TWI348395B - Liquid blade capable of providing a substrate with a uniform waterfall - Google Patents

Liquid blade capable of providing a substrate with a uniform waterfall

Info

Publication number
TWI348395B
TWI348395B TW097124514A TW97124514A TWI348395B TW I348395 B TWI348395 B TW I348395B TW 097124514 A TW097124514 A TW 097124514A TW 97124514 A TW97124514 A TW 97124514A TW I348395 B TWI348395 B TW I348395B
Authority
TW
Taiwan
Prior art keywords
substrate
providing
blade capable
liquid blade
waterfall
Prior art date
Application number
TW097124514A
Other languages
Chinese (zh)
Other versions
TW201000216A (en
Inventor
Hsin Chuan Chen
Hsien Kai Peng
Original Assignee
Au Optronics Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Au Optronics Corp filed Critical Au Optronics Corp
Priority to TW097124514A priority Critical patent/TWI348395B/en
Priority to KR1020080082083A priority patent/KR100973218B1/en
Publication of TW201000216A publication Critical patent/TW201000216A/en
Application granted granted Critical
Publication of TWI348395B publication Critical patent/TWI348395B/en

Links

Classifications

    • G—PHYSICS
    • G02—OPTICS
    • G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on liquid crystals, e.g. single liquid crystal display cells
    • G02F1/1303—Apparatus specially adapted to the manufacture of LCDs
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05C—APPARATUS FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05C5/00—Apparatus in which liquid or other fluent material is projected, poured or allowed to flow on to the surface of the work
    • B05C5/02—Apparatus in which liquid or other fluent material is projected, poured or allowed to flow on to the surface of the work the liquid or other fluent material being discharged through an outlet orifice by pressure, e.g. from an outlet device in contact or almost in contact, with the work
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/67005—Apparatus not specifically provided for elsewhere
    • H01L21/67011—Apparatus for manufacture or treatment
    • H01L21/67017—Apparatus for fluid treatment

Landscapes

  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Nonlinear Science (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Computer Hardware Design (AREA)
  • Power Engineering (AREA)
  • Chemical & Material Sciences (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • Optics & Photonics (AREA)
  • Cleaning Or Drying Semiconductors (AREA)
  • Cleaning By Liquid Or Steam (AREA)
TW097124514A 2008-06-30 2008-06-30 Liquid blade capable of providing a substrate with a uniform waterfall TWI348395B (en)

Priority Applications (2)

Application Number Priority Date Filing Date Title
TW097124514A TWI348395B (en) 2008-06-30 2008-06-30 Liquid blade capable of providing a substrate with a uniform waterfall
KR1020080082083A KR100973218B1 (en) 2008-06-30 2008-08-21 Liquid Blade Capable of Providing a Substrate with a Uniform Waterfall

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
TW097124514A TWI348395B (en) 2008-06-30 2008-06-30 Liquid blade capable of providing a substrate with a uniform waterfall

Publications (2)

Publication Number Publication Date
TW201000216A TW201000216A (en) 2010-01-01
TWI348395B true TWI348395B (en) 2011-09-11

Family

ID=41813094

Family Applications (1)

Application Number Title Priority Date Filing Date
TW097124514A TWI348395B (en) 2008-06-30 2008-06-30 Liquid blade capable of providing a substrate with a uniform waterfall

Country Status (2)

Country Link
KR (1) KR100973218B1 (en)
TW (1) TWI348395B (en)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR101267464B1 (en) * 2011-10-13 2013-05-31 세메스 주식회사 Apparatus for jetting fluid
CN111482328A (en) * 2020-04-13 2020-08-04 Tcl华星光电技术有限公司 Coating device and coating method thereof

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6117236A (en) 1998-03-18 2000-09-12 Eastman Kodak Company Curtain coating apparatus and method with continuous width adjustment
JP2002210401A (en) 2001-01-16 2002-07-30 Sekisui House Ltd Flow coater
JP2005034800A (en) 2003-07-18 2005-02-10 Mecha Enji:Kk Curtain flow coater for liquid coating material

Also Published As

Publication number Publication date
TW201000216A (en) 2010-01-01
KR20100003151A (en) 2010-01-07
KR100973218B1 (en) 2010-07-30

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