TWI340869B - Exposure process, fabricating method of pixel structure and half tone mask thereof - Google Patents

Exposure process, fabricating method of pixel structure and half tone mask thereof

Info

Publication number
TWI340869B
TWI340869B TW096128995A TW96128995A TWI340869B TW I340869 B TWI340869 B TW I340869B TW 096128995 A TW096128995 A TW 096128995A TW 96128995 A TW96128995 A TW 96128995A TW I340869 B TWI340869 B TW I340869B
Authority
TW
Taiwan
Prior art keywords
exposure process
pixel structure
half tone
tone mask
fabricating method
Prior art date
Application number
TW096128995A
Other languages
Chinese (zh)
Other versions
TW200907560A (en
Inventor
Kuo Feng Hung
Yuan Hao Chang
Original Assignee
Chunghwa Picture Tubes Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Chunghwa Picture Tubes Ltd filed Critical Chunghwa Picture Tubes Ltd
Priority to TW096128995A priority Critical patent/TWI340869B/en
Publication of TW200907560A publication Critical patent/TW200907560A/en
Application granted granted Critical
Publication of TWI340869B publication Critical patent/TWI340869B/en

Links

TW096128995A 2007-08-07 2007-08-07 Exposure process, fabricating method of pixel structure and half tone mask thereof TWI340869B (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
TW096128995A TWI340869B (en) 2007-08-07 2007-08-07 Exposure process, fabricating method of pixel structure and half tone mask thereof

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
TW096128995A TWI340869B (en) 2007-08-07 2007-08-07 Exposure process, fabricating method of pixel structure and half tone mask thereof

Publications (2)

Publication Number Publication Date
TW200907560A TW200907560A (en) 2009-02-16
TWI340869B true TWI340869B (en) 2011-04-21

Family

ID=44723450

Family Applications (1)

Application Number Title Priority Date Filing Date
TW096128995A TWI340869B (en) 2007-08-07 2007-08-07 Exposure process, fabricating method of pixel structure and half tone mask thereof

Country Status (1)

Country Link
TW (1) TWI340869B (en)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TWI435185B (en) 2010-01-29 2014-04-21 Chunghwa Picture Tubes Ltd A method of forming exposure patterns

Also Published As

Publication number Publication date
TW200907560A (en) 2009-02-16

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Legal Events

Date Code Title Description
MM4A Annulment or lapse of patent due to non-payment of fees