TWI305598B - Liquid crystal display and method for manufacturing the same - Google Patents

Description

1305598 Case No. 93114569 JF: _a 曰 Amendment 5, Invention Description (1) Technical Field The present invention relates to a liquid crystal display, and more particularly to a Biased Bending Vertical Alignment (BBVA) technique. The liquid crystal display is designed. [Prior Art] - With the development and popularization of digital network technology, liquid crystal displays (LCDs) have been widely used in various aspects of daily life. Although the picture quality of the LCD is similar to that of the fully developed CRT (Cathode Ray Tube) screen, there are still problems in terms of viewing angle, contrast, reaction time and display uniformity that need to be improved. Multi-domain vertical alignment (MVA, Multi-domain) in many wide-angle development technologies

The Vertical Alignment technology utilizes the non-unidirectional alignment and rotation characteristics of liquid crystal (LC, Liquid C ry s t a 1 ) molecules to enhance the viewing angle of the liquid crystal display and helps to shorten the reaction time. The conventional MVA technology utilizes the effects of surface protrusions (such as Bump and Protrusions) to drive liquid crystal molecules to be aligned in different directions under the action of a transistor, as shown in the first figure. As shown in the first figure, the conventional liquid crystal display panel Γ is mainly composed of upper and lower substrates 丨丨, 13 and a liquid crystal layer 12' interposed therebetween. The upper and lower substrates 丨丨, 13' and the liquid crystal layer 12 2 ' respectively have a first electrode 1 丨丨, and a second electrode 丨 3 丨, the first electrode 111 ′ and the second electrode 131 ′ are respectively different Having a plurality of surface protrusions 'such as 112' and 132'; through the surface of the first electrode m, and the surface protrusions 112', 132 on the second electrode 131', each element of the LCD

$6页 1305598 —- Case No. 93114569 Rev. 5. Corrections 5. The invention (2) will be divided into multiple regions so that each liquid crystal molecule is no longer aligned or rotated in the same direction and is independent of other liquid crystal molecules. In addition to short signal response time, wide viewing angle, and high transmittance and contrast ratio, MVA technology can effectively improve display unevenness and provide better image quality. However, since the manufacture of the surface protrusions 112 132 is difficult, the production of the liquid crystal display panel 1 requires a high production cost and time.

The Biased Bending Vertical Alignment (BBVA) technique electrically adjusts the alignment and rotation of liquid crystal molecules in different directions. Referring to the second figure, a substrate 21 above the liquid crystal display panel 2' has a first electrode 211, and the lower substrate 23 has a second electrode (alloy electrode) 231, and the second electrode (pixel electrode) 231 includes a plurality of openings 232'. Between the second electrode (pixel electrode) 231 and the lower substrate 23', there is a third electrode (bias electrode) 233 corresponding to the opening 232. By the action of the second electrode (the halogen electrode) 231 and the third electrode (bias electrode) 233, the liquid crystal molecules 22 can be arranged and rotated in different directions. This result is successful in realizing multiple domains ( The effect of Mu丨t soil _ domain segmentation, and omitting the complicated surface protrusion process in traditional MVA technology, is quite competitive. However, when the pixel electrode 23A overlaps with the electric field provided by the bias electrode 233', the liquid crystal molecules 22 form a disclination (ΜπΗηΜίοη) state at the edge of the overlapping electric field. This phenomenon not only affects the response speed of the liquid crystal display, but also affects the response speed of the liquid crystal display. It also causes the liquid crystal display to flicker. Please refer to the third figure, which is another conventional liquid crystal display using BBVA technology.

1305598 曰 索号 93114569 V. Description of the invention (3) _ The schematic diagram of the electrode structure of the device. The liquid crystal display panel pole (pixel electrode) 31 has a plurality of elongated slits 311, and the second electric (biasing electrode) 32' included has at least one recess 321 . > 'and the third electrode element electrode 31', the elongated slit 311' or the third through the second electrode (the recess 321 formed on the drawing 32', the design is a sufficient electrode (the bias electrode The 'time' fringe electric field and the notch 321 , the electric field at the oblique electric field exists, the arrangement of the molecules 30, so that the liquid crystal display 'will push the liquid crystal time' and improve the display time of the liquid crystal display In the case of the same technique, it is often necessary to provide a relatively large pressure second-phase electric field _liquid a 八 j & at the second electrode (the arsenic at this electrode (biasing electrode) 32), in order to be effective The first electrode (bias electrode) 32, the first electrode (bias electrode) 32, is the potential of the second electrode 常 常 常 当 当 当 当 当 当 当 当 当 当 当 当 当 当 当 当 当 当 当 当 当 当 当 当 当 31 On the plan:: Use ΐίπ:;: product should be *, and increase the applicability of the application, in order to make the (10) ^ technology more practically arranged on the product, ty ty must improve the liquid crystal molecules caused by the edge electric field The wrong pressure difference is also how to reduce the provided pixel power The machine between the electrode and the bias electrode is a direction that needs to be developed; therefore, the invention is invented. [Inventive] The present invention has a liquid crystal display, which comprises: a first substrate Including a first electrode; a second substrate 'the inner side of the package 1305598. The number is 93114569. The invention description (4) includes a second electrode, wherein the second electrode has at least one opening; a liquid crystal layer, The third electrode is located between the second electrode and the second substrate, wherein the position of the third electrode corresponds to the opening of the second electrode; At least one fourth electrode is located above the third electrode, and the fourth electrode is at least partially located in the opening of the second electrode. According to the above concept, the second electrode further has a plurality of slits, each of which The slit is located on both sides of the opening. According to the above concept, the longitudinal direction of the slit is parallel to the longitudinal direction of the third electrode. According to the above concept, the opening of the second electrode 4 is an elongated shape. According to the above concept, the longitudinal direction of the opening is parallel to the longitudinal direction of the third electrode and the fourth electrode. According to the above concept, the longitudinal direction of the opening is perpendicular to the longitudinal direction of the third electrode and the fourth electrode. According to the above concept, wherein the longitudinal direction of the opening is perpendicular to the longitudinal direction of the third electrode, and the fourth electrode comprises at least an island-like structure. According to the above concept, the longitudinal structure of the island-like structure is perpendicular to the longitudinal direction of the opening. According to the above concept, the longitudinal direction of the island-like structure is parallel to the longitudinal direction of the opening. According to the above concept, the width of the third electrode is greater than the width of the opening of the second electrode.

Page 9 1305598

Case No. 93114569 V. Inventive Note (5) wherein the width of the fourth electrode is smaller than the second electric power, wherein the third electrode and the fourth electrode system are in the width of the opening according to the above-mentioned concept, according to the above-mentioned concept of an equipotential state . • According to the above concept, the state of the third electrode and the fourth electrode includes an identical bias potential. According to the above concept, the potential state of the third electrode includes a floating state (f 1 oat 1 ng), and the potential state of the fourth electrode includes a piezoelectric bit. According to the above concept, the potential state of the third electrode includes a bias voltage, and the potential state of the fourth electrical i includes a floating state. According to the above concept, wherein the third electrode is made of a first metal layer: the fourth electrode is composed of a second metal layer, and the third electrode and the fourth electrode are separated by a chain. Electro-erosion extension & insulation layer (lnsuUting "郯 According to the above concept, where the first one only secret a / cloth with electrodes and the insulation layer on the insulation layer, * Japanese only secret Mi a second electrode, Mr), and the protective layer includes a thickness of the third electrode and the fourth electrode, wherein the thickness of the insulating layer is about 100 〜5 〇〇〇 and the thickness of the protective layer of D hai is about 100 〜 5000 meaning

A According to the above concept, it is 100~4000 X. According to the above concept, according to the above concept, according to the above concept, the second electrode thickness of the ancient female Chu r ^ ° is about 200 to 2500. The present invention also proposes a method for manufacturing a liquid crystal display.

No. 10 1305598 No. 93114569 曰Corrected to form an electrode 5. Description of the invention (6) The method comprises the following steps: a sub-layer; defining the first gold to form an insulating layer to cover the two-metal layer; defining the formation of the first plate a protective layer has an opening on the protective layer, the first substrate is provided; the substrate layer is formed to form a first electrical first electrode; and the insulating second metal layer is formed to cover the insulating layer and a third electrode, wherein a first gold electrode is formed on the first and second electrodes; a second electrode is formed on the upper edge layer of the substrate; the second electrode is on the base; and the three electrodes have at least a system Corresponding to the opening, each of the narrow longitudinal roots 及 ° and the root and the first longitudinal root are straight. Root. The second electrode further has a plurality of slits on both sides of the mouth. Wherein the longitudinal direction of the slit and the first electrode are based on the above concept, and the slit is located in the above-described concept. According to the above concept, the opening of the third electrode is an elongated shape according to the above concept, wherein the longitudinal direction of the opening is parallel to the longitudinal direction of the first electrode. According to the above concept, the longitudinal direction of the opening and the first electrode are perpendicular to the longitudinal direction of the two electrodes. An island structure with the first electrode. The longitudinal direction of the opening is as described above, wherein the longitudinal direction of the opening is straight, and the second electrode system comprises at least one of the above-described concepts, wherein the island structure is according to the above concept, wherein the island structure and the opening The longitudinal direction is as described above, wherein the width of the first electrode is larger than the opening

1305598 Case No. 93114569 Year of the month Amendment V. Description of invention (7) Width. The width of the second electrode is smaller than the thickness of the first electrode and the second electrode, wherein the thickness of the insulating layer is about 100~5000. The protective layer has a thickness of about 100 to 5,000. Wherein the third electrode has a thickness of about 200 to 2,500 according to the above concept. According to the above concept, it is about 100~4000X. " According to the above concept - according to the above concept, according to the above concept A, the present invention can be further understood by the following illustration and detailed description: [Embodiment] Please refer to the fifth figure (a) and the fifth figure ( b) is a top view of an embodiment of the first liquid crystal display of the present invention, and a cross-sectional view taken along line A-A' of the fifth figure (a). The liquid crystal display 5 of the present invention has a first substrate 51, a liquid crystal layer 50 and a second substrate 52. The first substrate 51 and the second substrate 52 have a first electrode 511 and a second electrode 521, respectively. The second electrode 521 has at least one opening 522, and a slit 523 is formed on each side of the opening 522, and the second electrode 521 is divided into a plurality of sub-electrodes. Between the second substrate 52 and the second electrode 521, there is a third electrode 53 located below the opening 522, the width of which is greater than the width of the opening 522, and the longitudinal direction thereof is parallel to the longitudinal direction of the opening 52. Above the third electrode 53 is a fourth electrode 54 having a width smaller than the width of the opening 522, the longitudinal direction of which is parallel to the longitudinal direction of the opening 52.

1305598 _ Case No. 93114569__年月日日倏正五、发明说明(8) 'Please refer to FIG. 5(C)' for a top view of the electrode structure of the first liquid crystal display embodiment of the present invention. From the opening 522 of the second electrode 521, the second electrode 521, the fourth electrode 54, and the third electrode 513 are sequentially visible from top to bottom. 6(a) and (b) are top views of electrode structures of a second liquid crystal display embodiment of the present invention. The fourth electrode 64 is located between the third electrode 63 and the second electrode 621. The second electrode 621 has at least one elongated opening (for example, a rectangular or elliptical opening) 622, and the elongated opening 622 A slit 623 is formed on the side, and the second electrode 621 is divided into a plurality of sub-electrodes; and unlike the first embodiment, the longitudinal direction of the opening 62 2 is perpendicular to the longitudinal direction of the third electrode 63 and the fourth electrode 64; In addition, the third electrode may have a recess 32 丨 ' design on the two sides to increase the aperture ratio. Please refer to the seventh figure (a) and (b) for implementing the third liquid crystal display of the present invention. A cross-sectional view of an electrode structure. The difference from the second embodiment lies in the design of the fourth electrode 74 of the embodiment. The fourth electrode 74 includes at least one island structure, the longitudinal direction of the island structure may be parallel or perpendicular to the longitudinal direction of the opening 722, and the respective island structures may be electrically connected to each other. &&

I - Fig. 2t(C) is the liquid crystal alignment simulation result of the above embodiments, and the simulation results are not corresponding to the electrode structures of the first, second and third liquid crystal display embodiments of the present invention, respectively. As shown in the fifth (c) and sixth, (b), when the voltage of the second electrode (521, 621) is eight,

Page 13 1305598 曰 Amendment No. 93114569 V. Description of the invention (9) When the pole (53, 63) has a bias potential (4), the fourth electrode of the (53, (8) potential state is the same (1)" ", (4):: or, as in the seventh figure, the second electrode (72, the voltage of the third electrode (73) is] ov, the purpose of the fourth electrode 74 is Taking advantage of the change of the cover is accompanied by two large potentials, and the π _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ In the liquid crystal display electrode of the present invention, the electrode is used and the third electrode (the dust electrode 1) has two electrodes: the second electrode is lowered (in any case, when the voltage difference of the second electricity supply is high. In the case of sex, the third electrode f is depleted; the electric parameter) potential (the halogen potential) is the positive electrode potential; conversely, when the element is set to be higher than the elemental potential, the negative polarity is 0. The bias potential must be lower than the potential of the four electrodes for a floating sea: at the third electrode 'and the fourth electrode, ^ three electrodes or = the bias potential is applied to the first position When; ^ Λ #黎立 is a floating state; or the bias voltage is applied to the third and fourth electrodes. 21) The other electrode is the second electrode (521, 621, The phase of the height; between J (, 53, 63, 73) and the fourth electrode (54, 74) (for example, the film formation conditions in the film thickness liquid crystal display process are different) to adjust. Please refer to the ninth figure (4) ,), set the diagram., go to the =: the fourth electrode and the second electrode are formed in the opposite order to form insulation: 93 factory flute 93 formed on the second substrate 92, continue to yin; by controlling four The electrode 94, the protective layer 941 and the slab-electrode 93 of the second electrode sheath 941, the insulating layer 931, and the fourth electrode 94 are inferior to each other, for example, the sorghum of the fourth electrode 94 and the second electrode 921 can be controlled. —- Thinner insulating layer 931 or protective layer 941, page 14 1305598 Amendment number 931145RP1 V. Invention description (10) The electrode 921 will be placed at a lower position, as shown in the ninth figure (a ); conversely, when a thicker insulating layer 913 or protective layer 94 is formed, the second electrode 921 is placed at a higher position, such as the ninth (b) wherein the thickness of each film layer is preferably in the range of: the third electrode M. The thickness of the fourth electrode is about 100~40〇〇1, and further is 1〇〇〇~4. 〇〇 "is a preferred thickness range; the thickness of the insulating layer 931 is about 丨 (10) ~ 5 〇〇〇 & and further preferably 1 〇〇〇 ~ jOOOA is preferable; the thickness of the protective layer 941 is about 1〇〇~5〇〇〇A, and further preferably l〇〇〇~500〇i is a thickness range, and the thickness of the second electrode 921 is 200~2500 1 . Please refer to the tenth drawing, which is a schematic diagram of a manufacturing method of a liquid crystal display according to the present invention, and cooperates with the fifth (a), sixth (a) and seventh (a) drawings. First, a first substrate 10 is provided, and a first electrode 1〇1 having a thickness of 100 to 4000 1 is formed on the first substrate, and a scan line (524, 624, 724) is simultaneously formed. The one electrode 1〇1 and the scan lines (524, 624, 724) may be formed of the same metal layer. Next, an insulating layer 102 is formed on the first substrate 1 , the insulating layer 102 covers the first electrode ιοί and the scan line, and the thickness thereof ranges from 1 〇〇 to 5 〇〇〇 A, and ~500〇i is a better thickness range. Then, a second electrode 103 ′ having a thickness of 100-4000 A is formed on the insulating layer 1 并 2 and a data line (525, 625, 725) is simultaneously formed. The second electrode 103 and the data line may be the same. The metal layer is composed of. Then, a protective layer 1 〇 4 is formed on the second electrode 1 0 3 to cover. The second electrode 1 0 3 and the data line have a thickness ranging from 1 〇 〇 to 5000 & and a range of thicknesses from 1 〇〇〇 to 500 〇 1 . Finally, a third electrode 1〇5 having a thickness of 200~2500A is formed on the protective layer 104, and at least one opening 106 is formed on the third electrode 105 and is located at the opening 1〇6.

Page 15 1305598 __ Case No. 93114569 _ Year, Month, Day _ Amendment V. Invention Description (11) A plurality of slits on the side (not shown). In summary, the liquid crystal display of the present invention improves the influence of the edge electric field on the arrangement of liquid crystal molecules in a liquid crystal display designed by the technique of Biased Bending Vertical Alignment (BBVA). By adding a fourth electrode design, there is no need to go through the south-column case. In addition, the technology of V A and P V A is in line with industry technology. Therefore, in the present case, the external bias of the value of the exhibition can effectively suppress the need for the Bump and CF ΙΤ0 in the liquid crystal display of the present invention, which is highly competitive, and is a novel and advanced liquid crystal molecular misalignment device. The manufacturing method can save the pattern and other processes, and the manufacture of the liquid crystal display has industrial applicability.

The present invention has been modified by those skilled in the art and is intended to be modified as described in the appended claims. >

Page 16 1305598 Case No. 93114569

The figure briefly illustrates the first figure 'as the second figure of the application of MVA technology, the second figure of the application of BBVA technology, is the application of BBVA technology 、B, quotient "曰曰, indication: intention; the fourth picture is a simulation diagram of the arrangement of the conventional liquid 曰 槌 应用 应用 应用 ; ; ; ; ; ; ; ; ; ; ; ; ; ; ; ; ; ; ; ; ; ; ; ; ; ; ; ; ; ; ; ; ; The first liquid crystal display, the third figure of crystal clearing is another practice of applying BBVA technology: structure schematic subgraph; fifth figure (b) fifth figure (c) top view; sixth figure (a )-(b) top view of the pole structure; seventh figure (a)-(b) top view of the pole structure; eighth figure (a) - (c), respectively, the simulation diagram of the arrangement of liquid crystal molecules in the first embodiment of the present invention Figure 9 (a)-(b): Schematic diagram of the relative positions of the two electrodes made under different film thickness conditions; and the tenth figure: The components of the liquid crystal display manufacturing method of the present invention are simply described: y, 1 substrate on the liquid crystal display panel 111 The first electrode is the first liquid crystal according to the plan of the A_a example in the fifth figure (a) "1 a-Λ 秘The squeegee of the splicer will be the first liquid of the case 曰曰 Example 贫 The third liquid crystal of the case is the electricity of the case. Example: ^ ^ % ^ 义 '图。 < t lost day % and %

1305598 Case No. 93114569 _η 曰 Correction pattern Simple description 112' Surface protrusion 12' Liquid crystal layer 13* Lower substrate 131' Second electrode '132' Surface protrusion '2, Liquid crystal display panel 21, Upper substrate 21 Γ First Electrode 22, liquid crystal molecule 23' lower substrate 231, second electrode (pixel electrode) 232, opening 2 33' third electrode (biasing electrode) 3 (Γ liquid crystal molecule 31' halogen electrode 31Γ elongated slit 32' Pressure electrode 321 , notch 331 ′ rightward area 5 liquid crystal display 50 liquid crystal layer 51 first substrate 511 first electrode

Page 18 1305598 Case No. 93114569 Description of Modifications 52 Second Substrate 521 Second Electrode 522 Open σ 523 Slot 524 Scan Line *525 Data Line .5 3 - Electrode 54 Fourth Electrode 621 - 丨 - Electrode 622 σ 623 slit 624 scan line 625 data line 63 second electrode 64 fourth electrode 721 second electrode 722 open π 723 slit 724 scan line 725 data line 73 second electrode 74 fourth electrode 92 second substrate 921 electrode

Page 19 1305598 _ Case No. 93114569_Yearly _ Correction Schematic description 93 Third electrode 931 Insulation layer 94 Fourth electrode 941 Protective layer 10 First substrate 101 First electrode • 10 2 Insulation layer 103 Second electrode

Claims (1)

1305598 _ Case No. 93914569_年月日日__t, Patent Application Range [Application Patent Scope] 1. A liquid crystal display comprising: a first substrate, the inner side of which includes a first electrode; and a second substrate The inner side includes a second electrode, wherein the second electrode has at least one opening; a liquid crystal layer between the first substrate and the second substrate; a third electrode located at the second electrode and the second Between the substrates, wherein the third electrode is located corresponding to the opening of the second electrode; and a fourth electrode is located above the third electrode, and the fourth electrode is at least partially located at the opening of the second electrode in. 2. The liquid crystal display of claim 1, wherein the second electrode further has a plurality of slits, each slit being located on both sides of the opening. 3. The liquid crystal display of claim 2, wherein the longitudinal direction of the slit is parallel to the longitudinal direction of the third electrode. 4. The liquid crystal display of claim 1, wherein the opening of the second electrode is an elongated opening. 5. The liquid crystal display of claim 4, wherein the longitudinal direction of the opening is parallel to the longitudinal direction of the third electrode and the fourth electrode. 6. The liquid crystal display of claim 4, wherein the longitudinal direction of the opening is perpendicular to a longitudinal direction of the third electrode and the fourth electrode. 7. The liquid crystal display of claim 4, wherein the longitudinal direction of the opening is perpendicular to a longitudinal direction of the third electrode, and the fourth electrode comprises at least an island structure. 8. The liquid crystal display of claim 7, wherein the island structure 1305598 Amendment 'where the island structure - case number 931145RQ__ year η y, the longitudinal direction of the patent application range is perpendicular to the longitudinal direction of the opening. 9. The longitudinal direction of the liquid crystal display of claim 7 is parallel to the longitudinal direction of the opening. 10. The liquid crystal display of claim 2, wherein the width of the third electrode is greater than the width of the opening of the second electrode. The liquid crystal display of claim 1, wherein the width of the fourth electrode is smaller than the width of the opening of the second electrode β / .12. In the liquid crystal display, the third electrode and the fourth electrode are in an equipotential state. The liquid crystal display of claim 2, wherein the potential states of the third electrode and the fourth electrode comprise the same bias bit. The liquid crystal display of claim 1, wherein the potential state of the third electrode comprises a floating state, and the potential state of the fourth electrode comprises a bias potential. 1. The liquid crystal display of claim 1, wherein the potential state of the third electrode comprises an offset potential ' and the potential state of the fourth electrode comprises a floating state. 1. The liquid crystal display of claim 1, wherein the third electrical layer is composed of a first metal layer, the fourth electrode is composed of a second metal layer, and the third An insulating layer* is further included between the electrode and the third and fourth electrodes. The liquid crystal display of claim 6, wherein the fourth electrode and the insulating layer further comprise a protective layer (passivation) Page 22 1305598 Case No. 93114569 Amendment No. 6, the scope of the patent application wherein the third layer of the insulating layer wherein the protective layer is the second electrical layer), and the protective layer comprises the second electrode 1 8. Patent application The liquid crystal display of the range 16th, the pole and the fourth electrode have a thickness of 100~40001. 1 9. For the liquid crystal display of claim 16 of the patent scope, the thickness is 100~500. 2 0. For the liquid crystal display of claim 17 of the patent scope, * thickness is 100~5000 X. 2 1. For the liquid crystal display of claim 17 of the patent application, the extreme thickness is 200~2500 1. 2 2. A method for fabricating a liquid crystal display, the method comprising the steps of: providing a substrate; forming a first electrode on the substrate; forming an insulating layer on the substrate to cover the first electrode; Forming a second electrode thereon; forming a protective layer on the substrate to cover the insulating layer and the second electrode; and forming a third electrode on the protective layer, wherein the third electrode has at least one opening, the first The position of an electrode and the second electrode corresponds to the opening. 2. The method of claim 2, wherein the first electrode is a metal layer. 24. The method of claim 22, wherein the second electrode is a metal layer. 25. The method of manufacturing according to claim 22, wherein the third Page 23 1305598 _ Case No. 93114569_年月曰 修正 Amendment _ VI. Patent Application The electrode has a plurality of slits, each of which is located on both sides of the opening. 26. The method of claim 25, wherein the longitudinal direction of the slit is parallel to the longitudinal direction of the first electrode. The manufacturing method of claim 2, wherein the opening of the third electrode is an elongated opening. 28. The method of claim 27, wherein the longitudinal direction of the opening is parallel to the longitudinal direction of the first electrode and the second electrode. 29. The method of claim 27, wherein the longitudinal direction of the opening is perpendicular to a longitudinal direction of the first electrode and the second electrode. The manufacturing method of claim 27, wherein the longitudinal direction of the opening is perpendicular to a longitudinal direction of the first electrode, and the second electrode % comprises at least an island structure. The manufacturing method of claim 30, wherein the longitudinal structure of the island structure is perpendicular to a longitudinal direction of the opening. 3. The method of manufacturing of claim 30, wherein the longitudinal structure of the island structure is parallel to the longitudinal direction of the opening. 33. The method of claim 22, wherein the width of the first electrode is greater than the width of the opening of the third electrode. 34. The method of claim 22, wherein the width of the second φ electrode is less than the width of the opening of the third electrode. 3. The method of claim 22, wherein the first electrode and the second electrode have a thickness of 100 to 4000 X. 3 6. The method of claim 2, wherein the insulating layer has a thickness of 100 to 500 0 X. Page 24 1305598 _ Case No. 93114569_年月日日__ VI. Patent application scope 37. The manufacturing method of claim 22, wherein the protective layer has a thickness of 100~5000 i. 38. The method of claim 22, wherein the third electrode has a thickness of 20 0 to 250 0. Page 25 1305598