1312406 . 九、發明說明： ^月/日修(更)正替換頁 【發明所屬之技術領域】 本發明係提供一種^ A、#， 裡加熟爐，尤指一種以含氮氣體 為加熱介質用於烘烤電子元件的加熱爐或烘箱。 【先前技術】 按’在陶竞電子元件燒結前應將例如稀釋液或黏 著劑等有機溶劑裂解出，為熟悉該項技術者所了解。 • 減製程’ 一般係將陶兗電子元件載置在加熱爐内， 並將含有氮氣的空氣引入該加熱爐内加熱及藉由風 扇鼓動以形成循環氣流，該受熱的循環氣流可將熱量 傳遞給加熱爐内的電子元件，而當氣流溫度到達一給 j值後，電子元件内的有機溶劑將會裂解，並經由循 環氣流的排放從加熱爐的出口排出到外界。 供烤電子元件用的加熱爐（或棋箱）-般係取含 # 魏氣的空氣流做為傳熱介質，使得循環氣流的含氧 量可受控制以保護陶竟電子元件不致氧化，並可免除 爐體内部有產生燃燒氣爆之虞。然而，該類型的習用 加熱爐也存在若干有待改善的缺失，例如：就排氣方 面而言，該從電子元件裂解的有機溶劑都係經由加熱 爐之廢氣排放出口所連接的排放管路直接排放到外 界，因而會對環境造成污染；就進氣方面而言，由於 含氮氣體之溫度低，這樣的入爐溫度要逐步加熱到給 5 1312406 Γ--——η 、芦月/日修(更)正替換頁 定溫度的時間長，所耗費的電1原大，ίΕΓ外，1¾内d電 子元件也有遭到不穩定受熱的問題，良率受影響；再 就使用安全性而言，當操作錯誤或是其他因素造成加 熱爐内部之壓力遽增時，仍然有發生氣爆之虞。 申請人曾提出M254909號「具有緩衝裝置之爐體」 新型案用以解決上述壓力遽增所可能造成的問題。於 今’本發明將針對上述進氣與排氣方面的問題提出— • 改善方案及實體設計。 【發明内容】 緣此’本發明之主要目的在提供一種加熱爐，該 加熱爐排放之有機溶劑廢熱能源可被有效地回收，並 以熱交換的方式傳給即將輸送到加熱爐體内的含氮 氣體，使得該含氮氣體的入爐溫度能有效提高，進而 提升該加熱爐之加熱效率及使電子元件的受熱能穩 0 定者。 一 本發明之另一目的在提供一種適於提供烘烤電 子π件用之加熱爐配置的熱回收裝置，該熱回收裝置 可將加熱爐所排出的廢氣熱能傳給即將輸入到加熱 爐體内的含氮氣體，且使得該加熱爐所排出的有機溶 劑廢氣在排放到外界前會部份凝結為液體，以利收 集，進而提升該加熱爐之加熱效率並降低該有機 廢氣對環境的污染者。 6 1312406 忙年6月/日修(更)正替換頁 依據本發明形成的加熱爐，包含： 一爐體，具備一加熱腔室、至少一氣體引進入口 及至少一廢氣排放出口； 一進氣系統，包含將含氮氣體引入該爐腔室内的 至少一進氣管路；及 一熱回收裝置，包含： 一内部具有氣流通道的外筒，該外筒具有至少一 導入口用以接收爐體所排放的廢氣及至少一排放口 用以放出該導入之廢氣；及 至少一組設置在該外筒内的熱交換管，該熱交換 管具有與進氣管路連接的第一端及與爐體之入口連 接的第二端，使得含氮氣體在引入該爐體之前可回收 廢氣能源者。 上述爐體腔室内最好具有複數隔開的氣流通道 用以提供含氮氣體流過而加熱電子元件，且該腔室的 前側的爐門_最好設有對應各氣流通道的測溫棒 預留孔用以插置測溫棒檢測流經各氣流通道的 氣流溫度。 該爐體内部具有可受馬達帶動的風扇用以形成 :環氣流’且進氣系統最好包含一第二進氣管路，使 得含氮氣财引人爐體前可對馬達與風扇降溫。 7 !3124061312406 . Nine, invention description: ^ month / day repair (more) is the replacement page [Technical field of the invention] The present invention provides a ^ A, #, Riga cooked furnace, especially a nitrogen containing body as a heating medium A furnace or oven for baking electronic components. [Prior Art] The organic solvent such as a diluent or an adhesive should be cleaved before the ceramic component of the ceramics is sintered, as is known to those skilled in the art. • Reduced process 'Generally, the ceramic electronic components are placed in a heating furnace, and nitrogen-containing air is introduced into the heating furnace and agitated by a fan to form a circulating airflow, which can transfer heat to the heat. The electronic components in the furnace are heated, and when the temperature of the gas reaches a value of j, the organic solvent in the electronic component is cracked and discharged from the outlet of the furnace to the outside through the discharge of the circulating gas stream. A heating furnace (or a chess box) for baking electronic components generally adopts a gas flow containing #魏气 as a heat transfer medium, so that the oxygen content of the circulating gas stream can be controlled to protect the ceramic electronic components from oxidation. It can eliminate the possibility of burning gas explosion inside the furnace body. However, this type of conventional heating furnace also has a number of defects to be improved. For example, in terms of exhaust gas, the organic solvent cracked from the electronic component is directly discharged through the discharge line connected to the exhaust gas discharge outlet of the heating furnace. To the outside world, it will cause pollution to the environment; in terms of intake air, due to the low temperature of the nitrogen-containing gas, such furnace temperature should be gradually heated to 5 1312406 Γ---η, Lu Yue / Ri Xiu ( Moreover, the time for replacing the temperature of the page is long, and the power consumed is 1 large, and the electronic components in the 13⁄4 d are also subject to unstable heating, and the yield is affected; in terms of safety, When the operation error or other factors cause the pressure inside the furnace to increase, there is still a blast. The applicant has proposed a new case of M254909 "Flame body with cushioning device" to solve the problems caused by the above-mentioned pressure increase. In the present invention, the present invention will address the above problems with intake and exhaust gases - • improvement schemes and physical design. SUMMARY OF THE INVENTION [Therefore, the main object of the present invention is to provide a heating furnace, the organic solvent waste heat energy discharged from the heating furnace can be efficiently recovered and transferred to the inside of the heating furnace by heat exchange. The nitrogen gas can effectively increase the temperature of the nitrogen-containing gas into the furnace, thereby improving the heating efficiency of the heating furnace and stabilizing the heating energy of the electronic component. Another object of the present invention is to provide a heat recovery device suitable for providing a furnace configuration for baking electronic π pieces, which can transfer the heat energy of the exhaust gas discharged from the heating furnace to the inside of the heating furnace. The nitrogen-containing gas, and the organic solvent exhaust gas discharged from the heating furnace is partially condensed into a liquid before being discharged to the outside to facilitate collection, thereby improving the heating efficiency of the heating furnace and reducing the pollution of the organic waste gas to the environment. . 6 1312406 Busy Year June/Day Repair (More) Replacement Page The heating furnace formed according to the present invention comprises: a furnace body having a heating chamber, at least one gas introduction inlet and at least one exhaust gas discharge outlet; a system comprising at least one intake line for introducing a nitrogen-containing gas into the furnace chamber; and a heat recovery device comprising: an outer cylinder having an air flow passage therein, the outer cylinder having at least one inlet for receiving the furnace body The exhaust gas and the at least one exhaust port are used for discharging the introduced exhaust gas; and at least one set of heat exchange tubes disposed in the outer cylinder, the heat exchange tube having a first end connected to the intake pipe and the furnace The second end of the body inlet connection allows the nitrogen-containing gas to recover the exhaust gas energy source prior to introduction into the furnace body. Preferably, the furnace chamber has a plurality of spaced air flow passages for supplying a nitrogen-containing gas to flow through and heating the electronic components, and the furnace door on the front side of the chamber is preferably provided with a temperature measuring rod corresponding to each air flow passage. The holes are used to insert a temperature measuring rod to detect the temperature of the air flowing through the respective air flow channels. The inside of the furnace body has a motor-driven fan for forming a ring air flow and the air intake system preferably includes a second air intake pipe to cool the motor and the fan before the nitrogen gas is introduced into the furnace body. 7 !312406
只泮《月/日修⑻正替換,I 外筒内部最好設置-可 筒’且該熱交換管較好係呈螺旋狀地繞在該内筒外壁 上並構成輸送3氮氣體之進氣管路的部份，使得含氮 氣體在引入該爐體之前可有效回收廢氣能源者。 該熱回收裝置最好設有一收集盒用以收集廢氣 的冷凝膠（冷凝物質）。 關於本發明之其他目的、優點及特徵，將可由以 下較佳實施例的詳細說明並參照所附圖式來了解。 【實施方式】 可有多種不同的結構來實施本發明。現將僅為例 子仁非用以限制的—具體實施例，並參照所附圖式就 本發明之較佳結構内容說明如下： 請參閱第-圖、第二圖所示，依據本發明形成的 加熱裝置包含-用於烘烤電子元件的爐體卜用以將 含氮氣體引人該爐體1内的-進氣系統2及-熱回收 裝置3，#中’該爐體！大抵上係屬制技術，概要 說明如下。 該爐體1内部具有一腔室u，該腔室u的前側 有一開口 12及可封閉該開口 12的一爐門13;爐體工 内並具有加熱系統（圖中未示）用以將導人爐體内的 氣體加熱，以及具有可受馬達16帶動的風扇15用以 使欠加熱的氣體形成循環氣流；在相鄰爐門13之爐 1312406 更) 體腔室11内可提供一箱體内部 具有複數隔室171用以個別地提供電子元件置放架 14放入，各隔室171的前後貫通而形成氣流通道， 使得又加熱且嗳風扇15帶動循環的氣流會經由各氣 流通道對電子元件（圖巾未示）加熱以釋放有機溶 只J，對應各隔至形成的氣流通道，並在該爐門13内 侧設有測溫棒預留孔131，該等測溫棒預留孔131可 # ㈣置測溫棒並連接線路至爐體外的溫控裝置（圖中 未示）用以檢測流經各氣流通道的氣流溫度，藉以判 斷調整正確的加熱氣流溫度。 在爐體1上設有至少一氣體引進入口 18及至少 一廢氣排放出σ 19，在本實施例中，係在該爐體i 的背面111設置-入口 18用以將氣體導入腔室11及 設有-出口 19用以將陶莞電子元件供烤後產生的有 0 機溶劑廢氣排出爐體1。 進氣系統2包含至少一進氣管路，在本實施例， 係包含-第-進氣管路21與一第二進氣管路22;該 進氣系統2並包含氣體供應源（圖中未示），在本實 施例中，係包含可個別流經第—圖之導管㈡卜232、 流量計241、242及調壓閥251、252而導入一預拌混 合筒26内混合的-空氣源及一氮氣源，該混合筒加 9 1312406 贫年/月/日修(更)正替換頁 设置在爐體1上方的控制箱in内部並具有二氣體j供 給口 261、262，而該第一進氣管路21與第二進氣管 路22個別具有與該二供給口連接的第一端211、221 及可將混合氣體引入爐體1内的第二端212、222， 在本實施例中，該第二進氣管路的第二端222係從風 扇15處引入爐體1内，使得所輸送的含氮氣體之低 溫可用以降低馬達與風扇運作時產生的溫度。 配合第三圖、第四圖所示，該熱回收裝置3包含 一内部具有氣流通道313的外筒31及設在該外筒31 内的至少一組熱交換管33，該外筒31具有一廢氣導 入口 311、一廢氣排放口 312，該導入口 311連接於 該爐體1的出口 19，而排放口 312的上方有一内部 具有抽風機（圖中未示）的排煙管路37(如第二圖）， 當爐體出口 19排放的廢氣通過該導入口 311進入外 筒31内部的氣流通道313，並由該排放口 312排出 後’可經由該排煙管路37排放到外界。 該外筒31内部進一步設置一可做為熱交換介面 的内筒32，該内筒32具有以一連接管35和外筒導 入口 311連通的一入口 321與複數出口 322，在本實 施例中’係在靠近該内筒32之呈封閉的頂端上設置 該入口 321 ’且在靠近該該内筒32之底端周圍設置 ?Γ私月/日修(更)正替換頁 !312406 該複數出口 322。 熱交換管33具有一入口端331及一出口端332, 該入口端331與第一進氣管路21的第二端212連 接’而出口端332以一導管36連接到爐體1的入口 18，使得導入該第一進氣管路21的含氮氣體要引入 該爐體1前，會先流入該熱交換管33内預熱；在本 實施例中，該熱交換管33係呈螺旋狀地繞在該内筒 32外壁上，使其内部界定一呈彎曲狀的流道333用 以延長含氮氣體流經該熱回收裝置3的距離，且在外 部形成一螺旋狀的傳熱接觸面用以提高其與内筒32 的熱交換面積。 參閱第四圖所示，依據本發明形成的加熱裝置， 當空氣源與氮氣源混合後的含氮氣體供給至第一進 氣管路21後，該含氮氣體的氣流將依圖中箭頭4所 指方向流入熱交換管33 ;同時，當陶瓷電子元件烘 烤後產生的有機溶劑廢氣流由爐體出口 19排出後， 將依圖中箭頭5所指方向流入該熱回收裝置3之氣流 通道313,即先流入内筒32之後再經出〇概流入 =卜筒31與内筒32中間的通道；因而，該廢氣流的熱 :會以熱交換方式傳給該即將輸人到爐冑1内部的 含氮氣體，使得含氮氣體的入爐溫度能有效提高，進 1312406 ___ 而提升該加熱爐之加熱效率。 再者，该熱回收裳置3之外筒31底端設有一開 口314’且在該開口 314下安裝一收集盒34用以收 集自該内筒32滴落之冷凝膠，即當流經内筒32的廢 氣流將熱能傳給含氮氣體之後，部份廢氣將凝結為冷 凝膠（冷凝物質）並從内筒32底端的出口 322流出， 而可加以收集，進而降低該有機溶劑廢氣之排放對環 b 境的污染。 在刖述說明書中，本發明僅是就特定實施例做描 述。依據本發明的特徵當可做多種變化實施或修改。 例如，氣體供應源不限制為氮氣與空氣之混合氣，其 它例如氳氣與氮氣之混合氣也可以，又本發明熱回收 裝置3的安裝位置不限制在該爐體丨的背面，其它適 當位置都可以。對於熟悉此項技藝人士可作之替換與 > 修改’仍將併入於本發明所主張的專利範圍之内。 【圖式簡單說明】 第一圖係本發明一實施例的立體示意圖，其中顯示爐 門打開的狀態； 第二圖係第一圖之侧視圖，並顯示爐門在關閉狀態； 第三圖係顯示本發明之熱回收裝置一立體示意圓；及 第四圖係顯示含氮氣體與廢氣流導入本發明之熱回 收裝置内的熱交換示意圖。 12 1312406Only the "month/day repair (8) is being replaced, the inside of the outer cylinder is preferably provided - the cylinder" and the heat exchange tube is preferably spirally wound around the outer wall of the inner cylinder and constitutes an air inlet for transporting 3 nitrogen gas. The part of the pipeline allows the nitrogen-containing gas to be efficiently recovered from the exhaust gas energy source before being introduced into the furnace body. Preferably, the heat recovery unit is provided with a collection box for collecting cold gel (condensed matter) of the exhaust gas. Other objects, advantages and features of the present invention will become apparent from [Embodiment] The present invention can be implemented in a variety of different configurations. The preferred structural aspects of the present invention will now be described by way of example only with reference to the accompanying drawings in which: FIG. The heating device comprises a furnace body for baking electronic components for introducing the nitrogen-containing gas into the air intake system 2 and the heat recovery device 3 in the furnace body 1, and the furnace body! It is largely based on the system technology, and the outline is as follows. The furnace body 1 has a chamber u inside, the front side of the chamber u has an opening 12 and a furnace door 13 which can close the opening 12; the furnace body has a heating system (not shown) for guiding The gas in the human furnace is heated, and the fan 15 that can be driven by the motor 16 is used to form a circulating airflow of the underheated gas; a cabinet interior can be provided in the furnace chamber 13 of the adjacent furnace door 13 The plurality of compartments 171 are provided for individually providing the electronic component placement frame 14 to be inserted, and the front and rear of each compartment 171 are formed to form an air flow passage, so that the airflow which is heated and driven by the fan 15 will flow through the airflow passages to the electronic components. (The towel is not shown) is heated to release the organic solution J, correspondingly to the formed air flow passage, and a temperature measuring rod reserved hole 131 is disposed inside the furnace door 13, and the temperature measuring rod reserve hole 131 can be # (4) The temperature control device (not shown) is placed on the temperature measuring rod and connected to the outside of the furnace to detect the temperature of the air flowing through each air passage, so as to judge the correct heating air temperature. The furnace body 1 is provided with at least one gas introduction inlet 18 and at least one exhaust gas discharge σ 19 . In the present embodiment, an inlet 18 is provided on the back surface 111 of the furnace body i for introducing gas into the chamber 11 and The outlet-outlet 19 is used to discharge the solvent exhaust gas generated by the ceramic electronic components from the ceramics to the furnace body 1. The intake system 2 includes at least one intake line, in the present embodiment, a first-intake line 21 and a second intake line 22; the intake system 2 includes a gas supply source (in the figure) In the present embodiment, the air contained in the premixed mixing cylinder 26 can be separately introduced through the conduit (2) 232, the flow meters 241, 242, and the pressure regulating valves 251, 252 of the first drawing. a source and a nitrogen source, the mixing cylinder plus 9 1312406 poor year/month/day repair (more) positive replacement page is disposed inside the control box in the furnace body 1 and has two gas j supply ports 261, 262, and the An intake line 21 and a second intake line 22 have a first end 211, 221 connected to the two supply ports and a second end 212, 222 that can introduce a mixed gas into the furnace body 1 in the present embodiment. In the example, the second end 222 of the second intake line is introduced into the furnace body 1 from the fan 15, so that the low temperature of the supplied nitrogen-containing gas can be used to reduce the temperature generated when the motor and the fan operate. As shown in the third and fourth figures, the heat recovery device 3 includes an outer cylinder 31 having an air flow passage 313 therein and at least one heat exchange tube 33 disposed in the outer cylinder 31. The outer cylinder 31 has a An exhaust gas inlet 311, an exhaust gas discharge port 312, the inlet port 311 is connected to the outlet 19 of the furnace body 1, and a discharge pipe 37 having an exhaust fan (not shown) inside is disposed above the discharge port 312 (eg Second, when the exhaust gas discharged from the furnace outlet 19 enters the air flow passage 313 inside the outer cylinder 31 through the inlet 311, and is discharged from the discharge port 312, it can be discharged to the outside through the exhaust pipe 37. An inner cylinder 32 as a heat exchange interface is further disposed inside the outer cylinder 31. The inner cylinder 32 has an inlet 321 and a plurality of outlets 322 connected by a connecting pipe 35 and an outer cylinder inlet 311. In this embodiment, The inlet 321 ' is disposed on the closed top end of the inner cylinder 32 and is disposed near the bottom end of the inner cylinder 32. The private month/day repair (more) positive replacement page! 312406 the plurality of outlets 322 . The heat exchange tube 33 has an inlet end 331 and an outlet end 332 which is connected to the second end 212 of the first inlet line 21 and the outlet end 332 is connected to the inlet 18 of the furnace body 1 by a conduit 36. Therefore, the nitrogen-containing gas introduced into the first intake line 21 is introduced into the heat exchange tube 33 to be preheated before being introduced into the furnace body 1. In the present embodiment, the heat exchange tube 33 is spirally shaped. Winding around the outer wall of the inner cylinder 32, defining a curved flow passage 333 therein for extending the distance of the nitrogen-containing gas flowing through the heat recovery device 3, and forming a spiral heat transfer contact surface externally It is used to increase the heat exchange area with the inner cylinder 32. Referring to the fourth embodiment, in the heating device formed according to the present invention, after the nitrogen-containing gas mixed with the nitrogen source and the nitrogen source is supplied to the first intake pipe 21, the gas flow of the nitrogen-containing gas will be according to the arrow 4 in the figure. In the direction indicated, it flows into the heat exchange tube 33. At the same time, when the organic solvent exhaust gas generated after the ceramic electronic component is baked is discharged from the furnace outlet 19, it flows into the air flow passage of the heat recovery device 3 in the direction indicated by the arrow 5 in the figure. 313, that is, first flowing into the inner cylinder 32 and then flowing through the outlet of the sub-tube 31 and the inner cylinder 32; thus, the heat of the exhaust gas flow is transmitted to the furnace 1 by heat exchange. The internal nitrogen-containing gas can effectively increase the temperature of the nitrogen-containing gas into the furnace, and increase the heating efficiency of the furnace by 1312406 ___. Furthermore, the heat recovery skirt 3 is provided with an opening 314' at the bottom end of the outer cylinder 31 and a collecting box 34 is installed under the opening 314 for collecting the cold gel dripping from the inner cylinder 32, that is, when flowing through After the exhaust gas flow of the inner cylinder 32 transfers the heat energy to the nitrogen-containing gas, part of the exhaust gas will condense into a cold gel (condensed matter) and flow out from the outlet 322 at the bottom end of the inner cylinder 32, and can be collected to reduce the organic solvent exhaust gas. The pollution of the emissions to the environment. In the description, the invention is only described in terms of specific embodiments. Many variations or modifications can be made in accordance with the features of the invention. For example, the gas supply source is not limited to a mixture of nitrogen and air, and other mixtures such as helium and nitrogen may be used, and the installation position of the heat recovery device 3 of the present invention is not limited to the back of the furnace body, and other suitable positions. Yes. Alternatives and >modifications' to those skilled in the art will still be incorporated within the scope of the claimed invention. BRIEF DESCRIPTION OF THE DRAWINGS The first drawing is a perspective view of an embodiment of the present invention in which the state in which the oven door is opened is shown; the second figure is a side view of the first figure, and shows that the furnace door is in a closed state; A three-dimensional schematic circle of the heat recovery apparatus of the present invention is shown; and the fourth figure shows a heat exchange diagram of the nitrogen-containing gas and the exhaust gas stream introduced into the heat recovery apparatus of the present invention. 12 1312406
?知月洲修(更)正替換頁 【主要元件符號說明】 1、爐體 11、腔室 111、背面 12、開口 13、爐門 131、測溫棒預留孔 14、置放架 15、風扇 16、馬達 17、箱體 171、隔室 18、氣體引進入口 19、廢氣排放出口 2、進氣系統 20、控制箱 21、第一進氣管路 22、第二進氣管路 221、211、第一端 212、222、第二端 231、232、導管 24卜242、流量計 251、252、調壓閥 2 6、混合筒 261、262、氣體供給口 3、熱回收裝置 31、外筒 31卜導入口 312、排放口 313、氣流通道 314、開口 32、内筒 321、内筒入口 322、内筒出口 33、熱交換管 331、入口端 332、出口端 333、流道 34、收集盒 35、連接管 36、導管 37、排煙管路 4、5、流向箭頭 13?知月洲修 (more) replacement page [main component symbol description] 1, furnace body 11, chamber 111, back surface 12, opening 13, furnace door 131, temperature measuring rod reserved hole 14, shelf 15, Fan 16, motor 17, housing 171, compartment 18, gas introduction inlet 19, exhaust gas discharge outlet 2, intake system 20, control box 21, first intake line 22, second intake line 221, 211 First end 212, 222, second end 231, 232, conduit 24 242, flow meter 251, 252, pressure regulating valve 26, mixing cylinder 261, 262, gas supply port 3, heat recovery device 31, outer cylinder 31b inlet port 312, discharge port 313, air flow passage 314, opening 32, inner cylinder 321, inner cylinder inlet 322, inner cylinder outlet 33, heat exchange tube 331, inlet end 332, outlet end 333, flow passage 34, collection box 35, connecting pipe 36, conduit 37, exhaust pipe 4, 5, flow arrow 13