方法 | |
| CN103502902B (zh) | 带有流量监测器的压力式流量控制装置、使用该装置的流体供给系统的异常检测方法及监测流量异常时的处置方法 | |
| CN101529356B (zh) | 差压式质量流量控制器中的诊断机构 | |
| CN101424948B (zh) | 流量检验故障诊断设备 | |
| JP2004214591A (ja) | 半導体製造装置 | |
| US8381755B2 (en) | Pressure type flow rate control reference and corrosion resistant pressure type flow rate controller used for the same | |
| KR101443493B1 (ko) | 처리 장치 및 프로세스 상태의 확인 방법 | |
| CN101657701B (zh) | 阀泄漏量诊断法 | |
| TWI829886B (zh) | 流體控制裝置、流體控制系統、診斷方法和程序記錄介質 | |
| WO2008004334A1 (fr) | Procédé de détection de dysfonctionnement de valve côté aval à mécanisme de restriction de dispositif de régulation de débit de pression | |
| JPH07281760A (ja) | マスフローコントローラ絶対流量検定システム | |
| EP3686533B1 (en) | System and method for drying and analytical testing of containers | |
| TWI352886B (enExample) | ||
| JP2012237733A (ja) | 診断装置及びその診断装置を備えた流量制御装置 | |
| JPH0926100A (ja) | 腐食性ガス配送システムの圧力レギュレータの動作条件確認する方法 | |
| US8347686B2 (en) | Automatic valve calibration of a blown-film extrusion apparatus | |
| TWI780625B (zh) | 液體供應系統及液量輔助判斷方法 | |
| CN117845195A (zh) | 半导体工艺设备及半导体加工方法 | |
| KR20060135319A (ko) | 스텝밸브의 검사장치 및 검사방법 | |
| HK1141581A (en) | Valve leakby diagnostics |