TWI341567B - Vacuum processing apparatus - Google Patents

Vacuum processing apparatus

Info

Publication number
TWI341567B
TWI341567B TW096120396A TW96120396A TWI341567B TW I341567 B TWI341567 B TW I341567B TW 096120396 A TW096120396 A TW 096120396A TW 96120396 A TW96120396 A TW 96120396A TW I341567 B TWI341567 B TW I341567B
Authority
TW
Taiwan
Prior art keywords
processing apparatus
vacuum processing
vacuum
processing
Prior art date
Application number
TW096120396A
Other languages
Chinese (zh)
Other versions
TW200746333A (en
Inventor
Saeng Hyun Cho
Sung Il Ahn
Yong Jun Park
Dae Geon Yoon
Tae Young Kim
Original Assignee
Ips Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from KR1020060051338A external-priority patent/KR100790797B1/en
Priority claimed from KR1020070021650A external-priority patent/KR100803727B1/en
Application filed by Ips Ltd filed Critical Ips Ltd
Publication of TW200746333A publication Critical patent/TW200746333A/en
Application granted granted Critical
Publication of TWI341567B publication Critical patent/TWI341567B/en

Links

TW096120396A 2006-06-08 2007-06-06 Vacuum processing apparatus TWI341567B (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
KR1020060051338A KR100790797B1 (en) 2006-06-08 2006-06-08 Vacuum Processing Apparatus
KR1020070021650A KR100803727B1 (en) 2007-03-05 2007-03-05 Vacuum processing apparatus

Publications (2)

Publication Number Publication Date
TW200746333A TW200746333A (en) 2007-12-16
TWI341567B true TWI341567B (en) 2011-05-01

Family

ID=55855795

Family Applications (1)

Application Number Title Priority Date Filing Date
TW096120396A TWI341567B (en) 2006-06-08 2007-06-06 Vacuum processing apparatus

Country Status (1)

Country Link
TW (1) TWI341567B (en)

Also Published As

Publication number Publication date
TW200746333A (en) 2007-12-16

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Legal Events

Date Code Title Description
MM4A Annulment or lapse of patent due to non-payment of fees