1286446 18014twfl.doc/006 96-2-6 九、發明說明： 【發明所屬之技術領域】 本發明係關於-種發光面板，特別是一種有機發光面 板及其製造方法。 【先前技術】 、資讯通汛產業已成為現今的主流產業，特別是可攜帶 ^的各種通訊顯示產品更是發展的重點。而由於平面顯示 益是人與資訊之間的溝通介面’因此其發展特別顯得重 要。目前應用在平面顯示器的技術包括有電漿顯示器 (Plasma Display Panel)、液晶顯示器（Li_ 以㈣1286446 18014twfl.doc/006 96-2-6 IX. Description of the Invention: TECHNICAL FIELD OF THE INVENTION The present invention relates to a light-emitting panel, and more particularly to an organic light-emitting panel and a method of manufacturing the same. [Prior Art] The information and communication industry has become the mainstream industry today, especially the various communication display products that can be carried are the focus of development. And because the flat display is the communication interface between people and information, its development is particularly important. Currently used in flat panel display technology includes Plasma Display Panel and liquid crystal display (Li_ to (4)
Display)、無機電激發光顯示器（1顏职心Display), inorganic electroluminescent display (1 Yan Zuoxin
EleCtr〇luminescent Display)、發光二極體㈦幽咖出叩 Diode)、真空螢光顯示器（Vacuum Flu〇rescence 力、 場致發射顯示器（Field Emission Display)以及電變色顯示 器(Electro_Chromic Display)等等。 相較於其他平面顯示器，有機發光面板或有機發光元 ㈣其自發光、無視角限制、省電、製程簡易、低成本、 刼作溫度範圍廣、高應答速度以及全彩化等等的優點，使 其具有極大的潛力，因此可望成為下—代平關示器之主 流。 有機發光面板或有機發光元件係一種利用有機官能性 材料(organic functi〇nai materials)的自發光特性來達到顯 示效果的元件。其發光結構係由一對電極以及有機官能層 所構成。當電流通過透明陽極及金屬陰極間，使電洞和電 12腸傲 twfl .doc/006 96-2-6 :==層内結合而產生激子時，便可以使有 、“、、/、材料之特性，而產生不同顏色之放光機制。 一回1為習知技術中有機發光面板之示意圖，有 j係形成於透明玻璃基板11上，有機發光Tt件依序^含 其中極I2、一絕緣層13、一有機官能層14以及一陰極15。 ::，陽極12係由複數個透明電極所組成；而陰極15# 與陽極12垂直。 係 ^照圖2 ’為了避免陽極12與陰極15間的短路， 屑本公開特許公報第平8-315981號揭露了一個晝素定義 二13’ ’其係形成於具有複數陽極12之基板u上。在每 二個晝素定義層13,上，都有—個突出的(。她吨㈣部 习二稱為阻隔層（separator) 131。其中，晝素定義層13，係 由，阻構成，例如聚亞醯胺(P〇lyimide);而阻隔層則是由 :氧化梦所構成。在晝素定義層13，上部具有突出的阻隔 曰，13/1，其伸出方向係與基板表面平行。形成晝素定義層 13’之後，有機官能層14以及陰極15則依序形成。其中曰， 陰極15則被晝素定義層13,以及阻隔層ι31分隔，使得陰 極15彼此絕緣。在此發明中，避免了陽極12與陰極^ 間的短路，尤其是在陰極邊緣上的短路，但是卻易發生阻 隔層131剝落的現象。 因此，美國專利第6,570,323號揭示了 一有機發光元 =中晝素定義層及阻隔層之製造方法，以解決阻隔層會剝 落的現象。在此發明中，畫素定義層係由氮化矽或二&化 石夕，經過電漿輔助化學氣相沉積(PECVD)形成在基板上， 12864徹 4twfl.doc/006 96-2-6 ，、中基板係為具有複數帛—編 $ 義層之上。丄過曝光、顯影後’阻隔層即形成於此畫素定 細此、、':而办由於旦素定義層以及阻隔層是由不同的材料所 組成，以致於在製程上會有些問題產生十斤 = 二次的硬烤製程，因此阻隔層位:以 ί =:容易會產生移位以及對位不準的問題。 的i著3，，質不相同’晝素定義層及阻隔層之間 處，產生剝落的現象，並造成可層靠=:= 點均為製造有機發光面板過程中 _ 〃 技術_，也是相關業者關二焦產*與良率之 爰因於此’本發明提出一種可 =間會移位及對位不準問題之「有機發光二= 【發明内容】 法，有機發光面板及其製造方 題，尤1是^移m對位不準問 發光義層及阻隔層係為負光阻層娜 勺人緣是，為達上述目的，本發贿供—财機發光 W配置於基板上的複數個晝素，畫素係包含一有機發光 12864侦 4twfl.doc/〇〇6 96-2-6 少：晝素定義層、以及至少-阻隔層配置於書去 ，/、中，有機發光元件係依序包含一第一電^ 至二有機宫能層配置於第一電極或阻隔層上以 二羞么晝素定義層係配置於第一_或基板上；且查音 疋義層及阻隔層係為負光阻。 且息素 *法為提供:種有機發光面板之製造 負f且層於第—負光阻層之上；曝光第二負 弟負光阻層以及第二負光阻層至^ ΐ第二t至广&隔層’其中’至少部份 上,·沉積至係形成於畫素定義層： 沉積至少-第二電極二=極或阻隔層上;以及 其是製造方法，尤 容易產生移位以及對位不準的問題 === 及阻隔層會的問題，而且製程簡單，因;二:= *了產品的可靠度，也提昇了製程的產量與良Ρ大认 為4本發明之上述特徵和優點能更明顯易懂 =式】並配合所附圖式，作詳細說明如下。， 以下將參照相關圖式，說明依本發明較佳實施例之一 96-2-6 I2864^4twfl.doc/〇〇6 種有機發光面板及其製造方法，其中相同的元件將以相同 的參照符號加以說明。 請參照圖3所示，依本發明之較佳實施例之有機發光 面板係包含配置於基板21上的複數個晝素；晝素係包含一 有機發光元件、至少一畫素定義層23,以及至少一阻隔層 24配置於畫素定義層上。其中，有機發光元件依序包含一 第一電極22、至少一有機官能層（未顯示於圖中）配置於第 一電極或阻隔層上、以及一第二電極(未顯示於圖中）；晝 素定義層23係配置於第一電極22或基板21上，阻隔層 24係配置於晝素定義層23上，有機官能層係配置於第一 電極22或阻隔層24上，且晝素定義層23及阻隔層24係 為負光阻。 在本實施例中，基板21可為一玻璃基板、或一塑膠基 板、或是一柔性基板，在此，塑膠基板與柔性基板可為一 承奴酉夂酉日（polycarbonate，PC )基板、一聚醋（p〇]yester，PET ) 基板、一環烯共聚物（cyclic olefm copolymer, COC )基板、 一金屬鉻合物基材一環烯共聚物（metallocene-based cyclic olefm copolymer，mCOC )基板或一薄型玻璃（Thin Glass ) 〇 第一電極22係為一透明電極，且形成於基板2i上。 在本貫施例中’透明電極層22係以濺鑛（SpUttering)或 是離子電鍍（ion plating)的方式形成於基板21上。第一 電極22的材料係為一導電之金屬氧化物，其中導電之金屬 氧化物可為氧化銦錫（ITO)、氧化鋁鋅（AZO)或氧化銦 12864徹 014twfl.doc/006 96-2-6 鋅（IZO) ’且其厚度一般約在5⑻人以上。 晝素定義層23係形成於第一電極22或基板21上；至 少部份之畫素定義層23及第一電極22係相互交錯，以形 成畫素區域。阻隔層24係分別形成於畫素定義層23上， 以分隔在晝素上的第二電極。在本實施例中，畫素定義層 23及阻隔層24係以任一種類之負光阻形成，例如··聚亞 酉&月女(polyimide)、乙酸丙一醇單甲基_酯(pr〇pyiene giyc〇i monomethyl ether acetate)、盼酸樹脂㈣⑹趾 resin)、聚經 基苯乙烯樹脂(polyhydroxy styrene type resin)或光酸產生 d(photoacid generator)及父聯劑（cr〇ssiinking agent)之混合 物。而，顯影用之顯影液係為鹼性顯影液。 有機官能層係形成於第一電極22或阻隔層24上，而 第二電極餘置於有機官能層上。此第二電極係經由蒸鑛 (evapyrization)或濺錢(sputtering)以形成於基板21上。另 外’第二電極之材料係選自鋁、鈣、鎂、銦、錫、錳、銀、 金以及含鎂之合金至少其中之―，其巾含鎂之合金係包含 但不限定於鎂銀(Mg:Ag)合金、鎮|gJ(Mg:In)合金、鎮錫 (Mg:Sn)合金、鎂銻(Mg:Sb)合金以及鎂碲(Mg:Te)合金等 等0 此外，本發明之有機發光面板，更可包含有一封合元 件(未示於圖中），其係配置於基板21上，以封合第一 ^極 22、晝素定A層23、阻隔層24、有機官能相及第二電極。 依本發明之較佳實施例之有機發光面板之製造方法， 請參照下列圖4至圖7之圖式。 4twfl.doc/006 96-2-6 一如圖4所不，本發明之有機發光面板之製造方法係包 含-晝素定義層與阻隔層形成程序ρι、一有機官能層形成 程序P2以及一第二電極形成程序P3。 ^於晝素疋義層與阻隔層形成程序P1中，如圖5所示， 係提供具有至少-第一電極之一基板(sl〇);塗佈一第一負 ，阻層於基板之上(S20);曝光第一負光阻層（S3〇); 塗佈^一 ^負光阻層於第-負光阻層之上(S4G);曝光第二負光阻 15 〇)，以及顯影第-負光阻相及第二貞光阻層(s 6 〇)， C少一晝素定義層以及至少-阻隔層。經過書素定 ^與阻隔層形成程序P1，可於第—電極上形成由第一負 光阻顯影後產生之畫素定義> 、 產生之阻隔層。 義層Μ及由弟一負光阻顯影後 第畫更f包義含層層形成程序。ι於形成 ，以及於形成第光;-負 理⑼1)施加於第二負光阻層。因此，加速 2烤處 及第二負光阻層之固化。 、 負光阻層 能層係沉積至少-有機官 另外，如圖7所示，本笋 包含—封合元件 造方 …’係將封合元件形成於基板!， 12864仇twfl._6 96-2-6 mi層：隔層、有機官能層以及第二電極。 負光阻所組：:所:本:明之!素定義層與阻隔層均係以 不會有習知技術巾，因^，’晝素定義層與阻隔層間 移位現象。再者二為：之熱膨脹係數不同所造成的 以相同材質之負光阻所=中，晝素定義層與阻隔層均係 所以，相對於料=、=，所以’兩者間之附著力較佳， 層與阻隔層之情形而^之j光阻;作晝素定義 更由於本發鶴均^/杨佳之仏可靠度。另外， 得有機發光面板製4=製 了習知技術在勢作*正上而一:人顯衫製程，並且不但省略 的清洗動作ί!忒素定義層後塗佈負光阻前 的污染。政翻間化製程的效果，更可以減少環境 的問d ί Γ月不僅可以有效解決習知技術所存在 雖然太^日乂製程的步驟與成本，並兼具環保效益。 本於明、、'、彳/已以實施例揭露如上’然其並非用以限定 本=之=關技術顧巾具㈣f知識者，在不脫離 太二夕了,二乾圍内，當可作些許之更動與潤飾，因此 準：㈣賴當視後附之申料·騎界定者為 【圖式簡單說明】 圖1係4知有機發光面板之立體示意圖。 圖2係習知之另—有機發光面板之侧視示意圖。 圖3係本發明較佳實施例有機發光面板之立體示意 12 12864舶 14twfl.doc/006 96-2-6 圖。 圖4係本發明較佳實施例有機發光面板之製造方法之 流程圖。 圖5係圖4所示本發明較佳實施例中之晝素定義層與 阻隔層形成程序的流程說明圖。 曰 圖6係圖4所示本發明較佳實施例中之晝素 阻隔層形成程序的另一流程說明圖。 我日與 造方法之EleCtr〇 luminescent display), light-emitting diode (7) Diode), vacuum fluorescent display (Vacuum Flu〇rescence force, Field Emission Display, Electro_Chromic Display, etc.) Compared with other flat-panel displays, organic light-emitting panels or organic light-emitting elements (4) have the advantages of self-illumination, no viewing angle limitation, power saving, simple process, low cost, wide temperature range, high response speed, and full color. It has great potential, so it is expected to become the mainstream of the next-generation leveling device. The organic light-emitting panel or organic light-emitting element is a self-luminous property using organic functional materials (organic functi〇nai materials) to achieve the display effect. The light-emitting structure is composed of a pair of electrodes and an organic functional layer. When current flows between the transparent anode and the metal cathode, the hole and the electric 12 are proudly twfl.doc/006 96-2-6 :== When exciton is generated in combination, it is possible to have the characteristics of ",, /, material, and produce a light-emitting mechanism of different colors. One time is a conventional technique. The schematic diagram of the organic light-emitting panel is formed on the transparent glass substrate 11, and the organic light-emitting Tt member sequentially includes a pole I2, an insulating layer 13, an organic functional layer 14, and a cathode 15. ::, 12 The cathode 15# is composed of a plurality of transparent electrodes; and the cathode 15# is perpendicular to the anode 12. In order to avoid a short circuit between the anode 12 and the cathode 15, a sputum is disclosed in Japanese Laid-Open Patent Publication No. Hei 8-315981. The definition of the two is 13'' is formed on the substrate u having the plurality of anodes 12. On each of the two halogen-defined layers 13, there is a prominent (the ton (four) part of the second called the barrier layer ( Separator 131. wherein the halogen defining layer 13 is composed of a resist, such as polydecylamine, and the barrier layer is composed of: an oxidative dream. In the halogen defining layer 13, the upper portion has The protruding barrier 曰, 13/1, has a protruding direction parallel to the surface of the substrate. After forming the halogen defining layer 13', the organic functional layer 14 and the cathode 15 are sequentially formed. Among them, the cathode 15 is defined by the halogen. Layer 13, and barrier layer ι31 are separated such that cathodes 15 are insulated from each other. In this invention, a short circuit between the anode 12 and the cathode is avoided, especially a short circuit on the edge of the cathode, but the peeling of the barrier layer 131 is liable to occur. Thus, an organic light-emitting element = medium is disclosed in U.S. Patent No. 6,570,323. A method for fabricating a halogen-defining layer and a barrier layer to solve the phenomenon that the barrier layer is peeled off. In the invention, the pixel-defined layer is formed by tantalum nitride or two & fossil, plasma-assisted chemical vapor deposition ( PECVD) is formed on the substrate, 12864 is 4twfl.doc/006 96-2-6, and the middle substrate is above the complex layer. After the exposure and development, the 'barrier layer is formed in this pixel to define this, ': and because the denier definition layer and the barrier layer are composed of different materials, so that there will be some problems in the process.斤 = secondary hard-baked process, so the barrier level: with ί =: easy to produce displacement and misalignment problems. i, 3, the quality is different - between the definition layer of the halogen and the barrier layer, the phenomenon of spalling occurs, and the layer can be layered =:= points are in the process of manufacturing organic light-emitting panels _ 〃 technology _, is also relevant The industry is concerned with the production of the second coke and the yield of the product. The present invention proposes an organic light-emitting device, which can be used for the problem of misalignment and misalignment, and an organic light-emitting panel and a manufacturer thereof. Question, especially 1 is the shift of m, the position of the illuminating layer and the barrier layer are negative photoresist layers. In order to achieve the above purpose, the bribe supply and the financial mechanism are arranged on the substrate. A morpheme, the element contains an organic illuminating 12864 Detective 4twfl.doc/〇〇6 96-2-6 Less: 昼素 definition layer, and at least - barrier layer is placed in the book, /, in the organic light-emitting element system Having a first electrophoretic layer to a second organic layer capable of being disposed on the first electrode or the barrier layer, wherein the layer is defined on the first substrate or the substrate; and the sound layer and the barrier layer are The system is a negative photoresist. The method of providing the organic light-emitting panel is negative and f is layered on the first-negative photoresist layer. Above; exposing the second negative-negative photoresist layer and the second negative photoresist layer to the second t-to-wide & interlayer 'where at least part of the deposition layer is formed on the pixel definition layer: Depositing at least - the second electrode on the second electrode or the barrier layer; and it is a manufacturing method, which is particularly prone to problems of displacement and misalignment === and the problem of the barrier layer, and the process is simple, because; = * The reliability of the product, and the production of the process is also improved. The above-mentioned features and advantages of the present invention can be more clearly understood and described in detail with reference to the drawings, as follows. 6 kinds of organic light-emitting panels according to a preferred embodiment of the present invention, 96-2-6 I2864^4 twfl.doc/〇〇, and a manufacturing method thereof will be described with reference to the related drawings, wherein the same elements will be denoted by the same reference numerals. The organic light-emitting panel according to the preferred embodiment of the present invention comprises a plurality of halogen elements disposed on the substrate 21; the halogen element comprises an organic light-emitting element and at least one pixel defining layer 23 And at least one barrier layer 24 is disposed on the pixel definition layer. The organic light emitting device sequentially includes a first electrode 22, at least one organic functional layer (not shown) disposed on the first electrode or the barrier layer, and a second electrode (not shown); The layer 23 is disposed on the first electrode 22 or the substrate 21, the barrier layer 24 is disposed on the halogen defining layer 23, and the organic functional layer is disposed on the first electrode 22 or the barrier layer 24, and the halogen defining layer 23 and The barrier layer 24 is a negative photoresist. In this embodiment, the substrate 21 can be a glass substrate, a plastic substrate, or a flexible substrate. Here, the plastic substrate and the flexible substrate can be a slave. Polycarbonate (PC) substrate, a polyacetate (PET) substrate, a cyclic olefm copolymer (COC) substrate, a metal chromite substrate, a metallocene-based cyclic The olefm copolymer, mCOC) substrate or a thin glass (Thin Glass) 〇 first electrode 22 is a transparent electrode and is formed on the substrate 2i. In the present embodiment, the transparent electrode layer 22 is formed on the substrate 21 by sputtering or ion plating. The material of the first electrode 22 is a conductive metal oxide, wherein the conductive metal oxide may be indium tin oxide (ITO), aluminum zinc oxide (AZO) or indium oxide 12864. 014twfl.doc/006 96-2- 6 Zinc (IZO) 'and its thickness is generally about 5 (8) or more. The halogen defining layer 23 is formed on the first electrode 22 or the substrate 21; at least a part of the pixel defining layer 23 and the first electrode 22 are interlaced to form a pixel region. A barrier layer 24 is formed on the pixel defining layer 23, respectively, to separate the second electrode on the pixel. In the present embodiment, the pixel defining layer 23 and the barrier layer 24 are formed by any kind of negative photoresist, for example, polyaluminium & polyimide, propylene glycol monomethyl-ester ( Pr〇pyiene giyc〇i monomethyl ether acetate), acid resin (4) (6) toe resin, polyhydroxy styrene type resin or photoacid generator d (photoacid generator) and parental agent (cr〇ssiinking agent) a mixture. Further, the developing solution for development is an alkaline developing solution. The organic functional layer is formed on the first electrode 22 or the barrier layer 24 while the second electrode remains on the organic functional layer. This second electrode is formed on the substrate 21 via evapyrization or sputtering. In addition, the material of the second electrode is selected from at least one of aluminum, calcium, magnesium, indium, tin, manganese, silver, gold and magnesium-containing alloys, and the magnesium-containing alloy of the towel includes but is not limited to magnesium silver ( Mg:Ag) alloy, town|gJ (Mg:In) alloy, tin (Mg:Sn) alloy, magnesium lanthanum (Mg:Sb) alloy, magnesium lanthanum (Mg:Te) alloy, etc. Further, the present invention The organic light-emitting panel further includes a bonding component (not shown) disposed on the substrate 21 to seal the first electrode 22, the bismuth layer A, the barrier layer 24, and the organic functional phase. And a second electrode. For the method of fabricating the organic light-emitting panel according to the preferred embodiment of the present invention, please refer to the following figures of FIGS. 4 to 7. 4 twfl.doc/006 96-2-6 As shown in FIG. 4, the method for fabricating the organic light-emitting panel of the present invention comprises a halogen-defining layer and a barrier layer forming program ρι, an organic functional layer forming program P2, and a first The two electrodes form the program P3. In the 昼 昼 疋 与 layer and barrier layer forming process P1, as shown in FIG. 5, a substrate having at least one of the first electrodes is provided (sl〇); a first negative is applied, and the resist layer is on the substrate (S20); exposing the first negative photoresist layer (S3 〇); coating a negative photoresist layer over the first negative photoresist layer (S4G); exposing the second negative photoresist 15 〇), and developing The first-negative photoresist phase and the second tantalum photoresist layer (s 6 〇), C have less than one halogen-defined layer and at least a barrier layer. After the book is formed and the barrier layer forming program P1, the pixel definition generated by the first negative photoresist can be formed on the first electrode, and the barrier layer is formed. After the layering of the layer and the development of a negative photoresist by the younger brother, the first painting has a layer forming procedure. Ii is formed and formed in the first light; - (9) 1) is applied to the second negative photoresist layer. Therefore, the curing of the 2 baking portion and the second negative photoresist layer is accelerated. The negative photoresist layer can be deposited at least - organic officials. As shown in Figure 7, the bamboo shoots contain the sealing element. The 'sealing element is formed on the substrate!, 12864. twfl._6 96-2 -6 mi layer: barrier layer, organic functional layer and second electrode. Negative photoresist group:: This: Ben: Ming! Both the definition layer and the barrier layer are not subject to the technical towel, because of the shift between the definition layer and the barrier layer. The second is: the negative thermal resistance of the same material caused by the difference in thermal expansion coefficient = medium, the definition layer of the halogen and the barrier layer are both, so compared with the material =, =, so the adhesion between the two Good, the layer and the barrier layer of the situation ^ ^ j photoresist; as a definition of alizarin more due to the reliability of this hair crane ^ / Yang Jia. In addition, the organic light-emitting panel system 4=made the conventional technology in the trend of the current one: the man-made shirt process, and not only the omitted cleaning action 忒! The definition of the layer after the coating of the negative photoresist before the contamination. The effect of the inter-departmental process can reduce the environmental requirements. Γ Γ 不仅 不仅 不仅 不仅 不仅 不仅 不仅 不仅 不仅 不仅 不仅 不仅 不仅 不仅 不仅 不仅 不仅 不仅 不仅 不仅 不仅 不仅 不仅 不仅 不仅 不仅 不仅 不仅 不仅 不仅 不仅 不仅 不仅 不仅 不仅 不仅 不仅 不仅Ben Yuming, ', 彳/ has been exposed as above in the examples. However, it is not intended to limit the ================================================== Make some changes and refinements, so the standard: (4) Depends on the appendix and the definition of the rider is [simplified description of the drawing] Figure 1 is a three-dimensional schematic diagram of the organic light-emitting panel. 2 is a schematic side view of another conventional organic light-emitting panel. 3 is a perspective view of an organic light-emitting panel according to a preferred embodiment of the present invention. 12 12864 14 twfl.doc/006 96-2-6. Figure 4 is a flow chart showing a method of fabricating an organic light-emitting panel in accordance with a preferred embodiment of the present invention. Fig. 5 is a flow chart showing the procedure for forming a halogen defining layer and a barrier layer in the preferred embodiment of the present invention shown in Fig. 4. Figure 6 is a flow chart showing another flow of the halogen barrier layer forming process in the preferred embodiment of the present invention shown in Figure 4; My day and the method of making it
圖7係本發明較佳實施例有機發光面板之製 另一流程圖。 【主要元件符號說明】 11 :透明玻璃基板 12 :陽極 13 :絕緣層 13’ ：畫素定義層 131 :阻隔層 14 :有機官能層 15 :陰極 21 :基板 22 :第一電極 23 :畫素定義層 24 :阻隔層 P1〜P4 :有機發光元件製造方法之程序 S10〜S60:畫素定義層與陴隔層形成步驟 13Fig. 7 is another flow chart showing the manufacture of an organic light-emitting panel in accordance with a preferred embodiment of the present invention. [Main component symbol description] 11: Transparent glass substrate 12: Anode 13: Insulating layer 13': pixel defining layer 131: Barrier layer 14: Organic functional layer 15: Cathode 21: Substrate 22: First electrode 23: Picture definition Layer 24: Barrier Layers P1 to P4: Procedures for Manufacturing Method of Organic Light-Emitting Element S10 to S60: Pixel Definition Layer and Barrier Layer Formation Step 13