1328243 九、發明說明： 【發明所屬之技術領域】 本發明涉及一種真空規管，尤其涉及一種靜電鞍場約束分離規管。 【先前技術】 δ代科技·發展迅猛，於5午多南新技術領域，需極高之真空環境，如：宇 宙空間之模擬，超導技術’核聚變聽’超低财巨型粒子加速器技術等。 而於超南真空領域，超高真空規之研究勢必成為必不可少之重要環節。1328243 IX. Description of the Invention: [Technical Field] The present invention relates to a vacuum gauge, and more particularly to an electrostatic saddle field constrained separation gauge. [Prior Art] δ generation technology · rapid development, in the 5th afternoon, the new technology field, need a very high vacuum environment, such as: the simulation of space, superconducting technology 'nuclear fusion listening' ultra low-cost giant particle accelerator technology, etc. . In the field of ultra-South vacuum, the research of ultra-high vacuum gauges is bound to become an indispensable important link.
先前技術中，純高及極高真空測量時，X射線會產生光電流及電子誘 導脫附效應將會限制真空規管測量下限，解決方法之一係做成分離規。p AIn the prior art, when measuring purely high and very high vacuum, X-rays generate photocurrent and electron-induced desorption effects will limit the lower limit of the vacuum gauge measurement. One of the solutions is to make a separation gauge. p A
Redhead 於《The Journal 〇f Vacuum Science And Technology》，3,（1966)， P173-180«^ (New Hot-Filament Ionization Gauge With Low ResidualRedhead at The Journal 〇f Vacuum Science And Technology, 3, (1966), P173-180«^ (New Hot-Filament Ionization Gauge With Low Residual
Current》文章揭露一種真空分離規管，採用一擒板放於收集極前面，以撞 住一部分X射線，同時使得電子誘導脫附之離子到達不了收集極，該方法可 將規管之測量下祕伸到10-T〇rr。其結構如第一圖所示，該真空分離規管 10包括：一柵極籠12 ’該柵極籠12 —端封閉，另一端開口； 一調制極n， 設置於柵極籠12頂部删端中心;—鎢燈絲13 ; _遮罩板14設置於該柵極 籠12之開口端’該遮罩板14中心開設有一圓形開口； 一離子反射極15，該 離子反射極15爲碗形結構，該碗形結構之收口方向面向該圓形開口；及二 收集極16，該收集極16設置於離子反射極15碗形結構底部，盆 開口相對準。 '、^ 該真空分離規管10通過控綱制極U使柵極籠12電壓爲零，從鶴产 絲13發射出之電子於柵極籠12内與縫分子碰撞形成離子流，離子被接二 電壓魏罩板14所吸引，從圓形開口私碗形離子反射極15，離子在離子 反射極15電位協同個下’最後被收集極16所接收。該真空分離規管ι〇 採用-個遮罩板14放於收集極16前面，以擋住一部分X射線，同時使得電 子誘導脫社軒舰不值雜16。惟，_絲妓細量下限。有 10 %rr ’且其結構皆比雛雜’不宜使驗如太空科技、超低溫及巨型粒 子加速器等有更高真空之場合或封閉器件中。 7 1328243 爲進一步提供體積小、功耗小及結構簡單之超高真空及極高真空測量之 真空規官，以適用於太空科技、超低溫及巨型粒子力口速器等領域，中國大巧 清華大學電子工程系陳不瑾及李幼哲於八十年代發展之微電離規(參見 空技術的科學基礎》，―年，國防出版社)基礎上發展了一種靜電鞍場規: 該靜電鞍場規利用靜電鞍場約束之電子振盈可以産纟極長之電子路徑因而 可獲得極高靈敏度。 1996年，陳圣谨及齊京於中國專利第⑽62_8 χ號揭露—種具有極 低吸放氣率之高真空微電離規20。如第二圖所示，該高直空微 金屬外殼、陶究芯柱27、離子收集極26、陽極環22及電子發射體元= 24組成。金屬外殼21之一端與陶竟芯柱27相熔封，金屬外殼21另一端與 待測器件相接，離子收集極26與電子發射體元件24相對陽極環同軸非對年冉 安裝於金屬外殼内◎電子發射體元件24包括鎢燈絲241與反射極2犯。由於 該高真空微規20體積小、賴醇及雜校得紙^，所以得到 更廣泛之。惟，賴型之電離規管偷沒有遮罩χ 本敍電子誘導 脫附之離子，故，降制其測量下限之進一步擴展。 有鑒於此，提供一種克服上述缺點並進一步提高靈敏度之真空規^十八 必要。 刀 【發明内容】 爲解決已有技術之技術問題’本發明之目的係提供一種進— 度之真空規管。 蚁 爲實現本發明之目的，本發明提供一種真空規管 一陽極厂屏蔽極’-離子引出極…反射滅—收集極。該屏 該陰極早7C相職’轉祕$ ―端麟離刊丨極姆應。娜子引出極 中〜開e又一離子引出孔。該反射極爲曲面結構，該曲面圍住屏蔽極靠近離子 引出極之一側。該收集極設置於該反射極曲面結構底部，並指向離子 孔。該％極固定於屏蔽極中間内部。 —與先前技術相比較，本發明絲鞍場電離規之分離規管具有以下優點： 第一 ’屏蔽槪離子引出極構成-個將近半封閉之圓筒結構，根據類比計算 之結果’電子於該區域中容易振盈，從而獲得較高之規管靈敏度；第二，g 8 力Ή固離子反射極，其作用係使更多之離子到達收集極，從而獲得更高之 轉錄度；第三’由於離刊出極能夠槽住絕大部分獻電子誘導脫 附之離子，使得規管之測量下限能擴展更高真空度。The Current article reveals a vacuum separation gauge that uses a slab placed in front of the collector to hit a portion of the X-rays, while allowing the electron-induced desorption ions to reach the collector. This method can be used to measure the regulation. Reach to 10-T〇rr. The structure of the vacuum separation gauge 10 includes a grid cage 12' which is closed at the end and open at the other end. A modulation pole n is disposed at the top of the gate cage 12. a tungsten filament 13; a mask 14 is disposed at the open end of the grid cage 12; a circular opening is formed in the center of the mask 14; an ion reflector 15 having a bowl-shaped structure The closing direction of the bowl-shaped structure faces the circular opening; and the two collecting poles 16 are disposed at the bottom of the bowl-shaped structure of the ion reflecting pole 15, and the basin opening is relatively aligned. ', ^ The vacuum separation gauge 10 makes the voltage of the grid cage 12 zero by the control system U, and the electrons emitted from the crane filament 13 collide with the slit molecules in the grid cage 12 to form an ion current, and the ions are connected. The two voltage dice plate 14 is attracted, and from the circular opening, the private bowl-shaped ion reflecting electrode 15 is ion-collected by the collector electrode 15 at the potential of the ion reflecting electrode 15 . The vacuum separation gauge ι is placed in front of the collector 16 with a mask 14 to block a portion of the X-rays, while at the same time making the electron induced detachment. However, _ silk thread fine limit. There are 10% rr ' and its structure is more than the same. It should not be used in applications such as space technology, ultra-low temperature and giant particle accelerators with higher vacuum or enclosed devices. 7 1328243 To further provide vacuum gauges for ultra-high vacuum and ultra-high vacuum measurement with small size, low power consumption and simple structure, suitable for space technology, ultra-low temperature and giant particle force mouth rate, etc., China Daqing Tsinghua University The Department of Electronic Engineering Chen Buzhen and Li Youzhe developed a micro-ionization gauge in the 1980s (see the scientific basis of air technology), "Year, National Defense Publishing House" based on the development of an electrostatic saddle field gauge: the electrostatic saddle field gauge uses static electricity The electronic vibration of the saddle field constraint can produce extremely long electron paths and thus achieves extremely high sensitivity. In 1996, Chen Shengjin and Qi Jing disclosed in Chinese Patent No. (10) 62_8, a high vacuum micro-ionization gauge with a very low suction and gassing rate. As shown in the second figure, the high straight space micro-metal casing, the ceramic core 27, the ion collector 26, the anode ring 22, and the electron emitter element = 24 are formed. One end of the metal casing 21 is sealed with the ceramic core 27, the other end of the metal casing 21 is connected to the device to be tested, and the ion collector 26 and the electron emitter element 24 are coaxial with the anode ring and are mounted in the metal casing. The electron emitter element 24 includes a tungsten filament 241 and a reflector 2. Since the high vacuum micro gauge 20 is small in volume, lysine and miscellaneous, it is more widely available. However, the ionization regulation of the Lai type does not cover the mask. This electron induces the desorption of ions, so the further reduction of the lower limit of measurement is reduced. In view of the above, it is necessary to provide a vacuum gauge that overcomes the above disadvantages and further improves the sensitivity. Knives [Disclosed from the Invention] In order to solve the technical problems of the prior art, the object of the present invention is to provide a vacuum gauge of the degree of progress. Ants For the purpose of the present invention, the present invention provides a vacuum gauge, an anode factory shield pole, an ion collector, a reflection-collector. The screen of the cathode is 7C in the morning, and the secret is $ ― 麟 离 离 离 离 应 应 应 应. Nazi leads the pole to the middle to open another ion extraction hole. The reflection is a highly curved structure that encloses the shield very close to one side of the ion extractor. The collector is disposed at the bottom of the reflective pole surface structure and points to the ion hole. The % pole is fixed inside the shield pole. - Compared with the prior art, the separation gauge of the wire field ionization gauge of the present invention has the following advantages: The first 'shield 槪 ion extracting pole constitutes a nearly semi-closed cylindrical structure, and the result of the analogy calculation is 'electron in the area It is easy to vibrate and obtain higher regulatory sensitivity. Second, the g 8 force tamping ion reflector acts to allow more ions to reach the collector, resulting in higher transcripts; From the publication, it is able to trap most of the electron-donating desorption ions, so that the lower limit of measurement can extend the higher vacuum.
【實施方式】 /'X 下面將結合附圖及具體實施例對本發明進行詳細說明。 晴參閱第二® ’本發明第—實施例之真空規管3 — -屏蔽㈣…陽極環33，—離子·痛，—反射極35及—雜極36。 f屏敵極32爲兩端開口之圓筒形結構，其一端與該熱陰極31相對應，另一 端與該離刊出極34相勝該離子仙極34巾叫設—離刊出孔如。 该反射極35爲曲面結構’該曲面圍住屏蔽極32靠近離子引出極&之一側。 該收集極36設置於該反射極35曲面結構底部，並指向離子弓丨出孔341。該 陽極環33固定於屏蔽極32圓筒内部》 該熱陰極31選用通常之熱陰極電子源，其包括一鶴燈絲312及複絲 絲支樓杆314 ’鶴燈絲312外接電壓。鶴燈絲312加電流受熱後發出電 入該屏蔽極32。 —该屏蚊極32圓筒直徑18毫米，長18毫米。該陽極環33通過支擇杆(圖 未不)固定於該屏蔽極32之内部，並通過引線外接電壓。爲了形成對稱之鞍 形電場’該陽極環33最好設置於屏蔽極32正中間。該陽極環33與屏蔽極 3—2保持電絕緣該陽極環33之直徑9毫米，係用比較細之金屬絲彎成，本 貫施例選用直彳㉞2G0微米之細金屬絲製成陽極環33。 該離子引it}極34爲與腿極32她套之目職構，並與紐極32保 持電絕緣。在保證能夠檔住X射躲電子誘_附離子之情況下，且能保證 有足夠多之離子到達收集極36而不影響鞍場中電子之振盈，可根據實際情 況設計離子引出孔341之直徑尺寸。 該反射極35爲半球面結構，其直徑與屏蔽極32直徑相同，爲18毫米； 該半球面結構以離子引出孔341爲球心，使反射極35之半球面圍住靠近離 子引出極34 蔽極32之一側’而且反射極35與離子引出極μ之間保持 電絕緣。 該反射極35半球面底部開設一小開口（未標示），用於設置該收集極 1328243 36隹该收集極36爲—根細金屬絲，本實例巾該金屬絲紐爲測微米。該 收集極36大部分進入反射極35所圍空間，其尖端對準離子引出孔341 ;反 射極35與收集極36之間保持電絕緣。 上述陽極環33、離子引出極34及反射極35藉以屏蔽極涊軸身線中心 對稱。 、爲了旎更好之使電子進入屏蔽極32，該真空規管3〇可進一步包括一設 置於屏蔽極32與熱陰極31之間之電子引37 ’該電子引入極37爲與屏 蔽極32相配套之圓开;結構。於電子引入極π中心開言交一電子引入孔π， 並與屏蔽極32保持電絕緣該電子引入孔371及該離子引出孔341之 相回。 真工規官30之電位設置：屏蔽極32接地Vg ;陽極環泊電位％設^ ιοοον左右；彳緣極36. Ve麟；反射極35設置—個轉位Vp如 收集極36收集離子；熱陰極31也須置於一個正電位元避免電子絲於4 =!6電子引场37及離子引出極34之電位根據實際情況設置，^ 二仔取大錄度。可以轉’其他電位猶雜魏f實紅作情況言] 正，以獲得規管最佳工1作狀態。 本發明之真空規管30工作時：首先係熱陰極31發射電子，電子通過電 Z入孔371進4蔽極32。於該陽極環33接高壓後，於屏蔽極32内部形 f對稱之舞輯。電侦娜電場博衫次縫，撞擊碰分子並使盆 離子流。根據類比計算之結果，電子於圓筒結㈣蔽極32内 振盪’從而獲得較高之靈财。當離子從靠近收集極％之離子引 出孔41出來，在反射極35電位協同作用下，離子被收集極 化爲收集極36之_，此電献小與雜絲正比，從柯指示真Ϊ =閱第四圖，本發明第二實施例之真空規管4()，其包括一冷陰極化 _4 ’—反_5 及—收集極46。 子引端開口之圓筒形結構，其一端與該冷陰極41相對應，另— 該反射極45細面結構，細關住屏蔽㈣靠近離刊出極&之一1 10 1328243 ，收集極46設置於該反射極45曲面結構底部，並指向離子引出孔44卜該 %極環43固定於屏蔽極42圓筒内部。 ϋ施例之真空規管4〇相對於第一實施例之真空規管 代熱陰極31。該冷陰極41包括一基細未標示）、一場 4;6二雜 1基底表面，及一與該場發射陣列418相對應之柵極 : 可糊鳩料，包括各種針尖結構，例如各種 t ’ "°鋼石_等。柵極416可以湖各種孔狀 屬壤，金屬孔或金屬網。該冷陰極41之場發射陣列418解電 子引入孔47卜另’該冷陰極41也可不含柵極，此時電子引入極 孔可改成具有網狀結構之小孔。 爲了能更好之使電子進4蔽極42，該真空規管4()亦可進—步句括一 熱陰極41之間之電子引入極47，該電子引入極47爲與 屏蔽極42槔相配套之_結構。於電子弓丨入極47中心開設一電子引入孔 4Ή ’並與屏蔽極42保持電絕緣。該電子引入孔371及該離子引出孔3 直徑相同。 本發明之真空規管4〇工作時：首先係冷陰極41發射電子，電子通過電 進4蔽極42。於該陽極環43接高壓後，於屏蔽極42内部形 =幡_^場。好_職射魅乡次縫，縣缝分子並使苴 子流。根據類比計算之結果，電子於圓筒結㈣蔽極犯； ^易振盪’從而獲得較高之靈。當離子流從靠近收集極邪之離子引 出，441出來，於反射極45電位協同作用下，離子被收集極妨所收集，轉 2收集極46之電流信號，此電献小與真空度成正比，從而可以指示真 s 解’本發明之真空規管可不加電子引入極’同樣可實财發明之 目的。本發明1蔽極之形狀也不·圓筒形，可採賴他對觀中空立體 7狀’只要能使電子於其中產生振盪即可。另，上述實施例之真空規管各元 件尺寸只爲優選之典型尺寸；本發明之真空規管尺寸並不唯一確定，視各種 具脰情況可作適纽動’峨得規歸佳工作狀態。電刊人狀離子引出 11 1328243 孔之直徑需根據實際情況設計，特別係離子引出孔，需要考慮既不影響鞍場 中電子之振盪’同_證足夠多之離子到達收集極，作合理設計。 ，明之真空規官之結構與普通鞍場規相比較有以下優點：第一，屏蔽 極及離子引出極構成一個接近半封閉之圓筒結構，根據類比計算之結果，電 子於該區域中容易縫，從而獲槪高之規，.卜_ =反射極，其作用係使更多之離子到達收集極，從而獲得更高之規管靈敏 二t f子⑽極能觸住絕A部分x射，軌電子料麵之離子， -付二之測置下限能擴展更高真空度；第四，如採用冷陰極電子源爲陰極 早兀，將更加降低規管之放氣及功耗。 本Μ之真空規管結構簡單，_電極少，因而不會有太多讀氣，可 ::於極:真工領域。根據其他分離規之資料，分離規靈敏度係普通規之_ ιοοοτογγ-,^， 估片了到麵Tbrr，練可以細們啦甚至更高之真空度。 以上發明確已符合發明專利之要件，遂依法提出專利申請。惟， 圍。舉之較佳實施例，自不能以此限制本案之申請專利範 庫麻…、,彳技藝之人士援依本發明域神所作之等效修賊變化，皆 應涵盍於以下申請專利細内。 白 【圖式簡單說明】 ^一圖係先前分離規管以部剖面示意圖。 第二圖係先前鞍場電離規管之示意圖。 第三圖係本發明第一實施例之真空規管結構示意圖。 第四圖係本發明第二實施例之真空規管結構示意圖。 【主要元件符號說明】 真空規管 屏蔽極 ^子引出極 收集極 冷陰極 燈絲支樓杆 30,40 32,42 34,44 36,46 41 314 31 33,43 35,45 37,47 312 341,441 熱陰極 陽極環 反射極 電子引入極 鎢燈絲 離子引出孔 12 4161328243 電子引入孔 場發射陣列 371,471 柵極 418 13[Embodiment] / 'X The present invention will be described in detail below with reference to the accompanying drawings and specific embodiments. For clarity, refer to the second ® 'vacuum gauge 3 of the first embodiment of the present invention - shielded (four) ... anode ring 33, - ion pain, - reflector 35 and - hybrid 36. The f-screen enemy pole 32 is a cylindrical structure with open ends, one end of which corresponds to the hot cathode 31, and the other end of which is opposite to the published pole 34. . The reflecting electrode 35 is a curved structure. The curved surface encloses the shield electrode 32 on one side of the ion extracting electrode & The collector 36 is disposed at the bottom of the curved structure of the reflector 35 and is directed to the ion bow cutout 341. The anode ring 33 is fixed inside the cylinder of the shield pole 32. The hot cathode 31 is a common hot cathode electron source, which includes a crane filament 312 and a multifilament wire rod 314 ‘the crane filament 312 external voltage. The crane filament 312 is heated and then energized into the shield pole 32. - The mosquito pole 32 has a diameter of 18 mm and a length of 18 mm. The anode ring 33 is fixed to the inside of the shield electrode 32 through a support rod (not shown), and an external voltage is applied through the lead. In order to form a symmetrical saddle electric field, the anode ring 33 is preferably disposed in the middle of the shield electrode 32. The anode ring 33 and the shield electrode 3-2 are electrically insulated. The anode ring 33 has a diameter of 9 mm and is bent by a relatively thin metal wire. In the present embodiment, a thin wire of 342 G0 micron is used to form the anode ring 33. . The ion-inducing pole 34 is the target structure of the leg pole 32 and is electrically insulated from the neopolar pole 32. In the case of ensuring that X can be trapped in the electron trapping _ attached ions, and can ensure that there are enough ions to reach the collector 36 without affecting the vibration of the electrons in the saddle field, the ion extraction hole 341 can be designed according to the actual situation. Diameter size. The reflecting pole 35 has a hemispherical structure and has the same diameter as the shielding pole 32 of 18 mm. The hemispherical structure has the ion extracting hole 341 as a spherical center, and the hemispherical surface of the reflecting pole 35 is enclosed close to the ion extracting pole 34. One side of the pole 32 is 'and the electrode 35 is electrically insulated from the ion extracting pole μ. A small opening (not shown) is formed in the bottom of the hemispherical surface of the reflecting pole 35 for setting the collecting pole 1328243 36. The collecting pole 36 is a thin metal wire, and the metal wire of the example towel is micrometer. The collector 36 mostly enters the space enclosed by the reflector 35, the tip of which is aligned with the ion extraction aperture 341; and the reflector 35 is electrically insulated from the collector 36. The anode ring 33, the ion extracting electrode 34 and the reflecting electrode 35 are shielded from each other by the center line of the shield shaft. In order to better allow electrons to enter the shield electrode 32, the vacuum gauge 3A may further include an electron lead 37 disposed between the shield electrode 32 and the hot cathode 31. The electron lead-in electrode 37 is opposite to the shield electrode 32. The matching round opening; structure. An electron introduction hole π is formed in the center of the electron introduction pole π, and is electrically insulated from the shield electrode 32 to return to the electron introduction hole 371 and the ion extraction hole 341. The setting of the power gauge 30 is: the shield pole 32 grounding Vg; the anode ring potential is set to ^ ιοοον; the edge of the pole 36. Ve Lin; the reflector 35 set - a transposition Vp such as the collector 36 collects ions; The cathode 31 must also be placed in a positive potential element to avoid the potential of the electron wire at the 4 =! 6 electron lead field 37 and the ion extracting electrode 34 according to the actual situation. It can be turned to 'other potentials are still mixed Wei f real red words" positive, to obtain the best state of regulation. When the vacuum gauge tube 30 of the present invention is in operation, first, the hot cathode 31 emits electrons, and electrons pass through the electric Z-in hole 371 into the 4-shield 32. After the anode ring 33 is connected to the high voltage, a f-symmetric dance is formed inside the shield pole 32. The electric Detective Electric Field Bundle sews, hits the molecules and causes the ions to flow. As a result of the analogy calculation, the electrons oscillate within the cylindrical junction (four) of the trap 32 to obtain a higher spirit. When the ions come out from the ion extraction holes 41 close to the collector, the ions are collected and polarized into the collector 36 under the synergistic effect of the reflector 35. This electric charge is proportional to the impurity, and the indication is from the Ϊ = Referring to the fourth figure, a vacuum gauge 4() according to a second embodiment of the present invention includes a cold cathode _4'-counter_5 and a collector 46. a cylindrical structure having a sub-terminal opening, one end of which corresponds to the cold cathode 41, and the other of the reflecting poles 45 has a fine-faced structure, which closes the shield (4) close to the publication pole & one of 10 1 1328243, the collector 46 It is disposed at the bottom of the curved structure of the reflector pole 45 and is directed to the ion extraction hole 44. The % pole ring 43 is fixed inside the cylinder of the shield pole 42. The vacuum gauge 4 of the embodiment is substituted for the hot cathode 31 with respect to the vacuum gauge of the first embodiment. The cold cathode 41 includes a substrate (not shown), a field 4; 6 diison 1 substrate surface, and a gate corresponding to the field emission array 418: pasteable material, including various tip structures, such as various t' "°Steel _ and so on. The gate 416 can be a variety of pores in the lake, a metal hole or a metal mesh. The field emission array 418 of the cold cathode 41 is decoupled from the electron introduction hole 47. The cold cathode 41 may also be free of a gate electrode, and the electron introduction hole may be changed to a small hole having a mesh structure. In order to better enable the electrons to enter the 4 pole 42, the vacuum gauge 4() can also include an electron introduction pole 47 between the hot cathodes 41, and the electron introduction pole 47 is connected to the shield pole 42. Matching _ structure. An electron introduction hole 4?' is opened in the center of the electron beam intrusion pole 47 and is electrically insulated from the shield electrode 42. The electron introduction hole 371 and the ion extraction hole 3 have the same diameter. When the vacuum gauge 4 of the present invention is operated, first, the cold cathode 41 emits electrons, and the electrons pass through the electric shield 42. After the anode ring 43 is connected to the high voltage, the inside of the shield pole 42 is shaped like a field. Good _ actor enchantment secondary sewing, the county cracks the molecules and makes the scorpion flow. According to the results of the analogy calculation, the electrons are extremely guilty in the cylinder knot (four); When the ion current is drawn from the ions near the collector, 441 comes out, and under the synergy of the potential of the reflector 45, the ions are collected and collected, and the current signal of the collector 46 is converted. The electricity is proportional to the degree of vacuum. Thus, it can be instructed that the true vacuum solution of the vacuum gauge of the present invention can be added without the introduction of an electron. The shape of the first shield of the present invention is also not cylindrical, and it is preferable to make the electrons oscillate therein. In addition, the dimensions of the vacuum gauges of the above embodiments are only preferred typical dimensions; the dimensions of the vacuum gauges of the present invention are not uniquely determined, and the various conditions can be adjusted according to various conditions. Electron publication human ion extraction 11 1328243 The diameter of the hole should be designed according to the actual situation, especially the ion extraction hole, need to consider the oscillation of the electron in the saddle field is not affected. The same ion is enough to reach the collector for reasonable design. The structure of the vacuum gauge official has the following advantages compared with the conventional saddle gauge: First, the shield pole and the ion extractor form a nearly semi-closed cylindrical structure. According to the analogy calculation, the electron is easy to be sewn in the region. In order to obtain the high standard, the _ _ = reflector, its role is to make more ions reach the collector, so as to obtain a higher regulatory sensitivity two tf (10) can touch the A part of the x-ray, rail The ion of the electronic material surface, - the lower limit of the measurement of the second can expand the higher vacuum; fourth, if the cold cathode electron source is used as the cathode early, the venting and power consumption of the regulation will be further reduced. The vacuum gauge structure of this 简单 is simple, _ there are few electrodes, so there will not be too much reading, but it can be :: Yuji: real field. According to the data of other separation rules, the sensitivity of the separation gauge is _ ιοοοτογγ-, ^, which is estimated to be the Tbrr, and the vacuum can be improved even higher. The above inventions have indeed met the requirements of the invention patents and have filed patent applications in accordance with the law. Only, Wai. For the preferred embodiment, it is not possible to limit the patent application of the case in this case..., and the person skilled in the art to assist in the change of the equivalent thief made by the domain god of the present invention should be included in the following patent application details. . White [Simple description of the diagram] ^ One diagram is a schematic diagram of the section of the previous separation regulation. The second figure is a schematic diagram of the previous saddle field ionization gauge. The third figure is a schematic view of the vacuum gauge structure of the first embodiment of the present invention. The fourth figure is a schematic view of the vacuum gauge tube structure of the second embodiment of the present invention. [Description of main component symbols] Vacuum gauge shield pole collector pole collector cold cathode filament branch rod 30,40 32,42 34,44 36,46 41 314 31 33,43 35,45 37,47 312 341,441 Heat Cathode anode ring reflector electron introduction pole tungsten filament ion extraction hole 12 4161328243 electron introduction hole field emission array 371, 471 gate 418 13