1303197 九、發明說明 發明所屬之技術領域】 本發明係有關於一種壓電驅動△ 法，特別是有關於動十口之機構與其驅動方 驅動使可持…“…塗電曰曰體和驅動壓電晶體來 與其驅動方法。 之壓電驅動平台之機構 【先前技術】 近年來工業已朝著精密化之目標發展， 位更為目前發展之重點。由精後之驅動定 法因應高精密工業的需：：=?傳動的定位精度已無 示w而水，因而有許多種型 台發展出來，盆中由女一 γ i式之疋位驅動平 序故H 具有咼位移解析度、高剛性、反應遠 又丨、專k點，壓電驅動平台常 Μ 、 驅動平台由於壓電晶體 式壓電驅動平台為2 制’其行程皆很短’場動 台。 α ‘、、、服此限制之—長行程移動壓電驅動平 請參照第1圖，JL孫給一羽1 驅動原理示意圖。壓雷不广知之螺動式壓電驅動平台的 % ^ φ "、驅動平台10包含有固定桿11、及三 二)上二器12、13和14。固定桿11係固設於基座（： 捍11，壓I電致動15 12和14可分別收縮夾持或放開固定 η屋電致動器13係設置於二組塵電致動器12 間，並可延著固定桿u 心 電致動器1”裝設—平二：行伸張及收縮之移動’壓 第丨岡+台（未繪示），用以承載物件。如 “所示，當壓電驅動平台】〇作動時，壓電致 1303197 動态12先夾持住固定桿n，壓電致動器 定EkA D 纫為13再从A點為固 •、、占向6點致動伸張，因而帶動平台向壓電致動器工4 向移動。接著，如第1圖之狀態b所示，在壓電致動 失持住固定桿11後，壓電致動器12再解除對固定桿|丨的 失持。然後，如第1圖之狀態C所示，壓電致動器丨3再 以B點為固定點自B點致動收縮。藉此，當壓電驅動平2 10不斷重覆上述動作時，壓電驅動平台1〇即可持續的沿二 特定方向移動。上述之壓電平台驅動方式，一般稱為蠕Z式 壓電驅動方法。然而，壓電驅動平台i 〇之壓電致動器1 2 13和14在進行各收縮或伸張動作之間，必然會有一停頓的 時刻產生，因而導致壓電驅動平台10之整體運動不連續， 進而產生平台進給速度不穩定的現象，同時由於每一動作循 %之位移很短（數十微米），從靜止加速後很快就須減速至靜 止，其運動速度無法提高。再者，由於壓電晶體有推力很大 拉力卻很小之特性，其組裝設計除支撐施力之考量外，還須 考量預壓之設計，使其推力與拉力趨於平衡，因而習知之壓 電驅動平台1 0的整體構造複雜，組裝構件的數目繁多，故 增加整體設計的困難及成本，更容易在組裝時產生組配間 隙’造成動力傳動不良、有效位移縮減、及不當噪音。 【發明内容】 因此，本發明之一方面係在於提供一種壓電驅動 平台的機構與其驅動方法，藉以使用一體成型之方式來 製成單一構件的驅動機構，並利用二個定位壓電晶體和二個 1303197 驅動壓電晶體的定位與致動，以簡化整體結構，且可持 速而不須斷續走停，確保整體運動順暢，速度大幅提高，^ 減少不必要之位移損失與滑動摩擦，因而解決構件數目過多 容易產生組配間隙的問題，進而克服動力傳動不良、不去 音和運動斷續走停的現象。 田一 ，根據本發明之較佳實施例，此壓電驅動平台之機構 至：包含基座、驅動機構、二個定位壓電晶體及二個驅動麗 電曰曰體基座上设有執道，以供驅動機構容設於其中；驅動 機構係以一體成型 <方式來製成，驅動機構上有設置於其中 間位置之連接部。定位壓電晶體係分別設置於驅動機構之二 =，以定位驅動機構於基座之執道内。驅動壓電晶體係分別 設置於連接部和m壓電晶體之間的驅動機構内，以驅 動驅動機構於基座之執道内移動行進。 根據本發明之較佳實施例，在此壓電驅動平台之. 首先，k供驅動機構於基座之軌道内，其中 驅動機構⑦置有連接部、第—定位部、第二定位部、二個定 位壓電晶體及二個驅動壓電晶體，連接部係設置於驅動機構 之中間=置；第一定位部和第二定位部係分別設置於驅動機 ，之，端；二定位壓電晶體係分別設置於第一定位部及第二 ^卩中以疋位驅動機構於軌道内；二驅動壓電晶體係分 ;連接U卩與第一定位部及第二定位部間之驅動機構 驅動驅動機構於軌道内延伸。接著，定位驅動機構之 ^ 疋位。P於轨道内。然後，驅動驅動機構於執道内延伸一 4移里接著，解除驅動機構之第一定位部的定位，並同時 1303197 定位驅動機構之第二定位部於軌道内，以使驅動機構在執道 内形成仃進移動。其中，當驅動機構之二定位壓電晶體分別 進行疋位5又疋及定位解除的交替步驟時，二驅動壓電晶體亦 分別進行同方向的伸張與收縮交替運動，以使連接部上之承 載台可以持續加速行進而不須斷續走停，而當每一定位壓電 晶體要從定位解除狀態變成定位設定狀態時，二個驅動壓電 晶體係分別進行等速且反向運動，使定位壓電晶體在開始失 緊執道時速度為零，以緩和定位壓電晶體開始夾緊轨道時之 定位滑動摩擦。 t 因此，本發明可簡化整體構造，以避免組配間隙產生， 且讓平台可以持續長行程加速行進，避免斷續走停，增加平 台運動之穩定度及順暢性，來改善習知之料式壓電=平 台具有整體運動不連續之缺點；同時，減少不必要之定位、、取 動摩擦，降低整體行進噪音。 ， 【實施方式】 繪示根據本發明之較佳實施例之壓BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a piezoelectric driving Δ method, and more particularly to a mechanism for driving a ten-port and driving with a driver to enable it to be held... "...coating body and driving pressure The transistor is driven by its method. The mechanism of the piezoelectric drive platform [previous technology] In recent years, the industry has been developing towards the goal of precision, which is more important for the current development. The driving method of the finer is to meet the needs of high-precision industry. ::=? The positioning accuracy of the transmission has not shown w and water, so many types of stations have been developed. In the basin, the female-γ-type clamp drives the sequence, so H has the 咼 displacement resolution, high rigidity, and reaction. Far and 丨, special k point, piezoelectric drive platform is often, the drive platform is due to the piezoelectric crystal type piezoelectric drive platform is 2 system 'its stroke is very short' field moving table. α ',,, and this limit - For the long-stroke moving piezoelectric drive, please refer to Figure 1. JL Sun gives a schematic diagram of the 1 drive principle. The % ^ φ " of the screw-type piezoelectric drive platform is not widely known. The drive platform 10 includes a fixed rod 11 And three The upper two 12, 13 and 14. The fixed rod 11 is fixed on the base (: 捍11, the pressure I is electrically actuated 15 12 and 14 can be respectively contracted or released to fix the η electric actuator 13 It is installed between the two sets of dust electric actuators 12, and can be installed along the fixed rod u ECG actuator 1" - Ping 2: the movement of the extension and contraction of the line 'pressured 丨 + + + (not shown) For carrying objects. As shown in the figure, when the piezoelectric drive platform is activated, the piezoelectric 1303197 dynamic 12 first holds the fixed rod n, and the piezoelectric actuator sets the EkA D to 13 and then from A. The point is solid, and the 6-point actuation is extended, thereby driving the platform to move toward the piezoelectric actuator. Then, as shown in the state b of Fig. 1, the piezoelectric actuator is dislocated to fix the rod. After 11th, the piezoelectric actuator 12 releases the loss of the fixed rod|丨. Then, as shown in the state C of Fig. 1, the piezoelectric actuator 丨3 is again fixed at point B from point B. Dynamic contraction, whereby the piezoelectric driving platform 1 可持续 is continuously movable in two specific directions when the piezoelectric driving is continuously repeated. The piezoelectric platform driving method is generally called a creeping Z type.Piezoelectric driving method. However, between the piezoelectric actuators 1 2 13 and 14 of the piezoelectric driving platform i, between the respective contraction or stretching operations, there is bound to be a pause moment, thereby causing the piezoelectric driving platform 10 The overall motion is discontinuous, which in turn causes the platform feed rate to be unstable. At the same time, since the displacement of each action is very short (tens of micrometers), it is necessary to decelerate to a standstill after accelerating from standstill, and the speed of movement cannot be improved. Furthermore, since the piezoelectric crystal has a large thrust force and a small pulling force, the assembly design must consider the design of the preloading force in consideration of the supporting force, so that the thrust and the pulling force tend to balance, so that it is known. The overall structure of the piezoelectric driving platform 10 is complicated, and the number of assembled components is numerous, so that the difficulty and cost of the overall design are increased, and it is easier to generate a matching gap during assembly, resulting in poor power transmission, effective displacement reduction, and improper noise. SUMMARY OF THE INVENTION Accordingly, it is an aspect of the present invention to provide a mechanism for driving a piezoelectric driving platform and a driving method thereof, thereby forming a driving mechanism of a single member by using an integral molding method, and utilizing two positioning piezoelectric crystals and two The 1303197 drives the positioning and actuation of the piezoelectric crystal to simplify the overall structure, and can maintain the speed without intermittent stoppage, ensuring smooth overall movement, greatly increasing the speed, and reducing unnecessary displacement loss and sliding friction. Solving the problem that the number of components is too large is easy to produce a matching gap, thereby overcoming the phenomenon of poor power transmission, no sound cancellation and intermittent movement. Tian Yi, according to a preferred embodiment of the present invention, the mechanism of the piezoelectric driving platform includes: a base, a driving mechanism, two positioning piezoelectric crystals, and two driving galvanic bases The driving mechanism is accommodated therein; the driving mechanism is formed in an integral molding manner, and the driving mechanism has a connecting portion disposed at a middle position thereof. The positioning piezoelectric crystal system is respectively disposed on the second of the driving mechanism to position the driving mechanism in the way of the base. The driving piezoelectric crystal system is respectively disposed in the driving mechanism between the connecting portion and the m piezoelectric crystal to drive the driving mechanism to move in the course of the pedestal. According to a preferred embodiment of the present invention, in the piezoelectric driving platform, first, the driving mechanism is disposed in the track of the base, wherein the driving mechanism 7 is provided with a connecting portion, a first positioning portion, a second positioning portion, and two a positioning piezoelectric crystal and two driving piezoelectric crystals, the connecting portion is disposed in the middle of the driving mechanism = the first positioning portion and the second positioning portion are respectively disposed on the driving machine, the end; the second positioning piezoelectric crystal The system is respectively disposed in the first positioning portion and the second portion to clamp the driving mechanism in the track; the second driving piezoelectric crystal system is divided; the driving mechanism driving between the U 卩 and the first positioning portion and the second positioning portion is driven The mechanism extends within the track. Next, locate the ^ position of the drive mechanism. P is in the orbit. Then, the driving drive mechanism extends in the tunnel for 4 movements, then the positioning of the first positioning portion of the driving mechanism is released, and at the same time, 1303197 locates the second positioning portion of the driving mechanism in the rail, so that the driving mechanism is formed in the lane. Move in. Wherein, when the two positioning piezoelectric crystals of the driving mechanism perform the alternating steps of clamping 5 and clamping and positioning, respectively, the two driving piezoelectric crystals respectively perform the extension and contraction alternate movements in the same direction to make the bearing on the connecting portion The table can continue to accelerate without stopping intermittently, and when each positioning piezoelectric crystal is changed from the positioning release state to the positioning setting state, the two driving piezoelectric crystal systems respectively perform constant velocity and reverse motion to make positioning. The piezoelectric crystal has zero velocity at the beginning of the misalignment, so as to alleviate the positioning sliding friction when the piezoelectric crystal starts to clamp the track. Therefore, the present invention can simplify the overall structure to avoid the formation of the gap, and allow the platform to continue to travel for a long stroke, avoid intermittent stoppage, increase the stability and smoothness of the platform motion, and improve the conventional material pressure. Electricity = platform has the disadvantage of overall motion discontinuity; at the same time, it reduces unnecessary positioning, takes friction, and reduces overall traveling noise. [Embodiment] The pressure according to the preferred embodiment of the present invention is shown.
5月參照第2圖，繪示根據本發 動平台之機構的爆炸示意圖。本實 構至少包括··基座20、驅動機構 1303197 及驅動壓電晶體51和52係設置於驅動機構3〇中， 丨疋位壓 電晶體41和42及驅動壓電晶體51和52係分別以壓電材料 製成。因此，在接受一特定電壓訊號後，定位壓電晶體Μ 和42及驅動壓電晶體5 1和52會產生特定方向之伸縮形 變。承載台60係組設於驅動機構30上之連接部33，用以 承载物件。當施加電壓訊號於本發明之壓電驅動平台時，定 位壓電晶體41和42及驅動壓電晶體51和52即可產生來 變，因而致動驅動機構30在基座20之執道21内運動，並 帶動承載台60,而使物件在基座2〇上移動。藉此，本發明 之壓電驅動平台可利用施加電壓訊號來控制承載台6〇在基 座20上之定位與運動。 請參照第2圖和第3圖，第3圖係繪示根據本發明之較 佳實施例之驅動機構的立體示意圖。本實施例之壓電驅動平 台之驅動機構30係以例如線切割等之一體成型的方式來製 成，其材料可為具有高彈性模數及高降伏強度之材料，例 如·兩奴鋼。驅動機構30設有定位部3丨和32、連接部33、 驅動槽34和35、複數個預壓部％及複數個螺孔37。定位 口P 3 1和32係刀δ又置於驅動機構3〇之兩端，連接部係位 於驅動機構30的中間位置。定位部31上具有定位槽31〇, 定位部32上具有定位槽320，以供定位壓電晶體41和42 卡，又疋位壓電曰曰體41和42之設置方向係垂直於驅動機構 30於轨道21 Θ之行進方向（如第2圖所示），以產生垂直於 轨道21之方向的$變。驅動槽3 *係設置於定位部3 i與連 接^ 33之間.驅動槽35係設置於定位部32與連接部 10 1303197 之間’以供驅動壓電晶體5 1和52卡設。驅動壓曰 ^ co 包日日體5 1 和52之設置方向係平行於驅動機構3〇於軌道内之行進方口 (如第2圖所示），以產生平行於軌道21之方向的形變。: 數個預壓部36分別係形成於定位槽31〇和32〇及驅動槽w 和35之兩侧，預壓部36係設計成具有彈力的結構（如% 3 圖所示），例如··曲折及細頸彈簧，以使驅動機構3〇在預 壓迫一機械力後可產生一彈性收縮拉力，藉此，驅動機構 3〇可在伸張致動後自動彈性收縮，並藉由機構之彈簧性質 而將定位壓電晶體41和42及驅動壓電晶體51和同時產 生支撐施力及預壓之效果。同時，由於預壓部36係分別形 成於疋位槽3 1 〇和320及驅動槽34和35之兩側，故預壓部 3曰6之彈力收縮可分別使定位壓電晶體41和42及驅動壓電 日日體51和52緊密的卡設於定位槽310和320及驅動槽34 # 35内’而無需添加任何黏著劑，因而減少組配間隙，並 ;避免出力不足及定位誤差之情形產生。另外，預壓部刊的 設置可減少壓電晶體與凹槽（定位槽和驅動槽）的接觸面 積因而減少壓電晶體與凹槽間的摩擦力。螺孔37可供承 載口 60螺^又組裝於驅動機構3〇上，以承載物件。 一請參照第4圖，其綠示根據本發明之較佳實施例之驅動 “ 動作呀序圖。本實施例之壓電驅動平台係應用例如 MATLAB #可設計控制波形的程式軟體來設計平台致動所 對，之波形，此波形係依據定位壓電晶體Μ # ^及驅動廢 電曰曰體5 1和52之動作而預先對應設計，因而定位壓電晶體 42及驅動壓電晶體5 1和52可依據此預設之波形，來 11 1303197 分別動作。此預設之波形係如 晶體4〗和42及驅動麼 八揭不疋位壓電 對應關係，X軸代表時…在形變量和時間 41 , ' 而γ軸分別代表定位壓電 41和42及驅動麼電晶體5】和52之預設形變量。因^曰體 第4圖之波形得知定位壓電晶體 可 ^ ^日日菔41和42及驅動壓雷曰雜 和…作情形，且可由波形之斜率推 二…驅㈣電晶體…之動作方向和逮率電二 :位麼電晶體41和42及驅峨晶體“和”係以電堡形 ，之Hfl號控制，故須利用訊號轉換卡（未繪示），來 波形數位訊號轉換成類比訊號。接著，利用放大電路(未给 不）放大各類比訊號為可分別控制驅動驅動機構％上各^ 電晶體的訊號’以致動定位壓電晶體41和42及驅動堡電晶 體51和52，使其產生形變，而使驅動機構產生移動行 進0 請參照第4圖和第5圖，第5圖料示根據本發明之較 ‘實施例之壓電驅動平台之驅動方法的示意圖。首先，如第 5圖之狀態a所示，其係對應於第4圖之區段&，。利用電壓 訊號控制，使位於第一定位部31之定位壓電晶體41形成完 全垂直伸張形變，導致驅動機構30之定位部31可垂直抵住 基座2〇之軌道21内的側壁，而抵撐定位於其中（即抵撐定 位的動作）；並使位於定位部32之定位壓電晶體42形成完 全垂直收縮，以解除驅動機構3〇之定位部32於基座2〇之 軌道21内的定位（即解除定位的動作）。此時，驅動壓電晶 體51、52係皆恰進行平行伸張驅動（即驅動位移的動作）， 12 1303197 —第圖之區段a’所示’目而驅動機構30之連接部33及 疋位部皆沿著軌道方向平行延伸一特定位移量。 〜接著如帛5圖之狀態、b所示，其係對應於第*圖之區 利用電壓訊號控制，使位於定位部3五之定位壓電曰 開始收縮，並使位於定位部32之定位壓電晶體42: °直伸張，此時，驅動機構30之定位部3 1和32皆未垂 直抵揮疋位於軌道21内。此時，由於驅動壓電晶體5】和 52間之伸縮致動設有一時間差（如第4圖所示），故在定位壓 電晶體W和定位壓電晶體42未抵撐定位的期間（即第4圖 之區段b，），驅動壓電晶體51係恰進行伸張致動，而驅動壓 電晶體52則係正進行收縮致動，即驅動壓電晶體5ι、μ 係分^進行等速且反向運動（如第4圖之區段b，所示），因而 導致疋位部32沿軌道21之平行方向上的整體速度為零。因 此，當定位壓電晶體42恰伸張定位於軌道21時，定位部 W，可減少沿著軌道21方向上之滑動摩擦，因而改善本發明 之壓電驅動平台之行進速度損失及噪音產生之現象。 接著，如第5圖之狀態c所示，其係對應於第4圖之區 段c’。利用電壓訊號控制，使位於第一定位部31之定位壓 電晶體41收縮完全，而解除驅動機構3〇之定位部31於基 座20之執道21内的定位（即解除定位的動作），並使位於定 位部32之定位壓電晶體42完全垂直伸張，因而驅動機構 3〇之定位部32可抵撐定位在基座20之執道21内（即抵撐 定位的動作）。此時，驅動壓電晶體51、52皆係進行收縮致 動，如第4圖之區段c，所示。因此，相較於第5圖之狀態&， 13 1303197 驅動機構3 〇之遠接都Q， 、 接"卩以及疋位部3 1已沿著執道平行移動 上述之特定位移量。 接I >第5圖之狀態d所示，其係對應於第*圖之區 利用電壓汛號控制，使位於定位部3 1之定位壓電晶 ” ]σ伸張，並使位於驅動機構30之定位部32之定位 壓電晶體42開妒必始,,odu . ^ 立 比 1始收細此時，在第一定位部3 1及第二定位 部U皆^抵料位於軌道21内的期間（即第4圖之區段 d )駆動壓電晶體5 i係恰進行收縮致動，驅動壓電晶體μ 則恰係進行平行伸張致動，即驅動壓電晶體51和52分別進 仃等速且反向運動（如第4圖之區段b，所示），導致定位部 31沿軌道21彳向上之整體速度為零，藉此減少第一定位部 3 1於執道2 1内之滑動摩擦。 …然後’如第5圖之狀態6所示，其係對應於第4圖之區 ^又e °利用電壓訊號控制，使位於定位部3 1之定位壓雷曰 一伸張完全，導致驅動機構30之定位部31抵撐定位於 基座^ 2〇之轨道21内，並使位於定位部32之定位壓電晶體 42完全收縮，以解除驅動機構3〇之定位部32於基座μ之 軌道21内的定位。此時，驅動壓電晶體5 1和52皆進行平 行伸張致動’如第4圖之區段e，所示。相較於第5圖之狀 態2，驅動機構3〇整體結構已沿著執道移動上述之特定位 移ΐ。因此，藉由重覆不斷的進行第5圖之狀態&至狀態e 之動作（即第4圖之區段a，至區段e，），驅動機構3〇可^斷 的於基座20之軌道内平行前進，因而驅動承載台60長行程 行進移動。在本實施例中，本發明之壓電驅動平台之位移精 14 1303197 度依位移感測器可達奈米等級’因此本發明之壓 確實2利用遷電驅動方式精密長行程致動定 十。口In May, referring to Fig. 2, a schematic diagram of the explosion of the mechanism according to the launching platform is shown. The present embodiment includes at least a susceptor 20, a driving mechanism 1303197, and driving piezoelectric crystals 51 and 52 disposed in the driving mechanism 3A, the clamping piezoelectric crystals 41 and 42 and the driving piezoelectric crystals 51 and 52 respectively Made of piezoelectric material. Therefore, after receiving a specific voltage signal, positioning the piezoelectric crystals Μ and 42 and driving the piezoelectric crystals 5 1 and 52 produces a telescopic deformation in a specific direction. The carrier 60 is a connecting portion 33 that is assembled to the drive mechanism 30 for carrying articles. When the voltage signal is applied to the piezoelectric driving platform of the present invention, the positioning of the piezoelectric crystals 41 and 42 and the driving of the piezoelectric crystals 51 and 52 can be changed, thereby actuating the driving mechanism 30 in the way 21 of the susceptor 20. The vehicle is moved and the carrier 60 is driven to move the object on the base 2 . Thereby, the piezoelectric driving platform of the present invention can control the positioning and movement of the carrier 6 on the base 20 by applying a voltage signal. Referring to Figures 2 and 3, Figure 3 is a perspective view of a drive mechanism in accordance with a preferred embodiment of the present invention. The driving mechanism 30 of the piezoelectric driving platform of the present embodiment is formed by one-piece molding such as wire cutting, and the material thereof may be a material having a high modulus of elasticity and a high derating strength, for example, two slave steels. The drive mechanism 30 is provided with positioning portions 3A and 32, a connecting portion 33, drive grooves 34 and 35, a plurality of pre-pressing portions %, and a plurality of screw holes 37. The positioning ports P 3 1 and 32 are knives δ which are placed at both ends of the drive mechanism 3, and the connecting portion is located at an intermediate position of the drive mechanism 30. The positioning portion 31 has a positioning groove 31, and the positioning portion 32 has a positioning groove 320 for positioning the piezoelectric crystals 41 and 42, and the clamping piezoelectric bodies 41 and 42 are disposed perpendicular to the driving mechanism 30. In the direction of travel of the track 21 (as shown in Figure 2), a change is made to the direction perpendicular to the direction of the track 21. The driving groove 3* is disposed between the positioning portion 3i and the connecting portion 33. The driving groove 35 is disposed between the positioning portion 32 and the connecting portion 101303197' for driving the piezoelectric crystals 51 and 52 to be engaged. The drive pressure 曰 co is set in a direction parallel to the travel opening of the drive mechanism 3 in the track (as shown in Fig. 2) to produce a deformation parallel to the direction of the track 21. A plurality of pre-pressing portions 36 are respectively formed on the positioning grooves 31A and 32A and the driving grooves w and 35, and the pre-pressing portion 36 is designed to have an elastic structure (as shown in % 3), for example a meandering and thin-necked spring, so that the driving mechanism 3 can generate an elastic contraction pulling force after pre-compressing a mechanical force, whereby the driving mechanism 3 can automatically elastically contract after the stretching and actuation, and the spring of the mechanism The properties of the piezoelectric crystals 41 and 42 and the driving of the piezoelectric crystal 51 and the simultaneous application of force and preload are simultaneously generated. At the same time, since the pre-pressing portions 36 are respectively formed on the two sides of the clamping grooves 3 1 〇 and 320 and the driving grooves 34 and 35, the elastic contraction of the pre-pressing portions 3曰6 can respectively position the piezoelectric crystals 41 and 42 and The driving piezoelectric day bodies 51 and 52 are tightly clamped in the positioning grooves 310 and 320 and the driving groove 34 #35 without adding any adhesive, thereby reducing the assembly gap and avoiding insufficient output and positioning error. produce. In addition, the pre-pressing section can reduce the contact area between the piezoelectric crystal and the groove (positioning groove and driving groove) and thus reduce the friction between the piezoelectric crystal and the groove. The screw hole 37 is provided for the bearing port 60 to be assembled to the drive mechanism 3 to carry the article. Please refer to FIG. 4, which shows the driving action diagram according to the preferred embodiment of the present invention. The piezoelectric driving platform of the embodiment is applied to a platform software such as MATLAB # which can design a control waveform to design a platform. The waveform of the moving pair is designed in advance according to the action of positioning the piezoelectric crystal Μ # ^ and driving the waste electric bodies 5 1 and 52, thereby positioning the piezoelectric crystal 42 and driving the piezoelectric crystal 5 1 and 52 can be operated according to the preset waveform, 11 1303197. The preset waveform is such as crystal 4 〗 〖 and 42 and the driving is not the same as the piezoelectric relationship, the X axis represents the time... in the shape variable and time 41 , ' and the γ axis represents the preset shape variables of the positioning piezoelectric 41 and 42 and the driving transistor 5 and 52. The waveform of the fourth figure shows that the positioning of the piezoelectric crystal can be obtained. 41 and 42 and drive the thunder and noisy and ... as the situation, and can be pushed by the slope of the waveform ... drive (four) transistor ... the direction of action and the rate of electricity two: the position of the crystal 41 and 42 and the drive crystal "and" It is controlled by electric castle shape and Hfl number, so it is necessary to use signal conversion card (not drawn The waveform digital signal is converted into an analog signal. Then, the amplification circuit (not given) is used to amplify the various types of signal signals to respectively control the signals of the transistors on the drive driving mechanism % to actuate the positioning piezoelectric crystal 41. And 42 and drive the bakelites 51 and 52 to deform them, and cause the drive mechanism to move and travel. Referring to Figures 4 and 5, FIG. 5 is a view showing a piezoelectric device according to the present invention. Schematic diagram of the driving method of the driving platform. First, as shown in the state a of Fig. 5, it corresponds to the section & of Fig. 4. Using the voltage signal control, the positioning piezoelectricity of the first positioning portion 31 is made. The crystal 41 forms a completely vertical extension deformation, so that the positioning portion 31 of the driving mechanism 30 can vertically abut against the side wall in the rail 21 of the base 2, and the positioning is resisted therein (ie, the action of resisting positioning); The positioning piezoelectric crystal 42 of the portion 32 is formed to be completely vertically contracted to release the positioning of the positioning portion 32 of the driving mechanism 3 in the track 21 of the base 2 (i.e., the action of releasing the positioning). At this time, the piezoelectric crystal 51 is driven. 52 series The parallel stretching drive (i.e., the action of driving displacement) is carried out, and 12 1303197 - the portion a' of the figure shown in the figure, the connecting portion 33 and the clamping portion of the driving mechanism 30 extend in parallel along the track direction by a specific displacement amount. Then, as shown in the state of FIG. 5 and b, it is controlled by the voltage signal corresponding to the area of the figure, so that the positioning piezoelectricity located at the positioning portion 3 starts to shrink, and the positioning pressure at the positioning portion 32 is made. The transistor 42 is stretched straight, and at this time, the positioning portions 3 1 and 32 of the driving mechanism 30 are not vertically slid in the track 21. At this time, due to the telescopic actuation between the driving piezoelectric crystals 5 and 52 There is a time difference (as shown in Fig. 4), so during the period in which the positioning piezoelectric crystal W and the positioning piezoelectric crystal 42 are not supported (i.e., the segment b in Fig. 4), the piezoelectric crystal 51 is driven. Stretching actuation, while driving the piezoelectric crystal 52 is undergoing contraction actuation, that is, driving the piezoelectric crystal 5, μ, to perform constant velocity and reverse motion (as shown in section b of Figure 4), Thus, the overall velocity of the clamp portion 32 in the parallel direction of the track 21 is zero. Therefore, when the positioning piezoelectric crystal 42 is positioned and positioned on the track 21, the positioning portion W can reduce the sliding friction in the direction along the track 21, thereby improving the traveling speed loss and the noise generation phenomenon of the piezoelectric driving platform of the present invention. . Next, as shown in the state c of Fig. 5, it corresponds to the segment c' of Fig. 4. By using the voltage signal control, the positioning piezoelectric crystal 41 located in the first positioning portion 31 is completely contracted, and the positioning of the positioning portion 31 of the driving mechanism 3 in the way 21 of the base 20 (ie, the action of releasing the positioning) is released. The positioning piezoelectric crystal 42 located at the positioning portion 32 is completely extended vertically, so that the positioning portion 32 of the driving mechanism 3 can be positioned to be positioned in the lane 21 of the base 20 (ie, the action of resisting positioning). At this time, the driving piezoelectric crystals 51, 52 are both subjected to contraction actuation as shown in the section c of Fig. 4. Therefore, compared with the state & Fig. 5, the drive mechanism 3 of the 13 1303197 is connected to the Q, the "" and the clamp portion 3 1 have been moved in parallel along the obstruction to the above specific displacement amount. In the state d of FIG. 5, it is controlled by the voltage nickname corresponding to the area of the first figure, so that the positioning piezoelectric crystal located at the positioning portion 31 is stretched and placed at the driving mechanism 30. The positioning of the piezoelectric crystal 42 of the positioning portion 32 must start, odu. ^ The ratio of the first ratio is reduced, and the first positioning portion 3 1 and the second positioning portion U are both placed in the rail 21 . During the period (ie, the segment d of FIG. 4), the piezoelectric crystal 5 i is just contracted and actuated, and the piezoelectric crystal μ is driven to perform parallel stretching actuation, that is, driving the piezoelectric crystals 51 and 52 respectively. The speed and the reverse motion (as shown in the section b of FIG. 4) cause the overall speed of the positioning portion 31 along the track 21彳 to be zero, thereby reducing the first positioning portion 31 in the lane 2 1 Sliding friction. ... then 'as shown in state 6 of Fig. 5, which corresponds to the area of Fig. 4 and e ° is controlled by voltage signal, so that the positioning of the positioning portion 3 1 is completely extended, resulting in The positioning portion 31 of the driving mechanism 30 is supported in the rail 21 positioned on the base 2, and the positioning piezoelectric crystal 42 located in the positioning portion 32 is completely contracted. The positioning of the positioning portion 32 of the driving mechanism 3 in the track 21 of the susceptor μ is released. At this time, the driving piezoelectric crystals 51 and 52 are both subjected to parallel stretching actuation as shown in the section e of Fig. 4. Compared with the state 2 of Fig. 5, the overall structure of the driving mechanism 3 has moved the above-mentioned specific displacement 沿着 along the obstruction. Therefore, the state of the fifth figure & to the state e is continuously performed by repeating ( That is, the section a of the fourth figure, to the section e,), the drive mechanism 3 can be parallelly advanced in the track of the base 20, thereby driving the carriage 60 to travel for a long stroke. In this embodiment, The displacement of the piezoelectric driving platform of the invention is 14 1303197 degrees, and the displacement sensor can reach the nanometer level. Therefore, the pressure of the present invention is determined by the precise long stroke actuation of the electric drive mode.
簡吕之，本發明之壓電驅動平 J ^ 您機構及其驅動方法， 其特徵在於驅動機構係利用一體成型之方式製一 件，簡化整體平台結構，以避免過多構件組配不當所 動力傳動不良、定位誤差及間隙噪音等問題，且可進一井辦 加機構設計裕度。再者，本發明之壓電驅動平台之另一 係在於使用二個驅動壓電晶體進行伸縮致動，以便承載二^ 在二個定位壓電晶體分別不斷進行抵撐定位及解除定彳 ^ 斷續動作時’不必跟著斷續走停’可持續加速而無運動抖頓 之現象產生，亦可大幅提高整體平台之行進速度。另外，二 個驅動壓電晶體間之相互作動控制可減少不必要之滑動摩 擦及整體噪音產生，使本發明之壓電驅動平台進一步具有運 動順暢及減少噪音之功效。 由上述本發明較佳實施例可知，應用本發明之壓電驅動 平台之機構與其驅動方法，其優點在於簡化驅動構造，以避 免過多構件組配不當。並藉由二個驅動壓電晶體之致動控 制，增加平台運動之穩定度及順暢性，因而改善習知之蠕動 式壓電驅動平台整體運動不連續及移動緩慢之缺點。同時， 由於減少不必要之運動摩擦，因而確保平台之長行程運動速 度及降低整體行進噪音。 雖然本發明已以一較佳實施例揭露如上，然其並非用以 限定本發明，任何熟習此技藝者，在不脫離本發明之精神和 範圍内，當可作各種之更動與潤飾，因此本發明之保護範圍 當視後附之申請專利範圍所界定者為準。 15 1303197 【圖式簡單說明】 *為讓本發明之上述和其他目的、特徵、和優點能更明顯 易it ’下文特舉一較佳實施例，並配合所附圖式，細說 明如下： ' 第1圖係繪示現今習知之一種蠕動式壓電驅動平台之 驅動原理示意圖； 第2圖係纷示根據本發明之一較佳實施例之壓電驅動 平台之機構的爆炸示意圖； ^ 第3圖係纷示根據本發明之一較佳實施例之壓電驅動 平口之驅動機構的立體示意圖； ^第4圖係綠示根據本發明之一較佳實施例之壓電驅動 平台之動作時序圖；以及 第 5 、， 圖係繪示根據本發明之一較佳實施例之壓電驅動 平台之驅動方法的示意圖。 【主要元件符號說明】 10 : 壓電驅動平台 11 ： :固定桿 12、 13、14 :壓電致動器 20 : 基座 21 執道 30 : 驅動機構 31 定位部 31〇 :定位槽 32 定位部 320 :定位槽 33 連接部 34、 3 5 ·驅動槽 36 預壓部 16 1303197 37 :螺孔 41、42 :定位壓電晶體 51、52 :驅動壓電晶體 60 :承載台Jane Luzhi, the piezoelectric driving flat J ^ of the present invention and its driving method are characterized in that the driving mechanism is formed by one-piece molding, which simplifies the overall platform structure, so as to avoid excessive power transmission of the components. Badness, positioning error and gap noise, etc., and can enter the design margin of the well. Furthermore, the other aspect of the piezoelectric driving platform of the present invention is to use two driving piezoelectric crystals for telescopic actuation, so as to carry the two positioning piezoelectric crystals continuously to resist positioning and release. When you continue to move, you don't have to follow the intermittent stoppage. The phenomenon of continuous acceleration without motion-shaking can greatly increase the speed of the overall platform. In addition, the mutual actuation control between the two driving piezoelectric crystals can reduce unnecessary sliding friction and overall noise generation, so that the piezoelectric driving platform of the present invention further has the effects of smooth motion and noise reduction. It will be apparent from the above-described preferred embodiments of the present invention that the mechanism for applying the piezoelectric drive platform of the present invention and its driving method have the advantage of simplifying the drive configuration to avoid improper assembly of excessive components. Moreover, by the actuation control of the two driving piezoelectric crystals, the stability and smoothness of the platform motion are increased, thereby improving the shortcomings of the conventional peristaltic piezoelectric driving platform in that the overall motion is discontinuous and the movement is slow. At the same time, the unnecessary travel friction is reduced, thereby ensuring the long stroke speed of the platform and reducing the overall traveling noise. Although the present invention has been described above in terms of a preferred embodiment, it is not intended to limit the invention, and it is obvious to those skilled in the art that various changes and modifications can be made without departing from the spirit and scope of the invention. The scope of the invention is defined by the scope of the appended claims. 15 1303197 BRIEF DESCRIPTION OF THE DRAWINGS The above and other objects, features, and advantages of the present invention will become more apparent. 1 is a schematic diagram showing the driving principle of a peristaltic piezoelectric driving platform which is conventionally known; FIG. 2 is a schematic exploded view showing the mechanism of a piezoelectric driving platform according to a preferred embodiment of the present invention; BRIEF DESCRIPTION OF THE DRAWINGS FIG. 4 is a perspective view showing a driving mechanism of a piezoelectric driving flat according to a preferred embodiment of the present invention; FIG. 4 is a timing chart showing the operation of a piezoelectric driving platform according to a preferred embodiment of the present invention. And 5, a diagram showing a driving method of a piezoelectric driving platform according to a preferred embodiment of the present invention. [Description of main component symbols] 10 : Piezoelectric drive platform 11 : : Fixing rods 12 , 13 , 14 : Piezoelectric actuator 20 : Base 21 Obstruction 30 : Drive mechanism 31 Positioning part 31 〇 : Positioning groove 32 Positioning part 320: positioning groove 33 connecting portion 34, 3 5 · driving groove 36 pre-pressing portion 16 1303197 37: screw hole 41, 42: positioning piezoelectric crystal 51, 52: driving piezoelectric crystal 60: carrying table
1717