TWI349645B - Supporting block and substrate transferring unit using the same - Google Patents

Supporting block and substrate transferring unit using the same

Info

Publication number
TWI349645B
TWI349645B TW097128807A TW97128807A TWI349645B TW I349645 B TWI349645 B TW I349645B TW 097128807 A TW097128807 A TW 097128807A TW 97128807 A TW97128807 A TW 97128807A TW I349645 B TWI349645 B TW I349645B
Authority
TW
Taiwan
Prior art keywords
same
supporting block
transferring unit
substrate transferring
substrate
Prior art date
Application number
TW097128807A
Other languages
Chinese (zh)
Other versions
TW200920671A (en
Inventor
Jin Sung Roh
Jae Sung Lee
Original Assignee
K C Tech Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by K C Tech Co Ltd filed Critical K C Tech Co Ltd
Publication of TW200920671A publication Critical patent/TW200920671A/en
Application granted granted Critical
Publication of TWI349645B publication Critical patent/TWI349645B/en

Links

Classifications

    • G—PHYSICS
    • G02—OPTICS
    • G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on liquid crystals, e.g. single liquid crystal display cells
    • G02F1/1303—Apparatus specially adapted to the manufacture of LCDs
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
    • H01L21/67703—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations
    • H01L21/67706—Mechanical details, e.g. roller, belt
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/683—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping
    • H01L21/687—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using mechanical means, e.g. chucks, clamps or pinches
    • H01L21/68714—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using mechanical means, e.g. chucks, clamps or pinches the wafers being placed on a susceptor, stage or support
    • H01L21/68785—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using mechanical means, e.g. chucks, clamps or pinches the wafers being placed on a susceptor, stage or support characterised by the mechanical construction of the susceptor, stage or support

Landscapes

  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Nonlinear Science (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Chemical & Material Sciences (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Optics & Photonics (AREA)
  • Sliding-Contact Bearings (AREA)
  • General Details Of Gearings (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
  • Rolling Contact Bearings (AREA)
TW097128807A 2007-07-31 2008-07-30 Supporting block and substrate transferring unit using the same TWI349645B (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
KR2020070012816U KR20090001215U (en) 2007-07-31 2007-07-31 Supporting block and substrate transferring unit using the same

Publications (2)

Publication Number Publication Date
TW200920671A TW200920671A (en) 2009-05-16
TWI349645B true TWI349645B (en) 2011-10-01

Family

ID=40331991

Family Applications (1)

Application Number Title Priority Date Filing Date
TW097128807A TWI349645B (en) 2007-07-31 2008-07-30 Supporting block and substrate transferring unit using the same

Country Status (3)

Country Link
KR (1) KR20090001215U (en)
CN (1) CN101359587B (en)
TW (1) TWI349645B (en)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR101388499B1 (en) * 2012-12-21 2014-04-23 주식회사 케이씨텍 Apparatus for lubricating and washing driving part of substrate cleaning apparatus
WO2019199537A1 (en) * 2018-04-12 2019-10-17 Laitram, L.L.C. Mounting plate for conveyor components including grease egress
CN116092992B (en) * 2022-12-12 2024-02-20 苏州赛森电子科技有限公司 Transmission assembly and silicon chip conveyor

Also Published As

Publication number Publication date
TW200920671A (en) 2009-05-16
KR20090001215U (en) 2009-02-04
CN101359587B (en) 2011-11-09
CN101359587A (en) 2009-02-04

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Legal Events

Date Code Title Description
MM4A Annulment or lapse of patent due to non-payment of fees