1286084 17813twf.doc/006 九、發明說明： 【發明所屬之技術領域】 本發明是有關於一種混合器，且特別是有關於—種具 有微型幫浦（micro pump)之微型混合器，其適於將多牙重 液體或氣體均勻混合。 【先前技術】 近年來隨著微奈機電技術科技的蓬勃發展，使得許多 研究領域均有往微米、奈米空間尺度(scale)探討其特性= 趨勢。其中，微機電技術被廣泛應用於如機械、航太、化 工、材料、生物醫學、電子電機以及光電等領域上。舉例 ，言，在生物醫學的應用上，如檢體的檢測、基因工程、 藥物研發等等，經由微機電技術所製作、可以提供大量資 讯並且能快速檢驗之生醫晶片已格外地受到重視。 、 利，微機電技術所製作之生醫晶片可以將微流道、致 ^種ίΓ器以及生物檢體等元件整合在單一晶片上，所 與㈣兼具取樣、輸送、_選、分離、混合 驗系統忾：:广：途。因此，這種生醫晶片不但可以將檢 點則化’也可以铜快速反應、_檢驗時間之優 這些:::受生 幾何形狀以拎力心由…其主要是利用晶片中流道的 外，生醫曰曰=中的擾動程度而達到混合的目的。另 體與受體二的利用主動式的混合機制來達成這些檢 曰、他合，其主要是在生醫晶片中加入可動式 1286084 17813twf.doc/006 的元件，以利用外力達成混合的效果。 承上所述，上述之被動式或主動式的生醫晶片通常需 要外接一微型幫浦，以使得生醫晶片内的這些檢體與受體 受到微型幫浦的推動而產生流動。然而，這種外接微型幫 浦的生醫晶片的設計卻不利於實際上的應用。此外，為了 增加這些檢體與受體在生醫晶片内的混合效率，生醫晶片 内的幾何形狀往往相當複雜。如此一 4，這樣_的流 道設計不但會增加生醫晶片的製作難度，也會增加這些檢 體與受體在生醫晶片内流動時的壓力損失。 【發明内容】 本發明的目的就是在提供一種微混合器，其具有較低 的製作成本以及良好的混合效果。 本發明的再一目的是提供一種微混合器，其内建有微 型幫浦。 Λ 基於上述目的及其他目的，本發明提出一種微混合 器’其適於料觀縣氣體混合。此微混合_包括一本 體以及-振動7L件。此本體具有多個第—腔室、—振動妒 室、-混合流道、-第二腔室、—傳輸流道、多個凸塊、工 -第-漸織以及-第二漸魏。第—腔室適於容納這也 液體或氣體。混合流道之—蠕與這些第—腔室連接，另— 端與振動腔^連接。傳輸流道之-端連接於振動腔室，另 -端連接於第二腔室。這些⑽交錯地配置於混合流道之 相對的兩内壁上。第-漸輯配置於混合流道之内壁，其 8 1286084 17813twf.doc/006 中第一漸縮塊之靠近振動腔的截面積小於遠離振動腔的戴 面積。第二漸縮塊配置於輸送流道之内壁，其中第二漸縮 塊之靠近第二腔室的截面積小於遠離第二腔室的截面積。 振動元件配置於本體之表面上，其中振動元件的位置是對 應於振動腔室。振動元件適於接收一電子訊號而產生振 動，並且經由此振動而改變振動腔室的容積，以將這些^ 體自這些第一腔室泵吸至第二腔室。 < 在本發明之一實施例中，上述之本體包括一上基板以 及一下基板，其中上基板是配置於該下基板之一接合表面 上。 在本發明之一實施例中，上述之上基板具有一第一凹 陷圖案。第一凹陷圖案在上基板與下基板之間形成這些第 一腔室、混合流道、振動腔室、傳輪流道以及第二腔室。 在本發明之一實施例中，上述之上基板具有一第一凹 陷圖案’並且下基板具有一第二凹陷圖案。第一凹陷圖案 與第二凹陷圖案在上基板與下基板之間形成這些第一二 室、混合流道、振動腔室、傳輸流道以及第二腔室。 在本發明之一實施例中，上述之振動元件為一壓電 膜。 / 在本發明之一實施例中，上述之微混合器更包括多個 第一漸縮塊，配置於混合流道之内壁。 在本發明之一實施例中，上述之微混合器更包括多個 第二漸縮塊，配置於輸送流道之内壁。 在本發明之一實施例中’上述之凸塊介於該第一漸縮 9 本發明因將振動元件配罟 ':第-漸縮J以及幕二漸縮塊配置於混合i道 : = : = :經由振動元件的振動而使微， 器 此 兩1286084 17813twf.doc/006 IX. Description of the Invention: [Technical Field] The present invention relates to a mixer, and more particularly to a micro-mixer having a micro pump suitable for Mix the multidental liquid or gas evenly. [Prior Art] In recent years, with the vigorous development of micro-electromechanical technology, many research fields have explored its characteristics = trend toward micrometer and nanoscale scales. Among them, MEMS technology is widely used in such fields as machinery, aerospace, chemical, materials, biomedicine, electronic motors and optoelectronics. For example, in biomedical applications, such as the detection of samples, genetic engineering, drug development, etc., biomedical wafers produced by MEMS technology that can provide a large amount of information and can be quickly tested have been particularly valued. . , and the biomedical technology wafers produced by MEMS can integrate components such as microchannels, sputum detectors and biopsy on a single wafer, and (4) combine sampling, transport, _selection, separation and mixing. System inspection:: wide: way. Therefore, this biomedical wafer can not only make the inspection point 'can also be quickly reacted with copper, _ inspection time is better::: the geometry of the input is made by the force of the heart... it mainly uses the outside of the flow channel in the wafer, The degree of disturbance in the doctor's order = the purpose of mixing. The combination of the body and the receptor 2 uses an active mixing mechanism to achieve these tests. The main purpose is to add a movable component of 1286084 17813twf.doc/006 to the biomedical wafer to achieve the effect of mixing by external force. As mentioned above, the above-mentioned passive or active biomedical wafers usually require an external micro-pump to cause the samples and receptors in the biomedical wafer to be driven by the micro-pull. However, the design of this external micro-pump biomedical wafer is not conducive to practical applications. In addition, in order to increase the mixing efficiency of these samples and receptors in biomedical wafers, the geometry within the biomedical wafers tends to be quite complex. In this way, the flow channel design will not only increase the difficulty of making biomedical wafers, but also increase the pressure loss of these specimens and receptors flowing in the biomedical wafer. SUMMARY OF THE INVENTION An object of the present invention is to provide a micromixer which has a low manufacturing cost and a good mixing effect. It is still another object of the present invention to provide a micromixer having a built-in micro pump. Λ Based on the above and other objects, the present invention provides a micromixer which is suitable for gas mixing in the county. This micro-mixing_includes a body as well as - a 7L piece of vibration. The body has a plurality of first chambers, a vibration chamber, a mixed flow passage, a second chamber, a transport flow passage, a plurality of bumps, a work-first-gradual weave, and a second weir. The first chamber is adapted to contain this liquid or gas. The mixing channel is connected to the first chamber, and the other end is connected to the vibration chamber. The end of the transport channel is connected to the vibrating chamber and the other end is connected to the second chamber. These (10) are alternately arranged on the opposite inner walls of the mixing flow path. The first-gradation is disposed on the inner wall of the mixing flow path, and the cross-sectional area of the first tapered block adjacent to the vibration cavity in 8 1286084 17813 twf.doc/006 is smaller than the wearing area away from the vibration cavity. The second tapered block is disposed on the inner wall of the conveying flow passage, wherein a sectional area of the second tapered block adjacent to the second chamber is smaller than a sectional area away from the second chamber. The vibrating element is disposed on a surface of the body, wherein the position of the vibrating element corresponds to the vibrating chamber. The vibrating element is adapted to receive an electronic signal to generate vibration and to vary the volume of the vibrating chamber via the vibration to pump the bodies from the first chamber to the second chamber. < In an embodiment of the invention, the body includes an upper substrate and a lower substrate, wherein the upper substrate is disposed on one of the bonding surfaces of the lower substrate. In an embodiment of the invention, the upper substrate has a first recessed pattern. The first recess pattern forms the first chamber, the mixed flow path, the vibration chamber, the transfer flow path, and the second chamber between the upper substrate and the lower substrate. In an embodiment of the invention, the upper substrate has a first recess pattern and the lower substrate has a second recess pattern. The first recess pattern and the second recess pattern form the first two chambers, the mixed flow path, the vibration chamber, the transport flow path, and the second chamber between the upper substrate and the lower substrate. In an embodiment of the invention, the vibrating element is a piezoelectric film. In an embodiment of the invention, the micromixer further includes a plurality of first tapered blocks disposed on an inner wall of the mixing flow channel. In an embodiment of the invention, the micro-mixer further includes a plurality of second tapered blocks disposed on the inner wall of the conveying flow path. In an embodiment of the invention, the above-mentioned bump is interposed between the first taper 9 and the present invention is configured by arranging the vibrating member: the first-tapered J and the second divergent block are arranged in the hybrid i-track: = : = : by the vibration of the vibrating element, the micro, the two
1286084 17813twf.doc/006 塊與該振動腔室之間 内之液體或氣體之整體的沪無缸m 6 + ^ 6 外，太私義且;^ Γ 定之錢方向流動。 外本4明因具有夕個交錯地配置於混合流道之 内壁上的凸塊，因此本發明能夠使液體間、 咬、丧= 間的混合更為迅速丨。 夜亂 為讓本發明/上述和其他目的、特徵和優點能更 易懂，下文特舉較佳實施例，並配合所附圖式，作詳細★兒 明如下。 w 【實施方式】 圖1A繪示為本發明之一實施例之微混合器的上視示 意圖。圖1B繪示為圖1Ai剖面線A_A，的剖面線示意圖。 圖1C繪示為圖1A之剖面線B-B，的剖面線示意圖。請共 同參照圖ΙΑ、1B與1C，微混合器100適於將多種流體予 以混合，其中這些流體可以為氣體或是液體。微混合器1〇〇 主要包括一本體200以及一振動元件300。本體200主要 包括一上基板200a以及一下基板200b，其中上基板2〇〇a 配置於下基板200b之接合表面202上，並且上基板2〇〇a 與下基板200b之材質例如為玻璃、矽晶片、壓克力、聚曱 基丙烯酸甲酯（PMMA)、聚二甲基矽氧烷(PDMS)或是其 它類似的材質。 下基板200b具有一凹陷圖案，其位於下基板200b之 10 1286084 17813twf.doc/006 接合表面202上’疋以此凹陷圖案在上基板2〇Qa與下基 板200b之間會形成多個第一腔室210、一振動腔室22〇、 一混合流道230、一第二腔室240、一傳輸流道25〇、多個 凸塊260、一第一漸縮塊270以及一第二漸縮塊28〇。 值得注意的是，本實施例並非用以限定本發明，在本 發明之其他實施例中，凹陷圖案更可以配置在上基板2〇〇a 上。另外，在本發明之其他實施例中，上基板2〇如與下基 丨板200b亦可以同時具有凹陷圖案。 這些第一腔室210適於容納多種流體，其中這些流體 可以為氣體或液體。混合流道230之一端與這些第一腔室 210連接，而其另一端與振動腔室220連接。傳輸流道25〇 之一端與振動腔室220連接，而其另一端與第二腔室24〇 連接。 這些凸塊260交錯地配置於混合流道230之相對的兩 内壁上，其中這些凸塊260之平行於接合表面202之截面 的形狀例如是三角形、方形、梯形或是其它可能的形狀。 第一漸縮塊270配置於混合流道230之内壁，其中第 一漸縮塊270之靠近振動腔220的截面積小於第一漸縮塊 270之运離振動腔220的截面積。值得注意的是，本實施 例並未限定第一漸縮塊270之幾何形狀，第一漸縮塊270 的外型可以為楔形、四面體、錐體或是其它符合上述條件 之幾何外形。此外，雖然在本實施例中混合流道230内僅 配置有一個第一漸縮塊270，然而本實施例並非用以限定 本發明，在本發明之其他實施例中，本體200可更可以具 1286084 17813twf.doc/〇〇6 ‘· } 有多個第一漸縮塊270。 第二漸縮塊280配置於輪送流道25〇之内壁，其中第 讀縮塊，之靠近第二腔室24〇的截面積小於第^漸縮 塊280遠離第二腔室的截面積。值得注意的是，本實施例 並未限定第二漸馳280之幾何形狀，第二漸縮塊28〇的 外型可以為楔形、四面體、錐體或是其它符合上述條件之 成何外形。此外’雖，然在本貫施例中傳輸流道細内僅配 置有一個第二漸縮塊280，然而本實施例並非用以限定本 發明，在本發明之其他實施例中，本體2〇〇可以具有多個 第二漸縮塊280。 振動元件300配置於下基板2〇〇b之表面上，其中振動 元件300的位置是對應於振動腔室230。振動元件3〇〇\例 如是一壓電薄膜，其中振動元件300適於接受一電子訊號 以在震動方向D上產生往覆的震動，而此電子訊號的波升】 例如是一方波或是其它可以使振動元件3〇〇在震動方向D 上產生往覆震動的訊號波形。 • 在本實施例中，微混合器100更包括多個注入管件290 以及輸出管件295，其中這些注入管件290是貫穿上基板 200a以與這些第一腔室210連通，輸出管件295是貫穿上 基板200a以與第二腔室240連通。如此一來，當振動元件 300接受到一電子訊號而產生振動時，前述之流體便可以 經由這些注入管件290而流入這些第一腔體21〇内，並且 混合後的這些流體的混合物亦可以經由輪出管件295而被 排除至微混合器1〇〇之外，其中推動這些流體產生流動的 12 1286084 17813twf.doc/006 機制將於下述段落中詳細的說明。 圖2A繪不為圖iA之振動腔室< 意圖。圖2B繪示為圖」A之振動 、也、張k的面不 ^ FI ^ ^ 1之各積擴張時流體之 ^動方向的不思圖。請共同參照圖2a = 體地說明微混合器100中之流2B為了具 以下的缆明中县脾笛Γ 流動機制，本實施例在 外型定義為截面積為梯形之塊體。弟::她塊280之 之斜邊與混合流道23〇所夾之二例漸縮塊咖 ，塊27G之中心線與混合流道23()之内壁實質上平<_ 第二斬縮塊27G之斜邊與傳輸流道25()所夾之角度例=為 弟一漸縮塊280與傳輸流道250所形成之最窄流道寬 度為5〇μηι，第二漸縮塊28〇之中心線與傳輸流 之 内壁實質上平行。 之 當振動元件300向下彎曲時，振動腔室230亦會受振 動兀件300的驅動而使得振動腔室23〇之容積逐漸地增 加。此時微混合器1〇〇内之流體會從這些第一腔室21〇以 及第二腔室240流向振動腔室220，其中流經第一漸縮塊 27〇之流體會受到一第一阻力，流經第二漸縮塊280之流 體會党到一第二阻力。值得注意的是，由於流體流經第一 漸縮塊270時，第一漸縮塊270與混合流道23〇之内壁之 間的間距是逐漸變大的，並且由於流體流經第二漸縮塊 2870時，第二漸縮塊280與傳輸流道250之内壁之間的間 距卻是逐漸變小的，因此第一流阻會小於第二流阻。是以， 13 1286084 17813twf.doc/006 自這些第一腔室210流向振動腔室22〇之流體的漭息-於以及自第二腔室240流向振動腔室22〇之流體的=上大 圖3A繪不.為圖1A之振動腔室之容積擴張時的^里二 意圖。圖3B繪示為圖1A之振動腔室之容積擴張時；面不 流動方向的示意圖。請共同參照圖3A與圖3B，體之 件300向上位移時，振動腔室23〇亦會受振動元^ ^動元 驅動而使得振動腔室230之容積逐漸地縮小。此=的 1§ 100内之流體會從振動腔室220流向這些第一腔二％合 以及第二腔室240，其中流經第一漸縮塊270之流 到一第二阻力，流經第二漸縮塊28〇之流體會受到二二又 阻力。值得注意的是，由於流體流經第一漸縮塊27〇 =四 第一漸縮塊270與混合流道2 3 之内壁之間的間距是^ 變小的，並且由於流體流經第二漸縮塊28〇時，第二= 塊280與傳輸流道25〇之内壁之間的間距卻是逐漸變= 的，因此第三流阻會大於第四流阻。是以，自振動腔室22〇 μ向這些第一腔室21〇之流體的流量會小於自振動腔室 220流向第二腔室24〇之流體的流量。 二 、換句話說，當振動元件300接受電子訊號而產生往覆 式的振動’以使得振動腔室220的容積產生週期性的膨脹 ，收縮時，微混合器1〇〇内之流體的整體的流動是從這些 第一腔室210往第二腔室250流動。 人一圖4A緣示為混合流道内之流體的流場示意圖。圖4B 繪不為凸塊與凸塊之間之流體的流場示 意圖。請共同參照 图4A與圖4B ’當兩種不同的流體受到振動元件3〇〇的驅 14 1286084 17813twf.doc/006 動時，不同的流體將流經混合流道230並且開始混合。由 於受到這些凸塊260對混合流道230内之流場的影響，這 些流體會在混合流道230内會受到交錯的擾動。如此一 來’本實施例便可以藉由擾動以增加流體之間的強制對流 與接觸面積，其擾動的方式例如如圖4A所示。此外，凸 塊260之間亦會產生回流區，以使得這些流體於接觸後於 凸塊260之間藉由回流效果而加強混合的效果。 綜上所述，本發明之微混合器，至少具有下列優點： (1) 由於本發明之混合流道内配置有多個交錯排列 的凸塊，因此本發明能夠在極短的長度内均勻混合兩種以 上不同的流體，使混合更為迅速。 (2) 本發明是利用振動元件來改變振動腔室之容積 的大小以推動被混合裔内的流體，使以本發明不需連接至 額外的流齡練置，如注姆浦。此外，本發明也可搭 配攜帶式的電源，以使本發明在攜帶上更加的便利。再者， ^發明更可以搭配不同的感測器，以使本發明具有可即時 核驗的效果。 是以本發明具有低生產成 (3)本發明之結構簡單， 本之優點。 雖然本發明已以較佳實施例揭露 :ί本發明’任何熟習此技藝者，在不脫縣發= 内’當可作轉之更動與_，因此本發明 耗圍當視後附之申請專利範圍所界定者為準。 15 1286084 17813twf.doc/006 【圖式簡單說明】 圖1A繪示為本發明之一實施例之微混合器的上視示 意圖。 圖1B繪示為圖1人之剖面線八-八’的剖面線示意圖。 圖1C繪示為圖1A之剖面線B-B’的剖面線示意圖。 圖2A繪示為圖1A之振動腔室之容積擴張時的剖面示 意圖。1286084 17813twf.doc/006 The whole liquid or gas in the block between the block and the vibrating chamber is not too m2 + ^ 6 except for the liquid, and it is too private and flows in the direction of the money. Since the outer cover 4 has the bumps which are alternately arranged on the inner wall of the mixed flow path, the present invention can make the mixing between the liquids, the bites, and the nuisances more rapid. The present invention/the above-mentioned and other objects, features and advantages will become more apparent from the following detailed description. [Embodiment] Fig. 1A is a top view showing a micromixer according to an embodiment of the present invention. 1B is a cross-sectional view showing a section line A_A of FIG. 1A. 1C is a cross-sectional view showing the section line B-B of FIG. 1A. Referring collectively to Figures 1, 1B and 1C, the micromixer 100 is adapted to mix a plurality of fluids, which may be gases or liquids. The micromixer 1 〇〇 mainly includes a body 200 and a vibrating element 300. The main body 200 mainly includes an upper substrate 200a and a lower substrate 200b. The upper substrate 2A is disposed on the bonding surface 202 of the lower substrate 200b, and the materials of the upper substrate 2a and the lower substrate 200b are, for example, glass or germanium wafers. , acrylic, polymethyl methacrylate (PMMA), polydimethyl siloxane (PDMS) or other similar materials. The lower substrate 200b has a recessed pattern on the bonding surface 202 of the lower substrate 200b. The first substrate is formed in the recessed pattern between the upper substrate 2〇Qa and the lower substrate 200b. The chamber 210, a vibrating chamber 22, a mixing channel 230, a second chamber 240, a transport channel 25, a plurality of bumps 260, a first taper 270, and a second taper block 28〇. It should be noted that this embodiment is not intended to limit the present invention. In other embodiments of the present invention, the recess pattern may be disposed on the upper substrate 2〇〇a. Further, in other embodiments of the present invention, the upper substrate 2, for example, and the lower base plate 200b may have a concave pattern at the same time. These first chambers 210 are adapted to contain a plurality of fluids, wherein the fluids can be gases or liquids. One end of the mixing flow path 230 is connected to the first chambers 210, and the other end thereof is connected to the vibration chamber 220. One end of the transport flow path 25A is connected to the vibration chamber 220, and the other end thereof is connected to the second chamber 24B. The bumps 260 are alternately disposed on opposite inner walls of the mixing channel 230, wherein the shape of the sections of the bumps 260 parallel to the joint surface 202 are, for example, triangular, square, trapezoidal or other possible shapes. The first tapered block 270 is disposed on the inner wall of the mixing channel 230, wherein the cross-sectional area of the first tapered block 270 adjacent to the vibrating chamber 220 is smaller than the cross-sectional area of the first tapered block 270 away from the vibrating chamber 220. It should be noted that the embodiment does not define the geometry of the first tapered block 270. The shape of the first tapered block 270 may be a wedge shape, a tetrahedron, a cone or other geometric shape conforming to the above conditions. In addition, although only one first tapered block 270 is disposed in the mixing flow channel 230 in this embodiment, the present embodiment is not intended to limit the present invention. In other embodiments of the present invention, the body 200 may be more 1286084 17813twf.doc/〇〇6 '· } There are a plurality of first tapered blocks 270. The second tapered block 280 is disposed on the inner wall of the transfer flow channel 25, wherein the cross-sectional area of the first read shrinkage block adjacent to the second chamber 24A is smaller than the cross-sectional area of the second tapered block 280 away from the second chamber. It should be noted that this embodiment does not define the geometry of the second step 280. The shape of the second tapered block 28〇 may be a wedge, a tetrahedron, a cone or the like which conforms to the above conditions. In addition, although in the present embodiment, only one second tapered block 280 is disposed in the transport flow path, the present embodiment is not intended to limit the present invention. In other embodiments of the present invention, the body 2〇 The 〇 may have a plurality of second squashing blocks 280. The vibrating member 300 is disposed on the surface of the lower substrate 2b, wherein the position of the vibrating member 300 corresponds to the vibrating chamber 230. The vibrating element 3 〇〇 \ is, for example, a piezoelectric film, wherein the vibrating element 300 is adapted to receive an electronic signal to generate a creeping vibration in the vibration direction D, and the wave of the electronic signal is, for example, a square wave or the like. The vibration element 3 can be caused to generate a signal waveform of the shock in the vibration direction D. In the present embodiment, the micro-mixer 100 further includes a plurality of injection tubes 290 and an output tube 295, wherein the injection tubes 290 are penetrated through the upper substrate 200a to communicate with the first chambers 210, and the output tubes 295 are penetrated through the upper substrate. 200a is in communication with the second chamber 240. In this way, when the vibrating element 300 receives an electronic signal to generate vibration, the aforementioned fluid can flow into the first cavity 21 through the injection tube 290, and the mixed mixture of the fluids can also be The tube 295 is rotated out of the micromixer 1 , where the mechanism of pushing these fluids to flow 12 1286084 17813 twf.doc/006 will be described in detail in the following paragraphs. Figure 2A depicts the vibration chamber of Figure iA <intention. Fig. 2B is a view showing the flow direction of the fluid when the vibration of the graph "A" and the surface of the sheet k are not expanded by FI ^ ^ 1 . Referring to Fig. 2a in detail, the flow 2B in the micromixer 100 is physically described. For the flow mechanism of the spleen flute in the following cable, the present embodiment is defined as a block having a trapezoidal cross-sectional area. Brother:: The two sides of the slanted edge of the block 280 and the mixed flow channel 23 渐 are the cascading block, the center line of the block 27G and the inner wall of the mixed flow channel 23 () are substantially flat < _ second contraction The angle between the oblique side of the block 27G and the transport flow path 25() = the narrowest flow path width formed by the taper block 280 and the transport flow path 250 is 5〇μηι, and the second tapered block 28〇 The centerline is substantially parallel to the inner wall of the transport stream. When the vibrating member 300 is bent downward, the vibrating chamber 230 is also driven by the vibrating element 300 so that the volume of the vibrating chamber 23 is gradually increased. At this time, the fluid in the micromixer 1〇〇 flows from the first chamber 21〇 and the second chamber 240 to the vibrating chamber 220, wherein the fluid flowing through the first tapered block 27 receives a first resistance. The fluid flowing through the second tapered block 280 will have a second resistance to the party. It is noted that as the fluid flows through the first tapered block 270, the spacing between the first tapered block 270 and the inner wall of the mixing channel 23 is progressively larger and due to fluid flow through the second taper. At block 2870, the spacing between the second tapered block 280 and the inner wall of the transport channel 250 is progressively smaller, so the first flow resistance will be less than the second flow resistance. Therefore, 13 1286084 17813twf.doc/006 the suffocation of the fluid flowing from the first chamber 210 to the vibrating chamber 22 and the fluid flowing from the second chamber 240 to the vibrating chamber 22 3A is not painted. It is the intention of the volume expansion of the vibration chamber of Fig. 1A. Fig. 3B is a schematic view showing the direction in which the surface does not flow when the volume of the vibrating chamber of Fig. 1A is expanded. Referring to FIG. 3A and FIG. 3B together, when the body member 300 is displaced upward, the vibration chamber 23 is also driven by the vibration element to gradually reduce the volume of the vibration chamber 230. The fluid within 1 § 100 of this = will flow from the vibrating chamber 220 to the first chamber and the second chamber 240, wherein the flow through the first constricting block 270 to a second resistance flows through The fluid of the two tapered blocks will be subject to two or two resistances. It is to be noted that since the fluid flows through the first tapered block 27 〇 = the distance between the first first tapered block 270 and the inner wall of the mixed flow path 2 3 is small, and since the fluid flows through the second gradual When the block is 28 〇, the distance between the second block 280 and the inner wall of the transport channel 25 逐渐 is gradually changed, so the third flow resistance is greater than the fourth flow resistance. Therefore, the flow rate of the fluid from the vibrating chamber 22A to the first chambers 21 will be smaller than the flow rate of the fluid flowing from the vibrating chamber 220 to the second chamber 24. 2. In other words, when the vibrating element 300 receives the electronic signal to generate a superimposed vibration 'to cause the volume of the vibrating chamber 220 to periodically expand, when contracting, the entire fluid in the micro-mixer 1 Flow is from these first chambers 210 to the second chamber 250. Figure 4A shows the flow field of the fluid in the mixing channel. Figure 4B depicts the flow field of the fluid between the bumps and the bumps. Referring collectively to Figures 4A and 4B', when two different fluids are moved by the vibrating element 3, the different fluids will flow through the mixing channel 230 and begin mixing. Due to the influence of these bumps 260 on the flow field in the mixing channel 230, these fluids may be staggered in the mixing channel 230. Thus, the present embodiment can be used to increase the forced convection and contact area between fluids by disturbance, such as shown in Fig. 4A. In addition, a reflow zone is also created between the bumps 260 to allow the fluids to enhance the mixing effect between the bumps 260 by the reflow effect after contact. In summary, the micromixer of the present invention has at least the following advantages: (1) Since the mixed flow channel of the present invention is provided with a plurality of staggered bumps, the present invention can uniformly mix two in a very short length. The above different fluids make the mixing more rapid. (2) The present invention utilizes a vibrating element to vary the volume of the vibrating chamber to promote fluid within the mixed population, so that the present invention does not require connection to additional fluid ages, such as immersion. In addition, the present invention can also be equipped with a portable power source to make the present invention more convenient to carry. Furthermore, the invention can be combined with different sensors to give the present invention an immediate verification effect. The invention has the advantages of low production, (3) the structure of the invention is simple, and the present invention is advantageous. Although the present invention has been disclosed in the preferred embodiments: the invention of the present invention is not subject to the artisan, and can be used as a change in the present invention. The scope is defined. 15 1286084 17813 twf.doc/006 BRIEF DESCRIPTION OF THE DRAWINGS FIG. 1A is a top view of a micro-mixer according to an embodiment of the present invention. Fig. 1B is a cross-sectional view showing the hatching of the human figure of Fig. 1 taken from eight to eight'. Fig. 1C is a schematic cross-sectional view taken along line B-B' of Fig. 1A. Fig. 2A is a cross-sectional view showing the expansion of the volume of the vibrating chamber of Fig. 1A.
圖2B繪示為圖1A之振動腔室之容積擴張時流體之流 I 動方向的示意圖。 圖3A繪示為圖1A之振動腔室之容積擴張時的剖面示 意圖。 圖3B繪示為圖1A之振動腔室之容積擴張時流體之流 r動方向的示意圖。 圖4A繪不為混合流道内之流體的流場不意圖。 圖4B繪示為凸塊與凸塊之間之流體的流場示意圖。 【主要元件符號說明】 . 100:微混合器 200 :本體 200a :上基板 2⑻b :下基板 202 ··接合表面 210 ··第一腔室 220振動腔室： 230 :混合流道 16 1286084 17813twf.doc/006 240 :第二腔室 250 :傳輸流道 260 :凸塊 270 :第一漸縮塊 280 :第二漸縮塊 290 :注入管件 295 :輸出管件 300 :振動元件 D :震動方向Fig. 2B is a schematic view showing the flow direction of the fluid when the volume of the vibrating chamber of Fig. 1A is expanded. Figure 3A is a cross-sectional view showing the volume of the vibrating chamber of Figure 1A as it expands. Fig. 3B is a schematic view showing the flow direction of the fluid when the volume of the vibrating chamber of Fig. 1A is expanded. Figure 4A depicts a flow field not intended for a fluid within a mixing channel. 4B is a schematic view showing a flow field of a fluid between a bump and a bump. [Main component symbol description] 100: Micromixer 200: Body 200a: Upper substrate 2 (8) b: Lower substrate 202 · Engagement surface 210 · First chamber 220 Vibration chamber: 230: Mixed flow path 16 1286084 17813twf.doc /006 240: second chamber 250: transport flow path 260: bump 270: first tapered block 280: second tapered block 290: injection tube member 295: output tube member 300: vibrating member D: vibration direction