TWI304989B - Method for screening slow bit memory cell - Google Patents
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Ι3Ό4989 九、發明說明: 【發明所屬之技術領域】 本發明是有關於一種缺陷記憶胞之篩選方法,且特別 疋有關於一種利用第一次驗證記憶胞抹除失敗而抹除記憶 區塊中所有記憶胞一次後隨即略過而進行下一個記憶胞之 驗證的設計以及第二次驗證記憶胞抹除失敗而篩選記憶胞 為缺陷記憶胞之設計之缺陷記憶胞之筛選方法。Ι3Ό4989 IX. Description of the Invention: [Technical Field] The present invention relates to a method for screening defective memory cells, and particularly relates to erasing all memory blocks by using the first verification memory cell erasure failure The memory cell is skipped once and then the design of the next memory cell is verified and the second method of verifying the memory cell erasure is to screen the memory cell for the defective memory cell.
【先前技術】 快閃記憶體具有不需電源即可保存資料的特性,而且 具有抹除與寫入的功能,因此廣泛的應用於各種電子產品 上。傳統之㈣記憶體可劃分成許多記紐塊,每個記憶區 塊具有許多記憶胞。每個記憶胞係用以記錄—個位元的資 料:記憶胞具雜侧極、浮制極、雜與赌。記憶胞 的資料是以浮制財所儲存的電子量彡寡而定。 當浮接閘極中儲存高量之電子,此時門檀電壓較高, 需要給予控制閘極-個較高的電壓,例如是大於6伏特 能使此記⑽之源極與雜導通,—般定義 料為〇且為程式化狀態。 胞之資 當浮接閘極中儲存低量之電子,此時門禮電壓較低, 只需要給倾制_—她_電 特 資料為丨且騎除絲Γ導通…般以科記憶胞之 快閃記憶艘抹除資料後,需要進行驗證程序來保證資[Prior Art] Flash memory has the characteristics of saving data without power supply, and has the functions of erasing and writing, so it is widely used in various electronic products. The traditional (4) memory can be divided into a number of blocks, each of which has many memory cells. Each memory cell is used to record one bit of information: the memory cell has a heteropolar pole, a floating pole, a miscellaneous and a bet. The data of the memory cells is determined by the amount of electrons stored in the floating finances. When a high amount of electrons are stored in the floating gate, the gate voltage is higher at this time, and a higher voltage is required to be given to the control gate. For example, if the voltage is greater than 6 volts, the source and the impurity of the signal (10) can be turned on, The general definition is 〇 and is stylized. When the resources of the cell store a low amount of electrons in the floating gate, the voltage of the door is low, and only the dumping is needed. After the flash memory erases the data, a verification procedure is required to secure the capital.
TW2992PA 6 ' 1304989 ,被抹除的正確性。在進行抹除動作時是以整個記憶區塊為 單位進行抹除,而驗證時通常以八、十六或三十二位元(記 憶,)為單位作驗證(對應—位址),在驗輯有記憶胞之資 料是否為1的流程中,將會逐一驗證每一位址是否抹除成 ,。若所驗證之那一個位址抹除失敗時,則電性抹除該記憶 區塊一次或多次,並停留在原驗證失敗的位址重複驗證及抹 除’直到原本被驗證失敗的那一個位址被驗證為抹除成功才 Φ 進行下一個位址的驗證步驟。 在傳統上一種篩除缺陷記憶胞的方法,即是應用上述 抹除及驗證的程序,來篩除無法通過驗證的記憶胞,主要差 - 異是筛除時的驗證條件較一般抹除時的驗證條件更嚴格,如 . 第1圖,為一記憶區塊被抹除後的門檻電壓分布圖,在抹除 驗證時只要記憶胞的門檻電壓(vt)小於EV時即通過驗 證,在篩除驗證時施加更低的閘極電壓,使記憶胞的門檻電 壓需小於MR(marginread)才會通過驗證,不能通過驗證的 φ s己憶胞即為需篩除的缺陷記憶胞(slow bit)。 然而’上述之驗證方式將會導致有些原本已被驗證為 抹除成功之記憶胞’因為缺陷記憶胞遲遲未通過驗證而須不 斷的連帶被抹除,而隨著上述抹除次數之增加,產生過度抹 除(overerase)現象’進而導致漏電流之產生。因此,造 成記憶胞程式化的困難或待機狀態時漏電流的消耗,或在讀 取其他已程式化的記憶胞時,將該記憶胞誤判為抹除狀態。 【發明内容】TW2992PA 6 ' 1304989 , the correctness of being erased. In the erasing action, the entire memory block is erased, and the verification is usually performed in units of eight, sixteen or thirty-two bits (memory,). In the process of whether the data of the memory cell is 1, it will be verified one by one whether each address is erased. If the verified address fails to be erased, the memory block is electrically erased one or more times, and the address of the original verification failure is repeatedly verified and erased until the one that was originally verified to fail. The address is verified as a successful erase. Φ Perform the verification step for the next address. In the traditional method of screening defective memory cells, the above-mentioned erasing and verification procedure is applied to screen out memory cells that cannot be verified, and the main difference-differential is the verification condition when screening is more than that in general erasing. The verification conditions are more stringent, such as. Fig. 1 is a threshold voltage distribution diagram after a memory block is erased. When the threshold voltage (vt) of the memory cell is less than EV, the verification is performed during the erase verification. A lower gate voltage is applied during verification, so that the threshold voltage of the memory cell needs to be less than MR (marginread) to pass the verification, and the φ s cell that cannot be verified is the defective bit to be screened. However, the above verification method will result in some memory cells that have been verified as being erased successfully. Because the defective memory cells have not been verified, they must be erased continuously, and as the number of erasures increases, An over-event phenomenon occurs, which in turn leads to leakage currents. Therefore, the memory cell is difficult to program or the leakage current is consumed in the standby state, or when the other programmed memory cells are read, the memory cell is mistakenly judged as the erased state. [Summary of the Invention]
TW2992PA 7 * 1304989 &有鑑於此,本發明的目的就是在提供一種缺陷記憶胞 之師選方法。其帛—:欠驗證記憶胞抹除失敗而抹除記憶區塊 ^所有圮憶胞一次後,隨即略過該位址而進行下一個位址之 :己=胞驗證的設計,加上第二次驗證記憶胞抹除失敗而篩選 丨思胞為缺陷記憶胞之設計,可以有效地且明確地篩選缺陷 5己憶胞。因此’進而降低記憶胞產生過度抹除(over erase) 的機率,並且防止記憶胞產生漏電流的現象。 根據本發明的目的’提出一種缺陷記憶胞之筛選方 法’用於一記憶體上。記憶體可劃分成許多記憶區塊 (Sector) ’每一記憶區塊具有N個記憶胞(cells),N為大 於1之正整數。N個記憶胞係為一第1〜N個記憶胞。在此 方法中’驗證第i個記憶胞是否抹除成功,i為小於或等於 N之正整數。若第i個記憶胞抹除成功時,檢查第丨個記憶 胞是否為第N個記憶胞。若第i個記憶胞抹除失敗時,抹除 記憶區塊之N個記憶胞一次,並檢查第i個記憶胞是否為第 N個記憶胞。 若第i個記憶胞不是第N個記憶胞,驗證第i+Ι個記 憶胞是否抹除成功。若第i個記憶胞是第N個記憶胞,表示 正常記憶胞皆已抹除完成,對同一記憶區塊作第二次驗證以 篩除缺陷記憶胞。驗證第j個記憶胞是否抹除成功,j為小 於或等於N之正整數。 若第j個記憶胞抹除成功時,檢查第j個記憶胞是否為 第N個記憶胞。若第j個記憶胞抹除失敗時,篩選第j個記 憶胞為一缺陷記憶胞,並檢查第j個記憶胞是否為第N個記 TW2992PA 8 • 1304989 憶胞。 ^若第j個記憶胞不是第N個記憶胞,驗證第j+1個記 憶胞是否抹除成功。若第j個記憶胞是第N個記憶胞,結束 此方法。 運用此方法作缺陷記憶胞的篩除時,可以應用跟抹除 動作同樣的操作條件,並可得到-不受缺陷記憶胞影響之= 界電壓分布圖’如第2圖所示,以作為抹除特性分析之用, • 並且避免過度抹除(over erase)的發生及其相關之負面效 應。 、 為讓本發明之上述目的、特徵、和優點能更明顯易懂, - 下文特舉一較佳實施例’並配合所附圖式,作詳細說明如下: 【實施方式】 請同時參照第3〜4圖,第3圖繪示乃依照本發明之較 佳實施例之缺陷記憶胞之篩選方法的流程圖。第4圖繪示乃 • 應用第3圖之方法的記憶體的示意圖。如圖所示,本實施例 之缺陷記憶胞之篩選方法係可用於一記憶體2〇 (如快閃記 憶體)上,用以有效地且明確地篩選缺陷記憶胞(sl〇wbit memory cell),進而降低記憶胞產生過度抹除(〇vererase) 的機率,且防止記憶胞產生漏電流的現象。記憶體2〇具有 至少一記憶區塊(sector) 21,記憶區塊21具有N個記憶 胞(cells)。N為大於1之正整數,n個記憶胞係為一第1 〜N個記憶胞。在本實施例中,N例如為25,此25個記憶 胞係為一第1〜25個記憶胞。其中,第丨個記憶胞之標號為 TW2992PA 9 1304989 個全己‘乂胎第2個記憶胞之標號為22⑵。依此類推,第25 方法後一個記憶胞)之標細(办 私將說明如後 百先’在步驟U中,驗證第丨個記憶胞是否抹除成功, 為小於或等於N之正整數。在本實施例中,例如丨從】開 …即驗證第1個記 22⑴是否抹除成功。TW2992PA 7 * 1304989 & In view of the above, it is an object of the present invention to provide a method of selecting a defective memory cell. The other is: the under-verified memory cell erase fails and the memory block is erased. ^ After all the memory cells are recalled, the address is then skipped and the next address is used: the design of the cell verification, plus the second The sub-validation memory cell failure failed to screen the design of the defective memory cells, and the defect 5 cells can be effectively and clearly screened. Therefore, the probability of over-erasing of the memory cells is reduced, and the phenomenon that leakage current is generated by the memory cells is prevented. According to the object of the present invention, a screening method for defective memory cells is proposed for use on a memory. The memory can be divided into a number of memory blocks. Each memory block has N cells, and N is a positive integer greater than one. The N memory cell lines are a 1~N memory cell. In this method, 'verify whether the i-th memory cell is successfully erased, i is a positive integer less than or equal to N. If the i-th memory cell is successfully erased, it is checked whether the first memory cell is the Nth memory cell. If the i-th memory cell fails to be erased, erase the N memory cells of the memory block once and check whether the i-th memory cell is the Nth memory cell. If the i-th memory cell is not the Nth memory cell, verify whether the i+th memory cell is successfully erased. If the i-th memory cell is the Nth memory cell, it means that the normal memory cell has been erased, and the same memory block is subjected to a second verification to screen out the defective memory cell. Verify that the jth memory cell is successfully erased, and j is a positive integer less than or equal to N. If the jth memory cell is successfully erased, it is checked whether the jth memory cell is the Nth memory cell. If the jth memory cell fails to be erased, the jth memory cell is screened as a defective memory cell, and it is checked whether the jth memory cell is the Nth TW2992PA 8 • 1304989 memory cell. ^ If the jth memory cell is not the Nth memory cell, verify that the j+1th memory cell is erased successfully. If the jth memory cell is the Nth memory cell, the method ends. When this method is used for the screening of defective memory cells, the same operating conditions as the erase operation can be applied, and the voltage distribution map of the boundary voltage can be obtained as shown in Fig. 2 as an eraser. In addition to characterization, • and avoid the occurrence of over erase and its associated negative effects. The above described objects, features, and advantages of the present invention will become more apparent and understood. The following detailed description of the preferred embodiments of the present invention will be described in detail as follows: [Embodiment] Please refer to the third 4, FIG. 3 is a flow chart showing a method of screening defective memory cells in accordance with a preferred embodiment of the present invention. Figure 4 is a schematic illustration of the memory of the method of Figure 3. As shown in the figure, the screening method of the defective memory cell of the embodiment can be applied to a memory 2 (such as a flash memory) for effectively and clearly screening the defective memory cell (sl〇wbit memory cell). , thereby reducing the probability of memory cells producing excessive ervering (ervererase) and preventing leakage of memory cells. The memory 2 has at least one memory block 21, and the memory block 21 has N cells. N is a positive integer greater than 1, and n memory cells are a first to N memory cells. In the present embodiment, N is, for example, 25, and the 25 memory cells are a 1st to 25th memory cells. Among them, the number of the first memory cell is TW2992PA 9 1304989. The second memory cell of the abortion is 22 (2). And so on, the standard of a memory cell after the 25th method (the private will explain the following hundred first) in step U, verify whether the first memory cell is successfully erased, is a positive integer less than or equal to N. In the present embodiment, for example, the first record 22(1) is verified to be successfully erased.
卜若第1個記憶胞抹除成功時,則進入步驟12中,檢查 第i個記憶胞是否為第N個記憶胞(最後一個記憶胞)。^ 如’若第1個記憶胞22 (1)被驗證為抹除成功時’則檢查 第1個記憶胞22 ( 1)是否為第25個記憶胞22 (25)。 右第丨個§己憶胞抹除失敗時,則進入步驟13中,抹除 圮憶區塊21之N個記憶胞一次。待抹除步驟後,即進入步 驟12中,檢查第i個記憶胞是否為第1^個記憶胞。例如, 若第1個記憶胞22 (1)被驗證為抹除失敗時,抹除記憶區 塊21之第1個記憶胞22 ( 1)至第25個記憶胞22 (25) — 次。於抹除步驟後’即執行步驟12,檢查第1個記憶胞22 (1)是否為第25個記憶胞22 (25)。 若第i個記憶胞不是第N個記憶胞,則將丨之值加j, 例如記憶體20可以透過其計數器加值,並回到步驟u中, 以驗證第i+Ι個記憶胞是否抹除成功。例如,由於第i個記 憶胞22 (1)不是第25個記憶胞22 (25),即將丨之值+1, 並回到步驟11中,驗證第2個記憶胞22 (2)是否抹除成 功。因此,可以逐一驗證第1個記憶胞22 (1)至第25個 記憶胞22 (25)是否成功抹除。若第1個記憶胞22 (丨)至 TW2992PA 10 •1304989 第25個記憶胞22 (25)之任一記憶胞抹除失敗時,就要抹 除記憶區塊21之第1個記憶胞22(1)至第25個記憶胞22 (25) —次。也就是說,若第1個記憶胞22 (丨)至第25 個記憶胞22 (25)中遇到有μ個記憶胞抹除驗證失敗時, 則共抹除§己憶區塊21之第1個記憶胞22 ( 1)至第25個記 憶胞22 (25) Μ次,Μ為小於或等於25之正整數。 若第i個記憶胞是第Ν個記憶胞,表示記憶區塊22之 第1個記憶胞22 ( 1)至第25個記憶胞22 (25)已經全部 逐一驗證完畢,則進入步驟14中,重新對同一記憶區塊作 驗證動作,以篩除缺陷記憶胞。驗證第j個記憶胞是否抹除 成功’ j為小於或等於N之正整數。在本實施例中,j例如 是從1開始,即驗證第1個記憶胞22 ( 1)是否抹除成功。 若声j個記憶胞抹除成功時,則進入步驟15中,檢查 第j個記憶胞是否為第N個記憶胞。例如,檢查第1個記憶 胞22 (1)是否為第25個記憶胞22 (25)。若第j個記憶胞 抹除驗證失敗時,則進入步驟16中,篩選且記錄第j個記 憶胞為一缺陷記憶胞。其中,在篩選第j個記憶胞為缺陷記 憶胞時’更可記錄第j個記憶胞之位址。例如,若第丨個記 憶胞22 (1)抹除驗證失敗時,篩選且記錄第1個記憶胞22 (1)為缺陷記憶胞。於篩選步驟後,並執行步驟15,檢查 第j個記憶胞是否為第N個記憶胞。例如,檢查第1個記憶 胞22 (1)是否為第25個記憶胞22 (25)。 若第j個記憶胞不是第N個記憶胞,則將j之值加1, 例如以透過計數器加值,並回到步驟14中,驗證第』+1個If the first memory cell erase is successful, proceed to step 12 to check if the i-th memory cell is the Nth memory cell (the last memory cell). ^ If 'the first memory cell 22 (1) is verified to be erased successfully' then check if the first memory cell 22 ( 1) is the 25th memory cell 22 (25). When the right § 忆 忆 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 After the step of erasing, the process proceeds to step 12 to check whether the i-th memory cell is the first memory cell. For example, if the first memory cell 22(1) is verified as an erase failure, the first memory cell 22(1) to the 25th memory cell 22(25) of the memory block 21 are erased. After the erasing step, step 12 is performed to check whether the first memory cell 22 (1) is the 25th memory cell 22 (25). If the i-th memory cell is not the Nth memory cell, the value of 丨 is added to j. For example, the memory 20 can be added through its counter value and returned to step u to verify whether the i+th memory cell is wiped. In addition to success. For example, since the i-th memory cell 22 (1) is not the 25th memory cell 22 (25), the value of 丨 is +1, and returns to step 11 to verify whether the second memory cell 22 (2) is erased. success. Therefore, it can be verified one by one whether the first memory cell 22 (1) to the 25th memory cell 22 (25) are successfully erased. If the memory cell of the first memory cell 22 (丨) to TW2992PA 10 •1304989 of the 25th memory cell 22 (25) fails, the first memory cell 22 of the memory block 21 is erased ( 1) to the 25th memory cell 22 (25) - times. That is to say, if the first memory cell 22 (丨) to the 25th memory cell 22 (25) encounters the failure of the μ memory cell erasure verification, the first block of the § memory block 21 is erased. 1 memory cell 22 (1) to 25th memory cell 22 (25) Μ, Μ is a positive integer less than or equal to 25. If the i-th memory cell is the third memory cell, indicating that the first memory cell 22 (1) to the 25th memory cell 22 (25) of the memory block 22 have all been verified one by one, proceed to step 14. Re-verify the same memory block to screen out the defective memory cells. Verify that the jth memory cell is erased successfully. 'j is a positive integer less than or equal to N. In the present embodiment, j starts from 1, for example, to verify whether the first memory cell 22(1) is successfully erased. If the sound of the memory cells is successfully erased, the process proceeds to step 15 to check whether the jth memory cell is the Nth memory cell. For example, it is checked whether the first memory cell 22 (1) is the 25th memory cell 22 (25). If the jth memory cell erase verification fails, the process proceeds to step 16, where the jth memory cell is screened and recorded as a defective memory cell. Wherein, when the jth memory cell is screened as a defective memory cell, the address of the jth memory cell can be recorded. For example, if the first memory cell 22 (1) erases the verification failure, the first memory cell 22 (1) is screened and recorded as a defective memory cell. After the screening step, and performing step 15, it is checked whether the jth memory cell is the Nth memory cell. For example, it is checked whether the first memory cell 22 (1) is the 25th memory cell 22 (25). If the jth memory cell is not the Nth memory cell, the value of j is incremented by 1, for example, by adding a value through the counter, and returning to step 14, verifying the +1th
TW2992PA 11 • 1304989 j胞是轉除成功。例如,由於第1個記憶胞22 (1)不 疋第25個s己憶胞22 ( 25 )’則驗證第2個記憶胞22 ( 2 )是 否抹除成功。若第j個記憶胞是第N個記憶胞,表示記憶區 塊22之第1個記憶胞22 (1)至第25個記憶胞22 (25)已 經全部逐一驗證完畢,則結束此方法。 因此,上述步驟11所示之驗證流程為第一次驗證流 私’用以決定是否抹除記憶區塊21之N個記憶胞一次。此 外,上述步驟14為接續步驟Η之後的第二次驗證流程,驗 證同一記憶區塊中是否仍有無法通過抹除驗證的記憶胞,並 將其歸類為需篩除的缺陷記憶胞,進而提供後續修補缺陷記 憶胞的基準。 至於步驟11及14中如何驗證記憶胞是否抹除成功之 机程,在此舉例說明如後,但本實施例之技術並不侷限在 此。又如第4圖所示,記憶體20更具有字元線wi〜W5、 源線S1〜S5以及位元線B1〜B5,字元線W1〜W5係橫向 平行设置,位元線B1〜B5係縱向平行設置。字元線wi〜 W5及位元線B1〜B5係垂直交錯排列’字元線wi〜W5係 與對應之記憶胞的控制閘極CG電性連接,同一列記憶胞的 控制閘極係與同一條字元線電性連接。位元線B1〜B5係與 對應之記憶胞的没極D電性連接,同一行記憶胞的没極j) 係與同一條位元線電性連接。源線S1〜S5係與對應之記憶 胞的源極S電性連接’同一列記憶胞的源極s係與同一條 源線電性連接。同一記憶區塊的源線最終共同電性連接在一 起,以達成以記憶區塊為單位之抹除動作。請參照第5圖, 12TW2992PA 11 • 1304989 The j cell was successfully removed. For example, since the first memory cell 22 (1) does not have the 25th s memory cell 22 (25)', it is verified whether the second memory cell 22(2) is successfully erased. If the jth memory cell is the Nth memory cell, indicating that the first memory cell 22 (1) to the 25th memory cell 22 (25) of the memory block 22 have all been verified one by one, the method is terminated. Therefore, the verification process shown in the above step 11 is to verify the flow of the memory cells 21 for the first time. In addition, the above step 14 is a second verification process after the subsequent step, verifying whether there are still memory cells in the same memory block that cannot be verified by erasing, and classifying them as defective memory cells to be screened, and further Provides a baseline for subsequent repair of defective memory cells. As for how to verify whether the memory cell is successfully erased in steps 11 and 14, the following is exemplified, but the technique of this embodiment is not limited thereto. Further, as shown in FIG. 4, the memory 20 further has word lines wi to W5, source lines S1 to S5, and bit lines B1 to B5, and the word lines W1 to W5 are horizontally arranged in parallel, and the bit lines B1 to B5 are provided. It is set in parallel in the longitudinal direction. The word line wi~W5 and the bit line B1~B5 are vertically staggered. The word line wi~W5 is electrically connected to the control gate CG of the corresponding memory cell, and the control gate of the same column of memory cells is the same. One word line is electrically connected. The bit lines B1 to B5 are electrically connected to the corresponding pole D of the memory cell, and the gates of the same row of memory cells are electrically connected to the same bit line. The source lines S1 to S5 are electrically connected to the source S of the corresponding memory cell. The source s of the same column of memory cells is electrically connected to the same source line. The source lines of the same memory block are ultimately electrically connected together to achieve an erase operation in units of memory blocks. Please refer to Figure 5, 12
TW2992PA 1304989 其繪示乃第4圖之記憶體之單一記憶胞的剖面圖。如第$ 圖所示’記憶體20更具有一石夕基底3〇,記憶區塊21之第i 個記憶胞22 (1)至第25個記憶胞22 (25)、字元線W1〜 W5、源線S1〜S5以及位元線B1〜B5係設置於矽基底3〇 上。在步驟11中,首先,施加一高於門檻電壓之第一電壓 於第i個記憶胞之控制閘極CG,例如以透過對應之字元線 施加電壓,使記憶胞的汲極及源極之間產生通道。接著,施 φ 加一適當之第二電壓於第i個記憶胞之汲極D,例如以透^ 對應之位元線施加電壓,使記憶胞的没極和源極之間有一電 壓差而產生電流。然後,透過感測放大器量測第丨個記憶胞 之源極S及汲極D之間的電流是否大於一第一抹除驗證電 流值,例如以透過對應之位元線及感測放大器量測電流。若 第i個δ己憶胞之源極S及沒極D之間的電流大於第一抹除· 驗證電流值,決定第i個記憶胞通過第一次抹除驗證。若第 i個記憶胞之源極S及汲極D之間的電流小於或等於第一抹 ❿ 除驗證電流值,決定第i個記憶胞為未通過第一次抹除驗 證。其中,第一電壓及第二電壓例如分別為4伏特(v)及 1伏特(V),第一抹除驗證電流值為20微安培(#A)。 同樣地,在步驟14中,首先,施加一高於門檻電壓之 第三電壓於第j個記憶胞之控制閘極CG,例如以透過對應 之字元線施加電壓,使記憶胞的汲極及源極之間產生通道。 接著,施加一適當之第四電壓於第j個記憶胞之汲極D,例 如以透過對應之位元線施加電壓,使記憶胞的汲極和源極之 間有一電壓差而產生電流。然後,透過感測放大器量測第j TW2992PA 13 • B04989 個記憶胞之源極S及汲極D之間的電流是否大於一第二抹 除驗證電流值,例如以透過對應之位元線及感測放大器量測 電流。若第j個記憶胞之源極8及汲極D之間的電流大於 第二抹除驗證電流值’決定第j個記憶胞為通過第二次抹除 驗證。若第j個記憶胞之源極S及汲極D之間的電流小於 或等於第二抹除驗證電流值’決定第j個記憶胞為未通過第 二次抹除驗證。其中’第三電壓及第四電壓分別為4伏特(v) $ 及1伏特(V) ’第二抹除驗證電流值為20微安培(#a)。 原則上’步驟11及步驟14應採用同樣的驗證條件。 至於步驟12及15中如何驗證記憶胞是否為最後一個 圯憶胞之流程’在此舉例說明如後,但本實施例之技術並不 侷限在此。在步驟12中,比對位址計數器(Address c〇unter) 數值i是否為預設終值N。若位址計數器數值j等於預設終 值N ’則進入步驟14對同一記憶區堍作第二次驗證;若位 址計數器數值i不等於預設終值N,則將位址計數器加一並 φ 回到步驟11對下一記憶胞作抹除驗證。 同樣地,在步驟15中,比對位址計數器(Address c_ter) 數值1是否為預設終值N。若位址計數器數值i等於預設終 值N,則結束本缺陷記憶胞篩除流程;若位址計數器數值i 不專於預没終值N,則將位址計數器加一並回到步驟對 下一記憶胞作抹除驗證。 至於步驟13中如何抹除記憶區塊21之所有記憶胞之 流程,在此舉例說明如後,但本實施例之技術並不侷限在 此。請參照第6圖,首先,浮接每一個記憶胞之源極s及TW2992PA 1304989 is a cross-sectional view of a single memory cell of the memory of FIG. As shown in Fig. $, the memory 20 has a radiance 3 〇, the i-th memory cell 22 (1) to the 25th memory cell 22 (25), and the word line W1 〜 W5 of the memory block 21 The source lines S1 to S5 and the bit lines B1 to B5 are disposed on the germanium substrate 3A. In step 11, first, a first voltage higher than the threshold voltage is applied to the control gate CG of the i-th memory cell, for example, a voltage is applied through the corresponding word line to make the drain and source of the memory cell Generate channels between them. Next, applying φ to add a suitable second voltage to the drain D of the i-th memory cell, for example, applying a voltage through the corresponding bit line, so that a voltage difference between the plasma cell and the source is generated. Current. Then, the current between the source S and the drain D of the second memory cell is measured by the sense amplifier to be greater than a first erase verify current value, for example, by transmitting the corresponding bit line and the sense amplifier. Current. If the current between the source S and the dipole D of the i-th δ cell has a larger value than the first erasing and verifying current value, it is determined that the i-th memory cell is verified by the first erasing. If the current between the source S and the drain D of the i-th memory cell is less than or equal to the first eraser except the verify current value, it is determined that the i-th memory cell fails the first erase test. The first voltage and the second voltage are, for example, 4 volts (v) and 1 volt (V), respectively, and the first erase verify current value is 20 microamperes (#A). Similarly, in step 14, first, a third voltage higher than the threshold voltage is applied to the control gate CG of the j-th memory cell, for example, a voltage is applied through the corresponding word line to make the drain of the memory cell and A channel is created between the sources. Next, a suitable fourth voltage is applied to the drain D of the jth memory cell. For example, a voltage is applied through the corresponding bit line to cause a voltage difference between the drain and the source of the memory cell to generate a current. Then, through the sense amplifier, the current between the source S and the drain D of the B04989 memory cells is greater than a second erase verify current value, for example, to transmit the corresponding bit line and sense. The amp measures the current. If the current between source 8 and drain D of the jth memory cell is greater than the second erase verify current value', the jth memory cell is verified by the second erase. If the current between the source S and the drain D of the jth memory cell is less than or equal to the second erase verify current value', the jth memory cell is determined not to pass the second erase verify. Wherein the 'third voltage and the fourth voltage are 4 volts (v) $ and 1 volt (V) respectively. The second erase verify current value is 20 microamperes (#a). In principle, the same verification conditions should be used for steps 11 and 14. As for how to verify whether the memory cell is the last memory cell in steps 12 and 15, the following is exemplified, but the technique of this embodiment is not limited thereto. In step 12, the address c counter (Address c〇unter) value i is the preset final value N. If the address counter value j is equal to the preset final value N ', then the process proceeds to step 14 for the second verification of the same memory area; if the address counter value i is not equal to the preset final value N, the address counter is incremented. φ returns to step 11 to erase the next memory cell. Similarly, in step 15, the comparison of the address counter (Address c_ter) value 1 is the preset final value N. If the address counter value i is equal to the preset final value N, the defect memory cell screening process is ended; if the address counter value i is not specific to the pre-no final value N, the address counter is incremented by one and returned to the step pair. The next memory cell is erased and verified. As for the flow of how to erase all the memory cells of the memory block 21 in step 13, the following is exemplified, but the technique of the embodiment is not limited thereto. Please refer to Figure 6, first, float the source s of each memory cell and
TW2992PA 14 1304989 >及極D。接著,施加一適當之負極性電壓於每一個記憶胞之 控制閘極CG,例如以透過對應之字元線施加電壓。然後, 鉍加一電壓於矽基底30。施加於控制閘極及矽基底之電壓 例如分別為-8伏特及9伏特。則原先部分儲存於浮接閘極 (Floating gate)中之電子將因福勒—諾德漢電子穿隧 (Fowler-Nordheim electron tunneling,F-N tunneling)效應 而注入矽基底30中,使記憶胞的門檻電壓下降,達到抹除 的效果。 本發明上述實施例所揭露之缺陷記憶胞之篩選方法, 其第一次驗證記憶胞抹除失敗而抹除記憶區塊中所有記憶 胞一次後即進行下一個記憶胞之驗證的設計,加上第二次驗 證§己憶胞抹除失敗而篩選記憶胞為缺陷記憶胞之設計,可以 有效地且明確地篩選缺陷記憶胞。因此,進而降低記憶胞產 生過度抹除(over erase)的機率,並且防止記憶胞產生漏 電流的現象。 綜上所述,雖然本發明已以一較佳實施例揭露如上, 然其並非用以限定本發明。本發明所屬技術領域中具有通常 知識者,在不脫離本發明之精神和範圍内,當可作各種之更 動與潤飾。因此,本發明之保護範圍當視後附之申請專利範 圍所界定者為準。 TW2992PA 15 1304989 布圖 圖式簡單說明】 第1圖繪示乃傳統之記憶區塊被抹除後的門檻電壓分 第2圖繪示乃依照本發明之不受缺陷記憶胞邀 界電壓分布圖。 〜a 第3圖繪示乃依照本發明之較佳實施例之缺陷兮 之篩選方法的流程圖。 、^ 之臨 憶胞TW2992PA 14 1304989 > and pole D. Next, a suitable negative polarity voltage is applied to the control gate CG of each of the memory cells, e.g., to apply a voltage through the corresponding word line. Then, a voltage is applied to the germanium substrate 30. The voltages applied to the control gate and the germanium substrate are, for example, -8 volts and 9 volts, respectively. Then, the electrons originally stored in the floating gate will be injected into the crucible substrate 30 due to the Fowler-Nordheim electron tunneling (FN tunneling) effect, so that the threshold of the memory cell The voltage drops to achieve the erase effect. The screening method for the defective memory cell disclosed in the above embodiment of the present invention, the first verification of the memory cell erasure failure and erasing all the memory cells in the memory block once, then performing the verification of the next memory cell, plus The second verification § the design of the memory cell is a defective memory cell, and the defective memory cell can be effectively and clearly screened. Therefore, the probability of over-erasing of the memory cells is further reduced, and the phenomenon that the memory cells generate leakage current is prevented. In view of the above, the present invention has been disclosed in a preferred embodiment, and is not intended to limit the present invention. A person skilled in the art can make various changes and modifications without departing from the spirit and scope of the invention. Therefore, the scope of the invention is defined by the scope of the appended claims. TW2992PA 15 1304989 Layout Diagram Brief Description of the Drawings Figure 1 shows the threshold voltage after the erase of the conventional memory block. Fig. 2 is a diagram showing the voltage distribution of the unrestricted memory cell in accordance with the present invention. ~a Figure 3 is a flow chart showing a method of screening for defects 依照 in accordance with a preferred embodiment of the present invention. , ^之之
圖 第4圖繪示乃應用第3圖之方法的記憶體的窗 第5圖繪示乃第4圖之記憶體之單一記憶 。 第6麟示乃第5圖之記憶胞的被抹除時的電;生= 乍。 【主要元件符號說明】 20 :記憶體Fig. 4 is a view showing a window of a memory which is applied by the method of Fig. 3. Fig. 5 is a view showing a single memory of the memory of Fig. 4. The sixth Lin is the electricity when the memory cells of Figure 5 are erased; the birth = 乍. [Main component symbol description] 20 : Memory
21 ··記憶區塊 22 (1)〜22 (25):第1個記憶胞 3〇 :矽基底 第25個記憶胞 B1〜B5 :位元線 CG :控制閘極 D ·〉及極 FG:浮接閘極 S :源極 S1〜S5 :源線 W1〜W5 :字元線21 ··Memory block 22 (1)~22 (25): The first memory cell 3〇: The 25th memory cell B1~B5 of the 矽 base: Bit line CG: Control gate D ·> and pole FG: Floating gate S: source S1~S5: source line W1~W5: word line
TW2992PA 16TW2992PA 16
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