•1295379 九、發明說明： 【發明所屬之技術領域】 本案係指一種磁場梯度計，尤指一種多重磁場梯度計。 【先前技術】 隨著生醫與奈米科技產業迅速的發展，利用超導磁場量測 技術來分析生理微磁訊號或偵測磁性微粒，近年來已備受重 視。超導量子干涉元件(Superconducting Quantum Intetfe_• 1295379 IX. Description of the invention: [Technical field to which the invention pertains] This case refers to a magnetic field gradiometer, especially a multiple magnetic field gradiometer. [Prior Art] With the rapid development of biomedical and nanotechnology industries, the use of superconducting magnetic field measurement technology to analyze physiological micromagnetic signals or detect magnetic particles has been highly regarded in recent years. Superconducting Quantum Intetfe_
Device，SQUID)為一種利用超導體的特性以測量微小電流、電 壓和磁場的感測裝置，其超導線圈於超導狀態時，對外在磁場 的改文會有相對應的電流變化，此種變化較一般磁性物質都來 的里敏’因此可利用來感測外部磁場的變化。該感測裝置的設 計為將樣*置於超導線_，施加—磁場，而後讓樣品往復進 出線圈。樣品若對磁場有所感應，則會對週遭的磁場產生影 I ’而補影響可由超導線義電流變化得知，進而彳貞測得到 ^口的磁性質。因其具有高度的靈敏特性，可用來偵測電磁領 域中的磁流量，故亦被稱為超導磁通計。超導量子干涉元件由 二個轉換點的超導環所組成，該轉換點即為約瑟芬接 junetiGnm· ’此為—種超導電子對的穿随 可㈣量子力學方程式推導出直流及交流約瑟芬效應， 其在性質上會有所差異。 月π 3又 自聰年朱_博士發魏銅 92Κ之後，利用771<Γ谶抓 乳〇得夂/皿度可達到 沸2之液態氦冷卻的超導體趨向可商業 6 •1295379 :此敝鋇銅氧化物超導體稱為「高溫超導體」，以盘 —勺低溫超導體」有所區隔。目此SQUID感測器可分為二種， :要们w東的糾，因此低温SQUID感測器在溫度42κ 讨可成為超導體；而後項感測器則在達到πκ時即可成為Device, SQUID) is a sensing device that utilizes the characteristics of a superconductor to measure small currents, voltages, and magnetic fields. When the superconducting coil is in a superconducting state, there is a corresponding current change in the external magnetic field. Limin's, which is more common than magnetic materials, can be used to sense changes in external magnetic fields. The sensing device is designed to place a sample* on the superconducting wire _, applying a magnetic field, and then allowing the sample to reciprocate into and out of the coil. If the sample is sensitive to the magnetic field, it will affect the surrounding magnetic field. The replenishment effect can be known from the change of the superconducting current, and then the magnetic properties of the mouth can be measured. Because it is highly sensitive, it can be used to detect magnetic flux in the electromagnetic field, so it is also called superconducting fluxmeter. The superconducting quantum interference element consists of a superconducting ring with two switching points, which is the Josephine junction junetiGnm. 'This is a kind of superconducting pair of wearable (four) quantum mechanical equations to derive DC and AC The Josephine effect, which varies in nature. Month π 3 and since the year of Cong Cong Zhu _ Dr. Wei copper 92 ,, using 771 & Γ谶 Γ谶 Γ谶 〇 〇 皿 皿 皿 皿 皿 皿 皿 皿 皿 皿 皿 皿 皿 皿 沸 沸 沸 沸 沸 超 超 超 超 超 超 超 超 超 超 超 超 超 超 超 6 Oxide superconductors are called "high-temperature superconductors" and are distinguished by a disk-spoon low-temperature superconductor. The SQUID sensor can be divided into two types: the temperature of the low temperature SQUID sensor can be a superconductor at the temperature of 42 κ, and the sensor of the latter can become π κ when it reaches πκ.
==⑽聯測狀唯—可以侧最微小的電磁訊號的 =磁感測故其在任何生储材中即成為關鍵性的重要元 牛。惟因傳統低溫超導須在極低的溫度（脈町）下操作， 而必須使肢態氦來鱗超導所需的極低溫狀態，故將合 技術、費用、安全及可靠性等方面的問題。 而在無屏蔽環境下量測微小磁場變化，通常是採用梯度量 測的技術來S歸訊，SQUID梯度計是㈣雜_合於 SQUID。因為梯度線圈在均勻磁場下會感應出她消的反向磁 補合於SQUID，目此梯度計朗自磁料會妓應，但梯度 磁場輕合於SQUID的磁通不會域，而可时檢_場梯度。 故在無屏蔽的環境下’其較磁量計有較低的磁場雜訊，因此已 被應用在無屏蔽環境下心磁波的測量。 如美國專利US5,289，121，其係 件的磁場梯H錢翻⑽观加糊職弱磁場的多 頻這量測系統來量測元件的磁場梯度，其超導梯度迴圈係被結 合在至少-陣列並被排列在一載體上。惟因愈高階的梯度計， 其抗雜訊能力愈強，但相對地制訊號也制，故難以同時比 對多階梯度减並達到抗雜訊與讀取微磁訊號的目的。 此外，由於高溫超導量子干涉元件（]ffigh〔池㈤ Temperature Superconducting Quantum interference Device? 7 • 1295379==(10) The joint measurement is only the smallest electromagnetic signal on the side = magnetic sensing, so it becomes a key important element in any raw material. However, because traditional low-temperature superconductors must be operated at extremely low temperatures (Cheng-cho), it is necessary to make the limbs lick the extremely low temperature required for superconducting, so the technology, cost, safety and reliability are combined. problem. In the unshielded environment, the measurement of small magnetic field changes is usually carried out by using the gradient measurement technique. The SQUID gradiometer is (4) heterozygous to SQUID. Because the gradient coil will induce the reverse magnetic compensation of SQUID in the uniform magnetic field, the gradient meter will react to the magnetic material, but the gradient magnetic field will not be in the SQUID magnetic field. Check the _ field gradient. Therefore, in the unshielded environment, the magnetic meter has lower magnetic field noise, so it has been applied to the measurement of cardiac magnetic waves in an unshielded environment. For example, in U.S. Patent No. 5,289,121, the magnetic field ladder of the series is turned over (10) and the multi-frequency measurement system of the weak magnetic field is used to measure the magnetic field gradient of the component, and the superconducting gradient loop is combined. At least - arrays are arranged on a carrier. However, due to the higher-order gradiometer, the anti-noise ability is stronger, but the relative signal is also made. Therefore, it is difficult to simultaneously compare the multi-steps and achieve anti-noise and read micro-magnetic signals. In addition, due to high temperature superconducting quantum interference components (] ffigh [pool (five) Temperature Superconducting Quantum interference Device? 7 • 1295379
High-Tc SQUID)約瑟芬接面之特性為易浮動且穩定度差，多元 件間同步偵測比對難以進行，因此，大部分的高溫超導元件是 藉由耦合線圈來進行梯度偵測。請參閱第一圖，其係美國專利 US6，154,026中提出在High-Tc SQUID上方設計耦合_目 式4取梯度訊號的示意圖。該設計中僅有一個SQUID 101，其 梯度$測是透過設計SQUID 101上方的耦合線圈1〇2來達 成。惟因高溫超導耦合線圈的製作難度較高，在設計上有所限 制，一般僅製作成一階梯度計，故難以同步偵測多階梯度。且 _ SQ11113 101與耦合線圈1〇2為非共平面設計，故在製程運用上 較為複雜。 故鑑於習知方式之缺失，發明人乃經悉心試驗與研究，並 一本鍥而不捨之精神，終於研發出此一多重磁場梯度計。 【發明内容】 本案提出-多重磁場梯度計’不僅可在無屏蔽的環境下操 作，且可大斷低傳祕溫超導在安全及成本方_問題，若 • 肖時透過麵合線圈的設計，或是藉由多個超導量子干涉元件採 取適當的同步偵測比對技術，更可減少誤判的產生。其在搭配 多重梯度量測之下，將可遽除雜訊並讀取微磁訊號，赠展較 為輕便且低廉的系統。 本案之主要構想為提供一種多重磁場梯度計㈣池㈤ magnetic gradiome㈣，其包含單層超導薄膜、一基板界線、 圈、至少二超導量子干涉元件以及至少—輕合線圈。 ，、中該基板界線位於該單層超導薄膜之中，用以作為一階梯邊 緣㈣-edge) 迴圈跨基板界線，肋產生 8 1295379 瑟芬接面；該等超導量子干涉树細該 财 導薄膜中麟__製成，肋作為—==層= 及_合«斜胁轉料量升涉貞 一磁場強度量測與一多重磁場梯度量測。 用丨』才進仃 根據上述構想’其中該等約瑟芬接面係彻產生一量 動效果。 / 化。根據上述構想，其中該量子波動絲係用以量測—墙場變 想’其巾該料導量轩涉元件絲中規劃於 -耗，内」喊少該等約瑟芬接面因外界環境所造成的一浮 動，提升该等超導量子干涉元件的穩定度。 根據上述縣’射_超導量子干涉元件料相似之形 狀。 根據上述構想，射雜合_具有她之形狀。 根據上述構想’其係糊轉磁場伽抚件進行 測比對，以達成該多重磁場梯度量測。 乂頂 磁場構想，其+雜合賴龄計__成該多重 -域述Γί ’ ΐ七綠合線8係將不同位置峨應到的 -磁“#u 合效應傳遞給該超導量子干涉元件。 根據上述構想，其巾衫4磁場梯度制铜 =所感應的複數個梯度值進行— 根據上述構想’其係在—無屏蔽的魏下_該多重 梯度量測將一雜訊濾除。 m 9 •1295379 根據上述構想，其係在該無屏蔽的環境下利用該多重磁場 梯度量測對一微磁訊號進行分析。 根據上述構想’其巾該等磁場制耕係透過—訊號比對 以減少一誤判。 根據上速構想’其巾該多重磁場梯度量麟協助—使用者 判斷一訊號源與一偵測元件間的距離。 根據上述構想’其巾該超導量子干涉元件與該_合線圈共 平面。 根據上述構想，其更包含_金屬接點以及一外加補償線路 接線。其中該金屬接點位於該多重磁場梯度計的—端，用以連 接-外接祕；錢該外加補償祕麟，與該外接線路連 接，用以將一不均勻的背景磁場歸零。 【貫施方式】 们本案將可由以下的實施例說明而得到充分的瞭解，使得熟 ，本方法之人士可赠以完成之，鉢案之實施並非可由下列 實施例而被限制其實施型態。 請參閱第二®’其縣案之高溫多重磁場梯度計之超導量 =干涉元件的俯視示意圖。該超導量子干涉元件細係將高溫 早層超導薄膜2〇ι以半_的曝光、顯影及韻刻等技術製作出 基，界線(斜坡面或階梯邊緣(step_edge))2〇2，而由高溫單層超 導薄膜施以半㈣技術製作出的迴圈2〇3跨過基板界線 ^〇2，用以產生約瑟芬接面2〇4。該約瑟芬接面綱係產生一 量子波動效果以量_場變化。如此，迴圈加將 量子干涉元件。 ' 10 1295379 一立請參閱第三圖，其係本案之高溫多重磁場梯度計的俯視 示心、圖向/服多重磁場梯度計％〇由四個第二圖中的超導量子 :涉兀件200所組成。由於該等超導量子干涉元件2〇〇集中規 釗於一極小的範圍内，故其所屬的約瑟芬接面2〇4不論是在薄 膜厚度或是在基板界線性質上的差異皆很微小，此將有利於比 對訊號，且可減少該約瑟芬接面204因外界環境所造成的不一 致浮動，提升超導量子干涉元件200的穩定度。 本案之高溫多重磁場梯度計在將該等超導量子干涉元件 2〇〇設計成相同形狀下，並分別連接上四個具有相同形狀的方 形，合線圈3(U、302、3Q3與3。4，如此即可構成四個相似的 兹劳偵測元件，以同時進行磁場強度量測與多重磁場梯度量 /貝J且相互比對罝測的結果以減少誤判。該等超導量子干涉 几件200與耦合線圈3〇1、3〇2、3〇3與3〇4較佳地為共平面設 计’在製程上較易實施。此外，耦合線圈3〇1、3〇2、3〇3與 3〇4中心點間的距離3〇9、31〇、311與312需足夠大(約〇» 刀），以將不同位置的磁場訊號經由箱合效應傳遞給各個超導 畺子干涉元件200。如此一來，雖然各個超導量子干涉元件 相距很近，卻可以藉由耦合線圈3〇1、3〇2、3〇3與3〇4感應到 不同位置的磁場。 ,本案單一超導量子干涉元件2〇〇所偵測得到訊號的為零 P白梯度㊈號’兩個相鄰的超導量子干涉元件2〇〇可經由比對得 到一階梯度訊號；而至於二階梯度訊號，則可藉由四個相鄰的 超導量子干涉元件200比對得到。因此，本案之實施例中所設 叶的四個超導量子干涉元件2〇〇可同步偵測零階、一階、與二 F白Λ號並藉由比對不同的梯度訊號協助使用者判斷訊號源與 11 * 1295379 偵測元件間的距離。 為得到最大的有效耦合磁通量，耦合線圈3〇1、3〇2、3〇3 與304的内邊長3〇5較佳地需小於外邊長3〇6的三分之一。此 t ’ ^然四個超導量子干涉元件200的性質彼此相似，但因環 土兄中K存有不均勻的背景磁場，故設計一些外接線路3⑽用以 連接外加補償線路麟3〇8，將該不均勻的背景磁場 少干擾。 /紅上所述，本案為發展無屏蔽環境下之高溫超導微磁偵測 技術的關鍵元件，係以適當的幾何設計，將超導量子干涉元件 的約=接面在集中規劃下，設計四個相似的磁場债測元件， 成單層高溫超導薄膜之多重磁場梯度計，—方面可提升超 導量子干涉元件的穩定度並避免誤判，另一方面可同步量測磁 場強度與一階、二階梯度，關時濾除雜訊並讀取微磁訊號。 一縱使本I明已由上述之實施例詳細敘述而可由熟悉本技 二之人士任知匠思而為諸般修倚，然皆不脫如附申請專利範圍 所欲保護者。 【圖式簡單說明】 第圖·其係美國專利US6，154,026中提出在High-Tc SQUI^：n：^_合線圈之方式讀取梯度訊麟示意圖； 第一圖：其係本案之高溫超導量子干涉元件的俯視示意 圖，及 第二圖·其係本案之高溫多重磁場梯度計的俯視示意圖。 【主要元件符號說明】 101，200:超導量子干涉元件 12 1295379 102, 301, 302, 303, 304:耦合線圈 201:高溫單層超導薄膜 202:基板界線 203:迴圈 204:約瑟芬接面 300:高溫多重磁場梯度計 305:耦合線圈内邊長 306:耦合線圈外邊長 307:外接線路 308:外加補償線路接線 309, 310, 311，312:耦合線圈中心點間的距離High-Tc SQUID) The characteristics of Josephine junction are easy to float and poor in stability. It is difficult to perform synchronous detection between multiple components. Therefore, most of the high-temperature superconducting elements are subjected to gradient detection by coupling coils. . Please refer to the first figure, which is a schematic diagram of designing a coupling_mode 4 gradient signal over the High-Tc SQUID in U.S. Patent No. 6,154,026. There is only one SQUID 101 in this design, and the gradient $ is measured by designing the coupling coil 1〇2 above the SQUID 101. However, the high-temperature superconducting coupling coil is difficult to manufacture, and is limited in design. Generally, it is only made into a step meter, so it is difficult to detect multiple steps simultaneously. Moreover, _SQ11113 101 and the coupling coil 1〇2 are non-coplanar design, so the process is more complicated. Therefore, in view of the lack of the conventional method, the inventor has carefully developed this multi-magnetic field gradiometer through careful experimentation and research, and a perseverance spirit. SUMMARY OF THE INVENTION This case proposes that the multi-magnetic field gradiometer can not only operate in an unshielded environment, but also can break down the secret temperature and superconductivity in safety and cost. Or by adopting a suitable synchronous detection and comparison technique by a plurality of superconducting quantum interference elements, the occurrence of false positives can be reduced. With the multi-gradient measurement, it will remove noise and read micro-magnetic signals for a lighter and cheaper system. The main idea of the present invention is to provide a multi-magnetic field gradiometer (4) cell (5) magnetic gradiome (4), which comprises a single-layer superconducting film, a substrate boundary line, a ring, at least two superconducting quantum interference elements, and at least a light-coupling coil. , the substrate boundary line is located in the single-layer superconducting film, used as a step edge (four)-edge) loop across the substrate boundary, the rib produces 8 1295379 Severin junction; the superconducting quantum interference tree is fine The financial film is made of Lin___, and the ribs are used as the -== layer = and _ combined « oblique threat material volume increase 贞 a magnetic field strength measurement and a multiple magnetic field gradient measurement. According to the above concept, the Josephine junctions produce a dynamic effect. /. According to the above concept, wherein the quantum wave wire is used for measuring - the wall field is imaginary, and the material of the towel is planned to be in the wire of the component, and the inside of the wire is less than the Josephine junction due to the external environment. The resulting float increases the stability of the superconducting quantum interference elements. According to the above-mentioned county, the super-conducting quantum interference element material has a similar shape. According to the above concept, the hybrid _ has her shape. According to the above concept, the paste-to-magnetic field gaiter is subjected to a comparison to achieve the multiple magnetic field gradient measurement. The dome magnetic field is conceived, and its +heterogeneous age meter __ into the multi-domain Γί ' ΐ 绿 绿 绿 8 8 8 绿 绿 绿 绿 绿 绿 绿 绿 绿 磁 磁 磁 磁 磁 磁 磁 磁 磁 磁 磁 磁 磁 磁 磁 磁 磁 磁 磁 磁 磁According to the above concept, the towel 4 magnetic field gradient copper = the induced plurality of gradient values - according to the above concept 'the system is - the unshielded Wei _ the multi-gradient measurement filters out a noise. m 9 • 1295379 According to the above concept, the micro magnetic signal is analyzed by the multiple magnetic field gradient measurement in the unshielded environment. According to the above concept, the magnetic field is transmitted through the signal-to-signal comparison. According to the above-mentioned conception, the user can judge the distance between a signal source and a detecting element. According to the above concept, the superconducting quantum interference element is combined with the detecting element. The coil is coplanar. According to the above concept, it further comprises a metal contact and an external compensation line connection, wherein the metal contact is located at the end of the multiple magnetic field gradiometer for connecting-external secret; Connected to the external line to zero an uneven background magnetic field. [Comprehensive method] The present case will be fully understood by the following examples, so that the person skilled in the method can give it a completion. The implementation of the case is not limited to the implementation of the following embodiments. Please refer to the second superconductivity of the high temperature multi-magnetic field gradiometer in the county case = the top view of the interference element. The superconducting quantum interference element The fine layer is made of a high-temperature early-layer superconducting film 2〇ι in a half-length exposure, development and rhyme technique, and the boundary line (slope surface or step edge (step_edge)) is 2〇2, and the high temperature single layer superconducting The film is fabricated by a half (four) technique. The loop 2〇3 is crossed across the substrate boundary ^〇2 to produce the Josephine junction 2〇4. The Josephine junction system produces a quantum wave effect by the amount _ Field change. Thus, the loop adds a quantum interference element. ' 10 1295379 Please refer to the third figure for the vertical view of the high-temperature multi-magnetic field gradiometer in this case, the figure/service multiple magnetic field gradiometer%〇 Superconducting quantum in the second picture: The composition of the element 200. Since the superconducting quantum interference elements 2 are concentrated in a very small range, the Josephine junction 2〇4 to which it belongs is in the thickness of the film or the boundary property of the substrate. The difference is very small, which will facilitate the comparison signal, and can reduce the inconsistency fluctuation of the Josephine junction 204 due to the external environment, and improve the stability of the superconducting quantum interference element 200. The gradiometer is designed to have the same shape of the superconducting quantum interference elements 2, and is respectively connected with four squares having the same shape, and the coils 3 (U, 302, 3Q3 and 3.4), thus forming Four similar Zlau detection elements are used to simultaneously measure the magnetic field strength and the multiple magnetic field gradients and compare the results of the mutual measurements to reduce false positives. The superconducting quantum interference pieces 200 and the coupling coils 3〇1, 3〇2, 3〇3 and 3〇4 are preferably coplanar designs' are relatively easy to implement in the process. In addition, the distances between the center points of the coupling coils 3〇1, 3〇2, 3〇3 and 3〇4, 3〇9, 31〇, 311 and 312, are sufficiently large (about 〇»刀) to apply magnetic fields at different positions. The signals are transmitted to the respective superconducting forceps interference elements 200 via the boxing effect. In this way, although the superconducting quantum interference elements are closely spaced, the magnetic fields at different positions can be induced by the coupling coils 3〇1, 3〇2, 3〇3, and 3〇4. In this case, the single superconducting quantum interference element 2〇〇 detects the signal obtained by the zero-P white gradient No. 9 'two adjacent superconducting quantum interference elements 2 〇〇 can obtain a step signal through the comparison; The two step signals can be obtained by comparing four adjacent superconducting quantum interference elements 200. Therefore, the four superconducting quantum interference elements 2 provided in the embodiment of the present invention can simultaneously detect the zero-order, first-order, and second-F white numbers and assist the user in judging the signal by comparing different gradient signals. Source and 11 * 1295379 detect the distance between components. In order to obtain the maximum effective coupled magnetic flux, the inner side length 3〇5 of the coupling coils 3〇1, 3〇2, 3〇3 and 304 is preferably smaller than one third of the outer side length 3〇6. The characteristics of the four superconducting quantum interference elements 200 are similar to each other, but because of the uneven background magnetic field in the ring brothers, some external lines 3 (10) are designed to connect the external compensation lines 3,8, The uneven background magnetic field is less disturbed. / Red above, this case is the key component of the development of high-temperature superconducting micro-magnetic detection technology in an unshielded environment. With appropriate geometric design, the design of the superconducting quantum interference element is designed under centralized planning. Four similar magnetic field debt measuring components, multiple magnetic field gradiometers of single-layer high-temperature superconducting thin films, can improve the stability of superconducting quantum interference components and avoid false positives. On the other hand, they can simultaneously measure magnetic field strength and first-order Second step, when filtering off the noise and reading the micro magnetic signal. In the meantime, the present invention has been described in detail by the above-described embodiments, and can be modified by those skilled in the art, without departing from the scope of the appended claims. [Simplified description of the drawing] Fig. · The US Patent No. 6,154,026 proposes to read the gradient symphony diagram in the form of High-Tc SQUI^:n:^_ coil; The first picture: the high temperature super in the case A schematic top view of a quantum-induced interference element, and a second schematic view of the high temperature multiple magnetic field gradiometer in the present case. [Main component symbol description] 101,200: superconducting quantum interference element 12 1295379 102, 301, 302, 303, 304: coupling coil 201: high temperature single-layer superconducting film 202: substrate boundary 203: loop 204: Josephine Junction 300: High temperature multiple magnetic field gradiometer 305: Coupling coil inner side length 306: Coupling coil outer side length 307: External line 308: External compensation line wiring 309, 310, 311, 312: distance between coupling coil center points
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