1295067 A7 B7 經濟部智慧財產局員工消費合作社印製 五、發明説明（1 ) 本發明有關一種用於放電燈之整合有吸氣劑的中空陰 極，以及有關其實現方法。 在氣態介質中因放電而放射出輻射——該輻射可爲可 見光或紫外線——的所有燈均定義爲放電燈。該放電作用 係由施加於位在該燈兩端的兩個電極之電位差所觸發與持 續。 燈的陰極有各種形狀，例如單絲狀或螺旋纒繞絲狀或 其他形狀。特佳之陰極形式係中空形式：該中空陰極通常 呈中空圓筒形狀，其面向放電區一端是敞開的，另一端則 封閉。如本領域中所知，相對於其他陰極形狀，中空陰極 所提供的第一優點係「啓動」該放電作用所需之電位差較 低（約5-10% );其他優點係陰極所致之「濺射」現象強 度較低，換言之，該現象係由該陰極材料放射出會沈積在 相鄰部件（相鄰部件當中的是該燈之玻璃壁）在此等之原 子或離子，因此降低其輝度。具有中空陰極之燈的實例描 述於例如 US 4,437,03 8、4,461，97 0、4,578,61 8、4,698,550 、4,833,3 66與4,885,504等專利以及公開日本專利申請案 2000-133201 。 本領域中亦習知，爲了確使在燈的使用期限內適當操 作彼，必須確保形成該放電氣態介質之混合物的組成一致 性。此等混合物通常主要由一或數種稀有氣體形成，諸如 氬或氖，而在大部分實例中，還有數毫克汞。由於製程中 留在該燈內的雜質以及由相同材料形成該燈時所釋放出或 是自該燈壁向內滲透之雜質，此等混合物之組成可能與所 (請先閱讀背面之注意事項再填寫本頁) 本紙張尺度適用中國國家標準（CNS ) A4規格（210X297公釐） -4- 1295067 經濟部智慧財產局員工消費合作社印製 A7 B7 __五、發明説明（2 ) 需要組成不同。存在此等混合物中之雜質有可能以各種方 式損及該燈之操作：例如氧或經氧化物質會與录反應形成 H gO，因此去除該金屬的功能，而氫會造成放電觸發困難 (因而造成該燈的啓動困難）或是改變該燈之操作電學參 數，提高其耗損能量。 爲了消除此等雜質，已知在該燈內導入一種吸氣劑材 料。吸氣劑材料具有經由化學反應該雜質使之固定的功能 ，因此自該氣態介質去除此等雜質。廣泛用於此種目的之 吸氣劑材料係例如專利US 3,203,901中所述之鉻鋁合金； 專利US 4,306,887中所述之鉻鐵合金；專利US 4,312,669 中所述之鉻釩鐵合金；以及專利US 5,961，750中所述之鍩 銘混合稀土金屬合金（混合稀土金屬係一種稀土金屬之混 合物）。此等材料通常以吸氣劑裝置形式導入燈內，該吸 氣劑裝置係由固定於一支座之材料粉末所形成。通常，用 於燈之吸氣劑裝置係由切成小尺寸之支撐金屬條（其係平 坦或各種摺疊形狀）所形成，而且藉由滾軋將粉末固定於 其上；用於燈之吸氣劑裝置實例描述於專利US 5,825，127 〇 如本技術所習知，雖然某些實例中該吸氣劑裝置係由 僅插入該燈內之吸氣劑材料九形成，但是當其固定於該燈 的某些構成元件時，此種方式相當好··其原因係非固定吸 氣劑大體上不會位於該燈的熱區，因此其氣體吸附效率降 低，而且另外其會干擾發光。因此該裝置幾乎都是固定（ 通常係藉由點熔接）於例如陰極支座然而某些實例中，在 本紙張尺度適用中國國家標準（ CNS ) A4規格（210X297公釐) ^ (請先閲讀背面之注意事項再填寫本頁) 1295067 A7 B7 經濟部智慧財產局員工消費合作社印製 五、發明説明（3 ) 該燈內添加一適當支座：不過，所有情況中，在該燈的製 程中均需要額外步驟。此外，有些燈的直徑相當小，諸如 液晶螢幕之後照燈，其直徑不大於2-3微米；此種情況下 ’很難在該燈內找出該吸氣劑裝置的適當排列，而且該裝 置的組裝操作可能變得極爲困難。 本發明目的係提出一種用於放電燈之中空陰極，其陰 極具備吸氣功能，因此克服上述問題。 根據本發明可達到本目的，本發明的第一方面有關一 種中空陰極，其係由第一端敞開而另一端封閉之中空陰極 圓筒部件所形成，其中至少該圓筒表面的外部或內部存在 一層吸氣劑材料。 下文茲參考圖式說明本發明，其中·· -圖1顯示具有未塗覆吸氣劑材料之中空陰極之放電 燈的末端部件部分； -圖2至4顯示本發明之中空陰極各種可能具體實施 例之部分； •圖5顯示製得本發明陰極之模式。 主要元件對照表 10 燈 10 11 中 空 陰 極 11 12 中 空 部 件 12 13 密 封 末 端 13 14 敞 開 末 端 14 本紙張尺度適用中國國家標準（CNS ) A4規格（210X 297公釐） -6 - (請先閲讀背面之注意事項再填寫本頁) 訂 iAW. 1295067 A7 B7 五、發明説明 ( 4 ) 15 部 件 15 16 部 件 16 20 中 空 陰極 20 21 吸 氣 劑層 21 3 0 中 空 陰極 30 31 吸 氣 劑層 31 40 中 空 陰極 40 41 吸 氣 劑層 41 4Γ 吸 氣 劑層 41 50 元 件 50 (請先閲讀背面之注意事項再填寫本頁) 經濟部智慧財產局員工消費合作社印製 圖1顯不燈1 0之末端部件部分，其包含中空陰極i i ’該中空陰極1 1呈最常見形狀，而且沒有吸氣劑層所形 成之任何塗層。該陰極係由金屬所製成，而且係由具有封 密末端1 3與敞開末端1 4之圓筒狀中空部件1 2所形成。 在末端1 3處固定部件1 5，其通常由金屬線所形成；該部 件通常係於玻璃加熱軟化時將彼插入該玻璃內而固定於燈 1 6之封密末端，使得得以密封部件1 6。部件1 5具備部件 1 2之支座與作爲連接部件1 2與外部電源之導電體雙重功 能。部件1 2與1 5可形成單一部分，但是其更常爲藉由熱 密封或是藉由環繞部件1 5壓製部件1 2而機械密封之彼此 固定的兩個部件。 圖2至4顯示本發明陰極——即，具有塗覆吸氣劑層 表面部分——之不同具體實施例。特別是，圖2顯示中空 本紙張尺度適用中國國家標準（CNS ) A4規格（21〇X：297公釐） -7- 1295067 Α7 Β7 五、發明説明（5 ) (請先閱讀背面之注意事項再填寫本頁) 陰極20，其中吸氣劑層21僅存在部件12外表面五部分 ’圖3顯示一中空陰極3 0，其中吸氣劑層3 1僅存在部件 12內表面上；最後，圖4顯示一中空陰極4〇，其中兩層 吸氣劑層41，41’存在部件12的外表面一部分以及內表面 一部分上。 對技術人士而言，很明顯地，雖然此等圖式僅表示某 些具體實施例’但是具有吸氣劑材料之部件1 2兩個表面 的塗層可塗滿或部分塗覆··例如，在圖2情況中，層21 可完全塗覆部件1 2外表面，或者在圖4情況中，部分塗 覆內表面，並完全塗覆外表面，或者可使用任何其他塗覆 組合。 部件1 2通常由鎮製得，或者根據日本專利申請案 2 00CM 3 3 20 1教示，其可與耐火性金屬，諸如鉅、鉬或鈮 形成，顯示出濺射現象減少。 經濟部智慧財產局員工消費合作社印製 該吸氣劑層可由習知與氣體具有高度反應性之任一種 金屬製得，此等金屬基本上爲鈦、釩、釔、銷、鈮、鈴與 钽；其中，使用鈦與鉻爲佳。至於替代物，可使用吸氣劑 合金，通常係以锆或鈦與一或多種選自過渡金屬與鋁之元 素爲底質的合金，諸如例如先前所提專利之合金。 根據用以製造該吸氣劑材料層（如下所指定者）之技 術以及根據部件1 2之直徑，該吸氣劑材料層的厚度介於 數微米（μηι )與數百μηι之間：在部件12直徑約1微米 之中空陰極實例中，只要該吸氣劑材料足以有效具備吸附 氣態雜質功能，該吸氣劑層的厚度愈小愈好。 -8 - 本紙張尺度適用中國國家標準（CNS ) Α4規格{ 21〇X 297公釐） 經濟部智慧財產局員工消費合作社印製 1295067 A7 _B7 五、發明説明（6 ) 該吸氣劑材料層不會改變該陰極之功能，由於觀察到 此等材料之功函數値不超過用以製造部件1 2之功函數値 ，因此該陰極的電子發射功率不會降低。 第二方面，本發明有關製造具有吸氣劑材料層之陰極 的某些方法。根據第一具體實施例，可藉由陰極沈積法製 蓋該吸氣劑材料層，在薄層製造領域中比較爲人所知爲「 濺射」之技術。如同習知，該技術中欲塗覆之載體（此實 例中爲中空陰極）與通常稱爲「濺靶」之圓筒狀體（其係 由欲形成該層之材料所製得）置於一適當室中；將該室抽 空，然後回塡稀有氣體（通常是氬），其部件約1(T2-10·3 毫巴；藉由在該載體與該濺靶之間施加電位差（後者保持 .該陰極電位），形成Af離子，以朝向該濺靶之電場加速 該A:r+離子而產生氬中之電漿，如此藉由撞擊侵鈾該濺靶 ;自該濺靶去除離子（離子、原子或原子「簇」，沈積在 既有之表面上，其中有該載體之表面，形成薄層；有關原 理與使用條件的進一步細節茲參考各種相關文獻。以標準 技術製程，可以製得以單一金屬（例如鈦或鉻）所形成之 吸氣劑層。由於製造吸氣劑材料濺靶所遭遇的困難會使得 以此種技術製造合金層變複雜，可藉由採用本申請人名義 申請之國際專利申請案WO 02/00959中所述的濺靶克服此 等困難。以單位時間內沈積之層厚度計的濺射技術之產率 並不特別高，因此當欲製造之吸氣劑層不大於約20 μιη時 ，此種技術較佳，因此在直徑窄的中空陰極情況中此種技 術較佳。此種實例中，藉由在沈積期間採用遮罩，例如使 --r--------裝ir (請先閱讀背面之注意事項再填寫本頁) 本紙張尺度適用中國國家標準（CNS ) Α4規格（210Χ297公釐） - 9 - 1295067 經濟部智慧財產局員工消費合作社印製 A7 B7五、發明説明（7 ) 用已適當成形之部件支撐元件以及諸如選擇性覆蓋其表面 一部分’可部分塗覆部件1 2表面。此種方法的應用實例 示於圖5，其有關製造40型之中空陰極··此實例中，於 沈積期間’部件12係由元件50所支撐，元件5〇遮蔽該 部件內外圓筒形表面一部分；該圖式中，箭頭表示欲沈積 之材料粒子進來之方向；在沈積端，使用未沈積吸氣劑區 固定於部件1 5 ’然而塗覆有吸氣劑區面向發生放電之燈 區。 本發明塗覆有吸氣劑層之陰極的其他製造方法係藉由 電泳製造；以此種方式製造吸氣劑材料層之製造原理揭示 於以本申請人名義申請之專利US 5,242,559中。此種情況 下，如所習知，製備吸氣劑材料之細微粒子於一種液體中 之懸浮液，並將欲塗覆載體浸於該懸浮液中；在該欲塗覆 載體與輔助電極（亦顯然浸於該懸浮液中）之間施加電位 差’使吸氣劑材料粒子朝向該載體移動；然後藉由熱處理 加強將如此製得之沈積物。此情況中，可將該部件僅部分 或完全浸於該懸浮液中，製得部分或完全塗覆部件12; 此情況中，另外亦可能使用適當部件1 2之載體，選擇性 塗覆內外兩個表面之一，其與元件50實例中之先前解釋 相似。該技術適於製造以濺射所製得之較厚吸氣劑層，可 簡易而且迅速形成厚度高達數百μπι之層。 最後，當部件12係由諸如日本專利申請案2000-1 3 3 20 1所述之耐火性金屬形成時，可僅浸漬於一組成與 該欲沈積吸氣劑金屬合金相當之熔融槽中，進行塗覆作用 本纸張尺度適用中國國家標準（CNS ) Α4規格（2】〇X297公釐） ^10 - (請先閱讀背面之注意事項再填寫本頁) 1295067 A7 B7 五、發明説明（8 ) •，實際上，鈦與鉻分別於1 650與1 850°C熔融，所有先前 提出之銷爲底質合金係於1 500 °C以下熔融，而鉬於約 2600°C熔融，鈮金屬於約2470°C熔融，鉅於約3000°C熔 融，因此可能將由此等金屬所製得之部件浸漬吸氣劑金屬 或合金之熔融槽中，不會產生任何改變。此種情況中，亦 可將部件12完全或部分浸漬於該槽中，部分或完全塗覆 該吸氣劑層。 (請先閱讀背面之注意事項再填寫本頁) 經濟部智慧財產局員工消費合作社印製 -11 - 本紙張尺度適财_家轉（⑽）爾格（2lQx297公楚）1295067 A7 B7 Ministry of Economic Affairs Intellectual Property Office Staff Consumer Cooperative Printed V. Description of the Invention (1) The present invention relates to a hollow cathode for a discharge lamp incorporating a getter, and a method for achieving the same. All lamps that emit radiation in a gaseous medium due to electrical discharge - which may be visible or ultraviolet - are defined as discharge lamps. This discharge is triggered and sustained by the potential difference applied to the two electrodes positioned at the ends of the lamp. The cathode of the lamp has various shapes such as a monofilament or a spiral wound filament or other shape. A particularly preferred cathode form is a hollow form: the hollow cathode is generally in the shape of a hollow cylinder having an open end facing the discharge zone and a closed end. As is known in the art, the first advantage provided by the hollow cathode relative to other cathode shapes is that the potential difference required to "activate" the discharge is low (about 5-10%); other advantages are due to the cathode. The sputtering phenomenon is low in intensity, in other words, the phenomenon is caused by the cathode material emitting atoms or ions deposited in adjacent components (the glass wall of the lamp among adjacent components), thereby reducing the luminance thereof. . Examples of lamps having hollow cathodes are described in, for example, U.S. Patent Nos. 4,437,038, 4,461, issued to the entire disclosures of the entire disclosures of It is also known in the art that in order to ensure proper operation of the lamp during its useful life, it is necessary to ensure the compositional consistency of the mixture forming the discharge gaseous medium. These mixtures are typically formed primarily from one or several noble gases, such as argon or helium, and in most instances, there are several milligrams of mercury. Due to the impurities left in the lamp during the process and the impurities released from the same material when the lamp is formed or infiltrated from the wall of the lamp, the composition of these mixtures may be the same (please read the precautions on the back) Fill in this page) This paper scale applies to China National Standard (CNS) A4 specification (210X297 mm) -4- 1295067 Ministry of Economic Affairs Intellectual Property Bureau employee consumption cooperative printed A7 B7 __ five, invention description (2) need to be different. The presence of impurities in such mixtures may damage the operation of the lamp in various ways: for example, oxygen or oxidized species may form HgO with the recording reaction, thereby removing the function of the metal, and hydrogen may cause discharge triggering difficulties (thus causing It is difficult to start the lamp) or change the operating electrical parameters of the lamp to increase its energy consumption. In order to eliminate such impurities, it is known to introduce a getter material into the lamp. The getter material has a function of fixing the impurities by chemical reaction, and thus the impurities are removed from the gaseous medium. The getter material which is widely used for this purpose is, for example, the chromium-aluminum alloy described in the patent US Pat. No. 3,203,901; the ferrochrome alloy described in the patent US 4,306,887; the chromium vanadium-iron alloy described in the patent US 4,312,669; and the patent US 5,961, The eulogous mixed rare earth metal alloy (mixed rare earth metal is a mixture of rare earth metals) described in 750. These materials are typically introduced into the lamp in the form of a getter device formed by a powder of material fixed to the pedestal. Generally, a getter device for a lamp is formed by a support metal strip cut into a small size (which is flat or various folded shapes), and the powder is fixed thereon by rolling; for inhalation of the lamp An example of a device is described in U.S. Patent No. 5,825,127, the entire disclosure of which is incorporated herein by reference in its entirety in its entirety in the present disclosure in the present disclosure In some of the constituent elements, this method is quite good. The reason for this is that the non-fixed getter is not substantially located in the hot zone of the lamp, so that its gas adsorption efficiency is lowered, and in addition it interferes with light emission. Therefore, the device is almost always fixed (usually by spot welding) to, for example, a cathode support. However, in some cases, the Chinese National Standard (CNS) A4 specification (210X297 mm) is applied at the paper scale ^ (please read the back first) 1295067 A7 B7 Ministry of Economic Affairs Intellectual Property Bureau Staff Consumer Cooperative Printed 5, Invention Description (3) Add a suitable support to the lamp: However, in all cases, in the process of the lamp Additional steps are required. In addition, some lamps have a relatively small diameter, such as a liquid crystal screen backlight, which has a diameter of no more than 2-3 microns; in this case, it is difficult to find the proper arrangement of the getter device in the lamp, and the device The assembly operation can become extremely difficult. SUMMARY OF THE INVENTION An object of the present invention is to provide a hollow cathode for a discharge lamp having a cathode which has a suction function, thereby overcoming the above problems. This object is achieved according to the present invention, and a first aspect of the invention relates to a hollow cathode formed by a hollow cathode cylindrical member which is open at the first end and closed at the other end, wherein at least the outer or inner portion of the surface of the cylinder is present A layer of getter material. The invention will now be described with reference to the drawings in which: Figure 1 shows the end member portion of a discharge lamp having a hollow cathode not coated with a getter material; - Figures 2 to 4 show various possible implementations of the hollow cathode of the present invention Part of the example; • Figure 5 shows the mode in which the cathode of the invention is made. Main components comparison table 10 Lamp 10 11 Hollow cathode 11 12 Hollow part 12 13 Sealed end 13 14 Open end 14 This paper size applies to Chinese National Standard (CNS) A4 size (210X 297 mm) -6 - (Please read the back Precautions Please fill out this page) Book iAW. 1295067 A7 B7 V. INSTRUCTIONS (4) 15 Parts 15 16 Parts 16 20 Hollow cathode 20 21 Getter layer 21 3 0 Hollow cathode 30 31 Getter layer 31 40 Hollow cathode 40 41 getter layer 41 4Γ getter layer 41 50 component 50 (please read the back note first and then fill out this page) Ministry of Economic Affairs Intellectual Property Bureau employee consumption cooperative prints Figure 1 shows no light 1 0 end parts part It comprises a hollow cathode ii 'the hollow cathode 11 is of the most common shape and has no coating formed by the getter layer. The cathode is made of metal and is formed of a cylindrical hollow member 12 having a sealed end 13 and an open end 14. The component 15 is fixed at the end 13 and is usually formed of a metal wire; the component is usually inserted into the glass and fixed to the sealed end of the lamp 16 when the glass is heated and softened, so that the sealing member 16 is sealed. . The component 15 has a dual function of the support of the component 12 and the electrical conductor as the connection component 12 and the external power source. The members 1 2 and 15 may form a single portion, but they are more often two members that are fixed to each other by heat sealing or mechanically sealed by pressing the member 12 around the member 15. Figures 2 through 4 show different embodiments of the cathode of the present invention, i.e., having a surface portion coated with a getter layer. In particular, Figure 2 shows the hollow paper size applicable to the Chinese National Standard (CNS) A4 specification (21〇X: 297 mm) -7- 1295067 Α7 Β7 V. Invention description (5) (Please read the note on the back first) Fill in this page) Cathode 20, in which getter layer 21 only has five parts on the outer surface of component 12'. Figure 3 shows a hollow cathode 30 in which getter layer 31 is only present on the inner surface of component 12. Finally, Figure 4 A hollow cathode 4 is shown in which two layers of getter 41, 41' are present on a portion of the outer surface of component 12 and a portion of the inner surface. It will be apparent to those skilled in the art that although these figures represent only certain embodiments, the coating of the two surfaces of the component 12 having the getter material may be coated or partially coated. In the case of Figure 2, layer 21 may completely coat the outer surface of component 12, or in the case of Figure 4, partially coat the inner surface and completely coat the outer surface, or any other coating combination may be used. The part 1 2 is usually made of a town or is formed according to Japanese Patent Application No. 00CM 3 3 20 1 , which can be formed with a refractory metal such as giant, molybdenum or ruthenium, showing a reduction in sputtering phenomenon. The Department of Economic Intelligence's Intellectual Property Office employee consumption cooperative prints the getter layer from any metal that is highly reactive with gases. These metals are basically titanium, vanadium, niobium, pin, tantalum, bell and thorium. Among them, titanium and chromium are preferred. As an alternative, a getter alloy may be used, typically an alloy of zirconium or titanium with one or more elements selected from the group consisting of transition metals and aluminum, such as, for example, the alloys of the prior patents. The thickness of the getter material layer is between several micrometers (μηι) and hundreds of μηι according to the technique used to fabricate the getter material layer (as specified below) and according to the diameter of the component 12: in the component In the case of a hollow cathode having a diameter of about 1 micrometer, as long as the getter material is sufficiently effective to have a function of adsorbing gaseous impurities, the thickness of the getter layer is preferably as small as possible. -8 - This paper scale applies to China National Standard (CNS) Α4 Specification { 21〇X 297 mm) Ministry of Economic Affairs Intellectual Property Bureau Staff Consumer Cooperative Printed 1295067 A7 _B7 V. Invention Description (6) The getter material layer is not The function of the cathode is changed, and since the work function of these materials is observed to not exceed the work function 用以 used to fabricate the component 12, the electron emission power of the cathode does not decrease. In a second aspect, the invention relates to certain methods of making a cathode having a layer of getter material. According to the first embodiment, the getter material layer can be formed by a cathode deposition method, and a technique known as "sputtering" is known in the field of thin layer manufacturing. As is conventional, the carrier to be coated (in this example, a hollow cathode) and a cylindrical body commonly referred to as a "splash target" (which is made of the material from which the layer is to be formed) are placed in a conventional manner. In a suitable chamber; evacuate the chamber and then return a rare gas (usually argon) with a component of about 1 (T2-10·3 mbar; by applying a potential difference between the carrier and the splash target (the latter remains. The cathode potential) forms an Af ion to accelerate the A:r+ ion toward the electric field of the sputtering target to generate a plasma in the argon, so as to attack the target by invading the uranium; removing ions (ion, atom) from the sputtering target Or atomic "cluster" deposited on an existing surface, with the surface of the carrier forming a thin layer; further details on the principles and conditions of use are referred to various related documents. A standard metal process can be used to make a single metal ( A getter layer formed, for example, of titanium or chromium. The difficulty encountered in fabricating a getter material splash target can complicate the fabrication of the alloy layer by such techniques, and can be applied for by an international patent application filed in the name of the applicant. Case WO 02/00959 The sputtering target overcomes such difficulties. The yield of the sputtering technique in terms of the layer thickness deposited per unit time is not particularly high, so when the getter layer to be fabricated is not more than about 20 μm, the technique Preferably, such a technique is preferred in the case of a hollow cathode having a narrow diameter. In such an example, by using a mask during deposition, for example, -r--------is ir (please Read the notes on the back and fill out this page. This paper size applies to the Chinese National Standard (CNS) Α4 specification (210Χ297 mm) - 9 - 1295067 Ministry of Economic Affairs Intellectual Property Bureau employee consumption cooperative printed A7 B7 V. Invention description (7) The surface of the component 12 can be partially coated with a suitably shaped component support member and, for example, selectively covering a portion of its surface. An application example of such a method is shown in Figure 5, which relates to the manufacture of a hollow cathode of type 40. During the deposition, the component 12 is supported by the component 50, and the component 5 is shielded from a portion of the inner and outer cylindrical surfaces of the component; in the figure, the arrow indicates the direction in which the material particles to be deposited come in; at the deposition end, the unused sink is used. The getter region is fixed to the member 15' but is coated with a getter region facing the lamp region where the discharge occurs. Other methods of manufacturing the cathode coated with the getter layer of the present invention are manufactured by electrophoresis; The manufacturing principle of the production of the getter material layer is disclosed in the patent US Pat. No. 5,242,559, the disclosure of which is hereby incorporated herein in Soaking the carrier to be coated in the suspension; applying a potential difference between the coated carrier and the auxiliary electrode (also apparently immersed in the suspension) to move the getter material particles toward the carrier; The heat treatment strengthens the deposit thus obtained. In this case, the part may be partially or completely immersed in the suspension to produce a partially or completely coated part 12; in this case, it is also possible to use the appropriate part 1 The carrier of 2 selectively coats one of the inner and outer surfaces, which is similar to the previous interpretation in the example of element 50. This technique is suitable for the production of thicker getter layers produced by sputtering, and can be easily and quickly formed into layers having a thickness of up to several hundred μm. Finally, when the member 12 is formed of a refractory metal such as described in Japanese Patent Application No. 2000-1 3 3 20 1 , it may be immersed only in a molten bath having a composition equivalent to the metal alloy to be deposited. Coating The paper scale is applicable to China National Standard (CNS) Α4 specification (2)〇X297 mm) ^10 - (Please read the back note first and then fill in this page) 1295067 A7 B7 V. Invention description (8) • In fact, titanium and chromium are melted at 1 650 and 1 850 ° C, respectively. All previously proposed pins are melted below 1 500 ° C for the base alloy, while the molybdenum is melted at about 2600 ° C. It melts at 2470 ° C and melts at about 3000 ° C. Therefore, it is possible to impregnate the member made of such a metal into the molten bath of the getter metal or alloy without any change. In this case, the component 12 may also be completely or partially immersed in the bath, partially or completely coated with the getter layer. (Please read the notes on the back and fill out this page.) Printed by the Ministry of Economic Affairs, Intellectual Property Bureau, Staff and Consumer Cooperatives -11 - The paper scale is suitable for wealth _ home turn ((10)) Erge (2lQx297 public Chu)