1314162 / the second fluid via an electric field generated by electrifying the conduct up-plate and electrifying the first electrodes by turns. The flow area drives the fluid sample via an electric field generated by the second electrode. 七、指定代表圖： (一） 本案指定代表圖為：第（六）圖。 (二） 本代表圖之元件符號簡單說明： 32 :檢測模組； 321 :分析單元； 322 :發光元件； 323 :檢測光源； 50 :微流式檢測裝置； 51 :混合區域； 52 :流動區域； 53 :第一電極； 54 :第一流體； 55 :第二流體；以及 56 :第二電極。 八、 本案若有化學式時，請揭示最能顯示發明特徵的化學式： 九、 發明說明： 【發明所屬之技術領域】 本發明係揭露一種微流式檢測裝置及其製造方法，特 別是關於藉由電場驅動液態待測物，達成對液態待測物中 之檢體的檢測之目的。 1314162 【先前技術】 近年來，由於祕機電系統（Micro £iectro Mechanical Systems，MEMS)技術的進展，使得許多原本龐大之元件得 以微小化，而在眾多微機電研究領域中，將微流體元件應 用於生醫檢測尤其受到重視。其藉由微機電製程技術所^ 產之微流體生醫檢測晶片，不但具有高檢測效能、低樣品 消耗量、低消耗能源、體積小以及微機電批量製程所帶來 的低製作成本’及可製作低成本的可拋棄式晶片，以減少 交互污染等好處。此外’其在整合微流體、即時反應以及 同步分析之微全程分析系統（Mi⑽⑽丨1314162 / the second fluid via an electric field generated by electrifying the conduct up-plate and electrifying the first electrodes by turns. The flow area drives the fluid sample via an electric field generated by the second electrode. The representative representative of the case is: (6). (2) A brief description of the symbol of the representative figure: 32: detection module; 321: analysis unit; 322: light-emitting element; 323: detection light source; 50: micro-flow detection device; 51: mixed region; 52: flow region 53: first electrode; 54: first fluid; 55: second fluid; and 56: second electrode. 8. If there is a chemical formula in this case, please disclose the chemical formula that best shows the characteristics of the invention: IX. Description of the Invention: [Technical Field] The present invention discloses a microfluidic detecting device and a manufacturing method thereof, particularly The electric field drives the liquid analyte to achieve the purpose of detecting the sample in the liquid analyte. 1314162 [Prior Art] In recent years, due to the advancement of Micro £iectro Mechanical Systems (MEMS) technology, many of the original bulky components have been miniaturized, and in many fields of microelectromechanical research, microfluidic components have been applied. Biomedical testing is particularly valued. The microfluidic biomedical test wafer produced by MEMS technology not only has high detection efficiency, low sample consumption, low energy consumption, small size, and low production cost due to micro-electromechanical batch process. Create low-cost disposable wafers to reduce the benefits of cross-contamination. In addition, its micro-full-scale analysis system (Mi(10)(10)丨) integrates microfluidics, real-time reaction, and simultaneous analysis.
Systems’ μ-TAS) t ’具有不可忽、視之發展潛力以及應用 價值。微全程分析系統的誕生將帶給人類生活上一 =1=時更= Π = =從事個: 檢測以及各種的化學分析。該系統不但快且:J 少量的檢體即可辨識，相當具有環保的概冬。’子僅而 因此，整合型快速生醫檢測技 = ^ 技術之重點方向之一。由於該產幸 X、乃目刖生物 高’生產所需之廠房面積小，所；：具備之技!f層次較 特性。且，以美國食品藥物管=加利益高等許多 Administration, FDA)的管制規範二（Food and Drug 術相關的法規限制較許多藥品和侵&入5，對於生醫檢測技 發展之限制也較少，研究與商業化&檢測技術），因此 之外，快速生醫檢測技術對於人類^機會因而較多。除此 越快速的得知檢測結果，便可為檢測甚為重要， 間’因此，利用微機電製程技術'患~取更多的治療時 供此-需求。 作之生物晶片便可提 1314162 遂發展有微流式細胞生物晶片，請參閱第一圖，係為 習知技藝之微流式細胞生物晶片之上視示意圖。以檢測病 毒為例，圖中，微流式細胞生物晶片10欲檢測之液態待測 物包含有螢光染劑抗體12、與螢光染劑抗體發生免疫反應 之病毒13及其他物質，且以方向14施予液態待測物壓力 使其向方向14流動，而藉由兩側施予作為邊鞍流之液體壓 力，使液體以方向15流動形成邊鞘流，藉由調整施予邊鞘 流或液態待測物之壓力，使液態待測物的層流只容單個與 螢光染劑抗體發生免疫反應之病毒13通過，如此控制通過 的數量可藉由檢測光源11照射發出螢光，以準確的檢測與 螢光染劑抗體發生免疫反應之病毒13,而收集的作動則是 調整兩側邊鞘流的壓力使液態待測物的層流偏移，將與螢 光染劑抗體發生免疫反應之病毒13收集起來。 接續，請參閱第二圖，係為習知技藝之微流式細胞生 物晶片之剖面示意圖。由於微流式細胞生物晶片10是以壓 力推動邊鞘流及液態待測物於凹槽22及上蓋23所限制的 空間中流動，但因為壓力可能會使液體滲透進凹槽22及上 蓋23接合的隙缝21中，而影響層流的穩定度產生檢測上 的誤差，亦影響與螢光染劑抗體發生免疫反應之病毒13 的檢測。 再者，凹槽通常是以蝕刻製程製作以得到高品質的凹 槽，請參閱第三圖，係為習知技藝之封閉式槽道的製程示 意圖。圖中，首先提供一玻璃基材71，再於玻璃基材71 上塗佈光阻72，經過光罩的曝光顯影使光阻72形成所需 的圖案，接著，再以化學蝕刻玻璃基材71形成所需的凹槽 22，凹槽22形成後，將光阻72去除，再提供上蓋23與玻 璃基材71結合密封。若再以微機電製程結合其他設計上的 1314162 需求，製作的過程中所進行的蝕刻將會破壞凹槽22原先的 品質，因而於封閉式槽道製程之外，也就甚難與其他微機 電製程技術結合，如此將影響晶片多功能及可攜式檢測儀 微小化的發展。同時，習知技藝之微流式細胞生物晶片需 使用較多的液體，且加壓流動時容易使晶片產生振動影響 檢測結果。 為改善上述所提出的各項缺點。本發明人基於多年從 事微流式技術的研究與諸多實務經驗，經多方研究設計與 專題探討，遂於本發明提出一種微流式檢測裝置及其製造 方法以作為前述期望一實現方式與依據。 【發明内容】 有鑑於上述課題，本發明之目的為提供一種微流式檢 測裝置及其製造方法，特別是關於藉由電場驅動液態待測 物，達成對液態待測物中之檢體的檢測。 緣是，為達上述目的，依本發明之一種微流式檢測裝 置，其適用於檢測一液態待測物，此檢測裝置至少包含有 複數個電極及至少一檢測模組，其中，前述電極位於同一 平面，而電極中的兩個為長條狀且以長邊相距一固定間隙 平行成對，作為液態待測物之流動區域’且藉由前述電極 產生電場，以驅動液態待測物之流動，檢測模組則用以檢 測於流動區域中流動之液態待測物。 為達上述目的，依本發明之另一種微流式檢測裝置， 其適用於檢測一液態待測物，此檢測裝置至少包含有一混 合區域、一流動區域及至少一檢測模組，其中，混合區域 具有導電上板及複數個第一電極，係於導電上板及第一電 極間混合一第一流體與一第二流體，形成液態待測物，流 1314162 動區域具有至少二第二電極，其係為長條狀且以長邊相距 一固定間隙平行成對，以供液態待測物之流動，檢測模組 則用以檢測於流動區域中流動之液態待測物，而混合區域 則藉由將導電上板通電及將第一電極輪流通電產生電場， 以混合第一流體與第二流體，而流動區域則藉由第二電極 產生電場，以驅動液態待測物之流動。 承上所述，因依本發明之微流式檢測裝置，實現以電 場驅動液態待測物形成微流，達到對液態待測物中之檢體 進行檢測的目的。 茲為使貴審查委員對本發明之技術特徵及所達成之 功效有更進一步之暸解與認識，下文謹提供較佳之實施例 及相關圖式以為輔佐之用，並以詳細之說明文字配合說明 如後。 【實施方式】 為讓本發明之上述目的、特徵、和優點能更明顯易懂， 下文依本發明之微流式檢測裝置特舉較佳實施例，並配合 所附相關圖式，作詳細說明如下，其中相同的元件將以相 同的元件符號加以說明。 請參閱第四圖，係為本發明之一微流式檢測裝置之示 意圖。圖中，微流式檢測裝置30適用於檢測一液態待測 物，此檢測裝置30至少包含有複數個電極31及至少一檢 測模組32，其中，前述電極31位於同一平面，而電極31 兩個為長條狀電極以長邊相距一固定間隙平行成對，作為 液態待測物之流動區域，檢測模組32中具有一發光元件 322及一分析單元321，由發光元件322發出檢測光源323 激發液態待測物中具發光能力的檢體發光，藉此用以檢測 1314162 於流動區域中流動之液態待測物，而液態待測物之流動則 是藉由前述電極31產生電場，形成液體介電泳現象 (liquiddiel ectrophores i s)，以驅動液態待測物之流動。 請參閱第五圖，係為本發明之另一微流式檢測裝置之 示意圖。圖中，微流式檢測裝置30適用於檢測一液態待測 物，此檢測裝置30至少包含有複數個電極31、至少一檢 測模組32及至少一分離裝置41，其中，前述電極31位於 同一平面，而電極31中的兩個為長條狀電極以長邊相距一 固定間隙平行成對，作為液態待測物之流動區域，檢測模 組32中具有一發光元件322及一分析單元321，由發光元 件322發出檢測光源323激發液態待測物中具發光能力的 檢體發光42,藉此用以檢測於流動區域中流動之液態待測 物，而液態待測物之流動則是藉由前述電極31產生電場， 形成液體介電泳現象，以驅動液態待測物之流動，前述之 分離裝置41設於流動區域之電極31之兩側，且位於同一 平面，且當分析單元321檢出檢體所發出的光42時，即藉 分離裝置41收集檢體，達成檢測及收集液態待測物中之檢 體的目的。 上述第四及五圖中，電極一般較佳為金屬材質，且於電 極之表面覆蓋一介電層，以避免液態待測物沸騰或電解，並 且於介電層上塗佈一具備疏水性之特性的薄層，以增加液體 介電泳現象，液態待測物一般為含有至少一檢體之混合 液，此些檢體一般為細菌、病毒、細胞、蛋白質分子、藥物 分子、DNA分子、RNA分子或化學分子等於其中，而檢體為 與一標記物抗體結合之，標記物抗體之標記物一般較佳為螢 光染劑、奈米粒子、量子粒子或其他發光染劑，發光元件較 佳為雷射、紫外光或紅外光之相關元件以激發標記物發光。 1314162 請參閱第六圖，係為本發明之一具有混合能力之微流 式檢測裝置之示意圖。圖中，微流式檢測裝置50適用於檢 測一液態待測物，此檢測裝置5 0至少包含有一混合區域 51、一流動區域52及至少一檢測模組32，其中，混合區 域51具有導電上板（未標示於圖中）及複數個第一電極 53,導電上板覆蓋在所有第一電極53上，係於導電上板及 第一電極53間混合一第一流體54與一第二流體55，形成 液態待測物，流動區域51具有至少二第二電極56，其係 為長條狀且以長邊相距一固定間隙平行成對，以供液態待 測物之流動，檢測模組32中具有一發光元件322及一分析 單元321，由發光元件322發出檢測光源323激發液態待 測物中具發光能力的檢體發光，藉此用以檢測於流動區域 中流動之液態待測物之檢體，而混合區域51則藉由將導電 ' 上板通電及將第一電極53輪流通電產生電場，形成電潤濕 、現象，以混合第一流體54與第二流體55，而流動區域52 則藉由第二電極56產生電場，形成液體介電泳現象，以驅 動液態待測物之流動。 請參閱第七圖，係為本發明之另一具有混合能力之微 流式檢測裝置之示意圖。圖中，微流式檢測裝置50適用於 檢測一液態待測物，此檢測裝置5 0至少包含有一混合區域 51、一流動區域52、至少一檢測模組32及至少一分離裝 置61，其中，混合區域51具有導電上板（未標示於圖中） 及複數個第一電極53，導電上板覆蓋在所有第一電極53 上，係於導電上板及第一電極53間混合一第一流體54與 一第二流體55，形成液態待測物，流動區域52具有至少 二第二電極56，其係為長條狀且以長邊相距一固定間隙平 行成對，以供液態待測物之流動，檢測模組32中具有一發 10 1314162 光元件322及一分析單元321，由發光元件322發出檢測 光源323激發液態待測物中具發光能力的檢體發光62，藉 此用以檢測於流動區域52中流動之液態待測物之檢體，而 混合區域51則藉由將導電上板通電及將第一電極53輪流 通電產生電場，形成電潤濕現象，以混合第一流體54與第 二流體5 5，而流動區域5 2則藉由第二電極5 6產生電場， 形成液體介電泳現象，以驅動液態待測物之流動，前述之 分離裝置61設於流動區域52之兩側，且位於同一平面， 而當分析單元321檢出檢體所發出的光62時，即藉分離裝 置61收集檢體，達成檢測及收集液態待測物中之檢體的目 的。 上述第六及七圖中，第一電極、第二電極及導電上板一 般較佳為金屬材質，在第一電極及第二電極表面覆蓋一介電 層，可避免液態待測物；弗騰或電解*而導電上板更可為導電 玻璃，且於前述介電層及導電上板之表面更可塗佈一具備疏 水性之特性的薄層，以增加電潤濕現象及介電泳現象，第一 流體一般為含有至少一檢體之混合液，第二流體一般為含有 至少一標記物抗體之混合液，檢體一般為細菌、病毒、細胞、 蛋白質分子、藥物分子、DNA分子、RNA分子或化學分子等 於其中，標記物抗體一般較佳為螢光染劑、奈米粒子、量子 粒子或其他發光染劑，發光元件較佳為雷射、紫外光或紅 外光之相關元件以激發標記物發光。 請參閱第八圖，係為本發明之微流式檢測裝置之混合 區域之較佳實施例作動示意圖。此圖係為第六圖及第七圖 之較佳實施例之混合區域51之作動，是先將導電上板（未 標示於圖中）通電，藉由第一電極53分別吸引第一流體 54及第二流體55,當第一電極53吸引第一流體54時，是 11 1314162 依序將電極531、532、533及a通電，利用電潤濕現象 (electrowetting)依序將電極 531、532、533 及 a 通電 使表面轉變成親水性以吸引液滴，使液滴依序沿電極 531、532及533之表面，以S1方向運動至代號a的第一 電極53，當第一電極53吸引第二流體55時，是依序將電 極534、535、536友a通電，利用電潤濕現象依序將電極 534、535、536及a通電使表面轉變成親水性以吸引液滴， 使液滴依序沿電極534、535及536之表面，以S2方向運 動至代號a的第一電極53，使第一流體54及第二流體55 於代號a的第一電極53進行初步混合形成液態待測物之液 滴X，為確保液滴X中之第一流體54及第二流體55均勻 的混合以進行反應，遂將代號a斷電使之回復為疏水性， 再將代號b通電轉變成親水性吸引液滴X至代號b的第一 電極53，透過相同的方式在代號b與代號c、代號d與代 號c、代號e與代號c、及代號f與代號c之第一電極53， 、經各代號之第一電極53交互通電而交互吸引液滴X進行電 潤濕現象的操作，以造成液滴X内部產生渾沌流場，使第 一流體54及第二流體55均勻的混合進行反應，最後，將 液滴X吸引至代號g。同時，各個電極間均有互相交錯的 設計，如圖中所顯示的鋸齒狀的交錯為一實施方式，藉由 電極的交錯以促進電潤濕現象的操作。 請參閱第九圖，係為本發明之微流式檢測裝置之流動 區域之作動示意圖。此圖係為第四圖、第五圖、第六圖及 第七圖中，流動區域之二長條狀電極31及56且以長邊相 距一固定間隙平行成對，施予電極31及56交流電場，以 形成不均勻電場（在電極邊緣，電場最強），以使液態待測 物之液滴X内的液態分子，藉由不均勻電場，產生介電泳 12 Ϊ314162 2 ’使液滴χ延展成線狀並沿著成對電極3 間隙以方向D延伸流動。 b6間的 ^參閱第十圖’係、為本發明之微流式檢測褒置之制皮 方去流程圖。此方法之流程步驟如下： 衣以 步驟S91 :提供一基板； 步驟S92··形成一導電層於基板上； 步驟S93:將導電層圖案化以形成複數 驟更包含如後之步驟： ’此步 步驟si :塗佈一光阻於導電層上； 步驟s2:利用曝光顯影使光阻日將欲形 導電層保護起來； 極的 極 步驟S3··藉由化學_未被保護之導電層形成前述電 步驟s4 :去除電極上之光阻； 遭 再者，可藉由微機電技術設置檢測模組於前述電極週 步驟S94 步驟S95 步驟S96 步驟S97 覆盍一介電層於電極及基板上； 塗佈一疏水性的薄層於介電層之上； 提供一導電上板； ， 以及 塗佈—疏水性的薄層於導電上板之表面； 步驟S98:藉由墊片使導電 有，rr空間，:以進行電潤濕現象的‘所 1 應到導電上板的電極則用於進行液體介. 及電極，更可提供具氧化她才#作為導電上板 結合導電層之基板，再者，卿料電上板及 更可Ο 3设計檢測模組使之具 1314162 有一發光元件及一分析單元，且可設置一分離裝置於電極 之至少一側，且，亦可塗佈疏水性的薄層於導電上板之表 面。 請參閱第十一圖，係為本發明之微流式檢測裝置之製 造方法的製程示意圖。圖中，首先提供一基板81並形成導 電層82，塗佈一光阻83於導電層82上，利用曝光顯影使 光阻83將欲形成電極的導電層82保護起來，由化學蝕刻 未被保護之導電層82形成電極84,去除電極84上之光阻 83,覆蓋一介電層85於電極84及基板81上，塗佈一疏水 性的薄層86於介電層85之上，提供一具導電層82之導電 上板87,並塗佈一疏水性的薄層86於導電上板87之導電 層82之上，再藉由墊片88使導電上板87與基板81上之 部份電極84間形成一空間89，亦或與所有電極84形成空 間89，以進行介電泳現象或電潤濕現象的操作。 請參閱第十二圖，係為本發明之又一具有混合能力之 微流式檢測裝置之示意圖。圖中，微流式檢測裝置M0適用 於檢測一液態待測物，此檢測裝置M0至少包含有一混合區 域Ml、一流動區域M2及至少一檢測模組32，其中，混合 區域Ml具有導電上板（未標示於圖中）及複數個第一電極 M3，導電上板覆蓋在所有第一電極M3上，係於導電上板及 第一電極M3間混合一第一流體M4與一第二流體M5，形成 液態待測物，流動區域M2具有導電上板（未標示於圖中） 及複數個第二電極M6，其係由第二電極M6排列成串，以 供液態待測物之流動，且第二電極M6之面積係小於第一電 極M3之面積，檢測模組32中具有一發光元件322及一分 析單元321，由發光元件322發出檢測光源323激發液態 待測物中具發光能力的檢體發光，藉此用以檢測於流動區 14 1314162 域中流動之液態待測物之檢體，而混合區域Ml則藉由將導 電上板通電及將第一電極Μ 3輪流通電產生電場’形成電淵 濕現象，以混合第一流體Μ4與第二流體Μ5，而流動區域 M2亦藉由將導電上板通電及將第二電極Μ6輪流通電產生 電場，形成電潤濕現象，以驅動液態待測物以液滴的型式 移動，或者，流動區域M2亦可藉由將導電上板通電及將相 鄰多個第二電極Μ6接續通電產生電場，形成電潤濕現象， 使液態待測物形成條狀的型式，再藉由將液態待測物前方 的第二電極Μ6通電及液態待測物所處的最後一個第二電 極Μ6斷電，以此方式驅動液態待測物以條狀的型式沿著第 二電極Μ6排列方向的另一端移動。 請參閱第十三圖，係為本發明之另一具有混合能力之 微流式檢測裝置之示意圖。圖中，微流式檢測裝置Μ0適用 於檢測一液態待測物，此檢測裝置Μ0至少包含有一混合區 域Ml、一流動區域M2、至少一檢測模組32及至少一分離 裝置L1，其中，混合區域Ml具有導電上板（未標示於圖 中）及複數個第一電極M3,導電上板覆蓋在所有第一電極 M3上，係於導電上板及第一電極M3間混合一第一流體M4 與一第二流體M5，形成液態待測物，流動區域M2具有導 電上板（未標示於圖中）及複數個第二電極M6，其係由第 二電極M6排列成串，以供液態待測物之流動，且第二電極 M6之面積係小於第一電極M3之面積，檢測模組32中具有 一發光元件322及一分析單元321，由發光元件322發出 檢測光源323激發液態待測物中具發光能力的檢體發光 L2,藉此用以檢測於流動區域M2中流動之液態待測物之檢 體，而混合區域Ml則藉由將導電上板通電及將第一電極 M3輪流通電產生電場，形成電潤濕現象，以混合第一流體 15 1314162 M4與第二流體M5，而流動區域M2亦藉由將導電上板通電 及將第二電極M6輪流通電產生電場，形成電潤濕現象，以 驅動液態待測物以液滴的型式移動，或者，流動區域M2 亦可藉由將導電上板通電及將相鄰多個第二電極M6接續 通電產生電場，形成電潤濕現象，使液態待測物形成條狀 的型式，再藉由將液態待測物前方的第二電極M6通電及液 態待測物所處的最後一個第二電極M6斷電，以此方式驅動 液態待測物以條狀的型式沿著第二電極M6排列方向的另 一端移動，同時，前述之分離裝置L1設於流動區域M2之 兩側，且位於同一平面，而當分析單元321檢出檢體所發 出的光L2時，即藉分離裝置L1收集檢體，達成檢測及收 集液態待測物中之檢體的目的。 上述第十二及十三圖中，第一電極、第二電極及導電上 板一般較佳為金屬材質，在第一電極及第二電極表面覆蓋一 介電層，可避免液態待測物沸騰或電解，而導電上板更可為 導電玻璃，且於前述介電層及導電上板之表面更可塗佈一具 備疏水性之特性的薄層，以增加電潤濕現象，第一流體一般 為含有至少一檢體之混合液，第二流體一般為含有至少一標 記物抗體之混合液，檢體一般為細菌、病毒、細胞、蛋白質 分子、藥物分子、DNA分子、RNA分子或化學分子等於其中， 標記物抗體一般較佳為螢光染劑、奈米粒子、量子粒子或其 他發光染劑，發光元件較佳為雷射、紫外光或紅外光之相 關元件以激發標記物發光。 請參閱第十四圖，係為本發明之再一微流式檢測裝置 之示意圖。圖中，微流式檢測裝置W0適用於檢測一液態待 測物，此檢測裝置W0至少包含有複數個電極W1及至少一 檢測模組32，其中，前述電極W1位於同一平面，且所有 16 1314162 電極w 1排列成串，作為液態待測物之流動區域，檢測模組 32中具有一發光元件322及一分析單元321，由發光元件 322發出檢測光源323激發液態待測物中具發光能力的檢 體發光，藉此用以檢測於流動區域中流動之液態待測物， 而液態待測物之流動則是藉由前述電極W1輪流產生電 場，形成電潤濕現象，以驅動液態待測物以液滴的型式移 動，或者，藉由將導電上板通電及將相鄰多個電極W1接續 通電產生電場，形成電潤濕現象，使液態待測物形成條狀 的型式，再藉由將液態待測物前方的電極W1通電及液態待 測物所處的最後一個電極W1斷電，以此方式驅動液態待測 物以條狀的型式沿著電極W1排列方向的另一端移動。 請參閱第十五圖，係為本發明之又一微流式檢測裝置 之示意圖。圖中，微流式檢測裝置W0適用於檢測一液態待 測物，此檢測裝置W 0至少包含有複數個電極W1、至少一 檢測模組32及至少一分離裝置D1，其中，前述電極W1位 於同一平面，且所有電極W1排列成串，作為液態待測物之 流動區域，檢測模組32中具有一發光元件322及一分析單 元321，由發光元件322發出檢測光源323激發液態待測 物中具發光能力的檢體發光D2，藉此用以檢測於流動區域 中流動之液態待測物，而液態待測物之流動則是藉由前述 電極W1產生電場，形成電潤濕現象，以驅動液態待測物以 液滴的型式移動，或者，藉由將導電上板通電及將相鄰多 個電極W1接績通電產生電場’形成電潤濕現象 '使液待 測物形成條狀的型式，再藉由將液態待測物前方的電極W1 通電及液態待測物所處的最後一個電極W1斷電，以此方式 驅動液態待測物以條狀的型式沿著電極W1排列方向的另 一端移動，同時，前述之分離裝置D1設於流動區域之電極 17 1314162 W1之兩側，且位於同一平面，且當分析單元321檢出檢體 所發出的光D2時，即藉分離裝置D1收集檢體，達成檢測 及收集液態待測物中之檢體的目的。 上述第十四及十五圖中，電極一般較佳為金屬材質， 且於電極之表面覆蓋一介電層，以避免液態待測物沸騰或 電解，並且於介電層上塗佈一具備疏水性之特性的薄層， 以增加電潤濕現象，液態待測物一般為含有至少一檢體之 混合液，此些檢體一般為細菌、病毒、細胞、蛋白質分子、 藥物分子、DNA分子、RNA分子或化學分子等於其中，而檢 體為與一標記物抗體結合之，標記物抗體之標記物一般較 佳為螢光染劑、奈米粒子、量子粒子或其他發光染劑，發 光元件較佳為雷射、紫外光或紅外光之相關元件以激發標 記物發光。 以上所述僅為舉例性，而非為限制性者。任何未脫離 本發明之精神與範疇，而對其進行之等效修改或變更，均 應包含於後附之申請專利範圍中。 【圖式簡单說明】 第一圖係為習知技藝之微流式細胞生物晶片之上視示意 圖； 第二圖係為習知技藝之微流式細胞生物晶片之剖面示意 圖， 第三圖係為習知技藝之封閉式槽道的製程示意圖； 第四圖係為本發明之一微流式檢測裝置之示意圖； 第五圖係為本發明之另一微流式檢測裝置之示意圖； 第六圖係為本發明之一具有混合能力之微流式檢測裝置 之不意圖， 18 1314162 第七圖係為本發明之另一具有混合能力之微流式檢測裝 * 置之示意圖； • 第八圖係為本發明之微流式檢測裝置之混合區域之作動 不意圖， 第九圖係為本發明之微流式檢測裝置之流動區域之作動 不意圖， 第十圖係為本發明之微流式檢測裝置之製造方法流程 圖， 第十一圖係為本發明之微流式檢測裝置之製造方法的製 鲁 程示意圖； 第十二圖係為本發明之再一具有混合能力之微流式檢測 裝置之示意圖； 第十三圖係為本發明之又一具有混合能力之微流式檢測 ^ 裝置之示意圖； - 第十四圖係為本發明之再一微流式檢測裝置之示意圖； 以及 第十五圖係為本發明之又一微流式檢測裝置之示意圖。 【主要元件符號說明】 22 :凹槽； 23 ：上蓋， 30 :微流式檢測裝置； 31 :電極； 32 :檢測模組； 321 :分析單元； 322 :發光元件； I 〇:微流式細胞生物晶片， II :檢測光源； 12 :螢光染劑抗體； 13 :與螢光染劑抗體發生 免疫反應之病毒； 14及15 :方向； 21 :隙縫； 19 1314162 323 :檢測光源； 83 :光阻； 41 :分離裝置； 84 :電極； 42 :光； 85 :介電層； 50 :微流式檢測裝置； 86 :薄層； 51 :混合區域； 87 :導電上板； 52 :流動區域； 88 :墊片； 53 :第一電極； 89 :空間； 53卜 532、533、534、535 S91〜S98 :流程步驟； 及536 :電極； si〜s4 :流程步驟； 54 :第一流體； M0 :微流式檢測裝置； 55 :第二流體； Ml :混合區域 56 :第二電極； M2 :流動區域 61 :分離裝置； M3 :第一電極 62 :光； M4 :第一流體 S1及S2 :方向； M5 :第二流體 a、b、c、d、e、f 及 g: M6 :第二電極 代號； L1 :分離裝置 X:液態待測物之液滴； L2 :光； D :方向； W0 :微流式檢測裝置； 71 :玻璃基材； W1 :電極； 72 :光阻； D1 :分離裝置 :以及 81 .基板， D2 :光。 82 :導電層； 20 1314162 / the second fluid via an electric field generated by electrifying the conduct up-plate and electrifying the first electrodes by turns. The flow area drives the fluid sample via an electric field generated by the second electrode. 七、指定代表圖： (一） 本案指定代表圖為：第（六）圖。 (二） 本代表圖之元件符號簡單說明： 32 :檢測模組； 321 :分析單元； 322 :發光元件； 323 :檢測光源； 50 :微流式檢測裝置； 51 :混合區域； 52 :流動區域； 53 :第一電極； 54 :第一流體； 55 :第二流體；以及 56 :第二電極。 八、 本案若有化學式時，請揭示最能顯示發明特徵的化學式： 九、 發明說明： 【發明所屬之技術領域】 本發明係揭露一種微流式檢測裝置及其製造方法，特 別是關於藉由電場驅動液態待測物，達成對液態待測物中 之檢體的檢測之目的。Systems’ μ-TAS) t ’ has unpredictable development potential and application value. The birth of the micro-full analysis system will bring life to humans. =1= When more = Π = = Engage: Testing and various chemical analysis. The system is not only fast: J can be identified by a small number of specimens, which is quite environmentally friendly. Therefore, only one of the key directions of technology is the integrated rapid biomedical testing technology. Because of the good fortune X, it is a small area of production that is required for production. Moreover, the US Food and Drug Administration = High Benefits, many of the Administration, FDA) Regulations 2 (Food and Drug-related regulations are more restrictive than many drugs and invasive & into the 5, and there are fewer restrictions on the development of biomedical testing techniques. , research and commercialization & detection technology, therefore, the rapid biomedical detection technology for humans is therefore more opportunities. In addition to this, the quicker the detection of the test results can be very important for the detection, therefore, the use of MEMS process technology to suffer from the need for more treatment. The biochip can be used to develop a microfluidic cell biochip, see the first figure, which is a top view of a microfluidic cell biochip of the prior art. Taking the virus as an example, in the figure, the liquid analyte to be detected by the microfluidic cell biochip 10 comprises a fluorescent dye antibody 12, a virus 13 which immunoreacts with the fluorescent dye antibody, and other substances, and Direction 14 applies the pressure of the liquid test object to flow in the direction 14, and by applying the liquid pressure as the side saddle flow on both sides, the liquid flows in the direction 15 to form the edge sheath flow, and the edge sheath flow is adjusted by the application. Or the pressure of the liquid analyte, so that the laminar flow of the liquid analyte can only pass through a single virus 13 which is immunoreactive with the fluorescent dye antibody, and the amount of control can be controlled by the light source 11 to emit fluorescence. Accurate detection of virus 13 with immunological reaction with fluorescent dye antibody, and the action of collecting is to adjust the pressure of the sheath flow on both sides to deflect the laminar flow of the liquid analyte, and will be immune to the fluorescent dye antibody. The virus 13 of the reaction was collected. Next, please refer to the second figure, which is a schematic cross-sectional view of a microfluidic cell biochip of the prior art. Since the microfluidic cell biochip 10 is under pressure to push the edge sheath flow and the liquid analyte to flow in the space defined by the recess 22 and the upper cover 23, the pressure may cause the liquid to penetrate into the recess 22 and the upper cover 23 to be engaged. In the gap 21, the stability affecting the laminar flow produces a detection error and also affects the detection of the virus 13 which is immunoreactive with the fluorescent dye antibody. Furthermore, the recesses are typically fabricated in an etch process to provide high quality recesses, see Fig. 3, which is a schematic illustration of the process of closed channels of the prior art. In the figure, a glass substrate 71 is first provided, and then a photoresist 72 is coated on the glass substrate 71, and the photoresist 72 is exposed and developed to form a desired pattern, and then the glass substrate 71 is chemically etched. A desired groove 22 is formed. After the groove 22 is formed, the photoresist 72 is removed, and the upper cover 23 is provided in combination with the glass substrate 71 to seal. If the MEMS process is combined with the 1314162 requirements of other designs, the etching performed during the fabrication process will destroy the original quality of the groove 22. Therefore, it is difficult to interact with other MEMS beyond the closed channel process. The combination of process technology will affect the development of wafer versatility and miniaturization of portable detectors. At the same time, the microfluidic cell biochip of the prior art requires a large amount of liquid, and it is easy to cause vibration of the wafer to affect the detection result when pressurized. In order to improve the various shortcomings mentioned above. The present inventors have developed a microfluidic detecting device and a manufacturing method thereof based on the research and many practical experiences of microfluidic technology for many years, and have been proposed as a realization and basis of the foregoing. SUMMARY OF THE INVENTION In view of the above problems, an object of the present invention is to provide a microfluidic detection device and a method of fabricating the same, and more particularly to detecting a sample in a liquid test object by driving a liquid test object by an electric field. . In order to achieve the above object, a microfluidic detecting device according to the present invention is suitable for detecting a liquid analyte, the detecting device comprising at least a plurality of electrodes and at least one detecting module, wherein the electrodes are located The same plane, and two of the electrodes are elongated and parallel with a long side separated by a fixed gap, as a flow region of the liquid analyte, and an electric field is generated by the aforementioned electrode to drive the flow of the liquid analyte. The detection module is configured to detect the liquid analyte to be tested in the flow area. In order to achieve the above object, another microfluidic detecting device according to the present invention is suitable for detecting a liquid analyte, the detecting device comprising at least a mixing region, a flow region and at least one detecting module, wherein the mixing region The conductive upper plate and the plurality of first electrodes are mixed with a first fluid and a second fluid between the conductive upper plate and the first electrode to form a liquid analyte, and the flow region 1314162 has at least two second electrodes. The strips are strip-shaped and are paired in parallel with a fixed gap along the long side for the flow of the liquid analyte, and the detection module is used to detect the liquid analyte flowing in the flow region, and the mixed region is The conductive upper plate is energized and the first electrode wheel is electrically circulated to generate an electric field to mix the first fluid and the second fluid, and the flow region generates an electric field by the second electrode to drive the flow of the liquid analyte. According to the above, the microfluidic detecting device according to the present invention realizes the microfluidic flow of the liquid analyte to be driven by the electric field, thereby achieving the purpose of detecting the specimen in the liquid analyte. In order to provide a better understanding and understanding of the technical features and the efficacies of the present invention, the preferred embodiments and related drawings are provided for the purpose of assistance, and the detailed descriptions are followed by a description. . DETAILED DESCRIPTION OF THE INVENTION In order to make the above objects, features, and advantages of the present invention more comprehensible, the preferred embodiment of the microfluidic device according to the present invention will be described in detail below with reference to the accompanying drawings. The same elements will be described with the same element symbols as follows. Please refer to the fourth figure, which is a schematic diagram of a microfluidic detecting device of the present invention. In the figure, the micro-flow detecting device 30 is adapted to detect a liquid analyte. The detecting device 30 includes at least a plurality of electrodes 31 and at least one detecting module 32. The electrodes 31 are located on the same plane, and the electrodes 31 are The strip electrodes are parallel to each other with a long side separated by a fixed gap. As a flow area of the liquid analyte, the detecting module 32 has a light emitting element 322 and an analyzing unit 321, and the detecting light source 323 is emitted by the light emitting element 322. Exciting the luminescence of the luminescence capable of detecting the liquid in the liquid to be tested, thereby detecting the liquid analyte flowing in the flow region of 1314162, and the flow of the liquid analyte is generating an electric field by the electrode 31 to form a liquid A liquid-electrophoretic phenomenon (liquiddiel ectrophores is) to drive the flow of a liquid analyte. Please refer to the fifth figure, which is a schematic diagram of another microfluidic detecting device of the present invention. In the figure, the micro-flow detecting device 30 is adapted to detect a liquid analyte, the detecting device 30 comprising at least a plurality of electrodes 31, at least one detecting module 32 and at least one separating device 41, wherein the electrodes 31 are located in the same The detection module 32 has a light-emitting element 322 and an analysis unit 321 in the detection module 32, wherein the two electrodes are long electrodes separated by a fixed gap. The detecting light source 323 emits the sample light emitting light 42 capable of emitting light in the liquid to be tested by the light emitting element 322, thereby detecting the liquid object to be tested flowing in the flowing region, and the flow of the liquid object to be tested is performed by The electrode 31 generates an electric field to form a liquid dielectrophoretic phenomenon to drive the flow of the liquid analyte. The separating device 41 is disposed on both sides of the electrode 31 of the flow region, and is located on the same plane, and is detected by the analyzing unit 321 When the light 42 is emitted from the body, the sample is collected by the separating device 41, and the purpose of detecting and collecting the sample in the liquid test object is achieved. In the above fourth and fifth figures, the electrode is generally made of a metal material, and a dielectric layer is covered on the surface of the electrode to avoid boiling or electrolysis of the liquid analyte, and a hydrophobic layer is coated on the dielectric layer. a thin layer of properties to increase liquid dielectrophoresis. The liquid analyte is generally a mixture containing at least one sample. These samples are generally bacteria, viruses, cells, protein molecules, drug molecules, DNA molecules, and RNA molecules. Or the chemical molecule is equal thereto, and the sample is bound to a label antibody, and the label of the label antibody is generally preferably a fluorescent dye, a nano particle, a quantum particle or other luminescent dye, and the light-emitting element is preferably Related elements of laser, ultraviolet or infrared light illuminate the excitation label. 1314162 Please refer to the sixth figure, which is a schematic diagram of a microfluidic detection device with mixing capability. In the figure, the micro-flow detecting device 50 is adapted to detect a liquid analyte. The detecting device 50 includes at least a mixing region 51, a flow region 52 and at least one detecting module 32. The mixing region 51 has a conductive surface. a plate (not shown) and a plurality of first electrodes 53. The conductive upper plate covers all of the first electrodes 53 and is mixed with a first fluid 54 and a second fluid between the conductive upper plate and the first electrode 53. 55, forming a liquid analyte, the flow region 51 has at least two second electrodes 56, which are elongated and parallel with a long side separated by a fixed gap for the flow of the liquid analyte, the detection module 32 A light-emitting element 322 and an analysis unit 321 are provided, and the light-emitting element 322 emits a sample light emitted by the detection light source 323 to emit light in the liquid to be tested, thereby detecting the liquid sample to be tested flowing in the flow region. The sample region, while the mixing region 51 generates an electric field by energizing the conductive upper plate and circulating the first electrode 53 to form an electrowetting phenomenon to mix the first fluid 54 and the second fluid 55, and the flow region 52 By Two electrodes generating an electric field 56 is formed electrophoresis liquid medium to drive the flow of the liquid was measured. Please refer to the seventh figure, which is a schematic diagram of another microfluidic detecting device with mixing capability according to the present invention. In the figure, the micro-flow detecting device 50 is adapted to detect a liquid analyte. The detecting device 50 includes at least one mixing region 51, a flow region 52, at least one detecting module 32 and at least one separating device 61. The mixing region 51 has a conductive upper plate (not shown) and a plurality of first electrodes 53. The conductive upper plate covers all the first electrodes 53 and is mixed with a first fluid between the conductive upper plate and the first electrode 53. 54 and a second fluid 55, forming a liquid analyte, the flow region 52 having at least two second electrodes 56, which are elongated and parallel with a long side separated by a fixed gap for liquid test objects The flow detecting module 32 has a light emitting element 322 and an analyzing unit 321 , and the detecting light source 322 emits the detecting light illuminating element 62 for illuminating the liquid in the liquid to be tested, thereby detecting The sample of the liquid analyte flowing in the flow region 52, and the mixing region 51 generates an electric field by energizing the conductive upper plate and circulating the first electrode 53 to form an electrowetting phenomenon to mix the first fluid 54 with second The body 5 5 and the flow region 52 generate an electric field by the second electrode 56 to form a liquid dielectrophoretic phenomenon to drive the flow of the liquid analyte, and the separating device 61 is disposed on both sides of the flow region 52, and When the analysis unit 321 detects the light 62 emitted by the sample, the sample is collected by the separation device 61 to achieve the purpose of detecting and collecting the sample in the liquid test object. In the above sixth and seventh figures, the first electrode, the second electrode and the conductive upper plate are generally made of a metal material, and a dielectric layer is covered on the surfaces of the first electrode and the second electrode to avoid the liquid object to be tested; Or electrolysis* and the conductive upper plate can be made of conductive glass, and a thin layer having hydrophobic properties can be coated on the surface of the dielectric layer and the conductive upper plate to increase electrowetting and dielectrophoresis. The first fluid is generally a mixture containing at least one sample, and the second fluid is generally a mixture containing at least one labeled antibody. The sample is generally bacteria, viruses, cells, protein molecules, drug molecules, DNA molecules, RNA molecules. Or the chemical molecule is equal thereto, the label antibody is generally preferably a fluorescent dye, a nano particle, a quantum particle or other luminescent dye, and the light-emitting element is preferably a laser, ultraviolet light or infrared light related element to excite the label. Glowing. Please refer to the eighth drawing, which is a schematic diagram of a preferred embodiment of the mixing region of the microfluidic detecting device of the present invention. This figure is the operation of the mixing region 51 of the preferred embodiment of the sixth and seventh embodiments. The conductive upper plate (not shown) is energized first, and the first fluid 54 is respectively attracted by the first electrode 53. And the second fluid 55, when the first electrode 53 attracts the first fluid 54, is 11 1314162 sequentially energizes the electrodes 531, 532, 533 and a, and sequentially uses the electrowetting phenomenon (electrowetting) to electrode 531, 532, 533 and a are energized to convert the surface into hydrophilicity to attract the droplets, and the droplets are sequentially moved along the surfaces of the electrodes 531, 532, and 533, in the S1 direction to the first electrode 53 of the code a, and when the first electrode 53 is attracted When the two fluids are 55, the electrodes 534, 535, and 536 are sequentially energized, and the electrodes 534, 535, 536, and a are energized sequentially by electrowetting to make the surface hydrophilic to attract liquid droplets. The surface of the electrodes 534, 535 and 536 are sequentially moved to the first electrode 53 of the code a in the S2 direction, so that the first fluid 54 and the second fluid 55 are initially mixed at the first electrode 53 of the code a to form a liquid to be tested. Droplet X of the object, to ensure that both the first fluid 54 and the second fluid 55 in the droplet X Mixing to carry out the reaction, the code a is powered off to return to hydrophobicity, and then the code b is electrically converted into a hydrophilic attracting droplet X to the first electrode 53 of the code b, in the same way at the code b and code c, the code d and the code c, the code e and the code c, and the first electrode 53 of the code f and the code c, the first electrode 53 of each code is alternately energized to interactively attract the droplet X to perform the electrowetting phenomenon In order to cause a chaotic flow field inside the droplet X, the first fluid 54 and the second fluid 55 are uniformly mixed and reacted, and finally, the droplet X is attracted to the code g. At the same time, the electrodes are interleaved with each other, and the zigzag interlacing as shown in the figure is an embodiment in which the staggering of the electrodes promotes the operation of the electrowetting phenomenon. Please refer to the ninth drawing, which is a schematic diagram of the operation of the flow region of the microfluidic detecting device of the present invention. In the fourth, fifth, sixth and seventh figures, the two long strip electrodes 31 and 56 of the flow region are paired in parallel with the long sides separated by a fixed gap, and the electrodes 31 and 56 are applied. The electric field is exchanged to form an inhomogeneous electric field (at the edge of the electrode, the electric field is the strongest), so that the liquid molecules in the liquid droplet X of the liquid analyte can be diazette-extended by a dielectrophoretic 12 Ϊ 314162 2 ' by a non-uniform electric field. It is linear and flows along the pair of electrode 3 gaps in the direction D. Between b6, referring to the tenth figure, the flow chart of the microfluidic detection device of the present invention is shown. The process steps of the method are as follows: Step S91: providing a substrate; Step S92·· Forming a conductive layer on the substrate; Step S93: Patterning the conductive layer to form a plurality of steps including the following steps: 'This step Step si: coating a photoresist on the conductive layer; step s2: using the exposure and development to protect the desired conductive layer from the photoresist; the pole step S3 of the pole is formed by a chemically-unprotected conductive layer Electrical step s4: removing the photoresist on the electrode; in addition, the detection module can be set by the MEMS technology in the electrode step S94, step S95, step S96, step S97, overlying a dielectric layer on the electrode and the substrate; a hydrophobic thin layer over the dielectric layer; providing a conductive upper plate; and a coating-hydrophobic thin layer on the surface of the conductive upper plate; Step S98: conducting the conductive layer by the spacer, rr space , : The electrode that conducts the electrowetting phenomenon is applied to the conductive upper plate for the liquid medium and the electrode, and the substrate with the conductive layer is also provided as the conductive upper plate, and further, Qing materials on the board and more Ο 3 So that the count detection module having a light emitting element and 1,314,162 an analysis unit, and a separating device may be provided at least one side of the electrode, and can also be applied in a thin layer on the hydrophobic surface of the conductive plates of. Please refer to the eleventh drawing, which is a schematic view showing the manufacturing process of the microfluidic detecting device of the present invention. In the figure, a substrate 81 is first provided and a conductive layer 82 is formed, and a photoresist 83 is coated on the conductive layer 82. The photoresist 83 is used to protect the conductive layer 82 of the electrode to be formed by exposure and development, and is not protected by chemical etching. The conductive layer 82 forms the electrode 84, removes the photoresist 83 on the electrode 84, covers a dielectric layer 85 on the electrode 84 and the substrate 81, and applies a hydrophobic thin layer 86 over the dielectric layer 85 to provide a The conductive upper plate 87 of the conductive layer 82 is coated with a hydrophobic thin layer 86 on the conductive layer 82 of the conductive upper plate 87, and then the conductive upper plate 87 and the portion of the substrate 81 are replaced by the spacer 88. A space 89 is formed between the electrodes 84, or a space 89 is formed with all of the electrodes 84 for the operation of a dielectrophoretic phenomenon or an electrowetting phenomenon. Please refer to the twelfth figure, which is a schematic diagram of another microfluidic detecting device with mixing capability according to the present invention. In the figure, the micro-flow detecting device M0 is adapted to detect a liquid object to be tested. The detecting device M0 includes at least one mixing region M1, a flow region M2 and at least one detecting module 32. The mixing region M1 has a conductive upper plate. (not shown in the figure) and a plurality of first electrodes M3, the conductive upper plate covers all the first electrodes M3, and is mixed with a first fluid M4 and a second fluid M5 between the conductive upper plate and the first electrode M3. Forming a liquid analyte, the flow region M2 has a conductive upper plate (not shown) and a plurality of second electrodes M6 arranged in a string by the second electrode M6 for the flow of the liquid analyte, and The area of the second electrode M6 is smaller than the area of the first electrode M3. The detecting module 32 has a light-emitting element 322 and an analyzing unit 321, and the detecting light source 322 emits a detection light source 323 to detect the light-emitting ability of the liquid to be tested. Body illuminating, thereby detecting a sample of the liquid analyte flowing in the flow region 14 1314162, and the mixing region M1 is formed by energizing the conductive upper plate and flowing the first electrode Μ 3 turns to generate an electric field Electric power a phenomenon of mixing the first fluid Μ4 and the second fluid Μ5, and the flow region M2 also generates an electric field by energizing the conductive upper plate and circulating the second electrode Μ6 to generate an electrowetting phenomenon to drive the liquid analyte. The type of movement of the droplets, or the flow region M2 can also generate an electric field by energizing the conductive upper plate and electrically connecting the adjacent plurality of second electrodes Μ6 to form an electrowetting phenomenon, so that the liquid analyte can be formed into strips. And driving the liquid analyte to be in a strip shape along the first step by energizing the second electrode Μ6 in front of the liquid analyte and the last second electrode Μ6 in the liquid analyte. The other end of the direction in which the two electrodes 排列6 are arranged moves. Please refer to the thirteenth drawing, which is a schematic diagram of another microfluidic detecting device with mixing capability according to the present invention. In the figure, the micro flow detecting device 适用0 is adapted to detect a liquid analyte, the detecting device Μ0 at least comprising a mixing region M1, a flow region M2, at least one detecting module 32 and at least one separating device L1, wherein the mixing The area M1 has a conductive upper plate (not shown in the figure) and a plurality of first electrodes M3. The conductive upper plate covers all the first electrodes M3, and is mixed with a first fluid M4 between the conductive upper plate and the first electrode M3. Forming a liquid analyte with a second fluid M5, the flow region M2 has a conductive upper plate (not shown) and a plurality of second electrodes M6 arranged in a string by the second electrode M6 for liquid storage The flow of the test object, and the area of the second electrode M6 is smaller than the area of the first electrode M3. The detection module 32 has a light-emitting element 322 and an analysis unit 321 , and the light-emitting element 322 emits the detection light source 323 to excite the liquid sample to be tested. The illuminating L2 of the illuminating ability is used to detect the sample of the liquid analyte flowing in the flow region M2, and the mixing region M1 is energized by the conductive upper plate and the first electrode M3 is circulated. Generating an electric field Forming an electrowetting phenomenon to mix the first fluid 15 1314162 M4 with the second fluid M5, and the flow region M2 also generates an electric field by energizing the conductive upper plate and circulating the second electrode M6 to form an electrowetting phenomenon. Driving the liquid test object to move in the form of droplets, or the flow region M2 can also generate an electric field by energizing the conductive upper plate and continuously energizing the adjacent plurality of second electrodes M6 to form an electrowetting phenomenon. The test object forms a strip shape, and the liquid test object is driven in a manner by energizing the second electrode M6 in front of the liquid test object and the last second electrode M6 where the liquid test object is located. The pattern of the shape moves along the other end of the arrangement direction of the second electrode M6. At the same time, the separating device L1 is disposed on both sides of the flow area M2 and is located on the same plane, and the analysis unit 321 detects the light emitted by the sample. At L2, the sample is collected by the separating device L1, and the purpose of detecting and collecting the sample in the liquid test object is achieved. In the above-mentioned twelfth and thirteenth drawings, the first electrode, the second electrode and the conductive upper plate are generally made of a metal material, and a dielectric layer is covered on the surfaces of the first electrode and the second electrode to avoid boiling of the liquid analyte. Or electrolysis, and the conductive upper plate can be made of conductive glass, and a thin layer having hydrophobic properties can be coated on the surface of the dielectric layer and the conductive upper plate to increase electrowetting, and the first fluid is generally In the case of a mixture containing at least one sample, the second fluid is generally a mixture containing at least one labeled antibody, and the sample is generally a bacteria, a virus, a cell, a protein molecule, a drug molecule, a DNA molecule, an RNA molecule or a chemical molecule. Wherein, the label antibody is generally preferably a fluorescent dye, a nano particle, a quantum particle or other luminescent dye, and the light-emitting element is preferably a laser, ultraviolet light or infrared light related element to excite the label to emit light. Please refer to Fig. 14 for a schematic view of still another microfluidic detecting device of the present invention. In the figure, the micro-flow detecting device W0 is adapted to detect a liquid analyte, the detecting device W0 comprising at least a plurality of electrodes W1 and at least one detecting module 32, wherein the electrodes W1 are located in the same plane, and all 16 1314162 The electrodes w 1 are arranged in a string as a flow region of the liquid analyte. The detection module 32 has a light-emitting element 322 and an analysis unit 321 , and the light-emitting element 322 emits the detection light source 323 to excite the liquid in the liquid to be tested. The sample emits light, thereby detecting the liquid analyte to be tested in the flow region, and the flow of the liquid analyte is generated by the electrode W1 in turn generating an electric field to form an electrowetting phenomenon to drive the liquid analyte. Moving in the form of droplets, or by energizing the conductive upper plate and electrically connecting the adjacent plurality of electrodes W1 to generate an electric field, forming an electrowetting phenomenon, forming a liquid sample to form a strip shape, and then The electrode W1 in front of the liquid analyte is energized and the last electrode W1 in which the liquid analyte is located is de-energized. In this manner, the liquid analyte is driven in a strip pattern along the direction of the electrode W1. Move the other end. Please refer to the fifteenth figure, which is a schematic diagram of still another microfluidic detecting device of the present invention. In the figure, the micro-flow detecting device W0 is adapted to detect a liquid analyte, the detecting device W 0 comprising at least a plurality of electrodes W1, at least one detecting module 32 and at least one separating device D1, wherein the electrode W1 is located The same plane, and all the electrodes W1 are arranged in a string, as a flow area of the liquid analyte, the detection module 32 has a light-emitting element 322 and an analysis unit 321 , and the light-emitting element 322 emits the detection light source 323 to excite the liquid sample. The illuminating ability of the sample illuminates D2, thereby detecting the liquid analyte flowing in the flow region, and the flow of the liquid analyte is generated by the electric field of the electrode W1 to form an electrowetting phenomenon to drive The liquid analyte is moved in the form of a droplet, or the electric sample is formed by energizing the conductive upper plate and energizing the adjacent plurality of electrodes W1 to generate an electric field to form an electrowetting phenomenon. And driving the liquid analytes in a strip form along the electrode W1 by energizing the electrode W1 in front of the liquid analyte and the last electrode W1 where the liquid analyte is powered off. The other end of the movement is moved. At the same time, the separating device D1 is disposed on both sides of the electrode 17 1314162 W1 of the flow area, and is located on the same plane, and when the analyzing unit 321 detects the light D2 emitted by the sample, it is separated. The device D1 collects the sample and achieves the purpose of detecting and collecting the sample in the liquid test object. In the above fourteenth and fifteenth figures, the electrode is generally made of a metal material, and a dielectric layer is covered on the surface of the electrode to avoid boiling or electrolysis of the liquid analyte, and the coating on the dielectric layer is hydrophobic. a thin layer of sexual properties to increase electrowetting. The liquid analyte is generally a mixture containing at least one sample. These samples are generally bacteria, viruses, cells, protein molecules, drug molecules, DNA molecules, The RNA molecule or the chemical molecule is equal thereto, and the sample is bound to a label antibody, and the label of the label antibody is generally preferably a fluorescent dye, a nano particle, a quantum particle or other luminescent dye, and the light-emitting element is more The elements associated with laser, ultraviolet or infrared light illuminate the excitation label. The above is intended to be illustrative only and not limiting. Any equivalent modifications or alterations to the spirit and scope of the present invention are intended to be included in the scope of the appended claims. BRIEF DESCRIPTION OF THE DRAWINGS The first figure is a top view of a microfluidic cell biochip of the prior art; the second figure is a schematic cross-sectional view of a microfluidic cell biochip of the prior art, the third figure A schematic diagram of a process for a closed channel of the prior art; a fourth diagram is a schematic diagram of a microfluidic detection device of the present invention; and a fifth diagram is a schematic diagram of another microfluidic detection device of the present invention; Figure 1 is a schematic diagram of a microfluidic detection device with mixing capability. 18 1314162 FIG. 7 is a schematic diagram of another microfluidic detection device with mixing capability according to the present invention; The operation of the mixing region of the microfluidic detecting device of the present invention is not intended, and the ninth drawing is the operation of the flow region of the microfluidic detecting device of the present invention, and the tenth is the microfluid of the present invention. The flow chart of the manufacturing method of the detecting device, the eleventh drawing is a schematic diagram of the manufacturing process of the microfluidic detecting device of the present invention; the twelfth figure is another microfluidic test with mixing ability of the present invention BRIEF DESCRIPTION OF THE DRAWINGS FIG. 13 is a schematic view of another microfluidic detection device having mixing capability according to the present invention; - FIG. 14 is a schematic view of still another microfluidic detecting device of the present invention; The fifteenth diagram is a schematic diagram of another microfluidic detection device of the present invention. [Main component symbol description] 22: Groove; 23: Upper cover, 30: Microfluidic detection device; 31: Electrode; 32: Detection module; 321: Analysis unit; 322: Light-emitting element; I 〇: Microfluidic cell Biochip, II: detection light source; 12: fluorescent dye antibody; 13: virus that immunoreacts with fluorescent dye antibody; 14 and 15: direction; 21: slit; 19 1314162 323: detection light source; 83: light Resistance; 41: separation device; 84: electrode; 42: light; 85: dielectric layer; 50: microfluidic detection device; 86: thin layer; 51: mixed region; 87: conductive upper plate; 52: flow region; 88: spacer; 53: first electrode; 89: space; 53 532, 533, 534, 535 S91~S98: process steps; and 536: electrode; si~s4: process step; 54: first fluid; M0 : microfluidic detection device; 55: second fluid; M1: mixing region 56: second electrode; M2: flow region 61: separation device; M3: first electrode 62: light; M4: first fluids S1 and S2: Direction; M5: second fluid a, b, c, d, e, f and g: M6: second electrode generation L1 : separation device X: liquid droplet of liquid analyte; L2: light; D: direction; W0: microfluidic detection device; 71: glass substrate; W1: electrode; 72: photoresist; D1: separation device : and 81. Substrate, D2: Light. 82: conductive layer; 20 1314162 / the second fluid via an electric field generated by electrifying the conduct up-plate and electrifying the first electrodes by turns. The flow area drives the fluid sample via an electric field generated by the second electrode. Designated representative map: (1) The representative representative of the case is: (6). (2) A brief description of the symbol of the representative figure: 32: detection module; 321: analysis unit; 322: light-emitting element; 323: detection light source; 50: micro-flow detection device; 51: mixed region; 52: flow region 53: first electrode; 54: first fluid; 55: second fluid; and 56: second electrode. 8. If there is a chemical formula in this case, please disclose the chemical formula that best shows the characteristics of the invention: IX. Description of the Invention: [Technical Field] The present invention discloses a microfluidic detecting device and a manufacturing method thereof, particularly The electric field drives the liquid analyte to achieve the purpose of detecting the sample in the liquid analyte.