TWI312448B - Agent-based control architecture - Google Patents

Description

In the year of 91,135, η 利用 利用 利用 利用 利用 利用 利用 利用 利用 利用 利用 利用 利用 利用 利用 利用 利用 利用 利用 利用 利用 利用 利用 利用 利用 利用 利用 利用 利用 利用 利用 利用 利用 利用 利用 利用 利用 利用 利用 利用 利用 利用 半导体 半导体 半导体 半导体 半导体The whole batch of process and world-wide, stable defects may be such as the output of the clothing temperature 1 and the mechanics

92226 (amendment).ptc

The field of semiconductor device manufacturing is particularly related to the automated manufacturing environment in which the body agent controls (r e c 1 p e ). There is a driving force that drives the work of the circuit device. This is made and improved. In addition, the defect is also the accumulation of crystals, including micro-rapid heat treatment. A batch of wafer-making tools for the process tools is currently in the market. More specific format for viewing, and also for real-time parameters.) Monitoring. This reproducibility, 1312448 V. Inventive Description (1) [Technical Fields of the Invention] The present invention is generally related to a technique for processing wafers by autonomous active processing [Prior Art] In the semiconductor industry - straight, memory The combined rate of devices and the like. The customer's need for more reliable positioning has further enhanced the manufacture of devices for such semiconductor devices, such as the cost of manufacturing various components, and the various systems in which such electrical deposition tools are provided. In the past few years, there have been process tools in the domain that lack the advanced parameters such as force and (that is, the rate and correctness to improve the quality and reliability of computers and electronics such as micro-processing, reliability, and output. The need to install some of the 'integrated circuits such as electro-crystals such a transistor' can reduce the cost of a complete circuit device for each transistor by reducing the typical transistor. Shirt stepping machine, money engraving tools, tools, ion implants Into the tool and other processes - group process steps. The basic skills of the basics have been more refined. However, despite the many commercially available items on the field, such tools often lack the ability of historical parameters. Lack of event recording, current system. Graphic display, and remote 1312448 Case No. 91135512 - 4 年 日 _ _ _ _, invention description (2) key process parameters with parameters, etc. caused the most Good control. The variability described above is revealed due to differences in batches, differences between batches, and differences between tools, which may result in variations in product quality and performance; The ideal monitoring and diagnostic system for such tools will provide a means of monitoring this variability and provide an optimized means of controlling critical parameters. A technique for improving semiconductor process lines includes the use of control throughout the plant. The system automatically controls the operation of various process tools. The manufacturing tools communicate with a manufacturing architecture or network of process modules. Each manufacturing tool is typically connected to a device interface. The device interface is connected to, A machine interface that facilitates communication between the manufacturing tool and the manufacturing architecture. The L-interface of the machine may be part of an Advanced Process Control (APC) system. The APC system is activated according to the is. Control description language program (C〇ntr〇i script) 'This, the description language program can be used to automatically capture the process execution A software program for the required data. Semiconductor devices are often stepped through multiple manufacturing tools 'to perform multiple processes' to produce information about the quality of the processed semiconductor device. During the process 'may occur, it will affect the manufacturing Various events of the performance of the device, that is, changes in the process steps will result in changes in device performance, such as critical dimensions (cri Ucai dimensions, simplification ==), doping levels (丨e ve丨s ), contact 卩And, * and particulate contamination, etc., may affect the final performance of the device. According to the performance model, the various tools in the process line are used to eliminate the change of the process. Generally, the tools of the control 1 include the lithography step. Advance, grinding tools, etching tools, and case number 91135512 1312448 V. Invention description (3) I.._...一----------------------- -----------; deposition tools. The pre- and/or post-processed metrics are supplied to the process controllers of the tools. The process controller calculates operational technical data parameters such as process time based on the performance model and the metric information to attempt to bring the generated processed results as close as possible to the target value. Reducing change in this way will result in higher yields, lower costs, and higher device performance, all of which are equivalent to higher yields. Configuration control and efficiency issues often occur in decentralized computing environments such as APC systems throughout the plant. There are often many software developers writing control code to build these process controllers. A particular type of developer may develop a certain type of controller extensively. Each developer usually has a unique programming style and often relies on some of the routines he or she writes. For example, each developer may have a set of routines that serve as an interface to the repository or other entities within the APC architecture and to perform various mathematical functions and basic utility functions. One problem associated with such a configuration is that there is little consistency between the various process control description languages. A large number of customer-defined description language programs also pose configuration control problems and efficiency issues. Developers may be working on a different type of process controller for a different developer, and spend a considerable amount of time copying previously developed code. Destroping non-standardized code is a more time consuming task and further reduces efficiency. It is an object of the present invention to overcome or at least mitigate the effects of one or more of the problems set forth above. .

[Summary of the invention] -

92226 (Revised). ptc Page 9 1312448 1312448 Stalk _., 9. 512 IT Years of the Year Revision 5, Description of the Invention (4) One concept of the present invention is a manufacturing system that includes a process tool, Controller recording, and the first process medium. The process is configured to process the workpiece in accordance with operational techniques. The controller media is configured to determine the control actions associated with the processing of the workpiece in the process tool. The first process medium is associated with the process and the workpiece::! The configuration of the first process medium is set to be associated with the control medium and the configuration of the operational technical method is set. < Viewing and enabling, the other concept is a method of controlling and controlling the manufacturing tool according to the operation technique. The first process media associated with the process ί and the parent to the parent is materialized. The Jiang state is set to determine the controller media materialization of the control actions associated with the processing of the workpiece in the process tool. Second, ^ 曰 sigh this control action. The first process medium continuous twisting tool 1 sets the operation technique according to the control action. [Embodiment] Tearing, too 1: Monthly embodiment of the present invention. In order to take account of the clarity of the description, we will understand all the features of the embodiments. While many of the actual embodiments of the embodiments are made, there must be a system-related and business-related restriction, i. The limiter will vary from case to case. Article: We: Two;;] The work may be complicated and time-consuming, but for those who have the general knowledge of the '171"

---_ 索号.91135512 Five 'Invention Description (5) It will be a routine work. First, please refer to Fig. 1, which shows the production process (1〇〇) constructed and operated according to the _specific example of the present invention. The concept: the illustrated part of the production process (1 0 0) contains two The process stations (i 〇5 飑#mother one process station (10 5) contain electricity for communication with the process tool (115). The process stations (105) are communicated by (connected by =.). In the example, the communication link (120) of the computer device, such as the female fan and the sputum, includes a circle such as the network (125), etc. ([the computer system is part of the i. Several batches (130 days of Japanese yen (1 3 5)) are being processed in the manufacture of integrated circuit devices. Although the present invention is used for the application of gemstone π α m, it is not limited by this. It is forced to apply the present invention to other types of processes. Therefore, in the above-mentioned, production process (100), the batches (13 〇) of wafers 35) can be more commonly referred to as π workpiece π. In all embodiments, the #=程工具 (115) and any processes performed on the process tools are not necessarily semi-conductive The manufacture of the device is related. However, in order to facilitate the understanding of the present invention, in order to facilitate the understanding of the present invention, terms relating to semiconductor manufacturing will be retained when the invention is disclosed in the context of the illustrated embodiment. The selected portions of the hardware and software architecture of the computer device _ (110) according to the present invention are set. The figure does not show some aspects of the hardware and the body structure (for example, Individual interface cards, basic input/output systems (Basic Input/Output System; BIOS), and input/round-out drivers, etc., which are omitted for the sake of clarity of the description, so as not to obscure the present invention. However

92226 (Revised).ptc Page 11 1312448

__Case No. 91135512 V. Description of the Invention (6) And 'This technology will have a general knowledge of the bandits. It will be understood that the computer device is included in the disclosure of the present invention and contains many such routine functions. The software and hardware architecture of the computer will be in the illustrated embodiment, the workstation of the computer system, but the invention is a UNIX type computer such as a laptop computer or a desktop computer: This limit. In fact, you can use any type of electric power such as a supercomputer to smash your computer, a large computer, or (in some alternative embodiments, the computer device to implement the computer device to be the back-in process tool (115) 7 The brain device y1 (0 may not even be limited to the UNIX type operating system. It may also be free of: or control benefits. The invention is also a WindowsTM type operating system or a magnetic 砰=f system (eg system ^, D〇s) ^ ^ ^ 11 〇Perspect is equipped with "(10) (four) fixed embodiment system. The invention is not limited to a computer computer device (11 〇) and also includes a processor (2 〇 5), which is connected to some via a sink (215) Storage unit (1〇). The storage unit (2丨〇) will usually contain at least one hard disk (not shown) and random access memory (Rand01n Access)

Memory; referred to as RAM) (not shown). In some embodiments, the computer device (110) may also include, for example, a compact disc (not shown), or a floppy disk (not shown), or such as a magnetic tape (not shown) or high. A removable storage unit of some other form of storage unit, such as a capacity floppy disk (not shown). The processor (205) can be any suitable processor known in the art. For example, the processor can be a general purpose microprocessor or a digital signal processor (DSP). In the illustrated embodiment, the processor (2〇5

92226 (Revised). Pt Page 12 1312448 Λ - Case No. 91135512 Qt: Year b months 曰 Revision __ V. Invention Description (7) '- _) is by Advanced Micro Devices, Inc. "AMD") In the ancient +θ, the upper 1 is like the supplied Ath 1 οηΤΜ 64-bit processor, but the present invention is not limited thereto. Alternatively, the 64-bit U1 traSPARCTM or 32-bit microSPARCTM supplied by S u η M icr 〇systems, or any 11 anium T Μ or P entium T Μ class processor supplied by Intel Corporation can be used. , and the AlphaTM processor supplied by Compaq Computer Corporation. The electrical 1 brain device (110) includes a monitor (240), a keyboard (24 5), and a mouse (250), and the devices are included with their associated user interface software (25 5). Interface (260). In the illustrated embodiment, the user interface (260) is a Graphical User Interface (GUI)' but this is not required to practice the invention. Figure 2 also shows some of the selected parts of the software architecture of the computer unit (11 〇). In the illustrated embodiment, each computer device (1 1 〇) contains a software medium (2 6 5) stored in a storage unit (210). Please note that the software medium (265) can be stored in a location other than the computer equipment (110) in the production process (1〇〇). The location of the software medium (265) is not critical to the implementation of the present invention. Please also note that because the location of the software medium - (26 5) is not very important 'so some computer devices (1丨〇) may have multiple software media (265) stored in it, while other computer devices (110) may No software medium (265) is stored in it. An automated manufacturing execution system (MES) ( 270) such as WORKSTREAMTM supplied by Cons i 1 i um, I nc. (Mountain View, CA) is stored in at least one computer device (110).

92226 (Revised). ptc Page 13 Fresh · Case No. 91935512 Monthly 曰 1312448 V. Invention Description (8) System (125) Including the regional network, please refer to Figure 1, as described above. (丨丨 may also be part of ^ κ connected via the communication link (1 2 0 0). In this embodiment, m:: . Local Area Network; Un), network (Wide Area) Network; referred to as WAN), backup & 区域 System Network Network (SAN), intranet, or even the Internet. The computer system (1 25) adopts a networked master-slave architecture, and an alternative embodiment can also adopt a peer-to-peer architecture (peer_tn ^ ', , LU~Peer architecture). Thus, in alternative embodiments, the devices (110) can communicate directly with one another. These communication links (丨^) can:

It is a wireless, coaxial cable, fiber optic, or twisted pair cable pair. Computer S system (125) (using a computer system in each embodiment and the @甬, 讯链接 (1 20) are all related to the embodiment, and the computer system can be provided in any suitable manner. (125) and the 连结 连结 link (120). The computer system (125) can use any suitable communication protocol of the technology/study, such as the Transmission Control Protocol/Internet Protocol (Transfer Control Pr〇) T〇c〇l/lnternet °

Protocol; referred to as TCP/IP). The layer used to make the 135), and now refer to Figure 1 and Figure 2, the software media in a timely manner to guide the batch (10) wafer (13 ^ pass: process. The per-process tool (115) represents a resource at the target 2. For example, the process tool (丨丨5) may be a portion of the wafer (135) (ie, the wafer is doped, doped, or Manufacturing tool for heat treatment. Or, 115) can be used to evaluate the various parts of the production process (1〇〇): performance

92226 (Revised). ptc 1312448 Case No. 91135512 V. Description of invention (9) Month Day _ Corrected measurement tool. Therefore, the source of these secrets is used in the batch (13〇) of the corpuscular media (2 6 5), and the plurality of funds can be used to divide the τ by the process tools "(5):;^35) θ , 11C, the resources represented by the +A factory, and the 0 ^ at the process plants, in order to allocate these resources to the evaluation of the subsequent processing of the wafers (135) of the batch (130). . In the non-embodiment, the media (2 6 5) is self-configured at startup, intelligent, aware of the state, and instills a specific goal to be achieved by autonomously starting the action. . These software media (26 5) are also self-adjusting as their environment changes. In the context of Object 〇riented Programming (OOP), the software medium (2 65) is implemented as an object, but the invention can also be implemented using non-object-oriented techniques. The behavior of these software media is fairly straightforward and is a description language program or rule-based. The behavior is designed to achieve the selected objectives, for example, reaching the specified batch expiration date 'up to a predetermined quality level' to maximize machine utilization and to schedule random preventive maintenance. To drive these goals, the software media (2 6 5) serves as the interface for the MES (270) and is integrated with existing plant control systems (not shown). Those skilled in the art will appreciate, after reading the disclosure of the present invention, that such interface and integration will be performed in accordance with the MES (27 and the characteristics of the plant control system, but rather the embodiment-related values, as will be described below). Further, the software medium (265) can be specialized in a number of different levels. One level is "type", that is, the software medium (2 6 5) is in the production process (1) 〇〇) is represented by "consumer" or "supplier'^ more specifically, by software media

1312448 _ Case number 9Π35512_^<年U月月曰__ V. Description of invention (10) The type of entity represented in the body production process (100) determines that the software medium (2 6 5) represents the consumer Or supplier. For example, the software medium (26 5) may represent a batch (130) of wafers (135) (ie, π batch media ", process tool (1 15) (ie, "machine media"), or process Materials (also known as "resource media).) Software media (26 5) can also be specialized by functionality (i.e., functions performed in the production process by software media (2 6 5). For example, The configuration of the software medium (2 6 5) can be configured to perform specific functions without necessarily representing a specific entity. For example, the configuration of the software medium (2 65) can be set to determine the process tool (11 5) The control action (ie, "controller medium") of the wafer (1 3 5) of the particular batch (130) processed in the process. The action taken by the controller medium can depend on the batch (1 30) Characteristics, and characteristics of the process tool (1 15). Depending on the particular embodiment, the controller medium can be called by a batch of media or machine media. In the illustrated embodiment, the controller media is throughout its life. It is associated with a specific process tool (1 15) during the cycle, however, it can also be used The software medium (2 6 5) may perform other functions including scheduling therein. In an embodiment, which will be more fully described below, for example, there may be a scheduling medium, a processing medium, and a controller medium. Please note that these software media (2 6 5) do not necessarily have an one-to-one mapping relationship with entities in each manufacturing domain such as batches (1 30) or process tools (115). A set of software media (2 6 5) represents most of the domain entities. For example, a batch (130) or process tool (115) can have scheduling media and processing media. The controller media can be specific to Process tool (11 5) is associated with and can be processed by one of the media (ie, with the batch)

92226 (Revised).ptc Page 16 1312448 ^-^135512 Year 0^^ Amendment 5. Invention Description (11) ii: Set or have the processing medium (115) associated with the helper tool). In order to support the special object of the exclamation, to show the specialized behavior in order to support, the domain entity functions in a single state. In this particular embodiment, the software is used to implement f 2fm. In the piece guide program π. In the ten-technical, software "Media 8/26) in the term of object-oriented computing, the human media is "autonomous, the name of the initiative, and the J 2 software media can respond to the local media." Definitions, configuration settings, workers, (4), equipment, and manufacturing worlds. Soft objects can consist of one or more soft objects, and dry soft objects. • Inversely, the element can be solved, and the function of one object can be compared with other two technologies: the solution can be described as being combined with each object. We have an associated function. The & function is combined into a single, and in addition, in this particular embodiment, the "configurable configuration" is used. In this particular software medium (2 65) is a description of the behavior of the software medium, which can be modified to control ("_-n'), 4 set " control spin benefits"

92226 (Revision).ptc Page 17 The knob is a configuration of the software media human body medium that can be set externally. Control Use flexibility and/or system adjustments. , two parameters or characteristics, to provide OTTM ---~, some characteristics specified to refer to 1312448 case number 91135512 five, invention description (12)

A curve that leads to system decisions. More specifically, 4 the processing of the software medium (2 6 5) and the Λ 返 返 返 语言 语言 语言 来 返 返 返 返 返 语言 语言 语言 语言 语言 语言 语言 语言 语言 语言 语言 语言 语言 语言 语言 语言 语言 语言 语言 语言 语言 语言 语言 语言 语言Implementing these descriptors in JPython ^ 彳 特定 特定 特定 特定 特定 特定 特定 Python Python is a two-way jav program

Java programming language. Additional information can be obtained from the website <http://www.jpython.org/> via the open source code of the Internet. Including the JPython download, therefore, in this specification, some parts of the detailed description are presented in the form of a software-implemented program, and the soft-sequence is presented as ^u*^^ Λ The procedure involves the operation of the computer 铋 main -, soil - tvf. ^ « ± 丄 料 料 。 。 。 。 。. Deferred descriptions and representations are 孰4 from 士斗,Tt, 疋 此项 此项 此项 此项 此项 此项 此项 此项 此项 此项 此项 此项 此项 此项 此项 此项 此项 此项 此项 此项 此项 此项 此项 此项 此项 此项 此项 此项 此项 此项 此项 此项 此项 此项 此项 此项 此项 此项 此项The tool of this technology. The 4 programs and operations need to be inconsistent, but the form of these physical quantities is two-way, ^ n can be stored, transmitted, combined, compared, and used in other ways as a second. ^ ^, Electrical Signal, magnetic signal, or first signal. When the delay signal is called a bit, _ ^ -TS 4 value, element, symbol, word 70, term, or number, etc., it has been proved that the jing is θ & π u t - for general use. Hanging is more convenient, mainly but however, we should keep in mind that the terminology is related to the appropriate physical quantity, and ^: the term and, his similar AA / a 4l! MX, a and only applies to these The convenience of physical quantity is only δ. Unless there is a 苴# F名", his special statement, or in the description, it is easy to see 'otherwise, throughout the disclosure of the present invention, these descriptions mean the actions and procedures of an electronic device, and An electronic device is operatively represented as physical (electronic, magnetic, or within a storage unit of an electronic device)

Page 〗 8 Case No. 91135512 1312448

5. Description of invention (13) ______ Within the light, the amount of data, and convert the data into the same ~ within or the physical quantity of the transmission device or display device 7F for the description of the terminology of the defective unit includes (but Not limited to, his information. Indicates this calculation ", "decision 11, or "display", etc.. Handling 'operations", please also note that the media is usually in the form of a certain form of Cheng Ming. The software implements the mode coding, or implements the software implementation by the ontology on the media. The program: := the transmission of the magnetic, (such as a floppy or hard disk drive) or optical (for example) : Second reading:: is ompact Dlsk Read Only Memory; referred to as CD_R ', and can be read-only or random access. @样地, the stranded electric gauge, coaxial electric gauge, optical fiber, or this technology if 'Transmission media. The invention is not limited to any particular embodiment of the production process (i) that can be implemented under the Advanced Process Control (APC) architecture. The APC system consists of a production process (lots to batches in 3) Secondary control and error detection/classification A decentralized software system consisting of dry exchangeable standardized software components. The software media (2 65) of the present invention and its operations are layered in the upper portion of the APC system to achieve a semi-autonomous operation of the semiconductor manufacturing process. The software components of the system are based on the System Technology and Advanced Process Control (APC) architecture of the Semiconductor Integrated Manufacturing (SEMI) architecture of the Semiconductor Equipment and Materials International (SEMI). Implementing architectural standards. CIM can be obtained publicly from SEMI (SEMI E8 1 - 0 6 9 9-

92226 (Revised). ptc Page 19 1312448 ^ _ Case No. 91935512 Rev. __ V. Invention Description (14) CIM Architecture Provisional Specification for CIM Framework Domain Architecture) and APC (SEMI E93-0999 - Specification for the CIM Architecture Advanced Process Control Component). SEMI's contact information is: 8310 Capital of Texas Highway North, Suite 290 Austin, TX 78731; telephone number 512-349-2422; fax number 512-349-2442; website address <http://www.semi.org> . This particular architecture relies heavily on object-oriented programming software, and the object object management group (〇bj ect Management Group; 0MG) uses a common object request broker architecture (Common Object Request Broker Architecture) ; referred to as CORBA) and C0RBA_Service specifications. It is also easy to publicly obtain information and specifications of the 〇MG C0RBA architecture. One of the functions that can be adapted to perform the functions of the APC system of the present invention is that the software system is a Catalyst system commercially available from KLA-Tencor, Inc. KLA-Tencor's contact information is: 1 60 Rio Robles, San Jose, CA 9 5 1 34; telephone is 40 8-87 5-6 0 0 0; fax is 40 8-87 5- 3 0 3 0; <http://www.kla-tencor.com>. Additional information related to the Catalyst system can also be obtained from KLA-Tencor's website <http://www.kla-tencor.com/controlsolutions/cataly stapc.html. Referring now to Figure 3, there is shown an implementation of a production process (300) using a software medium (2 6 5) in accordance with another embodiment of the present invention.

92226 (Revised). ptc Page 20 Case No. 91135512 1 _ 丨 ... V. Description of Invention (15) 1312448 方块 Block diagram of the modified example. A batch of scheduling media (media (320) representative example * (4) 2 and; batch process wide On, ^ field pirate evasion and machine process media (34 0) represents an exemplary process tool 5: the batch The secondary scheduling medium (31 0) negotiates with various entities such as the production process (3, ^ scheduling medium (33〇), etc.) to make the necessary resources. For example, batch scheduling media and == ^ H〇n Pr〇t〇C〇1" method to arrange the process tool 5) privately to the time course of the batch (130). Time, the tool (115) receives the batch: owe (13 〇) * to process the U called the batch process medium (32 〇) and / or machine process media (34 (ΐί 4 like the batch process medium (32〇) and machine process media (115) controller media (35G), in order to determine the configuration of the necessary tooling method for the process tool to set the batch (13〇) mediation (urn Gan Batch process media (32〇) or machine process media implementation 丨 Φ, any one can call the controller media (35 0). In an action ^ batch process medium (32 〇) can determine the necessary Control. Measure the data of the secondary coarse B and the characteristics of the offset (130) (for example, the size (ORn / - electrical metric data, etc.) is transmitted to the controller media. Similarly, the machine process medium (34 〇) can Data relating to the time gate of the process worker (eg, the intervening time, information from the last cleaning to the present (3, 3, tool status, etc.) is transmitted to the controller medium (〇) in an alternative embodiment 'Storage of data relating to the characteristics of the batch (1 30) and the Tailing Tools (11 5). (360) in a centralized deposit where shellfish health, and the media controller (350) accessible

92226 (Revised).pt Page 21 Case No. 91135512 1312448

V. Description of invention (16) The data storage unit (3 60). The data storage unit can be configured to store information such as the status of the tool including the pre-processed and processed metric data, and the batch priority order. The specific control actions taken by the controller medium (<5〇) = "5〇) will now be described in more detail with respect to the actual example; For example, if the process tool (丨丨5) is a CMp tool, $, the medium (3 50) can receive the thickness measurement before grinding ('for example, the thickness of the higher microstructure, the thickness of the lower microstructure) ), and the grinding time required for the target thickness after grinding. In the case where the process tool (115) is an etching tool, the controller medium (35〇' can establish the process tool (115) according to the thickness measurement before and/or after etching. Etching performance model. The controller medium (35〇) can use the control model of the tool (11 5) to generate its predictions. The control can be developed empirically using conventional linear or nonlinear techniques. The control model can be a simpler equation-based model (for example, equations such as linear, talented, or weighted average), or a model such as a neural network model or a Principal Component Analysis (PCA) model. a more complex model such as a projecti〇n to Latent Structure (PLS) model. The specific implementation of the model may vary with the selected model building technique. The controller medium (350) determines operational technique parameters such as buttoning time, plasma power, temperature, gas pressure, and reactant gas concentration to reduce thickness variations after etching. During the "media configuration settings in the controller (350) is. Other types of process tools (115) may have other control operation (i.e., the first

92226 (Revised).ptc Page 22 1312448 Case No. 91135512 U Month 修正 Amendment V. Invention Description (17)

When the controller medium (3 50 is materialized), the overall configuration variable used is defined by the controller medium (350). In the illustrated embodiment, these holistic variables include a system preset from the Reei ' Management System (RMS) (ie, the current process used to store the process tool (1 15)). The technical method of the technical method sets the value of the integrity of the database) and the value of the environment variable (context variable). The environmental variable value defines a control thread and usually includes tools such as tool identification.

The value of each variable such as the batch number and the job number. In addition, the value is provided to any necessary baseline variable. Examples of such variable values include an email notification list of error notifications, a stoppage value, and a maximum crystal allowed in a batch of ."sub"batch ("chi 1 d" 1 〇t) The number of rounds, and the variable values of the front-process layer information (feedforward information) that can be used by the controller medium (3 5 〇). The controller medium (3 50) can use the batch number and wafer quantity value set in the overall configuration variables and determine the batch number, family name, and parent batch name (parent name). ), equipment, number of wafers, and status (ie, the batch is a parent batch or sub-batch)

The value of ). The previously defined environmental information and RMs information can be used to set the value that the controller medium (350) uses to calculate the control action. For example, the controller medium (3 50) can use the values defined in the RMS and use the environmental information (or, control) to set the value of the control model parameters. A specific example would be to set the etch rate value used in the control model based on the environment of the particular etch process chamber and the etch rate value of the etch process chamber defined in the RMS.

1312448

V. INSTRUCTIONS (18) In addition, the controller medium (3 50) can use the name and use the query from the data storage unit (, flat and I red layer information. The controller medium (3 50) can check and Specially extract each element in the feedforward metrics array, and fill in the missing values for the missing values. The target of the previous process can be used to set a default, default value. The pre-, /, and sub-measurements used by the controller media (35〇) can also be used to set other methods for setting the default value of the missing feedforward information value. The medium (3 50) is configured to query the resource to retrieve the control storage unit (360 and state structure associated with the current control thread. The key value can be used to store the dd first and the required key value from the data. Take the thread status data. The controller medium (35〇) is 7^ (3 6 0)撷 the most recent batches of the environment variable processing and search for the sorting resource to the thread state data. If such a value is found , then the equivalent = medium, defined by the user of the control model , the function calculates and == contains the thread state value ^ if no value is found in the stack (35.) can be searched up along the data storage level] and controller J thread status value - P The data is collected from all layers. It is a fake heap, and the class with the same contains the same capital #, but the information has different media to be used (the 350^ can be tested for risk (je〇pu, its way is in Gong In the material storage unit (36G), execute the risk stack (je〇Pardy stack) (that is, from the top, the batch number value. This value can be compared with the batch number in the risk category^---- ——______ heart threshold

92226 (Revised). ptc Page 24 industry = the various components processed on this particular thread constitute the case number 91135512 1312448 V. Invention Description (19) Value (this is a value usually specified in RMS) . If the risk threshold is not exceeded, the controller medium (3 50) can continue to operate. If the threshold is exceeded, the controller medium (3 50) can abort before deciding the control action of the current batch and send a pop-up display to instruct the operator to stack from the risk. A batch execution metric event selected in the batch list in the middle. As previously described, the controller medium (350) uses the previously determined status and target information to calculate controller inputs (process technology method updates). The controller medium (3 50) then transmits the result of the control action to the machine process medium (340), and the machine process medium (34 0) updates the process tool before processing the batch (130). (1 1 5) operational technique. In some embodiments, more than one controller medium (305) may be materialized for processing of the batch (130). For example, if the process tool (115) is a lithography stepper, the controller medium (350) can be called to control over 1 ay and can be controlled by calling another controller medium (3 50). Key size. The plurality of controller media (350) can be used to adjust various stepper parameters, such as exposure dose, exposure time, and focal length, using feedback information from the processed wafer. In another example, a deposition tool such as a tool for forming a polysilicon layer may also have a plurality of controller media (305) for controlling grain size and polycrystalline layer such as polycrystalline germanium. The parameters such as the thickness. When the controller media (3 50) is called, the environmental variables are checked to determine which individual controller media (300) need to determine the control action. The job identification code indicates the process to be executed (for example, polycrystalline stone eve

92226 (Revised). ptc No., p. 25, 1312448 _ Case No. 9Π35512 V. Description of Invention (20) Correction of the gate masking layer to the second interlayer dielectric masking layer (I LD). Each controller medium (3 50) is required only under certain environmental conditions, and each controller medium (3 5 0 ) is executed only when these environmental conditions are met. For example, the CD controller medium (35 0) may only be executed in the polysilicon masking process, but may not be performed in the second IL D masking process. Alternatively, the overlay controller media (350) can be executed in both masking process events described above. As described in this article, using a media-based control architecture increases overall plant efficiency and provides greater automation. More specifically, the proactive active media (2 6 5) with scheduling is scheduled and will begin batch scheduling and processing. In general, better process control reduces product variability, which in turn increases product performance and profitability. The particular embodiments disclosed above are for illustrative purposes only, and the invention may be modified and practiced in a different and equivalent manner. In addition, the present invention is not limited to the details of the structure or design shown herein except as described in the claims below. Accordingly, it is apparent that the particular embodiments disclosed above may be changed or modified, and all such variations are considered within the scope and spirit of the invention. Accordingly, the protection sought by the present invention is described in the scope of the following claims.

92226 (Revised). ptc Page 26 1312448, ___ Case No. 91135512_^年月V?日______ Simple description of the drawing [Simple description of the drawing] If you refer to the above description and cooperate with the drawings, BRIEF DESCRIPTION OF THE DRAWINGS In the drawings, the same reference numerals identify similar elements, and the drawings are: FIG. 1 conceptually illustrates a portion of a particular embodiment of a production process constructed and operated in accordance with the present invention; Figure 2 is a conceptual partial block diagram of selected portions of the hardware and software architecture of the computer device of Figure 1, and Figure 3 is a second production process constructed and operated in accordance with the present invention. A block diagram that is conceptualized as a conceptual description of the scheduling medium, the processing medium, and the controller medium. The present invention is susceptible to various modifications and alternative forms, which are shown in the form of a particular embodiment of the invention, and the invention is described in the specific embodiments disclosed herein. The present invention, which is defined by the scope of the patent application of the present invention, will cover the spirit and falsification, equivalents, and substitutions that are not invented. All t in the dry circumference [Main component symbol description] 1 05 Process station 1 1 5 Process tool 125 Network 135 Wafer 21 0 Storage unit 240 Monitor 100, 300 Production process 110 Computer device 120 Communication link 13 0 Batch 205 Processor 215 bus system

1312448 Case No. 91135512 Correct Description of the Drawings 245 Keyboard 255 User Interface Soft 265 Software Media 310 Batch Schedule Media 330 Machine Schedule Media 350 Controller Media 2 5 0 Mouse Body 2 6 0 User Interface 2 7 0 Manufacturing Execution system 3 2 0 Batch process media 3 4 0 Machine process media 3 6 0 Data storage unit

92226 (Revised).ptc第28页

Claims (1)

1312448 Case No. 91935512 V January > 曰 曰 Amendment VI, Patent Application Range m Supplement 丨 1. A manufacturing system comprising: a process tool configured to process a workpiece according to a technical method of operation; And the configuration of the root 2 · If the application, the third. If the application of the controller 4. If the application of the action is the first operation 5. If the application of the controller medium, the controller The configuration of the medium is set to determine a control action associated with processing of the workpiece in the tool; in the first process medium, the first process medium is associated with at least one of the process tool workpiece, and the first The process medium is set to: connect the controller medium, receive the control action, and set the configuration of the operation technology method according to the control action. The system of claim 1, further comprising a second process medium, the second process medium being associated with the process tool and one of the workpieces not associated with a process medium. The system of claim 2, wherein the configuration of at least one of the first process medium and the second process medium is set to be associated with the control medium. The system of claim 2, wherein the first process medium is associated with a workpiece, and the configuration of the first process medium is set to be connected to the controller medium to receive the control action and transmit the control to The configuration of the second process medium associated with the process tool, %, and the two process media is set to be configured as a technical method according to the control action. The system of claim 1 wherein the controller medium is configured to receive data associated with the workpiece and to control 92226 (Revised). ptc Page 29 Month > 曰1312448 Case No. _12 VI. Scope of Application for Patent--- Model and Information Associated with the Workpiece 竽6·If the scope of patent application is 5 System, the middle of the pot in the t-action. Should the group be set to be related to the workpiece? The medium of Cheng Media. Supply,,, σ the controller 7. As in the system of claim 5, further, the configuration of the poor storage unit is stored in a single material, wherein the controller medium is relevant. For example, the status of the second item of the patent application scope is set to: receive and the system first to present it: the controller medium action. ...with the associated information to determine the control 9. If the configuration of the application for the δ item of the patent garden is set to be the same as the medium:,, ' /, A the medium of the first process medium. , Wang /, the relevant information is provided to the control 10. If the patent application scope " yuan, the data storage unit / system, further includes the data storage list associated information, complex = I, set to store and The process storage unit 'in order to take the I;::" medium suitable for accessing the data error 11. For example, the patent application scope, the information associated with the u-tool. The state is set to: receive data associated with the resource associated with the group of tools of the controller medium, and the data associated with the process, and the control model, and Workpiece related actions. Determine the control by the information associated with the tool 1312448 ^ 91135512 Sixth, the scope of application for patents ~ ___ 12 • If the system of patent application scope U, the unit into the unit 'the: the configuration of the material unit is set to storage;:: material storage related information, and the processing tool phase 7 Hai The component phase controller medium is adapted to access the data, wherein the data associated with the workpiece, and the processing tool are extracted and the system is as follows: 1. The system of claim 2, wherein the ^ Joint information. The configuration is set to the medium of the process medium to be associated with the workpiece (four), the configuration of the second process medium is set to provide the disk; the data associated with the controller is provided to the controller medium, and the 2 The configuration of the process tool is set according to the control model, the disk 2 = the manufacturer medium: and the data associated with the process tool. 14. The system of claim 1 of the patent scope, wherein the first process is implemented Medium and the controller medium. The object-oriented technology 1 5 - a manufacturing system includes: a process tool, the configuration tool of the process tool is configured to process the workpiece; according to the operation technology controller medium, the configuration of the controller medium is set in the process tool The processing associated with the processing of the workpiece is determined by the batch processing medium associated with the workpiece; the Ϊ action; one of the machine process times associated with the process tool and the machine process medium, such as the batch The medium, and the machine process mediator" 2 2 2% connected to the town control system action, and according to the control move 2 ~, not determined: receive the control action and set the operation technology method 92226 (Revised). Pic 31. 1312448 Case No. 91135512 Amendment 6. Patent application scope configuration. 16. The system of claim 15 wherein the batch of process media is configured to receive the control action and to communicate the control action to the machine process medium. 17. The system of claim 15 wherein the controller medium is configured to communicate the control action to the machine process medium. 18. The system of claim 15, wherein the configuration of the controller medium is configured to: receive data associated with the workpiece, and determine the control based on the control model and data associated with the workpiece. action. 1 9. The system of claim 18, wherein the configuration of the batch of process media is configured to provide information associated with the workpiece to the controller medium '20. The system further includes a data storage unit configured to store data associated with the workpiece, wherein the controller medium is adapted to access the data storage unit for capturing associated with the workpiece data of. 2 1. The system of claim 15 wherein the configuration of the controller medium is configured to: receive data associated with the process tool, and base the data on the control model and the process tool. And decide the control action. 2 2. The system of claim 2, wherein the machine process media is configured to provide information associated with the process tool to the controller medium. 2 3. If the system of patent application No. 21 is further included, data storage is further included. 92226 (Revised). ptc Page 32 1312448 Case No. VI, the scope of application for the patent 〇〇早元5 The storage unit 24 associated with the tool, such as the patent system and the data control related to the set-up tool Action Ο 25. For example, please contact the patent controller media workpiece associated with the patent No. 26, as in the patent configuration configuration setter media, the associated configuration material, and The operation 〇 27 • If the patent technology is implemented in the implementation of the manufacturer's medium 0 Β - ---- - configuration is set to store the controller media suitable for the tool related system 'where the piece is associated with the control model tool The associated system is further configured to be set as a storage unit associated with the storage tool, the process tool phase system, wherein the configuration of the associated data is set to the controller medium, the model, and the data associated with the tool And the system, which is the 'machine process ill355l2_ °{) Information on the material storage unit, which is to be taken from item 15 of the scope: receiving information from the union, and the material storage unit of item 24 of the scope of the process and The process is suitable for accessing the information of the capital, and the composition of the 15th item with the motorcycle is to be supplied with the workpiece process media data of the workpiece to the batch process medium of the fifteenth item according to the scope of the control process tool. The information associated with the process worker accessing the data is stored. The controller media material, and the data associated with the system and the workpiece are determined to be stored in the data stored in the workpiece, wherein the data associated with the workpiece is retrieved. The batch process medium is provided to the control to be associated with the process tool and the controller medium is associated with the control device, and the control device is configured to control the configuration according to the operational technical method. Processing the workpiece 1312448 Case number 91135512 The method of applying for a patent range process tool includes the following steps: materializing a first process medium associated with at least one of the process tool and the workpiece; setting the configuration to determine the process tool The controller medium of the control action associated with the processing of the workpiece is materialized; the first process medium is coupled to the controller medium to receive the control action; and the first process medium and the process tool are associated In order to set the configuration of the operating technique according to the control action. The method of claim 28, further comprising the step of: materializing a second process medium associated with the process tool and the workpiece that is not associated with the first process medium. The method of claim 29, further comprising the step of connecting at least one of the first process medium and the second process medium to the controller medium. 3 1. The method of claim 29, further comprising the steps of: transmitting the control action from the first process medium to the second process medium; and: making the second process medium and the process tool Connected to set the configuration of the operational technology method in accordance with the control action. 3 2. The method of claim 28, further comprising the steps of: providing information associated with the workpiece to the controller medium; 92226 (Revised).ptc Page 34 1312448 Case No. 91135512 Amendment 6. The scope of the patent application and the control action are determined based on the control model and the data associated with the workpiece. 3 3. The method of claim 3, further comprising the step of: linking the first process medium to the controller medium to provide information associated with the workpiece. 3. The method of claim 3, wherein the step of providing data associated with the workpiece to the controller medium further comprises the step of: setting the controller media configuration to A data storage unit that stores the lean material associated with the workpiece. 3 5. The method of claim 28, further comprising the steps of: providing information associated with the process tool to the controller medium; and determining based on the control model and data associated with the process tool This control action. The method of claim 35, further comprising the step of: linking the first process medium to the controller medium to provide information associated with the process tool. 3 7. The method of claim 35, wherein the step of providing data associated with the process tool to the controller medium further comprises the step of: causing the controller medium to be associated with a configuration setting A data storage unit that stores data associated with the process tool. 3 8. If the method of applying for the patent scope item 28, further includes the following steps 92226 (Revised).ptc Page 35 1312448 Case No. 91135512 Amendment 6. Patent Application Scope: Provides information related to the process tool and the workpiece to the controller medium; and determines the control action based on the control model and the data associated with the process tool and the workpiece. 3. The method of claim 3, wherein the step of providing data associated with the process tool and the main component to the controller medium further comprises the step of: causing the controller medium to be associated with The configuration is set to store a data storage unit of the data associated with the process tool and the workpiece. 40. The method of claim 29, further comprising the steps of: connecting the first process medium to the controller medium to provide a lean material associated with the workpiece, to enable the second process medium The controller medium is configured to provide data associated with the process tool; and the control action is determined based on the control model and data associated with the process tool and the workpiece. A method of controlling a process tool configured to process a workpiece according to a method of operation, comprising the steps of: calling a batch process medium associated with the workpiece; calling a machine process medium associated with the process tool; calling a controller medium configured to determine a control action associated with processing of the workpiece in the process tool; 92226 (Revised). ptc Page 36 1312448 Case No. 9Π35512 Amendment 6. The scope of the patent application allows one of the batch and machine process media to be associated with the controller medium to receive the control action; and to make the machine process medium And the process tool is linked to set the configuration of the operational technical method according to the control action. 4 2. The method of claim 4, further comprising the step of transmitting the control action from the batch process medium to the machine process medium. 4 3. The method of claim 4, further comprising the steps of: providing information associated with the workpiece to the controller medium; and determining the control model and the lean material associated with the workpiece. This control action. 4. The method of claim 4, further comprising the step of: linking the batch of process media to the controller medium to provide information associated with the workpiece. 4 5. The method of claim 4, wherein the step of providing data associated with the workpiece to the controller medium further comprises the step of: setting the controller media configuration to storage A data storage unit of the data associated with the workpiece. 4 6. The method of claim 4, further comprising the steps of: providing information associated with the process tool to the controller medium; 92226 (Revised). ptc Page 37 1312448 Case No. 91135512 Amendment 6. Scope of Application The control action is determined based on the control model and the data associated with the process tool. 4 7. The method of claim 46, further comprising the step of: linking the machine process medium to the controller medium to provide information associated with the process tool. 4: The method of claim 46, wherein the step of providing data associated with the process tool to the controller medium further comprises the step of: setting the controller media configuration to A data storage unit that stores data associated with the process tool. 4 9. The method of claim 4, further comprising the steps of: - providing information associated with the process tool and the workpiece to the controller medium; and according to the control model and the process tool and the The control action is determined by the data associated with the workpiece. The method of claim 49, wherein the step of providing data associated with the process tool and the workpiece to the controller medium further comprises the step of: connecting the controller medium to a group The state is set to store a data storage unit of the data associated with the process tool and the workpiece. 5 1. The method of claim 4, further comprising the steps of: connecting the first process medium to the controller medium to provide a tribute associated with the workpiece, 92226 (Revised). ptc Page 38 1312448 Case No. 91935512 We have revised the patent scope to link the second process medium to the controller medium to provide the information associated with the process tool; And determining the control action based on the control model and the data associated with the process tool and the workpiece. 5 2. A manufacturing system for controlling a process tool configured to process a workpiece according to an operational technique, comprising: means for materializing a first process medium associated with at least one of the process tool and the workpiece; Setting the configuration to a device media entity that determines a control action associated with processing of the workpiece in the process tool; means for causing the first process medium to interface with the controller medium to receive the control action; And means for causing the first process medium and the process tool to be coupled to set the configuration of the operational technology method in accordance with the control action. 5 3. A manufacturing system for controlling a process tool configured to process a workpiece according to an operational technique, comprising: a device for calling a batch process medium associated with the workpiece; calling a machine process associated with the process tool a device for setting a call to a controller medium that determines a control action associated with processing of the workpiece in the process tool; linking one of the batch and the machine process media to the controller medium Receiving the device for controlling the action; and associating the machine process medium with the process tool to 92226 (Revised).ptc第39页 92226 (Revised), ptc第40页