TWI330403B - Sensor platform using a horizontally oriented nanotube element - Google Patents

Description

1330403 VII. Designated representative map: (1) The representative representative of the case is: picture (5). (2) Brief description of the symbol of the representative figure. 412 Lower electrode 472 suspended nano tube structure 500 structure 51 ◦Insulation material 52◦ Gap height 8. If there is a chemical formula in this case, please disclose the chemical formula that best shows the characteristics of the invention: , Description of the invention: [Reference to the relevant application] This application claims the priority and benefits of the following application dates:

Horizontally Oriented Sensor Constructed with Nanotube Technology (US Provisional Patent Application No. 6〇/47〇, 41 〇), 2〇〇3 5 14 application;

Vertically Oriented Sensor Constructed with Nanotube Technology (US Provisional Patent Application Serial No. 6〇/47〇, 37i), application of 2003.5.14;

Resistance and Capacitance Modulation Structures Constructed with Nanotube Techno丨ogy (US Provisional Patent Application Serial No. 60/503,098), 2003.9.15 Application. The assignee of the present application is hereby incorporated by reference in its entirety by reference in its entirety in its entirety in the the the the the the the the the the the the the the the the the the the the

Electromechanical Memory Array Using Nanotube Ribbons and Method for Making Same (US Patent Application Serial No. 09/915,093), 20017.25 Application; 1330403

Electromechanical Three-Trace Junction Devices (US Patent Application Serial No. 10/033,323), 200112.23 application;

Method of Making Carbon Nanotube Films, Layers, Fabrics, Ribbons, Elements and Articles (US Patent Application Serial No. 10/341,005), i 〇 03.1.13 Application;

Electro-Mechanical Switches and Memory Cells Using Vertically-Disposed Nanofabric Articles and Methods of Making the Same (US Provisional Patent Application Serial No. 60/446,786), 2003.2.12;

Electro-Mechanical Switches and Memory Cells Using Horizontally-Disposed Nanofabric Articles and Methods of Making the Same (US Provisional Patent Application Serial No. 60/446, 783), 2003.2.12 Application;

Patterning of Nanoscopic Articles (US Provisional Patent Application No. 60/501,033), 2003.9.8 Application;

Patterning of Nanoscopic Articles (US Provisional Patent Application No. 60/503, 099), 2003.9.15; ”

Non-Volatile ectromechanical Field Effect Transistors and Methods of Forming Same, 2003.6.9; and 八

Sensor Platform Using a Non-Hori2〇ntally Oriented Nanotube Element (U.S. Provisional Patent Application No.), 2004.5.12 Application; ° [Technical Field of the Invention] This application uses an individual nano sensor And nano sensor arrays to detect target analytes and methods for measuring or making various electrical values (4). The case specific 1330403 is not related to the vehicle or platform that produces the sensors and sensor arrays. [Prior Art] From the use of airborne contaminants (such as in air quality sensors) to special deoxyribonucleic acid (DNA) sections in blood samples or other samples, the use of chemical sensors and biosensors widely. More recently, chemical and biological sensors using a nanotube such as a single-walled carbon nanotube (SWNT) have been proposed. The advantages of such sensors are that the sensors are smaller in size and more sensitive. Seen in, for example, j K〇ng et al.

Science, Vol. 287, pp. 622-625 (2000.1.28). The nano-regular chemical sensor can be functionalized or modified into a specific molecule or a specific type of sensor, as described in P. Qi et al., Nano Lett, Vol. 3, No. 3, pp. 347-51 (2003), Toward Large Arrays of Multiplex

Functionalized Carbon Nanotube Sensors for Highly Sensitive and Selective Mo丨ecular Detection"; "Carb〇n Nanotube Sensing", U.S. Patent Application Serial No. 10/175,026, filed on Jan. 26, s. It may include unfunctionalized semi-catheters and may sense the presence or absence of known chemicals, as found, for example, in K〇ng (ibid.). Because of the difficulty in controlling the placement of individual nanotubes between the electrodes, the nanotubes of individual nanotubes are used. The reliable manufacture of the level sensor is a problem. In addition, the nanotubes used in this way are individually used. Therefore, if the device using them is single-nano, it may stop working when it is single-point fault. Dali Arts and Literature has existed and developed individual nanotubes for sensor configurations, but there is a need for a more reliable carrier or platform to act as a sensor. [Invention] The present invention and sensing platform And related to the method of making the sensor platform, wherein the sense of oj〇4〇3 t » ; the ϋ member 'relative to the main surface of the substrate (understand, horizontal)) ^ in the mean or other nai For example, a silk thread, which is present in each thread or can be made to have an affinity for the corresponding analyte. I have a specific implementation of the financial system, and the platform includes the sense and components. The set of nanostructures of the spurs or mixtures thereof, and with electrical characteristic sensing 'cans." In the present invention, the presence or absence of the corresponding analyte is measured. ^奈^^^^^^^^^^^^^^^^^^^^^^^^^^^^^^^^^^^^^^^^^^^^^^^^^^^^^^^^^^^^^^^^^^^^^^^^^^^^^^^^^^^^^^^^^^^^^^^^^^^^ In a particular embodiment of the invention, the nanotubes are combined with the original nanotubes in the present invention, and the naphtha 4 has or increases the affinity. In the mosquito embodiments of the invention, the nanotubes are functionalized to have Or increase the affinity of the mosquito lion, the sense of age and the affinity of the car 'turn a few nanotubes to / /, the affinity. ^Nano-type (4) has a second analyte structure. In a particular embodiment of the invention, the lion-like structure comprises a channel, and the _ crying member is suspended to extend the channel. And alpha measurement. . In the special configuration of the brigade channel, the nanotube braided contact electrode can be electrically detected in the bridging channel. In a particular embodiment of the invention, the upper electrode is located above the sensor component and Separation of 1330403. In a particular embodiment of the invention, the sensor platform includes a conductive member remote from the sensor member such that the conductive member has a capacitive relationship with the sensor member. In a specific embodiment of the present invention, the sensor platform includes a first conductive member of the first point contact sensing member and a second transmitting member for the second point contact sensing member, so that the current can pass the first and the first In a particular embodiment of the sensor assembly between the two conductive members, the sensor member is substantially a structural material of the branch structure, and is not substantially exposed to the potential contact caused by the fluid, and instead is σ σ or Partial reference resistor or electric passenger. The array has a large array of sensor platforms, wherein the 'sensors of the board can be fabricated by providing a structure comprising a base structure, and defining a layer such as a nanometer m or a mixture thereof; Γ. ^^ The circuit system structure sets the sub-electrical characteristics, and provides the presence of controlled analytes. The money characteristic of the domain _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ During the growth of the rice tube set, the nanotubes are functionalized in the pending embodiment of the present invention, so that the selected ZtJZ is combined with the force of the nanotubes during the set of nanotubes. She is made up of the technology, and the sensory components are made of pre-derivatized nanotubes. In a particular embodiment of the invention, the sensor components are pre-functionalized nanometers. In the specific embodiment of the present invention, after the nanotube is placed on the substrate, the function is biochemically specified in the present day and month. In an embodiment, the patterned tissue that is maintained on the substrate is derivatized in a particular embodiment of the invention, and the structured tissue device that is maintained on the substrate is configured to extract smoke and material components and sense: The system has a reference capacitor. The potential exposure of the substance to the fluid. The bamboo member Ha is not permeated. Sensing: r electricity: fixed =. Provided is a (4) specific embodiment of the invention, the circuit system having a reference resistor. 1330403 In a particular embodiment of the invention of the invention, the reference resistor is provided by providing the first and second conductive members with the sensor member 1", but providing a cover material for the sensor assembly Potential exposure to fluids that are not substantially exposed to fluids. [Embodiment] The present invention provides a new platform or carrier for sensing and sensing state arrays for biological and/or chemical sensing, which utilizes conventional semiconductors.建建, and can enhance the manufacturing structure and process of the financial industry, with the ship carbon quart meter I. The manufacturing technology is widely compatible with the CM〇S process, and can be used in the process of making more technical skills. The structure is implemented with low blessing. The seam feel on a given wafer or wafer that allows for the integration of the circuit and the calculation system is too half = 1 / kg. The preferred embodiment of the present invention uses a nanotube structure. ("(nanofabrics) Ί , 奈 。. These iff pure can be as taught in the art of individual wire tubes. _ 衣 规 规 于 于 于 于 于 于 于 于 于 于 于 于 于 于 于 于 于 于- Give the giant P early, the sensor will still work), and it is easier to manufacture. And a large array of components of the sensor, such as by placing the sensor components in a plurality of components of the array of contact holes shown in Figure 22. The nanostructured components may be unmodified or 6 functionalized chemical analytes such as organic and inorganic molecules. In a specific embodiment t, ^, ^ ^ ^ molecules such as peptides, eggs (tetra) or nuclear I can functionalize nanostructures, non-covalent or Covalently (for example, by derivatization), the sputum is specifically associated with the thief. The modified or unmodified analyte-sensitive nanostructure can be incorporated into the sensory device to detect the corresponding Analyte. Known: The example uses a charge to change the phase of the transfer between the face T and the absorbing molecule. The preferred embodiment utilizes a method and composition for detecting a target analyte using an analyte.

The change in the gas properties of the sensor can be measured by the field effect of the semiconducting homing and the gate electrode located below or adjacent to the tube, as seen, for example, in p. Detector mechanism. The change of the nature of the nanotube structure at the time of light bonding, by To〇, Vol. 3, No. 3, pp. 347-51 (2003)

Large Arrays of Multiplex Functionalized Carbon Nanotube Sensors for Highly Sensitive and Selective Molecular

Detection" ° When detecting the changing sun temple in this way, it is preferable to use a sensor having a suspended nanostructure structure. The electrical properties of the sensor can also be measured by an electromechanical mechanism, wherein the electrode is opposite to the I square. The difference between the switching voltages of the resistance of the nanostructured member or the current flowing through it is determined before and after the nanostructure is exposed to the analyte. In addition, the actual presence of the sensed molecule or species may be caused on the suspended nanostructure. The tension can be detected, thereby potentially allowing direct determination of the molecular weight of the material. For example, when the tension energy changes due to the bonding of the sensed molecules, the corresponding change in voltage can be measured. Nano sensing according to the preferred embodiment The device is compatible with protocols that substantially avoid non-specific binding of non-target analytes. One example of non-specific bond avoidance is found in Star et al., Nano Lett. Vol. 3, No. 4, pp. 459-63 (2003). "Electronic Detection of Specific Protein Binding Using Nanotube FET Devices, • In a particular embodiment, the nanostructure sensor can be used as an electrode in an electrochemical sensor - for example C丨ark - Type sensor, see Lawrence et al., Anal. Chem. 1330403, brother 75, brother 9th, 2053-59 (2003) "A Thin-layer · Amperometric Sensor for Hydrogen Sulfide: The Use of Microelectrodes To Achieve a Membrane-Independent Response for Clark-Type Sensors" ° The exemplary architecture sensor platform is organized into a large array of platforms. Subsequent paragraphs are qualitative to achieve a particular tFig. 2(A)_(E) illustrating various embodiments in accordance with the present invention. As will be described below, the sensor platform can provide a carrier in which the nanostructured components can be derivatized or functionalized after fabrication of the platform, but in some embodiments, the derivatization of the nanostructured components can be achieved. Or functionally incorporated into the manufacturing steps that form the sensor platform. In Figure 2, individual sensor units are shown, but it will be apparent from the following that the use of well-known semiconductor fabrication techniques allows for the mass reproduction of these individual sensor units so that a given wafer or wafer can have a very large number of basic Marry each other (3). These units, small groups, or individual entities can be used. The focus of this description is on architecture and base.

m 物娜_12 batch of wafers on the second series of long lines; =. (relatively, in the case of a member exceeding the sub-micron range, by providing damage through the nanostructure=biemenite tube, other tubes in the tissue can be raised =: the resistance of the rice tissue member should be much lower than that of the individual nanotubes Electricity, the single-layer structure of the nano tube, for special use, can be woven or multi-walled tube or single-walled and multi-walled rice: ^ surface; S /, and - electrode intersection In addition, a state in which the nanometer senses a stable position in which the sinus is connected and is spliced or away from the electrode is formed. A cross-sectional view of an exemplary platform (or sensor unit) 200 is illustrated with a knife green (e.g., electrical or platform #3〇图^ iA). The crucible 3 is located or nailed to the support bodies 2〇4 and 206, and is suspended from the electrode at a distance of 2iG from the =2° member. The structure of () is thus similar to that shown in the figure, and the nanotubes of the channel of the intersection of ^ " Can be found in "Jiff /, quasi-lithography processing, placement and __ format and Λ other S3 amount ^ included in the high-volume manufacturing order for the common requirements of the metal or ^ 30403 * . f 2 (A) medium nanostructure The two states of the member 2〇2 are shown in Fig. $(B) _, the view. For example, Figure 2 shows the platform in the unbiased state, and Figure 2 shows the platform in the deflected state, where the nanostructured component has The contact electrode 208 is contacted. The state is achieved by applying or removing a specific voltage across the nano-electrode electrode 208: = ί The relationship between the electrostatic attraction and the repulsion between the fabric member 2Q2 and the electrode 2〇8 is: In the environment, the second state of contact between the nanostructure and the electrode X f . For example, the nanostructure moves only when the voltage is applied and contacts the electrode, which is not yours; ^, the surface _ is not deduced by 11. In the same environment , the contact state is,, still 21: change: for example, it can be initially caused by the application of voltage 'but after removing the electric i can imagine increasing the method of returning to the surface of the electrode _ energy, and can be: f The method can be used to extend the nanotube-electrode connection to successfully complete the sensing activity, that is, it is desirable to reset a reset in the field i may provide The sensor type that causes the sensed molecules to be removed from the nanometer sensor to remove or eliminate the state of the sensor. The required voltage may be particularly specific to the side sense, the decision, or may be part of the overall reset pattern. Can be cleared from its state. This - reset feature will make the sensor saturated ', body state, 俾 can use the device again. Reusability will reduce the whole crying ίίίί ΐ Reference or field generation: The McCaw can be used to avoid positive or negative readings by generating, sensing, and comparing the unit to the non-bonding unit. Each unit is read by approximating and/or depending on the H tissue object denier = electrode 208. The electrical properties of the sensor can then be measured (measured as if the coating is not as good). For example, nano-component 2Q2 can be The volatile state contacts 1330403 lower electrode 208 and maintains contact. As a result, resistance or other electrical properties of component 202 can be detected due to changes in analyte binding - such as gate effects. See p. Qj et al.

Nano Lett 3, Volume 3, No. 3, 347-51 (2003), Toward Large

Arrays of Multiplex Functionalized Carbon Nanotube Sensors for Highly Sensitive and Selective Mo丨ecular Detection". In a particular embodiment, the support structures 204 and 206 are made of tantalum nitride (Si3N4) and are separated by about 180 nm. 21〇 tends to be close to 5_5〇 nanometer. This -5-term gap distance is better for the specific embodiment of the nanostructure formed from carbon nano (four), and reflects the deflection of nano; I; The specific distance between each other is about 51G, and the gap is maintained in a non-volatile situation, that is, the member 202 will remain deflected even if the electricity is removed. It is used for electric power. When the power is broken, the deflection will be lost = geometrical configuration. The specific preferred embodiment adopts the time component, which uses the non-nano-structured object 2 bauxite, which is the lower one. Other embodiments use a metal as a conductor. In particular, it can be composed of a nanostructure. The color-only electrode 208 is similarly formed by a support structure 204 and a geometric shape of 2〇6, which can be made of a specific material. Multiple materials and different holdings For example, by any of a variety of techniques - too 202 can be used to send or rotate coating materials such as metal, semi-tissue in the support body to synthesize Mithium, can be two-body 'shun, Qin, oxygen nail strength. By utilizing the chemical in a particular embodiment t, the nanostructured article 2 benefits the support structure. In other embodiments, the 9 is held by the friction on the insulating branch, m ", . . . The interaction of steamed oxygen 1330403 involves the use of carbon compounds such as pyrene or other chemical winds, and the covalent bond of the reactive species increases the frictional interaction. See RJ Chen et al., Am. Chem. Soc - Volume 123, page 3838_39 (2〇; Non-covalent Si fine alj Functiona丨jzation of Single-Walled

Carbon Nanotubes for pr〇tejn |mmobj|丨zati〇n" and Dai et al. in APPI. Phys_ Lettj 77, Vol. 3, pp. 15_17 (2〇〇〇), as an example of a full-stitched and coated nanotube Sex technology, also found in w〇〇1/〇32〇8, for the use of such technology. In particular, 'for example, nanostructured objects 2〇2 can be obtained by introducing matrix materials into the nanostructures. The space between the nanotubes is referred to as another material to form a conductive composite junction as described above. With these composite junctions and connections, it can be transferred to (4) and mechanical gamma. In the example, the conductive material is deposited. On the tissue, it is allowed to penetrate into the porous nano-group, thus forming a pair of improved electrical connections and reducing the fine resistance of the nano-sheets. In another case, the insulating material is deposited. On the nanostructure, and allowing penetration into the porous nanostructure, thus forming a mechanical staple contact, which deflects or deflects the object without biasing the nanostructure sensing according to an embodiment of the present invention. The electrode or conductive track 2〇8 is located in close proximity to the suspension of the nanostructure member 2〇2. The two can be in contact with each other when the nanostructures are deflected. The electrodes 2〇8 can also be operated to cover the field that can change the electrical properties of the adjacent nanostructure sensor, and more particularly, the electrodes 20^ can produce changes such as The nanometer sensor unit shown in Fig. 2(8) is a semi-conducting nanometer, a field of nature. HJ is a specific compensation for the purpose of generating a substantial or complete configuration of the half adjacent to the field/emitter electrode. The nanometer consists of nanotubes, sense, and is found in RQ丨 et al. _. (10) Vol. 3, No. 3, 347_51, C 03) Toward Large Arrays of _tip|ex Functi〇nafized , arbon Nanotube Sensors for Highly Sensitive and Selective ^30403 t

Molecular Detection". Figure 2(D) illustrates another Neil sensor unit 22A. In this embodiment, the electrode 208 of the chamber 200 is configured to hang with the 2'2 of the nanotube structure. The adjacent non-metallic material 222 is replaced. In the example, the nail structure 224 can be electrically connected to the nano _ and provide a nap to the underlying support or powder. The nail structure is used in many applications. It is conductive, but it is either % edge or conductive, depending on the application. Figure Λ (Ε) illustrates another nanometer sensor unit 226. In this embodiment, Nai, 2〇 1 is non-suspended and is located on the body material 230. The support material can be characterized as a nail structure, which can be used for the purpose of H, but not limited to metal, alloy, tantalum, semiconductor, plastic , glass, etc. Many cases are conductive, but they are either insulative or conductive. The figure uA^ic) illustrates another sensor unit and this unit may reach the extreme iofi Η early 70 'nai The rice tissue member 202 is located at the lower electrode 304 and the power-on member 202 2 〇 2) can be electrically stimulated to deflect the structure 9 - Τ ^ 砀 electrode 304. For example, in the portion In the embodiment, the member is deflected. 3 (Β) 牿 〜 〜 ' ' ' ' ' ' ' ' ' ' ' ' ' ' ' ' ' ' ' ' ' ' ' ' ' ' ' ' ' ' ' ' ' ' ' ' ' ' ' ' ' ' ' ' ' ' ' ' ' ' ' ' ' ' ' ' ' ' ' ' ' ' ' ' The two sides are electrically conductive rectifying junctions (e.g., Schottky or PN), which are caused by the sensing of two nano tissue objects 202 or electrodes 304. When the state is as shown in the structure 314 of Fig. 3 (C), the nano group is activated, and the shape energy r: % pole 3〇6 deflection is different from the "on" state of the previous example, and the address is opened) The relevant electrical properties in the _re-open state can be different, but the patterns for different electrodes should be as shown in Fig. 3 (A) - (C) not proportional, and for example, in the 1330403 r unit 210 does not need scales. In other solid wipes, the gaps on the different sides of the nano-objects 2〇2 can be different from each other, greatly permitting the pull-in of the volatile ^non-volatile switching behavior. In addition, the execution of the release node may increase the third orthographic reset unit or apply a specific unit to the third trace of the detector to cause the nanostructured object to be held in a specific non-volatile state. The unit is insulated by the sexual state. =, the redundancy allowed by the two conductive electrodes 3〇4 and 3〇6 can cause reliability; and the advantage of increased lack of heart. The two-conducting electrode allows the nano-manufacturer unit to be more easily incorporated into the "manufacturer" and the technical single-layer structure of the stackable sensor layer that modifies the characteristics of the nanostructure member Made of wall nanotubes. - Given a tissue only nanometer tube 胄1胄#, my 胄 特征 characteristics as by choosing nano f. Controllable view of some features. For example, ι-ι__α to length and width and its porosity can be used for specific electrical resistance, and the required capacity per: the size of the tissue to be moved and the contact between the nanostructure and the metal to achieve a specific surface. Need lower resistance nano _ two. Sensing sensitization to sensitive devices (eg, in the nanometer group y,, '', '哉. The number of bonds required for the analyte is small, and the nanotubes) is specific to the special nano tissue The method, depending on the specific ° can be imagined a number of production adjustment methods and products obtained, can be determined by the needs of the rotating temple. The functionalization or derivatization is achieved by the device. ^, the shortness of the test shirt is combined with the pre-fabricated nano tube on the substrate (in the case of the patent and the special technology disclosed in the previous article and the nano tube that can be grown into a thin tube, the organization Derivatization or power tube d can be used in the process of growing into a cvd grown into a nanometer ι®μ to pay for 4 miscellaneous quantities of material ϋ, #,·m

^ '^na; rNA . ' * and the manufacture of the cloth lion into the nai fabric is described in the patent and patent application. This method has the advantage of (10) manufacturing the material for the supply. For example, the device can be manufactured at a lower temperature. This allows more materials to be used as a potential substrate. In addition, the nanotubes can be thixotropic or functionalized at the age of application of the nanotubes to the primers. Silk new enemy, age, application, sinking

The rice field sensor can be composed of a semi-conductive nano tube and a thin metal tube. Researchers have shown that metal nanotubes can be separated from semi-conductive nanotubes by their jobs. See, for example, D. Chattopadhyay et al., Amer Chem s〇c, Vol. 125, No. 3370-75 I (2003.2.22) Route for Bulk Separation of Semiconducting from Metallic Single-Walled Carbon Nanotubes. Thus, it is a specific implementation of the present invention. In one aspect, it utilizes this or any other separation method to produce a controlled composition (semiconducting to metal) nanostructure. According to a precipitation method, the single-walled nanotube is acid treated and then functionalized non-covalent - For example, in octadecylcysine (0ctacjecy|amjne) and tetrahydrofuran (in tetrahydrofuran) - causing metal species to precipitate from solution, while at the same time semiconducting = group. As long as they are separated from each other, the separated nanotubes are available for Nai : Force Energy: The tube can be used to produce a nano sensor. The nano tubes can be used in spin coating applications and metal methods and reference documents. In addition, it is possible to control the semi-conducting and non-separating of the rice cultivating pigs, and thus the ◦ 未 官 官 , , , , , , 产生 产生 产生 产生 产生 产生 产生 产生 产生 产生 产生 产生 产生 产生 产生 产生 产生 产生 产生 产生 产生 产生 产生Required for all kinds of nanotubes Indifferent. 100% semi-catheter solution can also be mixed with 1GG% metal nanotube solution. ...cold, night, all-electric enthalpy induction, oxidation, self-destructive nanostructure, destructive, such as ρ·G·Cdlins Etc. in Sci嶋 292

Nanotuh. · Page (2001) Engineering Carb〇n Nanotubes and Example e Usin9 Eleet "iGai B "eakdQwn". The particularity of the invention is hereby incorporated by reference to the production of nanostructures at i voltage ' to effectively circumvent the metal nanotubes. This method will be accompanied by a woven or woven fabric produced by CVD or = YANG. The nanostructures can be styled using standard lithography techniques as soon as the needle is formed, as described in the patent reference. This lithography technique can be modeled by the controlled definition of the silky woven fabric of the light-weighted group of sensations - for example, in the form of a Beibei pre-size nanotube strip. An exemplary type of sensor fabricated using the sensing n platform of the preferred embodiment is a carbon nanotube or other highly durable material containing a naphtha, which can be a general type of The sensor is as follows: • Original tube (also known as non-functionalized nanotube) • Non-covalent functionalized nanotube • Covalently derivatized nanotube • The above mixture UJU403 f 1 • Non-functional The original type of the original tube is sensed by the nano-organism component 愤 奈 组织 Ϊ Ϊ Ϊ Ϊ Ϊ Ϊ ΐ ΐ ΐ 非 非 non-functionalized nano tube. The surface of the nanotube will absorb the analyte, which can be used to indicate the electrical properties of the tube, such as nanotube conductivity or capacitance. In this method, the nanotubes can absorb the food of the special wealth on the surface, such as the transfer, the impurity, and the change of the capacitance. ', can use a nano sensor to detect a specific known molecule valentini et al. Appl. Phys Lett Vol. 82 No. 6

Ca2rb〇3)^, SenS〇rS 〇Γ 〇Γ Sub~PPm N02 Gas Detection Based on on Nanotube Thin Rims". Therefore, a specific embodiment of the present invention is one of the benefits of _ _ _ _ _ _ _ _ lion 1 2.-4· Functionalized Nai Cai pipe is applied to the surface of the silk rice group, which can be used to increase the bonding of the official surface to the surface and/or to the bonding with the analyte. Accordingly, one of the specific embodiments of the present invention is intended to be functionalized prior to the utilization of individual nano-needles. Another such Wei-Nei tube of a particular embodiment of the present invention produces a nanosensor, particularly by The nano, and, and 哉 are styled into a specific shape. ^Before using the rice tube to produce the nano-tissue, the function of the nano-tube can be made in the suspension! (4) Stored in the main wealth. The body-function σ ί ί officially mixes with the original Nai tube to produce a partially functionalized nano-tissue. The f-f functionalized nanotube solution can be combined to produce a na-m composition to make a hybrid work. This procedure can be repeated to produce a nano tissue of many heterogeneous 1 meter tubes with the desired sensing. This may, for example, be functionalized with test sample sensing of a particular species of interest having a DNA sequence, such as only a specific virus or only a particular cancer pattern. 1330403 - Part of the present invention - The pattern is taken by the time meter _ rectification of the antigen resident histocompatibility complex (MHC) / the antigen complex from the fluid mixture or the early warning sensor of the infection. After applying nano-f to the substrate, the nanotube is functionalized to produce naphthene. In this case, the solution-dedicated Weihua can be carried out before or after the rice-synthesizing tissue is styled. This technique will make itself Multi-space across the surface can be used to functionalize events. For example, it is possible to spray different types of functional ageing on the substrate. The steps can be used to apply additional Wei groups to the same or different regions, so that The nanometer sensor device on the substrate has a region-modified sensory interface. In this way, it is possible to give a sense of a different array of 77 analytes that are potentially different for each of the different analytes. Measuring 0 heart In another embodiment, the nanotube can be functionalized after characterization of the sensing region outside the bulk nanostructure. (See U.S. Patent Application Serial No. 1 0/341 〇〇5, 1〇/341, G55, 1Q/341, Q54 and Na 4113Q, for the TFj details of the enchantment and styling organization) - complete the new, you can functionalize the area to serve as a specific sensor. Can be multi-sequence functional or The combination of functionalization produces a hybrid sensor that can sense more than one analyte in a styled nano tissue segment or many such segments. This property allows itself to be automated and used in conjunction with automated machinery. Contains organic and inorganic molecules that contain biomolecules. In a preferred embodiment, the target analyte can be any environmental pollutant, including pesticides, insecticides, poisons, etc.; • a chemical or chemicals, including solvents, polymers, organic materials, etc.; • or a variety of therapeutic molecules, including therapeutic and abusive drugs, antibiotics, etc.; • or a variety of biomolecules, including rhyme, cells f, protein f, lipids, carbonitrides, cell membrane antigens and receptors ( Nerve, hormone, nutrient and cell surface receptors) 1330403 or its ligands; • Whole cells 'containing prokaryotes (such as pathogenic bacteria) and eukaryotic cells, mammalian tumor cells; • Diseases, including retroviral viruses , vesicular prion, adenovirus, chronic virus, etc. and spores. For example, potential analyte molecules comprise nucleic acids, oligoribonucleic acids, nucleotides, and grammatical equivalents thereof, as well as any and all modifications and analogs thereof known in the art, including, for example, amino or thio modifications. Nucleic acid, i.e., having alternating back-nucleotide' or containing one or more carbonyl sugars, see, for example, Beaucage et al., Tetrahedron, Vol. 49, No. 10, pp. 1925 (1993); Jen Wns et al., Chem. Soc_ Rev Pp. 169_176 (1995). Thus, a nucleotide molecule having at least two covalent linkages is quite general and can be a potential analyte. In addition, classes of potential analytes include single-stranded and double-stranded nucleic acids' and nucleic acids including portions of both single-stranded and double-stranded sequences. Similarly, the latent nucleic acid analyte can be DNA (including genomic or cDNA), RNA or a mixture, wherein the nucleic acid comprises any combination of deoxyribo- and ribo nucleic acids, as well as urine. Secret. Urocil, adenine, thymine, cytosine, bird droppings. Any combination of bases of gUanine, jn〇sine, xathanine, hypoxantine, and the like. A mimetic compound of any of the above may also be used as a potential analyte. In a similar form, the potential analyte comprises proteins, oligopeptides, peptides and analogs thereof, proteins comprising non-naturally occurring amino acids and amino acid analogs, and peptide-like structures. Those skilled in the art will appreciate that a wide variety of analytes can be detected using various embodiments of the present invention. Any of the analytes of interest described herein can be detected using the methods of the various embodiments of the invention and the bonding ligands made from the articles. 1330403 It is possible to use nanoimprint lithography as a method of applying a functional medium to the other parts of the nanostructure, and (4) to produce a butterfly nanometer. This method is mainly used for sounding and is not suitable for a large number of arrays. Applyable by inkjet printing technology; force applied to individual parts of the nanostructure to create separate sensors on a given wafer. JT uses inkjet printing to automate the functionalization of individual nanosensor units' whether it is left on the substrate by applying a functionalized medium directly to the nanostructure unit or by applying a functionalized nanotube. All areas are available. Inkjet printing is the point of printing technology, in which the ink droplets or in this case the nanotube solution, are connected from the small hole "f, on the surface or the age of the health to return. Researchers have described a method of stagnating proteins at specific locations on the nanotubes. See 丨· Banerjee et al., Nan0 Lett, Vol. 3, pp. 3, 283-287 (2003). “L〇cati〇rvSpedfic (4) (4)

Functionalization on Nanotubes: Attachment to Proteins at the

Ends of Nanotubes Using Au Nanocrysta丨Masks". The special J embodiment of the present invention uses the teachings of Banerjee and makes a nanosensor to make a complementary sensor by retaining the protein at the end of the nanotube. According to this method, Applying gold nanocrystals to the sidewall of the nanotube and absorbing the avidjn on the entire surface of the tube. A chemical etching procedure is performed to remove the crystal of the nanocrystal, thereby removing the crystal of the nanocrystal. The above (4) element is attached to the end of the na[iota], and is thus used in this embodiment to make a nanometer sensor and to retain protein in the nano sensing unit and object. And the end of the rice tube used in the component. The sensor should be exposed to the analyte, either completely or nearly completely exposed to one part of the system, or part of the sealing system, whereby the analyte is introduced in a controlled manner. For example, the gas sensing nano-tissue tissue can be completely exposed to the air, but the DNA structure of the DNA sensor can be sealed in the composite microfluidic analyte introduction mechanical device. The latter is found in the PCT publication W〇00 /62931 The Use of Microfluidic 1330403 systems in the ectrochemical Detection 〇f Target Ana_S". In this PCT document, the inventors describe a sensor system whereby the analyte-containing fluid is introduced into the sensing chamber by microchannels. The storage chamber and unit cell lysis chamber can be connected to the system by other microchannels. One of the specific embodiments of the present invention is to use a nanostructure sensor in such a microfluidic system. The fluid analyte delivery system is described in U.S. Patent No. 6,290,839 to Kayyem, wherein the detection surface comprises a detection electrode having a single layer of conducting oligomers and, if desired, a capture bonding ligand that can bind to the analyte of interest. The target analyte directly or indirectly binds to the capture bond to form a bond complex. The bond complex further includes at least one electron transfer share. The presence or absence of the electron transfer share is detected by the detection electrode. One of the embodiments is based on the Kayyem, 839 patent, which utilizes a nano organizer as a sensor component in the device. &quo The nanosensor according to the specific embodiment of the present invention can also be used as a detector of the principle disclosed in US Pat. No. 6-361,958, the entire disclosure of which is incorporated herein by reference. Microchannels, _ sub-domains and groups of specific bond pairs, such as bonded to the porous polymer in the microchannel broadcast = DNA or RNA. Microchannels can be made of plastic, and operate the connecting fluid to push 2 pieces and check Therefore, this issue is specific to the day--the secret ^ is incorporated into the system towel of Sheih's lion patent. Μ 、, and weaving according to the "Natural sensor of the month" is also the same as the cited moxibustion In the test file, the nanometer flow is used for analyte delivery and (4)^, 2. Non-covalent functionalized second type, and the surface of the nanostructure is not working. This makes a variety of cations, anions, metals

And proteins can interact. The advantage of knives and DN/V non-covalent Wei is that the molecules are non-covalently bonded to the sidewalls of the nanotubes, while 1330403 essentially retains the chemical structure and electrical characteristics of the nanotubes. The advantages of nano-sensory presence in such functionalized nanotubes may increase, or may bind nai (tetra) to analyte molecules or atomic nano-nanostructures by adding yuen (pyren (8) or other known bonds) Nami official or; 5 Mede ❿ is secreted by non-covalent. For example, in the organic solvent such as dimethy丨formaide or methano oxime (1-pyrenebutanoic) Acid) and amber thiosemicarbamate (sucdni.midy| ester) can be used to produce amber sulphide functionalized nanotubes. The advantage of this method is the interaction between the porphyrin group and the side wall of the nanotube, and the production of nucleic acid A nucleophilic alternative to the highly reactive succinic ester group, which is found in the pro- and diamines on the surface of large and partially peptones and acetal acids and many pharmaceutical and prodrug compounds, among which "pre-drug" An inactive precursor for, for example, a drug that is converted to an active form by a normal metabolic process in the human body. This functionalization mechanism is used to retain the lag protein and various other biomolecules on the SWNT sidewall, and preferably for sensing binding or Bonding Molecular molecules. For example, streptavidin can be adsorbed on the surface of a nanotube and used for immunohistochemical sensing. See Chen et al. Chem. Soc. Vol. 123, No. 3838- ''Non-covalent Sidewall Functionalization of Single Walled Carbon Nanotubes for Protein Immobilization' on page 39 (2001). Use this _-like nanosensitivity to measure analyte compatibility with analytes' where non-specific bonding is avoided. See for example Star et al., "Neo. Lett. Vol. 3, No. 4, pp. 459-63 (2003) "Electronic Detection of Specific Protein Binding Using Nanotube FET Devices". A number of known non-covalently functionalized nanotubes are known. Method. See, for example, 丄

"Nanotube Molecular Wires as Chemical Sensors" by Kong et al., Science, Vol. 287, pp. 622-25 (2000.1.28); U.S. Patent No. 6,528,020 to Kelley et al., and U.S. Patent Application Serial No. 2002/0172963 -Bridged Carbon Nanotube Arrays". 1330403 For example, ^ is shown in the nanotube coating p_A (polymethyl methacrylate makes = body sensitive, and has shown the gold decoration of the nanotube, making it sensitive to the presence of sulfur: Bu, - (10) See U.S. Patent No. 6,528,020. In contrast, since the nanotubes maintain similar properties to the stone plate, almost any suitable for non-covalent functionalization; 5 ink methods can be functionalized with bribe nanotubes. The functionalized second type sensor uses a nanostructure member that allows any interaction on the surface of the covalently derivatized nanotube. The nanotube has been functionalized by covalent chemical bonding methods, for example, including diazonium salts. Class. Seen in "L Bahr et al." Am Chem

Soc. Vol. 123, No. 27, pp. 6536-42 (2001) "Functionalization of Carbon Nanotubes by ectrochemical Reduction of Aryl Diazonium Salts: A Bucky Paper ectrode"; 丄L. Bahr et al., Chem. Mater. 13 Volume No. 11 3823-24 (2001) "Highly

Functionalized Carbon Nanotubes Using in Situ Generated Diazonium Compounds. Other workers have employed solventless processes such as aniline in monopentyl nitrates. See, for example, C. A. Dyke et al. at J. Am. Chem.

Soc. 125, No. 5, pp. 1156-57 (2003) "Solvent-Free Functionalization of Carbon Nanotubes". Others have used oxidation processes to functionalize nanotubes in a single tank reaction where the reaction takes place in a single anti-capacitor. See, for example, M. GC Kahn et al., Nano. Lett. Vol. 2, No. 11 1215-18 (2002) "Solubilization of Oxidized Single-Walled Carbon Nanotubes in Organic and Aqueous Solvents through Organic Derivatization" ° For a single-walled carbon nanotube with a covalently bonded peptide nucleic acid sequence. See, for example, "Carbon Nanotubes with DNA Recognition" by K. A. Williams et al., Nature, Vol. 420, 761 (2002). 1330403 μ I t I: #人之_ - A kind of co-payment of functionalized nanotubes to win the woven fabric = 奈奈细___ _ nude丨c coffee PMA, unsaturated _ analogs) and to complement _ some giant Molecular line, so that the county meters, _ touch _ merge hidden specific molecular recognition appearance. This makes the DNA enchanting Nai _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ The sonic-short nanostructured rope was i hr in a mixture of H2 HN〇3 at a concentration ratio of 3:1. Sequential exposure to 1M Hc 丨 produces a fluorinated carbonyl end group. This material is then dispersed in ethaneformamide (DMF, 99 5%) and in 2 mM ethyl-3-(3-dimethylaminopropyl) Vinegar) Carbon-based dithioiminohydrogen chloride and 5 咚 Hydroxide, and ammonia (NHS) is incubated for 3 minutes to form the naphthyl ester. This material is then reacted with excess PNA in DMF for a few hours to form a PNA adduct (sequence: NH2_au_G butyl gctcatggtg c〇nh2, where Glu is a glutamic acid residue and the middle block represents a nucleic acid group). ρΝ>Δ; Derivatization The nanostructure was converted to water and dispersed in an aqueous solution of 05% sodium dodecyl sulphate. To test the hydrogenation of dNa in this modified group, a two-month, DNA fragment with a 12-base, single-stranded "viscose" end complementary to the PNA sequence employed. These fragments are produced by cutting the double-stranded DNA that binds the enzyme and bundles the product into a single oligo-nucleotide. The PNS-nanostructures in which the viscose DNA was hydrogenated in water and 5 mM MgCI2 were deposited on the newly split mica. Wash and dry the surface. It is then possible to record the atomic force of the DNA/PNA-nano tissue mixture " enemy photography. The anti-sensing properties of this derivatized complex can be used in biological applications, such as biosensors. These methods allow for the understanding and measurement of the functionalization of nanotubes with specific components or sensing media added directly by covalent bonding. As a result, the functionalized nanotubes become reactive chemicals themselves' can be further subjected to other chemical reactions resulting in such diverse species of nanotubes 1330403. These nanotubes have nanocrystals and inorganic compounds. See, for example, S. Banerjee et al., Nano. Lett. Vol. 2, No. 1, pp. 49-53 (2002), Functionalization of Carbon Nanotubes with a

Meta丨-Containing Molecular Complex”; S. Banerjee et al., Nano· Lett. 2, Volume 2, pp. 195-200 (2002), “Synthesis and

Characterizaiton of Carbon Nanotube-Nanocrystal

Heterostructure"; S. Banerjee et al., Am. Chem. Soc. Vol. 124, No. 30, pp. 8490-48 (2002) "Structural

Characterization, Optical Properties, and Improved Solubility of Carbon Nanotubes Functionalized with Wilkinson's

Catalyst". A variety of available chemistries can be used to modify these functionalized nanotube building blocks' to impart the desired group and ligand for almost any chemical or biological medium to be sensed. In the case of functionalization, covalently functionalized nanotubes can be used to generate nanosensors in three ways. The nanotubes can be individually functionalized and applied to a substrate, for example using a spin coating method or other application methods. In one embodiment, the tissue can be applied to the substrate and then covalently functionalized prior to styling. In another example, the nanostructure can be functionalized after the nanostructure is produced and styled. Both methods can produce nanowires containing one or more types of functionalized nanotubes, regardless of whether they have original nanotubes or not, depending on the sensor application. Once the source of the nanotube containing the appropriate functional component set is successfully produced, various methods are used to fabricate the nanosensor. 4_Mixing The fourth type of sensing is a mixture of two or three of the foregoing types. This mixing is utilized to detect multiple analyte locations in multiple analytes and analytical side profiles. Before the application of the nanotubes to the substrate, a number of different possible compositions of the surface function can be created, thereby allowing the mixing of the 1330403 sensing components of the analytes to be observed simultaneously. Method of the embodiment Figure 4 (A) - (ρ) collective illustration to produce an exemplary Nana like Figure 3 (a) or part X (see, for example, Figure 4 below) Various intermediate structures produced during the exemplary method of the meter. Providing a 4G2 second wafer substrate with an insulating or oxide layer 4. Alternatively, it can be applied to the lithography side and the electrons to the (4) substrate, and the oxygen cymbal can be any suitable insulator. The oxide layer 402 has an upper surface 4〇4. The oxide layer 4〇2 is preferably a few nanometers thick, but it can be thick! Micron. The styling and side secret layer 4〇=, the middle structure of the chest lag 4 (Α), from the condition of the 孜 叻 , s, the width of the cavity 406 can be narrowed to about ... 笊 驭 视 可 微 微 微 微 微 微 微 微 微 微 微 微And set. However, the wider or narrower voids can be applied and reduced. The remaining oxygen recording material defines a support (410) on the cavity (10). The lower electrode 412 is deposited in the cavity 4〇6. The f-pole material can be selected from any suitable conductor or semiconductor. If necessary, the lower electrode is planarized so that the upper surface thereof is substantially equal to the upper surface 4Q4 to form the structure 414 between Fig. 4 (8). Alternatively, the lower electrode 412 can be a prefabricated contact inspection (coffee) or via (10). It may also be deposited or fabricated in other ways. 412 is formed on the surface of the substrate 400. . . . 0 deposits a nitride layer 416 (or any suitable insulator) on the surface of the intermediate structure 414 to form the bamboo crucible of FIG. 4(C), structure 418. The nitride layer 416 has an upper layer 42. For the G. 18 micron basic rule (10)), a non-limiting example of nitride thickness is approximately 20 nanometers. The thickness of the nitride can be determined according to the basic rules of the final product of the final product = 彡f卩 torn the fine area volatility, _ ring \ /. . And V. #电Μ. Subsequent styling and hydride layer 416 produces voids corresponding to the dimensions of the lower electrode 1330403: = card active region 422. In the remaining nitriding region, the _ lake 4(d) rides the ‘the dentate sacrificial layer 428 on the surface of the intermediate structure 426 to form the intermediate structure 430 of FIG. The material of the sacrificial layer 428 can be made as a non-restrictive ^ engraving (must do) the hair of the Japanese mosquitoes _ other ^ = can be made of suitable materials. The heterogeneity of the sacrificial layer 42 δ thickness is in the order of 100 to 200 nm. The number < flattening the upper surface of the intermediate structure 430' causes the remaining polycrystalline layer 432 surface to be substantially equal to the upper surface of the remaining nitride layer 424, thereby forming an intermediate structure 434 of the θ diagram. The intermediate structure 438 is applied or formed in the middle of the structure 434 wire, and thus the shape = 4 (G). A non-limiting method of applying this tissue is spin coating, aerosol application, immersion or chemical vapor deposition, as described in the references listed above and incorporated by reference. A photoresist layer 440 is applied to the surface of the intermediate structure 438 to form the intermediate structure 442 of FIG. As shown in Figure 4 (I), the nanotube tissue region 447 (shown in phantom) is compared to the nanotube active region 422 patterned by a lithographically patterned photoresist layer 440 (see Figure 4 (D)). Large, an intermediate structure 444 having an exposed nanostructure portion 446 and a patterned photoresist layer 448 is formed. The exposed nanotube structure 446 is then removed to form the intermediate structure 450 of Figure 4 ("). A non-limiting method of styling nanotube structures is plasma ashing. The patterned photoresist layer 448 is removed by any suitable method, such as stripping, to form the intermediate structure 452 of FIG. Structure 452 has a patterned nanotube structure 4 that substantially corresponds to the nanotube tissue region 447 of Figure 4(1). A polycrystalline germanium 456 is deposited on the surface of the intermediate structure 452 to form an intermediate structure 458 of Figure 4 (L). The non-limiting range of thickness of the polysilicon layer 456 is between about 2 Å to 50 1330403 J 4 (M) < The remaining polycrystalline stone layer 422 -' on the remaining multi-day official zone 422, the knot (4) (f) 440 tissue residual photoresist layer 449, ah exposed nanotube photoresist # 449 Λ / eve Layer 457 is exposed to the nanotube portion 447 and the remainder such as f (not shown); ^ exposed; meter tube = more = and is described below. Figure 4 (N,) constructs the electrode material _ any metal or conductor selection electrode material 464 in the furnace is an insulator for the specific use of the device made of the electronic component, for example, if Visible material: can also be defined as "line or hole 働. or its =] = * pole structure of the electric polycrystalline stone layer 460 and the remaining polycrystalline stone Xi ^ ^ ^ pole, engraved remaining. Intermediate structure 476 in the middle of the remaining polycrystalline dream 07). The tube organization is still _ 474.

The structure of the I support is further illustrated in Figures 5 and 6. L is produced without top 4. Producing or providing an intermediate structure 4 [Α/Π sub-U residual polycrystalline layer 460 and remaining polycrystalline eve 432, shown), self-suspended nanotube tissue 472 suspension nanometer sensing two have = 』' And as shown in Fig. 4 (Ν'), it can be sampled by the nail structure::=ί==:Γ8. . The 'near tissue' is made with a gap between the nano-structure and the one electrode to avoid the slickness of the two. But it is close enough that the interaction of the electrode-nano-structure can be used to close the non-volatile relative arrangement. Sexy detector unit. The effect of tension and surrounding gap distance in the hang-hang tissue portion of the switching device, as described herein. In these and other embodiments, depending on a number of factors, the resulting device and the apparent electrode of the switch and the structure and configuration of the connection. Note the various types of electrical architectures in the following examples, as these devices and a variety of potential elastic indicators. For example, a portion of the common electrode shared between more than one nano-tissue object (for example, two nanometer groups = switching member text - the same flip electrode effect). Other devices have individual electrodes that affect the behavior of the tissue = tissue. Each nanostructured article may be controlled by one or more electrodes, which are described as "Electromechanical Three-Trace Junction Devices" as described in the referenced reference. Figure 5 shows that it can be from Figure 4 (P) The metallization mechanism of the structure 476. The structure = 76 nanometer sensor has been sealed for at least part of the insulating material 51, and has a gap 520' to form the structure 500. In some embodiments, the gap height 520 is As a function of the thickness of the sacrificial polysilicon layer 432. See Figure 4 above (〇). In the nano-group, the deflection can contact the lower electrode 412 to form a stable according to the interaction of van der Waa|s. Junction, and || to cause a non-volatile switch. 1330403 Figure 6 shows a plan view of the intermediate structure 476 of Figure 4 (P). The oxide layer supports the nanostructure 472, and the nitride layer 616 supports the electrode 468. The profile A_A is displayed. Fig. 7 is a perspective view of the intermediate structure 476 of the section A-A' shown in Fig. 6, and Fig. 8-9 is similar to the intermediate structure 5 of Fig. 5. In the section shown in Figure 6, respectively, β, /, CC suspended nanometer sensing of the structure of the 〇〇 〇〇 透视The figure (structure is similar to structure 500, but for the sake of brevity, the upper insulating layer is removed). In Fig. 8(a), the substrate layer 400 supports the oxide layer 402. The lower electrode 412 is located in the nanostructure still, The rice structure 472 is fixed to the insulating layer 424. The insulating layer (10) and 510 support the electrode material 468. a non-independent embodiment of the suspension of the present invention. The nanostructure 472 in this section looks at the collapsed crowbar. As shown in Figure 5, the stalked stalk and the garzed plaster should not be in contact with other components, but layer 424 (not dry and in contact with other components not visible - such as insulation: into (not) large image (shown as The dotted line shows the position of the substrate 400, the hard layer 402, the insulating layer 424, and the electrode 412 and the paste rice tissue 472, with reference to the aforementioned members. _ and the nanometer and the figure for providing contact with the electrode required for measurement. The structure of (N,) SC is as follows, which is described later. Li; two; the contact of the pole should be small. The polyethylene glycol (PEG) with a large percentage of '=== at room temperature in water The mixture of polyethyleneimine having an average molecular weight of 10, _ and ^ = % was treated to contain the original single wall carbon = knife ratio 1 woven fabric. The actual concentration and amount of time required for the step will vary with the size and density of the non-meter group. In addition, the phonetic is too sturdy and the meter is treated to persuade the nano-tissue view to ride (four) dry instead of lilt 1330403 ίί: in the furnace County traitor, whether it is oxygen or not. In water completely, after 4, the nano-tissue experienced at room temperature - overnight 15 biotin sulphur sulphur solution. The derivatized free amine group HI coated and non-secret mode __te) of the nano group f ^ ^ force, which is at room temperature through the 〇 _ Wei buffer salt (pH 74) = 2 · 5 _ antibiotic Streptomycin solution. As long as the measured voltage is low enough, the electrical contact can be attached when the voltage is too high. Comparison, pre-employment" (no anti-antibiotic = green axis anti-final self-hybrid Nylon weaving electrical special is used to describe the bonding situation. The total bond of the particle-bonded anti-eating egg _ time-distribution bond share w Or AFM calculates the particles in a given area of the nano-tissue, and reads the amount of the sensitive area of the nano-small w. Because of the biochemistry, it can be easily produced with a very narrow range of TM^^ tissue sensing consultation (more than 4 orders of magnitude in size) Or more. The method of the nanometer f sensor of the embodiment does not need to use i and m. However, the substrate can also be used. The sensing of the preferred embodiment is performed by having a relayed nanometer. Tube nanotube structure; these tissues can be CVD generated or operated by room temperature as described and referenced herein. In this backup sensor, if a nanotube is sensed If it is damaged, the device will be able to maintain the operation due to the spare conductive members of each sensing person. Since it is made at room temperature, it can be used for almost all of the lungs, including high-elastic rubber. According to the present invention. The nanosensor of a particular embodiment is readily adaptable to standard techniques found in the semiconductor industry, such as spin coating And the size of each nanometer detector can be determined by 鄕 or deposition. Because the overall cost, yield and array size of the Xiangsaki standard technology tester will be higher than other known technologies. The nanosensor unit in accordance with certain embodiments of the present invention can be used in a large 1330403* parallel array and can be multiplexed using standard CMOS compatible sense amplifiers and control logic. The meter sensor is compatible with high resolution contact printing. See H. Li. et al., Nano Lett, Vol. 2, No. 4, pp. 347-49 (2002), 'High-resolution Printing with Dendrimers,. Patterned nanostructures can be produced on the substrate (as referenced below and cited), and the patterned nanotubes can be transferred to the second substrate by appropriate contact printing methods. The affinity of the knot is an important factor in the selection of the appropriate substrate. The latter uses the same way to transfer the functionalized na[iota]. The printing technique is used instead of applying the style of Weihuazhuang to the styled nai. Sensing in different nanostructures Also, the inventor considers that standard semiconductor test equipment can be used in the same group to include wafer probes. Example of Ding Weaving Standard Test Injury The present invention can be used to withstand cVD === == Using spin coating or 'derivation ====___ to make the two S 'H electrodes, for example, the special phase of the present turn = nano tissue material formation. In some embodiments, there is a 'body structure member 472' The non-metal electrode 2 is located in the movable nano object and can be moved from the upper electrode to sacrifice the sacrificial band or other nanometer tissue structure material to move the sacrificial material 4:°2J under the sacrificial layer The electrodes 2〇8, 、, right, can be illustrated by the nano group before the embodiment and the device and the object are for illustrative purposes only, but the technology produces the same or equivalent. In addition, other types of materials can be used to replace the objects shown with different geometrical modifications. For example, the above-mentioned, and miscellaneous use of Jin Lei = connected to the invention of the invention can be used to provide a switch or non-switching sensor for the description of the shop. Additional (4) of the device. For example, Figure 3 (A) _ (c) contains structures with two different electrodes with push and / or a nano-tissue segment. For a given set of parameters and the t-gap distance is familiar in the narrative (four) or transmissive m °, the skilled artisan will know that other electrode connection locations and geometric shapes can be produced. To deliver a sample to be inspected by a sensor, a microfluidic delivery system can be employed. = blood, body fluids, chemical transfer samples are injected or fed into the body delivery system. ^ The system can be moved via the microfluidic capillary system to the county's pump to sense the theft. See, for example, the PCT publication w〇oo, 62931 "The Use 〇f

Anal〇t U^, C SyStemS 'n the E, ectroch® mical Detection of Target - A particular embodiment of the present invention provides a hybrid technology circuit 1000, as shown in Figure 10. The core nano sensor cell array 1〇〇4 is constructed by using the above nano tissue. The core of the hex is surrounded by semiconductors forming the X and γ address decoders Lake 6 and the 88, χ and 丫 buffers = 10, 1012, control logic 1014, and output buffers 〇16. The control circuitry surrounding the nanosense core is available for the conventional interface function to include the read current and the _ output on the appropriate number of times. Other embodiments may include redfaces for each face, and analyze the output in a fine appropriate number of times. In a particular embodiment, a nanotube core (only nanosensor unit 3 with nanosensing unit and addressing logic) and a hybrid circuit employing a surrounding circuitry of the field programmable gate array can be utilized 1〇〇〇. In accordance with another embodiment of the present invention, similar to the structure of FIG. 1A, the microfluidic separator 1002 is replaced by a gas input 1330403 means 1102, as shown in the structure ι1〇〇 of FIG. Some of the advantages of the sensor in accordance with certain embodiments of the present invention include the ability to perform large applications and integrations. In addition, the circuit chip is available for sensor and information processing and sensor control from the sensor. This family is promoted by CMOS-compliant manufacturing processes. Figure 22 illustrates the feasibility of a large array of addressable sensor components by showing an array of contact holes in which the sensor components can be placed. The following specific embodiments illustrate the use of current mirror sensing to detect electrical properties such as variations in the electrical or electrical resistance of nanosensors. See, for example, Bake " et al."

Circuit Design, Layout, and Simulation, pp. 427-33 (1998).

Researchers have shown that the electrochemical properties of the nanotube bundles and single carbon nanotube electrodes are sufficiently reliable that these bundles and individual tubes can be used as electrodes in capacitors. See 丄H

Chen et al. ectrochem. Soc., Proc. Vol. 11, p. 362 (2001) ’’Electrochemistry of Carbon Nanotubes and their

Applications in Batteries and Supercapacitors"; Y. Tu et al., Nano Lett, Vol. 3, No. 1, pp. 107-09 (2003), Nanoelectrode

Arrays Based on Low Site Density Aligned Carbon Nanotubes. The inventors have shown that the electrical properties of a single nanotube are clearly maintained in the nanostructure (see references cited therein). Figure 12 (A) shows coupling to a capacitance sensing structure. Capacitor modulation structure 12 〇〇 cross-sectional view, capacitor CDET 1201 includes a member 1202, 彳 204 and 1206. The capacitor CDET 1201 is applied to a substrate - such as a semiconductor wafer - with a conductive interconnect that has been placed or has been formed after forming a capacitor CDET 1201 Conductive interconnection of the initial placement. More specifically 5' In this example, a capacitor C〇et 1201 is applied to the upper surface of the completed semiconductor structure of the ground layer 1218 (e.g., Si3N4 film). The insulating layer 1218 is deposited on On the insulator 1220. The insulating layer 1218 supports the capacitor Cdet 1201. The conductive pad 1202 forms a bottom plate of a capacitor based on a nanostructure; the insulator 1204 serves as a capacitor dielectric layer, and the nanotube structure 1206 forms a 1330403 top plate of the capacitor. The tube tissue 1206 is in electrical contact with the conductive pad 1208, and the conductive pad 1208 contacts the pad 1214 using the via 1212. The area between pads 1202 and 1214 Part of the dielectric layer 1216 is filled with 'which may be composed of, for example, Si〇2. 塾1214. Connected to the common reference line 224 (which may be the ground line) by the vertical column 222, passing the '塾1202, the lower plate of the capacitor Cdet 1201 The vertical pillar 1225 is connected to the N+ diffusion region 1226 in the N-type semiconductor substrate 1228. The diffusion regions 1226 and 1232 and the gate 1230 form a PFET that is part of the capacitor sinking detection circuit. The nanotube structure 1206 has a plug to The analyte of the carbon nanotubes binds the molecule 1210 to form a nanostructure/analyte binding molecule complex. The nature of the binding molecule can be selected to allow specific detection of the analyte (including molecular species, gases, liquid chemicals, proteins) And other biomolecules known to react or bond with each other, as described above. The nanotube structure 1206 is porous, and the nanotubes only account for about 5% of the total area (other about 95% consist of voids) The analyte molecule 124A forms a conductive layer and a nanostructure/analyte binding molecule complex. An example of a non-limiting example of an analyte binding molecule comprising a biotin' biotin-specific bonding molecule is a non-limiting example of素素^抗蛋白_素. These analyte molecules 124Q are filled between the rice tubes by the biochemical group with the nanotube tube or the analyte binding molecule 121G or even the biochemical group, and the conductive pad 12 is added. 〇2 and the nanotubes are organized into 12〇6 electric junctions, and increase the capacitance of the capacitor CDET 1201. Capacitor Cdet 12〇1 = as such, the maximum value of 5% from the unbonded molecules is increased by 2 times to all The voids are all the maximum when filled. For the SiO 2 dielectric film (insulator) 12〇4 with a width of 10 mm and a width of 10 nm, possible tissue conditions, phase-combined regions and estimated values of SWNT capacitance based on estimation The number of capacitors provided by the two capacitors (10) is used for the control of the two SWNTs and the conditions such as processing and derivatization or functionalization. 1330403

Conditions. The coupling coupling area capacitor only has NT organization 5% 0.17nF Part fills the cavity 25% 0.86nF Part fills the cavity 50% 1.72nF Part fills the cavity 75% 2.59nF Completely fills the cavity 100% 3.45nF Table 1: The capacitance value is the function of the 仏 turn-on function. Compared with the reference capacitor Cr# capacitance measurement—12〇1 semi-conductor ί structure 1203> 阁* contains the reference capacitor ^ 1250's completed stand, ° section. Both the detector capacitor CDET1201 and the reference capacitor CREF 1250 are part of the same semiconductor structure. As shown in Fig. 12 (8), the CDET Ί 201 capacitor structure 1200 shown in Fig. 12 (4) is used to form ref 250 to remove the cleavage bond molecule (e.g., biotin) Dio, and a protective dielectric layer 12Q7 is added at the position. Other structures do not need to be changed. ’, the 13th cabinet shows the circuit 135〇 for measuring (detecting) the capacitance (〇〇Ετ). Circuit 1350 & and uses a current source formed by an NFET current mirror' which sets the current at the pM〇s current source mirror (4) to control the current to charge CDET. These current mirror configurations are based on

The basic current mirror principle described by Bake et al., CMOS Circuit Design, Layout, and Simulation, pp. 427-33 (1998). The principle of the galvanic current mirror is based on maintaining NFET transistors T1 and T2 and pM〇s transistors. D3 and D4 are saturated, 'where FET current 丨α (vGS-VTH) 2, VGS is FET gate-to-source voltage, VTH is FET threshold voltage, NFET and PFE D-cell FET current Independent of the FET source-drain voltage Vds. Resistor r and voltage V, Vss and the value of VGS across resistor R determine the current semiconductor technology for this application need not be the most sophisticated; 1 or 2 micron CMOS technology That is, it is suitable for manufacturing the required circuit. For the tracking between the transistors and the control of the transistor parameters, the length of the channel is longer than the shortest channel length of 1330403. For V=2.5 volts, Vss=-2_5 volts, VGS=1 volts* and In the case of the power supply value of the transistor T1 length I_1 (LEFF) = 5 μm and the width ν ν · ι = 15 μm (Wi/L | = 3), the R value = 400 ohms will cause 1 〇 micro ampere of the transistor D 1 Current. Due to the current mirror principle, if the transistor T2 is also designed to have W/L=3, ie Wi/i_1 = Ws/U, the current in the transistor 丨2 It is 1 〇 micro amp. As the transistor T2 provides the current source of the PFET current mirror transistor T3, the current | also flows through the transistor T3, the transistor T3 is a PMOS transistor and its channel electron mobility is much lower than that of the NMOS transistor. T2. PMOS transistor T3 is thus designed to have a substantially larger width to compensate for the difference in mobility between NMOS and PMOS transistors. For pM〇s channel length I~3 (Leff) = 5 micro-east, support 1 〇 microamperes The channel width of the current is W3 = 70 microns. If the transistor T4 is designed to be WVU = W3/L3, the current in the transistor 4 will also be 丨 = 1 〇 microamperes. This current will charge the detector capacitor. When switches S1 and S2 are off for a period of time τ, the charge Q stored on the capacitor write c is (four) 叮. Crossing the capacitor Cde · v〇uT=t such as V0UT=Q/C can be determined by measuring V〇UT Capacitance change. Calculate the capacitance value of Table 1 by applying a V UT value of 1 μm microamperes for 1 microsecond, and extract it as shown in Table 2 below:

Conditional capacitance v〇ut only NT organization 17.17nF 58.9mV Partially filled cavity 0.86nF 11.6mV Partially filled cavity 1_72nF 5.8TmV Partially filled cavity 2.59nF 3.86mV Completely filled cavity 3.45nF 2.90mV Table 2 · V〇 Ut is a function of the electric valley Cdet. Figure 14 shows a circuit 1450 for measuring (detecting) the potential difference Δνουτ between the capacitance CDET and the reference capacitance cREF to improve the measurement sensitivity. The circuit 145 〇 operates the original 1330403 and is identical to the circuit 1350. The transistor D4 is charged with current 丨=1〇μA, and has been added to the additional transistor D5 supply|=10 microamperes to ^but. Lin = stream I to CDET, design transistor T5 so that 5 = do 4 = take 3. For the NT organization of 50 Π holes, design the reference capacitor c so that ^REF=CDET (Table 1). The differential output voltage of circuit 1450 ^_ is as follows

Conditional capacitance · △ V〇ut Only NT tissue 0.17nF -53.1 mV Partially filled cavity 0.86nF -5.79mV Partially filled cavity 1.72nF OmV Partially filled cavity 2.59nF 1.96mV Completely filled cavity 3.45nF 2.91 mV Table 3 · △ν〇υτ is the function of the capacitance Cdet. When the output voltage ΔΝ/οπΟ, fill 5〇% of the cavity, as a convenient reference, the loss of the test chart = the measured capacitance (detection) capacitance CDET1, C and Cd - for cREF Circuit of potential difference Δ v〇UT, 550. Use switches S3 and T6盥i to select capacitors Cdeti, Cdet2 and cdet3. Additional transistor human I 7 has been added. This operation is based on the current mirror principle. Design transistor D6 and Ding 7

^^得 W成7 = W6/U = W5/U = W4/U = take 3 ′ causes the PFET to expand to the middle of the household with a transistor to provide the charging current 丨 = Chuan microamperes. In circuit 1550, the output potential difference AV of the capacitors CDET1, CDET2 and CDET3 is the same as described in circuit 1450. L, figure. ^ 16 (Α) shows the resistance detection structure rdet profile 加入 added to the semiconductor wafer. The resistor rdet is applied to the surface of the finished semiconductor structure, for example, the <4<4> film 1330403 edge layer 1218, forming a resistance modulation structure. A surface insulating layer 1218 is deposited on the insulator 22 and supports the resistor & Conductive shed 2 One of the nanotube resistor contacts 'Contacts the second nanotube tissue contact 1608A-contact' Nanotube tissue 12Q6 constitutes the resistance structure. The metal 塾1214 is connected to the wire 接触 to contact 1_. The nano-tissue has a fine plug of 1210 > 1206, = the object of the analyte-analyte bond is a biotin, and one of the non-limiting examples of the complementary/knife is the antibiotic Keyin. Under the gas 分 敎 , , , , , , 奈 奈 奈 奈 奈 奈 奈 奈 奈 奈 奈 奈 分析 分析 分析 分析 分析 分析 分析 分析 分析 分析 分析 分析 分析 分析 分析 分析 分析 分析 分析 分析 分析 分析 分析 分析 分析The non-dimension organization 1206 is a porous '--nano tube, which only accounts for about 5% of the total area (composed of other ridges). The exact percentage of porosity is controllable and adjustable, looking at the application and the vibrancy and integration. Here, the nano tissue is produced as a reference document. The inventors of the present invention envisioned the need to use a small amount or a plurality of nanotubes 1 as a nanostructure. The analyte molecule 124 is formed into a conductive layer that is filled in the void of the Nai to reduce the electrical resistance within the conductive object of the RDET. The resistance R will not be the lowest value of a conductive material. The resistance can be directly detected or measured relative to the reference resistor rref. Fig. 6 (Β 33 shows the publication of the semiconductor structure lake 3 including the Sigaku resistance rref. The detector resistance RDET and the reference electric m Rref are both the same semiconductor, history-part. Figure 16 (8) The structure of Rref is shown in Figure 16 (4). The structure of the resistor is formed. The analyte bond molecule is removed and protected by a layer: 1607. The other structures are unchanged. Figure 17 shows the operation of the circuit 175 for detecting the RDET value. The design and operation of the current mirror is basically the same as that used in the circuit 135Q of Figure 13. The Cdet is replaced by 1330403 RDET. Figure 18 shows the operation of the circuit 1850 for detecting the potential difference Δνουτ between RDET and Rref. The mirror principle is basically the same as that employed in circuit 1450 of Figure 14 'replace Cdet with Rdet and Cref 0 with Rref. Figure 19 shows the operation of circuit 1950 for detecting the potential difference Δνουτ between RDET and Rref. Design and operation of current mirror The principle is basically the same as that used in circuit 1550 of Figure 15, replacing CDET1 with RDETi, CDET2 with RDET2, CdeT3 with RdET3, and Cref with Rref. Figure 20 (A) shows the frame of the sensing organization The method of generating the framework can be produced by providing a tissue 2002 on the substrate 2004, as shown by the intermediate structure 2000, covering the tissue 2002 with a suitable covering material 2012, as shown in the intermediate structure 2010, and lithographically patterning and Remove a piece of cover material 2〇彳2, leaving the area around the sensing tissue, as shown in the middle structure 202〇. This binding method is more fully described in the referenced document “N〇n_v〇” |atj|e

Electromechanical Field Effect Transistors and Methods of Forming Same". The covering material may be conductive and may be used to alter the electrical properties of the entire patterned tissue, or it may be semi-conductive or insulating. When only opening the window of exposed tissue, The material of the tie layer on the rice structure should be selectively etchable. Selectively etched = material disposed on the cover layer on the intermediate layer between the nanostructure and the cover layer. In this case, when the cover layer is thinned and patterned The middle layer can be used as a hindrance block. 舜—Fig. 20(8) shows the styling sensing structure, in which no frame is formed, and the unconnected segment of the set layer is formed by s. The unconnected segment can be an electrode, 1 A particularly useful application of the variable detection structure is the styling intermediate junction, the gate 2042, as shown in the intermediate structure 2〇4〇. Ίϋ forming the pen Figure 21 shows another method of styling the nanostructure capacitive sensor. The cover material 2106 is selectively selectable on the middle 21Q4. The material 2106 is preferably a metal, and the intermediate layer 2iQ4 is preferably a semiconductor such as a boundary=he 1330403. The (four) layer (10) is placed between the nanometer tissue and the layer 2106. In this case, the middle layer 2 singulates the cover layer 2106. The scented cover layer 2112, ==; = 2110 shows the frame outside the π#. ^ _ , depending on the final product demand Μ 91 πλ # - shame annealing step, so that the cover layer 2112 and the middle 2 ^ 120 of this layer 2122 · such as metal lithium - to produce the structure of the final production is used as a braid or other contact Or addressing the components, other than the other embodiments, can be seen as other materials having electrons and properties suitable for the coating. These materials have similar properties to carbon nanotubes, and the stretching is different and may be reduced. For the embodiment designed to use or enable motor switching, r is not used in the carbon nanotubes. The tension of the motor must be within the allowable bistable and acceptable tolerances. °—As an example of using a material different from carbon nanotubes, note that the tissue of the mine can be used to sense the structure of the thunder container, or the nano-cocoa of the cocoa-based component. - Or the organization can be a combination of nanotubes and nanowires. Such f-meters and woven fabrics In the case of the Shun Ren's reference case, the patent application, entitled "Patterning of Nanoscopic Articles": The fluid sample delivered to the sensor component for analyte detection may include liquid engraving and gas. And can contain a variety of types of analytes, such as the flow of particulate matter. Η In addition, some of the above-mentioned g-like technologies such as hybrid circuits and addressing are used for individual nanotubes (such as direct growth technology, etc.) or nanotubes. The terminology used herein, such as "nanostructure sets, or, nanotube sets, generally include ^ m structures or nanotubes, and other materials that are hidden, and whether or not any specific electroforming: The specific quality or interval or configuration in a specific way is not involved in 5. No 1330403 nano tissue sensor can be used as an electrode in the capacitor. Researchers have shown the electrification of nano-beam and single carbon nanotube electrode The reliability of the study is sufficient, so that such bundles and individual tubes can be used as electrodes in capacitors. See "H. Chen et al.

Electrochem. Soc., Proc. pp. 362 (2001) Electrochemistry 〇f Carbon Nanotubes and their Apphcat丨ons in Batteries and Supercapacitors”; Y Tu et al.

NanoLett Volume 3 Number 1 107·〇9 (2〇〇3) by NanNe|ectr〇de

Arrays Based on Low Site Density Aligned Carbon

Nanotubes. The inventors have shown that the electrical properties of a single nanotube are clearly maintained in the nanostructure (see references cited therein). _ 匕, the purpose of a particular embodiment of the invention is to use a nanometer as a capacitor for the nanometer. Secret / ^, the gap between the nano-structure is particularly useful when measuring the difference in capacitance 'because of the nano-group, the difference between the capacitance of the bound composition and the capacitance of the individual tissue fingers is partly due to the individual nanostructures. The surface area is large, as opposed to nanostructures with bound analytes. The physicochemical used in b generally includes the f-price modification of the covalent and non-ugly repairs of the nanotubes. Therefore, Wei μ or share non-covalent conversion to a different functional group medium (4) W Sense contains any variation on the surface of Nano # or Naigui: 养生1^Γ生物_ produces different physical or electrical characteristics It can contain inorganic atoms and molecules as well as organic molecules. = contains peptides, nucleic acids, antigens (including polyaminoacridic acid nucleic acids. 匕,,············································· To this extent, this, T component, and by f. The monthly patent target park will contain improvements and modifications to the described 1330403. BRIEF DESCRIPTION OF THE DRAWINGS In the drawings: Fig. 1 is a diagram showing the configuration of a nanometer to a suspension in a substantially horizontal manner to show the susceptibility of a nanotube according to a specific embodiment of the present invention: A particular embodiment of the present invention is directed to a nano-tube nanometer in accordance with a particular embodiment of the present invention. 9^2, FIG. 6 is a cross-sectional view of a device for sensing a nanotube; an embodiment of the nanosensor, wherein the nanometer sensor is un---------------------------------- FIG. 1 is a diagram showing an NFET-pFET current mirror resistor device not according to a specific embodiment of the present invention; FIG. 1 is a circuit diagram of a nanotube structure not according to a specific embodiment of the present invention; FIG. 1 is not a specific embodiment of the present invention. NFET_PFET Current Mirror 1330403 Figure 20 (A) - (B) and 21 illustrate the construction or styling of the sensing tissue structure and its creation method; Figure 22 is a scanning electron micrograph of the contact hole array in which the sensible sensing can be placed Components to form a large array. [Main component symbol description] 200 Platform 201 Nanostructure member 202 Nanostructure member/object 204 Support 206 Support 208 Electrode 210 Gap distance 220 Nano sensor unit 222 Non-metallic material 224 Stud structure 226 Nano sense Detector unit 230 fulcrum material 304 lower electrode 306 upper electrode 314 structure 400 shi wa wafer substrate 402 insulating layer / oxide layer 404 upper surface 406 void 408 intermediate structure 410 support

49 1330403 412 Lower electrode 414 Intermediate structure 416 Nitride layer 418 Intermediate structure 420 Upper surface 422 Nanotube active region 424 Residual nitride layer 426 Intermediate structure 428 Sacrificial layer 430 Intermediate structure 432 Residual polysilicon layer 434 Intermediate structure 436 Nanotube structure 438 Intermediate structure 440 Photoresist layer · 442 Intermediate structure 444 Intermediate structure 445 Intermediate structure 446 Exposed nanotube structure · 447 Nano tube organization 448 Patterned photoresist layer 449 Residual photoresist layer 450 Intermediate structure 451 Intermediate structure 452 Middle Structure 454 Styled Nanotube Structure 456 Polycrystalline Layer 1330403 457 Polycrystalline Layer 458' Intermediate Structure 460 Residual Polycrystalline Layer 462 Intermediate Structure 464 Electrode Material 466 Intermediate Structure 468 Electrode 470: Intermediate Structure 472 Suspension Nanotube Structure 474 Air Gap 476 Middle Structure 480 Structure 482 Structure 500 Structure 510 Insulation Material 520 Gap Height 616 Nitride Layer 1000 Hybrid Technology Circuit 1002 Microfluidic Separator 1004 Core Nanosensor Cell Array 1006 X Address Decoder 1008 丫 Address Decoder 1010 X Slow Punch 1012 buffer 1014 Logic 1016 Output Buffer 1100 Hybrid Technology Circuit 1102 Gas Input Means 1200 Capacitor Modulation Structure 1201 Capacitor 1202 Member / Conductor Pad 1203 Semiconductor Structure 1204 Member / Insulator 1206 Component / Nanotube Tissue < 1207 Protective Dielectric Layer 1210 Analysis Bonding molecule 1212 via 1214 pad 1216 dielectric layer 1218 insulating layer 1220 insulator 1222 vertical column 1224 common reference line 1225 vertical column 1226 N+ diffusion region 1228 N-type semiconductor substrate 1230 gate 1232 N+ diffusion region 1240 analyte molecule 1250 Reference Capacitor 1350 Circuit 1450 • Circuit 1550 Circuit 1601 Resistance Modulation Structure 1330403 1602 Conductive Pad 1603 Semiconductor Structure 1607 Protective Dielectric Layer 1608A Selects Second Nanotube Tissue Contact 1608B Selects Second Nanotube Tissue Contact 1750 Circuit 1850 Circuit 1950 Circuit 2000 Intermediate Structure 2002 Organization 2004 Substrate 2010 Intermediate Structure 2012 Covering Material 2020 Intermediate Structure 2040 Intermediate Structure 2042 Electrode 2104 Intermediate Layer 2106 Cover Layer/Cover Material 2110 Intermediate Structure 2112 Cover Layer 2120 Structure 2122 Conductive Synthetic Layer

Claims (1)

1330403, claim patent range: 1. A sensor platform comprising a styling set and having an electrical feature; a sensor component comprising: a plurality of nanotube-support structures supporting the sensor component And the body control circuitry 'electrically senses the sense 俾 to detect the presence of a corresponding analyte. W,. The electrical characteristics of the component 2. The translating member of the patent application _ 彳 亦 亦 亦 亦 亦 亦 亦 亦 亦 亦 。 。 。 。 。 。 v, the middle w sensor is only J 3 · such as the scope of the patent range of the application of the "the scope of the application of the meter" (four) - the definition of the micro-investment of the micro-investment and the special (four) 1 item _ platform, Wherein the sensing component has an affinity for a pair of remote analytes. 5. The sensor platform of claim 4, wherein the sensor component comprises at least one original nanotube. 6 _ The sensor platform of claim 4, wherein the sensor member comprises at least one nanotube that is derivatized to have or increase the affinity. 7', as in the sensor platform of claim 4, Wherein the sensor component comprises at least one function of a nanotube having or increasing the affinity. 8. The sensor platform of claim 1, wherein the sensor component has a pair of at least two analyses Affinity of the substance, wherein the plurality of nanotubes comprises at least two types of nanotubes, a first type having affinity for a first analyte and a second type having a second analyte Affinity. 9. The sensor platform of claim 4, wherein the support The structure comprises a channel and the sensor member is suspended to extend the channel. The sensing platform comprising the item has a conductive electrode of the lion, and wherein the sensor member can ring 5. Then, the two or two circuit systems are deflected to contact the electrode, and the thyristor can be electrically detected in the sense of the sinusoidal structure of the sensor. The material 1* is sensed as claimed in claim 1 The platform further includes an electrode above the sensor member. The platform of the _11, which is the first item of the patent application scope, includes a feeling associated with the "f2: Lai Tong" to deliver - possibly having The fluid separator of the analyte. The surname; 0 3. The sensor platform of the S1 item of the patent of May 5, wherein the sensor component is placed flat on the support structure. The sensor platform of the item, wherein the sensing device can be reused after being exposed to the corresponding analyte, and the sensor member can be substantially _ to its pre-exposure state by applying the electricity. 15. As described in the sensor platform of the scope of the patent application, further steps include = the sense of the conductive member of the device member, such that the conductive member has a capacitive relationship with the sensor member. 16. The sensor platform of claim 15 wherein the sensing crying member is located - insulated The layer-side, and the conductive member is located on the side. 17. As in the sensor platform of claim 15, the current system includes a current mirror circuit system to allow measurement - and The capacitance of the second 2 sensor component is transmitted. Jiucheng 18. The sensor platform of claim 17, wherein the road system includes a reference electric valley state to allow measurement to be related to the reference capacitor crying The sensor component is electrically connected to the electrical component of the conductive member. 19. The sensor platform of claim 18, wherein the spring tube 1330403 container comprises a second nanotube set and a The second guiding member is configured such that the second set of the second tube is connected to the second portion of the second portion. The first two-steps in contact with the sensor member at a first-point include a second pass between the point-contacting the sensor member and the second portion between the second and second member members The _ series knows that the current can be passed. 21. The road system of the second aspect of the patent application includes a current mirror circuit system, where the resistance of the control room. The phase-measurement system of the first and second contact points of the phase 21 is included in the phase-by-side system. The circuit-measurement system of claim 21 includes a reference resistor, wherein the control electrode is between the first and second contact points. The resistor. In the case of a person-receiving resistor, the second resistor includes a second set of nanotubes and a third conductive member that is directed to the third conductive member so that the first sensor member contacts the first member. The second set of nanotubes. (10) passing through the third and fourth conductive structures. 24. A plurality of sensor platform units of a sensor platform, each of which includes a plurality of complex sensing components, wherein: Sentence cup—, electrical characteristics; ', 16 sets of nano tube styled sets - medium: and support structure' which supports the sensor component to be exposed to a fluid control circuit system, with #征,俾 Detectable—corresponding to a large array of the electrical component package 2 of the sensor component, wherein the sensor structure 26, • a sensor platform, including electrical specials ^^ minus, The utility model comprises: a styling set of / Wei nanotubes and a supporting structure for supporting the sensor component; the guiding member sensing 11 member (10) into a structural conducting member, wherein the transmitting distal sensor member has a Capacitance relationship; and conduction ill1 system, the electrical details - reflect - the electrical value of the capacitance associated with the component and the components. Member ^7i=f26l^>w station' wherein the sensor member: 8 2 = range number: 6: the sensor platform of the member, the other side of the detector is the conductive member system - located in the The sensing member axis _6 of the sensing platform, (4) the sensor body::., the surrounding structural material is surrounded, so that it is not substantially exposed to the contact with the flow <1旎. heart. Ten rooms are early, each of which includes an electrical ff-detector member' which includes a plurality of morphological sets of nanometers f and has a one-to-one control structure of the sensed transfer member; The member is configured to form a conductive member of the structure, wherein the transfer has a capacitive relationship with the sensor member; and the conductive circuitry is electrically sensed - reflecting the capacitance associated with the sensor member and the transfer member The electrical value. 31. The large array of claim 3, wherein the sensor component comprises at least one nanowire. .32. A sensor platform comprising an electrical special if/employment component comprising: a styling set of silk financial tubes and having a support structure supporting the sensor component; The sensing member turns the second conductive member to control the circuit, and the gas is responsive to the value of the electrical resistance associated with the current path between the conductive members passing through at least the sensor portion. The sensor platform of item 32, which is the sensor platform of the 32nd item of the patent application scope, wherein the sensor is a member of the county. The material is not exposed to possible contact with the flow. 35. A large array of sensor platforms, wherein the array comprises a plurality of domain remnant platform units each comprising a sensor component comprising a plurality of patterned sets of nanotubes and exhibiting an electrical characteristic And a support structure supporting the sensor member; and the first and second conductive structure control circuit systems in contact with the sensor member at the isolation position, the electrical sensing-reflecting-and passing at least The value of the resistance associated with the current path between the conductive members of the sensor component. 36. The large array of claim 35, wherein the sensor component comprises at least one nanowire. 37. A method of making a sensing|§, comprising: U-like support structure of a seesaw; providing a plurality of sets of nanotubes on the board; component defining - the shape of the nanotubes is turned into two's; The whisker corresponds to a sensor that removes the portion of the episode so that the panel is formed on the panel, and the sensor component is maintained on the base and has a test. The styling set provides control power m with t gas enthalpy, 俾 detectable - the presence of the corresponding analyte. (4) The money of the piece is specifically included to ==Special#嶋371 (4) The method of the component is packaged with the method of -*===, wherein the sensor component has the sensor of the gamma (10). The method of claim 39, wherein the sensor mold piece obtained comprises at least a derivatized nanotube having or increasing the affinity... 2' Shishen. The method of claim 39, wherein the resulting sensing device comprises at least one nanotube that is functionalized to have or increase the affinity. 43. The method of claim 37, wherein the sensor member has an affinity for at least two analytes, and wherein the plurality of nanotubes comprises two or two types of nanotubes - the first type The affinity for the pair-to-analyte and the second class have the affinity for the one-to-one second analyte. 44. The method of claim 39, wherein the support structure comprises a channel and the sensor member is suspended to extend the channel. 45. The method of claim 44, wherein the support structure comprises 1330403 - located at the ejective material electrode, and the diligent reading should be deflected to contact the electrode in the circuit system, and the electrical connection can be electrically measured. One of the gates of the nanotubes in the sensor component. 46. The method of claim 45, further comprising an electrode positioned above and isolated from the sensor member. 47. The method of claim 37, wherein the member fluid is circulated to deliver a method that may have the sub-division: the second is in the scope of claim 37, wherein the sensor member is flat. The method of Lai 39 can be reused after being exposed to the corresponding analyte, and the component is substantially shouted to the county, the sensor 50. If the application scope is 37, a dose is used. By growing the nanotube assembly system on the substrate 51. As in the method of claim 5, 'there are a pair of such nanotubes: phase == 52. In the fifth aspect, the nanotubes are functionalized to have the corresponding 53. As in the method of claim 37, the solution of the nanomanufacture is formed on the substrate to form the set of nanotubes. / Call a suspension 54. For example, the 53rd tube of the patent scope of the application has the affinity for the corresponding analyte. Such as Naihua (4) Patent Method No. 53 method, functional reading, etc. 丄 〇 4〇3 Officials have the affinity of one-to-one corresponding analytes. 56. The method of claim 37, wherein the sensor component is made from a pre-derivatized nanotube. 57. The method of claim 37, wherein the sensor component is made of a pre-functionalized nanotube. 58. The method of claim 37, further comprising derivatizing at least one portion of the pre-patterned set of the nanotubes. 59. The method of claim 37 of the patent scope further comprises functionalizing one part of the pre-patterned set of the nanotubes. 60. The method of claim 37, further comprising derivatizing a portion of the pre-patterned set of the nanotubes remaining on the substrate. 61. The method of claim 37, further comprising functionalizing at least one portion of the pre-patterned set of the nanotubes retained on the substrate. 62. The method of claim 37, further comprising providing a layer of cover material on one side of the nanotube set; and removing a portion of the cover material to expose a portion of the set. 63. The method of claim 37, further comprising providing a first layer of the first covering material on one side of the one set of nanotubes; providing a second layer of the second covering material in the first layer One side of the rice tube set; a portion of the second covering material is removed; and a portion of the first and second refractory materials are annealed. 64. The method of claim 37, further comprising providing a conductive member remote from the sensor member such that the sensor member has a capacitive relationship with the conductive member. 65. The method of claim 64, further comprising providing an insulating layer between the conductive member and the sensing member. 66. If the scope of the application for patents is 64, the current is a singularity. The earth A includes a current mirror circuit system to allow for the capacitance of the component of the circuit system. Having a phase with the conductive member and the sensor, and the method includes: providing a component member and the material sensing member such that the second nanotube assembly is the first two ? The second conduction structure of the isolation is called the patent scope 4:==:= a first point and the first step of the contact with the sensor component is provided for the second point and the second contact with the sensing device. Providing one-to-one through the first-filament material, the pie-current can be patented as follows: including a current mirror circuit system to allow the circuit system resistance. In the absence of the brother--the second point of contact with the younger brother, such as the application of the patent scope of the 69th test resistor, to allow measurement and the progress of the test include "for the sensing of the first-and second conductive members 】 related to the current through the 72. The current related to the current of the scope of the application of the scope of the 71. The second-negative tube set and the isolation point: 'Yin Yin the reference resistor package conduction member and a fourth conduction The member is such that the ^=^ tube set contacts one of the three or four conductive members of the sensor member. " machine loss is provided by the third and the 73.-_ Supporting structure with a substrate; . providing a plurality of nano-alarms on the structure of the Hei push structure; 1330403 member-defining the style of the county, so that the pattern corresponds to - the sensor removes the set - The portion 'to make the set of the device's capacitive circuit system' electrically sensed - and the conductive member and the sensing are included in the patent of the patent of 73 (10), the detector component package 75 · as claimed in the 73rd article The insulating layer between the material member and the sensor member. 4 private supply - Jie 76 · Ru Shen Please contact the cover material of the method of the method of the 73th method of the patent range to provide contact with the contact material. The possibility of not exposing the fluid to the shell is provided. 77. A method for fabricating a resistor structure, including a support structure with a substrate; a plurality of sets of nanotubes are provided on the substrate; the component defines a pattern within the set of materials, so that the hybrid corresponds to a sensor removal-partial, paving The styling portion is _ upper to form a sensor member, which includes a plurality of smashes; < the earth plate has an electrical feature; 1 the styling concentrating member raises the eye position and the sensing The first and second image-providing control circuit systems 姘7->the portion of the detector member--the Hf1--reflects the electrical resistance associated with the current path between the components. Included in the 77 items of the her husband, the component of the squirting device 79. If the covering material of the sensor component is in contact with the patent scope, the contact material is provided: ^ Providing contact with the ninth. The possibility of not exposing the fluid to the shellfish 80. A sensor platform, including electrical special 7 measurement 1 1 member 'which includes a styling set of plural financial records and has a support member that supports the sensible member so as to be exposed to a fluid; 俾 糊 刚 纲 特征 , , , , , , , The sensor platform of the item (10) is obtained, wherein the plurality of mint-= material only touches the genre pattern set. The component has a force sensor platform of 'phase' analysis, wherein the sensor component : A platform sensor 85. The sensor platform of claim 83, wherein the member includes at least - derivatization with or increases the affinity; m.2, 86. A sensor platform, wherein the sensor component comprises a nanowire that is at least functionalized to have or increase Wei and force. 87_. The sensory platform of claim 8Q, wherein the sensor component has an affinity for at least two analytes, and wherein the plurality of nanowires. A first type has an affinity for the one-to-one first analyte and - a second type has a pair of - the affinity of the second analyte. The sensor platform of claim 83, wherein the support structure comprises a channel and wherein the sensor member is suspended to extend the channel. The sensor platform of claim 88, wherein the support structure comprises a conductive electrode located in the channel, and wherein the sensor member is deflectable from the control circuit system In order to contact the electrode, the gate can electrically detect a gate effect of the nanowires in the sensor component. 90. The sensor platform of claim 89, further comprising an electrode above the 5 liter sensor member. 91. The sensor platform of claim 8 wherein said sensor platform is fluidly coupled to the sensor platform for delivery - a fluid separator 92 that may have the analyte - as claimed in claim 8 A sensor platform, wherein the sensor member lies flat on the support structure. $ 错 = = · As claimed in the scope of claim 8 of the sensor platform 'where the sensor poison = exposed to the analyte can be re-made, correcting the application - voltage, the sensory component can be substantially Revert to its pre-exposure state. 94. The sensor device of claim 8, further comprising a conductive member of the inner bridge member such that the conductive member has a capacitive relationship with the sensor member. 95. The sensor platform of claim 94, wherein the sensor yak is on one side of the insulating layer and the conductive member is on the other side of the insulating layer. 1330403 96. The sensor system of claim 94, wherein the delivery system comprises a current mirror circuitry to allow measurement - capacitance associated with the control of the electrical sensor component. A dedicated component and the sensor platform of the 96th patent application scope, the on-road system includes a reference capacitor to allow measurement of the sensor component associated with the control grid The 5th electrical device of the conductive member related to the raining device. 98. The sensor platform of claim 97, the container includes a second nanowire set and a second nanometer: The reference conductive member is such that the second nanowire set and the second conductive member are second pass 99. The sensor platform factory-capacitor relationship of claim 80 of the patent application. The first conductive J-step in contact with the sensor member at a first point includes a second conductive member in contact with the sensor member such that the second first and second conductive members Sensor component. The town can pass the 1〇0 as claimed in the patent scope. The circuit system includes the current mirror circuit, where the resistance is between the control points. The first and second contacts 101 are filled with the first and second contacts 101. The sensing system of the first aspect of the patent application includes: a reference resistor to allow the first and the first of the test control resistors to be related The resistance between the two contact points refers to the 1〇2 of the resistor. The sensing A resistor as in the scope of the patent application includes a second Naizhi, to /, and the middle of the S. The collection point is in contact with the sensor member such that A can pass through the set of "Hai-Ni" lines between the third and fourth conductive members. 103. A large array of sensor platforms, wherein the plurality of sensing stations are united, each unit comprising a 大3 large ridge complex-sensor component comprising: a plurality of patterned sets of nanowires and having a 1330403 Electrical characteristics; a building structure 'which supports the H component to be exposed to the fluid; and a control circuit system that electrically senses at least the electrical characteristics of the sensor component, 俾 detectable The presence of a corresponding analyte. 104. A large array of claims 1 to 3, the components of which comprise at least one nanotube. Θ 105. A sensor platform, comprising a sensor component that includes a plurality of patterned nanowires; and a support structure that supports the sensor components; Moving away from the sensing transducer to form a conductive member of the structure, the conductive member and the sensor member are capacitively hidden; and the control circuitry is electrically sensed by a sensor and a conductive member The electrical value of the capacitor. The 5th Hai 106's as claimed in the patent scope, the sensor platform of the 5th item, the device component includes at least one nanometer tube. Xuanzang test cry m! °7·If the patent application scope 105 sensor platform, in which the reading: then the other 'i and the conductive member system - located in the reading insulation crying!!: Patent application No. 1. 5 sensing 11 platform, which sense The fluid-measuring support structure material is wound so that it is substantially unexposed to the sensory platform, wherein the array comprises a plurality of. The ten-year-old elements each include a sensor component, including a styling set of multiple nanowires - electrical a support structure for supporting the sensor member; - remote from the sense member to form a structure guide member and the sensing mask member in the fiber control circuit system, the electrical sensing of the control member The value of the capacitor. The reduction component and the transmission member === large array of enclosures' wherein the sensor 111. A sensor platform comprising an electrical = detector component comprising a plurality of nanometers The patterned set of wires - a support structure supporting the sensor member; and the first and second conductive members 119 丄 14 between the conductive members in contact with the sensor member at the isolated position The value of the resistance related to the current path. ΊΊ 2. If the scope of the patent application is 彳彳彳 戍 器 器 器 器 器 器 器 器 奈 。 。 奈 奈 奈 奈 奈 奈 奈 奈 奈 奈 奈 奈 奈 奈 奈 奈 奈 奈 奈 奈 奈 奈 奈 奈 奈 奈a detector platform, wherein the sensing fluid is wound so that it is not exposed to and sensed: the array is comprised of a plurality of dipole-sensing embarrassing members, which include - a plurality of naval styles Integrating with - hair characteristics; - supporting the sensing a support structure of the member; a first member in contact with the sensor member at the isolated position at the isolated position; and a circuit system 'electrically sensed to reflect the conduction with the portion passing through at least one of the members The resistance i value of the current path between the components. The large array of the 114th member of the component, wherein the sensor 116. is a method for fabricating a sensor, comprising: providing a support structure with a substrate; Providing a plurality of nanowire sets on the substrate; defining a pattern in the set of nanowires such that the pattern corresponds to a sensor component; removing the portion of the set to make the miscellaneous-style scale Maintaining the substrate as a "sensor-sensor component" comprising a plurality of patterned sets of nanowires and having an electrical feature; and providing a control circuitry to electrically sense the sensor component The electrical characteristic, 俾 can detect the presence of a 'corresponding analyte'. 117. The method of claim 116, wherein the sensor component comprises at least one nanotube. 118. The method of claim 116, wherein the sensor member has a pair of affinity for the respective analyte. 119. The method of claim 118, wherein the nanowires are raw nanowires. The method of claim 118, wherein the nanowires are derivatized to have or increase the affinity. A. The method of claim 18, wherein the nanowires are functionalized to have or increase the affinity. 1330403. The method of claim 1, wherein the sensor member has an affinity for a pair of at least two analytes, and wherein the plurality of nanowires comprise a line of two nanowires, one One class has an affinity for a one-to-one first analyte and a second type has an affinity for a one-to-one second analyte. The method of claim 118, wherein the support structure comprises a channel and the sensor member is suspended to extend the channel. The method of claim 123, wherein the support structure comprises a conductive electrode located in the channel, and wherein the sensor member is deflectable in response to the control circuitry to contact the electrode, such that A gate effect of the nanowires in the sensor component can be electrically detected. The core 125. The method of claim 124, further comprising an upper electrode disposed above and separated from the upper electrode member. 126. The method of claim 116, further comprising defining a fluid communication with the sensor component to deliver a fluid separator that may have the analyte. 127. The method of claim 16, wherein the sensor component is placed flat on the substrate. 128. The method of claim 118, wherein the sensing crying member is reusable after exposure to the ageing analyte, and substantially restored to its pre-exposure state by applying the light sensor component. 129. The method of claim 116, wherein the nanowire collection is formed using a catalyst by growing the set of nanowires on the substrate. The emblem is the method of applying for the patent _ 129, wherein during the period of growing the nanowire set, the nanowires are touched to have the affinity for the corresponding objects. 131. The method of claim 129, wherein the nanowires are functionalized to have a one-to-one affinity for the corresponding analyte during the growth of the nanometer 1330403 line set. 132. The method of claim 116, wherein the set of nanowires is formed by depositing a suspension of nanowires on the substrate. 133. The method of claim 132, wherein the nanowires are derivatized to have an affinity for a one-to-one corresponding analyte. 134. The method of claim 23, wherein the nanowires are functionalized to have an affinity for a one-to-one corresponding analyte. 135. The method of claim 116, wherein the sensor component is made from a pre-derivatized nanowire. 136. The method of claim 116, wherein the sensor component is made of pre-functionalized nanowires. 137. The method of claim 116, further comprising derivatizing at least a portion of the set of nanowires. 138. As in the method of claim 116, further at least one part of the nanowire set. 139. The method of claim 帛m, further comprising derivatizing a patterned set of the nanowires maintained on the substrate. To do the method of applying for the patent scope, and to maintain the method of the silk cake style scale 6 ^ 141. If the method of claim 116 is applied, the step further includes providing a layer of covering material in a nanowire set. One side; and a portion of the cover material is removed to expose a portion of the set. = 2. The method of claim 16, wherein the method further comprises: providing a first layer of a first covering material on one side 1330403 of a sensor member; providing a second covering material - The second layer is on one side of the sensor member. A portion of the second cover material is removed; and a portion of the first and second cover materials are annealed. 143. The method of claim 6, wherein the method of inducing a member of the sensing member is further away from the conductive member, such that the method of claim 143 is provided in the conductive member and the method Sensing the insulation between the components.匕 提供 提供 提供 145 145 145 如 如 如 145 145 145 145 145 145 145 如 145 145 如 如 145 145 145 如 如 如 如 如 如 如 如 145 145 如 如 如 如 如 申请 申请 申请 申请. The finder member and the sensing 146. The method of claim 143, wherein the capacitor is referenced to allow measurement with the reference capacitor; and the capacitor is provided to the conductive member. X-electricity is related to the feeling of seven red 14 Ι. For example, the method of claim 146, the hair ^ includes a set of two nanowires and - with the second nanowire 隹hai reference capacitor parts, t鄕 two There is no second transmission and two conduction structures in the Nike scale, such as the method of applying for the patent scope (4), and the Huaiyi electric connection relationship. The first contact with the sensor member at the first point includes providing - the second conductive member of the second point in contact with the sensor member for the sensor between the two conductive members The component current is included in the current mirror circuit system as in the scope of claim 148 to allow measurement of the first = the control (four) circuit of the resistor. younger brother. 150 between the two contact points, as in the method of claim 148, further includes providing - 72 reference resistors to divide % θ. The first-th order is related to the resistance of the reference resistor. . The electric current of the electric meter of the m-part of the m-part is included in the method of the first item, wherein the reference three-conducting member is in contact with the first; the nanowire structure is in contact with the fourth conduction structure. The method of the third and the first volume structure of Sakizaki, including the singular structure of a substrate-substrate; the structure provides a plurality of nanowire sets; the member; the 丨4 meter line , style makes the miscellaneous Corresponding to - on the sensor, the part is transferred to the substrate and has an electrical sign; 〃 13 sets of a plurality of linings provide a conductive member away from the sensor member, the sensor member - Capacitance off ^ / and domain - structure 'the device member is provided with Mi Mi ^ (4) measurement - green material member and the method of sensing including the lobes 152, the device member 154. If the patent application scope is 52 The method is to enter an insulating layer between the conductive member and the sensor member. Ki,- As in the method of applying for the scope of the patent, item 152: Into the _ test _ cover material, so that ^ may be in contact. Lu Xing Xing's 73 » 1=6.- Kind of production - resistance structure method, including: providing a support structure; on the support structure to provide - a plurality of nanowire sets; components; '-I scale set The pattern is such that the pattern corresponds to the sensor, and the portion 'turns the pattern (10) of the hybrid pattern onto the substrate and has an electric component such as a component' which includes a plurality of nanowires. And the first and second transfer circuitry in contact with the sensor member electrically sensed-reflected--electrically related to a current path between the conductive members passing through at least one of the members; ^ 4^ The method of claim 156, wherein the sensor apparatus comprises at least one nanotube. 158 • The method of claim 156 of the patent scope, including the stepping of the material of the core member, so that it is substantially not exposed to contact with the fluid. Detector value 74