九、發明說明： 【發明所屬之技術領域】 本發明係提供一種可變阻尼器，包括有一底座、中間 座、上座、夾持元件、氣壓缸座及彈簀，另具有一控制系 統，該控制系統係藉由一感知器來感測機台上移動載具之 振動訊號，振動訊號經由電腦控制中心之資料擷取卡讀取 及對振動源進行方法演算而取得控制訊號並予以輸出，複 傳送訊號至邏輯開關電路去控制電磁閥來操作阻尼器，可 依受測機台之振動行為的狀況而隨時改變阻尼器的阻尼 常數，使阻尼器具有軟硬變化的效果，藉以適時有效的消 散機台的擾動行為，亦可達到隔離地板高頻率振動的良好 效果。 【先前技術】 由於近年來電子技術、精密製程與檢測技術不斷地朝 向微小化演進，加上自動化的創新演進，使得製程設備與 量測機台所要求的振動規範也越來越嚴格。目前已知許多 精密儀器普遍採用氣墊式系統來作為隔振的功能。但遇到 質量大的物件移動時，往往造成機台不停的搖晃，影響製 造或檢測的進行。加入阻尼器可以使擾亂能量快速衰竭， 也因為增加支撐的硬度而造成隔振效果降低，其中水平振 動會造成影像模糊，垂直振動則會造成影像失焦問題。 許多超精密設備考慮到成本問題而選用被動式隔振 系統時，其主要是採用可以隨時調整高度之氣墊彈簧以保 1337232 持機台之水平，他的優點是自然頻率很低，通常有效隔振 頻率下限可以達到2〜3Hz。然而被動冬隔振系統都面臨到 同一個問題，當機台上有其他的擾動源（如機台上的移動 載具）時，整個機台會以隔振系統自然頻率晃動而很慢才 會停止，往往影響到設備儀器的運作，一般改善方案也是 必須選擇適當的阻尼係數的阻尼器而達到降低隔離地板 振動的效果，所以要選擇適當的阻尼器一直都是隔振專業 人員困擾的問題。被動隔振系統的另一個問題，對於低頻 率振動的隔離效果不佳，尤其是隔振系統自然頻率的震 動。對於自然頻率超過20〜30Hz的多數儀器設備而言， 這些無法隔離而傳遞上來的低頻率地板振動在經過設備 儀器結構時，已經大幅衰弱而沒有明顯的影響。 另由相關領域中之學者C. Erin針對雙空腔之氣墊彈 簧的數學模型進行理論與實驗之研究，在早期的理論建模 研究中忽略了振動膜（diaphragm)的效應，使得實驗與理論 預測產生了明顯的誤差。C. Erin將此影響納入到數學模 型中，改善了模型預測的準確性。目前有許多氣墊彈簧產 品採用此種雙空腔之型式，藉由改變限流器的孔隙來改變 隔振器之阻尼效果。此種隔振器的最佳阻尼值調整不易， 且其無法依據機台振動行為狀況而隨時調整阻尼值。 而L. Benassi與S.J. Elliott學者運用慣性激振器進行 主動隔振平台的研究，並以相對位移量回饋至PID控制器 進行慣性激振器自然頻率與阻尼值的調整。慣性激振器相 對於其他致動器的不同點是不需要反作用力的支撐基 1337,232 礎為了保主動隔振控制器良好的穩定性，慣性激振器 必須有低的自然頻率與良好的阻尼特性，但是前者的缺點 則會導致慣性激振器過大的靜態位移，而他們提出之前述 方法可以有效克服此項問題。在平台的主動隔振上則採用 振動速度回饋控制來達到減振的目的。 近年來，市場上已經有各種主動式隔振系統的產品， 以加強低頻率振動隔離效果，然而此種隔振系統成本高， 並非所有精达儀器没備都需要使用到如此高規格之隔振 系統。本發明人即是有鑑於此，乃欲藉由一種阻尼器與控 制系統來達到抑制傳統被動式隔振系統在自然頻率晃動 而很慢才會停止的缺失，同時希望降低此晃動對設備儀器 運作的衫響，且會根據機台振動行為而隨時改變隔振系統 的阻尼常數。經由發明人精^研發，終乃發展出本發明。 【發明内容】 本發明之主要目的，其係提供一種可變阻尼器，該阻 尼器設有一控制系統，可藉由一感知器來感測機台上移動 載具之振動訊號，振動訊號經由電腦控制中心之資料擷取 卡讀取及對振動源進行方法演算而取得控制訊號並予以 輸出，複傳送訊號至邏輯開關電路去控制電磁閥來操作阻 尼器，可依受測機台之振動行為的狀況而隨時改變阻尼器 的阻尼常數，使阻尼器具有軟硬變化的效果，藉以適時有 效的消散機台的擾動行為，亦可達到隔離地板高頻率振動 的良好效果。 出 7232 本發明之另一主要目的，其係提供—種可變阻 該可變阻尼器係含括三個部份，最下方為頂面開口之二面 :底座，内置黏紙中間為另一個上，方開J之= =座，内部放置汽壓缸與夾持元件，底部並裝 其與下方六面體底座之内底部保持—定的間隙；最上芦之 ίίΐ固定於受測機台上，該上座同時作為夾持元件之夾 有關本發明為達上述目的所據以實施之控制方法及 其構造，茲佐以圖式詳加說明如后。 【實施方式】 請先參考第-圖，本發明可變阻尼器係設有一控制系 統，该控制系統係藉由—感知器來感測機台上移動載具之 振動訊號，振動訊號經由電腦控制中心、之轉擷取卡;賣取 及對振動源進行方法演算而取得控制訊號並予以輸出，複 傳运訊號至邏輯開關電路去控制電磁閥來操作阻尼器，可 依叉測機台之振動行為的狀況而隨時改變阻尼器的阻尼 ^數，使阻尼器具有軟硬變化的效果，藉以適時有效的消 散機台的擾動行為，亦可達到隔離地板高頻率振動的良好 效果。本控制系統對振動源之振動訊號可進行不同方法之 演算，其中如利用模糊控制演算法則，模糊控制是以類似 人類經驗法則if_then模糊性的思考模式為決策的最佳化 過程。模糊控制架構包含五個主要項目··定義變數、模糊 化、知識庫、邏輯判斷及解模糊。其控制理論建構設計步 1337232 驟如下： (1) 量測控制器輸入變數之明確值。 (2) 將输入變數之明確值正規化^ (3) 模糊論域分割之隸屬函數，找到相對應的模糊標 藏與隸屬度。 ' $ (4) 解模糊化將一模糊數值轉換為一明確值，以此明 確值來控制實際系統。 另者，運算方法可採用3輸入Λ輸出的類神經模糊方 法，其中輸入分別為振動之位移訊號、速度訊號與加速度 说’其系統架構如第六圖。 若是全部有N條規則，則其中第讲條規則定義如下·· 騎 '若X丨是AU且,2是八…是Αη，則輸出為少爪， 其中A文2、h分別是輸入，Aiibl〜p)代表A的模糊IX. Description of the Invention: [Technical Field] The present invention provides a variable damper comprising a base, an intermediate seat, an upper seat, a clamping member, a pneumatic cylinder block and a magazine, and a control system for controlling The system senses the vibration signal of the mobile vehicle on the machine by a sensor. The vibration signal is read by the data of the computer control center and the method is calculated by the vibration source to obtain the control signal and output. The signal-to-logic switching circuit controls the solenoid valve to operate the damper, and the damping constant of the damper can be changed at any time according to the vibration behavior of the machine under test, so that the damper has the effect of soft and hard change, so that the dissipator is timely and effective. The disturbance behavior of the platform can also achieve the good effect of high frequency vibration of the isolation floor. [Prior Art] Due to the continuous evolution of electronic technology, precision process and inspection technology in recent years, and the evolution of automation, the vibration specifications required for process equipment and measuring machines are becoming more and more strict. Air-cushion systems are commonly used in many precision instruments as a function of vibration isolation. However, when a large-quality object moves, it often causes the machine to continually shake, affecting the manufacturing or testing. Adding a damper can quickly destabilize the energy, and also reduce the vibration isolation effect by increasing the hardness of the support. The horizontal vibration will cause the image to be blurred, and the vertical vibration will cause the image to be out of focus. When many ultra-precision equipments use passive vibration isolation systems in consideration of cost, they mainly use air-cushion springs that can adjust the height at any time to maintain the level of the 1373232 holding machine. His advantage is that the natural frequency is very low, usually the effective vibration isolation frequency. The lower limit can reach 2 to 3 Hz. However, the passive winter vibration isolation system faces the same problem. When there are other disturbance sources on the machine (such as the mobile vehicle on the machine), the whole machine will sway at the natural frequency of the vibration isolation system and will be slow. Stopping often affects the operation of equipment and equipment. The general improvement scheme is also to choose the appropriate damping coefficient damper to reduce the vibration of the isolated floor. Therefore, choosing the appropriate damper has always been a problem for the vibration isolation professional. Another problem with passive vibration isolation systems is the poor isolation of low frequency vibrations, especially the natural frequency of the vibration isolation system. For most instruments with a natural frequency of more than 20~30Hz, these low-frequency floor vibrations that cannot be isolated and transmitted are greatly degraded without significant impact when passing through the structure of the equipment. In addition, C. Erin, a scholar in the related field, conducted theoretical and experimental research on the mathematical model of the double-cavity air-cushion spring. In the early theoretical modeling research, the effect of the diaphragm was neglected, making experimental and theoretical predictions. There is a significant error. C. Erin incorporates this impact into the mathematical model, improving the accuracy of model predictions. There are many types of air spring products that use this type of double cavity to change the damping effect of the isolator by changing the aperture of the restrictor. The optimal damping value adjustment of such a vibration isolator is not easy, and it is impossible to adjust the damping value at any time according to the vibration behavior of the machine. L. Benassi and S.J. Elliott scholars used the inertial exciter to study the active vibration isolation platform, and fed back to the PID controller with relative displacement to adjust the natural frequency and damping value of the inertia exciter. The difference between the inertia exciter and the other actuators is that the support base 1337, 232 does not require a reaction force. In order to maintain the good stability of the active vibration isolation controller, the inertial vibration exciter must have a low natural frequency and good Damping characteristics, but the former's shortcomings will lead to excessive static displacement of the inertial exciter, and the aforementioned method proposed by them can effectively overcome this problem. On the active vibration isolation of the platform, the vibration speed feedback control is used to achieve the purpose of vibration reduction. In recent years, there have been various active vibration isolation system products on the market to enhance the low-frequency vibration isolation effect. However, such vibration isolation system is costly, and not all of the precision instruments are required to use such high-standard vibration isolation. system. The present inventors intend to reduce the loss of the conventional passive vibration isolation system to slow down at a natural frequency by a damper and a control system, and at the same time, it is desirable to reduce the operation of the device on the device. The shirt is ringing, and the damping constant of the vibration isolation system is changed at any time according to the vibration behavior of the machine. The invention was developed by the inventors. SUMMARY OF THE INVENTION The main object of the present invention is to provide a variable damper that is provided with a control system that senses a vibration signal of a moving vehicle on a machine by a sensor, and the vibration signal is transmitted through a computer. The data of the control center reads the card and performs the method calculation on the vibration source to obtain the control signal and output it, and transmits the signal to the logic switch circuit to control the solenoid valve to operate the damper according to the vibration behavior of the machine under test. In the situation, the damping constant of the damper is changed at any time, so that the damper has the effect of soft and hard change, so that the disturbing behavior of the dissipating machine can be achieved at a timely and effective manner, and the high frequency vibration of the isolation floor can also be achieved. Another main object of the present invention is to provide a variable resistance. The variable damper comprises three parts, the bottom part being the two sides of the top opening: the base, the middle of the adhesive paper is another On the upper side, the square open J = = seat, the internal position of the steam cylinder and the clamping element, and the bottom is mounted to maintain a fixed gap with the bottom of the lower hexahedral base; the uppermost LY ΐ is fixed on the machine under test The upper seat is also used as a clamping member. The control method and the configuration thereof according to the present invention for achieving the above object are described in detail below. [Embodiment] Please refer to the first figure. The variable damper of the present invention is provided with a control system for sensing the vibration signal of the moving vehicle on the machine by the sensor, and the vibration signal is controlled by the computer. The center and the transfer card; sell and control the vibration source to obtain the control signal and output it, and transmit the signal to the logic switch circuit to control the solenoid valve to operate the damper, which can be used to vibrate the machine The behavior of the damper can be changed at any time, so that the damper has the effect of soft and hard changes, so that the disturbance behavior of the dissipating machine can be achieved at a timely and effective manner, and the high-frequency vibration of the isolation floor can also be achieved. The control system can perform different methods for the vibration signal of the vibration source. For example, if the fuzzy control algorithm is used, the fuzzy control is a decision-making optimization process based on the thinking mode of the human-like rule if_then fuzziness. The fuzzy control architecture consists of five main items: defining variables, fuzzification, knowledge base, logical judgment, and defuzzification. The control theory construction design step 1337232 is as follows: (1) Measure the explicit value of the controller input variable. (2) Normalize the explicit value of the input variable ^ (3) The membership function of the fuzzy domain segmentation, find the corresponding fuzzy label and membership. ' $ (4) Unfuzzification converts a fuzzy value into a clear value, which is used to control the actual system. In addition, the arithmetic method can adopt the neuro-fuzzy method of 3-input Λ output, in which the input is the displacement signal, velocity signal and acceleration of the vibration respectively, and its system architecture is as shown in the sixth figure. If there are all N rules, then the first rule is defined as follows: · If 'X is AU and 2 is eight... is Αη, then the output is less claws, where A and h are inputs respectively, Aiibl ~p) represents the blur of A
集合，A2j(j = l〜q)代表々的模糊集合，A3k(k=i〜r)代表X 的模糊集合’而wLy._1>+Wm代表第m條模糊 規則的輸出1 m純舰狀真實度使㈣積運算法 (product operator)可以表示如下： ^m(Ar1,x2,X3)-Ali(x1)A2j(x2)A3k(x3) 其中，Aub!)代表Χι的真實度，Ayy代表巧的真實 度’ A3k(x3)代表々的真實度。由重心法得解模糊化輸出 pgr ΣΣΣ^ά^)凡 y >.1 1 /._! P ^ <\ r ΣΣΣ^(^1^2^3) i=l /=1 k~\ 類神經扠糊學習演算法的目的在於調整歸屬函數之 =¾▼輸出值，使其達到最佳化。目標函 ㈣制^為結果期望值，f為類神經模糊模式的實 1所引用的規屬函數為n考慮歸 數 ”中心值為’寬度為0 ’如第七圖’則歸屬 函數A可以表示成A(flAx)。由定義得 tl5 n b< < ^Set, A2j(j = l~q) represents the fuzzy set of 々, A3k(k=i~r) represents the fuzzy set of X' and wLy._1>+Wm represents the output of the mth fuzzy rule 1 m pure ship The degree of truth makes the product operator can be expressed as follows: ^m(Ar1,x2,X3)-Ali(x1)A2j(x2)A3k(x3) where Aub!) represents the realism of Χι, Ayy stands for The true degree of truth 'A3k(x3) stands for the realism of 々. The fuzzy center method is used to solve the fuzzy output pgr ΣΣΣ^ά^) where y >.1 1 /._! P ^ <\ r ΣΣΣ^(^1^2^3) i=l /=1 k~\ The purpose of the neurotic-like learning algorithm is to adjust the output value of the attribution function to optimize it. The target function (4) is the expected value of the result, f is the norm-like function of the neuro-fuzzy mode, and the norm function is n. The center value is 'width 0'. As shown in the seventh figure, the attribution function A can be expressed as A(flAx). Defined by tl5 n b<< ^
b α~2 X-a+I 〇 otherwise =控制方法所提出的類神經模糊學習演算法是應用 最陡坡降法’使目標函數E最小化，即 ^ + ΐ) = α(/)-α^ db 二中’代表疊代次數，α、β、？為學習率。本發明之 類神經模糊控制方塊圖係可如第人圖所示者。 在資料擷取方面的介面卡係採用美商慧基儀器股份 有限公司所開發的咖34Ε之介面卡，摘取由加速規量 及，=。機構作動所造成的加速度訊號。再使用圖控式程 Lab VIEW」，設計圖控式介面應用系統，依照所 得加速度·^經由模糊控制最佳化後控制調整步進馬達 的作：來達到適時的減緩機台本身所造成的振動。 °月再參考第二至五圖，本發明之可變阻尼器係含括 有.底座1、中間座2、上座3、夾持元件4、氣藶缸座$ 及彈ΐ 6’底座1係為上方有一開^ ^且設有一内容室 1337232 U之六方體，前述内容室12可容設一中間座2,於該内 谷室12底部及中間座2之底部外設有複數個彈簧6以供 支撐，間座2之重量。中間座2亦為一上方有」開口 2; 及谷置室22之立方體，前述容置室22可容納氣壓缸座5, 於中間座2底部設有複數個定位孔2〇。上座3，其體積小 於前述中間座2，於下方具有-開口 3卜頂壁％、設有複 數個定位孔34。請同時參考第五圖，一失持元件*，其具 有上、下台座4卜42’於上、下台座“、42之間設：四 只利用轴桿40相樞接之曲臂連桿44、45,於接近袖桿牝 幫曲處另設有-緊夾持元件43,該緊爽持元件43之頭端 係可利用具有防滑功能之彈性軟塾431來完成。一氣壓缸 座5’於座體四角邊處係設有四長固定桿53,該長固定桿 之頂端則以螺帽46將上台座41予以⑽Μ㈣缸座 1軸桿56則是穿伸前述下台座42且以大螺帽η固定 ^述下。座42。則述氣堡缸座5並設有可提供壓力進 :官道之進口端57及出口端58。因此，當氣壓缸座5之 轴^6進行外伸或内縮之動作時，即會導致前述緊爽持 =動作之料連桿体45進行外張式之f曲及内縮式之 =;广壓缸座5可利用螺栓25穿伸中間座2 〇’同時利用墊圈23及螺帽2“ 固定於中間座2處。 1337232 本發明阻尼器之上座3係可利用螺栓8先行結合一連 接座7，連接座7之銜接壁71則可被定位於待測機台。 本發明阻尼器係可在底座丨之内容室12填注齒輪 油，t機台上之移動載具產生振動且由感知器得知振動訊 號’經由資料擷取(DAQ)介面卡傳送訊號給控制器的模糊 控制系統處理，使用模糊控制系統最佳化的訊號來控制調 整步進馬達改變阻尼效果的大小，使得整個擾動過程中阻 尼的效果能依照震動加速度大小的改變而調整至最適合 的值，而適時的減緩抑制擾動的振動，當隔振平台上的擾 動消除後又能迅速將阻尼效果調整至最小’隔絕外在環境 震動對設備所造成的影響。 可變阻尼器之控制系統藉由感測機台振動行為的狀 況而隨時改變阻尼常數，使隔振系統具有軟硬變化的效 果，藉以適時有效的消散機台的擾動行為，亦可達到隔離 地板高頻率振動的良好效果。 請參考第三及四圖所示，本發明阻尼器在夾持與放開 (ON-OFF)狀態的示意圖，第三圖係表達阻尼器之夾持元 件4並未與上座3之周側壁35產生作用。第四圖係表達 阻尼器之夾持元件4與上座3之周側壁35產生作用。另 外經由實驗測試所得之阻尼效果可如第九及十圖。當阻尼 器放開（OFF)時，且施加外力將平台往下壓一個初始位 12 ^37232 快速賴’此時平台會以自錢率絲盪，並以指數 卷、、衰減’恢復到平衡位置，所經的時間約4秒，反之， 夾持(0酬，阻尼會抑制平台晃動，會快迷衰減 與敌Η位Γ其時間大约花^秒，因此可得知阻尼器夾持 二=_约4倍左右。阻尼_時可快迷縮短 動至平衡所經的時間，明顯達到抑制效果。 一當阻尼器爽持或放開時都會影響平台的擾動，可由第 知阻尼器切換從0N_F，衝擊所造成 的最大峰值為2G‘lmg，且緩慢的衰減至平衡位置。 尼器切換從0FF變⑽時衝擊所造成的最大峰:為 70.lmg’快速衰減至平衡位置，大約-秒就㈣减下來、。 平：二Γ尼器夾持(⑽)時’阻尼變大，短隔振 千口晃動的㈣，隔振平台從晃動至平衡位置所 由四秒縮減為一秒，且可降低隔振平台自然頻率的振幅， 而阻尼器放開（〇Fns#，阳e辦, )時阻尼變小則可隔絕外在環境的据b α~2 X-a+I 〇otherwise = The neural-fuzzy learning algorithm proposed by the control method is to apply the steepest slope method to minimize the objective function E, ie ^ + ΐ) = α(/)-α^ In db II, 'represents the number of iterations, α, β, ? For the learning rate. The neuro-fuzzy control block diagram of the present invention can be as shown in the figure. The interface card for data acquisition is based on the interface card developed by Meike Huiji Instrument Co., Ltd., which is extracted by the acceleration specification and =. The acceleration signal caused by the action of the mechanism. Then use the graphic control program LabVIEW to design the graphic control interface application system, and adjust the stepping motor according to the obtained acceleration·^ via the fuzzy control optimization to achieve the timely vibration of the machine itself. . Referring again to Figures 2 to 5, the variable damper of the present invention includes a base 1, an intermediate seat 2, an upper seat 3, a clamping member 4, a pneumatic cylinder block $, and a magazine 6' base 1 system. There is a hexagonal body having an opening chamber and a content chamber 1337232 U. The content chamber 12 can accommodate an intermediate seat 2, and a plurality of springs 6 are disposed outside the bottom of the inner valley chamber 12 and the bottom of the intermediate seat 2 to For support, the weight of the seat 2 . The intermediate seat 2 is also a cube having an "opening 2" and a valley chamber 22. The receiving chamber 22 can accommodate the pneumatic cylinder block 5, and a plurality of positioning holes 2 are provided at the bottom of the intermediate seat 2. The upper seat 3 has a smaller volume than the intermediate seat 2, and has a lower opening 3 and a top wall %, and a plurality of positioning holes 34 are provided. Please also refer to the fifth figure, a loss-holding component*, which has upper and lower pedestals 4b 42' between the upper and lower pedestals ", 42: four crank-arm links 44 pivotally connected by the shaft 40 45, in the vicinity of the cuff gangster, a clamping member 43 is further provided, and the head end of the tight holding member 43 can be completed by using an elastic soft 塾 431 having an anti-slip function. A four-length fixing rod 53 is arranged on the four corners of the seat body, and the top end of the long fixing rod is provided with a nut 46 by a nut 46. (4) The cylinder block 1 The shaft rod 56 extends through the lower base 42 and has a large screw. The cap η is fixed. The seat 42 is described as a gas cylinder block 5 and is provided with a pressure inlet: an inlet end 57 and an outlet end 58 of the official road. Therefore, when the shaft of the pneumatic cylinder block 5 is extended Or when the action of the contraction is performed, the material link body 45 of the tightly held and actuated operation is subjected to the externally-type f-curve and the contraction type; the wide-pressure cylinder block 5 can be pierced by the bolt 25 to the intermediate seat 2 〇' At the same time, the washer 23 and the nut 2 are "fixed" to the intermediate seat 2. 1337232 The upper seat 3 of the damper of the present invention can be first joined to a connecting seat 7 by means of bolts 8, and the connecting wall 71 of the connecting seat 7 can be positioned on the machine to be tested. The damper of the present invention can fill the gear oil in the content chamber 12 of the base cymbal, the moving carrier on the t-machine generates vibration and the vibration signal is transmitted by the sensor to transmit the signal via the data acquisition (DAQ) interface card. The fuzzy control system of the device processes the signal optimized by the fuzzy control system to control the adjustment of the stepping motor to change the damping effect, so that the damping effect can be adjusted to the most suitable value according to the change of the vibration acceleration during the entire disturbance process. And timely slow down the vibration that suppresses the disturbance. When the disturbance on the vibration isolation platform is eliminated, the damping effect can be quickly adjusted to minimize the influence of the external environmental vibration on the equipment. The control system of the variable damper can change the damping constant at any time by sensing the vibration behavior of the machine, so that the vibration isolation system has the effect of soft and hard change, so that the disturbance behavior of the dissipating machine can be achieved at an appropriate time, and the isolation floor can also be achieved. Good effect of high frequency vibration. Please refer to the third and fourth figures, the schematic diagram of the damper of the present invention in the ON-OFF state, and the third figure shows that the clamping member 4 of the damper is not adjacent to the peripheral side wall 35 of the upper seat 3. Have an effect. The fourth figure shows that the clamping element 4 of the damper acts with the peripheral side wall 35 of the upper seat 3. In addition, the damping effect obtained through experimental tests can be as shown in the ninth and tenth figures. When the damper is released (OFF), and an external force is applied, the platform is pressed down to an initial position. 12 ^ 37232 Fast ' 'At this time, the platform will sway from the money rate and return to the equilibrium position by exponential winding, attenuation The elapsed time is about 4 seconds. Conversely, the clamping (0 compensation, damping will inhibit the platform from shaking, it will be attenuated and the enemy position is about 2 seconds, so it can be known that the damper clamps two = _ About 4 times. Damping _ can shorten the time it takes to move to balance, and obviously achieve the suppression effect. When the damper is held or released, it will affect the disturbance of the platform, which can be switched from 0N_F by the damper. The maximum peak caused by the impact is 2G'lmg, and slowly decays to the equilibrium position. The maximum peak caused by the impact when the device is switched from 0FF to (10): 70.lmg' fast decay to equilibrium position, about -second (4) Reduced. Flat: When the clamp is clamped ((10)), the damping becomes large, and the short vibration isolation shakes (4). The vibration isolation platform is reduced from four seconds to one second from the sway to the equilibrium position, and can be reduced. The amplitude of the natural frequency of the vibration isolation platform, and the damper is released (〇Fns# , Yang e, , when the damping becomes smaller, it can isolate the external environment.
動。因此制可控制諫U可以依照設備當時情況的需 求改變阻尼大小快速減緩機台本身所造成的擾動。阻尼器 爽持或放開時會影響平台的擾動，當阻尼器切換從⑽變 =’ 1擊T成的最大峰值為2G 千衡位置自限尼器切換從0FF變⑽時衝擊所造成的 最大峰值為7〇.lmg，快速衰減至平衡位置大約一秒就 13 1337232 能衰減下來。 綜觀本發明之可變阻尼器，很明顯係有異於習知之可 變阻尼器，本發明實具有創新性，另，本發明阻尼器可依 受測機台之振動行為的狀況而隨時改變阻尼器的阻尼常 數，使阻尼器具有軟硬變化的效果，藉以適時有效的消散 機台的擾動行為，亦可達到隔離地板高頻率振動的良好效 果，亦具有進步性。為此，乃提出發明專利申請。 14 1337232 【圖式簡單說明】 第一圖：係本發明可變阻尼器之控制系統之流程圖。 第二圖：係本發明阻尼器之分解圖。 第三圖··係第二圖夾持元件未夾持上座時之剖視圖。 第四圖：係第二圖夾持元件夾持上座時之剖視圖。 第五圖：係阻尼器中之夾持元件與氣壓缸座相結合狀 態之立體構造圖。 第六圖：係本發明類神經模糊方法之系統架構圖。 第七圖：係本發明歸屬函數定義域示意圖。 第八圖：係本發明類神經模糊控制方塊圖。 第九圖：係本發明阻尼器放開（OFF)時的時域圖。 第十圖：係本發明阻尼器夾持（ON)時的時域圖。 第十一圖：係本發明阻尼器切換從ON變OFF所產生 衝擊影響之示意圖。 第十二圖：係本發明阻尼器切換從OFF變ON所產生 衝擊影響之示意圖。 15 1337232 【主要元件符號說明】 (1)底座 (12)内容室 (20)定位孔 (22)容置室 (24)螺帽 (3)上座 (33)頂壁 (35)周側壁 (40)軸桿 (42)下台座 (431)彈性軟墊 (46)螺帽 (51)大螺帽 (56)軸桿 (58)出口端 (7) 連接座 (8) 螺栓 (11)開口 (2)中間座 (21)開口 (23)墊圈 (25)螺栓 (31)開口 (34)定位孔 (4) 夾持元件 (41)上台座 (43) 緊夾持元件 (44) (45)曲臂連桿 (5) 氣壓缸座 (53)固定桿 (57)進口端 (6) 彈簧 (71)銜接壁move. Therefore, the control unit can change the damping size according to the needs of the equipment at the time to quickly slow down the disturbance caused by the machine itself. When the damper is held or released, it will affect the disturbance of the platform. When the damper is switched from (10) to change = 1 the maximum peak value of the T is 2G. The maximum position caused by the impact when the damper is switched from 0FF to (10). The peak value is 7 〇.lmg, which decays quickly to the equilibrium position for about one second and 13 1337232 can decay. The variable damper of the present invention is obviously different from the conventional variable damper, and the present invention is innovative. In addition, the damper of the present invention can change the damping at any time according to the vibration behavior of the machine under test. The damping constant of the device makes the damper have the effect of soft and hard change, so that the disturbing behavior of the dissipating machine can be achieved in a timely and effective manner, and the good effect of isolating the high frequency vibration of the floor can also be achieved, and the progress is also advanced. To this end, an invention patent application is filed. 14 1337232 [Simplified description of the drawings] The first figure is a flow chart of the control system of the variable damper of the present invention. Second Figure: An exploded view of the damper of the present invention. The third figure is a cross-sectional view of the second figure when the clamping element is not clamped to the upper seat. Fourth figure: is a cross-sectional view of the second figure when the clamping element is clamped to the upper seat. Fig. 5 is a three-dimensional structural view showing a state in which a clamping member and a pneumatic cylinder block are combined in a damper. Fig. 6 is a system architecture diagram of the neuro-fuzzy method of the present invention. Figure 7 is a schematic diagram of the domain of the attribution function of the present invention. Figure 8 is a block diagram of the neuro-fuzzy control of the present invention. Figure 9 is a time-domain diagram of the damper of the present invention when it is released (OFF). Figure 10 is a time-domain diagram of the damper of the present invention when it is clamped (ON). Figure 11 is a schematic view showing the impact of the damper switching of the present invention from ON to OFF. Twelfth Diagram: A schematic diagram of the impact of the damper switching of the present invention from OFF to ON. 15 1337232 [Description of main component symbols] (1) Base (12) Content room (20) Positioning hole (22) accommodating chamber (24) Nut (3) Upper seat (33) Top wall (35) Peripheral side wall (40) Shaft (42) Lower pedestal (431) Elastic cushion (46) Nut (51) Large nut (56) Shaft (58) Outlet end (7) Connection seat (8) Bolt (11) opening (2) Middle seat (21) opening (23) washer (25) bolt (31) opening (34) positioning hole (4) clamping element (41) upper seat (43) tight clamping element (44) (45) crank joint Rod (5) Pneumatic cylinder seat (53) Fixing rod (57) Inlet end (6) Spring (71) connecting wall