TWI319088B - Defect inspecting method and apparatus - Google Patents

Defect inspecting method and apparatus

Info

Publication number
TWI319088B
TWI319088B TW95147930A TW95147930A TWI319088B TW I319088 B TWI319088 B TW I319088B TW 95147930 A TW95147930 A TW 95147930A TW 95147930 A TW95147930 A TW 95147930A TW I319088 B TWI319088 B TW I319088B
Authority
TW
Taiwan
Prior art keywords
inspecting method
defect inspecting
defect
inspecting
Prior art date
Application number
TW95147930A
Other languages
Chinese (zh)
Other versions
TW200730817A (en
Inventor
Masami Sano
Katsumi Tanaka
Takao Narumi
Original Assignee
Nihon Micronics Kk
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from JP2005378571A external-priority patent/JP2007071861A/en
Application filed by Nihon Micronics Kk filed Critical Nihon Micronics Kk
Publication of TW200730817A publication Critical patent/TW200730817A/en
Application granted granted Critical
Publication of TWI319088B publication Critical patent/TWI319088B/en

Links

TW95147930A 2005-12-28 2006-12-20 Defect inspecting method and apparatus TWI319088B (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2005378571A JP2007071861A (en) 2005-08-12 2005-12-28 Defect detection method and defect detection apparatus

Publications (2)

Publication Number Publication Date
TW200730817A TW200730817A (en) 2007-08-16
TWI319088B true TWI319088B (en) 2010-01-01

Family

ID=45073585

Family Applications (1)

Application Number Title Priority Date Filing Date
TW95147930A TWI319088B (en) 2005-12-28 2006-12-20 Defect inspecting method and apparatus

Country Status (1)

Country Link
TW (1) TWI319088B (en)

Also Published As

Publication number Publication date
TW200730817A (en) 2007-08-16

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Legal Events

Date Code Title Description
MM4A Annulment or lapse of patent due to non-payment of fees