TWI296423B - Cleaning sheets, transfer member having cleaning function, and method of cleaning substrate-processing apparatus with these - Google Patents

Description

1296423

5. Description of the Invention (1) <Technical Field> The present invention relates to a sheet for cleaning various substrate processing apparatuses, a conveying member having a cleaning function, and a cleaning substrate processing apparatus using the same. More particularly, the present invention relates to a cleaning sheet, a conveying member having a cleaning function, and a substrate processing apparatus for preventing particle access, such as, for example, for manufacturing or inspecting a semiconductor, a flat display, and a printed wiring. A method of cleaning a device of a board, or the like. &lt;Background of the Invention&gt; In various substrate processing apparatuses, a substrate is rotated while being physically in contact with each transport system. In the case where particles are adhered to the substrate or transport system being transported, the subsequent substrates are contaminated one by one. Therefore, it is necessary to stop and clean the device regularly. Therefore, there is a problem that the cleaning operation leads to a reduction in the time efficiency and requires a lot of labor. In order to eliminate such problems, a technique of removing particles adhering to the inside of a substrate processing apparatus by transporting a substrate to which a pressure-sensitive adhesive substance is bonded has been proposed (for example, Japanese Laid-Open Patent Publication No. 154686/1998: A technique for removing particles attached to the back surface of a substrate by transporting a plate-like member (Japanese Laid-Open Patent Publication No. 87458/19 99). The technique of removing particles adhering to the inside of the substrate processing apparatus by transporting the substrate to which the pressure-sensitive adhesive substance is bonded is an effective method for eliminating the aforementioned problems. However, this technique has the possibility that the pressure-sensitive adhesive substance will adhere too strongly to the contact portion of the device and cannot be separated therefrom. In other words, this technology has the potential to fail to successfully transport the substrate or damage the conveyor. This problem is particularly acute in devices having a clamping station that uses a vacuum securing mechanism.

C:\2D-CODE\91-10\91118274 • ptd

1296423 V. INSTRUCTION DESCRIPTION (2) In the case where the pressure-sensitive adhesive is used as a cleaning layer, the surface of the pressure-sensitive adhesive is generally protected by a release film coated with a release agent such as polyfluorene. However, the foregoing techniques have the problem that the components of the release agent migrate/transfer to the surface of the cleaning layer, and the migrated release agent component can contaminate the substrate contact portion of the delivery device. Further, the technique of removing particles by conveying the plate-like member has a problem that the dust removal ability is poor, although it can be conveyed without any trouble, which is quite important. In view of such circumstances, it is an object of the present invention to provide a cleaning sheet and a cleaning member having a cleaning function, each of which can be successfully conveyed into a substrate processing apparatus and can be easily adhered to it without failure. Inside the device ^ Particle removal. <Disclosure of the Invention> The inventors conducted intensive research to accomplish the goal. As a result, when the sheet having the cleaning layer or the conveying member to which the sheet is bonded, such as the substrate, is used to remove the particles adhered to the inside of the substrate processing apparatus, the sheet having porosity (porous sheet) is used. As a cleaning layer, it is effective to easily separate and remove the particles without causing the aforementioned problems. The present invention has thus been completed. The invention relates to: a cleaning sheet comprising a layer (porous layer) as a cleaning layer (Patent No. 1 of the patent application). A '&amp; clean sheet comprising a porous layer a sheet, and a pressure-sensitive adhesive layer formed on one side of the '7' (application patent scope item 2); a sheet of production, ★, comprising a base material and a base material

C:\2D-CODE\91-10\91118274.ptd 1296423 V. Description of invention (3) — Clean porous layer of j (Article 3 of the patent application); a basic material for cleaning, one for basic materials One side is formed as a main layer, and the first layer of the base material is formed on the other side of the base material. The cleaning sheet is characterized in that the sheet is not provided on the multi-shell shell. Viscosity (Patent No. 5 of the patent application); This cleaning sheet car is characterized by a porous film of a porous film of ultrahigh molecular weight polyethylene (Application No. 6); and the like. Membrane <Best Mode for Carrying Out the Invention> ^ = Cleaning layer in the cleaning sheet of the invention (hereinafter, clear: etc.;:: 2, the material itself, the multilayer sheet, the laminated to the base material) , &gt;) is a porous, and substantially non-viscous sound. Production, and "famous": through the use of a porous cleaning layer designed to be porous and substantially non-sticky, successfully capture and remove various sizes of granules while preventing particles from falling off and not transporting. The pore cleaning layer of the moth is the following. Although the ^ ^ ^ ^ limit, the pores larger than the particle size will result in a reduction in the effect of capturing the particles. Example = From! to ! In the case of size, it is preferred to use a porous film having an average pore diameter of from about 2 to about 25%, preferably from about 30 to 95%, especially from about 4Q to _-- porosity/=V°237, Applying a cleaning layer having a width of 1 mm to the mirror surface of the crucible' and measuring 180. The peel strength is determined to be stronger than the under-bonding viscosity as long as the peeling strength of the cleaning layer is not higher than this. Value, 1296423

In the present invention, the cleaning layer can be regarded as substantially non-adhesive. The material, structure and the like of the cleaning layer are not special;; limitation; only good and substantially non-viscous can be At the end of the point of view of prevention of contamination, examples of materials include various plastic materials such as polyethylene, and U. urethane diacetate. Although the thickness of the cleaning layer is not particularly limited, it is generally from about 5 to 50 μm, preferably from 1 to 1 Å. Small in the present invention, provided as clear ethylene (usually having 500,000 or better. This film not only has high flexibility but also has a uniform porous structure, and is in contact with it completely or partially. The particles are not viscous in effect. Therefore, when transporting the transporting member, it is not tough to say that 'the present invention has a successful effect. The porous layer of the layer is an ultrahigh molecular weight polymerized molecular weight) porous film is Special surface smoothness comparable to mirror surface. Therefore, the particles and the cleaning layer are highly tightly packed into the pores of the layer. Cleaning sheet. In addition, since the cleaning layer is substantially &gt;month W is adhered to the contact portion of the device with a sheet or as will be described later. A reversible cleaning sheet or the like can be used as a porous film for arranging polyethylene into a knife, and a commercial product such as, for example, a trade name manufactured by Teinn Ltd., s〇lup〇r, or a Japanese company can be used. The product name is Sunmap. Completion It is desirable to adhere a lightly viscous removable sheet to the surface of the cleaning layer: to protect the surface of the cleaning layer. Λ will produce undesired particles that may be present on the surface of the cleaning layer when this is removed.

1296423

The present invention further provides a cleaning sheet # comprising: a sheet having a porous layer, and a pressure-sensitive adhesive layer formed on one side of the sheet (Patent No. 2); a cleaning sheet, The invention comprises a base material and a porous layer formed on the one surface of the base material as a clean layer (the patent application scope is 3), and a π &gt; sheet for use, which comprises a base material and a base material. A porous layer formed as a cleaning layer on one side, and a pressure-sensitive adhesive layer formed on the other side of the base material (Patent No. 4 of the patent application). There is no particular restriction on the feeling, the material of the adhesive layer, etc., and it is necessary to satisfy the pressure. A general pressure sensitive adhesive can be used (for example, acrylic acid)

A rubber or rubber based adhesive or the like). For this pressure-sensitive adhesive layer, a double-sided pressure-sensitive adhesive tape can also be used. The cleaning sheet having such a configuration can be adhered to a transport member such as various substrates and strips or sheets through a pressure-sensitive adhesive layer to obtain a cleaning member having a cleaning function (Patent No. 7 of the patent application). This portion can be cleaned by transporting the transported X piece having the cleanness = energy to the device μ and bringing it into contact with the portion to be cleaned (Patent No. 9 of the patent application).

In the case where a transport member such as a substrate is to be peeled off from the pressure-sensitive adhesive layer to reuse the substrate, the pressure-sensitive adhesive layer has a thickness of from about 0.1 mm to about 10 mm, especially from about 0.10. 5 Newtons/10 mm of self-twisting wafer (mirror) 180. The strength of the peeling strength meter is better. Since the adhesive layer alone has this viscosity, the conveying member is not peeled off during conveyance and can be easily separated after cleaning. The cleaning sheet may be a layer comprising a base material. This base material is not particularly limited and is formed on the cleaning thereof. Examples include plastics such as poly

1296423 V. INSTRUCTIONS (6) = Alkene, poly(ethylene terephthalate), Ethylcellulose, Polycarbonate, Polypropylene, Polyamide, Polyimine, and Polycarbazide A film of imine. The thickness is generally from about 1 丨〇 to 丨〇 〇 micrometers. The conveying member to which the cleaning sheet is pasted is not particularly limited. Examples include semiconductor wafers, flat panel displays such as LC], and substrates for optical discs, MR heads, and the like. The present invention further provides that the cleaning element has a cleaning function, and the cleaning sheet has a smaller shape than the conveying member, and is not self-operating: the edge of the element protrudes (article 8 of the patent application); and a θ The cleaning label sheet. It is used in the manufacturing method of the aforementioned conveying member having a cleaning function and is described. In the case where the cleaning sheet is adhered to a transport member such as a three-dimensional limit plate to manufacture a cleaning transport member, the base member includes: a cleaning sheet that is larger than the transport member, and an example package Cutting method (hereinafter referred to as direct cutting method) f : "The shape of the element 1 is cleaned by the standard iron sheet; the method of cutting into a transporting element (hereinafter referred to as pre-cutting method 2 = manufactured in the direct cutting method) In the sheet cutting process, the cutting method is preferred because the material generates chips and adheres to the cleaning carrier; the layer or its type L. The dicing in the pre-cutting method may be smudged. Compared with the direct cutting method, the sheet is cut and 'when the attached cleaning label sheet reaches the transport element: J: system. However, the part of the label sheet may be in accordance with the edge of the transfer. The component wipes or the card is on the transport path = the type and the U will have the check sheet

C:\2D-CODE\91-l〇\9iii8274.ptd h ;i Page 10 1296423 V. INSTRUCTIONS (7) Springing or displacement occurs, making it the most efficient. In the case of the most groove, it is impossible to convey. Therefore, it is preferable that the cleaning functional sheet of the present invention has a smaller cleaning member than the conveying member. In the case where the cleaning material is from the side of the conveying member and protrudes from the edge of the conveying member, the shape of the product is large, and the portion is caught in the conveying member, and the protruding member of the sheet is formed. Lift up or shift, and make ^2 path on the path, and the label is likely. It is not possible to rotate in the case of cleaning sheets =,! There is no particular restriction on the privacy of the type of cleaning that may result in cleaning. However, it is hoped that the cleaning sheet will be as small as about 贝^. The sheet size will cause the right month to remove the particles. 7 &lt; Reduction of effective area, this point is quite heavy <Comprehensive Example> t: It will be explained based on the embodiment and should not be limited by the present invention. All parts below are by weight. Example 1 VIII An acrylic polymer obtained by freely mixing a monomer mixture of 75 parts of 2-ethylhexyl acrylate, 20 parts of decyl acrylate, and 5 parts of acrylic acid (f 1 average molecular weight, 7 〇〇, 〇〇〇) is uniformly mixed with 5 parts of acrylamide phthalate and 3 parts of diphenylmethane diisocyanate to prepare a general pressure-sensitive adhesive solution. Apply this solution to a width of 2 〇 microns on a dry basis to a width of 2 5 〇

C:\2D-C0DE\91.10\91118274.ptd Page 11 1296423 V. INSTRUCTIONS (8) Porous film of ultra-high molecular weight polyethylene with a diameter of 25 μm and a pore diameter of from 0·0 5 to 2 μm (Solupor, manufactured by Teijin Ltd.), forming a general pressure-sensitive adhesive layer. A 38-micron thick polyester release film was adhered to the surface. The cleaning sheet of the present invention was thus obtained. The surface of the cleaning layer is substantially non-tacky. The clean layer has a porosity of from 40 to 90%. The cleaning layer is adhered to the mirror surface of the wafer at a width of 1 mm and is 18 Å from the wafer. Peel strength meter, measured according to j I ς z 〇 2 3 7 viscous. As a result, the viscosity was 〇 · 〇 〇 〇 9 Newtons (〇. 丨) / 丨〇 millimeters. This ensures that the cleaning layer is substantially non-tacky. Further, the pressure-sensitive adhesive layer formed on the other side was applied to the mirror surface of the tantalum wafer in a width of 丨〇m, and was 18 矽 from the wafer. The peel strength meter was measured for its viscosity according to JIS Z0237. As a result, the viscosity was 2·8 / 10 mm. The peeling thinness on the general pressure-sensitive adhesive layer of the cleaning sheet will be applied, and the sheet is attached to the back of the 8 Yingshixi wafer by the manual roller. In this way, a clean wafer round contamination detector for cleaning can be prepared to inspect two new 8 British leaves (10), each of which has a mirror surface of 2 microns or more and a small number of particles on the circle. 8, and the second crystal ',,, °, a crystal to a separate substrate processing device, while maintaining the wafers of the laser contamination detector to check the mirror surface of each wafer. ,:::" Then the first 曰μ μ~ fruit calculated from the size area is 27, 003 on the two wafers. The date, the number of particles is 27, 890, and the 12th page C:\2D-00DE\9M0\91118274.ptd h Λ 1296423 V. Description of the invention (9) Next, the peeling film obtained above is stripped of the clean layer side of the round (1), and 890 adhered particles Number, = cleaning wafer (1) is transferred to a substrate processing apparatus having a positive round section that produces a transportable cleaning wafer (1). As a result, #w or above #w does not cause any trouble. 2 Keep the mirror ί; Sticky: New, Yingxin Crystal solid, and at the same time the above &# = after using the laser pollution detector to check 0. 2 microns or grain causality of this grain removed. Therefore, 85% of the number of sticks adhered before cleaning is higher than that of the implementation: the method of manufacturing the sheet for cleaning, except for the use of ultra-non-porous film. In the same way as the embodiment: Use the cleaning wafer (7) to transport the pass: the surname,;:,! The substrate processing of the wafer segment with the number of particles adhered to Dundee': °ί, 'η' Λ清, clean wafer (2), ** will produce any whiskers. 2曰m=±钕米 or above, the number of adhered particles is 9 new 8 inches, check 0.2 micron or to smear (4) In the detector, the corpse is + 4 particles. As a result, the number of wafer size areas in the 8 inch wafer is 1 3,0 0 0. This can only remove 48% of the particles adhered before cleaning. Example 2, a butyl acrylic polymer (weight average molecular weight, obtained by a free monomer mixture of 75 parts of 2-ethyl acrylate, 20 parts of methyl acrylate, and 5 acrylonitrile) 700, 0 00 ) with 1 part of polyethylene glycol 200 dimethyl

C:\2D-CODE\91-1〇\91118274.ptd Page 13 1296423 V. Description of Invention (10) Acrylic acid brewing (trade name: Nk Ester 4G; manufactured by Shln_Nakamura Chemical Co., Ltd.) and 3 parts of poly The isocyanate compound (trade name L ^Nippon Polyurethane c., manufactured by Ud.) was uniformly mixed, and 'pressure-sensitive adhesive solution A was obtained. Treatment of a release film consisting of a continuous polyester film (thickness: 3 = j meters, visibility, 25 mils) treated with a polyoxy olefin stripper on one side: thickness 1 of the cloth JI drying standard 〇Micron pressure sensitive adhesive solution eight. Superhigh molecular weight porous film is superposed on the pressure sensitive adhesive layer (Su: manufactured by Erto Electric Co., Ltd.; thickness, 8 μm; = removable pressure (4) m (four) to porous? Among them, ultrahigh molecular weight polyethylene The porous film ί is used as a cleaning sheet for the 月 layer. The sheet H does not include a portion of the release film of the release film on the side of the pressure-sensitive adhesive which is washed out of the desired portion of the diameter 198. Continuous stripping, and the production of roots:, the main T, the film is not A. The king of the Soviet Union, the invention of the cleaning of the label sheet, the cleaning of the label sheet of the eight strips of the peeling film , 3 M The pressure on the side of the layer on the side of the adhesive layer (=: clean wafer. Its - like Ι ί: to; send, 180 brake system) from the intensity meter is 5 Newton force 〇 mm, the point 'J label tape coating machine (NEL_GR3〇 will be used to clean the label sheet A to 8 inch Shishi Nm〇 Seiki) to the back of the 8 inch wafer (mirror surface). Opposite: sheet Eight stickers ΤΖί3 crystal rafts continue this operation on page 14 C:\2D-mDH\9l.]〇\9n]8274 ptd 1296423 V. Invention description (11) As a result, the sheet can be adhered to the wafer without any problem. Thus, the cleaning wafer A for cleaning is provided with a cleaning function. Clean wafer A. As a result, the label sheets that are attached to each wafer are outside the wafer. On the other hand, the laser contamination detector is used to inspect the mirror surface of each of the two new 8-inch circles. 0.2 μm or more of particles. As a result, the number of particles on the B circle is 6, and the number on the second wafer is 5. The individual substrates of the sundial are facing down the mirror, and then the mine is used. The shot detector detects the particles held by 〇2. As a result, the surface size of the 8 inch wafer is ^^, and the number of grains is 33, 456, and the second is 3; Receiver, one of the above is prepared, the removable film on the side of the cleaning layer is stripped, and:: The round A has a crystal number of 33,456 particles = ^ Qingjie wafer A is transported to If it is, the cleaning wafer A can be transported without the substrate processing equipment [in the new 8 inch wafer, while keeping the second = what trouble? The polluted polluting detector checks 〇 2 μm or H, sees the face down, and then uses the laser shot. The results are shown in Table —. — granules. This operation is performed. 5 Table 1 Wafer-to-wafer transfer Conveying Example 2 80% 88% Deuterium transport Five wafers transport 90% Four wafer transport ^2% · &quot;92%^

1296423 V. INSTRUCTIONS (12) The XPS inspection surface of the 8-inch wafer used in the inspection was examined by XPS. As a result, of course, no decane was detected, and the ratio of other elements was almost the same as that of the clean Shihwa wafer. While the invention has been described with reference to the specific embodiments of the embodiments of the invention <Industrial Applicability> As described above, the cleaning sheet of the present invention and the conveying member having the cleaning function can be successfully conveyed through the substrate processing apparatus, and the particles adhering to the inside of the apparatus can be successfully and easily removed by using it. .

C:\2D-C0DE\9M0\91118274.ptd Page 16 1296423 Schematic description of the page Page 17 C:\2D-00DE\91-10\91118274.ptd

Claims (1)

1296423 VI. Patent application scope 1 · A kind of clear 2 · - a kind of clear sheet of 'one side 3 · one kind of clear one side of the shape 4 · one kind of clear one side of the other side of the 5. On the application, the porous 6 As in the application, the porous 7. As in the application, the porous polyethylene porous material has a sheet through which the adhesive layer is applied. Clean film, clean film, clean film, clean film, clear adhesive layer, patent layer, essence, patent, layer, patent, layer, essence, film. There is a clean and configurable material that includes a material that includes an adhesive layer. Material, which includes more than 100% of the cleansing layer, including the multi-layer of the cleansing layer. Items 1 to 4 of the cleansing layer do not have a sticky line. The first to fourth items include the super-directional division. Items 1 to 4 are not sticky. The function is carried on it as a porous layer having one more base layer. A basic layer, and one of the properties. Any of the sub-quantities, and is a component, which is patented as a cleaning layer. The sheet of the hole layer, and the material and the base material: 2: the cleaning sheet formed by the base lining on the base material, the cleaning sheet thereof, the thin porous sheet m /, the cleaning sheet Included in the ultra-high molecular weight ^ includes a transport element range of the second or fourth item t. 9 of the patent application, in the cleaning, the read cleaning sheet has an edge protruding from the transport element/transport element. A cleaning method of a substrate processing apparatus, comprising the cleaning sheet of the first or third aspect or the patent application transporting component to the substrate processing apparatus. Item 8