1311610 九、發明說明： 【發明所屬之技術領域】 、本㈣係_1可攜無_動式微_及其製法，其兼 具光阻厚度可精確控制、翻模技術齡製作咖及成本、具彈 性之微栗浦結構應用範圍廣，以及控制部為簡單的可攜式結構 專功效。 【先前技術】 目前關於微果浦的研究已經有—段時間了，在微流體控制 系統中，微泵浦為其主要發展的關鍵元件，因為微流體控制系 統中，流體的輪送需經由微泵浦提供動力輪送流體。 1如何使微流體控制系統能精確的控概小流量，以及如何 設計及整合應用這些微流體系_元件，都與“微泵浦，，有 關’因此，微泵浦的設計就更顯得重要了；目前微果浦以薄膜 驅動流體融㈣方式，基本製作方法如下所述： ,[1 ]科奇(M.Koch)等人利用熱處理、極化及電極製作等矽 微加工程序’在石夕晶圓上沉積塵電材質作為其致動器，之後即 可完成壓電致動薄膜；至於其它相關結構包括致動腔室、懸臂 式止回閥門及出人σ也都是财微加工技術製作。以此一製作 方式成型之微泵浦’配合輸入電射ρρ_、作動頻率測他， 則微泵浦之最大流率為120/H/min，但是，其屋電薄膜製作 程序太複雜’不符合產業利用性。 f2J斯班色（〇. Spencer)等人所發表蠕動式微泵浦，主 5 1311610 要原理係利用相往復運動改變腔室的體積，*造成腔室内外 有-壓力絲推動流體機，其特點為配合三谢目位控制薄膜 =動來驅動麵_，進喊生_效果達職送流體的功 能’在15 Hz的頻率下流率可達到100//l/min，但是，其輸 送流體的效率料佳，且，鶴電路·，無法攜帶。1311610 IX. Description of the invention: [Technical field to which the invention belongs], (4) _1 can carry no _ dynamic micro _ and its production method, which has the thickness of the photoresist can be precisely controlled, the technology of the overturning technology and the cost, with The flexible micro-Lipu structure has a wide range of applications, and the control unit is a simple portable structure. [Prior Art] At present, the research on micro-powder has been in existence for a while. In the microfluidic control system, micro-pump is a key component of its main development, because in the micro-fluid control system, the transfer of fluid needs to pass through micro The pump provides power to pump fluid. 1 How to make the microfluidic control system accurately control the small flow, and how to design and integrate these microfluidic systems - components, all related to "micro pumping," Therefore, the design of the micro pump is even more important. At present, the micro-powder is driven by a film-driven fluid (four) method. The basic production method is as follows: [1] M. Koch et al. use heat treatment, polarization and electrode fabrication, etc. The dust-electric material is deposited on the wafer as its actuator, and then the piezoelectric actuated film can be completed; as for other related structures including the actuating chamber, the cantilever type check valve and the sigma σ are also made by the micro-processing technology. The micropump formed by this method is matched with the input electric ray ρρ_ and the operating frequency is measured. The maximum flow rate of the micropump is 120/H/min. However, the process of making the electric film is too complicated. In line with industrial applicability. f2J Spencer et al. published the peristaltic micropump, the main 5 1311610 principle is to use the phase reciprocating motion to change the volume of the chamber, * causing the pressure inside the chamber to push the fluid Machine, its characteristics With the three-than-mesh position control film = moving to drive the surface _, into the shouting _ effect of the job to send the fluid function 'at a frequency of 15 Hz flow rate can reach 100 / / l / min, but its fluid delivery efficiency Good, and, the crane circuit, can not be carried.
[3]溫格爾（Μ· A. Unger)等人選擇彈性聚合物（聚二甲基 石夕氧烧’其英文為p〇lydimethylsil_e，簡稱簡s)作為材 料，配合外接氣壓的方式驅賴賴形，研管道形狀之母模 經過聚二甲基魏_模和對位接合後，上方管道通入外加氣 壓’進而漏下方微管道之流體，以達到機流體的功能，者 使用一組鍾管道作動可當閥門結構，紐料組氣壓管^ 序擠壓則可作為_式泵浦，其缺點是氣歸道無流道交疊 面積小’所以其最高流率猶G. 14// 1/ffiin，並料接氣^ 驅動，相當不便，且無法攜帶。 因此’有必要研發出可革除f用結構弊病之裝置。 【發明内容】 :發明之主要目的’在於提供—種可攜無閥蠕動式微泵浦 及其製法，其光阻厚度可精確控制。 本發明之次要目的，在於提俾— # ^ ’、 、閥蠕動式微泵浦 及八製法，其以翻模技術減少製作時間及成本。 本發明之又一目的，在於撻供—德 及其製法，其具雜之縣軸構朗^廣__微泵浦 6 1311610 本發明之再一目的，在於提 就μ攜無_動式微泵浦 及4法’其配合控制部為簡單的可攜式結構。 本發明係提供1可攜無_動式微泵浦 法部分包括下列步驟： /'展 一 ·預備步驟； 二·微影成型步驟； 三·翻模步驟； 四·微泵浦接合步驟；以及 五.完成步驟。 至於本發明之微泵浦成品的結構部分，係由一微泵浦半成 品及一接合基材組成；該微泵浦半成品至少具有一微流道及一 致動腔體，5亥致動腔體上設置至少一壓電元件，該壓電元件受 一控制部控制，而可連動該致動腔體變形，以控制該致動腔體 輸出預定之螺動壓力。 兹以下列實施例並配合圖式詳細說明本發明於後： 【實施方式】 參閱第一、第二及第四圖，本發明係為一種『可攜無閥蠕 動式微泵浦及其製法』，有關其製法部分至少包括： 一 ·預備步驟11 :準備一基板20及一光罩30，該光罩 30至少具有一微流道圖案31及一致動腔體圖案32 ; 二·微影成型步驟12 :將一光阻40均勻塗佈於該基板20 上預定厚度（如第三圖所示），將該光罩30覆蓋於該光阻40 1311610 上，對該光罩30及該光阻4〇照射一紫外線61而進行曝光， 使該光罩30之微流道圖案31與該致動腔體圖案32轉印至該 ' 光阻40上；再對該光阻40進行顯影，以成型-母模結構5〇(如 第五圖所示）； ' 三.翻模步驟丨3 :於該母模結構50及該基板2〇上覆蓋 * 一翻模液70(參閱第六圖）’待該翻模液70固化成型後，即可 參 翻模成型一微泵浦半成品70A(如第七圖所示），其對應該光罩 3〇之微流道圖案31與致動腔體圖案32而形成至少—微流道 71及一致動腔體72 ; ' 目.微泵驗合步驟14 :將—接合基㈣接合於該微泵 . 浦半成品观上（參閱第八圖），成為-微泵浦成品（如第九圖 所示）； 五.完成步驟15 :將至少-壓電元件91接合於該微泵浦 # 成品（參閱第十一圖，於圖中以微泵浦半成品撤代表)之致動 腔體72外(如第切圖所示），該壓電元件9丨受-控制部92 控制而可產錢形(如第忙A及軒1騎示），進而可控 制該致動賴72細狀找纏力（如奸四 所示）。 不| 口 匕為本創作之可攜無閥螺動式微泵浦之製法。 井阻’於該預備步驟11中，該基板2g係初晶圓；該 糸選用JSR(THB-120N)型號之負光阻為較佳；並可先 1311610 透過- ANSYS槪倾，對就之縣舰品（可能是初始離 型結構）的微流道71進行流速效率之模擬分析，分析過程主要 以擴散器（如第十圖所示，也可以講是微流道71)入口寬度、 角度及長度為模擬重要參數，以得到最佳設計之尺寸(模擬結 果產生之數據如附件一之第G圖所示）；模擬結果以微流道 之入口寬度300/zm，角度1〇度(參醜件一之第A、第8、第 C及第D目’係分別顯示微流道71(朝液體流動方向，依需要 可選騎驗、漸歡、等纽其巾之-）航分縣5度、 10度15及20度之流速效率示意圖），長度&4mm ,致動腔 體72(亦可以簡稱為腔體）直徑1〇mm為較佳結構尺寸；該光罩 31係具有複數個微流道圖案31及複數個致動腔體圖案32。 於該微影成型步驟12中，係以多層（多次）塗佈方式，將 該光阻40均勻塗佈於基板20上，假設進行二次的光阻4〇塗 佈，則第一次可控制該基板2〇分別在第一段轉速15〇_、 lOsec ’以及第二段轉速500rpm、5sec的狀態下，進行光阻 40的塗佈，塗佈完以軟烤參數攝氏1〇〇度、9分鐘進行軟烤； 之後第一人控制該基板2〇在同於第—次的狀態下塗佈該光阻 40,並以同樣的軟烤參數聽行軟烤後，該光阻4〇膜厚約· _(如附件-之第E圖所示）’接著設—近紫外光光罩對準機 60發出曝光劑量約為棚0mj之紫外線.61，以對該光罩及 光阻40進行曝光’之後進行15至2〇分鐘的黃光顯影，再進 9 1311610 行30分鐘硬烤，即得到該母模結構5〇。 於該翻模步驟13中：該翻模液7〇係為聚二甲基石夕氧燒 (P〇lychmethylsii〇zane，簡稱pDMS)，在覆蓋於該母模結構 50上預定厚度（可能依實際需要而做改變）後，進行抽真空， 再以烘烤參數攝氏95度對其烘烤(如第六騎枕外框虛線 係表示置於烤箱帽烤)2G分鐘，使其固化後再進行拔模，即 翻模完成該微泵浦半成品7〇a。 於該微泵雜合步驟14巾：該接合紐80係為玻璃塊 材’亚可在該接合紐80於旋轉參數25〇〇聊、邪就的狀況 下’於其表面預先塗佈m接合結構81(膜厚約^ 之聚二甲基魏燒）’再將該微泵浦半成品7GA置於該接合基 材80上(也可以講是置於該接合結構81上）以供烤參輯氏 100度進行烘烤45分鐘，使該接合基材8〇與該微泵浦半成品 70A接合。 於該完成步驟15巾，電元件91上係預先塗佈該液態 之接合結構81(預定厚度）’再放置於該微泵浦成品之致動腔 體72上，待該接合結構81固化後即完成接合。 參閱第十四及第十五圖，該控制部92(設定24伏特)發出 預定之振盛頻率驅動該壓電元件91(有關該麗電片91及該控 制部92之電路圖請參閱附件—之第F.，使該壓電元件91 變形，假設該微泵浦成品之致動腔體72具有三個，則相對的 10 1311610 三個壓電元件91先後產生變形，並先後連動三個致動腔體72 分別蠕動至一第一蠕動位置Π、一第二蠕動位置P2及一第三 蠕動位置P3 ’如此反覆控制致動腔體72產生連續性之罐動壓 力，輸送流體。 亦即’本發明係利用“多層塗佈方式”，精確的控制負光 阻塗佈於基板上的厚度’接著利用黃光微影製程製作出母模結 構，再使用聚二甲基矽氧烷配合翻模技術，快速製作出高深寬 比之微泵浦成品（意指已封覆接合基材之微泵浦半成品），接著 於微泵浦成品之致動腔體上設置由控制部控制之壓電元件，即 可控制微泵浦成品之致缝體產生_而可輸送流體。 至於本發明之可攜細物式微泵浦的結構部分(參閱第 十一、第+[3] Wenger (Μ·A. Unger) and others chose an elastic polymer (polydimethyl oxalate), which is p〇lydimethylsil_e in English, referred to as s), and relies on external pressure. Lai shape, the shape of the pipe shape of the master mold after the polydimethyl-Wei-mode and the alignment of the joint, the upper pipe into the external pressure 'and then leak the fluid below the micro-pipe to achieve the function of the machine fluid, using a set of clocks The pipe action can be used as the valve structure, and the pressurizing tube of the new material group can be used as the _ type pump. The disadvantage is that the air return path has no small overlap area, so the maximum flow rate is still G. 14// 1 /ffiin, the material is connected to the gas ^ drive, quite inconvenient, and can not be carried. Therefore, it is necessary to develop a device that can eliminate the structural disadvantages of f. SUMMARY OF THE INVENTION The main object of the invention is to provide a portable valveless peristaltic micropump and a method for fabricating the same, and the photoresist thickness can be precisely controlled. A secondary object of the present invention is to improve the production time and cost by turning over the mold, the #^', the valve peristaltic micro-pump and the eight-factor method. Another object of the present invention is to provide a singularity and a method for producing the same, and the method of the invention is to have a multi-pneumatic micropump. The Puhe 4 method's cooperation with the control department is a simple portable structure. The present invention provides a portable non-moving micro-pumping method comprising the following steps: / 'expanding one preparatory step; two · lithography forming step; three · overturning step; four · micro pumping bonding step; . Complete the steps. As for the structural part of the micro-pumped product of the present invention, it consists of a micro-pumped semi-finished product and a bonded substrate; the micro-pumped semi-finished product has at least one micro-flow channel and a uniform moving cavity, and the 5-Hay actuated cavity At least one piezoelectric element is disposed, and the piezoelectric element is controlled by a control portion, and the actuation cavity is deformed to control the actuation cavity to output a predetermined screwing pressure. The present invention will be described in detail below with reference to the following embodiments: [Embodiment] Referring to the first, second and fourth figures, the present invention is a "portable valveless peristaltic micropump and its preparation method", The method for manufacturing the method includes at least: a preliminary step 11: preparing a substrate 20 and a mask 30, the mask 30 having at least one microchannel pattern 31 and a uniform moving cavity pattern 32; Applying a photoresist 40 uniformly on the substrate 20 to a predetermined thickness (as shown in the third figure), covering the photomask 30 on the photoresist 40 1311610, and the photomask 30 and the photoresist 4 Exposing an ultraviolet ray 61 to expose the microchannel pattern 31 of the reticle 30 and the actuation cavity pattern 32 to the 'resistor 40; and developing the photoresist 40 to form a mother The mold structure is 5〇 (as shown in the fifth figure); '3. The mold-turning step 丨3: covering the master mold structure 50 and the substrate 2〇 with a mold liquid 70 (refer to the sixth figure) After the mold-forming liquid 70 is solidified and molded, a micro-pumped semi-finished product 70A can be formed by molding (as shown in the seventh figure), which corresponds to the mask 3 The microchannel pattern 31 and the actuation cavity pattern 32 form at least a microchannel 71 and a uniform chamber 72; '. Micropump fitting step 14: bonding the junction (4) to the micropump. On the semi-finished product view (see Figure 8), become a micro-pumped finished product (as shown in Figure 9); 5. Complete step 15: Join at least the piezoelectric element 91 to the micropump # finished product (see the tenth In the figure, in the figure, the micro-pumped semi-finished product is taken out of the actuating cavity 72 (as shown in the cut-away view), the piezoelectric element 9 is controlled by the control unit 92 to produce a money shape (such as Busy A and Xuan 1 riding the show), and then can control the actuating Lai 72 to find the entanglement (as shown in the fourth). No | 口 匕 is the production method of the portable valveless screw type micro-pump. In the preliminary step 11, the substrate 2g is an initial wafer; the negative photoresist of the JSR (THB-120N) model is preferably used; and the 1311610 is first passed through - ANSYS, and the county is The microchannel 71 of the ship (possibly the initial release structure) performs simulation analysis of the flow velocity efficiency. The analysis process mainly uses the diffuser (as shown in the tenth figure, also referred to as the microchannel 71), the inlet width, angle and The length is the simulation of important parameters to get the best design size (the data generated by the simulation results are shown in Figure G of Annex I); the simulation results are the entrance width of the micro flow channel 300/zm, the angle is 1 degree (see ugly) Sections A, 8, C, and D of the first item show the microchannel 71 (in the direction of liquid flow, optional riding, gradual, and other towels). Degree, flow rate efficiency diagram of 10 degrees 15 and 20 degrees), length & 4mm, actuation cavity 72 (also referred to simply as cavity) diameter 1〇mm is a preferred structural size; the reticle 31 has a plurality of The microchannel pattern 31 and the plurality of actuation cavity patterns 32. In the lithography molding step 12, the photoresist 40 is uniformly applied to the substrate 20 by a multi-layer (multiple) coating method, and the second time can be applied for the second photoresist. The substrate 2 is controlled to apply the photoresist 40 in a state where the first-stage rotation speed is 15 〇 _, lOsec ' and the second-stage rotation speed is 500 rpm and 5 sec, and the soft-bake parameter is 1 degree Celsius after coating. Soft baking was performed for 9 minutes; after that, the first person controlled the substrate 2 and applied the photoresist 40 in the same state as the first time, and after soft baking with the same soft baking parameters, the photoresist 4 film Thickness _ (as shown in Figure E of the Attachment) 'Nextly, the near-ultraviolet ray aligner 60 emits an ultraviolet ray .61 with an exposure dose of about 0 mj to perform the reticle and photoresist 40. After the exposure, the yellow light development was carried out for 15 to 2 minutes, and then the hardening was carried out for 9 minutes at 9 1311610, and the structure of the master mold was obtained. In the mold-turning step 13, the mold-turning liquid 7 is a polydimethyl sulphate (P〇lychmethylsii〇zane, abbreviated as pDMS), and covers a predetermined thickness on the mother mold structure 50 (may be practical After the change is needed, vacuuming is performed, and then baked at a baking temperature of 95 degrees Celsius (such as the dotted line of the sixth riding pillow is placed in the oven cap) for 2G minutes, and then solidified and then pulled out. The mold, that is, the mold is turned over to complete the micro-pumped semi-finished product 7〇a. In the micropump hybrid step 14: the joint button 80 is a glass block 'Asia can be pre-coated with the m joint structure on the surface of the joint button 80 under the condition of rotation parameter 25 81 (polydimethyl weiwei with a film thickness of about ^) is then placed on the bonding substrate 80 (also referred to as the bonding structure 81) for baking the ginseng Baking was performed at 100 degrees for 45 minutes to bond the bonded substrate 8A to the micropumped semi-finished product 70A. At the completion step 15, the electrical component 91 is pre-coated with the liquid bonding structure 81 (predetermined thickness) and placed on the micro-pumped actuator chamber 72. After the bonding structure 81 is cured, Finish the joint. Referring to the fourteenth and fifteenth drawings, the control unit 92 (setting 24 volts) emits a predetermined oscillation frequency to drive the piezoelectric element 91 (see the attached circuit for the circuit diagram of the control unit 91 and the control unit 92). In the F., the piezoelectric element 91 is deformed. If the micro-pumped finished actuator chamber 72 has three, the opposite 10 1311610 three piezoelectric elements 91 are deformed successively, and three actuations are successively linked. The cavity 72 is respectively moved to a first peristaltic position Π, a second peristaltic position P2 and a third peristaltic position P3 ′ such that the actuation chamber 72 is repeatedly controlled to generate a continuous tank pressure to transport the fluid. The invention utilizes a "multi-layer coating method" to accurately control the thickness of the negative photoresist coated on the substrate. Then, the mother mold structure is fabricated by using a yellow light lithography process, and then the polydimethylsiloxane is used in combination with the mold-turning technique. Producing a high aspect ratio micro-pumped product (meaning a micro-pumped semi-finished product that has been sealed to the bonded substrate), and then placing a piezoelectric element controlled by the control unit on the micro-pumped finished actuator cavity Controlling the seam of the micro pumped product _ Generation but may deliver fluid. As the fine moiety may carry the micro-pump of the present invention (see the eleventh, the +
置至少一壓電元件91， 致動腔體72 ;該致動腔體π上設 該壓電元件91受一控制部92控制， 實務上，該微泵浦半成 79 irfe ^ be ^The at least one piezoelectric element 91 is disposed to actuate the cavity 72. The actuating cavity π is provided with the piezoelectric element 91 controlled by a control unit 92. In practice, the micropump is half-formed 79 irfe ^ be ^
^動該致動腔體72產生變形(如第十二A及第十二B圖 不）’進而可控繼致動腔體72輸出預定之鄉麼力。 如此為本創作之可攜無_動式微泵浦。 70A與該接合基材8〇間，以及 丨間，皆設置一接合結構81 (聚 實務卜，玆你石& ’簡稱 PDMS)。 1311610 、'可先透過ansys模擬軟體，對預定之微泵浦成品(可 能是初始__)的顯道71進行流速效率之龜分析，分 析過程主要以擴散器（如第十圖所示，也可以講是微流道71) 入口寬度肖度及長度域擬重要參數，以得到最佳設計之尺 寸(模擬結果產生之數據如附件一之第G圖所示）；模擬結果以 微流道71(朝液體流動方向，依需要可選擇漸縮狀、漸擴狀、 等寬狀其中之一)之入口寬度3〇〇μ，角度10度(參閱附件一 之第A、第B、第C及第D圖，係分別顯示微流道71角度分別 為5度10度15及2〇度之流速效率示意圖），長度& 4麵， 致動腔體72(亦可以簡稱為腔體)直徑1〇咖為較佳結構尺寸。 參閱第十四及第十五圖，該控制部92(設定24伏特)發出 預定之振盤頻率驅動該壓電元件91(有關該壓電片91及該控 制部92之電路圖請參閱附件一之第F圖），使該壓電元件μ 變形’假設該微泵浦成品之致雛體72具有三個，則相對的 二個壓電70件91先後產生變形，並紐連動三個致動腔體72 分別螺動至-第一螺動位置ρι、一第二境動位置p2及一第： 蠕動位置P3 ’如此反覆控繼雜體72產生連續性之樣動壓 力，輸送流體。 本發明之優點及功效如下所述： [1]光阻厚度可精確控制。本發明以簡單之“多層塗佈方 式進行塗佈光阻，可精確控制及增加光阻厚度，以精確控制 Α3Π6ΐ〇 母模結構之精度。 /2]翻模技術減少製作時間及成本。本發明主要以聚甲基 秒氧燒配合麵驗，進㈣作賴輯及縣辭成品，有 效減少黃光微影成型所需要的時間與成本。 、[3]具雜之縣浦結構_細廣。本發明之微果浦係 乂聚-甲基魏院成型，具有雜，結構不易受損，可廣泛應 用於光、機、群領域也不會造成科，並可大量製造，降低 成本。 [4]控制部為鮮的可攜式結構。本發明之控制部為簡單 的可攜式結構設計，並以循序㈣的驅動方式，簡壓電元件 動作’進而控制微泵浦之致動腔生補壓力，有效的增加 '放泵浦之I作麟’不需再接轉源，利於整合成可攜帶之微 泵浦系統。 以上僅是藉由較佳實施例詳細說明本發明，對於該實施例 所做的任何簡單修改與變化，皆不脫離本發明之精神與範圍。 由以上詳細說明’可使熟知本項技藝者明瞭本發明的確可 達成别述目的’實已符合專利法之規定，爰提出發明專利申請。 【附件一】 第Α圖係本發明之模擬微流道肖度為5度之流速效率之示意圖 第β圖係本發明之模擬微流道角度為10度之流速效率之示意 13 1311610 圖 第C圖係本發明之模擬微流道角度為15度之流速效率之示意 圖 第D圖係本發明之模擬微流道角度為20度之流速效率之示意 圖 第E圖係本發明之量測光阻結構厚度（約為350 gm)之示意圖 第F圖係本發明之設計電路圖 第G圖係本發明之模擬結果數據表 【圖式簡單說明】 第一圖係本發明之實施方法流程示意圖 第二圖係本發明之製造過程一之示意圖 • 第三圖係本發明之製造過程二之示意圖 第四圖係本發明之製造過程三之示意圖 第五圖係本發明之製造過程四之示意圖 第六圖係本發明之製造過程五之示意圖 第七圖係本發明之製造過程六之示意圖 第八圖係本發明之製造過程七之示意圖 第九圖係本發明之微泵浦成品之示意圖 第十圖係本發明之微流道之參考示意圖 14 1311610 第十一圖係本發明之微泵浦成品結合控制部及壓電元件之來 考示意圖 第十二A及第十二b圖係本發明之壓電元件之動作原理之示意 圖 第十三圖係本發明之微泵浦用以輸送液體之簡單示意圖 第十四圖係本發明之微泵浦成品結合控制部及壓電元件之動 作前示意圖 第十五圖係本發明之微泵浦成品結合控制部及壓電元件之動 作後示意圖 【主要元件符號說明】 11預備步驟 12微影成型步驟 13翻模步驟 14微泵浦接合步驟 15完成步驟 20基板 30光罩 31微流道圖案 32致動腔體圖案 40光阻 50母模結構 60近紫外光光罩對準機 61紫外線 70翻模液 70A微泵浦半成品 71微流道 72致動腔體 80接合基材 81接合結構 91壓電元件 92控制部 P1第一蠕動位置 P2第二螺動位置 P3第三螺動位置The actuator chamber 72 is deformed (e.g., Figs. 12A and 12B). Further, the actuator chamber 72 is controlled to output a predetermined force. This is the portable non-moving micro-pump for this creation. A joint structure 81 is provided between the 70A and the joint substrate 8 and between the turns, and the joint structure 81 (PDMS) is referred to as PDMS. 1311610, 'You can use the ansys simulation software to perform the flow rate efficiency turtle analysis on the intended micro-pumped finished product (probably the initial __). The analysis process mainly uses a diffuser (as shown in the tenth figure, also It can be said that the micro-channel 71) inlet width and length domain are important parameters to get the best design size (the data generated by the simulation results are shown in Figure G of Annex I); the simulation results are micro-channel 71 (In the direction of liquid flow, one of the tapered, divergent, and equal widths may be selected as needed). The inlet width is 3〇〇μ, and the angle is 10 degrees (see Annex A, Parts A, B, and C). Figure D shows the flow velocity efficiency of the microchannel 71 angles of 5 degrees 10 degrees 15 and 2 degrees, respectively, length & 4 sides, actuation chamber 72 (also referred to as cavity) diameter 1 The coffee is a better structural size. Referring to the fourteenth and fifteenth drawings, the control unit 92 (setting 24 volts) emits a predetermined vibration frequency to drive the piezoelectric element 91 (see the attached circuit diagram for the piezoelectric sheet 91 and the control unit 92). Fig. F), the piezoelectric element μ is deformed. Assuming that the micropumped product has 72 capsules, the opposite two piezoelectric 70 pieces 91 are deformed one after another, and the three actuation chambers are interlocked. The body 72 is respectively screwed to - the first screw position ρι, the second environment position p2, and the first: the creep position P3 ', thus repeatedly controlling the sample body 72 to generate continuity of the dynamic pressure to deliver the fluid. The advantages and effects of the present invention are as follows: [1] The photoresist thickness can be precisely controlled. The invention coats the photoresist with a simple "multilayer coating method, can precisely control and increase the thickness of the photoresist to precisely control the precision of the Α3Π6ΐ〇 master mold structure. /2] The mold turning technology reduces the production time and cost. It mainly uses polymethyl sec- oxy-combustion to match the surface test, and enters (4) as the product of Lai and the county, which effectively reduces the time and cost required for yellow lithography. [3] The complex structure of the county is _ fine. The invention The micro-Pupu system is formed by 乂聚-methyl Weiyuan, which is miscellaneous and has a structure that is not easily damaged. It can be widely used in the fields of light, machine and group, and it will not cause problems. It can be manufactured in large quantities and reduce costs. [4] Control The control part of the invention is a simple portable structure design, and the driving method of the simplified piezoelectric element is controlled in a sequential (four) driving manner to further control the pressure of the micro-pump actuation chamber. Effectively increasing the 'pumping of the pumping I' does not need to be transferred to the source, which facilitates integration into a portable micro-pumping system. The above is only a detailed description of the invention by way of a preferred embodiment, for which the embodiment is Any simple modifications and changes, all Without departing from the spirit and scope of the present invention, the invention of the invention may be made by the above detailed description, which is to be understood by those skilled in the art that the invention can be achieved. BRIEF DESCRIPTION OF THE DRAWINGS FIG. 7 is a schematic diagram showing the flow velocity efficiency of a simulated microchannel with a rake angle of 5 degrees. FIG. 11 is a schematic diagram of the flow velocity efficiency of the simulated microchannel angle of 10 degrees of the present invention. 13 1311610 FIG. Schematic diagram of the flow rate efficiency of the microchannel angle of 15 degrees. FIG. D is a schematic diagram of the flow rate efficiency of the simulated microchannel angle of 20 degrees of the present invention. FIG. E is the thickness of the measuring photoresist structure of the present invention (about 350 gm). FIG. F is a design circuit diagram of the present invention. FIG. G is a simulation result data table of the present invention. [Simplified description of the drawings] The first drawing is a schematic flow chart of the implementation method of the present invention. The second drawing is a manufacturing process of the present invention. BRIEF DESCRIPTION OF THE DRAWINGS The third drawing is a schematic view of the manufacturing process of the present invention. The fourth drawing is a schematic view of the manufacturing process of the present invention. The fifth drawing is the sixth schematic of the manufacturing process of the present invention. BRIEF DESCRIPTION OF THE DRAWINGS FIG. 7 is a schematic view of the manufacturing process of the present invention. FIG. 8 is a schematic view of the manufacturing process of the present invention. FIG. 9 is a schematic view of the micro pumped product of the present invention. Reference Schematic of the microfluid channel of the present invention 14 1311610 The eleventh drawing is a schematic diagram of the micro pumping finished product combination control portion and the piezoelectric element of the present invention. The twelfth and twelfth bth drawings are piezoelectrics of the present invention. BRIEF DESCRIPTION OF THE DRAWINGS FIG. 13 is a simplified schematic diagram of a micropump for transporting a liquid of the present invention. FIG. 14 is a schematic diagram showing the operation of the micropumped product in combination with the control unit and the piezoelectric element of the present invention. BRIEF DESCRIPTION OF THE DRAWINGS FIG. 1 is a schematic diagram of the operation of the micro-pumped product combination control unit and the piezoelectric element of the present invention. [Main component symbol description] 11 preliminary step 12 lithography molding step 13 mold-over step 14 micro-pump bonding step 15 completes step 20 substrate 30 Photomask 31 microchannel pattern 32 actuation cavity pattern 40 photoresist 50 female mold structure 60 near ultraviolet light mask alignment machine 61 ultraviolet 70 mold liquid 70A micro pump semi-finished product 71 micro flow channel 72 Actuating cavity 80 engaging substrate 81 engaging structure 91 piezoelectric element 92 control part P1 first creeping position P2 second screwing position P3 third screwing position