TWI340429B - Method of forming contact window - Google Patents

Method of forming contact window

Info

Publication number
TWI340429B
TWI340429B TW096116414A TW96116414A TWI340429B TW I340429 B TWI340429 B TW I340429B TW 096116414 A TW096116414 A TW 096116414A TW 96116414 A TW96116414 A TW 96116414A TW I340429 B TWI340429 B TW I340429B
Authority
TW
Taiwan
Prior art keywords
contact window
forming contact
forming
window
contact
Prior art date
Application number
TW096116414A
Other languages
Chinese (zh)
Other versions
TW200845296A (en
Inventor
Hong Wen Lee
Original Assignee
Nanya Technology Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nanya Technology Corp filed Critical Nanya Technology Corp
Priority to TW096116414A priority Critical patent/TWI340429B/en
Publication of TW200845296A publication Critical patent/TW200845296A/en
Application granted granted Critical
Publication of TWI340429B publication Critical patent/TWI340429B/en

Links

TW096116414A 2007-05-09 2007-05-09 Method of forming contact window TWI340429B (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
TW096116414A TWI340429B (en) 2007-05-09 2007-05-09 Method of forming contact window

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
TW096116414A TWI340429B (en) 2007-05-09 2007-05-09 Method of forming contact window

Publications (2)

Publication Number Publication Date
TW200845296A TW200845296A (en) 2008-11-16
TWI340429B true TWI340429B (en) 2011-04-11

Family

ID=44822835

Family Applications (1)

Application Number Title Priority Date Filing Date
TW096116414A TWI340429B (en) 2007-05-09 2007-05-09 Method of forming contact window

Country Status (1)

Country Link
TW (1) TWI340429B (en)

Also Published As

Publication number Publication date
TW200845296A (en) 2008-11-16

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