TWI347654B - Interconnect structure and fabricating method of the same - Google Patents

Interconnect structure and fabricating method of the same

Info

Publication number
TWI347654B
TWI347654B TW096136781A TW96136781A TWI347654B TW I347654 B TWI347654 B TW I347654B TW 096136781 A TW096136781 A TW 096136781A TW 96136781 A TW96136781 A TW 96136781A TW I347654 B TWI347654 B TW I347654B
Authority
TW
Taiwan
Prior art keywords
same
interconnect structure
fabricating method
fabricating
interconnect
Prior art date
Application number
TW096136781A
Other languages
English (en)
Other versions
TW200917418A (en
Inventor
Chin Sheng Yang
Original Assignee
United Microelectronics Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by United Microelectronics Corp filed Critical United Microelectronics Corp
Priority to TW096136781A priority Critical patent/TWI347654B/zh
Publication of TW200917418A publication Critical patent/TW200917418A/zh
Application granted granted Critical
Publication of TWI347654B publication Critical patent/TWI347654B/zh

Links

TW096136781A 2007-10-01 2007-10-01 Interconnect structure and fabricating method of the same TWI347654B (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
TW096136781A TWI347654B (en) 2007-10-01 2007-10-01 Interconnect structure and fabricating method of the same

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
TW096136781A TWI347654B (en) 2007-10-01 2007-10-01 Interconnect structure and fabricating method of the same

Publications (2)

Publication Number Publication Date
TW200917418A TW200917418A (en) 2009-04-16
TWI347654B true TWI347654B (en) 2011-08-21

Family

ID=44726385

Family Applications (1)

Application Number Title Priority Date Filing Date
TW096136781A TWI347654B (en) 2007-10-01 2007-10-01 Interconnect structure and fabricating method of the same

Country Status (1)

Country Link
TW (1) TWI347654B (zh)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN103871964B (zh) * 2014-03-11 2016-11-02 上海华虹宏力半导体制造有限公司 互连线结构及其形成方法
TWI736315B (zh) * 2020-06-12 2021-08-11 華邦電子股份有限公司 具有防護柱的半導體記憶裝置及其製造方法

Also Published As

Publication number Publication date
TW200917418A (en) 2009-04-16

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Legal Events

Date Code Title Description
MM4A Annulment or lapse of patent due to non-payment of fees