1292496 (1) 九、發明說明 【發明所屬之技術領域】 本發明係有關於，微小光電路元件等中所使用之光子 晶體平板及該光子晶體平板上形成有共振器之光子晶體平 板’和具備其之光子晶體波導與光元件。 【先前技術】 • 具有隨著光波長而折射率會週期性變化之構造的物質 係被人熟知爲光子晶體，其中會出現有，禁止該週期所對 應之波長的光之存在的禁止帶，也就是所謂的光子能.隙 (photonic band-gap)，使得特定波長帶之光線的存在和傳 播變成不可能。因此，光子晶體係具有能夠自由自在地控 制光的可能性，而以次世代的電子、光電材料之姿，受到 矚目。 先前的2維光子晶體波導的一種，例如有圖36所示 • 者（例如，參照專利文獻1)。 該2維光子晶體波導，係具有：在由折射率高於空氣 之材料所成之板狀的平板材料81上，將圓柱孔86呈三角 格子狀複數排列而成的2維光子晶體，如圖3 6所示，藉 由將排列成三角格子狀的圓柱孔8 6的一部份做線狀留白 ，而在光子晶體上導入線狀缺陷92，令該線狀缺陷92作 爲波導之構成。 該2維光子晶體波導中，若從外部往2維光子晶體入 射相當於光子能隙頻率內之波長的光1 〇 3，則在未形成線 -5- 1292496 (2) 狀缺陷92的地方，在面內方向上由於有光子能隙，因此 光線的前進傳播係被禁止；而在面直方向上，雖然因折射 率差封閉所致之全反射而使光線被封閉，但由於有線狀缺 陷92存在的地方係被視爲波導，因此爲可傳播光線的構 造。 順便一提，有人嘗試將此種2維光子晶體，適用於 共振器上。（例如，參照專利文獻2、圖1 ) • 由該光子晶體所成之共振器係，在2維光子晶體中導 入了點狀缺陷，在應該配設構成光子晶體之低折射率物質 的多數2維格子點中，在3以上之相鄰的複數格子點處略 過低折射率物質的配設，將原本應該對應於最接近點狀缺 陷之格子點之至少1者而配設之低折射率物質，從該格子 點移位所定距離而成的構成。 又，除了將2維光子晶體當成共振器來利用，同時還 爲了獲得高Q値之共振器，而在2維光子晶體中導入和先 #前專利文獻2同樣的點狀缺陷，將原本應該對應於最接近 點狀缺陷之格子點之至少1者而配設的低折射率物質的位 置’改變所定距離的構成，已爲公知。（例如，參照專利 文獻3、圖1) 〔專利文獻1〕日本特開2001-272555號公報 〔專利文獻2〕日本特開2004-245866號公報 〔專利文獻3〕日本特開2004-279800號公報 【發明內容】 -6 - (3) 1292496 〔發明所欲解決之課題〕 先釗之2維光子晶體波導中，由於2維光子晶體係僅 對於光之偏極模式的TE-like模式或TM-like模式之一者 而具有光子能隙之構造，因此TE-like模式或TM-like模 式的光是會往光子晶體的面內方向滲漏，導致取出效率變 差之問題。例如圖3 6所示之被排列成平面視三角格子狀 的圓柱孔86…中，僅對TE-like模式具有光子能隙，因此 φ TM-like模式的光會往光子晶體的面內方向滲漏。 因此雖然需要對TE-like模式和TM-like模式這兩種 模式具有共通之光子能隙的構造的2維光子晶體平板，但 目目U爲止仍未見到此種2維光子晶體。 又，當將此種2維光子晶體當成共振器使用時，作爲 共振器的Q値是很重要的，因此，之前專利文獻3中雖然 有進行Q値的改善，但Q値的改善並不充分，而且先前 專利文獻1〜3之任一光子晶體中都是僅對TE-like模式或 # TM-like模式之一者具有光子能隙的構造，因此會有TE· like模式或TM-like模式的光會往光子晶體的面內方向滲 漏之問題，只要有這個原因存在，要提高Q値是有困難的 〇 本發明係有鑑於前記情事而硏發，目的在於提供一種 除了對TE-like模式和TM-like模式之兩模式的光具有共 通的光子能隙，同時還能使放射分布良好而發揮高Q値的 新種光子晶體平板。 本發明的目的在於，提供一種對TE-like模式和TM- (4) 1292496 like模式之兩模式的光具有共通之光子能隙，且能使放射 分布良好而發揮高Q値的波導，以及具備其之光元件。 〔用以解決課題之手段〕 本發明係有鑑於前記情事而硏發，因此本發明中， 係屬於在平板材上，折射率異於該平板材的同一形狀之領 域，是以C6V對稱性（6次旋轉對稱性和鏡像對稱性）而週 • 期性地複數配置；前記異折射率領域的平面形狀爲具有 Csv對稱性的形狀（3次旋轉對稱性和鏡像對稱性）；對於通 過前記平板內的光，具有2維完全光子能隙的光子晶體平 板，其特徵爲，前記具有C3V對稱性之異折射率領域的週 期性是部份性地紊亂而形成了孤立缺陷領域；在該孤立缺 陷領域中，具有對平板材的厚度方向賦予非對稱性的部份 〇 本發明中所謂的C3V對稱性形狀，係指3次的旋轉對 # 稱形狀，具有3個鏡面者。換言之，亦即具有3個對稱軸 的意思。若依據第1發明的2維光子晶體平板，則因爲可 使不同模式（複數模式）的能隙頻帶一致，所以可對上記不 同模式（複數模式）的光，具有共通的光子能隙。 因此例如可提供一種，對於TE-like模式和TM-Iike 模式之兩模式的光具有共通的光子能隙，且對任一模式之 光都不會發生滲漏因而不發生Q値變動或降低的光子晶體 平板或共振器。 本發明係有鑑於前記情事而硏發，因此其特徵爲，前 (5) 1292496 記發明之孤立缺陷領域係爲光的共振器；前記對稱性被賦 予在，使前記光被封閉在前記共振器內之效果較大的所定 位置。 在孤立缺陷領域中，因爲在對使光封閉在共振器內之 效果爲大的位置上賦予對稱性，所以光封閉性會提升，能 良好抑制面內滲漏，因此，封閉複數模式光變得更有效果 ，可提供Q値變化、降低較少的光子晶體平板或共振器。 φ 本發明係有鑑於前記情事而硏發，因此其特徵爲，前 記發明之非對稱性，係非貫通之孔部和凸部之至少一者被 形成1個以上而成。 若利用非貫通之孔部和凸部來作爲賦予非對稱性的手 段’則只需要在光子晶體平板的一部份上決定這些孔部或 凸部的位置而加以形成，就可提供Q値變化、降低較少的 光子晶體平板或共振器。 本發明之波導，其特徵爲，具有上述任一記載之孤立 修缺陷領域和線狀缺陷所成之波導；該波導係爲可通過TE-like模式和TM-like模式之至少一種模式的光的波導。 藉由令波導爲可通過TE-like模式和TMdike模式之 至少一種模式的光的波導，就可將該波導供作傳達兩模式 光的用途’可將其當成用來導出被封閉在光子晶體平板之 孤立缺陷領域中的雨模式光的波導而利用，或者，當成用 來將光導入至光子晶體平板之孤立缺陷領域中所需之波導 而利用。 本發明的本發明，其特徵爲，具備具有上述各種特徵 -9- (6) 1292496 之可有效利用的波導。 〔發明效果〕 若依據本發明之光子晶體平板，則可提供一種對ΤΕ· like模式和TM-like模式之兩模式的光具有共通的光子能 隙，且可防止光朝平板材料面內方向滲漏、低損失0勺光子* 晶體平板。 又，若依據本發明之光子晶體波導，則可提供一種具 備對TE-like模式和TM-like模式之兩模式的光具有共通 的光子能隙的2維.光子晶體平板，且可防止光朝平板材料 面內方向滲漏、低損失的光子晶體波導，和具備其之光元 件。 【實施方式】 以下雖然參照圖面來說明本發明之實施形態’但本發 φ 明並非被限定於以下說明之實施形態。又，關於以下圖面 中各種構成部份的比例尺，爲了能使圖面標示容易，因此 是將各構成部份的比例尺加以變更而記載。 (第1實施形態） 圖1係第1實施形態之共振器的槪略構成的斜視圖， 圖2係圖示圖1之共振器中所具備的2維光子晶體平板的 槪略平面圖，圖3係圖示圖2之2維光子晶體平板中所具 備之複數低折射率材料領域的部份放大平面圖。 -10- (7) 1292496 本實施形態之共振器，係以2維光子晶體波導單元1 Ο 爲主體而具備。 該2維光子晶體波導單元1 0，係在2維光子晶體平板 1 Oa上，把擾亂該光子晶體之週期性排列的線狀之缺陷（線 狀缺陷）22，部份性地形成在Γ · J方向（換言之亦即Γ -K 方向），將該線狀缺陷22當成讓光通過的波導，然後更在 該波導22的側方，形成後面說明之共振器領域丨6 a。此 Φ 外，前記所謂Γ - J方向方向，係指如本實施形態般，當 平面視三角狀的低折射率材料領域1 5是被排列成三角格 子狀時，和該低折射率材料領域1 5之任一邊呈平行的方 向，亦即圖2中以箭頭Al、A2、A3所示之方向之任一者 皆爲Γ - J方向。上記波導22雖然是被形成在箭頭A1所 示之方向上’但亦可爲形成在箭頭A2或箭頭A3所示之 方向上。此外，圖2中，箭頭B所示的方向，係爲Γ - X 方向（換言之係爲Γ 方向）。 ® 本實施形態之2維光子晶體平板1 Oa，係爲對TE-like 模式和TM-like模式之兩模式的光具有共通的光子能隙。 作爲該2維光子晶體平板1 〇a的具體構造，係在由高折射 率材料所成之平板材11上，把折射率低於該平板材1 1的 材料所成之領域（低折射率材料領域）1 5排列成三角格子狀 ，藉此，低折射率材料領域1 5是對平板材1 1呈週期性排 列而形成折射率分布。 作爲平板材11使用的材料，是使用了高折射率材料 ，例如含有從 InGaAsP、GaAs、In、Ga、Al、Sb、As、Ge -11 - (8) 1292496 1種或2種以上的材料、Si等無 、有機材料當中，適宜選擇來使 、Si、p、N、〇當中選擇 機材料、無機半導體材料 用。 低折射率材料領域15中所用的材料，係使用折射率 低於構成平板材1 1之局折射率材料的低折射率材料，在 本實施形態中是使用空氣。 本實施形態中’在平板材11上形成了複數之三角孔 1 4 °該三角孔1 4係在相當於三角格子的格子點之位置上 ’貝通平板材1 1的厚度方向而形成。然後，作爲低折射 率材料的空氣會塡充複數三角孔14之每一者而複數形成 了三角柱狀的低折射率材料領域1 5，藉此而形成了光子晶 體的週期性排列。如此低折射率材料領域之形狀爲三角柱 狀的情況，係爲C3 v對稱之一種。所謂具有c 3 v對稱性的 形狀，係指具有3次旋轉對稱性和鏡像對稱性的形狀。換 言之，亦即具有3個對稱軸的意思。 然後在該光子晶體波導單元1 0的平板材1 1上，相鄰 於在剛才的線狀缺陷22附近而平行地形成擾亂光子晶體 之週期性排列之形狀，且兩端爲封閉形的孤立缺陷領域1 6 :在該孤立缺陷領域1 6的長度方向兩端部，以不貫通2 維光子晶體平板1 〇a的方式，形成非貫通之平面視圓形的 孔部1 7。這些孔部1 7的深度係爲不超過平板材1 1厚度一 半之程度，例如爲幾分之一左右的深度；藉由這些孔部的 存在，平板材1 1上係在其厚度中被導入非對稱性’而形 成了共振器領域1 6 A。又，此形態中，因爲孔部】7係爲 -12- (9) 1292496 平面視圓形’所以可視爲具有〇：八對稱性之形狀的1種。 順便一提在平板材11中，低折射率材料領域〗5之一 邊的長度L，當令中心波長爲l 5^m日寺，係爲 〇·4μ m左右。相鄰之低折射率材料領域15和u的間距a 係爲 0·35//ηι 〜0.55μηι 左右。 本實施形態中由於低折射率材料領域丨5係爲正三角 柱狀，因此相鄰之低折射率材料領域1S和ls的間距a, •係爲相同於低折射率材料領域週期性配置之低折射 率材週期構造部中的最小中心距離a之大小。 本开:^恶之2維光子晶體平板丨〇 &中，理想爲以△= (nH2-nL2)/2nH2(式中、nH係代表上記高折射率材料的折 射率，nL係代表上記低折射率材料的折射率。）所定義之 相對折射率差△會大於〇 · 3 5的方式，來選擇平板材n中 所用的材料和低折射率材料領域15中所用的材料，更理 想爲’選用會使得△達到0·45以上的材料。若相對折射 •率差△爲0.35以下，則TE-like模式、TM-like模式雨者 的光子能隙恐怕無法拉開。 再者，滿足0.7 < L/a < 1 ·〇(式中、L係低折射率材料 領域1 5之一邊長，a係上記低折射率材週期構造部中的最 小中心距離或晶格常數）之關係的構成，依照前述理由而 爲理想。 此外若使用如圖4所示在平板材1 1之至少—面（圖面 中係爲下面側）設置補強層1 1 a，則由於可採取相鄰之低折 射率材料領域1 5、1 5的一部份爲重疊之構造或相鄰之低 -13- (10) 1292496 折射率材料領域1 5、1 5爲接觸之構造，因此可以爲0.7 < L / a $ 1 · 0。上記補強層1 1 a中，沒有形成上記低折射率材 料領域。 在平板材1 1的上面，也可以如圖4之二點虛線所示 般地形成補強層1 1 a。作爲如此設置在平板材1〗之兩面的 補強層1 1 a的材料，可舉例如有，如矽基板而在Si層的 兩面分別具有Si02層者。 ® 又’低折射率材料領域佔據的比率（低折射率材料領 域7H由：刺所成時則爲開口率），係相對於2維光子晶體 平板的體積100%(此處，有形成線狀缺陷22的部份係除 外）達到2 5 %以上者爲理想，達3 5 %以上者則更爲理想。 若低折射率材料領域的佔據比率（體積％)爲25%以下，則 無法對TE-like模式和TM-like模式之兩模式的光具有共 通的光子能隙。 又，複數之低折射率材料領域1 5，理想係爲如圖3所 Φ 示，以除了對一群平行線Μ方向呈±30°之奇數倍以外之範 圍的一定傾斜角度，來進行配置。。複數之低折射率材料 領域1 5若對一群平行線方向呈± 3 〇 °的奇數倍，則不會出 現光子能隙。 此外，圖3係圖示了，複數之正三角柱狀低折射率材 料領域1 5，是對一群平行線Μ方向呈〇度之傾斜角來配 置的情形。 又，上記複數之低折射率材料領域1 5係如圖2所示 ，是以波導22爲中心而左右非對稱的方式而配置。 -14- 1292496 (11) 又，實施形態之2維光子晶體波導1 0中，藉由調整 波導寬W，可成爲施予（d ο η ο 1·)型波導。本發明中所謂的波 導寬’係指以線狀缺陷22爲中心的左右（兩側）之低折射率 材週期構造部中心間的距離，在本實施形態中由於各低折 射率材料領域1 5是正三角柱狀，因此也可視爲以線狀缺 陷22爲中心之左右的低折射率材料領域1 5、1 5的中心間 之距離。 (波導的作用） 當將上記構成之2維光子晶體平板1 〇a的波導22當 成波導使用時，因爲可使TE-like模式和TM-like模式之 兩模式的能隙頻帶一致，所以對於上記兩模式之光可具有 共通的共通的光子能隙，而且由於高次平板模式不會發生 ，因此可防止光往平板材料面內方向之滲漏。 若對該上記2維光子晶體平板l〇a從外部入射TE-# like模式或TM-like模式的光R1，則在光子晶體內，面內 方向是因光子能隙而禁止傳播，面直方向則因上下的低折 射率材料所致之全反射而被封閉。 又，本實施形態，在2維光子晶體平板1 〇a中，藉由 將排列成三角格子狀的複數低折射率材料領域1 5的一部 份以線狀方式留白取除，以使得光子晶體平板被導入線狀 缺陷22，該線狀缺陷22中存在著導波模式，而成爲波導 22。該波導22，無論入射至2維光子晶體平板l〇a的光 R1是TE-like模式還是TM-like模式之哪一者，都可加以 -15- (12) 1292496 傳播。此外，波導22係由於可以低損失搬運光之 較大，因此，波導22可搬送含有數頻道之波長的 帶的光。 本實施形態之2維光子晶體波導1 〇中，雖然 導22爲施予型的情形加以說明，但藉由變更波導 而亦可爲接收型。又，藉由變更波導寬W，就可控 的分散關係和模式的頻率區域當中的至少一者。藉 # 實現，從施予型波導跨越到接受型波導，具有所望 分散關係和模式頻率區域的2維光子晶體波導。 又，能夠確保單一模式之光的傳播頻帶這點上 爲要滿足（Τ' 3)ax(2/16)S (/·3)αχ(18/16)(式中 波導寬，a係上記低折射率材週期構造部中的最小 離或晶格常數）之關係。若 W未滿（/ 3)ax(2/16)， 模式會消失；若超過（，3)ax(18/16)，則會無法確 模式（s i n g 1 e m 〇 d e) 〇 • 若依據本實施形態之2維光子晶體波導，則藉 缺陷2 2是被形成在Γ - J方向上，因此可不依存偏 可防止往平板材料的面內方向的光損失，相較於線 爲形成在Γ · X (或Γ - Μ)方向上的情形，入射至波 無論是TE-like模式還是TM-like模式之哪一者， 損失地傳播。 此外’在平板材1 1上將低折射率材料領域1 5 三角格子狀時，亦可容易地形成60度彎曲的波導。 又’上記實施形態中，雖然針對複數低折射率 波長段 波長頻 針對波 寬W， 制模式 此就可 之模式 ，理想 ，W係 中心距 則波導 保單一 由線狀 極，且 狀缺陷 導的光 都能低 排列成 材料領 -16- (13) 1292496 域1 5是配置成以波導22爲中心之左右非對稱的情形，但 亦可爲以波導22爲中心配置成左右對稱的2維光子晶體 波導。此種2維光子晶體波導中，一旦變更波導寬，則模 式會交叉。又，對波導中心波形成左右對稱的光，容易進 入上記波導內，且容易傳播。 又，上記實施形態中，雖然是針對C3V對稱的1種也 就是正三角柱狀之低折射率材料領域1 5是在平板材1 1上 鲁被排列成三角格子狀而形成折射率分布的情形來加以說明 ，但亦可爲如圖5所示在三角柱的各側面設置凸部的形狀 (橫剖面三角形的各角部被裁剪成凹狀的形狀、或三角柱 的各角部被裁剪成凹狀的形狀）的低折射率材料領域1 5是 在平板材1 1上被排列成三角格子狀而形成折射率分布者 ，或是如圖6所示的橫剖面形狀爲Y字形（叉狀）的低折射 率材料領域15(在三角柱的各角部設有凸部之形狀的低折 射率材料領域）是在平板材1 1上被排列成三角格子狀而形 # 成折射率分布者，或者如圖7所示，配置成中心連結起來 的線是成正三角形的3個圓柱狀領域45 a、45 a、45a爲一 單位之形狀的低折射率材料領域4 5，由其排列而形成折射 率分布者。 (共振器的動作） 先前說明過之構造的2維光子晶體波導單元1〇中， 由於在波導22的一列鄰側設有共振器領域1 6A，因此一 旦從平板材Π的外部向該共振器領域I 6A，例如從平板 - 17- (14) 1292496 材1 1的上面側使用雷射發光器等光源而入射TE-like模式 或Τ Μ · 11 k e模式的光，則在共振器領域1 6 A中會激發起光 的共振，該共振器領域1 6 A中共振過的光可從共振器領域 1 6 A中取出而利用。在進行該取出時，可將光從共振器領 域16A往其相鄰之波導22側引導而沿著波導22來導出光 ’也可將從共振領域1 6 A往上方照射的光取出來利用。 此處以從共振領域1 6 A往外部放射的光的方式來取出 Φ 共振光時，若無前述孔部1 7存在，則放射圖案會發生往 正上側和斜上方側分歧而難以取用，但藉由設置孔部1 7， 就可使放射圖案具有單峰峰値而可成爲良好的放射圖案。 又，藉由本構造，作爲共振器來看時，可防止Q値的 降低。此處本案所採用之構造，係可實現無論對TE-Iike 模式還是TM-like模式之任一者都能加以傳播的2維完全 光子晶體’且能實現無論哪一模式的光都幾乎沒有滲漏光 的完全光子能隙，因此可防止Q値降低。 φ 其次，圖5〜圖7所示之低折射率材料領域的形狀， 無論何者均爲C 3 v對稱的例子。圖5中，L係凸部的長度 ，Μ係凸部的高度，a係低折射率材週期構造部中的最小 中心距離或晶格常數。圖6中，L係凸部的長度，Μ係凸 部的高度，a係低折射率材週期構造部中的最小中心距離 或晶格常數。圖7中，L係圓柱狀領域的中心間距離，r 係圓柱狀領域4 5 a的半徑，a係低折射率材週期構造部中 的最小中心距離或晶格常數。 -18- 1292496 (15) (第2實施形態） 圖8係第2實施形態之共振器的槪略構成的斜視圖。 第2實施形態之共振器和第1實施形態共振器不同的 地方在於，具備有2維光子晶體波導5 0這點；詳言之， 具備了該2維光子晶體波導50的2維光子晶體平板50a 的構成平板材1 1上所形成之低折射率材料領域6 5的形狀 和排列狀態係爲不同，以及線狀缺陷（波導）22的形成方向 • 不同等等。 作爲此形態之2維光子晶體平板5 0a的具體構造，係 藉由在平板材1 1上將低折射率材料領域6 5排列成正方格 子狀，以形成折射率分布。 本實施形態中，在平板材Π上形成了複數之圓形孔 64。該圓形孔64係被形成在相當於正方格子之格子點的 位置。然後，作爲低折射率材料的空氣會塡充複數圓形孔 64之每一者而複數形成了圓柱狀的低折射率材料領域65 Φ ，藉此而形成了光子晶體的週期性排列。 又’滿足〇 · 4 $ r / a < 0.5 0 (式中、r係上記低折射率 材料領域ό 5的半徑長度，a係上記低折射率材週期構造部 中的最小中心距離或晶格常數）之關係，係依照前述理由 而爲理想。 又’低折射率材料領域65佔據的比率，係相對於2 維光子晶體平板的體積1〇〇%(此處，有形成線狀缺陷22 的部份係除外）達到25%以上。 即使在該2維光子晶體平板5〇a中，因爲可使τΕ_ -19- (16) 1292496 like模式和TM-like模式之雨模式的能隙頻帶一致，所以 對於上記兩模式之光可具有共通的共通的光子能隙，而且 由於高次平板模式不會發生，因此可防止光往平板材料面 內方向之滲漏，可達成低損失。 該2維光子晶體平板5 Oa中，擾亂上記光子晶體之週 期性排列的線狀缺陷22是被形成在Γ · X方向上，該線 狀缺陷22會讓光通過而變成波導。此處，所謂的r - X • 方向’係如本實施形態般，當平面視圓形狀的低折射率材 料領域65是被排列成正方格子狀時，圖8所示之箭頭B 1 、B2所指示的方向之任一者都算是Γ - X方向。上記波導 22雖然是被形成在箭頭B1所示之方向上，但亦可爲形成 在箭頭B2所示之方向上。此外，圖5中，箭頭C所示的 方向，係爲Γ - X方向（換言之係爲Γ-M方向）。 又，本實施形態中，上記的複數低折射率材料領域65 係如圖8所示，是以對波導22之中心呈左右非對稱的方 籲式而配置。 然後在本實施形態中，從有形成線狀缺陷（波導）2 2的 列起的一列旁側的位置，將低折射率材料領域65略過複 數個而形成孤立缺陷領域6 6，在該孤立缺陷領域6 6的兩 端部側，形成未貫通平板材1 1的非貫通之孔部67。這些 孔部67的深度係爲不超過平板材1 1厚度一半之程度，例 如爲幾分之一左右的深度；藉由這些孔部的存在，平板材 1 1上係在其厚度中被導入非對稱性，而形成了共振器領域 6 6 A。 -20- (17) 1292496 本實施形態之2維光子晶體波導50，係藉由在2維光 子晶體平板5 0a上，擾亂光子晶體之週期性排列的線狀缺 陷22是被形成在Γ - X方向上，因此可不依存偏極，且 可防止往平板材料的面內方向的光損失，入射至波導的光 無論是TE-like模式還是TM-like模式之哪一者，都能低 損失地傳播。 又，在平板材11上將低折射率材料領域65排列成正 # 方格子狀時，亦可容易地形成直角彎曲的波導。 此外，本實施形態中雖然針對低折射率材料領域65 爲圓柱狀時的情形加以說明，但無論爲三角柱状、四角柱 狀、五角柱狀、六角柱狀等多角柱狀、橢圓柱狀之任一形 狀皆可。 又，上記第1〜第2實施形態中，雖然針對線狀缺陷 只形成一個的2維光子晶體波導來加以說明，但線狀缺陷 係亦可設置1個以上。 (共振器的動作） 先前說明過之構造的2維光子晶體平板5 0a中，由於 在波導22的一列鄰側設有共振器領域66A，因此一旦從 平板材1 1的外部向該共振器領域66A，例如從平板材1 1 的上面側使用雷射發光器等光源而入射TE-like模式或 TM-1 ike模式的光，則在共振器領域66A中會激發起光的 共振，該共振器領域6 6 A中共振過的光可從共振器領域 66A中取出而利用。在進行該取出時，可將光從共振器領 -21 - (18) 1292496 域66A往其相鄰之波導22側引導而沿著波導22來導出光 ，也可將從共振領域6 6 A往上方照射的光取出來利用。 此處以從共振領域66A往外部放射的光的方式來取出 共振光時，若無前述孔部6 7存在，則放射圖案會發生往 正上側和斜上方側分歧而難以取用，但藉由設置孔部67， 就可使放射圖案具有單峰峰値而可成爲良好的放射圖案。 又，藉由本構造，作爲共振器來看時，可防止Q値的 • 降低。此處本案所採用之構造，係可實現無論對TE-like 模式還是TM-like模式之任一者都能加以傳播的2維完全 光子晶體，且能實現無論哪一模式的光都幾乎沒有滲漏光 的完全光子能隙，因此可防止Q値降低。 (第3實施形態） 圖9係第3實施形態之共振器的槪略構成的斜視圖。 第2實施形態之共振器和第1、第2實施形態共振器 ® 不同的地方在於’構成2維光子晶體平板70a的平板材1 1 上所形成之低折射率材料領域75的形狀和排列狀態係爲 不同，以及線狀缺陷（波導）7 2的形成方向不同等等。其他 平板材1 1的材質或低折射率材料領域的大小與間隔、波 導2 2的寬度或方向，係和之前的實施形態相同。 作爲此形態之2維光子晶體平板7 〇 a的具體構造，係 藉由在平板材1 1上將低折射率材料領域75排列成三角格 子狀，以形成折射率分布。 本實施形態中’在平板材1 1上形成了複數之貫通型 -22- (19) 1292496 的複合孔74來作爲低折射材料領域75。該複合孔74係被 形成在，平板材Π上面的相當於三角格子之格子點的位 置。.然後，作爲低折射率材料的空氣會塡充複數複合孔74 之每一者而複數形成了圓柱狀的低折射率材料領域75，藉 此而形成了光子晶體的週期性排列。此形態之複合孔74 的形狀，係如圖9所示，將3個圓75a、75b、75c，以各 個半徑a、b、c爲原點Ο 1爲中心，而在圓周方向上錯開 φ 6 0度所配置而成的具有複合輪廓之形狀，各圓的半徑a、 b、c係爲3個對稱軸之故，因此可視爲C3V對稱的1種例 子。 即使是此第3實施形態的構造中，也是以略過複合孔 74之一列的形態來導入擾亂光子晶體之週期性排列的線狀 缺陷而將該線狀缺陷部份當成波導72，且以相鄰於該波導 72的形態在離開1列的位置上略過2個複合孔74而導入 擾亂光子晶體之週期性排列的短線狀之孤立缺陷領域76， • 在該缺陷領域76中原本應該形成複合孔74的位置上，形 成了平面視圓形的凹部狀的孔部77、77，而形成了共振器 領域76A。 這些孔部76係以和之前實施形態的孔部1 7相同程g 之大小且相同程度的深度而被形成在平板材1 1上，該孔 部76所形成之短線狀缺陷部份就成了共振器領域76A。 此形態之平板材1 1上所形成之複合孔74係在內部胃 有空氣層，可發揮相同於之前實施形態之低折射率材料領 域1 5的作用效果。 -23- (20) 1292496 亦即，藉由本實施形態之構造’作爲共振器來看時’ 可防止Q値的降低。此處本案所採用之構造，係可實現無 論對TE-like模式還是TM-like模式之任一者都能加以傳 播的2維完全光子晶體，且能實現無論哪一模式的光都幾 乎沒有滲漏光的完全光子能隙，因此可防止Q値降低。 此外，本實施形態中雖然針對低折射率材料領域爲三 角柱、圓柱狀，或其複合圓柱狀時的情形加以說明，但其 • 他無論爲四角柱狀、五角柱狀、六角柱狀等多角柱狀、橢 圓柱狀之任一形狀皆可。 .又，上記第1〜第3實施形態中，雖然針對線狀缺陷 只形成一個的2維光子晶體波導來加以說明，但線狀缺陷 係亦可設置1個以上。 又，上記實施形態中，雖然是針對C3V對稱的1種也 就是正三角柱狀之低折射率材料領域1 5是在平板材1 1上 被排列成三角格子狀而形成折射率分布的情形來加以說明 ® ’但亦可爲如圖22所示在三角柱的各側面設置凸部的形 狀（橫剖面三角形的各角部被裁剪成凹狀的形狀、或三角 柱的各角部被裁剪成凹狀的形狀）的低折射率材料領域！ 5 是在平板材1 1上被排列成三角格子狀而形成折射率分布 者’或是如圖23所示的橫剖面形狀爲Y字形（叉狀）的低 折射率材料領域1 5(在三角柱的各角部設有凸部之形狀的 低折射率材料領域）是在平板材11上被排列成三角格子狀 而形成折射率分布者，或者如圖24所示，配置成中心連 結起來的線是成正三角形的3個圓柱狀領域45a、45a、 -24- (21) 1292496 45a爲一單位之形狀的低折射率材料領域45，由其排列而 形成折射率分布者。 圖2 2〜圖2 5所示之低折射率材料領域的形狀，無論 何者均爲C3V對稱。圖22中，L係凸部的長度，Μ係凸部 的高度，a係低折射率材週期構造部中的最小中心距離或 晶格常數。圖23中，L係凸部的長度，Μ係凸部的高度 ，a係低折射率材週期構造部中的最小中心距離或晶格常 # 數。圖2 4中，L係圓柱狀領域的中心間距離，r係圓柱狀 領域4 5 a的半徑，a係低折射率材週期構造部中的最小中 心距離或晶格常數。 〔實施例〕 (實驗例1) 製作了除了將平板材1 1上所形成之複數三角柱狀低 折射率材料領域1 5的對一群平行線Μ的傾斜角度0在-3 〇 • 度〜+ 30度之範圍內變更以外，其餘均和圖1〜圖3所示 者相同的各種2維光子晶體平板。此外，此處所製作的2 維光子晶體平板，條件係爲^=〇.46、1^/3=〇.85、'^ = 0.80 ° 向所製作之各種2維光子晶體平板，從外部入射λ = 1 · 5 5 // m的光，調查能隙對低折射率材料領域傾斜角的依 存性。其結果不於圖1 〇。此外，圖I I A係圖示了傾斜角 度0爲3 0度時的三角柱狀低折射率材料領域之排列狀態 ’ Η 1 1 B係圖不了傾斜角度0爲】5度時的三角柱狀低折 -25- (22) 1292496 射率材料領域之排列狀態，圖1 1 C係圖示了傾斜角度Θ爲 〇度時的三角柱狀低折射率材料領域之排列狀態。 圖10的圖形中，橫軸爲傾斜角度0 ，縱軸爲對能隙 頻率之中心値ω g的能隙頻率寬△ ω g的比率。 從圖1 0所示的結果可知，三角柱狀低折射率材料領 域係當對一群平行線Μ的傾斜角度0爲_ 3 〇度和+ 3 〇度時 ，△wg/og係爲〇，光子能隙不會出現。當_30度<Θ< ® + 3 0度之範圍時，會有光子能隙存在，尤其是，當傾斜角 度0爲0度時，△ ω g/ ω g呈現最大値，表示光子能隙的 頻率寬是非常的廣。 (實驗例2) 製作除了變更平板材1 1的厚度t，和三角柱狀低折射 率材料領域1 5的比率（開口率）以外，其餘均和圖！〜圖3 所示者相同的各種2維光子晶體平板。此外，此處所製作 ♦ 的2維光子晶體平板，條件係爲△= 0.46。 調查當向所製作之各種2維光子晶體平板，從外部分 別入射TE_like模式和TM-like模式的光時的2維完全光 子能隙（2維完全PBG)的對平板材厚度的依存性。其結果 示於圖1 2〜圖1 7。此外，圖1 2〜圖1 7中所製作的2維光 子晶體平板的t/a値和t/ λ 〇値也一倂加以圖示。 圖1 2〜圖1 7的圖形中，橫軸係空氣所成之三角柱狀 低折射率材料領域的開口率，縱軸係規格化頻率。圖1 2〜 圖1 7的圖形中，虛線所圍繞的領域係代表TM-1 ike模式 -26- 1292496 (23) 時的開口率和能隙之關係，實線所圍繞的領域係代表TE-like模式時的開口率和能隙之關係。又，圖〗2〜圖！ 7的 圖形中’虛線所圍繞的領域和實線所圍繞的領域重疊的部 份（以斜線所示之領域），係代表對TM-like模式和TE-like 模式之兩模式的光共通的光子能隙。 圖12所示之t/a= 0·60的情形和圖17之t/a= 〇〇的情 形’係低折射率材料領域之開口率無論何者接對TE-like # 模式和TM-like模式之兩模式的光不具有共通的光子能隙 〇 相對於此，圖1 3〜圖1 6的t/a = 0 · 6 5〜1 · 5 0的情況下 ’可對TM-like模式和TE-like模式之兩模式的光具有共 通的光子能隙，可知是存在著2維完全光子能隙。所謂2 維完全光子能隙，係指對TE-like模式和TM-like模式之 兩模式的光具有共通的光子能隙。 圖14之t/a= 0.80的情況係表示，2維完全光子能隙 #的頻率寬很廣。 (實驗例3) 製作除了變更平板材1 1的厚度t，和L/a以外，其餘 均和圖1〜圖3所示者相同的各種2維光子晶體平板。此 處係藉由變更a値以使得；I 〇 = 1 5 5 Onm付近會成爲能隙中 心波長，來變更L/a之値。 向所製作之各種2維光子晶體平板，從外部入射λ 〇 =1 5 5 0 n m的光，調查平板材1 1的厚度t與完全能隙之有 -27- (24) 1292496 無的關係。 如至此所說明的’取代掉形成有從圖1至圖 三角柱狀之低折射率材料領域的平板材，改用具: 不之複合圓狀的複合孔之光子晶體平板來提供共 形，來進行實驗。 準備具有圖9所示形狀之複合孔的s i所成 ，且1個複合圓的半徑爲0 · 2 4 // m的3個圓，將 # 以60度交叉所複合而成之形狀的複合孔，多數 角格子位置所成的平板材。該平板材的複數複合 除了略過1列當成波導，同時還從波導起將空下 、3列、或其以上亦可）複合孔之位置的複合孔以 導而略過2個（亦可爲1個、3個；又，亦可爲； 取代2複合孔，形成深度0 · 3 μ m以下、半徑0. 非賓通之孔部，將形成有孔部的部份當成共振器 具備圖9所示之波導和共振器的光元件。又，該 • t s 丨 ab/a = 0 · 9 5、L/a = 0 · 2、r/a = 0 · 3 8。 將此構造之光元件的ω a/2Tcc値針對全方向 定，獲得圖1 8所示之結果’除了可確認到TE 模式共通光子能隙之存在，並且還可確認到如圖 之TE、TM-like模式共通光子能隙中存在有共振 並確認其可在具有2維完全光子能隙的同時也能 器而發揮機能。 使用具有此種2維完全光子能隙的平板材， 材之厚度和孔部之深度（修整深度）的比率和Q ίϋ 3所示之 障圖9所 振器的情 之平板材 各個半徑 形成在三 孔當中， 1列（2列 平行於波 $以上）， 1 9 // m 的 而製作成 光元件的 來進行測 > TM-like 1 9所示 器模式， 作爲共振 求出平板 I (將修整 -28- 1292496 (25) 深度〇時予以規格化而成的相對値）的關係，結果示於圖 20 〇 又，備妥僅對在等同於前述例子之平板材上於三角格 子位置形成有圓孔的TE-like模式具有光子能隙的平板材 ，供作等同於前述例子的試驗。此例的平板材係在前述第 2實施形態的構造中將低折射率材料領域的形成位置設爲 三角格子位置，其他基本構造係爲依據第2實施形態的構 φ造。 從圖2 0所示的結果可知，不具有2維完全光子能隙 的試料中，藉由形成孔部而增加其深度，Q値會有大幅降 低的傾向。 這是意味著，若在僅對TE-like模式具有光子能隙， 但對TM-like模式不具有光子能隙的光子晶體上，形成孔 部而製造呈共振器，則會因面內漏光而導致Q値下降。 圖21係圖示了，前述例子的具有對應兩模式之2維 • 完全光子能隙的光子晶體平板，和僅具有對應一種模式之 光子能隙的光子晶體平板的個別之點缺陷（共振器領域）， 在共振後放出光時的放射圖案之測定結果。 圖2 1 A係圖示了，根據平板材2 2的中心的點缺陷（共 振器領域）來想定放射狀的角度，測定放射圖案之擴散之 際的受光器角度之位置。 圖2 1 B係圖示了具有僅對應一種模式之光子能隙的光 子晶體平板的每個角度之受光器的測定結果，圖2 1 C係圖 示了具有對應兩模式之2維完全光子能隙的光子晶體平板 -29 - (26) 1292496 的每個角度之受光器的測定結果。 從圖2 1 B和圖2 1 C所示的試驗結果可知，具有僅對應 一"種模式之光子能隙的光子晶體平板’其放射圖案係分岔 成3個，明顯的在斜向方向上也存在放射。相對於此， 具有對應兩模式之2維完全光子能隙的光子晶體平板，其 放射圖案係集中成一個山峰，而獲得單峰型的放射圖案。 其次，製作除了變更L/a以外，其餘均和圖1〜圖3 ® 所示者相同的各種2維光子晶體平板。此處係藉由變更a 値以使得；I 〇 = 1 5 5 Onm付近會成爲能隙中心波長，來變更 a値、L値，以變更L/a之値。 圖 25 係圖示了，當 L/a=0.85、Δ=0·15&、f=〇.36(f 係對2維光子晶體平板全體的低折射率材料領域佔據比率 ’亦即，本實驗例中係爲開口率）時的三角柱狀低折射率 材料領域的排列狀態。 圖26係圖示了，L/a=l、△=〇&、f=0.5時的三角 鲁柱狀低折射率材料領域之排列狀態。 向所製作之各種2維光子晶體平板，從外部入射入〇 =1 5 5 Οηηι的光，調查二維完全能隙寬。結果合倂示於圖 25〜圖26。 圖25〜圖26中，△又TM係TM-like模式之光子能隙 的波長帶寬（單位爲nm)，△ λ TE係TE-like模式之光子 能隙的波長帶寬（單位爲nm)。 從圖25〜圖26所示的結果可知，L/a = 〇·85時的TE 、TM-hke模式共通光子能隙的波長帶寬△ λ爲59nm，但 -30- 1292496 (27) L/a = 1時的二維完全能隙寬較廣。 除了將低折射率材料領域的形狀設計成在各二角柱的 各側面設有凸部之形狀（三角柱的各角部被削掘成凹狀）， 以及變更L/a以外，製作和先前實驗例同樣的各種2維光 子晶體平板。此處係藉由變更a値以使得λ 〇 = 1 5 5 Onm付 近會成爲能隙中心波長，來變更a値、L値，以變更L/a 之値。 擊圖27係爲L/a=0.6、M=〇.la(L係凸部的長度，Μ係 凸部的高度，a係低折射率材週期構造部中的最小中心距 離。）f= 0.39時的低折射率材料領域之排列狀態。 圖 28 係圖示了，L/a=0.7、M=0.1a、f=0.49 時的低 折射率材料領域之排列狀態。 圖 29 係圖示了，L/a= 0·8、Μ = 0.1 a、f = 0.6 時的低 折射率材料領域之排列狀態。 向所製作之各種2維光子晶體平板，從外部入射λ 〇 ® = 1 5 5 Onm的光，調查二維完全能隙寬。結果合倂示於圖 27〜圖29 〇 從圖27〜圖29所示的結果可知，在將低折射率材料 領域之形狀設計成三角柱的各角部被裁剪成凹狀的形狀而 形成時，L / a = 0 · 6時的T E、Τ Μ · 1 i k e模式共通光子能隙的 波長帶寬△又爲53nm，L/a=0.7時的△又爲116nm，但 L/a = 0·8時的△又爲225 nm，L/a = 0.8時二維完全能隙寬 較廣。 除了將低折射率材料領域的形狀設計成，橫剖面的形 -31 - (28) 1292496 狀爲γ字狀（叉狀）（三角柱的各角部設有凸部）’以及變更 L/a以外，製作和先前實驗例同樣的各種2維光子晶體平 板。此處係藉由變更a値以使得λ 〇 = 1 5 5 0nm付近會成舄 能隙中心波長，來變更a値、L値，以變更L/a之値。 圖 30 係圖示了，L/a=0.3、M=〇.3a、^=0.1568 1 f =0.39時的低折射率材料領域之排列狀態。 圖 31 係圖示了，L/a=0.34、M=0.34a、Δ=0·0〇63 • 、f= 0.46時的低折射率材料領域之排列狀態。 圖 32 係圖示了，L/a=0_366、M=0.366a、△ = 0a、f =0.5 3時的低折射率材料領域之排列狀態。 向所製作之各種2維光子晶體平板，從外部入射λ 〇 =1 5 5 Onm的光，調查二維完全能隙寬。結果合倂示於_ 30〜圖32 〇 從圖3 0〜圖3 2所示的結果可知，在將低折射率材料 領域之形狀設計成橫剖面形狀爲 Y字狀而形成時，L/a = # 0.3時的TE、TM-like模式共通光子能隙的波長帶寬△入 爲 50nm，L/a=0.366 時的△ λ 爲 89nm，但 L/a=0.34 時 的△ A爲136nm，L/a= 0.34時二維完全能隙寬較廣。 除了將中心連線是配置成正三角形的3個圓柱狀領域 當成一單位之形狀的低折射率材料領域排列成三角格子狀 而形成折射率分布，以及變更L/a以外，製作和先前實驗 例同樣的各種2維光子晶體平板。此處係藉由變更a値以 使得又〇 = 1 5 5 Onm付近會成爲能隙中心波長，來變更a値 、L値，以變更L/a之値。 -32- 1292496 (29) 圖33係圖示了，L/a= 0.425、r = L/2(L係圓柱狀領域 的中心間距離，r係圓柱狀領域的半徑）、△ = 0 · 1 5 a、f = 〇. 4 9時的低折射率材料領域的排列狀態。 圖 34 係圖不了，L/a=0.45、r=L/2、A^O-la、f = 0.55時的低折射率材料領域之排列狀態。 圖 35 係圖不 了，L/a=0.5、r=L/2、△=0&、f=0.68 時的低折射率材料領域之排列狀態。 φ 向所製作之各種2維光子晶體平板，從外部入射λ 0 二1 5 5 Onm的光，調查二維完全能隙寬。結果合倂示於圖 3 3〜圖3 5 〇 從圖3 3〜圖3 5所示的結果可知，在將中心連線是配 置成正三角形的3個圓柱狀領域當成一單位之形狀的低折 射率材料領域排列成三角格子狀而形成折射率分布時， L/a= 0·5時的丁£、丁^4-1丨1^模式共通光子能隙的波長帶寬 △又爲沒有，L/a=0.425時的△又爲140nm，但L/a二 籲 0.45時的△ λ爲202nm，L/a= 0.45時二維完全能隙寬較 廣。 〔產業上利用之可能性〕 具備本發明之2維光子晶體波導的光元件係可理想適 用於光塞取光子元件（光塞取多工裝置）等之塞取元件等。 【圖式簡單說明】 〔圖1〕具備第1實施形態之波導的共振器的槪略檸 -33- (30) 1292496 成的斜視圖。 〔圖2〕圖1之共振器中所具備的2維光子晶體波導 的槪略平面圖。 〔圖3〕圖2之2維光子晶體波導中所具備之形成有 2維光子晶體平板的複數低折射率材料領域的放大平面圖 〇 〔圖4〕本發明中可使用之附帶補強層之平板材的剖 籲面圖。 〔圖5〕圖2之2維光子晶體波導中所具備之形成有 2維光子晶體平板的· C3 v對稱之低折射率材料領域的其他 例的放大平面圖。 〔圖6〕圖2之2維光子晶體波導中所具備之形成有 2維光子晶體平板的C3 v對稱之低折射率材料領域的其他 例的放大平面圖。 〔圖7〕圖2之2維光子晶體波導中所具備之形成有 鲁 2維光子晶體平板的C3V對稱之低折射率材料領域的其他 例的放大平面圖。 〔圖8〕第2實施形態之波長分波器的槪略構成的斜 視圖。 〔圖9〕第3實施形態之波長分波器的槪略構成的斜 視圖。 〔圖1 〇〕能隙對低折射率材料領域傾斜角的依存性的 圖示。 〔圖1 1〕·圖1 1 A係圖不了 0 = 3 0度時的低折射率材 - 34- 1292496 (31) 料領域之排列狀態，圖1 1 B係圖示了 0 = 1 5度時的低折 射率材料領域之排列狀態，圖1 1 C係圖示了 0 = 〇度時的 低折射率材料領域之排列狀態。 〔圖1 2〕t/a= 0.60時的2維完全PBG寬和開口率的 關係圖。 〔圖13〕t/a= 0.65時的2維完全PBG寬和開口率的 關係圖。 ί 〔圖14〕t/a = 0.80時的2維完全PBG寬和開口率的 關係圖。 〔圖15〕t/a= 0.90時的2維完全PBG寬和開口率的 關係圖。 〔圖16〕t/a= 1 ·50時的2維完全PBG寬和開口率的 關係圖。 〔圖1 7〕t/a= 〇〇時的2維完全PBG寬和開口率的關 係圖。 B 〔圖1 8〕實施例之光元件的2維完全光子能隙的測定 結果之圖不。 〔圖1 9〕具有實施例之光元件的2維完全光子能隙的 共振器模式生成的測定結果之圖示。 〔圖20〕實施例之光元件的Q値變化之圖示。 /圖21〕_來圖示實施例之光元件的放射圖案，圖 ,2 1A係爲測定角度分布圖，6| 21B係爲比較例之放射圖案 / η 〇 /、、. ’ 〔圖22〕圖2之2維光子晶體波導中所具備之形成有 -35- (32) 1292496 2維光子晶體平板的c3V對稱之低折射率材料領域的其他 例的放大平面圖。 〔圖23〕圖2之2維光子晶體波導中所具備之形成有 2維光子晶體平板的C3V對稱之低折射率材料領域的其他 例的放大平面圖。 〔圖2 4〕圖2之2維光子晶體波導中所具備之形成有 2維光子晶體平板的C3 v對稱之低折射率材料領域的其他 _ 例的放大平面圖。 〔圖2 5〕L / a = 〇 · 8 5度時的低折射率材料領域之排列 狀態，和△ λ TM 、△又ΤΕ的調查結果。 〔圖2 6〕L / a = 1度時的三角柱状之低折射率材料領 域的排列狀態，和△ λ TM 、△ λ ΤΕ的調查結果。 〔圖2 7〕L / a = 〇 · 6度時的低折射率材料領域之排列狀 態，和△ λ TM 、△又TE的調查結果。 〔圖2 8〕L / a - 〇 · 7度時的低折射率材料領域之排列狀 # 態，和△ λ TM 、△ λ ΤΕ的調查結果。 〔圖29〕L/a= 〇·8度時的低折射率材料領域之排列狀 態，和△ λ ΤΜ 、△ λ ΤΕ的調查結果。 〔圖30〕L/a= 〇·3度時的低折射率材料領域之排列狀 態，和Α λ TM 、△ λ ΤΕ的調查結果。 〔圖31〕L/a= 0.34度時的低折射率材料領域之排列 狀態，和△ λ ΤΜ 、△ λ ΤΕ的調查結果。 〔圖32〕L/a=0_3 66度時的低折射率材料領域之排列 狀態，和△ A TM 、△ λ ΤΕ的調查結果。 -36- (33) 12924961292496 (1) The present invention relates to a photonic crystal plate used in a micro optical circuit element or the like, and a photonic crystal plate in which a resonator is formed on the photonic crystal plate. Its photonic crystal waveguide and optical element. [Prior Art] A substance having a structure in which the refractive index periodically changes with the wavelength of light is known as a photonic crystal, and a forbidden band in which the existence of light of a wavelength corresponding to the period is prohibited is also present. It is the so-called photonic band-gap, which makes the existence and propagation of light in a specific wavelength band impossible. Therefore, the photonic crystal system has the possibility of freely controlling the light, and has attracted attention with the next generation of electronic and optoelectronic materials. One of the conventional two-dimensional photonic crystal waveguides is, for example, as shown in Fig. 36 (for example, refer to Patent Document 1). The two-dimensional photonic crystal waveguide has a two-dimensional photonic crystal in which a cylindrical hole 86 is arranged in a triangular lattice shape on a flat plate material 81 made of a material having a refractive index higher than that of air, as shown in the figure. As shown in Fig. 6, by linearly leaving a portion of the cylindrical hole 86 which is arranged in a triangular lattice shape, a linear defect 92 is introduced into the photonic crystal, and the linear defect 92 is formed as a waveguide. In the two-dimensional photonic crystal waveguide, when light 1 〇3 corresponding to a wavelength within the photonic band gap frequency is incident from the outside to the two-dimensional photonic crystal, where the line -5 - 292496 (2) defect 92 is not formed, In the in-plane direction, due to the photon energy gap, the forward propagation of the light is prohibited. In the straight direction, although the light is blocked due to the total reflection due to the refractive index difference, the linear defect 92 exists. The place is considered a waveguide and is therefore a structure that can propagate light. By the way, some people have tried to apply such a two-dimensional photonic crystal to a resonator. (For example, refer to Patent Document 2, Fig. 1) • A resonator system made of this photonic crystal introduces a dot-like defect into a two-dimensional photonic crystal, and a large number of low refractive index materials constituting a photonic crystal should be disposed. In the dimension lattice point, the arrangement of the low refractive index material is skipped at the adjacent complex lattice points of 3 or more, and the low refractive index originally assigned to at least one of the lattice points closest to the point defect is disposed. The substance is formed by shifting the lattice point by a predetermined distance. In addition, in addition to the use of a two-dimensional photonic crystal as a resonator, and in order to obtain a resonator having a high Q値, the same point-like defect as in the prior patent document 2 is introduced into the two-dimensional photonic crystal, and the original point should be correspondingly It is known that the position of the low refractive index material disposed at least one of the lattice points closest to the point defects is changed by a predetermined distance. Japanese Patent Laid-Open Publication No. 2004-245866 (Patent Document 3) SUMMARY OF THE INVENTION -6 - (3) 1292496 [Problems to be Solved by the Invention] In a two-dimensional photonic crystal waveguide, the two-dimensional photonic crystal system is only for the TE-like mode or TM- of the polarization mode of light. One of the like modes has a photonic energy gap structure, and thus the light in the TE-like mode or the TM-like mode leaks into the in-plane direction of the photonic crystal, resulting in a problem that the extraction efficiency is deteriorated. For example, in the cylindrical hole 86... arranged in a planar view triangular lattice shape as shown in FIG. 36, only the TE-like mode has a photon energy gap, so the light of the φTM-like mode will seep into the in-plane direction of the photonic crystal. leak. Therefore, although a two-dimensional photonic crystal plate having a common photonic energy gap structure in the TE-like mode and the TM-like mode is required, such a two-dimensional photonic crystal has not been seen until the U. Further, when such a two-dimensional photonic crystal is used as a resonator, Q値 as a resonator is important. Therefore, in the prior patent document 3, although Q値 is improved, the improvement of Q値 is not sufficient. Further, in any of the photonic crystals of the prior patent documents 1 to 3, there is a configuration having a photon energy gap only for one of the TE-like mode or the #TM-like mode, and thus there is a TE·like mode or a TM-like mode. The light will leak into the in-plane direction of the photonic crystal. As long as there is a reason for this, it is difficult to improve Q値. The present invention has been developed in view of the predecessor, in order to provide a kind of addition to TE-like. The two modes of mode and TM-like mode have a common photon energy gap, and at the same time, a new photonic crystal plate with good radiation distribution and high Q値 can be used. It is an object of the present invention to provide a waveguide having a common photon energy gap for two modes of TE-like mode and TM-(4) 1292496 like mode, and capable of exhibiting high radiation distribution and high Q値. Its light components. [Means for Solving the Problems] The present invention has been made in view of the foregoing, and therefore, in the present invention, it belongs to the field of the same material having a refractive index different from that of the flat plate, and is C6V symmetry ( 6 rotation symmetry and mirror symmetry) and periodic and complex configuration; the planar shape of the pre-refractive index field is a shape with Csv symmetry (3 rotation symmetry and mirror symmetry); Internal light, a photonic crystal plate with a two-dimensional full photon energy gap, characterized in that the periodicity of the field of the different refractive index with C3V symmetry is partially disordered to form an isolated defect field; In the field, there is a portion that imparts asymmetry to the thickness direction of the flat sheet. The so-called C3V symmetry shape in the present invention means a three-time rotation pair shape, and has three mirrors. In other words, it has the meaning of three axes of symmetry. According to the two-dimensional photonic crystal panel of the first invention, since the band gaps of the different modes (complex mode) can be made uniform, the light having the common mode (complex mode) can have a common photon energy gap. Therefore, for example, it is possible to provide a common photon energy gap for the two modes of the TE-like mode and the TM-Iike mode, and no leakage of light of any mode occurs, so that no Q値 fluctuation or decrease occurs. Photonic crystal plate or resonator. The present invention has been developed in view of the foregoing, and is characterized in that the isolated defect field of the invention (5) 1292496 is a resonator of light; the symmetry of the former is given so that the front light is enclosed in the pre-resonator The desired position with a large effect inside. In the field of isolated defects, since the symmetry is imparted to a position where the effect of enclosing the light in the resonator is large, the light confinement property is improved, and the in-plane leakage is well suppressed, so that the closed plural mode light becomes More effective, it can provide a Q値 change, reduce the photonic crystal plate or resonator. φ The present invention is characterized in that the asymmetry of the invention is formed by forming at least one of the non-penetrating hole portion and the convex portion into one or more. If a non-through hole portion and a convex portion are used as means for imparting asymmetry, it is only necessary to determine the positions of the holes or protrusions on a portion of the photonic crystal plate to provide a Q値 change. Reduce the number of photonic crystal plates or resonators. The waveguide of the present invention is characterized in that it has the waveguide of the above-mentioned isolated defect field and the linear defect; the waveguide is light that can pass at least one mode of the TE-like mode and the TM-like mode. waveguide. By making the waveguide a waveguide that can pass light of at least one of the TE-like mode and the TMdike mode, the waveguide can be used for the purpose of conveying two modes of light, which can be used to derive a photonic crystal plate for encapsulation. It is utilized as a waveguide for rain mode light in the field of isolated defects, or as a waveguide for introducing light into the field of isolated defects of a photonic crystal plate. The present invention of the present invention is characterized in that it has a waveguide which can be effectively utilized with the above various features -9-(6) 1292496. [Effect of the Invention] According to the photonic crystal plate of the present invention, it is possible to provide a common photon energy gap for the two modes of the ΤΕ·like mode and the TM-like mode, and to prevent the light from seeping in the in-plane direction of the flat material. Leak, low loss 0 scoop photon* crystal plate. Moreover, according to the photonic crystal waveguide of the present invention, a two-dimensional photonic crystal plate having a common photon energy gap for the two modes of the TE-like mode and the TM-like mode can be provided, and the light can be prevented from A photonic crystal waveguide that leaks in-plane direction of a flat material, has low loss, and an optical element having the same. [Embodiment] Hereinafter, embodiments of the present invention will be described with reference to the drawings, but the present invention is not limited to the embodiments described below. Further, in the scales of the various components in the following drawings, in order to make the drawing of the drawings easy, the scale of each component is changed and described. (First Embodiment) Fig. 1 is a perspective view showing a schematic configuration of a resonator according to a first embodiment, and Fig. 2 is a schematic plan view showing a two-dimensional photonic crystal panel provided in the resonator of Fig. 1. Fig. 3 A partially enlarged plan view showing the field of a plurality of low refractive index materials provided in the two-dimensional photonic crystal plate of Fig. 2. -10- (7) 1292496 The resonator of the present embodiment is mainly composed of a two-dimensional photonic crystal waveguide unit 1 Ο. The two-dimensional photonic crystal waveguide unit 10 is formed on a two-dimensional photonic crystal plate 10 Oa, and a linear defect (linear defect) 22 that disturbs the periodic arrangement of the photonic crystal is partially formed in the image. In the J direction (in other words, the Γ-K direction), the linear defect 22 is regarded as a waveguide through which light passes, and then further on the side of the waveguide 22, a resonator field 丨6 a to be described later is formed. In addition to the above-mentioned Φ, the Γ-J direction direction refers to the case where the planar low-refractive-index material field 15 is arranged in a triangular lattice shape as in the present embodiment, and the low refractive index material field 1 Any of the five sides is in a parallel direction, that is, any of the directions indicated by arrows A1, A2, and A3 in Fig. 2 is the Γ-J direction. The upper waveguide 22 is formed in the direction indicated by the arrow A1, but may be formed in the direction indicated by the arrow A2 or the arrow A3. Further, in Fig. 2, the direction indicated by the arrow B is the Γ - X direction (in other words, the Γ direction). The two-dimensional photonic crystal plate 1 Oa of the present embodiment has a common photon energy gap for the two modes of the TE-like mode and the TM-like mode. The specific structure of the two-dimensional photonic crystal plate 1 〇a is a field in which a material having a refractive index lower than that of the flat plate 11 is formed on a flat plate 11 made of a high refractive index material (low refractive index material) The fields 15 are arranged in a triangular lattice shape, whereby the low refractive index material field 15 is formed by periodically arranging the flat members 11 to form a refractive index distribution. The material used for the flat plate 11 is a high refractive index material, and for example, one or two or more materials selected from InGaAsP, GaAs, In, Ga, Al, Sb, As, Ge -11 - (8) 1292496, Among Si and other organic materials, it is suitable to use a material selected from Si, p, N, and yt, and an inorganic semiconductor material. The material used in the low refractive index material field 15 is a low refractive index material having a refractive index lower than that of the local refractive index material constituting the flat plate material 11. In the present embodiment, air is used. In the present embodiment, a plurality of triangular holes are formed in the flat plate member 11. The triangular holes 14 are formed in the thickness direction of the Beton plate member 1 at a position corresponding to a lattice point of the triangular lattice. Then, the air as the low refractive index material is filled with each of the plurality of triangular holes 14 to form a triangular columnar low refractive index material field 15 in which the periodic arrangement of the photonic crystals is formed. In the case where the shape of such a low refractive index material is a triangular column, it is a C3 v symmetry. The shape having c 3 v symmetry means a shape having three rotation symmetry and mirror symmetry. In other words, it has the meaning of three axes of symmetry. Then, on the flat plate material 1 of the photonic crystal waveguide unit 10, adjacent to the vicinity of the linear defect 22, the shape of the periodic arrangement of the disturbed photonic crystal is formed in parallel, and the both ends are closed-shaped isolated defects. In the first and second portions of the isolated defect region 16 in the longitudinal direction, a hole portion 17 having a circular shape which is not penetrating is formed so as not to penetrate the two-dimensional photonic crystal plate 1 〇a. The depth of the hole portions 17 is not more than half the thickness of the flat plate 11 , for example, a depth of about a fraction; and by the presence of the holes, the flat plate 1 1 is introduced into the thickness thereof. The asymmetry 'forms the resonator field 1 6 A. Further, in this embodiment, since the hole portion 7 is -12-(9) 1292496, the plane is circular, and it can be regarded as one type having a shape of 〇: eight symmetry. By the way, in the flat plate 11, the length L of one side of the low refractive index material field is about 〇·4 μm when the center wavelength is l 5^m. The pitch a of the adjacent low refractive index material fields 15 and u is about 0·35//ηι to 0.55μηι. In the present embodiment, since the field of the low refractive index material 丨5 is a regular triangular column shape, the pitch a of the adjacent low refractive index material fields 1S and ls is the same as the low refractive index of the periodic arrangement of the low refractive index material field. The minimum center distance a in the rate period construction section. In the open: ^ 2D photonic crystal plate 丨〇 &, ideally △ = (nH2-nL2) / 2nH2 (wherein, nH represents the refractive index of the high refractive index material, nL represents the lower The refractive index of the refractive index material, which is defined by the relative refractive index difference Δ, is greater than that of 〇·3 5 to select the material used in the sheet n and the material used in the field 15 of the low refractive index material, more preferably ' Use materials that will cause △ to reach 0.45 or higher. If the relative refractive ratio difference Δ is 0.35 or less, the photon energy gap of the TE-like mode or the TM-like mode rainer may not be pulled apart. Furthermore, satisfying 0.7 < L/a < 1 · 〇 (in the middle of the L-based low refractive index material field, the length of one side, and the a-line is the minimum center distance or lattice constant in the low refractive index material periodic structure portion), for the above reasons And ideal. Further, if the reinforcing layer 11 a is provided on at least the face of the flat plate 1 1 (the lower side in the drawing) as shown in FIG. 4, the adjacent low refractive index material fields 15 5 , 15 can be taken. A part of the structure is overlapped or adjacent to the low-13-(10) 1292496 refractive index material field 15 5, 15 is the structure of the contact, so it can be 0.7 < L / a $ 1 · 0. In the above-mentioned reinforcing layer 1 1 a, the field of the low refractive index material is not formed. On the upper surface of the flat plate 11, a reinforcing layer 1 1 a may be formed as shown by a dotted line in Fig. 4 . The material of the reinforcing layer 1 1 a provided on both surfaces of the flat plate material 1 may be, for example, a ruthenium substrate and a SiO 2 layer on both surfaces of the Si layer. ® also the ratio of the 'low refractive index material field (7H in the field of low refractive index material: the aperture ratio when the thorn is formed), which is 100% relative to the volume of the 2D photonic crystal plate (here, there is a line shape) Part of defect 22 is excluded. It is ideal for those above 25 percent, and more preferably more than 35 percent. If the occupation ratio (% by volume) in the field of the low refractive index material is 25% or less, it is impossible to have a common photon energy gap for the two modes of the TE-like mode and the TM-like mode. Further, the field of the plurality of low-refractive-index materials 15 is ideally arranged as shown in Fig. 3, and is arranged at a constant inclination angle in a range other than an odd multiple of ±30° to a group of parallel lines. . Complex low-refractive-index materials Fields 15 If there is an odd multiple of ± 3 〇 ° for a group of parallel lines, no photonic energy gap will occur. Further, Fig. 3 is a view showing a case where a plurality of positive triangular prism-shaped low-refractive-index material fields 15 are arranged at a tilt angle of a group of parallel lines. Further, as shown in FIG. 2, the low-refractive-index material field 15 of the above-described plural number is arranged such that the waveguide 22 is asymmetric about the left and right. Further, in the two-dimensional photonic crystal waveguide 10 of the embodiment, by adjusting the waveguide width W, it is possible to impart a (d ο η ο 1·) type waveguide. The term "waveguide width" as used in the present invention refers to the distance between the centers of the left and right (both sides) of the low refractive index material centering on the linear defect 22, and in the present embodiment, the field of each low refractive index material is 15 Since it is a regular triangular column shape, it can also be regarded as the distance between the centers of the low refractive index material fields 15 and 15 centered on the linear defect 22. (Operation of Waveguide) When the waveguide 22 of the two-dimensional photonic crystal plate 1 〇a constructed as above is used as a waveguide, since the energy gap bands of the two modes of the TE-like mode and the TM-like mode can be made uniform, The two modes of light can have a common common photon energy gap, and since the high-order plate mode does not occur, leakage of light into the in-plane direction of the flat material can be prevented. If the above-mentioned 2-dimensional photonic crystal plate l〇a is incident on the light R1 in the TE-#like mode or the TM-like mode from the outside, in the photonic crystal, the in-plane direction is prohibited due to the photon energy gap, and the surface is straight. Then it is closed due to total reflection caused by the upper and lower low refractive index materials. Further, in the present embodiment, in the two-dimensional photonic crystal flat panel 1 〇a, a portion of the plurality of low refractive index material regions 15 arranged in a triangular lattice shape is removed in a linear manner to cause photonic crystals. The flat plate is introduced into the linear defect 22, and the linear defect 22 has a guided wave mode and becomes the waveguide 22. The waveguide 22 can be propagated by -15-(12) 1292496 regardless of whether the light R1 incident on the two-dimensional photonic crystal plate l〇a is in the TE-like mode or the TM-like mode. Further, since the waveguide 22 is large in carrying light with low loss, the waveguide 22 can carry light of a band having a wavelength of several channels. In the two-dimensional photonic crystal waveguide 1 of the present embodiment, although the guide 22 is described as a donor type, the waveguide may be changed to a receiving type. Further, by changing the waveguide width W, at least one of the controllable dispersion relationship and the frequency region of the mode is obtained. By means of the realization, a two-dimensional photonic crystal waveguide having a desired dispersion relationship and a mode frequency region is spanned from the donor waveguide to the acceptor waveguide. Moreover, it is possible to satisfy the propagation band of the light of a single mode (Τ' 3)ax(2/16)S (/·3)αχ(18/16) (wherein the waveguide width is wide, and the a system is low. The relationship between the minimum deviation or the lattice constant in the refractive index material periodic structure portion. If W is not full (/ 3)ax(2/16), the mode will disappear; if (3)ax(18/16) is exceeded, the mode will not be confirmed (sing 1 em 〇de) 若• According to this implementation The two-dimensional photonic crystal waveguide of the form is formed in the Γ-J direction by the defect 2 2, so that the light loss in the in-plane direction of the flat material can be prevented without depending on the deflection, and the line is formed in the Γ · X In the case of (or Γ - Μ) direction, the incident wave propagates in either the TE-like mode or the TM-like mode. Further, when the low-refractive-index material region is formed in a triangular lattice shape on the flat plate member 1, a 60-degree curved waveguide can be easily formed. Further, in the above-described embodiment, although the wavelength of the complex low-refractive-index wavelength band is specific to the wave width W, the mode can be used. Ideally, the center-to-center distance of the W-series is guaranteed by a linear pole, and the defect is guided. The light can be arranged low in a material collar - 16 - (13) 1292496 The field 1 5 is a left-right asymmetry centered on the waveguide 22, but may be a two-dimensional photon that is symmetrically arranged around the waveguide 22 Crystal waveguide. In such a two-dimensional photonic crystal waveguide, once the waveguide width is changed, the modes intersect. Further, the waveguide center wave is formed into a bilaterally symmetrical light, and it is easy to enter the upper waveguide and to easily propagate. Further, in the above-described embodiment, the low-refractive-index material field 15 in which the C3V is symmetrical, that is, the regular triangular column shape, is formed by arranging a triangular lattice shape on the flat plate material 1 to form a refractive index distribution. Although the shape of the convex portion may be provided on each side surface of the triangular prism as shown in FIG. 5 (the corner portions of the triangular cross section are cut into a concave shape, or the corner portions of the triangular prism are cut into a concave shape. The low refractive index material field 15 of the shape is formed by arranging a triangular lattice shape on the flat plate material 1 to form a refractive index distribution, or the cross sectional shape shown in FIG. 6 is a Y shape (fork shape). The refractive index material field 15 (a field of a low refractive index material having a shape of a convex portion at each corner portion of a triangular prism) is arranged in a triangular lattice shape on the flat plate material 1 and is formed into a refractive index distribution, or as shown in the figure. As shown in Fig. 7, the line arranged in the center is a three-column field in which the three triangular fields 45a, 45a, 45a are in the form of a unit of low refractive index material 45, and the refractive index distribution is formed by the arrangement thereof. . (Operation of Resonator) In the two-dimensional photonic crystal waveguide unit 1 of the previously described configuration, since the resonator region 16A is provided on the adjacent side of the column of the waveguide 22, once from the outside of the flat plate member to the resonator In the field I 6A, for example, from the upper side of the flat plate - 17- (14) 1292496 material 1 1 using a light source such as a laser illuminator to enter the TE-like mode or the light in the Τ Μ 11 ke mode, in the field of the resonator 1 6 The resonance of the light is excited in A, and the light that has been resonated in the resonator field 16 6 A can be taken out from the resonator field 16 6 A and utilized. At the time of this extraction, light can be guided from the resonator field 16A to the adjacent waveguide 22 side, and the light can be extracted along the waveguide 22, and the light irradiated upward from the resonance area 16 6 can be taken out and used. When the Φ resonance light is extracted from the light radiated from the resonance region 1 6 A to the outside, if the hole portion 17 is not present, the radiation pattern may be diverged to the upper side and the upper side, and it is difficult to access. By providing the hole portion 17, the radiation pattern can have a single peak and can be a good radiation pattern. Further, with this configuration, it is possible to prevent a decrease in Q値 when viewed as a resonator. The structure adopted in this case is a two-dimensional complete photonic crystal that can be propagated regardless of either TE-Iike mode or TM-like mode and can achieve almost no light in any mode. The complete photon energy gap of the light leakage prevents the Q値 from decreasing. φ Next, the shape of the low refractive index material shown in Figs. 5 to 7 is an example of C 3 v symmetry. In Fig. 5, the length of the L-shaped convex portion, the height of the lanthanum convex portion, and the minimum center distance or lattice constant in the a-low refractive index material periodic structure portion. In Fig. 6, the length of the L-shaped convex portion, the height of the lanthanide convex portion, and the minimum center distance or lattice constant in the a-low refractive index material periodic structure portion. In Fig. 7, the center-to-center distance of the L-based cylindrical region, r is the radius of the cylindrical region of 45 a, and the minimum center distance or lattice constant in the a-low refractive index periodic structure portion. -18- 1292496 (2) (Second Embodiment) Fig. 8 is a perspective view showing a schematic configuration of a resonator according to a second embodiment. The resonator of the second embodiment differs from the resonator of the first embodiment in that a two-dimensional photonic crystal waveguide 50 is provided. In detail, a two-dimensional photonic crystal plate including the two-dimensional photonic crystal waveguide 50 is provided. The shape and arrangement state of the low refractive index material field 65 formed on the constituent flat plate 11 of 50a are different, and the formation direction of the linear defect (waveguide) 22 is different, and the like. The specific structure of the two-dimensional photonic crystal plate 50a of this form is formed by arranging the low refractive index material fields 65 in a square lattice shape on the flat plate material 1 to form a refractive index distribution. In the present embodiment, a plurality of circular holes 64 are formed in the flat plate member. The circular hole 64 is formed at a position corresponding to a lattice point of the square lattice. Then, the air as the low refractive index material fills each of the plurality of circular holes 64 to form a cylindrical low refractive index material field 65 Φ , thereby forming a periodic arrangement of the photonic crystal. Also 'satisfied 〇 · 4 $ r / a < 0.5 0 (wherein, r is the radius length of the low refractive index material field ό 5, and a is the minimum center distance or lattice constant in the low refractive index material periodic structure portion), and is based on the above reasons. Ideal. Further, the ratio of the low refractive index material field 65 is 25% or more with respect to the volume of the two-dimensional photonic crystal plate of 1% by volume (except for the portion in which the linear defects 22 are formed). Even in the two-dimensional photonic crystal plate 5〇a, since the band gap bands of the τΕ_ -19- (16) 1292496 like mode and the TM-like mode rain mode can be made uniform, the light of the above two modes can be common. The common photon energy gap, and because the high-order plate mode does not occur, can prevent light from leaking into the in-plane direction of the flat material, and can achieve low loss. In the two-dimensional photonic crystal plate 5 Oa, the linear defects 22 disturbing the periodic arrangement of the upper photonic crystals are formed in the X direction, which causes the light to pass through and becomes a waveguide. Here, the "r - X · direction" is as shown in the present embodiment. When the low-refractive-index material field 65 having a circular shape is arranged in a square lattice shape, the arrows B 1 and B2 shown in FIG. 8 are used. Any of the directions indicated is Γ - X direction. Although the upper waveguide 22 is formed in the direction indicated by the arrow B1, it may be formed in the direction indicated by the arrow B2. Further, in Fig. 5, the direction indicated by the arrow C is the Γ-X direction (in other words, the Γ-M direction). Further, in the present embodiment, the above-described complex low refractive index material field 65 is arranged as shown in Fig. 8 in that the center of the waveguide 22 is asymmetrically left and right. Then, in the present embodiment, the low-refractive-index material field 65 is abbreviated from a position on the side of the column having the column of the linear defects (waveguides) 2 2 to form the isolated defect region 6 6 . On both end sides of the defect region 6-1, a non-penetrating hole portion 67 that does not penetrate the flat plate material 1 is formed. The depth of the holes 67 is not more than half the thickness of the flat plate 11, and is, for example, a depth of about a fraction; by the presence of the holes, the flat plate 11 is introduced into the thickness thereof. Symmetry, while forming the resonator field 6 6 A. -20- (17) 1292496 The two-dimensional photonic crystal waveguide 50 of the present embodiment is formed on the two-dimensional photonic crystal plate 50a, and the linear defects 22 which disturb the periodic arrangement of the photonic crystal are formed in the Γ-X In the direction, it is possible to prevent the loss of light in the in-plane direction of the flat material, and the light incident on the waveguide can be transmitted with low loss regardless of either the TE-like mode or the TM-like mode. . Further, when the low refractive index material region 65 is arranged on the flat plate 11 in a square lattice shape, a waveguide bent at right angles can be easily formed. In the present embodiment, the case where the low-refractive-index material field 65 is a columnar shape is described. However, it is a polygonal columnar shape, a quadrangular prism shape, a pentagonal columnar shape, a hexagonal columnar shape, or the like. A shape is fine. Further, in the first to second embodiments, the two-dimensional photonic crystal waveguide is formed by forming only one linear defect, but one or more linear defects may be provided. (Operation of Resonator) In the two-dimensional photonic crystal plate 50a of the previously described configuration, since the resonator region 66A is provided on the adjacent side of the row of the waveguide 22, once from the outside of the flat member 11 to the resonator field 66A, for example, when light is incident from a light source such as a laser illuminator from a top surface of the flat plate 1 1 in a TE-like mode or a TM-1 ike mode, resonance of the light is excited in the resonator field 66A, the resonator The light that has been resonated in the field 6 6 A can be taken out from the resonator field 66A and utilized. At the time of the extraction, light can be guided from the resonator collar -2, 18,292,496 domain 66A to the adjacent waveguide 22 side to derive light along the waveguide 22, or from the resonance field 6 6 A The light irradiated upward is taken out and utilized. When the resonance light is extracted from the light radiated from the resonance region 66A to the outside, if the hole portion 6 is not present, the radiation pattern may be diverged to the upper side and the upper side, and it is difficult to access, but by setting The hole portion 67 allows the radiation pattern to have a single peak and can be a good radiation pattern. Further, with this configuration, it is possible to prevent the decrease of Q値 when viewed as a resonator. The structure adopted in this case is a two-dimensional complete photonic crystal that can be propagated regardless of either TE-like mode or TM-like mode, and can realize almost no light in any mode. The complete photon energy gap of the light leakage prevents the Q値 from decreasing. (Third Embodiment) Fig. 9 is a perspective view showing a schematic configuration of a resonator according to a third embodiment. The resonator of the second embodiment differs from the resonators of the first and second embodiments in the shape and arrangement state of the low refractive index material field 75 formed on the flat plate material 1 1 constituting the two-dimensional photonic crystal flat plate 70a. The difference is different, and the direction in which the linear defects (waveguides) 7 2 are formed is different. The size and spacing of the material of the flat sheet 11 or the field of the low refractive index material, and the width or direction of the waveguide 2 are the same as in the previous embodiment. The specific structure of the two-dimensional photonic crystal plate 7 〇 a of this form is formed by arranging the low refractive index material regions 75 in a triangular lattice shape on the flat plate material 1 to form a refractive index distribution. In the present embodiment, a composite hole 74 of a plurality of through-types -22-(19) 1292496 is formed on the flat plate member 1 as a low refractive material field 75. The composite hole 74 is formed at a position on the upper surface of the flat plate corresponding to the lattice point of the triangular lattice. Then, the air as the low refractive index material fills each of the plurality of composite holes 74 to form a cylindrical low refractive index material field 75 in plurality, thereby forming a periodic arrangement of the photonic crystal. The shape of the composite hole 74 in this form is as shown in Fig. 9, and the three circles 75a, 75b, and 75c are centered on the respective radii a, b, and c, and are shifted by φ 6 in the circumferential direction. The shape of the composite contour is 0 degrees, and the radius a, b, and c of each circle are three symmetry axes. Therefore, it can be regarded as one example of C3V symmetry. Even in the structure of the third embodiment, the linear defect which disturbs the periodic arrangement of the photonic crystal is introduced in a state in which one of the composite holes 74 is skipped, and the linear defect portion is regarded as the waveguide 72, and The shape adjacent to the waveguide 72 is slightly separated from the two composite holes 74 at a position away from one column to introduce a short-line isolated defect region 76 which disturbs the periodic arrangement of the photonic crystals. • In the defect field 76, a composite should be formed. At the position of the hole 74, recessed portions 77 and 77 having a circular shape in plan view are formed, and the resonator region 76A is formed. The hole portions 76 are formed on the flat plate material 1 by the same depth and the same depth as the hole portion 17 of the previous embodiment, and the short-line defect portion formed by the hole portion 76 becomes Resonator field 76A. The composite hole 74 formed on the flat plate material 1 of this form is an inner air layer of the stomach, and exhibits the same effect as that of the low refractive index material 15 of the previous embodiment. -23-(20) 1292496 That is, the decrease in Q値 can be prevented by the structure 'as viewed as a resonator' in the present embodiment. The structure adopted in this case can realize a 2-dimensional complete photonic crystal that can be propagated regardless of either the TE-like mode or the TM-like mode, and can realize almost no light in any mode. The complete photon energy gap of the light leakage prevents the Q値 from decreasing. Further, in the present embodiment, the case where the field of the low refractive index material is a triangular prism, a columnar shape, or a composite columnar shape thereof is described, but it is a polygonal column such as a quadrangular prism, a pentagonal column, or a hexagonal column. Any shape or elliptical column shape is acceptable. Further, in the first to third embodiments, the two-dimensional photonic crystal waveguide is formed by forming only one linear defect, but one or more linear defects may be provided. Further, in the above-described embodiment, the low refractive index material field 15 in which the C3V is symmetrical, that is, the regular triangular column shape, is arranged in a triangular lattice shape on the flat plate material 1 to form a refractive index distribution. Explanation®' However, the shape of the convex portion may be provided on each side surface of the triangular prism as shown in FIG. 22 (the corner portions of the triangular cross section are cut into a concave shape, or the corner portions of the triangular prism are cut into a concave shape. Shape) low refractive index material field! 5 is a low-refractive-index material field in which a refractive index distribution is formed in a triangular lattice shape on the flat plate material 1 or a Y-shaped (fork-shaped) cross-sectional shape as shown in FIG. In the low refractive index material region in which the corner portions are provided with convex portions, the refractive index distribution is arranged on the flat plate 11 in a triangular lattice shape, or as shown in FIG. The three columnar domains 45a, 45a, -24-(21) 1292496 45a which are equilateral triangles are in the form of a unit of low refractive index material 45, and are arranged to form a refractive index profile. The shapes of the low refractive index material shown in Fig. 2 2 to Fig. 25 are all C3V symmetrical. In Fig. 22, the length of the L-shaped convex portion, the height of the lanthanum convex portion, and the minimum center distance or lattice constant in the low refractive index material periodic structure portion. In Fig. 23, the length of the L-shaped convex portion, the height of the lanthanum convex portion, and the minimum center distance or the lattice constant number in the a-low refractive index material periodic structure portion. In Fig. 24, the center-to-center distance of the L-based cylindrical region, the radius of the r-type cylindrical region of 45 a, and the minimum central distance or lattice constant of the a-low refractive index periodic structure portion. [Examples] (Experimental Example 1) An angle of inclination 0 to a group of parallel turns 除了 of a plurality of triangular columnar low refractive index material fields 15 formed on the flat plate material 1 was produced at -3 〇•degrees to +30 The other two-dimensional photonic crystal plates are the same as those shown in FIGS. 1 to 3 except for the change in the range. In addition, the two-dimensional photonic crystal plate fabricated here has the conditions of ^=〇.46, 1^/3=〇.85, '^ = 0.80 ° to the various 2-dimensional photonic crystal plates produced, and is incident from the outside. = 1 · 5 5 // m light, investigate the dependence of the energy gap on the tilt angle of the low refractive index material. The result is not as shown in Figure 1. In addition, FIG. 11A illustrates the arrangement state of the triangular columnar low refractive index material field when the inclination angle 0 is 30 degrees Η 1 1 B is not a tilt angle 0 is a triangular column low fold at 5 degrees -25 - (22) 1292496 Alignment state in the field of radiance material, Fig. 1 1 C shows the arrangement state of the triangular columnar low refractive index material in the case where the inclination angle Θ is 〇. In the graph of Fig. 10, the horizontal axis represents the inclination angle 0, and the vertical axis represents the ratio of the energy gap frequency width Δ ω g to the center of the energy gap frequency 値 ω g . It can be seen from the results shown in Fig. 10 that the triangular columnar low refractive index material field is when the tilt angle 0 to a group of parallel turns is _ 3 〇 and + 3 〇, Δwg/og is 〇, photon energy The gap does not appear. When _30 degrees <Θ When there is a range of < ® + 30 degrees, there will be a photonic energy gap. In particular, when the tilt angle is 0 degrees, Δ ω g / ω g exhibits a maximum 値, indicating that the frequency width of the photon energy gap is very large. wide. (Experimental Example 2) A comparison was made between the thickness t of the flat material 1 1 and the ratio (opening ratio) of the triangular columnar low refractive index material field 15 . ~ Figure 3 shows the same variety of 2D photonic crystal plates. In addition, the 2-dimensional photonic crystal plate fabricated here is conditionally Δ = 0.46. The dependence of the two-dimensional full photonic energy gap (two-dimensional full PBG) on the thickness of the flat sheet when the TE_like mode and the TM-like mode light were incident on the various two-dimensional photonic crystal plates produced was investigated. The results are shown in Fig. 12 to Fig. 17. Further, t/a 値 and t/ λ 〇値 of the two-dimensional photonic crystal plate fabricated in Figs. 12 to 17 are also illustrated. In the graphs of Fig. 1 2 to Fig. 17, the horizontal axis is the triangular columnar shape of the air, and the vertical axis is the normalized frequency. In the graphs of Fig. 1 2 to Fig. 1 7 , the area surrounded by the dotted line represents the relationship between the aperture ratio and the energy gap in the TM-1 ike mode -26- 1292496 (23), and the field surrounded by the solid line represents TE- The relationship between the aperture ratio and the energy gap in the like mode. Also, Figure 〖2~ Figure! In the graph of 7, the area surrounded by the dotted line and the area surrounded by the solid line (the area indicated by the slanted line) represent photons common to the two modes of TM-like mode and TE-like mode. Energy gap. The case of t/a = 0·60 shown in Fig. 12 and the case of t/a = 图 in Fig. ' are the aperture ratios in the field of low refractive index materials, which are connected to TE-like # mode and TM-like mode. The two modes of light do not have a common photon energy gap 〇 relative to this, Figure 13 3 to Figure 16 t / a = 0 · 6 5~1 · 5 0 in the case of 'TM-like mode and TE The two modes of the -like mode have a common photon energy gap, and it is known that there is a two-dimensional full photon energy gap. The so-called 2-dimensional full photon energy gap refers to a common photon energy gap for two modes of TE-like mode and TM-like mode. The case of t/a = 0.80 in Fig. 14 indicates that the two-dimensional full photon energy gap # has a wide frequency. (Experimental Example 3) Various two-dimensional photonic crystal plates which were the same as those shown in Figs. 1 to 3 except that the thickness t of the flat material 11 and the L/a were changed were prepared. This is done by changing a値 so that I 〇 = 1 5 5 Onm will become the wavelength of the energy gap center and change L/a. Light of λ 〇 =1 5 5 0 m was incident on the various two-dimensional photonic crystal plates produced from the outside, and the relationship between the thickness t of the flat material 1 1 and the full energy gap -27-(24) 1292496 was investigated. As described so far, 'replace the flat material in the field of the low refractive index material formed from FIG. 1 to the triangular column shape, and change the tool: the composite photonic crystal plate of the composite hole is not provided to provide conformality for the experiment. . Prepare a composite hole having a shape of a composite hole having the shape shown in FIG. 9 and having a radius of 0 · 2 4 // m for one composite circle, and a composite hole having a shape of 60 degrees. , a plate made of most angular lattice positions. The composite composite of the flat material is skipped by two or more than the composite hole of the position of the composite hole which is vacant, three columns or more from the waveguide. 1 or 3; can also be; Replace 2 composite holes to form a depth of 0 · 3 μ m or less, radius 0. Non-Binton hole, the part with the hole is formed as a resonator with Figure 9 The optical components of the waveguide and resonator shown. Again, the ts 丨ab/a = 0 · 9.5, L/a = 0 · 2, r/a = 0 · 3 8. The optical components of this configuration ω a/2Tcc値 is determined for the omnidirectional direction, and the result shown in Fig. 18 is obtained. 'In addition to confirming the existence of the common photonic energy gap of the TE mode, it is also confirmed that the common photon energy gap of the TE and TM-like modes is as shown in the figure. There is resonance in it and it is confirmed that it can function while having a 2-dimensional full photon energy gap. Using a flat material with such a 2-dimensional full photon energy gap, the thickness of the material and the depth of the hole (dressing depth) The ratio of the block and the barrier shown by Q ϋ 3 Figure 9 The radii of the plate are formed in three holes, one column ( 2 columns parallel to the wave $ or more), 1 9 // m is made into an optical component to measure the TM-like 1 9 mode, and the plate I is obtained as a resonance (will be trimmed -28- 1292496 ( 25) The relationship between the relative 値) which is normalized when the depth is ,, the result is shown in Fig. 20 〇, and TE-like is formed only for the round-shaped hole at the triangular lattice position on the flat material equivalent to the above example. A flat plate material having a photon energy gap is used as a test equivalent to the above-described example. In the structure of the second embodiment, the formation position of the low refractive index material region is a triangular lattice position, and other basic elements are used. The structure is based on the structure of the second embodiment. As is apparent from the results shown in Fig. 20, in the sample having no two-dimensional full photon gap, the depth is increased by forming the hole portion, and the Q値 is greatly increased. The tendency to decrease. This means that if a hole is formed in a photonic crystal having a photon energy gap only for the TE-like mode but not having a photonic energy gap in the TM-like mode, the resonator is formed. Leakage in the plane causes Q値 to drop. Figure 2 The 1 series illustrates a single point defect (resonator field) of a photonic crystal plate having a two-dimensional • complete photon energy gap corresponding to two modes, and a photonic crystal plate having only a photon energy gap corresponding to one mode. The measurement result of the radiation pattern when the light is emitted after the resonance. Fig. 2 1 shows the diffusion of the radiation pattern by considering the radial angle based on the point defect (resonator field) at the center of the flat material 2 2 The position of the receiver angle at the time of the figure. Fig. 2 1 B shows the measurement results of the photoreceptor of each angle of the photonic crystal plate having only one photon energy gap, and Fig. 2 1 C shows Corresponding to the two-mode full-photon energy gap photonic crystal plate -29 - (26) 1292496 for each angle of the photoreceptor. It can be seen from the test results shown in Fig. 2 1 B and Fig. 2 1 C that a photonic crystal plate having a photon energy gap corresponding to only one " mode has its radiation pattern split into three, which is obviously in the oblique direction. There is also radiation on it. In contrast, a photonic crystal plate having a two-dimensional full photon energy gap corresponding to two modes has a radiation pattern concentrated in one mountain to obtain a unimodal radiation pattern. Next, various two-dimensional photonic crystal plates which are the same as those shown in Figs. 1 to 3 ® except for the change of L/a were produced. Here, by changing a 値 so that I 〇 = 1 5 5 Onm will become the center wavelength of the energy gap, and change a値, L値 to change L/a. Figure 25 is a diagram showing that when L/a = 0.85, Δ = 0.15 &, f = 〇.36 (f is the ratio of the low refractive index material in the entire two-dimensional photonic crystal plate), that is, the experiment In the example, the arrangement state of the triangular columnar low refractive index material in the case of the aperture ratio). Fig. 26 is a view showing the arrangement state of the triangular columnar low refractive index material in the case of L/a = 1, Δ = 〇 & The light of 〇 =1 5 5 Οηηι was incident from the outside on the various 2-dimensional photonic crystal plates produced, and the two-dimensional full energy gap width was investigated. The results are shown in Fig. 25 to Fig. 26. In Fig. 25 to Fig. 26, the wavelength bandwidth (unit: nm) of the photon energy gap of ΔTM is TM-like mode, and Δ λ TE is the wavelength bandwidth (unit: nm) of the photon energy gap of the TE-like mode. From the results shown in Fig. 25 to Fig. 26, the wavelength bandwidth Δ λ of the common photon energy gap of TE and TM-hke mode at L/a = 〇·85 is 59 nm, but -30 - 1292496 (27) L/a The two-dimensional full energy gap is wider at =1. In addition to designing the shape of the low refractive index material to have the shape of a convex portion on each side surface of each of the rectangular columns (the corners of the triangular prism are cut into a concave shape), and changing L/a, fabrication and prior experimental examples The same variety of 2-dimensional photonic crystal plates. Here, by changing a値 so that λ 〇 = 1 5 5 Onm becomes the center wavelength of the energy gap, a 値 and L 变更 are changed to change the L of L/a. Fig. 27 is L/a = 0.6, M = 〇.la (the length of the L-shaped convex portion, the height of the lanthanum convex portion, and the minimum center distance in the a-type low refractive index material periodic structure portion). f = 0.39 The arrangement state of the low refractive index material field. Fig. 28 is a view showing the arrangement state of the low refractive index material field when L/a = 0.7, M = 0.1a, and f = 0.49. Fig. 29 is a diagram showing the arrangement state of the low refractive index material field when L/a = 0·8, Μ = 0.1 a, and f = 0.6. The two-dimensional full energy gap width was investigated by injecting light of λ 〇 ® = 1 5 5 Onm from various external two-dimensional photonic crystal plates. The results are shown in Fig. 27 to Fig. 29. From the results shown in Figs. 27 to 29, when the shape of the low refractive index material is designed such that the corner portions of the triangular prism are cut into a concave shape, The wavelength bandwidth Δ of the common photon energy gap of L / a = 0 · 6 · 1 ike mode is 53 nm, and the Δ of L/a = 0.7 is 116 nm, but L/a = 0·8 The Δ is 225 nm, and the two-dimensional full energy gap is wider when L/a = 0.8. In addition to the shape of the low-refractive-index material, the shape of the cross-section -31 - (28) 1292496 is γ-shaped (fork-shaped) (the convex portion is provided at each corner of the triangular prism) and the change of L/a A variety of 2-dimensional photonic crystal plates were prepared as in the previous experimental examples. Here, by changing a値 so that λ 〇 = 1 5 5 0nm will become the center wavelength of the energy gap, a 値, L 变更 will be changed to change the L/a. Fig. 30 is a view showing the arrangement state of the low refractive index material field when L/a = 0.3, M = 〇.3a, ^ = 0.1568 1 f = 0.39. Fig. 31 is a diagram showing the arrangement state of the low refractive index material field when L/a = 0.34, M = 0.34a, Δ = 0. 0 〇 63 • and f = 0.46. Fig. 32 is a view showing the arrangement state of the low refractive index material field when L/a = 0_366, M = 0.366a, Δ = 0a, and f = 0.53. The two-dimensional full energy gap width was investigated by injecting light of λ 〇 =1 5 5 Onm from the outside of the various two-dimensional photonic crystal plates produced. The results are shown in Fig. 30 to Fig. 32. From the results shown in Fig. 30 to Fig. 3, it is understood that L/a is formed when the shape of the low refractive index material is designed such that the cross sectional shape is a Y shape. = # 0.3 When TE, TM-like mode common photon energy gap wavelength bandwidth Δ is 50nm, L/a=0.366 △ λ is 89nm, but L/a=0.34 △ A is 136nm, L/ When a = 0.34, the two-dimensional full energy gap is wider. The production is the same as in the previous experimental example except that the three columnar regions in which the center line is arranged in an equilateral triangle are arranged in a triangular lattice shape in a triangular lattice shape to form a refractive index distribution, and the L/a is changed. A variety of 2-dimensional photonic crystal plates. Here, by changing a値 so that 〇 = 1 5 5 Onm will become the center wavelength of the energy gap, change a値, L値 to change L/a. -32- 1292496 (29) Figure 33 is a diagram showing L/a = 0.425, r = L/2 (the distance between the centers of the L-column field, the radius of the cylindrical field of r), △ = 0 · 1 5 a, f = 〇. 4 9 o'clock in the field of low refractive index materials. Fig. 34 is a diagram showing the arrangement state of the low refractive index material field when L/a = 0.45, r = L/2, A^O-la, and f = 0.55. Fig. 35 is a diagram showing the arrangement state of the low refractive index material field when L/a = 0.5, r = L/2, Δ = 0 & and f = 0.68. φ Into the various 2D photonic crystal plates produced, the light of λ 0 2 15 5 Onm was incident from the outside, and the two-dimensional full energy gap width was investigated. The results are shown in Fig. 3 3 to Fig. 3 〇 From the results shown in Fig. 3 3 to Fig. 5, it can be seen that the central line is a low refractive index in the shape of a unit of three cylindrical fields arranged in an equilateral triangle. When the rate material field is arranged in a triangular lattice shape to form a refractive index distribution, the wavelength bandwidth Δ of the common photon energy gap of the D, a, and 4-1 丨1^ modes at L/a = 0·5 is not, L/ The Δ at a=0.425 is 140 nm, but the Δλ at L/a 0.45 is 202 nm, and the two-dimensional full energy gap is wide when L/a=0.45. [Industrial Applicability] The optical element having the two-dimensional photonic crystal waveguide of the present invention can be suitably applied to a plugging element such as a photo-plugging photo-component (photo-plugging multiplexer). BRIEF DESCRIPTION OF THE DRAWINGS [Fig. 1] A perspective view of a resonator of the waveguide of the first embodiment, -33-(30) 1292496. Fig. 2 is a schematic plan view of a two-dimensional photonic crystal waveguide provided in the resonator of Fig. 1. [Fig. 3] An enlarged plan view of a field of a plurality of low refractive index materials having a two-dimensional photonic crystal plate provided in the two-dimensional photonic crystal waveguide of Fig. 2 (Fig. 4) a flat plate with a reinforcing layer which can be used in the present invention The cutaway view. Fig. 5 is an enlarged plan view showing another example of the C3 v-symmetric low refractive index material in which a two-dimensional photonic crystal plate is formed in the two-dimensional photonic crystal waveguide of Fig. 2; Fig. 6 is an enlarged plan view showing another example of the field of C3 v symmetrical low refractive index material in which a two-dimensional photonic crystal plate is formed in the two-dimensional photonic crystal waveguide of Fig. 2; Fig. 7 is an enlarged plan view showing another example of the field of C3V symmetrical low refractive index material in which a two-dimensional photonic crystal plate is formed in the two-dimensional photonic crystal waveguide of Fig. 2. Fig. 8 is a perspective view showing a schematic configuration of a wavelength demultiplexer of a second embodiment. Fig. 9 is a perspective view showing a schematic configuration of a wavelength demultiplexer of a third embodiment. [Fig. 1 〇] A graph showing the dependence of the energy gap on the tilt angle of the low refractive index material field. [Fig. 1 1] · Fig. 1 1 A system can not show the low refractive index material at 0 = 30 degrees - 34 - 1292496 (31) The arrangement state of the material field, Fig. 1 1 B shows the 0 = 1 5 degrees The arrangement state of the low refractive index material field in the case of Fig. 1 C shows the arrangement state of the low refractive index material field when 0 = 〇. [Fig. 1 2] A graph showing the relationship between the two-dimensional full PBG width and the aperture ratio at t/a = 0.60. Fig. 13 is a graph showing the relationship between the two-dimensional full PBG width and the aperture ratio at t/a = 0.65. ί [Fig. 14] A graph of the relationship between the 2-dimensional full PBG width and the aperture ratio at t/a = 0.80. Fig. 15 is a graph showing the relationship between the two-dimensional full PBG width and the aperture ratio at t/a = 0.90. Fig. 16 is a graph showing the relationship between the two-dimensional full PBG width and the aperture ratio at t/a = 1 · 50. [Fig. 17] A relationship between the 2-dimensional full PBG width and the aperture ratio at t/a = 〇〇. B [Fig. 18] Measurement of the 2-dimensional full photon energy gap of the optical element of the embodiment. Fig. 19 is a graph showing the measurement results of the resonator mode generation of the two-dimensional full photon energy gap of the optical element of the embodiment. Fig. 20 is a view showing changes in Q値 of the optical element of the embodiment. Fig. 21 is a diagram showing the radiation pattern of the optical element of the embodiment. Fig. 2 1A is a measurement angle distribution diagram, and 6|21B is a radiation pattern of the comparative example / η 〇 /, , . ' [ Fig. 22 ] Fig. 2 is an enlarged plan view showing another example of the field of c3V symmetrical low refractive index material in which a -35-(32) 1292496 two-dimensional photonic crystal plate is formed in the two-dimensional photonic crystal waveguide. Fig. 23 is an enlarged plan view showing another example of the field of C3V symmetrical low refractive index material formed with a two-dimensional photonic crystal plate provided in the two-dimensional photonic crystal waveguide of Fig. 2. Fig. 24 is an enlarged plan view showing another example of the C3 v-symmetric low refractive index material in which a two-dimensional photonic crystal plate is formed in the two-dimensional photonic crystal waveguide of Fig. 2. [Fig. 25] The arrangement state of the low refractive index material field at L / a = 〇 · 8 5 degrees, and the investigation results of △ λ TM , △ and ΤΕ. [Fig. 26] The arrangement state of the triangular columnar low refractive index material at L / a = 1 degree, and the investigation results of Δ λ TM and Δ λ 。. [Fig. 27] The arrangement state of the low refractive index material field at L / a = 〇 · 6 degrees, and the investigation results of Δ λ TM , △ and TE. [Fig. 2 8] L / a - 〇 · Arrangement of the low refractive index material field at 7 degrees #, and the results of △ λ TM , △ λ ΤΕ. [Fig. 29] The arrangement state of the low refractive index material field at L/a = 〇·8 degrees, and the investigation results of Δ λ ΤΜ and Δ λ 。. [Fig. 30] The arrangement state of the low refractive index material field at L/a = 〇·3 degrees, and the investigation results of Α λ TM and Δ λ 。. [Fig. 31] The arrangement state of the low refractive index material field at L/a = 0.34 degrees, and the investigation results of Δ λ ΤΜ and Δ λ 。. [Fig. 32] The arrangement state of the low refractive index material field at L/a = 0_3 66 degrees, and the investigation results of Δ A TM and Δ λ 。. -36- (33) 1292496
、△ λ TE的調查結果。 〔圖 33〕L/a, △ λ TE survey results. [Fig. 33] L/a
狀態，和△ λ TM 〔圖 34〕L/a =State, and △ λ TM [Fig. 34] L/a =
、△ λ ΤΕ的調查結果。, △ λ ΤΕ survey results.
狀態’和△ λ TMState ' and △ λ TM
〔圖 35〕L/a = 態’和△ λ TM 、△ λ TE的調查結果。 〔圖36〕先前之2維光子晶體波導的槪略斜視 【主要元件符號說明】 10、10Α、50…光子晶體波導、10a5 10b，5〇a〜2維光 子晶體平板、1 1…平板材、1 1 a…補強層、1 4 ·.·三角孔、 15、25、35、45、65…空氣（低折射率材料領域）、μ···孤 立缺陷領域、1 6 A…共振器領域、1 7 ···孔部、22 ···線狀缺 陷（波導）、66…孤立缺陷領域、66A…共振器領域、67… 孔部、7 6…孤立缺陷領域、7 6 A…共振器領域、7 7 .··孔部 _ 、間距、L…長度、Μ…平行線、r···低折射率材料領域 的半徑、t…平板材的厚度。 -37-[Fig. 35] Results of investigations of L/a = state 'and Δ λ TM and Δ λ TE. [Fig. 36] Slight squint of the previous two-dimensional photonic crystal waveguide [Description of main components] 10, 10 Α, 50... photonic crystal waveguide, 10a5 10b, 5〇a~2 dimensional photonic crystal plate, 1 1 ... flat material, 1 1 a... reinforcing layer, 1 4 ···triangular hole, 15, 25, 35, 45, 65...air (low refractive index material field), μ···isolated defect field, 16 A...resonator field, 1 7 ··· hole part, 22 ··· linear defect (waveguide), 66...isolated defect area, 66A...resonator field,67... hole part, 7 6...isolated defect area, 7 6 A...resonator field 7 7 . . . hole part _, pitch, L... length, Μ...parallel line, r··· radius of the low refractive index material field, t...thickness of the flat material. -37-