1296326 本文為申請立案之專利，請勿複製内容 九、發明說明： 【發明所屬之技術領域】 本案没<屬於微流體系統領域，彳㈣微機電製程技術製作生化微晶 片’其基本原理是使肖電化學的方式去操控具有生錄_微液滴，並且 應用於流體操控元件；本案概念與技術可與生化科技產業做進_步的整合 應用。 σ 【先前技術】 一種先前技術有關使用電潤濕原理製作微致動器的專利（us Pat.Ν〇. 6165727Β1)，描述使用電潤濕原理可以製作微幫浦、微混合器、陣列式 液滴操控等微流體元件。 另一種先刖技術使用電潤濕原理操控液滴（USPat. Ν〇. 6911132Β2)， 更詳盡地規劃了使用電顧原理的使用，包括液滴的切割，生物檢體的檢 測。 然而上述專利均未提到，當具有生化檢體的液滴尺寸縮小到次微升 jsub-microlner)甚至到皮升（pic〇liter)時所將發生的現象。由於微液滴 ，發時間隨著體積的縮小將大幅下降，對於次微升驗滴其蒸發時間已經 疋在數十秒鐘或更少的時間内被蒸發掉。因此儘管伴隨著電潤濕效應所帶 來的便利，但是卻不能克服伴隨而來的問題。 少有鑑於此，本案將提出一種新的方法：利用與帶有生化檢體不互溶的 衛星液滴去包覆生化檢體並且帶動此檢體到定點位置做檢測，或是進行其 他生^操控，如此將可避免生化檢體蒸發，而能達到原先操控的目的。此 發明設計除了具有高生物姆性、自動化、餘簡料伽，亦提供 體操控領域一項嶄新的設計概念。 【發明内容】 電潤濕（electrowetting, EW)現象是利用外加電位差來改變固液介面之 間的潤濕性，達到操控表面張力的效果。表面張力是在微流體裝置中廣泛 被用來驅動越的力，原因在於表面張力是隨尺度做—次方賴化，因此 1 本文為申請立案之專利，請勿複製内容 1296326 ίίΐ 日修(更)正替換頁 本文為申凊立案之專利，請勿複霞瓦蓉一 在微尺度下表面張力將具有尺度優勢而成為很有效的驅動力，故以表面張 力，操控機_電難原理是-種财鱗的方法。電顚顧不需要高 溫南壓’適用越歧’難性精確可逆性高，傳輸快速，又不會影響流 體性質，耻應贿離廣，尤錢祕生化方面紐紐之趙操控， 可謂是一極具潛力的驅動方式。 在覆有介電層，再塗覆疏水層的表面上，液滴與表面間的接觸角由 於疏水層的存麵大於90度。當外加·差於賴和介電層之間時，將造 成介電層產生電容效應而在固液表面形成_個電荷__層，這些 的，積將影_先_介關分佈，_改變介面_雕，使得原 先是疏水性的表面魏親水性，液滴的接觸肖也就從大於9()度轉變成小於 90,，這種顧性的改變就是電醜現象。在制濕過程中的電容效應主 ，疋發生在介電層社下表面，疏水層的電容效應是微乎其微的，其存在 疋為了使整鍊面形成疏水性之故。前人針對電聰現象進行基本測試， 在-覆有介電層，再塗覆疏水表面上，施加電位差於賴和表面下方 電極之間’可_看出液滴由於接觸角改變而造成的外型塌陷 潤濕現象是-種可以快速反覆操作的可逆反應。這種在介電層之上^ ^ 電潤濕現象有其更嚴格明確的名詞定義，稱做「介電層上之電潤濕現 (electrowetting on dielectric，EWOD)。 、 」 、在目前生化晶片的趨勢巾，縮小檢體的體積將能帶來許多 速檢測、反應時間加快、降低檢體的消耗等。 、 在考慮奈升級（麵〇版）或皮升級（pic〇lite〇液滴的傳輪 我們需要特別去考慮邦得數（Bondnumber)，邦得數的定義是重^ 面張力的比值，通常是使麟液滴在傳輸軸量轉換，其顧的^學定 義如下· 其中d是液滴直徑’ g是重力加速度，gc是尺寸常數？ 舛是周圍流體密度，σ是表面張力。 滴k度’ 我們可以很明顯的發現當液滴體積縮小時，表面張力相對於 要性是以餘倒數的平方增加，這也可錢明表秘力對微姨滴操$ 6 本文為申請立案之專利，請勿複製内容 1296326 j供曰修⑻正替換頁 本文為申請立______ 重要性 滴遂用電能產生電容效應’進而改變液滴的表面張力，而使液 r轉為敎处釋:^但是電能在表面處所形成的電容效應，會使部份的電 所以本裝置在作動時，會對液滴產生加熱的效果。 ΐ 5 ΓΓ 液絲說，雜此絲所加快蒸發的效果並不明 體積=^置職控職魅獅為軒鄕左右，在_熱能下由於 ^覆u的好處，除了可以防止主液滴本質蒸發之外，亦可助 滴吸收過多的熱能，以降低主液滴被加熱所產生的蒸發。 滿石夕ίΖίΐΓ滴避免蒸發，先前技術一提射舰滴直接包覆在充 2油的她中再進行操控液滴’然而此種方法卻潛藏以下兩個缺點：一、 二要，晶片徹底彌封；二、當料充滿整個環境時，液滴的移動勢必 :控不更方多Γ麼去操控液滴的移動。以上兩個問題對於液滴的 因此，案將提出一種利用包覆式的方法將帶有生化檢體的 衛星液鱗之中，並且電潤_技_動這些魅液滴= =中心具有生化檢體的液滴前進’以達到避免蒸發而且能夠保護檢體的目 π查委員對摘作驗—步瞭解無可，將詳細說明本構 成内各及其所達成之功效如后： 構 【實施方式】 以下鮮來觀本發縣職目的触 功效’而以下圖式所縣之實施例僅為辅助綱，以利責審綠員^^: 但本案之技術手段並不限於所列舉圖式。 、” 整合以上實驗結果和概念論述，數個具體實施例描述如下： 實施例一： 此裝置係指-種利用電潤濕原理去操控液滴的裝置，而且使 檢體的液滴與外界隔絕，不被蒸發。其㈣實施方法及關，請參考圖一， 本文為巾杜案之專利，請勿複製内容 1296326 Φ ^ }〇 i) 本文為申請立案之專利丄請勿.複製典容 ，、’ (ιι) μ疏賴（13)依序製作在下基板（1〇) ^ '反（18)上製作電極（12)，此電極經過化學方法處理 過後，具有疏水性質，最後將此電極#作接地用。上蓋板（18)血下基板 職物〇4)將上下板隔開，裝置内部包含主液滴⑻、 ϋ液滴（i6)以及空氣⑼，且主液滴⑻被衛星液滴㈤包覆 在中間與空*L (17)隔離，目的在於防止域滴（15)被蒸發，。 此外’液滴移動方式基於減少被蒸發的考量，其詳細圖;列說明請袁考 圖二間隔物⑽與間隔物⑻將主液滴（24)、衛星液滴（奶偈 限在裝置内移動。t源供應職著導線（26)連接外部獅傳至電極（25)， 猎由外部電源的施加使衛星液滴（23)的表面疏水性f轉變為親水性質而 移動’由於主液滴（24)被衛星液滴（23)包覆，所以會被衛星 所推動而產生移動。 實施例二： 另-種具體實施例，為在_式操控下如何保護帶有生化檢體的液滴 不被蒸發。«置制方式使液魅生移動，藉由厢液滴的作 用’可使帶有生物檢體的液滴被包覆其中且被推動。參考圖三，將下電極 (3士8)、介電層（31)以及疏水層（32)依序製作在基材（3〇)上，是為 _ ，裝置之下基板；而在另-基材（3G)上製作上電極（37)、疏水層（32)， 是為裝置之上蓋板，兩板之間有一間距隔開，裝置内部包含主液滴（36) 及衛星液滴（35)，其餘為空氣（33)，目的在於防止主液滴（36)與空 氧i (33)接觸而被蒸發。 此裝置的液滴移動方式：參考圖四，多顆衛星液滴（糾）&覆主液滴 (43)，讓主液滴（43)與外界隔離，而上電極（41)、下電極（42)靠 導線（40)連接外部電源以及接地。藉由電的施加改變表面張力使衛星液 滴（44)移動，而後衛星液滴（44)包覆且推動主液滴（43)由一端移動 至另一端，再執行分離過程。 ' …分離過程參考圖五，斜線區域為施加電壓處。當上電極（52)施加電 壓時，下電極（53)接地，同時，在其他下電極亦（53)施加電壓，而另 8 本文為申請立案之專利，請勿複製内容 1296326 令jD : v、：: 本文為申請立案之專利，請勿複製内容 一上電極（52)接地，則衛星液滴（51)會由於電壓的施加，造成脫離主 ，滴（50)往外圍移動的行為，最後衛星液滴（51)脫離主液滴（5〇)後， 遠下主液滴⑼）。藉此，可利用此方式達成重複利用的衛星液滴，執行 下次動作。 、由上述具體實補，可清楚得知此創作發明可細於—賴數位化之 =在^„財，進行流祕㈣分離辦和指定定錄測的輸 出”沾’達成所預期的目標和功能。 功效 以下將參照_之圖絲描述本發縣達成目騎使_技術手段與 以上所述乃是本創作之具體實例及其所運用的相 文變，其所產生之功能作用仍未超==右: 應仍屬於本發明專利涵蓋之範 々等文化與修飾，皆 是所至德。 知胃審查委㈣鐘，並析惠准， 第一圖 第二圖 第三圖 第四圖 第五圖 【圖式簡單說明】 本創作之包覆式_紐_作裝置 濕液滴操作裝置-= ί «滴操作*置二(立趙圖) 【主要元件符號說明】 (第一圖） 本創作之包覆錢·液_條置_ (側視圖） 10…下基板 11…介電層 12…電極 13…疏水層 本文射請立案之!利，請勿複㈣容 本文為申請立案之專利，請勿複製内1296326 This article is a patent for applying for a patent, please do not copy the content. 9. Invention: [Technical field of invention] This case is not in the field of microfluidic systems, and the basic principle of making biochemical microchips by MEMS technology is to make Xiao electrochemical method to control the production of _ micro droplets, and applied to fluid handling components; the concept and technology of this case can be integrated with the biochemical technology industry. σ [Prior Art] A prior art patent relating to the fabrication of microactuators using the principle of electrowetting (us Pat. 165. 6165727Β1), describing the use of the principle of electrowetting to make micro-pumps, micro-mixers, array-type fluids Microfluidic components such as drip manipulation. Another prior art technique uses the principle of electrowetting to manipulate droplets (US Pat. 11. 6911132Β2), and more detailed planning of the use of the principle of the use of the principle of cleaning, including the cutting of droplets, the detection of biological specimens. However, none of the above patents mentions a phenomenon that occurs when the droplet size of a biochemical sample is reduced to a sub-microliter (sub-microliter) or even pic liter. Due to the microdroplets, the emission time will decrease drastically as the volume is reduced, and the evaporation time for the second microliter test droplets has been evaporating in tens of seconds or less. Therefore, despite the convenience brought about by the electrowetting effect, the accompanying problems cannot be overcome. Rarely in view of this, this case will propose a new method: using a satellite droplet that is immiscible with a biochemical sample to cover the biochemical specimen and drive the specimen to the fixed position for detection, or other biocontrol This will avoid the evaporation of the biochemical sample and achieve the original control. In addition to its high biometricity, automation, and simplification, this invention design also provides a new design concept in the field of body manipulation. SUMMARY OF THE INVENTION Electrowetting (EW) phenomenon is the use of an external potential difference to change the wettability between the solid-liquid interface to achieve the effect of controlling the surface tension. Surface tension is the force that is widely used to drive in microfluidic devices. The reason is that the surface tension is measured by the scale. Therefore, this article is a patent for the application. Please do not copy the content 1296326 ίίΐ. Is replacing the page. This article is the patent of Shen Hao, do not rehabilitate the surface tension of the Xia Wa Rong in the micro-scale will have a scale advantage and become a very effective driving force, so the surface tension, the control machine _ electric hard principle is - A method of making money. The electric power does not need high temperature and south pressure. The application is more difficult. The accuracy is high and the reversibility is high. The transmission is fast, and it does not affect the fluid properties. The shame should be bribed away from the wide, especially the secret control of the New Zealand Zhao. It can be described as one. A highly promising driving style. On the surface coated with the dielectric layer and then coated with the hydrophobic layer, the contact angle between the droplet and the surface is greater than 90 degrees due to the storage surface of the hydrophobic layer. When it is added between the dielectric layer and the dielectric layer, it will cause a capacitance effect of the dielectric layer and form a ___ layer on the solid-liquid surface. These products will be changed to _ first-pass distribution, _ change The interface_carving makes the surface of the original hydrophobic surface hydrophilic, and the contact angle of the droplet changes from greater than 9 () to less than 90, which is the electric ugly phenomenon. In the process of moisture production, the main effect of the capacitor is on the lower surface of the dielectric layer. The capacitance effect of the hydrophobic layer is negligible, and the existence of 疋 in order to make the whole chain surface hydrophobic. The predecessors carried out basic tests on the electric clever phenomenon. On the surface coated with the dielectric layer and then coated on the hydrophobic surface, the potential difference was applied between the electrodes below the surface and the surface below the surface to see the droplets due to the change of the contact angle. The type of collapse wetting phenomenon is a reversible reaction that can be quickly and repeatedly operated. This electrowetting phenomenon on the dielectric layer has a more rigorous definition of noun, called "electrowetting on dielectric (EWOD).", in the current biochemical wafer The trend of the towel, reducing the size of the sample will bring a lot of speed detection, faster reaction time, reduce the consumption of the sample. In considering the upgrade (faced version) or skin upgrade (pic〇 〇 〇 droplets of the droplet we need to specifically consider the Bond number, Bond number is defined as the ratio of the surface tension, usually The projection of the droplets in the transmission axis is defined as follows: where d is the diameter of the droplet 'g is the acceleration of gravity, gc is the dimensional constant? 舛 is the density of the surrounding fluid, σ is the surface tension. We can clearly see that when the volume of the droplet is reduced, the surface tension is increased relative to the square of the reciprocal of the remnant, which can also be used for the application of the patent. Do not copy the content 1296326 j for repair (8) is replacing the page for the application of ______ importance drip with electrical energy to produce a capacitive effect 'and thus change the surface tension of the droplet, and turn the liquid r into a sputum: ^ but electrical energy The capacitive effect formed at the surface will cause part of the electricity. Therefore, when the device is activated, it will heat the droplets. ΐ 5 ΓΓ The liquid wire says that the effect of the evaporation of the wire is not clear. Positioning the fascinating lion Left and right, in the _ heat energy, due to the benefits of ^, in addition to preventing the main droplets from evaporating in essence, the droplets can also absorb excessive heat energy to reduce the evaporation caused by the heating of the main droplets. Avoid evaporation, the previous technology, a ship launcher is directly coated in the oil filled with 2 oil and then manipulate the droplets. However, this method has the following two disadvantages: one, two, the wafer is completely sealed; When the material is full of the whole environment, the movement of the droplets is bound to be: control the movement of the droplets more or less. The above two problems for the droplets, therefore, the case will propose a method using a coating method with biochemistry The satellite liquid scale of the sample, and the electric run _ _ _ _ these charm droplets = = center with biochemical specimens of the droplet advancement 'to achieve avoidance of evaporation and can protect the specimen's eyes - Step to understand the incompetence, will explain in detail the various functions in this structure and its effects as follows: [Embodiment] The following is a fresh view of the function of the county's job title' and the following examples of the county are only Auxiliary program Member ^^: However, the technical means of this case are not limited to the listed figures. "Incorporating the above experimental results and concept discussion, several specific embodiments are described as follows: Example 1: This device refers to the principle of using electrowetting To control the device of the droplet, and to isolate the droplet of the specimen from the outside, not to be evaporated. (4) Implementation method and off, please refer to Figure 1, this article is the patent of the towel, do not copy the content 1296326 Φ ^ } 〇i) This article is a patent for the application for filing. Please do not copy the code, and '(ιι) μ sparsely (13) sequentially make the electrode (12) on the lower substrate (1〇) ^ 'reverse (18), After the electrode has been chemically treated, it has hydrophobic properties, and finally the electrode # is used for grounding. The upper cover plate (18) blood substrate material 〇 4) separates the upper and lower plates, and the device contains the main droplets (8), ϋ The droplet (i6) and the air (9), and the main droplet (8) is covered by the satellite droplet (5) in the middle and isolated from the space *L (17) in order to prevent the domain droplet (15) from being evaporated. In addition, the 'droplet movement mode is based on reducing the evaporation considerations, its detailed diagram; column description, please refer to the two spacers (10) and spacers (8) to move the main droplets (24), satellite droplets (milk movements within the device) The t source supplies the wire (26) to connect the external lion to the electrode (25), and the application of the external power source causes the surface hydrophobicity f of the satellite droplet (23) to change to a hydrophilic property and moves 'because of the main droplet ( 24) is covered by the satellite droplets (23), so it will be pushed by the satellite to move. Embodiment 2: Another specific embodiment, how to protect the droplets with biochemical samples under the control of _ type It is evaporated. «The method of making the liquid move, the droplets with the biological sample can be coated and pushed by the action of the chamber droplets. Referring to Figure 3, the lower electrode (3士8 The dielectric layer (31) and the hydrophobic layer (32) are sequentially formed on the substrate (3〇), which is the substrate under the device, and the upper electrode is fabricated on the other substrate (3G). The hydrophobic layer (32) is the upper cover of the device, and the two plates are spaced apart from each other, and the inside of the device contains the main droplet (36) And the satellite droplets (35), the rest is air (33), the purpose is to prevent the main droplets (36) from being vaporized by contact with the air oxygen i (33). The droplet movement mode of the device: refer to Figure 4, multiple The satellite droplets (correct) & cover the main droplet (43), so that the main droplet (43) is isolated from the outside, and the upper electrode (41) and the lower electrode (42) are connected to the external power source and the ground by the wire (40). The satellite droplets (44) are moved by the application of electricity to change the surface tension, and then the satellite droplets (44) coat and push the main droplets (43) from one end to the other, and then perform the separation process. Referring to Figure 5, the shaded area is the applied voltage. When the upper electrode (52) applies a voltage, the lower electrode (53) is grounded, and at the other lower electrode (53), the other is the patent for the application. , please do not copy the content 1296326 to make jD : v,:: This is the patent for the application for filing. Do not copy the content. The upper electrode (52) is grounded, then the satellite droplet (51) will be separated from the main due to the application of voltage. (50) The behavior of moving to the periphery, and finally the satellite droplet (51) leaves the main liquid (5〇) after the main droplet far ⑼). Thereby, the satellite droplets that are reused can be achieved in this way, and the next action can be performed. From the above specific compensation, it can be clearly seen that the creative invention can be more detailed than the digitalization = in the financial, the flow secret (four) separation office and the specified output of the measurement "dip" to achieve the desired goal and Features. The following is a description of the _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ Right: It should still belong to the culture and modification of Fan Wei, which is covered by the patent of the present invention. Know the stomach review committee (four) clock, and analyze Huizhun, the first picture, the second picture, the third picture, the fourth picture, the fifth picture [the simple description of the picture] The cover type of the creation_New_made device wet droplet operation device- = ί «Drip operation *Set two (Li Zhao map) [Explanation of main component symbols] (Picture 1) The envelope of the creation of the liquid and liquid _ strip _ (side view) 10...lower substrate 11...dielectric layer 12 ...electrode 13...hydrophobic layer This article is for the purpose of filing a case! Lee, please do not reproduce (four) Rong Zhu is the patent for the application for filing, please do not copy
1296326 14 15 16 17 18 …間隔物 ...微主液滴 ...微衛星液滴 …空氣 …上蓋板 本創作之包覆式電潤濕液滴操作裝置一（俯視圖）（第二圖） 20…間隔物 21 ...間隔物 22 ...空氣 23 ...微衛星液滴 24…微主液滴 25 ...電極 本創作之包覆式電潤濕液滴操作裝置二（立體圖）（第三圖） 30 ...基材 31 ...介電層 32 …疏水層 33 ...空氣 34 ...導線 35 ...衛星液滴 36 …主液滴 37 ...上電極 本創作之包覆式電潤濕液滴操作裝置二（俯視圖）（第四圖） 40 ...導線 41 ...上電極 42 ...下電極 43 ...主液滴 10 本文為申請立案之專利，請勿複製内容1296326 14 15 16 17 18 ... spacers... micro-master droplets... microsatellite droplets... air... top cover The coated electrowetting droplet operation device of this creation (top view) (second figure) 20... spacer 21 ... spacer 22 ... air 23 ... microsatellite droplets 24 ... micro-master droplets 25 ... electrodes of the present invention, the coated electrowetting droplet operation device two ( Three-dimensional diagram) (third diagram) 30 ... substrate 31 ... dielectric layer 32 ... hydrophobic layer 33 ... air 34 ... wire 35 ... satellite droplets 36 ... ... Upper electrode The coated electrowetting droplet operation device of the present invention (top view) (fourth figure) 40 ... wire 41 ... upper electrode 42 ... lower electrode 43 ... main droplet 10 Do not copy content for patents filed for filing
本文為申請立案之專利，請勿複製内容 1296326 43 ...主液滴 44 ...衛星液滴 本創作裝置二之液滴分離過程（俯視圖）（第五圖） 50.. .主液滴 51 ...衛星液滴 52.. .上電極 53 ...下電極This article is the patent for the application, please do not copy the content 1296326 43 ... main droplet 44 ... satellite droplet creation device 2 droplet separation process (top view) (fifth map) 50.. . 51 ...satellite droplet 52... upper electrode 53 ... lower electrode
11 本文為申請立案之專利，請勿複製内容11 This is a patent for filing a patent. Do not copy the content.