TWI316045B - Membransersor - Google Patents

Membransersor

Info

Publication number
TWI316045B
TWI316045B TW93106566A TW93106566A TWI316045B TW I316045 B TWI316045 B TW I316045B TW 93106566 A TW93106566 A TW 93106566A TW 93106566 A TW93106566 A TW 93106566A TW I316045 B TWI316045 B TW I316045B
Authority
TW
Taiwan
Prior art keywords
membransersor
Prior art date
Application number
TW93106566A
Other languages
Chinese (zh)
Other versions
TW200427622A (en
Inventor
Roland Mueller-Friedler
Hans Hecht
Jeorg Muchow
Matthias Fuertsch
Andreas Stratmann
Heribert Weber
Winfried Bernhard
Detlef Gruen
Andreas Duell
Rainer Schink
Ulrich Wagner
Christoph Schelling
Original Assignee
Bosch Gmbh Robert
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Bosch Gmbh Robert filed Critical Bosch Gmbh Robert
Publication of TW200427622A publication Critical patent/TW200427622A/en
Application granted granted Critical
Publication of TWI316045B publication Critical patent/TWI316045B/en

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L9/00—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
    • G01L9/0041—Transmitting or indicating the displacement of flexible diaphragms
    • G01L9/0042—Constructional details associated with semiconductive diaphragm sensors, e.g. etching, or constructional details of non-semiconductive diaphragms
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01F—MEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUID LEVEL; METERING BY VOLUME
    • G01F1/00—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow
    • G01F1/68—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow by using thermal effects
    • G01F1/684—Structural arrangements; Mounting of elements, e.g. in relation to fluid flow
    • G01F1/6845—Micromachined devices
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N7/00—Analysing materials by measuring the pressure or volume of a gas or vapour
    • G01N7/10—Analysing materials by measuring the pressure or volume of a gas or vapour by allowing diffusion of components through a porous wall and measuring a pressure or volume difference

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Fluid Mechanics (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Measuring Fluid Pressure (AREA)
  • Pressure Sensors (AREA)
TW93106566A 2003-03-11 2004-03-11 Membransersor TWI316045B (en)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
DE10310859 2003-03-11
DE10326786 2003-06-13
DE10357869A DE10357869A1 (en) 2003-03-11 2003-12-11 diaphragm sensor

Publications (2)

Publication Number Publication Date
TW200427622A TW200427622A (en) 2004-12-16
TWI316045B true TWI316045B (en) 2009-10-21

Family

ID=33491629

Family Applications (1)

Application Number Title Priority Date Filing Date
TW93106566A TWI316045B (en) 2003-03-11 2004-03-11 Membransersor

Country Status (2)

Country Link
DE (1) DE10357869A1 (en)
TW (1) TWI316045B (en)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102014219541A1 (en) * 2014-09-26 2016-03-31 Continental Automotive Gmbh Air mass meter with a sensor element

Also Published As

Publication number Publication date
DE10357869A1 (en) 2004-12-30
TW200427622A (en) 2004-12-16

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TWI316045B (en) Membransersor

Legal Events

Date Code Title Description
MM4A Annulment or lapse of patent due to non-payment of fees