1290483 * 玖、發明說明： 【發明所屬之技術領域】 本發明係有關一麵動式的微型混合元件，能在極短的長度内，將兩種以 上的流體混合均勻。 【先前技術】 混合縣早期常顧在機械和化學領域，例如··化學反應合成和燃燒 私7員域中’而後伴機電製程的進步；|發微流體領域的快速發展， 讓生醫化學上有了革命性的進展，捨棄原先繁雜的生化分析流程，由多項 標準化的實驗步驟整合縮小至微小的晶片上，稱為晶片實驗室㈣_on_a_ch⑹ 或微全分析系統(111^0如^11办咖_6111，|111[7^)。此種結合微機電、生醫 檢測技術、分析化學和光電技術的系統，最大優勢為可完成一連串的混合、 刀離、傳輸專檢驗流程，兼具體積小、成本低、平行處理、檢測快速與可 拋棄等優點。微混合器(micro-mixer)便在此思維下產生，除了達成混合反應 的目的外’對於混合效能的提升亦是現今重點研究之一。 一般的晶片實驗室或微全分析系統的晶片尺寸都在數公分左右，其上 的微流道導引流體流動，寬度從數十微米到數百微米，因而此系統的雷諾 數(Reynolds number)將大幅降低。雷諾數定義為 ^^pDU/μ 其中P是流體的密度，D是微流道的寬度，t/是流體的流速，而"是流體的 1290483 黏滯係數。雷諾數代表流體的慣性力對黏性力的比值。當雷諾小於23〇〇時， -即是流體處於層流狀態；另一個與流體混合有關的流體參數為佩可雷特 _ (PSclet)常數，其定義為1290483 * 发明 发明 发明 发明 发明 发明 发明 发明 发明 发明 发明 发明 发明 】 】 】 】 】 】 】 】 】 】 】 】 】 】 】 】 】 】 】 】 】 】 】 】 】 】 】 】 】 】 】 】 [Prior Art] Mixed county early in the field of machinery and chemistry, such as ··················································································· With revolutionary progress, the original complicated biochemical analysis process was abandoned, and the integration of several standardized experimental steps was reduced to a tiny wafer, called the wafer laboratory (4) _on_a_ch (6) or micro-full analysis system (111^0 such as ^11 coffee _ 6111, |111[7^). This system combining MEMS, biomedical detection technology, analytical chemistry and optoelectronic technology has the greatest advantage of completing a series of special inspection processes for mixing, knife separation and transmission, as well as specific small, low cost, parallel processing and rapid detection. Can be abandoned and other advantages. A micro-mixer is produced under this thinking. In addition to the purpose of achieving a mixed reaction, the improvement of mixing efficiency is one of the key researches today. The wafer size of a typical wafer lab or micro-analysis system is about a few centimeters. The microchannels on it guide the fluid flow, ranging from tens of microns to hundreds of microns, so the Reynolds number of the system. Will be greatly reduced. The Reynolds number is defined as ^^pDU/μ where P is the density of the fluid, D is the width of the microchannel, t/ is the flow rate of the fluid, and " is the 1290483 viscosity coefficient of the fluid. The Reynolds number represents the ratio of the inertial force of the fluid to the viscous force. When Reynolds is less than 23 ,, - the fluid is in a laminar state; another fluid parameter associated with fluid mixing is the Pecret _ (PSclet) constant, which is defined as
Pe =[///〇 其中乃代表分子擴散係數，t/為流體的速度"為長度。佩可雷特常數代表 流體的對流和擴散的比。在巨觀流場常利用紊流的方法造成混合，但是在 層流系統上不再適用，對於層流來說，不同流體的混合來自物質間的 φ擴散現象，然而分子間的擴散無法與紊流混合相比擬。若只依靠分子間的 擴散現象，即使在寬僅微米的流道上，經過數公分長的混合長度，依 舊無法合均勻，這也是微混合器的挑戰之一^。 混合的現象簡單來說，可視為分子間擴散的結果，可以分子擴散模型 (Fick’slaw)加以描述，其定義為 J = - ADV c 其中為擴散通量，j代表兩混合流體的接觸面積，乃是流體分子的擴散 係數，C是流體的濃度，為流體的濃度梯度。在相同條件下混合，乃為 ’流體的本質雛，絲料變。所贿變兩混合龍賴觸面積以及流體 的濃度梯度是導致混合可行的方式，但是濃度梯度是不紐制。因此，目 祕混合II的混合模式主要是明加兩混合流體的接觸面積為主。在微流 道中，流_徵的表面賴體積比相當大，藉由微流道上的幾何、邊壁溝 槽以及障礙(obstacles)等結構，可有效改變流體的流動方式，進而使流體產 生大量的摺疊(folding)和拉伸(stretching)，以增加流體擴散接觸面，使流體 混合更均勻、快速。 7 1290483 一種習知先前技術的微混合器顯示於第一圖(WO Pat. No· 03/011443 A2) ’此種著名的被動式微混合器(1〇)，在混合腔(⑴的底部，以微製造技術 製作有特殊幾何結構的溝槽(12a)、（12b)、（12c)、（12d)、（12e)和(12f)。此種 特殊設計的溝槽，可使流體產生垂直於流動方向的速度向量，使流體做螺 方疋(helical)性的流動’產生拉伸和摺疊效應，達到充分混合的效果。 另一種習知先前技術的微混合器顯示於第二圖（Us Pat· Ν〇·2005/0232076 A1)，此設計主要特徵為利用上下流道交錯重疊 ^ (〇Verlappmg)以增強混合的效果。當相異流體由入口(21)、（22)流入後，在交 會處(23)由於流道的相互重疊，使得上下層流體相互作用，形成局部流體以 翻滾方式急速轉向，有效加強流體的摺疊、拉伸效應和以及接觸面積。當 流體持續往下游移動，如第三圖所示，可設計多個相互重疊的區域(33)、 (34)、（35)，每經過一次重疊的區域，又再一次加強混合。 由以上先前技術可知：混合效率可經由接觸面積的增加而提升。增加 接觸面積的方式固然多種，但前例中(w〇 Pat· Ν〇· 〇3/〇丨丨443 A2)的溝槽作用 藝下’寬度為200微米，冑70微米的流道中，若混合效果要達到完全混合， 則需要長賴公分以上的絲。因此，為使微混合||的混合長度小至數公 釐，特提出此一新的微混合器方法和裝置。 職是之故，本發明鑒於習知技術之缺失，乃思及改良發明之意念，發 明出本案之『具橫跨多邊壁面之連續溝槽之微混合器』。 【發明内容】 本發明之主要目的，係在提供一種微混合器，能在極短的距離内，例 8 1290483 如數公釐内’使兩種以上的流體在微流道中快速均勻的混合。構成微流道 "的材料可為⑨、_、高分子和其他生齡容性材料等。微流道與溝槽結 •構以黃光微影等微機電製程方式製作和封裝，除了入口及出口外，在混合 月工内至少包含-組相鄰邊壁面上有特殊設計的連續溝槽結構，此連續溝槽 結構不僅可導引流體產生水平橫向的速度向量，·可增強垂直方向上的 牽引，進而使接觸面積增加以強化混合效果。 φ 本發明的微混合器之微流道寬度、高度在10。。μηι以下；溝槽結構的 寬度、洙度小於250 μηι，適用於流體的雷諾數小於1〇〇，特別在雷諾數為i 時，相較於其它的混合器有更佳的混合效果。 下文藉由具體實施例配合所附的圖式詳加說明，更容易瞭解本發明的 目的、技術内容、特點及其所達成的功效。 【實施方式】 本發明提出-種具橫跨多邊壁面之連續溝槽之微混合器，其最佳實施 φ例之一的結構不意圖如第四圖所示。本發明之微混合器㈣，包含流道入口 (41a、41b)、流道出口(45)、和混合腔(42)，其中混合腔包含底面溝槽⑼ 以及側壁面溝槽(44)，且此兩類溝槽呈現相連的狀態。第五圖顯示第四圖之 A區域的放大圖，可以明顯看出底面溝槽(51)與麵面溝槽⑻的配置。數 種流體分別由左流道入口(41a)和右流道入口(夠，經過混合腔(42)混合均 勻後再由流道出口(45)流出微混合器，其後可銜接各式元件或系統。 利用計I越力學軟體CFD-RC模鄉四圖之混合器的結果顯示於第 六圖。黑色和白色代表兩種不同成分的流體分別從人口注人，混合後的顏 9 1290483 色介於兩者之間，可棚右·灰關標看出。財定義齡指標時使用 混合指數 - M =Pe = [/ / / 〇 where is the molecular diffusion coefficient, t / is the velocity of the fluid " is the length. The Pecoret constant represents the ratio of convection and diffusion of a fluid. In the giant flow field, turbulence is often used to cause mixing, but it is no longer applicable in laminar flow systems. For laminar flow, the mixing of different fluids comes from the phenomenon of φ diffusion between substances, but the diffusion between molecules cannot be combined with turbulence. Stream mixing is comparable. If only relying on the diffusion phenomenon between molecules, even in a flow path of only a micrometer wide, the mixed length of several centimeters is still not uniform, which is one of the challenges of the micromixer. The phenomenon of mixing is simply a result of intermolecular diffusion and can be described by a molecular diffusion model (Fick'slaw), which is defined as J = - ADV c where diffusion flux and j represents the contact area of the two mixed fluids. It is the diffusion coefficient of the fluid molecule, and C is the concentration of the fluid, which is the concentration gradient of the fluid. Mixing under the same conditions is the essence of the fluid, and the silk material changes. The bribery of the two mixed dragons and the concentration gradient of the fluid are the ways in which the mixing is feasible, but the concentration gradient is not. Therefore, the mixing mode of the secret mixing II is mainly based on the contact area of the two mixed fluids. In the microchannel, the surface volume ratio of the flow_signal is quite large, and the structure of the fluid can be effectively changed by the geometry of the microchannel, the wall groove and the obstacles, and the fluid is generated in a large amount. Folding and stretching to increase the fluid diffusion contact surface, making fluid mixing more uniform and fast. 7 1290483 A prior art micromixer is shown in the first figure (WO Pat. No. 03/011443 A2) 'This famous passive micromixer (1〇), in the mixing chamber ((1) at the bottom, to Microfabrication techniques produce trenches (12a), (12b), (12c), (12d), (12e), and (12f) with special geometries. This specially designed trench allows fluid to flow perpendicular to the flow. The velocity vector of the direction causes the fluid to perform a helical flow to produce a stretching and folding effect to achieve a sufficient mixing effect. Another prior art micromixer is shown in the second figure (Us Pat· Ν〇·2005/0232076 A1), the main feature of this design is to use the upper and lower flow channels to overlap the overlap ^ (〇Verlappmg) to enhance the mixing effect. When the dissimilar fluid flows in from the inlets (21), (22), at the intersection (23) Due to the overlapping of the flow channels, the fluids in the upper and lower layers interact to form a local fluid to steer rapidly in a tumble manner, effectively enhancing the folding, stretching effect and contact area of the fluid. When the fluid continues to move downstream, such as the third As shown in the figure, multiple mutual weights can be designed The areas (33), (34), and (35), once again overlap the area, and strengthen the mixing again. It is known from the above prior art that the mixing efficiency can be improved by the increase of the contact area. Various, but in the previous example (w〇Pat· Ν〇· 〇3/〇丨丨443 A2), the groove function is '200 μm wide, and in the 70 μm flow channel, if the mixing effect is to be completely mixed, then It is necessary to use filaments longer than the centimeters. Therefore, in order to make the mixing length of the micro-mixing|| as small as several millimeters, the new micro-mixer method and apparatus are proposed. The present invention is based on the prior art. In the absence of the idea of thinking and improving the invention, the present invention has invented the "micromixer with continuous grooves across the polygonal wall". SUMMARY OF THE INVENTION The main object of the present invention is to provide a micromixer that can In a very short distance, Example 8 1290483, such as within a few centimeters, 'mixes more than two fluids in the microchannel quickly and uniformly. The material that makes up the microchannel" can be 9, _, polymer and other ageing materials. Sexual materials, etc. Microflow It is fabricated and packaged with a micro-electromechanical process such as yellow light lithography. In addition to the inlet and the outlet, there is a specially designed continuous groove structure on the adjacent side wall of the mixed moon. The groove structure not only guides the fluid to generate horizontal and horizontal velocity vectors, but also enhances the traction in the vertical direction, thereby increasing the contact area to enhance the mixing effect. φ The micro-mixer of the present invention has a micro-channel width and height of 10. Below μηι; the width and width of the groove structure are less than 250 μηι, and the Reynolds number for fluids is less than 1〇〇, especially when the Reynolds number is i, which has better mixing effect than other mixers. The objects, technical features, features, and effects achieved by the present invention will become more apparent from the detailed description of the appended claims. [Embodiment] The present invention proposes a micromixer having a continuous groove spanning a polygonal wall, and the structure of one of the preferred embodiments is not intended to be as shown in the fourth figure. The micromixer (4) of the present invention comprises a flow path inlet (41a, 41b), a flow path outlet (45), and a mixing chamber (42), wherein the mixing chamber comprises a bottom surface groove (9) and a side wall surface groove (44), and These two types of grooves assume a connected state. The fifth figure shows an enlarged view of the A area of the fourth figure, and the arrangement of the bottom groove (51) and the face groove (8) can be clearly seen. The plurality of fluids are respectively separated from the left channel inlet (41a) and the right channel inlet (sufficiently mixed through the mixing chamber (42) and then flowed out of the micromixer through the channel outlet (45), after which the various components or The results of the mixer using the CFD-RC model of the four-figure software are shown in the sixth figure. Black and white represent the fluids of the two different components from the population, and the mixed color is 9 1290483 Between the two, it can be seen that the shed and the gray mark are used. The wealth index is used when the mixed index is used - M =
Ih-c^\dAJ Μ代表混合指數，其值介於0與i之間，〇代表完全沒有混合，i代表完全 混合。G代表某-位置的濃度％代表流道入口的漠度，〜代表下游無限遠 處的濃度，錢表某-截面積。第蝴為帶有底部斜向溝槽的微混合器之模 #擬圖，此混合的機制是底部溝槽將圖中黑色的流體帶人白㈣體的底 部，如此流動作用可以增加兩流體之接觸面積，但這動作只是將兩接觸面 由初始垂直織拉伸至水平；而本發着了底面溝槽做橫向水平的牵引之 外’延續底面溝槽之側壁面溝槽將垂直拉引流體，以增加橫向垂直方向上 的導引’如此便可增加流體間的接觸面積。本發明之側壁面溝槽除了應用 於上述的例子之外，亦可與㈣底部溝槽形狀作搭配，例如細專利(wo Pat. Να隨刚A2)中的鯡魚骨(如圖一，12e所示)混合器，當雷諾數為i， 鲁佩可雷特常數為2，_ ’流道尺寸的寬度為細_、高度為％ _、長度為 阳’其混合指數為0.2922 ;而在側壁上製作與底面溝槽相連接的側壁 面溝槽(如圖八所示）’其混合指數將高達0.3244，好理上本發明較純底面 溝槽之混合器有更好的混合效果’而且罐面溝槽之搭配性佳。以下將列 舉幾項本發明的實施例。 第九圖顯示本發明之最佳實施例之一的上視圖，在混合器㈣的流道結 構中，混合㈣有橫跨三個邊壁面之連續溝槽，包含流道底_斜向溝槽㈤ 以及左右兩側的侧壁面溝槽(93)，而底面溝槽(92)與主流道(91)夾一角度。 1290483 第十圖顯示本發明的最佳實施例之二的上視圖，其與實施例之一類似，混 .合腔内有橫跨三個邊壁面之連續溝槽，包含流道底面溝槽⑽)以及左右兩 ‘側的側壁面溝槽_，但其底面溝槽⑽)呈側躺的v字型排列。第十一圖 顯示本伽的最佳實施例之三的上簡，混合器⑽)中有三種類型的連續 溝槽排列，在主流道(111)前端部份為橫跨兩個邊壁面之連續溝槽，包含流 道底面的斜向溝槽(112)以及單側的侧壁面溝槽(113);中段溝槽⑽換第十 圖的連續溝槽之排列相同；後段溝槽(115)包含橫跨兩個_面之連續溝槽 以及底面溝槽，兩類溝槽交互呈現週期性排列。 本發明最佳實施_製程是_微機電的黃光微織程，重複數次黃 光製程，先將光阻經過塗佈、軟烤、曝光、硬烤等步驟製作出模仁，而後 利用二甲基矽氧烷(p〇1ydimethylsil〇xane，簡稱PDMS)的翻製過程，定義出 含有橫跨多邊壁面之連續溝槽形狀的流道本體，包含底面溝槽和側壁面溝 槽結構。最後再將流道本體與玻璃或是同為二甲基矽氧烷的平坦上蓋，經 • 過氧氣電漿儀表面處理接合，即成為微流體混合器的成品。 11 1290483 【圖式簡單說明】 圖式說明： 第一圖為習知技術之微混合器一 第二圖為習知技術之微混合器二之一 第三圖為習知技術之微混合器二之二 第四圖為本發明之最佳實施例之一 第五圖為本發明之最佳實施例的放大圖 φ 第六圖為最佳實施例之一的模擬分析結果 第七圖為先前技術之微混合器一的模擬分析結果 第八圖為本發明之最佳實施例之二 第九圖為最佳實施例之一的上視圖 第十圖為最佳實施例之二的上視圖 第十一圖為本發明的最佳實施例之三的上視圖 圖示符號說明 10 微混合器 11 混合腔 12a、12b、12c、12d、12e、12f 溝槽結構 20 交叉重疊式微混合器 21a 流道入口一 21b 流道入口二 22 交叉重疊區 12 1290483 30 微混合器 31a 流道入口一 31b 流道入口二 32、33、34 交叉重疊區 41 本發明微混合器之一 41a 流道入口一 41b 流道入口二Ih-c^\dAJ Μ represents a mixed index with a value between 0 and i, 〇 means no mixing at all, and i stands for complete mixing. G represents a certain concentration of the position - represents the infiltration of the inlet of the flow path, and ~ represents the concentration at the infinity of the downstream, and a certain cross-sectional area of the money table. The first butterfly is a model of a micro-mixer with a bottom oblique groove. The mechanism of this mixing is that the bottom groove brings the black fluid in the figure to the bottom of the white body, so that the flow can increase the two fluids. Contact area, but this action only stretches the two contact surfaces from the initial vertical weave to the horizontal; while the bottom groove is used for horizontal horizontal traction, the side wall groove of the bottom groove will continue to pull the fluid vertically. In order to increase the guidance in the lateral vertical direction, the contact area between the fluids can be increased. The sidewall groove of the present invention can be used in addition to the above-mentioned example, and can also be matched with the shape of the bottom groove, for example, the squid bone in the fine patent (wo Pat. Να随刚A2) (Fig. 1, 12e) Show) mixer, when the Reynolds number is i, the Rupper's constant is 2, _ 'the width of the flow channel is thin _, the height is % _, and the length is yang', the mixing index is 0.2922; and on the side wall The sidewall groove (as shown in Fig. 8) connected to the groove on the bottom surface is made to have a mixing index of up to 0.3244, which is better for the mixer of the purer groove of the present invention. The matching of the grooves is good. Several embodiments of the invention are listed below. Figure 9 is a top plan view showing one of the preferred embodiments of the present invention in which the mixing (4) has a continuous groove spanning three side wall faces, including a flow channel bottom _ oblique groove in the flow path structure of the mixer (4) (5) And the side wall groove (93) on the left and right sides, and the bottom groove (92) is at an angle to the main flow path (91). 1290483 shows a top view of a second preferred embodiment of the present invention, which is similar to one of the embodiments, wherein the mixing chamber has a continuous groove spanning three side wall faces, including a flow channel bottom groove (10) And the left and right side wall groove _, but the bottom groove (10) is arranged in a v-shape on the side. The eleventh figure shows the top of the third preferred embodiment of the present gamma. There are three types of continuous groove arrangements in the mixer (10), and the front end of the main channel (111) is continuous across the two side walls. The groove includes an oblique groove (112) on the bottom surface of the flow channel and a side wall groove (113) on one side; the middle groove (10) has the same arrangement as the continuous groove in the tenth view; the rear groove (115) includes The two types of groove interactions are periodically arranged across two contiguous grooves and a bottom groove. The best implementation of the invention _ the process is _ micro-electromechanical yellow light micro-weave, repeating several times of yellow light process, first the photoresist is coated, soft baked, exposed, hard baked and other steps to make the mold, and then use dimethyl The conversion process of p矽1ydimethylsil〇xane (PDMS for short) defines a flow channel body having a continuous groove shape across a polygonal wall surface, including a bottom groove and a sidewall groove structure. Finally, the flow channel body and the glass or the flat top cover of the same dimethyloxane are bonded to the surface of the oxygen plasma to become the finished product of the microfluidic mixer. 11 1290483 [Simple description of the drawings] Schematic description: The first figure is a micro-mixer of the prior art. The second figure is a micro-mixer of the prior art. The third figure is a micro-mixer of the prior art. The fourth figure is one of the preferred embodiments of the present invention. The fifth figure is an enlarged view of a preferred embodiment of the present invention. The sixth figure is a simulation analysis result of one of the preferred embodiments. The seventh figure is the prior art. The results of the simulation analysis of the micro-mixer 1 are the second embodiment of the preferred embodiment of the present invention. The ninth diagram is a top view of one of the preferred embodiments. The tenth diagram is the top view of the second embodiment of the second preferred embodiment. BRIEF DESCRIPTION OF THE DRAWINGS FIG. 3 is a top view of a preferred embodiment of the present invention. FIG. 10 micromixer 11 mixing chambers 12a, 12b, 12c, 12d, 12e, 12f trench structure 20 crossover micromixer 21a runner inlet A 21b flow path inlet two 22 crossover overlap area 12 1290483 30 micromixer 31a flow path inlet one 31b flow path inlet two 32, 33, 34 crossover overlap area 41 one of the micromixers of the present invention 41a flow path inlet a 41b flow path Entrance two
42 混合腔 43 底面溝槽結構 44 側壁面溝槽結構 45 流道出口 50 混合腔入口放大圖 51 底面溝槽結構 52 側壁面溝槽結構 90、 100、110 微混合器 91、 101、111 主流道 92、 102、112 底面溝槽結構 93、 103、113 側壁面溝槽結構 114、115 溝槽結構 1342 mixing chamber 43 bottom groove structure 44 side wall groove structure 45 flow path outlet 50 mixing chamber inlet enlarged view 51 bottom surface groove structure 52 side wall surface groove structure 90, 100, 110 micromixer 91, 101, 111 main channel 92, 102, 112 bottom groove structure 93, 103, 113 side wall groove structure 114, 115 groove structure 13