TWI335981B - Measuring equipment - Google Patents

Description

1335981

D99, MONTH, DAY, DAY, DAY, DAY, DAY, DAY, DAY, DAY, DAY, DAY, DAY, DAY, DAY, DAY, DAY, DAY, DAY, DAY, RELATION, REPRESENTATION [Prior Art] [0002] After the processing is completed, the precision component is usually measured by measuring the overall shape of the measuring device to determine whether the precision component is qualified. Referring to FIG. 1, a conventional measuring device 90' includes a detecting signal generating device 92 and a detecting signal processing device 94. The detecting signal generating device 92 includes a lever 921 and a point 922' - a stylus 923. , a magnetic core * ..v 924 and an inductor coil 925. The lever 923 is disposed on a wall of the lever 921. The core 924 is disposed at the other end of the lever 921 and extends in the positive direction along the z-axis. The stylus 923 is always in contact with the surface of the workpiece 96, which is inserted into the inductor. The detection signal processing device 94 includes a UI processing circuit 941 and a computer 943. The signal processing circuit 941 and the inductor 925 and the computer 943 are divided into: n.; * other electrical connection " : / [0004] When measuring, the workpiece 9 6 is first moved along the X axis to obtain an X coordinate of a measuring point; The needle 923 moves up and down along the z-axis due to the undulation of the surface contour of the workpiece 96, and drives the lever 921 to rotate around the fulcrum 922, thereby causing the magnetic core 924 to swing in the inductor 925; and the displacement of the magnetic core 924 in the inductor 925 is generated. Corresponding inductive signal; the inductive signal is amplified by the signal processing circuit 941 and converted to the computer 943 by A/D (analog/digital) conversion; the computer 943 calculates the displacement of the magnetic core 924 according to the signal value, thereby calculating the stylus 923 The displacement, in turn, results in the overall shape of the workpiece 96. 0993353341-0 096130602 Form No. A0101 Page 3 / Total 25 Pages 1359819 099 Ό September 30 Correction Replacement Page [0005] However, the measuring device 90 needs to perform workpiece 96 shape, stylus 923 displacement, magnetic core during measurement 9 2 4 displacement, inductance signal, inductance signal amplification and conversion multi-level conversion, each conversion will produce a certain error, so that the cumulative error increases, so the measurement accuracy of the measuring device 90 is low. In addition, when measuring the surface topography of the workpiece 96, the measuring device 90 needs to invert the workpiece 96 to bring the stylus 923 into contact with the lower surface of the workpiece 96. After the workpiece 96 is turned over, the stylus 923 generally cannot Accurately positioning the initial measurement position of the surface opposite the initial measurement position of the upper surface, so that the measured lower surface is inconsistent with the center of the upper surface, and the measurement accuracy is also lowered. SUMMARY OF THE INVENTION [0006] In view of the above, it is necessary to provide a measuring device having a higher V accuracy. [0007] A measuring device comprising a two-contact measuring device and a controller, the two-contact measuring device each comprising a measuring head and a sensor for sensing the displacement of the measuring head, and the two-contact measuring The measuring head phase of the device is aligned with each other, and the controller is electrically connected to the sensors of the two contact measuring devices. [0008] As described above, the contact measuring device used in the measuring device of the present invention includes a measuring head and a sensor for sensing the displacement of the measuring head, and the sensor can directly transmit the generated sensing signal to the control connected thereto. The calculation is performed without the intermediate conversion process, so the displacement of the measuring head can be accurately measured, that is, the overall shape of the measured object can be accurately measured, and the measuring heads of the two contact measuring devices of the measuring device are mutually Alignment, the top surface of the opposite surface of the measured object can be measured at the same time without flipping the work 096130602 Form No. A0101 Page 4 / Total 25 Page 0993353341-0 1335981 [0009] [0010] [0011] September 0999 30th revised replacement page

[0012] 096130602 pieces, so the measuring device has a higher measurement accuracy. [Embodiment] Hereinafter, the measuring apparatus of the present invention will be further described in detail with reference to the accompanying drawings and embodiments. Referring to FIG. 2, a first embodiment of the present invention provides a measuring device 1A including a first contact measuring device 1A, a second contact measuring device 20, and a controller 30. Referring to FIG. 3 and FIG. 4 simultaneously, the first contact measuring device includes a base 11, a guiding block 12, two driving cylinders 13, a first fixing member i4, a second fixing member 15, and a first The measurement, the light, the ruler 17, the sensor 18, the support body 19 and the two blower block 12 are fixed on the base 11, and are axially opened with 'three; the phase k is the drain hole 121, two The driving cylinders 13 are respectively inserted into the two guiding holes 121, and the two end portions of the driving cylinders 13 respectively protrude from the guiding block 12. A gap exists between the guide hole 121 and the outer peripheral wall of the drive cylinder 13, and the gap is filled with gas to constitute an air bearing. % _ L __ The first end of the driving cylinder 13 is initially provided with the first fixing member 14 and the second fixing member 15 so that the driving cylinder 13 can only move back and forth in parallel with respect to the guiding block 12, but cannot be opposite The guide block 12 is rotated. The measuring head 16 is fixed to the middle of the first fixing member 14, and the optical scale 17 is fixed to the middle of the second fixing member 15. The sensor 18 is disposed on the base 11 and corresponds to the optical scale 17 to read the scale of the optical scale 17. Since the optical scale 17 and the measuring head 16 are connected by the first fixing member 14, the driving cylinder 13 and the second fixing member 15, the optical scale 17 can move together with the measuring head 16, and the displacement of the measuring head 16 can be reflected. [0017] [0017] [0017] 096130602 099 September 30 The change in the scale of the optical scale 17 sensed by the day step replacement page 18 is the change of the topography of the measured object. Here, the optical scale 17 and the sensor 18 can also be interchanged with each other. The support body 19 is fixed to the base 11 and adjacent to the second fixing member 15 . The support body 19 is for fixing a plurality of blow pipes 1〇1. The blow pipe 1〇1 is self-driven - the end of the cylinder 13 to which the second fixing member 15 is fixed is inserted into the drive cylinder 13 to supply the drive gas to the drive cylinder 13. A gap is left between the outer peripheral wall of the blow pipe 1〇1 and the inner peripheral wall of the drive cylinder 13, so that when a gas is blown into the drive cylinder 13, an air bearing can be formed between the blow pipe 1A and the drive cylinder 13. Further, the driving cylinder 3 is fixed with the first fixing member 14; the end portion is provided with the exhausting mechanism 131'. When the blowing pipe 1〇1 continuously blows the gas into the driving cylinder 13, the exhausting mechanism will partially discharge the gas. The discharge is performed so that the inside of the driving cylinder 13 is kept small and the air pressure is made such that the driving cylinder 13 obtains a small and stable driving pressure. The first contact measuring device 1A further includes a cover body 1〇2 that is fastened to the base 11. The front end of the cover body 1; 02 is provided with an opening (not shown) for projecting the end of the measuring head 16. A gas conduit 103 for supplying gas to the air bearing between the guide hole 121 and the drive cylinder 13 is also fixed to the cover member 〇2. It can be understood that the first contact type measuring device 1Q can also set one or two or more driving cylinders 13 according to the situation to obtain a better measuring pressure. The second contact measuring device 2 has the first contact measuring method. Device 1 〇 similar structure 》 The sensing of the controller 3G and the first-contact measuring device 1G _ and the second form number A0101 page 6 / 25 pages 0993353341-0 1335981 - September 30, 2010 The sensors of the page contact measuring device 20 are respectively connected to receive the displacement signal of the measuring head output from the sensor. Referring to FIG. 5 and FIG. 6, in the measurement, the first and second contact measuring devices 10 and 20 of the measuring device 100 are respectively mounted on the opposite sides to move along the Y-axis and the Z-axis. On the platforms 51, 52, the measuring heads 16 of the first contact measuring device 10 and the measuring heads 26 of the second contact measuring device 20 are respectively brought into contact with the opposite surfaces 401, 402 of the object 40, and The two measuring heads 16, 26 are aligned. Then, under the driving of the platforms 51 and 52, the measuring heads 16 and 26 of the first and second contact measuring devices 10 and 20 are respectively moved in the parallel X-axis direction. During the moving process, the two measuring heads 16 and 26 are always Keep in contact with the measured object 40: mutual rate. λ: two measuring heads 16 « Λ -, ·,' 1 Ά . ·-* ';' *· · ν Λ». ν V - , 26 move in the direction of the parallel X axis: 3⁄4 two & 33⁄4% Based on the detection signals outputted by the first and second contact measuring devices 10, 20, a section S of the object to be tested 40 corresponding to the path of the two measuring heads 16, 26 on the surface of the object 40 is calculated. [0019] The method of obtaining the section S is described in detail below:

[0020] (1) The measuring heads 16, 26 of the first and second contact type measuring devices 10, 20 are respectively in contact with the first and second surfaces 401, 402 of the object 40, and the first contact is The contact point of the measuring head 16 of the measuring device 10 with the measured object 40 is recorded in the controller 30 as (0, 丫 „, 2 „), the second contact type

The contact point of the measuring head 26 of the U m U measuring device 20 with the object to be tested 40 is recorded as (0, 丫 „, 2) in the controller 30. 0 n0 [0021] (2) The platform 51, 52 drives the first The second contact measuring device 10, 20 moves simultaneously in the parallel X-axis direction. During the moving process, the first, the first, the 096130602, the form number A0101, the seventh page, the total 25 pages, the 0993353341-0, the 1335981, the September 30, The measuring heads 16 and 26 of the positive-replacement-contact measuring device 1 〇 ' 2 保持 are kept in contact with the object 40 under the action of the measuring pressure (ie, moving in a direction parallel to the z-axis) and are aligned with each other. When the measuring head 16 of the first contact measuring device 1 is moved to the next position, the sensor 19 therein can sense its displacement Zmi along the z-axis direction and transmit it to the controller 30, which the controller 30 will The coordinate position is recorded as (Xi 'Y〇, Zm〇+Zml); when the measuring head 26 of the second contact measuring device 2 is moved to the next position, the sensor therein can sense its direction along the z-axis The displacement zni is transmitted to the controller 30, and the controller 3 records the coordinate position as (X, Y, Z + Z). 1 0 nO nl y [0022]

(3) The platforms 51, 52 continue to drive the first and second contact measuring devices 1 〇, 20 to move simultaneously in the parallel X-axis direction, and the controller 3 记录 can record the coordinates of a series of positions according to the movement of the measuring head 16: ( X , γ , Z ), (x3} Y0 * zm 〇 + z(n3) - cx. > y0 > zm0 + zm.) ; The motion of the head 26 records the coordinates of a series of positions: (x , γ , [0023]

Zn〇 + Zn?), (m + Z η 0 η3 (X. * Zn0+Zni (4) controller 30 can calculate the measured object 4 according to this series of coordinates

A surface 401 and a second surface 402 correspond to a curved shape in a plane γ=γ〇, and the two curves are calculated on the Z axis according to the formula (1 丨(zm〇+zmi)−(zn()+zni) | The distance between the directions is d to obtain the shape of the section s. [0024] Thereafter, the stages 51, 52 drive the measuring heads 16 and 26 of the first and second contact measuring devices 1 and 20 to the Y coordinates of γ and γ γ. Z 3 i in the plane of γ, repeating the above operation, and obtaining a cross section of the plurality of measured objects parallel to the cross section s, superimposing the complex cross section and the cross section s, thereby obtaining the measured object Overall appearance. 096130602 Form No. A0101 Page 8 of 25 0993353341-0 1335981 Correction replacement page of September 30, 099 [0025] Since the measuring device 100 of the present invention uses the contact measuring device 10, 20 The detector can directly sense the displacement change of the measuring heads 16, 26, that is, sense the change of the surface topography of the measured object 40, and directly transmit the corresponding displacement information to the controller 30 connected thereto for calculation, without Such as the known technology through the measured object morphology, stylus displacement, core displacement, inductance signal, inductance signal The multi-stage conversion process such as amplification and conversion, so that the displacement of the measuring heads 16 and 26 can be accurately measured, that is, the surface topography of the measured object 40 can be accurately measured, so the measuring device 100 has a high measurement accuracy. In addition, the measuring heads 16 and 26 of the two contact measuring devices 10 and 20 of the measuring device 100 are aligned with each other during measurement, so that each time it moves along the parallel X-axis direction, the measured object 40 can be obtained. One section · face vy. After multiple moves, you can get - '4 ·.'<· ..,. The complete shape of the measured object 40, Mei I am in the habit. <*·* <s The measuring device measures the surface of one of the measured objects and the surface shape, and then measures the other surface topography of the measured object without reversing the workpiece, thereby avoiding the workpiece being turned over. The measurement error is generated. [0026] It can be understood that the platforms 51, 52 can also drive the first and second contact measuring devices 10, 20 to move in the parallel Y-axis direction to obtain a cross section parallel to the YZ plane, the complex number The superposition of the cross-sections also gives the overall shape of the measured object 40. Of course, the above measurement method can also be used to measure The cross section of the number is coaxial, and then the overall shape of the object to be tested 40 is superimposed. Alternatively, the above measuring method can also adopt the manner of moving the object 40 in the direction of the parallel X axis, so that the first and second contact measuring devices 10 can be used. The measuring heads 16, 26 of 20 are moved relative to the object to be tested 40. [0027] It can be understood that the measuring device 100 can also adopt other types of contact measuring devices of different structures. 096130602 Form No. A0101 Page 9 of 25 0993353341- 0 1335981 [0028] On September 30, 099, the replacement page is referred to. Referring to FIG. 7 and FIG. 8, the measuring apparatus according to the second embodiment of the present invention adopts a contact type measuring device 6〇, which has the same as in the first embodiment. The first contact type measuring slope has a similar structure, and the difference is that the rear end portion of the driving cylinder 63 of the contact type measuring device 60 is not provided with a gas blowing pipe, and the guiding block 62 is interspersed with a plurality of gas disposed obliquely. Catheters 6〇4, 6〇6. The plurality of gas conduits 604 are inserted into the guide block 62 in parallel with each other and at a certain interval, and communicate with the guide holes 621. The direction in which the gas conduit 604 extends is at an angle greater than the twist of the axis of the drive cylinder 63 and less than 9 degrees. A gas conduit 606 for supplying a gas to the guide hole 621 is also disposed below the guide block 62. The plurality of gas conduits 606 are inserted into the guide block 62 in parallel and spaced apart from each other and on the opposite side of the gas conduit 604. It communicates with the guiding hole 621. The gas conduit 606 is opposite to the volume of the gas conduit 604, and is symmetrically disposed with the gas manifold 4 at the center of the axis of the driving cylinder 63. That is, the extending direction of the gas conduit 606 and the axis of the driving cylinder 63 are equal to the gas conduit. The extending direction of 604 is at an angle to the axis of the driving cylinder 63, so that the driving cylinder 63 is moved to the force balance of the non-measuring head 66. It can be understood that the gas conduit 604 is not limited to being located at the driving cylinder 63. Up and down, only need to communicate with the guiding hole 621, and the extending direction of the gas conduits 604, 6〇6 and the drawing line of the driving cylinder 63 is greater than the twist and less than 9 degrees. The gas conduit 604 and the gas conduit 606 can also be placed asymmetrically offset from each other on either side of the drive gas red 63. It is also possible to provide only the gas conduit 6〇4 or only the gas conduit 606. [0029] When gas is blown into the gas conduits 604, 606, the gas enters the guide hole 621. At this time, the force of the driving cylinder 63 is as shown in FIG. 9. F1 and F2 are respectively gas blown from the gas conduit 604 and the gas conduit 6〇6 as 096130602. Form No. A0101 Page 1 of 25/0993353341 -0 133.5981 Fixed the replacement page used on the two drive cylinders 63 on September 30, 099. Since the number of the gas conduits 6〇4 and the gas conduits 606 are equal, the forces η and F2 of the gas acting on the driving cylinders 63 are equal, and the angle between the extending direction of the gas conduit 6G4 and the axis of the driving cylinder 63 and the gas conduit are The extending direction of 6〇6 is equal to the angle of the axis of the driving cylinder 63. Therefore, FI'F2 is equal in size to the sleeve direction of the driving cylinder 63, that is, the Y-axis direction of the driving force, Fiy and F2Y are equal, but the component force 'F2Y* In the opposite direction, the driving force of the driving cylinder 63 in the Y-axis direction is zero. At the same time, since the air bearing is formed between the outer wall of the driving cylinder 63 and the guiding block 62 when the gas enters the guiding hole 621, the driving force of the driving cylinder 63 during the movement is small. FI, F2 are parallel to the drive cylinder

The direction of the 63 axis is the X-axis direction, F1X ^ .τ'*., F 2 χ are equal in size. The direction refers to 1 „6 6 direction, and the force component?"1<^ can push the drive cylinder 63 to meet: Thus even 4 measuring heads 66

1Λ L"K is finally in contact with the surface of the object to be tested β [0030] Referring to FIG. 10, the measuring device of the third embodiment of the present invention employs a contact measuring device 70 having the first contact of the middle portion ▲ The measuring device 10 has a similar structure, which is not in the two driving cylinders 73A, ji;; tj 73B are arranged in parallel before and after being offset from each other. Further, the front end portion of the drive cylinders 73A, 73B is provided with an exhaust mechanism 731 for discharging a part of the gas. Since the driving cylinders 73A and 73B are staggered in the front and rear directions, the guiding distance in the measuring direction is increased to achieve stable measurement. In addition, the contact type measuring device 70 can insert the air blowing pipe 701 only at the rear end of the driving cylinders 73A, 73B, that is, only a gas blowing mechanism is provided, which also achieves stable measurement [0031] The invention meets the requirements of the invention patent, and the patent is filed according to law. 0993353341-0 096130602 Form No. A〇l〇l Page 1 of 25/1355 133 598 598 09 09 09 09 09 09 09 替换 替换 替换 替换 替换 替换 替换 替换 替换 替换 替换 替换 替换 替换 替换 替换 替换 替换 替换However, the above description is only the preferred embodiment of the present invention, and equivalent modifications or variations made by those skilled in the art of the present invention should be included in the following claims. BRIEF DESCRIPTION OF THE DRAWINGS [0032] FIG. 1 is a schematic diagram of a conventional measuring device for measuring a workpiece; [0033] FIG. 2 is a perspective view of a measuring device according to a first embodiment of the present invention; [0034] FIG. 2 is a cross-sectional view of the first contact measuring device shown in FIG. 2;

4 is a longitudinal sectional view of the first contact type measuring device shown in FIG. 2; [0036] FIG. 5 is a schematic view showing measurement of the object to be measured by the measuring device shown in FIG. 2; [0037] FIG. The controller shown in FIG. 5 analyzes the appearance of the wearing surface S according to the information outputted by the first contact measuring device and the second contact measuring device; E0038] FIG. 7 is a measuring device used in the second embodiment of the present invention. Cross-sectional view of the contact measuring device; [0039] FIG. 8 is a longitudinal sectional view of the contact measuring device shown in FIG. 7;

9 is a force analysis diagram of a driving cylinder of the contact measuring device shown in FIG. 7. FIG. 10 is a cross-sectional view of a contact measuring device used in a measuring apparatus according to a third embodiment of the present invention. [0041] FIG. [Main component symbol description] [0042] Measuring device: 100 [0043] Contact measuring device: 10, 20, 60, 70 [0044] Base: 11 096130602 Form No. A0101 Page 12 / Total 25 Page 0993353341-0 1335981 September 30, 099 Shuttle replacement page [0045] Guide block: 12, 62 [0046] Guide hole: 121, 621

[0047] Drive cylinder: 13, 63, 73A, 73B

[0048] Exhaust mechanism: 131, 731 [0049] Fixing member: 1 4, 1 5 [0050] Measuring head: 1 6, 2 6, 6 6 [0051] Optical ruler: 17

[0052] Sensor: 1 8 [0053] Support: 19 [0054] Blowpipe: 101, 701 [0055] Cover: 102 [0056] Gas conduit: 103, 604, 606 [0057] Controller: 30

Test object: 40 [0059] Surface: 401, 402 [0060] Platform: 51, 52 096130602 Form No. A0101 Page 13 of 25 0993353341-0

Claims (1)

1335981 Correction and replacement page on September 30, 099 VII. Patent application scope: 1. A measuring device, the improvement is that the measuring device comprises two contact type measurement a measuring device and a controller, the two contact measuring devices each comprise a measuring head and a sensor for sensing the displacement of the measuring head, and the measuring heads of the two contact measuring devices are aligned with each other, the controller is in contact with the two The sensors of the measuring device are respectively electrically connected, and the contact measuring device is provided with at least one driving cylinder for driving the measuring head; the driving cylinder is provided with a part of the gas blown into the driving cylinder to keep the An exhaust mechanism that drives the cylinder to drive the pressure less. 2. The measuring device of claim 1, wherein the contact measuring device further comprises an optical scale opposite the measuring head, the sensor reading the scale of the optical gauge to determine the displacement of the measuring head. 3. The measuring device according to claim 1, wherein the contact type measurement The measuring device is provided with at least one driving cylinder, and the outer wall of the driving cylinder is provided with at least one gas conduit, and the extending direction of the gas conduit is greater than 0 degrees and less than 90 degrees from the axis of the driving cylinder, and is blown into the gas conduit. The gas acts on the outer side wall Ji of the driving cylinder, and the driving cylinder drives the measuring head to move from the rain, and the blown gas is partially discharged to maintain the driving pressure of the driving cylinder. 4. The measuring device according to claim 1 or 3, wherein the contact measuring device further comprises at least one guiding block, the guiding block is provided with a guiding hole, and the driving cylinder is inserted into the guiding hole a gas conduit for blowing a gas is evenly disposed on the guiding block, the gas conduit is in communication with the guiding hole, and a gap exists between the outer wall of the driving cylinder and the guiding block, and the gas is blown into the gas conduit to drive An air bearing is formed between the outer side wall of the cylinder and the guide block. 096130602 Form No. A0101 Page 14 of 25 0993353341-0 1335981 A replacement device as described in claim 4, wherein the drive cylinder is used to blow into the drive cylinder An air bearing is formed between the blowing pipes of the gas. 6. The measuring device according to claim 4, wherein the guiding block is provided with two guiding holes parallel to each other. The two driving cylinders are respectively inserted into the two guiding holes and arranged side by side. 7. The measuring device of claim 4, wherein the contact measuring device further comprises a base for fixing and supporting the respective constituent elements. 8. The measuring device according to claim 4, wherein the contact measuring device further comprises a cover body which can prevent foreign matter such as dust from entering the outside - ..-. -Λ * / - -, - .Λ^:..·.:· _ · ... 9. The measuring device according to claim 1, wherein the contact measuring device comprises two driving cylinders which are parallel to each other And staggered a certain distance setting. 0993353341-0 096130602 Form No. A0101 Page 15 of 25