TWI346970B - A low-defect-density epitaxial substrate - Google Patents

A low-defect-density epitaxial substrate

Info

Publication number
TWI346970B
TWI346970B TW098136665A TW98136665A TWI346970B TW I346970 B TWI346970 B TW I346970B TW 098136665 A TW098136665 A TW 098136665A TW 98136665 A TW98136665 A TW 98136665A TW I346970 B TWI346970 B TW I346970B
Authority
TW
Taiwan
Prior art keywords
defect
low
epitaxial substrate
density epitaxial
density
Prior art date
Application number
TW098136665A
Other languages
Chinese (zh)
Other versions
TW201007820A (en
Inventor
Dong Sing Wuu
Ray Hua Horng
Woei Kai Wang
Kuo Sheng Wen
Original Assignee
Nat Univ Chung Hsing
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nat Univ Chung Hsing filed Critical Nat Univ Chung Hsing
Priority to TW098136665A priority Critical patent/TWI346970B/en
Publication of TW201007820A publication Critical patent/TW201007820A/en
Application granted granted Critical
Publication of TWI346970B publication Critical patent/TWI346970B/en

Links

TW098136665A 2006-07-06 2006-07-06 A low-defect-density epitaxial substrate TWI346970B (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
TW098136665A TWI346970B (en) 2006-07-06 2006-07-06 A low-defect-density epitaxial substrate

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
TW098136665A TWI346970B (en) 2006-07-06 2006-07-06 A low-defect-density epitaxial substrate

Publications (2)

Publication Number Publication Date
TW201007820A TW201007820A (en) 2010-02-16
TWI346970B true TWI346970B (en) 2011-08-11

Family

ID=44827224

Family Applications (1)

Application Number Title Priority Date Filing Date
TW098136665A TWI346970B (en) 2006-07-06 2006-07-06 A low-defect-density epitaxial substrate

Country Status (1)

Country Link
TW (1) TWI346970B (en)

Also Published As

Publication number Publication date
TW201007820A (en) 2010-02-16

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Legal Events

Date Code Title Description
MM4A Annulment or lapse of patent due to non-payment of fees