TWI292028B - Heat pipe and method for making same - Google Patents

Heat pipe and method for making same Download PDF

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Publication number
TWI292028B
TWI292028B TW94100484A TW94100484A TWI292028B TW I292028 B TWI292028 B TW I292028B TW 94100484 A TW94100484 A TW 94100484A TW 94100484 A TW94100484 A TW 94100484A TW I292028 B TWI292028 B TW I292028B
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Taiwan
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heat pipe
nano
wall
heat
wick
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TW94100484A
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Chinese (zh)
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TW200624752A (en
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Ga-Lane Chen
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Hon Hai Prec Ind Co Ltd
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1292028 九、發明說明: 【發明所屬之技術領域】 本發明係關於一種散熱系統,特別涉及一種採用奈米級材料製作之熱 管及其製造方法。 【先前技術】 • 目如,各種機為運行速度不斷提昇,相應地對散熱也要求越來越嚴苛。 • 如汽車發動機之散熱,一般採用循環管式散熱器或列管式熱交換器兩種形 • 式,均通過冷媒與水之循環流動,不斷帶走内燃機產生的熱量,使其溫度 下降。外部還附加風扇,加速降低内燃機的溫度,而管材可採用鋁或銅等 材料來提高管殼熱傳導性能。這種汽車散熱或冷卻系統結構複雜且散熱效 率低,難以滿足汽車内燃機快速散熱之需求。 為使汽車產生的熱量及時迅速地散發出去,有採用封閉型相變熱管, 如1991年8月27日公告之美國第5,042,567號專利揭示一種用於汽車之空調 機,該空調機採用多個熱管以迅速傳遞熱量。請參閱第一圖,熱管兌包括 • 一密閉官狀容器58a,以及一網狀吸液芯58b,其藉由毛細作用,攜帶迴流 • 之工作流體。容器5如内密封有適量工作流體(如水),熱管58工作時,容器 58a内充滿液態工作流體及其飽和蒸氣。當熱量作用於吸熱端時,該端工 作流體蒸發,由於吸熱端58c與散熱端58d間存在壓力差,使得工作流體蒸 氣以高速流至散熱端58d,並在該端管内壁冷凝,由此釋放出先前蒸發之潛 在…、里口而熱里以工作流體為載體,通過其蒸發、流動、冷凝過程, 使存於工作流體内之潛熱由吸熱端58c傳輸至散熱端58d。與傳統固體之間 傳熱過程不同在於,該氣態工作流體流動日夺能傳輸更大熱流。於散熱端测 1292028 冷凝後之工作流體藉由毛細作用迴流至吸熱端58c,通過這種工作流體之蒸 發及冷凝不斷重複,在此密閉熱管58内形成循環流動,使熱量·不斷向外傳 輸。然而,該熱管採用普通工作流體(水),熱管結構也未見改進,並不能適 應汽車快速散熱之需求。 目前,熱管技術被大量應用於電子元件之散熱,以適應電子元件之高 頻、高速以及積體電路之密集及微型化所帶來的發熱量劇增之變化,促進 熱管技術之發展與研究,特別表現為將奈米材料應用於熱管之吸液芯或工 作流體上。如2002年11月27日公告之中國大陸第02205487.1號專利揭示一種 T奈米芯體之微型熱管,其結構與傳統熱管結構相同。該微型熱管包括熱 面基底、微孔管道、奈米芯體、工作流體及封裝片,奈米芯體由奈米管材 或奈米多孔材料製作,固著於微孔管道内壁面上,熱面基底及封裝片分別 封裝於微孔管道兩端,工作流體封裝於奈米芯體内腔中及微孔管道内孔道 或奈米芯體孔隙中。 2004年11月17日公告之中國大陸第200320117731.1號專利揭示一種熱 管,其包括管殼、毛細吸液芯以及密封在管殼内的適量工作流體。其中毛 細吸液芯緊貼于管殼内壁,包含一奈米碳管層;工作流體包括一種液體以 及懸浮在液體中的具有高導熱性的奈米級顆粒,該奈米級顆粒包括奈米碳 球或高導熱性金屬粉體,其中奈米碳球内部可填充有高導熱性金屬以進一 步提尚工作流體的導熱性能。由於奈米碳管具有疏水性,冷凝後之工作流 體凝結於奈米礙管層表面,不易滲透進入奈米碳管層内,使其毛細作用難 以發揮作用。同時,部分迴流之液態工作流體停留碳管層表面,易與工作 1292028 . 流纖蝴w _切雜力,進―㈣觸傳熱致率。 =鑑於此,勵吸咖—步力顺梅飾,峨—種有利於吸 液心表面與迴_纖⑽觸、帥㈣㈣编熱管實為 【發明内容】1292028 IX. Description of the Invention: [Technical Field] The present invention relates to a heat dissipation system, and more particularly to a heat pipe made of a nano-scale material and a method of manufacturing the same. [Prior Art] • For example, various machines are running at an increasing speed, and correspondingly, heat dissipation is becoming more and more demanding. • For the heat dissipation of automobile engines, circulating tube radiators or tube-and-tube heat exchangers are generally used. They all flow through the circulation of refrigerant and water, and constantly take away the heat generated by the internal combustion engine to lower the temperature. A fan is additionally attached to the outside to accelerate the temperature reduction of the internal combustion engine, and the pipe can be made of aluminum or copper to improve the heat conduction performance of the casing. Such a vehicle heat dissipation or cooling system has a complicated structure and low heat dissipation efficiency, and it is difficult to meet the demand for rapid heat dissipation of an automobile internal combustion engine. In order to dissipate the heat generated by the vehicle in a timely and rapid manner, there is a closed phase change heat pipe, such as the US Patent No. 5,042,567, issued on Aug. 27, 1991, which discloses an air conditioner for a car, which uses a plurality of heat pipes. To transfer heat quickly. Referring to the first figure, the heat pipe includes: a closed official container 58a, and a mesh wick 58b which carries the recirculating working fluid by capillary action. The container 5 is internally sealed with an appropriate amount of working fluid (e.g., water). When the heat pipe 58 is in operation, the container 58a is filled with a liquid working fluid and its saturated vapor. When heat acts on the endothermic end, the working fluid at the end evaporates. Due to the pressure difference between the endothermic end 58c and the heat dissipating end 58d, the working fluid vapor flows to the heat dissipating end 58d at a high speed, and condenses on the inner wall of the end tube, thereby releasing The latent heat of the previous evaporation, the heat and the working fluid as the carrier, through the evaporation, flow, condensation process, the latent heat stored in the working fluid is transferred from the heat absorption end 58c to the heat dissipation end 58d. The heat transfer process differs from conventional solids in that the gaseous working fluid flows to transfer more heat. At the end of the heat dissipation 1292028, the condensed working fluid is returned to the endothermic end 58c by capillary action, and the evaporation and condensation of the working fluid are repeated repeatedly, and a circulating flow is formed in the sealed heat pipe 58 to continuously transfer heat. However, the heat pipe uses a common working fluid (water), and the heat pipe structure has not been improved, and it cannot meet the demand for rapid heat dissipation of the automobile. At present, heat pipe technology is widely used in the heat dissipation of electronic components to adapt to the high frequency, high speed of electronic components, and the intensification of miniaturization caused by the intensification and miniaturization of integrated circuits, and promote the development and research of heat pipe technology. In particular, the nano material is applied to the wick or working fluid of the heat pipe. For example, the Chinese Patent No. 02205487.1, published on November 27, 2002, discloses a micro heat pipe of a T nano core having the same structure as a conventional heat pipe. The micro heat pipe comprises a hot surface substrate, a microporous pipe, a nano core, a working fluid and a package sheet, and the nano core is made of a nano tube or a nano porous material, and is fixed on the inner wall surface of the microporous pipe, the hot surface substrate The encapsulating sheets are respectively packaged at the two ends of the microporous tube, and the working fluid is encapsulated in the inner cavity of the nano core and the inner hole of the microporous tube or the pore of the nano core. The Chinese Patent No. 200320117731.1, issued on Nov. 17, 2004, discloses a heat pipe comprising a tube casing, a capillary wick, and an appropriate amount of working fluid sealed within the envelope. The capillary wick is closely attached to the inner wall of the envelope and comprises a carbon nanotube layer; the working fluid comprises a liquid and a nano-particle having high thermal conductivity suspended in the liquid, the nano-particle comprising nano carbon Ball or high thermal conductivity metal powder, wherein the inner surface of the nano carbon sphere can be filled with a highly thermally conductive metal to further enhance the thermal conductivity of the working fluid. Since the carbon nanotubes are hydrophobic, the condensed working fluid condenses on the surface of the nano-tube layer and is not easily penetrated into the carbon nanotube layer, making it difficult for the capillary action to function. At the same time, part of the reflowed liquid working fluid stays on the surface of the carbon tube layer, which is easy to work with 1292028. The flow of the fiber is _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ = In view of this, the scented coffee - step Lishun plum decoration, 峨 - kind is conducive to the liquid surface and back _ fiber (10) touch, handsome (four) (four) heat pipe is actually [invention content]

為克服先前技術中熱管吸液芯表面與迴流液體間之介面接觸性能不 足、工作缝嫩⑽_,綱之咐娜_财利於吸液 芯表面與迴流液_之介面接觸、具有低迴流阻力之高效熱管。 本發明之第二目的在於提供上述熱管之製造方法。 *為實現上述第-個目的,本發明提供一種熱管,包括一兩端密封之中 空管殼;形成於管殼内壁週面之吸液芯,其表面形成有親水性塗層,·以及 充滿吸液芯並密封於管殼内之工作流體。 其中,所述親水性塗層包括奈米Ti〇2、奈紅n〇、奈米ΜΑ或其混合 物,其厚度範圍為10奈米〜2〇〇奈米,優選為2〇奈米〜5〇奈米。 而且,本發明進一步於所述管殼外壁週面形成導熱性塗層,包括奈米 碳管、奈米銅、奈米鋁或奈米銅鋁合金薄膜,厚度範圍為1〇奈米〜5〇〇奈米, 優選為20奈米〜200奈米。 所述吸液芯包括奈米碳球及碳纖維,其厚度範圍為〇1毫米〜〇·5毫米, 優選為0·2毫米〜0.3毫米。 所述工作流體包括一種液體及添加其中之奈米碳管、奈米碳球、奈米 鋼粉或其混合物,液體包括純水、氨水、甲醇、丙酮、庚烷或其混合液體, 奈米材料在工作流體中所佔質量百分比為0.5〜2%。 Ϊ292028 本發明還進一步於所述管殼内壁週面及外壁週面分別預先經過雷射毛 化處理,可獲得表面粗縫度Rp_v範圍為〇.1,〜1〇阿,優選為〇·2μΓη〜丨帅;處 理後所形成之表面微坑寬度範圍為l|^m〜2〇pm,優選為2μπι〜5μιη。 所述管殼材質選自銅、鋁、鋼、碳鋼、不銹鋼、鐵、鎳、鈦或其合金 等。 為實現上述第二個目的,本發明提供一種熱管製造方法,包括下列步 驟: i 提供一中空管; 於中空管内壁週面形成吸液芯,並於吸液芯表面形成親水性塗層;及 將適量工作流體真空封閉於中空管内。 其中,所述親水性塗層包括奈米TTi〇2、奈米ZnO、奈米Al2〇3或其混合 物,其厚度範圍為10奈米〜200奈米,優選為20奈米〜50奈米。 _ 而且,本發明還於所述管殼外壁週面形成有導熱性塗層,包括奈米碳 管、奈米銅、奈米鋁或奈米銅鋁合金薄膜。In order to overcome the insufficient contact performance between the surface of the heat pipe wick and the return liquid in the prior art, the working seam is tender (10) _, the key is that the contact between the surface of the wick and the liquid returning liquid has high efficiency with low backflow resistance. Heat pipe. A second object of the present invention is to provide a method of manufacturing the above heat pipe. In order to achieve the above-mentioned first object, the present invention provides a heat pipe comprising a hollow shell sealed at both ends; a wick formed on a peripheral surface of the inner wall of the envelope, the surface of which is formed with a hydrophilic coating, and is filled The wick is sealed and sealed to the working fluid within the envelope. Wherein, the hydrophilic coating comprises nano Ti2, naihong, niobium or a mixture thereof, and the thickness thereof ranges from 10 nm to 2 nanometers, preferably 2 nanometers to 5 inches. Nano. Moreover, the present invention further forms a thermal conductive coating on the peripheral surface of the outer wall of the envelope, including a carbon nanotube, a nano copper, a nano aluminum or a nano copper alloy film, and has a thickness ranging from 1 nanometer to 5 〇. 〇 Nano, preferably from 20 nm to 200 nm. The wick comprises nanocarbon spheres and carbon fibers having a thickness in the range of 〇1 mm to 55 mm, preferably from 0.2 mm to 0.3 mm. The working fluid comprises a liquid and a carbon nanotube, a carbon nanosphere, a nano steel powder or a mixture thereof, the liquid comprises pure water, ammonia water, methanol, acetone, heptane or a mixed liquid thereof, and the nano material The mass percentage in the working fluid is 0.5 to 2%. Ϊ292028 In the present invention, the inner surface of the inner wall of the envelope and the peripheral surface of the outer wall are respectively subjected to laser texturing treatment, and the surface roughness Rp_v is obtained in the range of 〇.1, 〜1〇, preferably 〇·2μΓη~ The surface crater formed after the treatment has a width ranging from l|^m 2 to 2 pm, preferably 2 μm to 5 μm. The shell material is selected from the group consisting of copper, aluminum, steel, carbon steel, stainless steel, iron, nickel, titanium or alloys thereof. In order to achieve the above second object, the present invention provides a heat pipe manufacturing method comprising the steps of: i providing a hollow tube; forming a wick on the inner surface of the inner wall of the hollow tube, and forming a hydrophilic coating on the surface of the wick And vacuuming an appropriate amount of working fluid into the hollow tube. Wherein, the hydrophilic coating comprises nano TTi 2 , nano ZnO, nano Al 2 〇 3 or a mixture thereof, and the thickness thereof ranges from 10 nm to 200 nm, preferably from 20 nm to 50 nm. Further, the present invention further forms a thermally conductive coating on the peripheral surface of the outer wall of the envelope, including a carbon nanotube, a nano copper, a nano aluminum or a nano copper aluminum alloy film.

I 本發明還進一步於所述管殼内壁週面及外壁週面分別預先經過雷射毛 化處理。 相對于先丽技術,本發明所提供之熱管吸液芯外表面形成親水性塗 層&二不米級塗層具有良好親水性,能改善吸液芯表面與迴流工作流體 間之介面接職能,增加_面積,使迴流之工作流驗容㈣過該親水 f生土層透至吸,夜4⑽,並順流至另一端。同時,由於迴流液態工作流 體此及¥錢至吸液糾層,從而聽玉作流體蒸氣與迴流玉作流體發生 1292028 另切干擾,減小回流阻力,最終使得熱管保持長距離高效傳熱。 【實施方式】 下面結合附圖對本發明作進一步詳細說明。 凊苓閱第二圖’為本發明提供之熱管沿長度方向之剖面示意圖。與傳 統熱管相似’本發明之熱管20按其熱傳變化可分為三段:蒸發段a、絕熱段 B、冷凝段C。按其結構層次劃分,熱管2〇包括五個部分,依次分別為:管 殼21、形成於管殼21内壁週面211之吸液芯22、形成於管殼21外壁週面212 鲁之^r熱性塗層Μ、形成於吸液芯22表面之親水性塗層24以及中空部分26。 其中,液悲工作流體23循環流動於吸液芯22内,工作流體23之蒸氣則充滿 中空部分26。下面對該五大部分逐一介紹。 管殼21之材質可選自銅、紹、鋼、碳鋼、不錢鋼、鐵、錄、欽或其合 金。管殼21徑向截面可以為圓形,也可為其他形狀,如橢圓形、正方形、 矩形、三角形等。管殼21之管徑為2毫米〜2〇〇毫米,管長範圍為幾毫米至幾 十米。官殼21之厚度為0.1宅米〜1毫米,並以〇·2毫米〜〇·4毫米為佳。 • 吸液芯22採用奈米碳球及碳纖維,其厚度範圍為〇·1毫米〜〇·5毫米,優 .選為飢2絲〜G3絲。由於奈米_具有絲面積,可增加奈米碳球及 ,碳纖雜«讀越23之_面積,提高其驗紅作缝况毛細作 用。 導熱性塗層25採用奈米級_,包括奈米碳管、奈米銅、奈米銘或夸 米銅銘合金賴,該賴厚度_奈米〜奈米,優選為姆米〜細太米τ' 該導熱性塗層25在低於歸6托真空下,採用化學氣相沈積、電衆輔助、尤 積、麵沈積或共鑛等綠形成。科無塗層25_奈树管等高導 9 1292028 熱性材料’具有較絲_,可⑽管殼21與料進行熱賴,降低其間 熱阻,進一步提高熱管20散熱效率。 親水性塗層24採概水性材料,如絲Ή〇2、奈米Zn〇、奈細2〇3或 其混合物等,其厚度範圍為1〇奈米〜2〇〇奈米,並以2〇奈米〜5〇奈米為佳。這 些奈米級錄具有良好親水性’能改善吸液芯22與迴流液體間之介面接觸 性旎,且奈米級材料可增加其間接觸面積,使迴流之液態工作流體幻很容 易通過親水性塗層24滲透至吸液;^、22内層,並順流至另一端。同時,由於 迴流液怨工作流體23能及時滲透至吸液芯22内層,從而避免工作流體23蒸 氣與液態傾體23發生剪針擾,減小喊阻力,提高絲2()之傳熱效 率。另,該親水性塗層24還具有殺菌及自潔作用,使這種密閉型熱管2〇成 為裱境友好之熱管。該親水性塗層24於低於2χ1〇_ό托真空下,採用交流磁控 濺鍵、反應性濺鑛、無線射頻濺鍍、離子束蒸鍍或電子束蒸鍍等方法形成。 中空部分26充滿工作流體23之飽和蒸氣,熱管工作時,由蒸發段Α不斷 蒸發之工作流體23蒸氣順著中空部分26流至冷凝段〇因而,工作流體23 送自沸點低之液體,如純水、氨水、甲醇、丙酮或庚烧等液體或其混合液 體,並於液體中添加具有高導熱係數及高熱容之高導熱性材料,如奈米碳 管、奈米碳球、奈米銅粉或其任意組合,以增加工作流體Μ之導熱性能, 其中優選為奈米碳管,因其導熱係數約為6〇〇〇W/m.K。工作流體23表現為 溶液與高導熱性材料混合而成之懸浮液,而高導熱性材料在工作流體中所 佔質量百分含量為0.5〜2%。 請參閱第三圖,為第二圖熱管20中Π部分結構放大示意圖。於吸液芯 1292028 22及導熱性塗層24形成之前,管殼21内壁週面211及外壁週面212分別經過 雷射毛化處理。管殼21經雷射毛化處理後,其内壁週面211及外壁週面212 即形成起伏不平之波紋狀微坑213。處理後相應表面粗糙度RP-v範圍為 〇·1μπι〜ΙΟμπι,以0·2μπι〜Ιμπι效果較佳,其中Rp_v表示為毛化後之内壁週面211 及外壁週面212以波谷為基面之波峰高度;而該微坑213寬度範圍為 Ιμπι〜20μπι,以2μιη〜5μιη效果較佳。該雷射毛化處理可採用固態YAG雷射 器(Yttrium Aluminum Garnet Laser)、Nd(鈥):YAG雷射器、Nd:YV04雷射器 或者UV YAG 雷射器(Ultra-Violet Yttrium Aluminum Garnet Laser)。雷射毛化 處理之目的在於增加内外壁週面與其他介面之實際接觸面積,並加強表面 黏附力,以利於管殼21内壁週面211形成吸液芯22,及外壁週面212形成導 熱性塗層25。 請再參閱第二圖,以說明本發明之熱管20工作過程。熱管20先於蒸發 段A吸收熱量,由於採用奈米高導熱性材料,使熱量傳導至管殼時所受熱阻 > 減小,因而能迅速蒸發液態工作流體23,成為蒸氣;此時,在蒸發段a與冷 凝段C之間存在壓力差,使蒸氣迅速順著中央部分26遷移至冷凝段c ;工作 流體23蒸氣在該端冷凝成液態工作流體23 ;然後利用親水性塗層24親水性 能,使液態工作流體23能及時滲透至吸液芯22内層,再順其流向蒸發段A, 經過絕熱段B時,由於吸液芯22表面形成有親水性塗層24,從而避免工作流 體23蒸氣與迴流之液態工作流體23發生剪切干擾,減小回流阻力,使液能 工作流體23順利流回蒸發段A,工作流體23即實現一個工作循環過程。 請參閱第四圖,為採用本發明之熱管20之散熱系統}結構示意圖。該散 11 1292028 包括Ml〇、熱管2〇、具有一基底Μ及複數個散熱鑛片32之散熱裝 置〇位於熱源10與散熱裝置3〇之基底則之熱介面材料4〇及安裝於熱管 ^«^4*閱第二圖)之風扇5G。其中,熱源辦為汽車發動機及内燃 機等I熱部件’也可為電子元件或其他發熱密集之科。熱管赃置於散 .’“、衣置3(3之基底31㈣’其採用本發明所提供之熱管,並根據需要選擇具 •備上4某雛I之熱f形式,以將賊至基底3比熱量迅速遷移 。熱介面 ,材料4G可滅奈米齡φ材料,如於導絲材巾添加絲碳料高導熱性 ’丁、米材料’以增加熱源1〇與散熱裝置3〇之基底Μ間之熱傳接觸面積,減小 其間熱阻,使缝迅速大量傳遞至基底财,織赫熱管將該熱量迅速 轉私,或通過散熱韓片32散發出去。而風扇5〇則用來加速熱管2〇冷凝段c之 政熱’使傳遞至其之熱i及時散發出去,確保鮮2()之工作效率。 凊參閱第五圖,說明本發明提供之熱管製造方法,其包括以下步驟·· (1) 提供一中空管作為熱管管殼。該管殼可以為銅管,也可根據不同需 求採用不同材料,如銘、鋼、翻、不_、鐵、鎳、鈦或其合金。管殼 %向截面選自鮮圓形、橢圓形、正方形、矩形、三角形等。管徑為2毫米 〜200毫米,管長範圍為幾毫米至幾十米。 (2) 於官殼内壁週面形成吸液芯,並於吸液芯表面形成親水性塗層。本 發明之吸液芯22採用奈米石反球及碳纖維,其可採用電孤放電法、化學氣相 沈積法或電漿沈積法等形成,其厚度範圍為〇·1毫米〜毫米,優選為〇·2毫 米〜0·3毫米。然後在低於2xl0_6托真空下,採用交流磁控濺鍍、反應性濺鍵、 無線射頻濺鍍、離子束蒸鍍或電子束蒸鍍等方法形成於吸液芯表面形成親 12 l292〇28 水性塗層’其包括奈米孤、 為嶋娜«跡厚度範圍 (3)將適量工作流體直空封 用降^ 咖於Μ管内。先獅空管-端關,可採 用十月性氣體焊接密封形式,如 ^虱谇寺,再將其抽成真空,真 工度乾圍約為1·3χ10]〜ι·3χ1σ4ρ 、s内准入適量液體及高導熱性材料混 3而成之懸浮液;然後將中空管 &另鳊封閉,使得液體密封於管内,成為Further, the present invention is further subjected to laser texturing treatment on the inner surface of the inner wall of the envelope and the outer peripheral surface of the outer wall, respectively. Compared with the prior art, the outer surface of the heat pipe wick provided by the invention forms a hydrophilic coating & the second non-grade coating has good hydrophilicity, and can improve the interface function between the surface of the wick and the working fluid flowing back. , increase the _ area, make the flow of the reflow process check (4) through the hydrophilic f soil layer through the suction, night 4 (10), and flow to the other end. At the same time, due to the returning of the liquid working fluid and the money to the liquid absorbing layer, the sound of the fluid vapor and the returning jade fluid is generated. 1292028 The interference is further cut, the reflux resistance is reduced, and finally the heat pipe maintains a long distance and efficiently transfers heat. [Embodiment] The present invention will be further described in detail below with reference to the accompanying drawings. Referring to the second figure, a cross-sectional view of the heat pipe provided in the longitudinal direction of the present invention is shown. Similar to the conventional heat pipe, the heat pipe 20 of the present invention can be divided into three sections according to its heat transfer variation: the evaporation section a, the adiabatic section B, and the condensation section C. According to its structural hierarchy, the heat pipe 2 includes five parts, which are respectively: a casing 21, a wick 22 formed on the inner circumferential surface 211 of the casing 21, and a peripheral surface 212 formed on the outer wall of the casing 21. The thermal coating Μ, the hydrophilic coating 24 formed on the surface of the wick 22, and the hollow portion 26. Among them, the liquid sad working fluid 23 circulates in the wick 22, and the vapor of the working fluid 23 fills the hollow portion 26. The following five parts are introduced one by one. The material of the shell 21 may be selected from the group consisting of copper, slag, steel, carbon steel, stainless steel, iron, ruthenium, or its alloy. The tube 21 may have a circular cross section in a radial shape, and may have other shapes such as an ellipse, a square, a rectangle, a triangle, and the like. The tube 21 has a diameter of 2 mm to 2 mm and a tube length ranging from several millimeters to several tens of meters. The thickness of the official shell 21 is 0.1 m 2 to 1 mm, and preferably 〇 2 mm ~ 〇 · 4 mm. • The wick 22 is made of nano carbon spheres and carbon fiber, and its thickness ranges from 〇·1 mm to 〇·5 mm. It is selected as the hunger 2 wire to the G3 wire. Since the nanometer_ has a silk area, it can increase the area of the nano carbon sphere and the carbon fiber, and the area of the carbon fiber is improved. The thermal conductive coating 25 adopts a nanometer _, including a carbon nanotube, a nano copper, a nanometer or a quartet copper alloy, and the thickness _ nanometer ~ nanometer, preferably mmi ~ fine rice τ' The thermal conductive coating 25 is formed by greening such as chemical vapor deposition, electric power assist, special product, surface deposition or co-mineral under a vacuum of less than 6 Torr. The uncoated 25_Nakashu tube is highly conductive. 9 1292028 The thermal material 'has a relatively thin wire _, and the (10) shell 21 is thermally heated to reduce the thermal resistance therebetween, thereby further improving the heat dissipation efficiency of the heat pipe 20. The hydrophilic coating 24 is a water-based material, such as silk Ή〇 2, nano Zn 〇, nano 〇 2 〇 3 or a mixture thereof, and the thickness thereof ranges from 1 〇 nanometer to 2 〇〇 nanometer, and is 2 〇. Nano ~ 5 〇 nano is better. These nano-grades have good hydrophilicity' to improve the interface contact between the wick 22 and the reflux liquid, and the nano-scale material can increase the contact area between them, so that the liquid working fluid flowing back can be easily passed through the hydrophilic coating. Layer 24 penetrates into the liquid absorbing layer; the inner layer of 22, and flows downstream to the other end. At the same time, since the recirculating fluid 23 can penetrate into the inner layer of the wick 22 in time, the shearing of the working fluid 23 vapor and the liquid pour body 23 is avoided, the shout resistance is reduced, and the heat transfer efficiency of the wire 2 () is improved. In addition, the hydrophilic coating 24 also has a sterilizing and self-cleaning action, and the sealed heat pipe 2 is made into an environmentally friendly heat pipe. The hydrophilic coating 24 is formed by an AC magnetron sputtering, reactive sputtering, radio frequency sputtering, ion beam evaporation, or electron beam evaporation under a vacuum of less than 2 Torr. The hollow portion 26 is filled with the saturated vapor of the working fluid 23. When the heat pipe is in operation, the working fluid 23 vapor which is continuously evaporated by the evaporation section 顺 flows along the hollow portion 26 to the condensation section. Thus, the working fluid 23 is sent from a liquid having a low boiling point, such as pure A liquid such as water, ammonia, methanol, acetone or heptane or a mixed liquid thereof, and a high thermal conductivity material having a high thermal conductivity and a high heat capacity, such as a carbon nanotube, a carbon sphere, or a nano copper powder, is added to the liquid. Or any combination thereof to increase the thermal conductivity of the working fluid, wherein the carbon nanotubes are preferred because of their thermal conductivity of about 6 〇〇〇 W/mK. The working fluid 23 is expressed as a suspension of a solution mixed with a highly thermally conductive material, and the high thermal conductive material accounts for 0.5 to 2% by mass of the working fluid. Please refer to the third figure, which is an enlarged schematic view of the structure of the enthalpy in the heat pipe 20 of the second figure. Before the formation of the wick 1292028 22 and the thermal conductive coating 24, the inner wall surface 211 and the outer wall surface 212 of the envelope 21 are subjected to laser texturing treatment, respectively. After the tube shell 21 is subjected to laser texturing treatment, the inner wall peripheral surface 211 and the outer wall peripheral surface 212 form undulating corrugated micropits 213. After the treatment, the corresponding surface roughness RP-v ranges from 〇·1μπι to ΙΟμπι, and the effect is preferably 0·2μπι~Ιμπι, wherein Rp_v represents the inner wall peripheral surface 211 after the texturing and the outer wall peripheral surface 212 is based on the trough. The peak height of the micropit 213 is Ιμπι~20μπι, and the effect is preferably 2μιη to 5μιη. The laser texturing treatment can be performed by Yttrium Aluminum Garnet Laser, Nd (Y): YAG laser, Nd: YV04 laser or UV YAG laser (Ultra-Violet Yttrium Aluminum Garnet Laser) ). The purpose of the laser texturing treatment is to increase the actual contact area between the inner and outer wall peripheral surfaces and other interfaces, and to strengthen the surface adhesion force to facilitate the formation of the wick 22 on the inner wall surface 211 of the envelope 21, and the outer wall peripheral surface 212 to form thermal conductivity. Coating 25. Please refer to the second figure again to illustrate the working process of the heat pipe 20 of the present invention. The heat pipe 20 absorbs heat before the evaporation section A, and because of the use of the nano-high thermal conductivity material, the heat resistance when the heat is transmitted to the envelope is reduced, so that the liquid working fluid 23 can be quickly evaporated to become a vapor; There is a pressure difference between the evaporation section a and the condensation section C, causing the vapor to rapidly migrate along the central portion 26 to the condensation section c; the working fluid 23 vapor is condensed at this end into a liquid working fluid 23; and then hydrophilic with the hydrophilic coating 24. The performance enables the liquid working fluid 23 to penetrate into the inner layer of the wick 22 in time, and then flows to the evaporation section A. When passing through the adiabatic section B, since the hydrophilic coating 24 is formed on the surface of the wick 22, the working fluid 23 is avoided. The vapor and the returning liquid working fluid 23 undergo shear interference, reduce the reflux resistance, and the liquid working fluid 23 smoothly flows back to the evaporation section A, and the working fluid 23 realizes a working cycle process. Please refer to the fourth figure, which is a schematic structural view of the heat dissipation system of the heat pipe 20 of the present invention. The scatter 11 1292028 includes a M1 〇, a heat pipe 2 〇, a heat dissipating device having a substrate Μ and a plurality of heat dissipating slabs 32, a thermal interface material 4 〇 located on the base of the heat source 10 and the heat dissipating device 3 安装, and being mounted on the heat pipe ^« ^4* read the second picture) fan 5G. Among them, the heat source is an I hot component such as an automobile engine or an internal combustion engine, and it can also be an electronic component or other heat-intensive subject. The heat pipe is placed in the ".", "clothing 3 (base 3 of the 3 (four)" which uses the heat pipe provided by the present invention, and according to the need to prepare a hot f form of 4 a young I, to the thief to the base 3 Rapid transfer of specific heat. Thermal interface, material 4G can be used to extinguish nanometer φ material, such as adding silk carbon material with high thermal conductivity 'butyl, rice material' to guide the wire towel to increase the heat source 1〇 and the heat sink 3〇 substrateΜ The heat transfer area between the two reduces the thermal resistance between them, so that the seam is quickly transferred to the base. The heat is quickly transferred to the private heat, or is dissipated through the heat sink 32. The fan 5 is used to accelerate the heat pipe. 2〇Conditional heat of the condensation section c causes the heat i delivered to it to be released in time to ensure the working efficiency of the fresh 2(). 凊 Referring to the fifth figure, the method for manufacturing the heat pipe provided by the present invention includes the following steps: (1) Provide a hollow tube as the heat pipe shell. The shell may be a copper tube, or different materials may be used according to different requirements, such as Ming, steel, turn, no, iron, nickel, titanium or alloys thereof. The shell % cross section is selected from the group consisting of fresh circles, ovals, squares, rectangles, and triangles. The diameter is from 2 mm to 200 mm, and the length of the tube ranges from several millimeters to several tens of meters. (2) A wick is formed on the inner surface of the inner wall of the shell, and a hydrophilic coating is formed on the surface of the wick. The wick 22 is made of nano-stone anti-ball and carbon fiber, and can be formed by an electric solitary discharge method, a chemical vapor deposition method or a plasma deposition method, and has a thickness ranging from 〇1 mm to mm, preferably 〇· 2 mm ~ 0 · 3 mm. Then in the vacuum below 2xl0_6 Torr, using AC magnetron sputtering, reactive sputtering, RF sputtering, ion beam evaporation or electron beam evaporation, formed in the wick The surface forms a pro- 12 l292〇28 water-based coating' which includes nano-isolate, 嶋娜« trace thickness range (3), the right amount of working fluid is sealed in the air, and the lion is empty-end-closed. It can be used in the form of a ten-month gas welding seal, such as the ^虱谇 Temple, and then vacuumed it. The true working circumference is about 1·3χ10]~ι·3χ1σ4ρ, and the appropriate amount of liquid and high thermal conductivity material are allowed in the s. Mixing 3 into a suspension; then sealing the hollow tube & To become

熱管之工作流體。其中夜俨 夜體選自純水、氨水、甲醇、丙酮、庚院。高導 熱性材料包括奈米碳管、奈米太 X不水銅叔或其任意組合,並控制高導 熱性材料在工作趙巾量百分含量躲5〜2%。 …通過上述步驟,即形成_熱管。而且,還可於管朗外壁週面分別 進订雷射毛化處理,以達到表面粗链度Rp•期為叫㈣卿,優選為 〇一师;毛化處理後形成之表面微坑寬度範圍為_〜2_,優選為 〜5卿。雷射毛化處理後再於管殼外壁週面形成導熱性塗層,如奈米碳 管、奈米銅、奈米紹或奈米銅紹合金等薄膜,薄膜厚度範圍為1〇奈米~5〇〇 奈米,優選為20奈米〜200奈米。 本發明之熱官20吸液心22外表面形成有親水性塗層24,利用該奈米級 塗層來改善吸液芯22表面與迴流工作流體23間之介面接觸性能,同時增加 其間接觸面積,使迴流之工作流體23很容易通過筚親水性塗層24滲透至吸 液芯22内層’並順流至蒸發段A。同時,由於迴流工作流體23能及時滲透至 吸液芯内層,從而避免工作流體23蒸氣與液態迴流工作流體23發生剪切干 擾,減小回流阻力,使得熱管20保持長距離高效傳熱。另,通過於管殼21 13 1292028 内外壁週面進行雷射毛化處理,可增加管殼表面積,加速管殼21與週邊環 境(如基座31或吸液芯22)之熱交換。而且,導熱性塗層24、採用奈米材料之 吸液芯22及工作流體23均可提高熱管20系統之熱傳導性能,從而對提高熱 管20散熱效率作出進一步貢獻。 綜上所述,本發明確已符合發明專利之條件,茲依法提出專利申往 另外,以上所述僅為本發明之較佳實施例,自不能以此限制本案之申这專The working fluid of the heat pipe. Among them, the night body is selected from pure water, ammonia water, methanol, acetone, and Gengyuan. The high thermal conductivity material includes carbon nanotubes, nano-X-free copper, or any combination thereof, and controls the high-heat-conducting material to hide 5~2% in the amount of working Zhao towel. ...through the above steps, the heat pipe is formed. Moreover, the laser texturing treatment can be separately applied to the outer surface of the outer wall of the tube to achieve the surface roughness Rp• period is called (four) Qing, preferably the first division; the surface micropit width range formed after the texturing treatment It is _~2_, preferably ~5 qing. After the laser texturing treatment, a thermal conductive coating is formed on the outer surface of the outer wall of the shell, such as a carbon nanotube, a nano copper, a nanosau or a nano-copper-salt alloy, and the film thickness ranges from 1 nanometer to nanometer. 5 〇〇 nanometer, preferably 20 nm to 200 nm. The outer surface of the wick 2 of the present invention is formed with a hydrophilic coating 24, which is used to improve the interface contact performance between the surface of the wick 22 and the return working fluid 23, and at the same time increase the contact area therebetween. The recirculating working fluid 23 is easily infiltrated into the inner layer ' of the wick 22 through the hydrophilic coating 24 and flows downstream to the evaporation section A. At the same time, since the reflux working fluid 23 can penetrate into the inner layer of the wick in time, the shearing disturbance of the working fluid 23 vapor and the liquid reflux working fluid 23 is avoided, and the backflow resistance is reduced, so that the heat pipe 20 maintains long-distance efficient heat transfer. In addition, by performing laser texturing on the inner and outer peripheral walls of the envelope 21 13 1292028, the surface area of the envelope can be increased, and the heat exchange between the envelope 21 and the surrounding environment (such as the susceptor 31 or the wick 22) can be accelerated. Moreover, the thermally conductive coating 24, the wicking 22 using the nanomaterial, and the working fluid 23 all improve the heat transfer performance of the heat pipe 20 system, thereby further contributing to the improvement of the heat dissipation efficiency of the heat pipe 20. In summary, the present invention has indeed met the conditions of the invention patent, and the patent application is filed according to law. In addition, the above description is only a preferred embodiment of the present invention, and it is not possible to limit the application of this case.

利範圍。舉凡熟悉本案技藝之人士,在援依本案發明精神所作等欵修飾或 變化,皆應包含在以下專利權利要求書内。 【圖式簡單說明】 第一圖係先前技術之熱管内部結構示意圖。 第二圖係本發明之熱管沿長度方向之剖面示意圖。 第三圖係第二圖熱管中m部分結構放大示意圖。 第四圖係具有本發明之熱管之散熱系統結構示意圖。 第五圖係本發明之鮮製造方法流程圖。 【主要元件符號說明】 A 絕熱段 B C 熱管 20 21 吸液芯 22 23 親水性塗層 24 25 中空部分 26 211 外壁週面 212 213 蒸發段 冷凝段 管殼Benefit range. Any person who is familiar with the skill of the case, such as the modification or change of the invention in the spirit of the invention, shall be included in the following patent claims. [Simple description of the drawings] The first figure is a schematic diagram of the internal structure of the heat pipe of the prior art. The second figure is a schematic cross-sectional view of the heat pipe of the present invention along the length direction. The third figure is an enlarged schematic view of the m-part structure in the heat pipe of the second figure. The fourth figure is a schematic structural view of a heat dissipation system having the heat pipe of the present invention. The fifth drawing is a flow chart of the fresh manufacturing method of the present invention. [Main component symbol description] A Insulation section B C Heat pipe 20 21 Suction core 22 23 Hydrophilic coating 24 25 Hollow part 26 211 Outer wall circumference 212 213 Evaporation section Condensation section Shell

工作流體 導熱性塗層 内壁週面 微i/L 14Working fluid Thermally conductive coating Inner wall circumference Micro i/L 14

Claims (1)

1292028 十、申請專利範圍: 1· 一種熱管,其包括一兩端密封之中空管殼·, 形成於管殼内壁週面之吸液芯;及 充滿吸液芯並密封於管殼内之工作流體;其改進在於:所述吸液芯表 面形成有親水性塗層。 2·如申明專利圍第工項所述之熱管,其改進在於··戶斤述親水性塗層包括 奈米Τι〇2、奈米Zn〇、奈米AJ&或其混合物。1292028 X. Patent application scope: 1. A heat pipe comprising a hollow tube shell sealed at both ends, a wick formed on the inner surface of the inner wall of the shell; and a work filled with the wick and sealed in the tube shell a fluid; the improvement is that the surface of the wick is formed with a hydrophilic coating. 2. The heat pipe according to the above-mentioned patent circumstance, the improvement is that the hydrophilic coating includes nano Τ 〇 2, nano Zn 〇, nano AJ & or a mixture thereof. 3·如申晴專利範圍第2項所述之熱管,其改進在於:所述親水性塗層厚度 範圍為10奈米〜2〇〇奈米。 4·如申請專利範圍第3項所述之熱管,其改進在於··所述親水性塗層厚度 範圍為20奈米〜5〇奈米。 5·如申明專利範圍第1項所述之熱管,其改進在於··所述管殼外壁週面形 成有導熱性塗層。 6·如申請專利範圍第5項所述之熱管,其改進在於:所述導熱性塗層包括 奈米碳管、奈米銅、奈米鋁或奈米銅鋁合金薄膜。 7·如申請專利範圍第6項所述之熱管,其改進在於:所述薄膜厚度範圍為 10奈米〜500奈米。 8·如申請專利範圍第7項所述之熱管,其改進在於:所述薄膜厚度範圍為 20奈米〜200奈米。 9·如申請專利範圍第1至8任一項所述之熱管,其改進在於:所述吸液芯包 括奈米碳球及碳纖維。 10·如申請專利範圍第9項所述之熱管,其改進在於:所述吸液芯厚度範圍 15 1292028 為0.1¾米〜0.5¾米。 11·如申請專利範圍第10項所述之熱管,其改進在於:所述吸液芯厚度範圍 為0.2¾米〜〇3宅米。 12·如申請專利範圍第1至8任一項所述之熱管,其改進在於:所述工作流體 包括一種液體及添加其中之奈米碳管、奈米碳球、奈米銅粉或其混合物。 13·如申凊專利範圍第12項所述之熱管,其改進在於:戶斤述液體包括純水、 氨水、曱醇、丙酮、庚烷或其混合液體。 _ 14·如申晴專利範圍第12項所述之熱管,其改進在於:戶斤述奈米^反管、奈米 碳球或奈米銅粉在工作流體中所佔質量百分比為〇5j%。 15·如申請專利範圍第1項所述之熱管,其改進在於··所述管殼内壁週面及 外壁週面之表面粗糙度Rp-v範圍為〇·1μπι〜1〇μπι。 16·如申請專利範圍第15項所述之熱管,其改進在於:所述管殼内壁週面及 外壁週面之表面粗链度Rp-v範圍為〇.2μπι〜Ιμπι。 > 17·如申請專利範圍第項所述之熱管,其改進在於:所述管殼内壁週面及 外壁週面之表面微坑寬度範圍為1_〜2〇_。 18·如申請專利範圍第17項所述之熱管,其改進在於:所述管殼内壁週面及 外壁週面之表面微坑寬度範圍為2μπι〜5μιη。 19·如申請專利範圍第1項所述之熱管,其改進在於:所述管殼材質選自銅、 链、鋼、碳鋼、不錄鋼、鐵、鎳、鈦或其合金。 20· —種熱管製造方法,包括下列步驟: 提供一中空管; 16 1292028 . 於中空管内壁週面形成吸液芯;及 將適量工作流體真空封閉於中空管内;其改進在於:於所述吸液芯表 面形成親水性塗層。 21·如申請專利範圍第2〇項所述之熱管製造方法,其改進在於:所形成之親 水性塗層包括奈米Ti〇2、奈米ZnO、奈米AI2O3或其混合物。 , 22·如申請專利範圍第21項所述之熱管製造方法,其改進在於··所形成之親 I 水性塗層厚度範圍為10奈米〜200奈米。 23·如申請專利範圍第22項所述之熱管製造方法,其改進在於:所形成之親 水性塗層厚度範圍為20奈米〜50奈米。 24·如申請專利範圍第20項所述之熱管製造方法,其改進在於:所述親水性 塗層採用真空鍍膜法形成。 25·如申請專利範圍第24項所述之熱管製造方法,其改進在於:所述真空膜 鍍法選自交流磁控濺鍍、反應性濺鍍、無線射頻濺鍍、離子束蒸鍍或電 & 子束蒸鍍。 26. 如申請專利範圍第2〇項所述之熱管製造方法,其改進在於:進〆步於所 述管殼外壁週面形成導熱性塗層。 27. 如申請專利範圍第26項所述之熱管製造方法,其改進在於:所述導熱性 塗層包括奈米碳管、奈米銅、奈米鋁或奈米銅鋁合金薄膜。 28·如申請專利範圍第20項所述之熱管製造方法,其改進在於··所述管殼内 壁週面及外壁週面分別預先經過雷射毛化處理。 173. The heat pipe according to item 2 of the Shenqing patent scope, wherein the hydrophilic coating has a thickness ranging from 10 nm to 2 nanometers. 4. The heat pipe of claim 3, wherein the hydrophilic coating has a thickness ranging from 20 nm to 5 nm. 5. The heat pipe of claim 1, wherein the heat pipe is modified to have a thermally conductive coating on a peripheral surface of the outer wall of the envelope. 6. The heat pipe of claim 5, wherein the heat conductive coating comprises a carbon nanotube, a nano copper, a nano aluminum or a nano copper alloy film. 7. The heat pipe of claim 6, wherein the heat pipe is improved in that the film has a thickness ranging from 10 nm to 500 nm. 8. The heat pipe according to claim 7, wherein the film has a thickness in the range of 20 nm to 200 nm. 9. The heat pipe according to any one of claims 1 to 8, wherein the wick comprises a carbon nanosphere and a carbon fiber. 10. The heat pipe of claim 9, wherein the wick has a thickness ranging from 15 1292028 to 0.13⁄4 m to 0.53⁄4 m. 11. The heat pipe of claim 10, wherein the wick has a thickness ranging from 0.23⁄4 m to 〇3 house meters. 12. The heat pipe according to any one of claims 1 to 8, wherein the working fluid comprises: a liquid and a carbon nanotube, a carbon nanoparticle, a nano copper powder or a mixture thereof added thereto . 13. The heat pipe according to claim 12, wherein the heat exchanger comprises a liquid comprising pure water, ammonia water, methanol, acetone, heptane or a mixed liquid thereof. _ 14·If the heat pipe mentioned in the 12th item of Shen Qing patent scope, the improvement is as follows: the mass percentage of the nano tube, the nano carbon ball or the nano copper powder in the working fluid is 〇5j% . 15. The heat pipe according to claim 1, wherein the heat sink is improved in that the surface roughness Rp-v of the inner wall surface and the outer wall surface of the envelope is 〇·1 μπι 1 to 1 μm. The heat pipe according to claim 15 is characterized in that the surface roughening degree Rp-v of the inner wall surface and the outer wall peripheral surface of the envelope is in the range of 〇.2μπι~Ιμπι. <17> The heat pipe according to the above aspect of the invention is characterized in that the surface pits of the inner wall of the inner wall of the envelope and the outer surface of the outer wall have a width ranging from 1 mm to 2 mm. 18. The heat pipe according to claim 17, wherein the surface of the inner wall of the envelope and the peripheral surface of the outer wall have a pit width ranging from 2 μm to 5 μm. 19. The heat pipe of claim 1, wherein the heat exchanger is modified in that the material of the casing is selected from the group consisting of copper, chain, steel, carbon steel, non-recorded steel, iron, nickel, titanium or alloys thereof. 20) A method for manufacturing a heat pipe, comprising the steps of: providing a hollow tube; 16 1292028. forming a wick on a peripheral surface of the inner wall of the hollow tube; and vacuum-sealing an appropriate amount of working fluid in the hollow tube; The surface of the wick is formed into a hydrophilic coating. 21. The heat pipe manufacturing method according to claim 2, wherein the hydrophilic coating formed comprises nano Ti 2 , nano ZnO, nano AI 2 O 3 or a mixture thereof. 22. The heat pipe manufacturing method according to claim 21, wherein the improvement is that the formed hydrophilic coating has a thickness ranging from 10 nm to 200 nm. 23. The method of manufacturing a heat pipe according to claim 22, wherein the hydrophilic coating is formed to have a thickness ranging from 20 nm to 50 nm. The heat pipe manufacturing method according to claim 20, wherein the hydrophilic coating is formed by a vacuum coating method. 25. The heat pipe manufacturing method according to claim 24, wherein the vacuum film plating method is selected from the group consisting of AC magnetron sputtering, reactive sputtering, radio frequency sputtering, ion beam evaporation or electricity. & beam evaporation. 26. The heat pipe manufacturing method according to claim 2, wherein the heat pipe manufacturing method is improved in that a heat conductive coating is formed on a circumferential surface of the outer wall of the envelope. 27. The heat pipe manufacturing method according to claim 26, wherein the heat conductive coating comprises a carbon nanotube, a nano copper, a nano aluminum or a nano copper aluminum alloy film. 28. The method of manufacturing a heat pipe according to claim 20, wherein the improvement is that the inner surface of the inner wall of the envelope and the outer surface of the outer wall are subjected to laser texturing in advance. 17
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Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN102208377A (en) * 2010-03-30 2011-10-05 陈盈同 Radiating unit with antioxidant nano-film and deposition method of antioxidant nano-film
TWI479114B (en) * 2012-04-09 2015-04-01 Heat transfer structure, method of manufacturing heat transfer structure and heat dissipating device
CN110608628A (en) * 2019-09-12 2019-12-24 Oppo广东移动通信有限公司 Temperature-equalizing plate and hydrophilic treatment method of temperature-equalizing plate

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN102208377A (en) * 2010-03-30 2011-10-05 陈盈同 Radiating unit with antioxidant nano-film and deposition method of antioxidant nano-film
CN102208377B (en) * 2010-03-30 2013-05-15 陈盈同 Radiating unit with antioxidant nano-film and deposition method of antioxidant nano-film
TWI479114B (en) * 2012-04-09 2015-04-01 Heat transfer structure, method of manufacturing heat transfer structure and heat dissipating device
CN110608628A (en) * 2019-09-12 2019-12-24 Oppo广东移动通信有限公司 Temperature-equalizing plate and hydrophilic treatment method of temperature-equalizing plate

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