1314874 九、發明說明： 【發明所屬之技術領域】 本發明係有關一種化學過濾網結構，尤指一種藉由側框與正面框活動 結合之組合設計’而令該側框可自正面框上活動拆離，方便拆卸該側框以 抽換該吸附單元，提供一重複更換使用之化學過濾網結構者，適用於電子 製造業的無塵室如IC、TFT、半導體製造業的無塵室或類似場地者。 【先前技術】 隨著半導體技術不斷的進步，IC製程線徑不斷的縮小，最新進的半導 體技術已進入45nm ’未來將更進一步地跨入22及32nm製程技術，也由於 ic線徑不斷的縮小’因此外部空氣或無塵室内中含微污染（Airb〇rne1314874 IX. Description of the invention: [Technical field of the invention] The present invention relates to a chemical filter network structure, in particular to a combination design of a combination of a side frame and a front frame, and the side frame can be moved from the front frame. Detachment, easy to remove the side frame to replace the adsorption unit, provide a chemical filter structure for repeated replacement, suitable for clean rooms in the electronics manufacturing industry such as IC, TFT, semiconductor manufacturing clean room or similar Venue. [Prior Art] With the continuous advancement of semiconductor technology, the IC process wire diameter has been continuously reduced, and the latest semiconductor technology has entered 45nm. 'In the future, it will further step into the 22 and 32nm process technology, and the ic wire diameter will continue to shrink. 'So the external air or clean room contains micro-contamination (Airb〇rne
Molecular Contamination，AMC)物質，例如含硫物質：SOx、H2S、 DMSO(Dimethyl Sulfoxide > (CH3)2S0) > DMS(Dimethyl Sulfide - (CH3)2S) 專’酸性物質：NOX ’ 驗性物質：腿3、MEA(Monoethanol Amine , NH2C2lU)i〇 4 ’含低沸點之揮發性有機化合物（Volatile Organic Compounds，、 IPA(Isopropyl Alcohol ’ GfihOH)、丙酮等，以及含高沸點之揮發性有機化 合物（Volatile Organic Compounds，VOCs)等，對於製程良率的影塑，曰 益擴大。為了提昇製程良率，半導體廠通常需於外氣空調箱及氣流循環區 加裝化學過渡網。 目前市場上使用化學過濾網型式，其結構大多是於一框架内設有化學 濾網，該化學濾網的型態可設為多孔性活性碳濾網、薄層多折式濾網、蜂 巢狀濾網…等型式，再將該框架置於氣體過濾之風口以進行氣體過濾； 然，習用的化學濾網往往無法兼顧去除成份、去除效率、壓力損失、使用 5 1314874 壽命及製造成本等因素，且使用飽和後的化學義係與框架設為—體，故 使用飽和後增w，μ蝴_，而朗―種垃圾污染， 故實際使用上仍不符使用者之所需。 【發明内容】 、本發明之主要目的，在提供—種化學顧網結構，藉由她與正面框 活動結合之組合設計’而令該酿可自正面框上活動拆離，枝拆卸該側 框以抽換該_單元，以峨毅咖_義結構者，除可 降低製造成本外，尚具環保捕，以增加本㈣之實祕、經濟性與環保 性者。 本發明之次-目的，在提供—種化學過_結構，藉由該吸附單元可 替換成多種型式’而使本發明之化學過濾網可翻於各種場合及不同環境 之南求」使去除效率更佳且降低了過渡的壓力損失，並提高了化學過遽網 的使用壽命，增加本發明之實祕與制性者。 ⑽為達上述目的，本發明係包括一正面框、至少一側框以及至少—吸附 單元，射’該正面框設有至少一開口，該側框係與該正面框活動結合， 名及附早就—外侧係各設有_，且該二據_係設有吸咖，而該吸 附單元係結合於該側框中；藉此，當該吸附單元吸附飽滿時，藉由活動拆 離該側框以抽換該吸附單元，以供重複更換使用者。 本發明之其他特點及具體實施例可於以下配合_之詳減明中，進 一步瞭解。 【實施方式】 1314874 請參第1〜5圖’本發明係包括· -正面框10，該正面框1()上係設有至少—開σΐ丄，該開口丄丄 係覆有綱3 0 2，該正面框丄〇之背側係設有結合部工〇工（請參第3圖 ，本實施例設為一凹槽）。 ’ 至少一側框2 0 ’該側框2 0係可設為V型或U型以擴大吸附的面積 ，該侧框2 0係設有第-結合部2 〇1，本實施例該第一結合部2 〇工係 又為凸塊4偏12 0之凸塊係結合於正面框丨◦之凹槽中，以使該側 框20與正面框1〇相互活動結合，而該側框2⑽另設有第二結合部2 ◦ 2 ’本實施财該第二結合部2 Q 2係設為—凸肋，該凸肋並設有氣密 條（圖未示）以防氣體外茂’而側框2 〇外側係可進—步設有保護網4 〇。 至少-吸附早7L 3 Q，該吸附單元3 Q之二外側係各設有濾網3 〇 2 ’减網3 0 2可設為不織布濾網、細網或其他形式之翻，且該些遽 網3 0 2間設有吸附劑3 〇丄，該吸附單元3 〇之二翻3 〇 2間亦可進 -步設有-支雜構3 〇 3 (本實施設為_網格狀結構，實際實施時亦 可以蜂巢狀或類似之結構代替），而該吸附劑3 0 1係設於該支撐結構3 〇 中’且魏附單元3 q係結合於該側框2 Q中，其中，該吸附單元3 〇亦 可先結合於-吸附劑邊框3 i後再與側框2 Q相互活動結合，而該吸附劑 邊框31相對於該正面框i 〇之結合部丄〇丄而設有第一結合部3工丄 (本實知例係設為一凸肋），以及相對於該側框2 〇之第二結合部2 〇 2而 設有第二結合部3 1 2(本實施例係設為一凹槽）。 月 > 弟1〜5圖，本創作之特點係在於藉由一正面框1 Q、至少一側 1314874 £ Ο、及至y吸附單凡3 〇之組合設計，利用該側框2 〇之第一社人 部2 0!、吸附劑邊框3丄之第—結合部3 χ丄與該正面框^ 〇之結= 1〇1相互活動結合’該側框2 Q亦與吸附劑邊框31活動結合，且吸附 框3 1早元3 (3吸_和後，藉喊正面框^活動拆離 該側框2 〇、吸附劑邊框31以抽換該吸附單元3 0，進而可重複更換使 用就予過翻輯彳了氣體之過渡’而錢置換整組化學過翻，使化學 過慮網的製作成本大幅降低，減少垃圾污染以達環保功能；另，該吸附單 几3 0亦可依需求與用途來選擇置換，故可使微污染物質的去除效率更 並可降低過;麵壓力損失’因此提高了化學過濾_制壽命，增加 本創作之實用性與便利性。 月>第1〜9圖’第5圖中該吸附單元3 〇係包括吸附劑3 q1、_ 側各有I網3 〇 2及-支撐結構3 〇 3，該吸附劑3 〇工係設於該支禮 、’、°構3 〇 3中，二側各設有—翻3 0 2，再將該支撐結構3 〇 3結合於 ψ吸賴邊框3 1上，藉由吸附劑邊框3 1上之凹槽與側框2 Q之凸肋相互 '結合，而將吸附單元3 0活動結合於側框2〇上，而第6、7圖係為該吸 附單兀3 0與難2 Q結合之組合剖示圖，其中該刪2 〇之二側係各'二 合—組吸附單元3 ◦，使用時，外氣通過正面框10之_3 0 2，從： 進入側框2 Q巾d往—旁之i網3 〇 2行進並通過吸附單元3 • 〇胃外氣通過该吸附單元30時微污染物質會被該吸附劑3〇丄吸收， •接著再通過吸附單元3 Q外側之I網3 G 2，最後經由保護網4 0排出以 完成過濾。而當吸附單元3 Q吸附飽和後，只需將側框2 〇自正面樞^ 1314874 上取下，再將吸附劑邊框31與側框2 〇活動拆離即可進行吸附單元3 〇 之抽換，而其餘的化學過濾網結構如正面框i 0、側框2 〇及吸附劑邊框 31，甚至保護網4 0都可再使用，不但降低製造成本，尚具環保功能， 且該吸附單元3⑽製減型，關降低壓力損失，而第7圖係為該吸附 劑邊框31上另設有啟閉口 313 ’以供更換該吸附單元3 Q時將吸附劑 3 Ο 1直接倒人吸附劑邊框3 χ中。而該吸附單元3◦之二濾網3 〇 2間 係可進-步設有複數個支撐結構3 Q 3，該些讀結構3 〇 3係區隔為數 層’且該些支撐結構3 Q 3間係進-步設有濾網3 Q 2，藉歧置不同之 吸附劑者’請參8、9圖’係為本創作之吸附單元3 Q (吸_設於該支樓 結構中）與側框2 0結合之組合剖示圖，該吸附單元3 〇係設為支撑結構3 〇 3中設有吸附劑3 〇丄’而本實施例第9圖中該支撐結構3 〇 3係區隔 為第-支撐結構3 Q 3 a與第二支撑結構3 q 3 b二層，且該第—支撐結 冓3 〇 3 a與第—支樓結構3 〇 3 b間係進-步設有—渡網3 q 2以作為 分隔，藉此可將不同吸附劑3 〇丨區隔安裝於各層支樓結構中，例如於第 -支撐結構3 0 3 a中置人高沸點之揮發性有機化合物吸_，而於第二 支撐結構3 Q 3 b中置人輯點之揮發财機化合物韻劑，故外氣進入 弟—支撐結構3 G 3 a中射先去除“點之揮發性有機化合物，再進入 第二支撐結構3 0 3 b中去除低沸點之揮發性有機化合物，進而達成多種 去除功效，使去除賴污陶的效率更佳，使本發嶋實雌與便 利性。 惟以上所述者’僅為本發明之較佳實施例，當不能用以限定本發明可 1314874 實施之範圍，凡習於本業之人士所明顯可作變化與修飾，皆應視為不悖離 本發明之實質内容。 綜上所述，本發明確可達到創作之預期目的，提供一種化學過濾網結 構，具有實用價值無疑，爰依法提出發明專利申請。 1314874 f圖式簡單說明j 第1圖係為本發明實施例之立體外觀圖。 第2圖係為本發明實施例之結合剖示圖 第3圖係為本發明實施例之使用示意圖。 第4圖係為本發明實施例之部分立體分觸。 第5圖係為本發明實施例吸附單元與吸附劑邊框之組合示意圖。 第6圖係為本發明吸附單元與側框之組合剖示圖之一。 第7圖係為本發明吸附單元與側框之組合剖示圖之二。 第8圖係為本發明吸附單元(吸附劑設於該支撐結構中）與側框之組合 剖示圖。 第9圖係為本發明吸附單元(吸附劑設於二層支揮結構中）與側框之組 合剖示圖。 【主要元件符號說明】 10、正面框 1 01、結合部 1 1、開口 2 0、側框 2 01、第一結合部 2 0 2 '第二結合部 3 0、吸附單元 3 01、吸附劑 1314874 3 Ο 2、濾網 3 Ο 3、支撐結構 3 Ο 3 a、第一支撐結構 3 0 3 b、第二支撐結構 31、吸附劑邊框 3 1 1、第一結合部 312、第二結合部 3 1 3、啟閉口 4 0、保護網 12Molecular Contamination (AMC) substances, such as sulfur-containing substances: SOx, H2S, DMSO (Dimethyl Sulfoxide > (CH3)2S0) > DMS (Dimethyl Sulfide - (CH3)2S) Special 'Acid: NOX ' Test substance: Leg 3, MEA (Monoethanol Amine, NH2C2lU) i〇4 'Volatile Organic Compounds, IPA (Isopropyl Alcohol ' GfihOH), acetone, etc., and volatile organic compounds with high boiling point (Volatile Organic Compounds (VOCs), etc., for the improvement of process yield, the benefits are expanded. In order to improve the process yield, semiconductor factories usually need to install chemical transition networks in the external air-conditioning box and air circulation area. Currently, chemical filtration is used on the market. The mesh type is mostly provided with a chemical filter screen in a frame, and the type of the chemical filter screen can be set as a porous activated carbon filter, a thin multi-fold filter, a honeycomb filter, etc. The frame is placed at the tuyere of the gas filtration for gas filtration; however, the conventional chemical filter often fails to balance the removal components, removal efficiency, pressure loss, and use 5 1314874 Life and manufacturing costs and other factors, and the use of saturated chemical system and frame set to body, so use saturated to increase w, μ butterfly _, and lang - kind of garbage pollution, so the actual use still does not match the user's place [Invention] The main purpose of the present invention is to provide a chemical network structure, which can be detached from the front frame by the combination design of her combined with the front frame activity. The side frame is to replace the _ unit, in order to reduce the manufacturing cost, in addition to reducing the manufacturing cost, it is also environmentally-friendly to increase the subtle, economic and environmental protection of this (four). The purpose is to provide a chemical structure, which can be replaced with various types by the adsorption unit, so that the chemical filter of the present invention can be turned over in various occasions and in different environments, so that the removal efficiency is better and lower. The pressure loss of the transition increases the service life of the chemical over-twist net and increases the real and technical nature of the present invention. (10) For the above purposes, the present invention includes a front frame, at least one side frame, and at least an adsorption unit. , shooting' The front frame is provided with at least one opening, and the side frame is combined with the front frame, and the name and the early side are respectively provided with _, and the two items are provided with a absorbing coffee, and the adsorption unit is coupled to The side frame; thereby, when the adsorption unit is full, the side frame is detached by the activity to replace the adsorption unit for repeated replacement of the user. Other features and embodiments of the present invention can be as follows Further understanding is made in conjunction with the detailed explanation. [Embodiment] 1314874 Please refer to Figures 1 to 5 'The present invention includes - a front frame 10, and the front frame 1 () is provided with at least - σ ΐ丄, The opening is covered with a frame 306, and the back side of the front frame is provided with a joint portion (please refer to FIG. 3, and this embodiment is set as a groove). 'At least one side frame 20' can be set to a V-shape or a U-shape to enlarge the area of adsorption, and the side frame 20 is provided with a first joint portion 2 〇1, which is the first in this embodiment. The joint portion of the joint portion 2 and the flange portion of the projection block 4 is coupled to the groove of the front frame , so that the side frame 20 and the front frame 1 〇 are mutually movably coupled, and the side frame 2 (10) is additionally The second joint portion 2 ◦ 2 ′ is provided. The second joint portion 2 Q 2 is configured as a rib, and the rib is provided with an airtight strip (not shown) to prevent the gas from being ventilated. Box 2 〇 The outer side can be advanced - there is a protection net 4 〇. At least - adsorption 7L 3 Q early, the outer side of the adsorption unit 3 Q is provided with a filter 3 〇 2 'reduction net 3 0 2 can be set as a non-woven filter, fine mesh or other forms of turning, and the 遽There are 3 吸附 adsorbent 3 〇丄 in the net, and the adsorption unit 3 〇 2 turns 3 〇 2 can also enter - step set - branch structure 3 〇 3 (this embodiment is set to _ grid structure, In actual practice, it may be replaced by a honeycomb or similar structure, and the adsorbent 310 is disposed in the support structure 3 ' and the Wei attachment unit 3 q is coupled to the side frame 2 Q, wherein The adsorption unit 3 can also be coupled to the sorbent frame 3 i and then combined with the side frame 2 Q, and the sorbent frame 31 is firstly disposed with respect to the joint portion 该 of the front frame 〇 a joint portion 3 (which is a rib), and a second joint portion 3 1 2 opposite to the second joint portion 2 〇 2 of the side frame 2 (the embodiment is provided For a groove). Month > Brother 1~5, this creation is characterized by a combination of a front frame 1 Q, at least one side 1314874 £ Ο, and a y adsorption single 3 〇, using the side frame 2 〇 first The body part 2 0!, the sorbent frame 3 丄 - the joint portion 3 χ丄 and the front frame ^ 〇 knot = 1 〇 1 interacting with each other 'the side frame 2 Q is also actively combined with the adsorbent frame 31, And the adsorption frame 3 1 early 3 (3 suction_ and after, by the front frame ^ activity to detach the side frame 2 〇, the adsorbent frame 31 to replace the adsorption unit 30, and then can be used repeatedly The reversal of the gas transition 'and the replacement of the entire group of chemical overturns, so that the production cost of the chemical filter network is greatly reduced, reducing the pollution of the garbage to achieve environmental protection functions; in addition, the adsorption of a few 30 can also be based on demand and use By selecting the replacement, the removal efficiency of the micro-polluting material can be further reduced and the surface pressure loss is increased, thus increasing the chemical filtration time and increasing the practicality and convenience of the creation. Month > 1~9 In the fifth figure, the adsorption unit 3 includes an adsorbent 3 q1 , a _ side having an I mesh 3 〇 2 and a support branch 3 〇3, the adsorbent 3 is completed in the branch, ', ° structure 3 〇 3, each side is set - turn 3 0 2, and then the support structure 3 〇 3 combined with ψ 赖On the frame 3 1 , the adsorption unit 30 is movably coupled to the side frame 2 藉 by the groove on the sorbent frame 3 1 and the rib of the side frame 2 Q are combined with each other, and the sixth and seventh frames are attached. A combination cross-sectional view of the combination of the adsorption unit 030 and the refractory 2Q, wherein the two sides of the 22 系 are each of the 'two-group adsorption units 3 ◦, and when used, the external air passes through the front frame 10 _3 0 2, From: Enter the side frame 2 Q towel d to the next i net 3 〇 2 travel and pass the adsorption unit 3 • When the stomach gas passes through the adsorption unit 30, the micro-contaminant will be absorbed by the adsorbent 3〇丄Then, it passes through the I mesh 3 G 2 outside the adsorption unit 3 Q, and finally exits through the protection net 40 to complete the filtration. When the adsorption unit 3 Q is saturated, it is only necessary to slant the side frame 2 from the front side ^ 1314874 The upper part is removed, and then the adsorbent frame 31 and the side frame 2 are detached, and the adsorption unit 3 is exchanged, and the remaining chemical filter structures are as the front frame i 0 and the side frame 2 And the adsorbent frame 31, even the protection net 40 can be reused, not only reduces the manufacturing cost, but also has an environmental protection function, and the adsorption unit 3 (10) is reduced in size, which reduces the pressure loss, and the seventh figure is the adsorbent frame. 31 is further provided with a opening and closing port 313' for replacing the adsorption unit 3 Q, and the adsorbent 3 Ο 1 is directly poured into the adsorbent frame 3 。. The adsorption unit 3 ◦ 2 of the filter 3 〇 2 Further, a plurality of support structures 3 Q 3 are provided, and the read structures 3 〇 3 are separated into a plurality of layers 'and the support structures 3 Q 3 are connected to each other with a filter 3 Q 2 For the different adsorbents, please refer to the figure 8 and 9 for the combination of the adsorption unit 3 Q (suction_located in the structure of the branch) combined with the side frame 20, and the adsorption unit 3 The lanthanide system is set as the support structure 3 〇3 is provided with the adsorbent 3 〇丄', and in the ninth embodiment of the present embodiment, the support structure 3 〇3 is divided into the first support structure 3 Q 3 a and the second support structure 3 q 3 b two layers, and the first support structure 3 〇 3 a and the first branch structure 3 〇 3 b are arranged in a step-by-pass network 3 q 2 as a separation, thereby Different adsorbent 3 〇丨 partitions are installed in each layer of the building structure, for example, in the first support structure 3 0 3 a, the high-boiling volatile organic compound is absorbed, and in the second support structure 3 Q 3 b Set the person's volatile fuel compound compound rhyme, so the external gas enters the brother-support structure 3 G 3 a shot first removes the "point volatile organic compound, then enters the second support structure 3 0 3 b to remove the low boiling point The volatile organic compounds, in turn, achieve a variety of removal efficiencies, so that the efficiency of removing the sloping pottery is better, and the hair is sturdy and convenient. However, the above description is only a preferred embodiment of the present invention, and when it is not possible to limit the scope of the present invention to 1314874, it is obvious that those skilled in the art can make changes and modifications. The essence of the invention. In summary, the present invention can achieve the intended purpose of creation, provide a chemical filter network structure, has practical value, and 提出 file an invention patent application according to law. 1314874 f BRIEF DESCRIPTION OF THE DRAWINGS FIG. 1 is a perspective view of an embodiment of the present invention. 2 is a schematic cross-sectional view showing an embodiment of the present invention. FIG. 3 is a schematic view showing the use of an embodiment of the present invention. Figure 4 is a partial perspective touch of an embodiment of the present invention. Figure 5 is a schematic view showing the combination of the adsorption unit and the adsorbent frame in the embodiment of the present invention. Figure 6 is a cross-sectional view showing the combination of the adsorption unit and the side frame of the present invention. Figure 7 is a sectional view showing the combination of the adsorption unit and the side frame of the present invention. Figure 8 is a cross-sectional view showing the combination of the adsorption unit (the adsorbent is disposed in the support structure) and the side frame of the present invention. Fig. 9 is a sectional view showing the combination of the adsorption unit (the adsorbent is disposed in the two-layered support structure) and the side frame of the present invention. [Description of main component symbols] 10. Front frame 1 01, joint portion 1 1 , opening 20, side frame 2 01, first joint portion 2 0 2 'second joint portion 30, adsorption unit 3 01, adsorbent 1314874 3 Ο 2, filter 3 Ο 3, support structure 3 Ο 3 a, first support structure 3 0 3 b, second support structure 31, adsorbent frame 3 1 1 , first joint portion 312, second joint portion 3 1 3, opening and closing port 4 0, protection network 12