1296558 九、發明說明： 【發明所屬之技術領域】 特別是關於一種利用紫 本發明係與製作修整器的方法有關 外線硬化製作修整器之方法。 【先前技術】 …研磨工具（abrasive t00l)、修整器（滅她恤勝）不 响疋在工業製造領域上、工藝與藝術創作上或是個人居家使用 上，皆已有相當長的歷史，其魏亦相t廣泛，可用來切削、鑽 孔、研磨或是拋光等。f知的研紅具、修整器的結構，是將多 數個磨粒齡_於於基㈣表面上。此種絲面上具有固著的 磨料顆粒之修綠，乃是儀絲麵所具有之高硬度與高耐磨 ^特性’來達到對卫作物研磨加工的功能。由於鑽奸目前所知 最硬的工料之―’所以工業上常彻鑽石來作為研磨工具、 修整益的超級磨料（super_abrasive)。舉例來說，大量用在半導 體曰S圓製造產業之化學機械研磨製程（Chemical Mechanical1296558 IX. Description of the invention: [Technical field to which the invention pertains] In particular, a method for producing a dresser by external line hardening using the method of the invention and the method of manufacturing the dresser. [Prior Art] ...abrasive tool (abrasive t00l), dresser (killing her shirt) does not sound in the field of industrial manufacturing, craft and artistic creation, or personal home use, has a long history, Wei Yixiang is widely used for cutting, drilling, grinding or polishing. The structure of the red and trimming device is known to be a plurality of abrasive grains on the surface of the base (four). The greening of the abrasive grains on the surface of the silk surface is the high hardness and high wear resistance of the surface of the yarn to achieve the function of grinding the crop. Because of the hardest materials currently known to be used, the industry often uses diamonds as a grinding tool and super_abrasive. For example, a large number of chemical mechanical polishing processes used in the manufacturing industry of semiconductors (Chemical Mechanical)
Polishing; CMP)中的研磨墊修整器，即是以鑽石為磨料顆粒的 修整1§。由於研磨墊的基本結構，乃是將複數個鑽石顆粒固著於 圓盤狀或圓環狀之金屬基板（metal substrate )(或稱台金 (base metal))的磨粒結合面上，因此，此種用於修整研磨墊 (polishing pad)的研磨工具亦被稱為「鑽石碟修整器」 (Diamond Disk Pad Conditioner 或 Pad Dresser)。 為解決研磨工具因鑽石附著強度不足所造成的鑽石顆粒脫落 I296558 I ’於是有在金屬黏著劑中加人會與鑽石產生碳化物的活性金 中=D鈦、鉻、鎢等，然後進行液相燒結或硬焊製程者。例如， +民國九十-年十—月十—日公告之發明中請案第gQ5_9 2利「鑽石修刀及其製法」，中華民國人十九年十—月二十一日 制、、之I明申明案第麵2461號「修整晶圓拖光塾的鑽石碟及其 O^tol’中爭民國九十""年人月二十—日公告之發明中請案第 —9348 ?虎「研磨工具及其製造方法」，以及中華民國九十三年 —十一日公告之發明申請案第_〇420號「具有最佳化方位 ύ之夕'磨物件及其製造方法」，皆描述有關於利用硬焊或燒結 之特微餘使鑽石齡與金屬黏著層產生化學鍵結，增強鑽石顆 粒的固=強度’使所製造的研磨卫具達到鑽石顆粒不脫落的要求。 a但是，由於在硬焊或燒結的過程中，t要花費較長的時間才 能，鑽石顆粒固著於金屬黏著層，如此—來，生產研磨工具的製 糾間-長’生產成本也會跟紐高。有鑑於此，為節省上述傳 統研磨工具f造方法的時間，有必要提出_種新的研磨工具的製 造方法。 【發明内容】 習知技術中的研磨工具中，將鑽石顆粒附著於基板上的加工 程序困難，硬焊錢結產生的高溫容騎基板或是鑽石顆粒造成 不良影響。鑒於以上的問題，本發明的主要目的在於提供一種利 用紫外線魏製作雜n之方法，係可節省成本與縮短製程時 間，並避免咼溫製程對磨料顆粒產生不良影響。 !296558 為了達成上述目的，本發明提供一 整器之H 用焦外線硬化製作修 光獒ί、一基板，利用旋轉塗佈 人，*㈣伽“ 傻_低黏性膠帶將銘板與網板結 再將純均勻麟_板孔洞f，瞒，鱗會祕帶盘網 ==㈣她板上’接著’將磨料暫時固定板置於基板 由使磨料顆粒與輔助黏著船目接觸，接著，辅助黏著劑硬化後， =使用旋轉塗佈(Spin CGating)將紫外線膠於輔助黏著劑上，最 後’用紫外線騎料轉，使料、轉硬化。 本發明之修㈣，錢觀含搞板、伽轉劑、-個以 上之磨科雌、料轉。將伽黏著繼魅佈於基板上，並 有一個以上之顧雜·雜麵上，將料線膠旋轉塗 佈(s_ CQatlng)於辅助黏著劑上，並填充於磨料顆粒之間。 本發明之功效在於’整修糾製作雜巾，並不需要透過高 溫製程來固定純雌，岐叫會魅高溫的料線來使紫外 線膠快速硬化，而將磨料顆粒岐，因此可以避免高溫對磨料顆 粒造成不良影響，同時提升整修器的生產速度。 乂下在心方式中洋細敘述本發明之詳細特徵以及優點，其 内谷足以使任何对相關技藝者了解本發明之技術内容並據以實 施有關本毛明的4寸欲與貫作，茲配合圖示作最佳實施例詳細說 明如下。 【實施方式】 根據本發明的其巾—種彻紫外線硬化雜修㈣之方法， 1296558 其步驟說明如下。 明芩閱第1A圖」’係為本發明之紫外線硬化製作修整器之 方法之第》驟示忍圖。首先’提供—塊屡克力塑膝材質之基板 10在此基板1〇的材質為舉例說明，並不偈限為壓克力塑膜材 質。 ^ 接ί如第1β圖」所不，係為本發明之利用紫外線硬化製 作知正Α之方法之第二步驟示意圖。將以旋轉塗佈伽呢) 的方式f—輔助黏著劑20塗佈在基板1〇上，然後，將基板10及 辅助黏讀m簡氏七十度賴五分鐘，使得__ 2〇表 面权，輔助黏者_ 2G為—種高分子黏著劑，例如，聚氨醋（ Γ U)膠’而且，使用聚氨轉⑽膠）具有以下所列 牛之優點’例如’對任何材質皆有相當良好的接著力的特性，及 放入烘箱加熱的過程中，不會有揮發性氣體產生，對 、木〜兄也比較安全，此外，價格低廉的聚氨轉〇>_也 可以降低研磨工具的製造成本。 ⑸也 罘一乂驟不忍圖。為了使磨料顆粒4〇呈 之排列，利用低難膠帶72雜板71與網板⑼結合，再:: 網板60孔洞中’此時’磨料顆粒40會於紹板 固定板70上·，縣之Γ]面之低黏性膠帶72所組成之磨料暫時 卜 再除去網板60，即為磨料暫時固定板70。 弟2A圖」及「第2β圖」所示，分別為本發明之利用紫 1296558 外線硬化製作修整器之方法之第四步驟示意圖及第五步驟示意 圖。在輔助黏著·以攝氏七十度預熱五分鐘進行預熱後，將磨 料暫時固定板職蓋於基板1G上，以將賴輸4Q佈植於基板 10上，並使磨料顆粒40與辅助黏著劑2〇相接觸。接著，將辅助 黏著劑20，例如聚氨酯膠⑽膠），以攝氏七十度加熱三十分鐘 進行硬化，由於聚氨醋膠⑽膠）具有對任何材質皆有相當良好 的接著力的特性，所以當聚氨酯膠（pu膠）進行硬化處理後，可 以將磨料顆粒4G緊緊的蚊於基板1G上。就目前所使用的磨料 顆粒40來說，硬度大的鑽石為主要的選擇，而且，就目前所使用 的鑽石規格而言，其平均粒徑A多在.22Qum之間，例如粒度 #50/60(平均粒徑約275um)，US mesh #70/75(平均粒徑約 210um)，#80/90(平均粒徑約i8〇um)，#ι〇〇/12〇(平均粒徑約 150um)，#120/140(平均粒徑約 i25um)，#140/170(平均粒徑約 llOum)等，為達到較高的鑽石顆粒排列分佈密度，其顆粒間距最 佳為250微米至700微米，然而顆粒間距的實際設計，仍視使用 顆粒之粒度大小而定，間距過大將失去提高鑽石顆粒分佈密度的 實質效果，而間距過小則在網板60的製作困難度會大幅提高，且 相對只能使用較小粒度的鑽石顆粒規格。 請參閱「第3A圖」及「第3B圖」，分別為本發明之紫外線硬 化製作修整器之方法之第六步驟示意圖及第七步驟示意圖。將紫 外線（Ultra Violet，UV)膠 30 旋轉塗佈（Spin coating)於辅助 黏著劑20上後，以攝氏八十度溫度加熱三分鐘進行預熱處理，接 1296558 一 ’、外線（Ultra Violet，υν) 50照射該紫外線膠（υν膠） :十私使其硬化。由於是使用硬化時間較短的紫外線膠（抓膠） 制來代衣私4間較長的習知的硬焊或燒結技術，因此可以縮短 ^守間避免製程中產生高溫，達到提升工作產能的目的。 月二閱第4圖」’係為本發明之紫外線硬化製作修整器之方 法之弟八步驟示意圖。最後，在紫外線膠（UV膠）30硬化後進行 拋光處理’而使修整器表面光滑，使其呈現如圖中所示之型態。 • 依據上述製作方法，本發明可得到-種利用紫外線硬化製作 之修整裔，其結構包含有一基板1〇，基板1〇上旋轉塗佈如〇 c〇atlng)-辅助黏著劑2〇。複數個磨料顆粒*佈植辅助黏著劑 2〇上，依據需求排列成預定形態。最後使紫外線膠30旋轉塗; (Spin coating)於辅助黏著劑2〇上，並填充於磨料顆粒4〇之間。 修整裔之表面係經過一拋光程序加工，使修整器表面光滑。 又雖然本發明以前述之實施例揭露如上，然其並非用以限定本 .發明。在不脫離本發明之精神和範圍内，所為之更動與潤飾，均 屬本發明之專利保護範圍。關於本發明所界定之保護範圍請炎者 所附之申請專利範圍。 月> 【圖式簡單說明】 第1A圖為本發明之紫外線硬化製作修整器之方法之 驟示意圖。 弟一v 第1B圖為本發明之紫外線硬化製作修整器之方法之# 一 驟示意圖。 / 弟二步 10 1296558 第1C圖為本發明之紫外線硬化製作修整器 驟示意圖 之方法之第三步 第2A圖為本發明之紫外線硬化製作修整器之方法 驟示意圖。 /弟四步 第2B圖為本發明之紫外線硬化製作修整器 驟示意圖 之方法之第五步The polishing pad dresser in Polishing; CMP) is trimmed with diamond as abrasive particles. Since the basic structure of the polishing pad is to fix a plurality of diamond particles on the abrasive bonding surface of a disk-shaped or annular metal substrate (or base metal), Such an abrasive tool for conditioning a polishing pad is also referred to as a "Diamond Disk Pad Conditioner" or "Pad Dresser". In order to solve the problem of diamond particles falling off due to insufficient adhesion strength of the grinding tool, I296558 I 'There is an active gold in the metal adhesive which will produce carbides with diamonds = D titanium, chromium, tungsten, etc., and then liquid phase Sinter or hard soldering process. For example, in the invention of the 90-year-old ten-month-day announcement of the Republic of China, the application of the gQ5_9 2 diamond "repairing the diamond and its method", the Republic of China for the 19th, 10th, 21st, and I Ming Shenming case No. 2461 "Finishing the wafers of the diamond discs and their O^tol' in the rumors of the Republic of China's 90th Anniversary's Announcement - 9348? Tiger "grinding tools and their manufacturing methods", and the invention application No. _ 420 of the Announcement of the Republic of China on the 93rd - 11th "The object with the best orientation" and its manufacturing method, The description relates to the use of special soldering or sintering to make the diamond age and the metal adhesion layer to form a chemical bond, and to enhance the solidity and strength of the diamond particles, so that the manufactured abrasive fixture does not fall off the diamond particles. a However, because in the process of brazing or sintering, t takes a long time, the diamond particles are fixed on the metal adhesion layer, so that the production cost of the grinding tool will also be New York. In view of this, in order to save time in the above-described conventional polishing tool manufacturing method, it is necessary to propose a new method of manufacturing the polishing tool. SUMMARY OF THE INVENTION In the grinding tool of the prior art, the processing procedure for attaching the diamond particles to the substrate is difficult, and the high temperature bearing substrate or the diamond particles generated by the hard soldering knot adversely affects. In view of the above problems, the main object of the present invention is to provide a method for producing impurities by using ultraviolet ray, which can save cost and shorten the process time, and avoid adverse effects of the tempering process on the abrasive grains. 296558 In order to achieve the above object, the present invention provides a whole device for H-curing with a focal line to make a polishing light, a substrate, using a spin coating person, * (four) gamma "stupid _ low-viscosity tape to the nameplate and the mesh plate Then purely uniform _ _ hole hole f, 瞒, scale concealed tape network == (four) her board 'then' the abrasive temporary fixing plate placed on the substrate by the abrasive particles and the auxiliary adhesive ship contact, then, auxiliary adhesion After the agent is hardened, use the spin coating (Spin CGating) to glue the UV on the auxiliary adhesive, and finally 'turn on the material with ultraviolet light to make the material and turn hard. The repair of the invention (4), Qian Guanhan engages in the board, gyro Agent, more than one grinding female, material transfer. Glue adhered to the substrate on the substrate, and there is more than one miscellaneous miscellaneous surface, the wire glue is spin coated (s_ CQatlng) in the auxiliary adhesive Above, and filled between the abrasive particles. The effect of the invention is to 'renovate and make the scarf, and does not need to fix the pure female through the high-temperature process, screaming the high-temperature material line to make the ultraviolet glue harden quickly, and Abrasive particles are smashed, so high temperature grinding can be avoided The particles cause adverse effects and at the same time increase the production speed of the dresser. The detailed features and advantages of the present invention are described in detail in the in-heart mode, and the inner valley is sufficient for any relevant artisan to understand the technical content of the present invention and implement it accordingly. The four-inch desire and the pertinence of the present invention will be described in detail below with reference to the preferred embodiment. [Embodiment] The method of the invention according to the present invention is a method for polishing ultraviolet curing (4), 1296558. The following is a brief description of the method of "1" in the method of making the dressing device for ultraviolet curing of the present invention. First, the material of the substrate of the substrate is shown as an example, and is not limited to the acrylic plastic film material. ^ 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 The auxiliary adhesive 20 will be coated on the substrate 1 in a manner of spin coating, and then the substrate 10 and the auxiliary paste will be read at 70 degrees for five minutes, so that the surface weight of the __ 2 〇 , Adhesive _ 2G is a kind of polymer adhesive, for example, polyurethane ( Γ U) glue 'and, using polyurethane to (10) glue) has the advantages of the following listed cattle 'for example' is equivalent to any material Good adhesion characteristics, and the process of heating in the oven, there will be no volatile gas, and the wood ~ brother is also safer. In addition, the cheap ammonia switch _ can also reduce the grinding tool Manufacturing costs. (5) Also, you can't bear to see it. In order to arrange the abrasive particles 4〇, the low-difficult tape 72 is used to combine with the stencil (9), and then: the stencil 60 holes in the 'this time' abrasive particles 40 will be on the plate fixing plate 70, County Then, the abrasive composed of the low-adhesive tape 72 of the surface temporarily removes the stencil 60, that is, the abrasive temporary fixing plate 70. The second step and the fifth step of the method for producing a dresser using the purple 1296558 external wire are shown in Fig. 2A and Fig. 2, respectively. After preheating and preheating for seven minutes at 70 degrees Celsius, the abrasive temporary fixing plate is placed on the substrate 1G to implant the 4Q on the substrate 10, and the abrasive particles 40 and the auxiliary adhesive are adhered. The agent 2 is in contact with each other. Next, the auxiliary adhesive 20, such as urethane glue (10), is hardened by heating at 70 degrees Celsius for 30 minutes. Since the polyurethane glue (10) glue has a good adhesion to any material, After the polyurethane rubber (pu glue) is subjected to the hardening treatment, the abrasive particles 4G can be tightly attached to the substrate 1G. For the abrasive particles 40 currently used, diamonds with a high hardness are the main choice, and, in terms of the diamond specifications currently used, the average particle size A is between .22 Qum, for example, particle size #50/60. (average particle size about 275um), US mesh #70/75 (average particle size about 210um), #80/90 (average particle size about i8〇um), #ι〇〇/12〇 (average particle size about 150um) , #120/140 (average particle size about i25um), #140/170 (average particle size about 11Oum), etc., in order to achieve a higher distribution of diamond particle size distribution, the particle spacing is preferably from 250 microns to 700 microns, however The actual design of the particle spacing depends on the particle size of the particles. If the spacing is too large, the actual effect of increasing the distribution density of the diamond particles will be lost. If the spacing is too small, the difficulty in fabricating the stencil 60 will be greatly improved, and relatively only used. Smaller size diamond particle size. Please refer to "3A" and "3B", which are respectively a sixth step diagram and a seventh step of the method for fabricating a dresser for ultraviolet curing of the present invention. Ultrasonic (Ultra Violet, UV) glue 30 is spin coated on the auxiliary adhesive 20, and then preheated by heating at 80 degrees Celsius for three minutes, and then connected to 1296558 one's outer line (Ultra Violet, υν 50 irradiation of the ultraviolet glue (υν glue): ten private to make it hard. Since it is a long-known conventional brazing or sintering technology using a short-time curing of ultraviolet glue (grab glue), it is possible to shorten the high temperature during the process and avoid the high temperature in the process. purpose. The second figure of the second section of the present invention is a schematic diagram of the eight steps of the method for fabricating the ultraviolet curing device of the present invention. Finally, the polishing process is carried out after the ultraviolet glue (UV glue) 30 is hardened, and the surface of the dresser is smoothed so that it appears in the form shown in the figure. • According to the above production method, the present invention can obtain a trimmer made by ultraviolet curing, the structure comprising a substrate 1 〇, and the substrate 1 is spin-coated on a substrate such as 〇c〇atlng)-auxiliary adhesive 2〇. A plurality of abrasive particles * planting auxiliary adhesive 2 ,, arranged according to the demand into a predetermined shape. Finally, the UV adhesive 30 is spin-coated; (Spin coating) on the auxiliary adhesive 2〇 and filled between the abrasive particles 4〇. The surface of the trimmer is processed through a polishing process to smooth the surface of the dresser. Further, although the present invention has been disclosed above in the foregoing embodiments, it is not intended to limit the invention. It is within the scope of the invention to be modified and modified without departing from the spirit and scope of the invention. Regarding the scope of protection defined by the present invention, please refer to the scope of the patent application attached to the applicant. Month> [Simplified Schematic Description] Fig. 1A is a schematic view showing a method of fabricating a trimmer for ultraviolet curing of the present invention.弟一v Figure 1B is a schematic view of the method for fabricating a dresser for ultraviolet curing of the present invention. / 2nd step 10 1296558 Fig. 1C is a third step of the method for preparing the ultraviolet curing device of the present invention. Fig. 2A is a schematic view showing the method of fabricating the dresser for ultraviolet curing according to the present invention. Step 4B is the fifth step of the method for preparing the ultraviolet curing device of the present invention.
之方法之第六步 之方法之第七步 第3A圖為本發明之紫外線硬化製作修整器 驟示意圖。 第3B圖為本發明之紫外線硬化製作修整器 驟示意圖。 八步驟 第4圖為本發明之紫外線硬化製作修整器之方法之第 示意圖。 【主要元件符號說明】 10..............................基板Step 7 of the method of the sixth step of the method Fig. 3A is a schematic view showing the preparation of the ultraviolet curing device of the present invention. Fig. 3B is a schematic view showing the preparation of the ultraviolet curing device of the present invention. Eight Steps Fig. 4 is a schematic view showing the method of producing a dresser by ultraviolet curing of the present invention. [Major component symbol description] 10..............................substrate
20..............................輔助黏著劑 30..............................紫外線膠 40..............................磨料顆粒 50.............................•紫外線 60..............................網板 70 ..............................磨料暫時固定板 71 ..............................链板 72 ..............................低黏性膠帶 1120..............................Auxiliary Adhesive 30............... ...............UV glue 40..............................abrasive particles 50.............................•UV 60................ .............网板70..............................abrasive temporary fixing plate 71 ..............................chain plate 72 ................ ..............Low-adhesive tape 11