TWI350276B - Deuteroxyl-doped silica glass, optical member and lithographic system comprising same and method of making same - Google Patents
Deuteroxyl-doped silica glass, optical member and lithographic system comprising same and method of making sameInfo
- Publication number
- TWI350276B TWI350276B TW095140924A TW95140924A TWI350276B TW I350276 B TWI350276 B TW I350276B TW 095140924 A TW095140924 A TW 095140924A TW 95140924 A TW95140924 A TW 95140924A TW I350276 B TWI350276 B TW I350276B
- Authority
- TW
- Taiwan
- Prior art keywords
- same
- deuteroxyl
- optical member
- silica glass
- doped silica
- Prior art date
Links
Classifications
-
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
- C03B19/00—Other methods of shaping glass
- C03B19/12—Other methods of shaping glass by liquid-phase reaction processes
-
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
- C03B19/00—Other methods of shaping glass
- C03B19/14—Other methods of shaping glass by gas- or vapour- phase reaction processes
- C03B19/1415—Reactant delivery systems
-
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
- C03B19/00—Other methods of shaping glass
- C03B19/14—Other methods of shaping glass by gas- or vapour- phase reaction processes
- C03B19/1453—Thermal after-treatment of the shaped article, e.g. dehydrating, consolidating, sintering
-
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
- C03B2201/00—Type of glass produced
- C03B2201/06—Doped silica-based glasses
- C03B2201/07—Impurity concentration specified
-
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
- C03B2201/00—Type of glass produced
- C03B2201/06—Doped silica-based glasses
- C03B2201/08—Doped silica-based glasses doped with boron or fluorine or other refractive index decreasing dopant
- C03B2201/12—Doped silica-based glasses doped with boron or fluorine or other refractive index decreasing dopant doped with fluorine
-
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
- C03B2201/00—Type of glass produced
- C03B2201/06—Doped silica-based glasses
- C03B2201/20—Doped silica-based glasses doped with non-metals other than boron or fluorine
-
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
- C03B2201/00—Type of glass produced
- C03B2201/06—Doped silica-based glasses
- C03B2201/20—Doped silica-based glasses doped with non-metals other than boron or fluorine
- C03B2201/21—Doped silica-based glasses doped with non-metals other than boron or fluorine doped with molecular hydrogen
-
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
- C03B2201/00—Type of glass produced
- C03B2201/06—Doped silica-based glasses
- C03B2201/20—Doped silica-based glasses doped with non-metals other than boron or fluorine
- C03B2201/22—Doped silica-based glasses doped with non-metals other than boron or fluorine doped with deuterium
-
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
- C03B2201/00—Type of glass produced
- C03B2201/06—Doped silica-based glasses
- C03B2201/20—Doped silica-based glasses doped with non-metals other than boron or fluorine
- C03B2201/23—Doped silica-based glasses doped with non-metals other than boron or fluorine doped with hydroxyl groups
-
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
- C03B2201/00—Type of glass produced
- C03B2201/06—Doped silica-based glasses
- C03B2201/30—Doped silica-based glasses doped with metals, e.g. Ga, Sn, Sb, Pb or Bi
- C03B2201/32—Doped silica-based glasses doped with metals, e.g. Ga, Sn, Sb, Pb or Bi doped with aluminium
-
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
- C03B2201/00—Type of glass produced
- C03B2201/06—Doped silica-based glasses
- C03B2201/30—Doped silica-based glasses doped with metals, e.g. Ga, Sn, Sb, Pb or Bi
- C03B2201/40—Doped silica-based glasses doped with metals, e.g. Ga, Sn, Sb, Pb or Bi doped with transition metals other than rare earth metals, e.g. Zr, Nb, Ta or Zn
- C03B2201/42—Doped silica-based glasses doped with metals, e.g. Ga, Sn, Sb, Pb or Bi doped with transition metals other than rare earth metals, e.g. Zr, Nb, Ta or Zn doped with titanium
-
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
- C03B2201/00—Type of glass produced
- C03B2201/06—Doped silica-based glasses
- C03B2201/30—Doped silica-based glasses doped with metals, e.g. Ga, Sn, Sb, Pb or Bi
- C03B2201/58—Doped silica-based glasses doped with metals, e.g. Ga, Sn, Sb, Pb or Bi doped with metals in non-oxide form, e.g. CdSe
-
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
- C03B2207/00—Glass deposition burners
- C03B2207/30—For glass precursor of non-standard type, e.g. solid SiH3F
-
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
- C03B2207/00—Glass deposition burners
- C03B2207/36—Fuel or oxidant details, e.g. flow rate, flow rate ratio, fuel additives
- C03B2207/38—Fuel combinations or non-standard fuels, e.g. H2+CH4, ethane
Landscapes
- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Manufacturing & Machinery (AREA)
- Materials Engineering (AREA)
- Organic Chemistry (AREA)
- Physics & Mathematics (AREA)
- Thermal Sciences (AREA)
- Glass Compositions (AREA)
Applications Claiming Priority (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US73452705P | 2005-11-07 | 2005-11-07 | |
US11/348,956 US20070105703A1 (en) | 2005-11-07 | 2006-02-06 | Deuteroxyle-doped silica glass, optical member and lithographic system comprising same and method of making same |
US11/583,619 US7635658B2 (en) | 2005-11-07 | 2006-10-19 | Deuteroxyl-doped silica glass, optical member and lithographic system comprising same and method of making same |
Publications (2)
Publication Number | Publication Date |
---|---|
TW200730460A TW200730460A (en) | 2007-08-16 |
TWI350276B true TWI350276B (en) | 2011-10-11 |
Family
ID=40308418
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
TW095140924A TWI350276B (en) | 2005-11-07 | 2006-11-05 | Deuteroxyl-doped silica glass, optical member and lithographic system comprising same and method of making same |
Country Status (3)
Country | Link |
---|---|
US (1) | US20070105703A1 (zh) |
CN (1) | CN101356125B (zh) |
TW (1) | TWI350276B (zh) |
Families Citing this family (8)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US7934390B2 (en) * | 2006-05-17 | 2011-05-03 | Carl Zeiss Smt Gmbh | Method for manufacturing a lens of synthetic quartz glass with increased H2 content |
US7964522B2 (en) * | 2006-08-31 | 2011-06-21 | Corning Incorporated | F-doped silica glass and process of making same |
WO2008140676A2 (en) * | 2007-05-09 | 2008-11-20 | Corning Incorporated | Glasses having low oh, od levels |
US8062986B2 (en) * | 2007-07-27 | 2011-11-22 | Corning Incorporated | Fused silica having low OH, OD levels and method of making |
US20090056381A1 (en) * | 2007-08-30 | 2009-03-05 | Mueller Michael A | Fused silica article loaded with deuterium and method of making |
US8268740B2 (en) * | 2008-02-07 | 2012-09-18 | Corning Incorporated | Halide free glasses having low OH, OD concentrations |
US8569149B2 (en) * | 2010-05-06 | 2013-10-29 | Micron Technology, Inc. | Method of treating a semiconductor device |
KR101703182B1 (ko) | 2014-12-12 | 2017-02-06 | 삼성중공업 주식회사 | 도장막의 부착력 시험 장치 |
Family Cites Families (12)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5325230A (en) * | 1989-06-09 | 1994-06-28 | Shin-Etsu Quartz Products Co., Ltd. | Optical members and blanks of synthetic silica glass and method for their production |
US5332702A (en) * | 1993-04-16 | 1994-07-26 | Corning Incorporated | Low sodium zircon refractory and fused silica process |
EP0780707A1 (de) * | 1995-12-21 | 1997-06-25 | Heraeus Quarzglas GmbH | Bauteil für die Übertragung energiereicher UV-Strahlung und Verfahren zur Herstellung eines solchen Bauteils und seine Verwendung |
US6619073B2 (en) * | 1996-03-05 | 2003-09-16 | Corning Incorporated | Method of increasing the initial transmittance of optical glass |
US6174509B1 (en) * | 1997-02-11 | 2001-01-16 | Corning Incorporated | Pure fused silica, furnace and method |
DE60025823T2 (de) * | 1999-04-26 | 2006-08-03 | Corning Incorporated | Optische wellenleiterfaser mit niedrigem wasserpeak und verfahren zu ihrer herstellung |
US6904772B2 (en) * | 2000-12-22 | 2005-06-14 | Corning Incorporated | Method of making a glass preform for low water peak optical fiber |
WO2002055445A2 (en) * | 2001-01-12 | 2002-07-18 | Corning Incorporated | Optical fiber and preform, method of manufacturing same, and optical component made therefrom |
JP2005503316A (ja) * | 2001-09-27 | 2005-02-03 | コーニング インコーポレイテッド | 石英ガラス生産のための改善された方法及び炉 |
US20040060327A1 (en) * | 2002-09-30 | 2004-04-01 | Berkey George E | Method for treating an optical fiber preform with deuterium |
KR101066281B1 (ko) * | 2003-08-29 | 2011-09-20 | 코닝 인코포레이티드 | 알칼리 금속 산화물을 함유하는 광섬유, 및 그 제조 방법및 장치 |
US7506522B2 (en) * | 2004-12-29 | 2009-03-24 | Corning Incorporated | High refractive index homogeneity fused silica glass and method of making same |
-
2006
- 2006-02-06 US US11/348,956 patent/US20070105703A1/en not_active Abandoned
- 2006-11-01 CN CN2006800504825A patent/CN101356125B/zh not_active Expired - Fee Related
- 2006-11-05 TW TW095140924A patent/TWI350276B/zh not_active IP Right Cessation
Also Published As
Publication number | Publication date |
---|---|
CN101356125A (zh) | 2009-01-28 |
US20070105703A1 (en) | 2007-05-10 |
TW200730460A (en) | 2007-08-16 |
CN101356125B (zh) | 2012-05-23 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
IL189122A0 (en) | Method of manufacturing an optical system | |
EP1810073A4 (en) | OPTICAL CALIBRATION SYSTEM AND METHOD | |
IL216818A0 (en) | Method of adjusting lighting optical device, lighting optical device, exposure system and exposure method | |
TWI350276B (en) | Deuteroxyl-doped silica glass, optical member and lithographic system comprising same and method of making same | |
EP1953805A4 (en) | OPTICAL LIGHTING SYSTEM, EXPOSURE SYSTEM AND EXPOSURE METHOD | |
EP1754257A4 (en) | OPTICAL LENS SYSTEM AND METHODS FOR MICROFLUIDIC DEVICES | |
EP1965528A4 (en) | OPTICAL TRANSMISSION SYSTEM AND METHOD | |
EP1738869A4 (en) | METHOD FOR MAKING LENS OF GLASSES AND SYSTEM FOR MAKING LENS OF GLASSES | |
TWI315725B (en) | Optical glass | |
EP1736805A4 (en) | OPTICAL WAVEGUIDE AND METHOD FOR MAKING OPTICAL WAVEGUIDES | |
ZA200804286B (en) | Glass sheet forming system and method | |
TWI371436B (en) | Optical glass | |
EP1855146B8 (en) | Lens for spectacles and method for forming lens for spectacles | |
GB2430498B (en) | Long wavelength, pure silica core single mode fiber and method of forming the same | |
GB2419683B (en) | Lens structure, optical transmitter, and method for producing same | |
EP1757964A4 (en) | OPTICAL LINK WITH GRADUATED INDEX, MANUFACTURING METHOD FOR AN OPTICAL LINK WITH GRADUATED INDEX, OPTICAL MODULE AND MANUFACTURING PROCESS FOR AN OPTICAL MODULE | |
EP1779058A4 (en) | SYSTEM AND METHOD FOR OPTICAL MEASUREMENT | |
IL198172A0 (en) | System for free space optical communication and method for method for operation thereof | |
EP1640346A4 (en) | OPTICAL GLASS | |
HK1105945A1 (en) | Silica microspheres, method for making and assembling same and possible uses of silica microspheres | |
GB0606024D0 (en) | Improved method of manufacturing glass | |
EP1909119A4 (en) | REFLECTIVE LINK, OPTICAL LINK, INTERFEROMETER SYSTEM, STAGE EQUIPMENT AND METHOD FOR MANUFACTURING COMPONENTS | |
EP1870384A4 (en) | GLASS COMPOSITION FOR LAMPS, LAMP, BACKLIGHT UNIT AND METHOD FOR MANUFACTURING GLASS COMPOSITION FOR LAMPS | |
GB0427733D0 (en) | Optical system | |
GB2398685B (en) | Optical transceiver and test system therefor |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
MM4A | Annulment or lapse of patent due to non-payment of fees |