1276588 九、發明說明： 【發明所屬之技術領域】 本發明是關於使用音波的放射壓，在保持物體於浮昇狀 態或在浮昇狀態下傳送的音波浮昇裝置。 【先前技術】 液晶或PDP(電漿顯示器）等的玻璃基板大型化，成爲1500 X 1 8 00mm以上的基板尺寸。爲了防止這種基板的撓曲或防 止髒東西附著於基板，要求有使物體浮昇的裝置。 使物體浮昇於空中的物體浮昇裝置已被提出使用音波的 放射壓之裝置。而且，使用長條的平板狀的振動體，藉由 利用振動體的振動造成的音波的放射壓，使物體浮昇，而 使在前述振動體產生進行波而浮昇的物體移動的物體浮昇 傳送裝置被提出（例如參照日本特開2002- 1 378 1 7號公報）。 若爲了增加物體的傳送距離而使用長條的振動板，則振動 板的撓曲變大，在振動板的端部與中央附近高度會變化， 而難以在穩定的浮昇狀態下傳送物體。在上述公報所揭示 的物體浮昇傳送裝置中，爲了解除此情況不佳，在振動板 的長方向的中間部中，配設與振動板的底面抵接，用於抑 制該振動板的撓曲之撓曲防止構件。 但是，在上述公報所記載的物體浮昇傳送裝置中，由於 是以抵接於振動板底面的撓曲防止構件抑制長條的掘動板 的撓曲變大之構成，故隨著振動板的振動，振動板反覆抵 接於撓曲防止構件，有振動板或撓曲防止構件摩耗這種問 題。爲了抑制摩耗而使其在振動小的位置抵接的話，結果 撓曲防止構件的配置有限制。 1276588 另一方面，傳送物體的距離短的情形可用使用短的振動 板之物體浮昇傳送裝置來傳送，惟傳送物體的距離長的情 形需串聯配置複數個物體浮昇傳送裝置來傳送物體。但 是，串聯配置複數個物體浮昇傳送裝置來傳送物體的情 形，爲了圓滑地進行使浮昇狀態的物體由一方的物體浮昇 傳送裝置的振動板上換乘到他方的物體浮昇傳送裝置的振 動板上，需精度佳地進行兩物體浮昇傳送裝置的對準 (alignment)的調整。而且，傳送寬度寬的物體的情形，也 有並聯配置複數個物體浮昇傳送裝置，進行物體的浮昇傳 送的情形，惟該情形也需精度佳地進行各物體浮昇傳送裝 置的對準的調整。而且，使用的物體浮昇傳送裝置的數目 越多，其調整越費事。 【發明內容】 本發明的目的係提供一種音波浮昇裝置，使用長條的振 動板在浮昇狀態下傳送物體時，即使增加振動板的長度也 能抑制振動板的撓曲，可在穩定的浮昇狀態下傳送物體。 而且，本發明的其他目的係提供一種音波浮昇裝置，於使 用複數個具備長條的振動板之音波浮昇傳送裝置，在浮昇 狀態下傳送物體時，在接鄰的音波浮昇傳送裝置間，可在 穩定的浮昇狀態下移載物體。 爲了達成前述目的，本發明係提供一種具有長條的振動 板與激振手段之音波浮昇裝置。音波浮昇裝置係藉由利用 激振手段使振動板激振，使音波由振動板產生，藉由此音 波的放射壓使物體浮昇。具備使前述音波反射的反射面之 音波反射手段係配設於可藉由朝前述振動板使前述音波反 1276588 射，抑制前述振動板的撓曲的位置。 本發明更提供具備串聯配置的複數個音波浮昇傳送裝置 之音波浮昇裝置。各音波浮昇傳送裝置具有長條的振動板 與激振手段。各音波浮昇傳送裝置係藉由利用前述激振手 段使振動板激振，使音波由振動板產生，藉由此音波的放 射壓，在浮昇狀態下傳送物體。在前述音波浮昇傳送裝置 間，物體可在浮昇狀態下移載。具備使前述音波反射的反 射面之音波反射手段，係至少配設於與前述音波浮昇傳送 裝置間的物體之移載位置對應的位置。 【實施方式】 以下，依照第1(a)圖〜第3(b)圖說明具體化本發明的第一 實施形態。 如第1(a)圖、第1(b)圖所示，作爲音波浮昇裝置的物體 浮昇傳送裝置11係具備複數座（在本實施形態中爲兩座）音 波浮昇單元12a、12b。.音波浮昇單元12a、12b係配設於被 支柱13支持的支持板14上。各音波浮昇單元12a、12b具 備被激振手段激振的振動板15。振動板1 5係形成比應在浮 昇狀態下傳送的物體1 6的寬度還窄的寬度之矩形平板 狀，並且互相平行配設，可與應在浮昇狀態下傳送的物體 1 6共同保持浮昇。物體1 6例如爲像液晶面板的玻璃基板之 薄的板狀物體。振動板1 5係形成長條。長條係意味著振動 板1 5振動時的波長的1 〇倍以上的長度。 各振動板1 5係被作爲兩個支持部的喇叭形揚聲器 (horn) 1 7a、17b支持。喇叭形揚聲器17a、17b係形成扁平 的略長方體狀，在其前端中藉由螺絲1 8對各振動板1 5締 1276588 結。喇叭形揚聲器1 7a、1 7b對各振動板1 5在其長方 部附近中以與長方向垂直的狀態下被安裝。振動板1 5 端部係成自由端。 各喇叭形揚聲器1 7 a、1 7 b係在締結有振動板1 5的 相反側的面中固定於振子1 9。喇叭形揚聲器1 7a、1 7b 端面係形成與振子1 9的軸方向垂直的平面，在喇叭形 器17a、17b以及振子19的中心軸朝垂直方向延伸的 下被配置。 振子19係使用所謂的郎格文（Langevin)形振子。振· 係藉由以未圖示的螺栓鎖緊固定一對環狀的壓電 20a、20b、配置於壓電元件20a、20b間的環狀的電極板 配置於與壓電元件20a、20b的外側面抵接的位置之金 22a、22b而構成。螺栓係由金屬塊22b側螺合於形成 屬塊22a的未圖示的螺絲孔。兩金屬塊22a、22b係藉 栓成互相導通的狀態。在金屬塊22a的上端形成有 (flange)23(圖示於第1(b)圖），金屬塊22a係在嵌合於 於支持板1 4的孔的狀態下被螺栓24固定於該支持板 此外，在支持板14與凸緣23之間依照需要中介安裝 隙片（shim)23a(圖示於第2(b)圖）。 使締結於振動板1 5的第一端部之喇叭形揚聲器1 7a 的振子1 9係連接於振盪器26。電極板2 1係經由配線 與振盪器26連接。振盪器26的接地端子係經由配線 連接於金屬塊22b。使締結於振動板1 5的第二端部之 形揚聲器17b激振的振子19不連接於振盪器26,而連 當作由電阻R以及線圈L構成的能量變換手段之負荷 向端 的兩 面的 的前 揚聲 狀態 子19 元件 21、 屬塊 於金 由螺 凸緣 形成 14 ° 有塡 激振 t 25a 25b 喇叭 接於 電路 1276588 配設有開 :26以及 段。振盪 的控制信 :開關27a 振，在開 而激振。 第二端部 的圖示。 使由振動 2(a)圖所 作爲支持 的反射板 辰動板1 5 於與振動 係形成矩 12b的複 泛振子1 9 •段2 8的 面之底面 I子19係 27。在連接振子1 9與負荷電路27的配線的中途 關 27a。 藉由喇叭形揚聲器17a、17b、振子19、振盪著 負荷電路27構成有使各振動板1 5激振的激振手 器26以及開關27a係藉由來自未圖示的控制裝置 號，被例如條紋狀模式驅動。在本實施形態中，泊 的接通（on)狀態下，振動板15使進行波產生而激 關27a的斷開（off)狀態下，振動板15使駐波產生 此外，在第1(a)圖中爲了圖示的方便起見，省略 側的振子19以及負荷電路27、凸緣23、螺栓24 在支持板1 4上配設有使在振動板1 5的激振時 板1 5發出的音波反射的音波反射手段28。如第 示，音波反射手段28係具備：底板（base pi ate) 29、 部的支柱30、具備反射面31a之當作反射構件 3 1，配設於使前述音波朝振動板1 5反射，可抑制 的撓曲的位置。在本實施形態中反射板3 1係配設 板1 5的長方向的中央面對面的位置。反射板3 1 形狀，反射面3 1 a係與構成兩音波浮昇單元1 2a、 數個振動板15垂直而配設。音波反射手段28以. 係配置於振動板1 5的下方。換言之，音波反射弓 反射面3 1 a係在當作互爲反向的振動板1 5的第一 與當作第二面的頂面之中，面向第一面（底面）。 面對振動板15的第一面（底面）。 反射板3 1的頂面的寬方向的兩側被倒角成圓弧狀。但是 倒角除了第2(a)圖外，其餘省略圖示。反射面31a在振動 1276588 板1 5的長方向具有由振動板1 5發出的音波的波長以上的 長度較佳。在本實施形態中，振動板1 5的長方向中的反射 面 3 1 a的長度，也就是說反射面3 1 a的寬度係形成約 100mmo 前述反射面3 1 a係可調整高度而配設。在本實施形態中 如第2(a)圖所示，支柱30係由下側部30a與上側部30b構 成。在下側部30a的兩端形成有雄螺絲部30c。在上側部 3 0b的下端形成有與雄螺絲部30c螺合的雌螺絲部。在底板 29也形成有與雄螺絲部30c螺合的雌螺絲部。兩雄螺絲部 3 0c係螺絲的方向互相形成反向。藉由使下側部30a在一方 向旋轉，兩雄螺絲部30c螺合於雌螺絲部，藉由在他方向 旋轉，以減少兩雄螺絲部30c與雌螺絲部的螺合量。因此， 藉由在使反射板3 1與振動板1 5垂直的狀態下使下側部30a 旋轉，而使反射板3 1的高度，也就是說反射面3 1 a的高度 被調整。也就是說反射面3 1 a與振動板1 5的間隔被調整。 其次說明如前述構成的裝置的作用。 締結有喇叭形揚聲器17a、17b的振子19係以預定的共 振頻率（例如20kHz左右）激振，經由喇叭形揚聲器17a、17b 使振動板1 5激振而進行撓曲振動。藉由由振動板1 5產生 (放射）的音波的放射壓，使物體16由振動板15的表面浮 昇。 振動板1 5的振動係由喇叭形揚聲器1 7b傳達到連接於負 荷電路27的振子19，藉由構成連接於負荷電路27的振子 19的壓電元件20a、20b使機械能的振動能量轉換成電能。 若在開關27a接通狀態時使振動板1 5激振，則該電能被負 -10- 1276588 荷電路27的電阻R轉換成焦耳熱（Joule’s 此，在各振動板1 5所生的振動波變成朝一 波（在本實施形態中係由喇叭形揚聲器17a 17b前進的進行波），物體16由振動板15 二端部在浮昇狀態下被傳送。而且，若在 狀態時使振動板1 5激振，則在振動板15 1 6在浮昇狀態下被保持於一定位置。 對於以一台物體浮昇傳送裝置1 1增加乘 離，需增加（成長條）各振動板15的長度。 置在兩位置支持振動板1 5使其振動的構试 止裝置，則如在第1(b)圖以鏈線顯示的， 曲，很難在穩定的狀態下傳送物體1 6。但 態中，藉由振動板1 5的振動由振動板1 5 射板3 1的反射面3 1 a朝振動板1 5反射。 射面3 1 a反射的音波的放射壓，在非接觸 板1 5的撓曲。 而且，若振動板15變長，則在無應浮# 態下使振動板1 5被激振時，有振動板1 5 ί 昇所使用的頻率之基本頻率不同的頻率大 性。但是，藉由配設反射面3 1 a，可防止產 動。 爲了使由反射面3 1 a反射的音波的放射 振動板15，完成前述功效，需由反射面3 部部分。反射面3 1 a的寬度爲前述波長的 形如第3(b)圖所示，需反射面31a的長方 h e a t)而發散。因 方向前進的進行 朝喇叭形揚聲器 的第一端部到第 開關27a爲斷開 產生駐波，物體 3體1 6的傳送距 但是，如習知裝 :中，若無撓曲防 振動板大大地撓 是，在本實施形 發出的音波在反 而且，藉由由反 狀態下防止振動 卜的物體1 6之狀 £與物體1 6的浮 大地振動的可能 生前述異常的振 壓有效地作用於 1 a反射音波的腹 半波長左右的情 向的中央配置於 1276588 與音波的腹部部分面對面的位置。由振動板1 5僅放射駐波 的情形係由反射面3 1 a反射音波的腹部部分，惟放射進行 波的情況也有變成不由反射面3 1 a反射音波的腹部部分的 狀態的情形。 但是，在本實施形態中，對應振動板1 5的長方向之反射 面3 1 a的長度具有由振動板1 5發出的音波的一波長以上。 因此，反射面3 1 a的位置在振動板1 5的長方向中即使與任 意位置面對面的情形，音波也都是駐波、進行波的任一個， 音波的腹部部分也必定會成爲由反射面3 1 a反射的狀態。 在本實施形態中爲了傳送寬度寬的物體1 6，在支持板1 4 上倂設有兩座音波浮昇單元12a、12b。兩音波浮昇單元 1 2a、1 2b係共同在浮昇狀態下傳送物體1 6。此時，對於在 穩定狀態下浮昇傳送物體16,需進行兩音波浮昇單元12a、 12b的對準調整，俾兩音波浮昇單元12a、12b的振動板15 使物體1 6浮昇於水平狀態而傳送。 在本實施形態中當進行對準調整時，在支持板1 4上暫時 固定兩音波浮昇單元1 2 a、1 2 b。在反射板3 1與兩振動板1 5 垂直的狀態下固定音波反射手段28於與兩振動板1 5的長 方向的大致中央對應的位置。而且，鬆弛固定金屬塊22a 的螺栓24,在振子1 9可朝上下方向移動的狀態下使振動板 1 5激振。而且，進行反射面3 1 a的高度調整，俾藉由兩音 波浮昇單元12a、12b的振動板15，使物體16在水平狀態 下以所希望的浮昇距離浮昇。在此狀態下，在支持板14.的 頂面與凸緣23之間中介安裝塡隙片23a後，鎖緊螺栓24， 固定金屬塊22a亦即振子19。因此，與在無音波反射手段 -12- 1276588 28的狀態下對各音波浮昇單元12a、12b交互進行塡隙片調 整的情形比較，精度佳地進行對準調整變的簡單。 本實施形態具有以下的優點。 (1 )、在以激振手段使長條的振動板1 5激振，藉由來自振 動板1 5的音波的放射壓使物體1 6浮昇的音波浮昇裝置 中，具備使前述音波反射的反射面3 1 a之音波反射手段28 係配設於使音波朝振動板1 5反射，可抑制振動板1 5的撓 曲之位置。因此，與習知的撓曲防止裝置不同，可在非接 觸狀態下抑制振動板1 5的撓曲。因此，使用長條的振動板 1 5在浮昇狀態下傳送物體1 6時，即使增加振動板1 5的長 度也能抑制振動板1 5的撓曲，可在穩定的浮昇狀態下傳送 物體1 6。因在非接觸狀態下防止激振時的振動板1 5的撓 曲，故可防止因支持部與振動板1 5的碰撞之重複造成的異 音的產生。而且，因可防止塵埃的產生，故適合在潔淨室 (clean room)等使用。而且，可防止在無應浮昇的物體16 的狀態下，振動板1 5在與物體1 6的浮昇所使用的頻率之 基本頻率不同的頻率大大地振動之異常的振動。而且，因 可增加振動板1 5的長度，故即使是以往需要使用兩台具備 短的振動板之物體浮昇傳送裝置來傳送之距離，也能以一 台物體浮昇傳送裝置11傳送。 (2)、因可減少振動板1 5的激振時的撓曲量，故可緩和作 用於振動板15與喇叭形揚聲器17a、17b的接合部之應力， 使穩定的動作爲可能。 (3 )、因反射面3 1 a配置於與振動板1 5的長方向的大致中 央對應的位置，故可有效地防止振動板1 5的撓曲。 -13- 1276588 (4) 、因反射面31a在振動板15的長方向具有由振動板15 發出的音波的波長以上的長度。因此，即使反射面3 1 a的 位置在振動板1 5的長方向中配置於任意位置，音波的腹部 部分也必定會成爲由反射面3 1 a反射的狀態，與反射面3 1 a 的長度比一波長短的情形比較，音波反射手段28的配設位 置的自由度變高。 (5) 、反射面31a係配設成可調整高度。因此，藉由調整 反射面3 1 a的高度，亦即反射面3 1 a與振動板1 5的間隔， 可調整振動板1 5的撓曲量。而且，藉由反射面3 1 a的高度 調整，使振動板1 5成大致水平，可使物體1 6的浮昇距離 大致一定。而且，可減小振動板1 5的激振時的撓曲量。 (6) 、複數個（在本實施形態中爲兩個）振動板15係平行地 配設。此等振動板1 5係共同浮昇保持物體1 6。因此，即使 是寬度寬（例如寬度爲1 m以上）的物體1 6，也能在穩定的浮 昇狀態下傳送。 (7) 、音波反射手段28的反射面31a係與複數個振動板15 交叉（在本實施形態中係垂直）而配設。因此，藉由在激振 狀態下進行各振動板1 5的對準調整，可簡單地進行精度佳 的對準調整。 (8 )、音波浮昇裝置係由振動板1 5使進行波產生，在浮昇 狀態下傳送物體1 6之構成。因此，無須另外配設賦予推力 至浮昇狀態的物體1 6之推進力賦予手段，使構成變的簡 單 ° (9)、音波浮昇裝置係可切換成由振動板15使進行波產生 的狀態與產生駐波的狀態而構成。因此，藉由切換成由振 -14- 1276588 動板1 5產生駐波的狀態’可在浮昇狀態下保持物體1 6於 一定位置。 (1 0)、反射板3 1的頂面的寬方向的兩側係被倒角成圓弧 狀。因此，當由振動板1 5與反射面3 1 a接觸的非激振狀態 開始振動板1 5的激振時，可抑制因振動板1 5與反射面3 1 a 的碰撞造成的異音的產生。 其次，依照第4(a)圖、第4(b)圖說明本發明的第二實施 形態。本實施形態的音波浮昇裝置係以激振手段使長條的 振動板1 5激振，藉由來自振動板15的音波的放射壓，在 浮昇狀態下傳送物體1 6之音波浮昇傳送裝置係串聯配置 複數個而構成，在前述音波浮昇傳送裝置間可在浮昇狀態 下移載物體16。而且，具備反射面31a的音波反射手段28 至少配設於與前述音波浮昇傳送裝置間的物體1 6的移載 位置對應的位置。與前述第一實施形態同一的部分係附加 同一符號、，省略詳細的說明。省略支柱30的雄螺絲部30c 等的圖不。 如第4(a)圖所示，作爲音波浮昇裝置的物體浮昇傳送裝 置4 1係串聯配置有複數台（在本實施形態中爲兩台）音波浮 昇傳送裝置42而成。各音波浮昇傳送裝置42係具有與第 一實施形態的物體浮昇傳送裝置1 1相同的構成。也就是 說，各音波浮昇傳送裝置42係複數個音波浮昇單元12a、 1 2b平行地配置而成。音波浮昇單元1 2b係對音波浮昇單元 12a配置於第4(a)圖中的內面側。音波反射手段28係配設 於與音波浮昇傳送裝置42間的物體1 6的移載位置對應的 位置，以及與各音波浮昇傳送裝置42的振動板15的長方 -15- 1276588 向的大致中央對應的位置。 各音波反射手段2 8係共用於分別平行地配置的兩 浮昇單元12a、12b的振動板15而構成。 在配置於與物體1 6的移載位置對應的位置之音波 手段28的反射板31的頂面，如第4(b)圖所示，形成 部3 1 b，俾朝反射板3 1的寬方向的中央上方有效地反 各振動板1 5放射的音波的一部分。也就是說，反射面 不爲平面，而是一部分具備凹面。 串聯配置的各振動板1 5的間隔係設定爲：由配置於 體1 6的移載位置對應的位置之反射面3 1 a反射的音波 自振動板1 5的間隙朝上方前進。 在本實施形態的物體浮昇傳送裝置4 1中進行各音 昇單元12a、12b的對準調整的情形，首先係進行具有 的音波浮昇傳送裝置42之內的一方（例如第4(a)圖中 側）的音波浮昇傳送裝置42的對準調整。具體上，與 第一實施形態的情形一樣，在振子1 9可朝上下方向移 狀態下使振動板15激振，藉由兩音波浮昇單元12a， 的振動板15,使物體16在水平狀態下以所希望的浮昇 浮昇而進行反射面3 1 a的高度調整。 其次，進行他方的音波浮昇傳送裝置42的對準調整 調整係在該音波浮昇傳送裝置42的音波浮昇單元1 2a 的振子1 9可朝上下方向移動狀態下使振動板1 5激振 且，進行配置於振動板1 5中央的音波反射手段2 8的 面3 1a的高度調整，俾藉由兩音波浮昇單元12a、12b 動板1 5，使物體1 6在水平狀態下以所希望的浮昇距 音波 反射 有凹 射由 31a 與物 容易 波浮 兩台 的左 前述 動的 .12b 距離 。該 > 12b 0而 反射 的振 離浮 -16- 1276588 昇。而且，進行配置於與移載位置對應的位置之音波反射 手段2 8的反射面3 1 a的高度調整。在進行兩音波反射手段 2 8的反射面3 1 a的高度調整的狀態下，在支持板1 4的頂面 與凸緣23之間中介安裝塡隙片23a後，螺栓24被鎖緊， 金屬塊22a亦即振子19被固定。 因此，比在與兩音波浮昇傳送裝置42間的物體1 6的移 載位置對應的位置無音波反射手段28的狀態下，進行各音 波浮昇單元1 2a、12b的對準調整的情形，精度佳地進行對 準調整變的簡單。 其次說明如前述構成的裝置的作用。 本實施形態的物體浮昇傳送裝置41係兩座音波浮昇傳 送裝置42同時被驅動，締結於喇叭形揚聲器17a的振子19 以預定的共振頻率（例如20kHz左右）激振，俾各音波浮昇 單元12a、12b的振動板15成相同的振動狀態。而且，藉 由負荷電路27的作用，使在各振動板1 5所生的振動波變 成朝一方向前進的進行波（在本實施形態中係由喇叭形揚 聲器17a朝喇叭形揚聲器17b前進的進行波），物體16由振 動板1 5的一端到他端在浮昇狀態下被傳送。 在與兩音波浮昇傳送裝置42間的物體1 6的移載位置對 應的位置配置有反射面3 1 a。因此，由振動板1 5放射的音 波的一部分在反射面3 1 a被反射，由振動板1 5之間放射到 上方。因此，與不存在反射面3 1 a的情形比較，使物體16 由一方的振動板1 5移載到他方的振動板1 5之作用於物體 1 6的浮昇力增大。因此，物體1 6的端部不與振動板1 5的 端部干涉，可圓滑地進行由一方的振動板1 5移載（換乘）到 1276588 他方的振動板1 5。 本實施形態除了具有與前述第一實施形態的（1)〜（10) — 樣的優點外，還具有以下的優點。 (1 1 )、爲了增加物體1 6的浮昇傳送距離，串聯配置複數 個音波浮昇傳送裝置42而構成有物體浮昇傳送裝置4 1。在 與音波浮昇傳送裝置42間的物體1 6的移載位置對應的位 置配置有反射面31a。因此，在振子19可於上下方向移動 的狀態下，在兩音波浮昇傳送裝置42的振動板1 5激振的 狀態下，藉由反射面3 1 a的作用可保持兩振動板1 5的端部 的振幅於相同狀態。藉由利用此狀態，使接鄰的音波浮昇 傳送裝置42的各音波浮昇單元12a、12b的對準謌整變的 容易。 (12)、在串聯配置的複數個音波浮昇傳送裝置42中，在 與物體1 6的移載位置對應的位置配置有反射面3 1 a。在反 射面3 1 a反射的音波係由振動板1 5之間朝上方放射。因 此，作用於移載位置中被移載的物體1 6的浮昇力增大。因 此，物體1 6的端部不與振動板1 5的端部干涉，可圓滑地 進行由一方的振動板1 5移載（換乘）到他方的振動板1 5。 其次依照第5(a)圖、第5(b)圖說明本發明的第三實施形 態。作爲本實施形態的音波浮昇裝置之物體浮昇傳送裝置 1 1係具備保持反射板3 1的反射面3 1 a與振動板1 5的間隙 (gap)之間隙保持手段此點與前述第一實施形態不同。與第 一實施形態同一的部分係附加同一符號，省略詳細的說 明，針對不同點來說明。 振動板1 5變長，音波反射手段28的配置間隔（設置間距 1276588 (p i t c h))變大的情形，具有在振動板1 5大大地撓曲時，振動 板1 5可接觸反射面3 1 a的可能性。[配置間隔（設置間距） 大]係意味著前述間距爲振動板1 5的振動波長的1 0波長以 上的情形。在本實施形態中係配設即使振動板1 5接近反射 面3 1 a而撓曲，也保持振動板1 5與反射面3 1 a的間隙之間 隙保持手段。 如第5(a)圖、第5(b)圖所示，在兩個喇叭形揚聲器17a、 17b間配設有複數個（例如兩個）音波反射手段28。在支柱 30的兩端形成有螺絲部。支柱30的下端係螺著於底板29。 在當作反射構件的反射板3 1的底面固著有螺帽3 1 c。藉由 螺帽3 1 c被螺著於支柱30的上端，使反射板3 1被固定於 支柱3 0。反射板3 1係由可撓性的板材構成。反射板3 1係 由彈性率比振動板1 5小的材料形成。例如振動板1 5的材 料使用鋁合金，反射板3 1的材料使用樹脂。反射板3 1在 彈性變形的範圍被使用。藉由反射板3 1以可撓性的板材構 成，而構成有間隙保持手段。反射板3 1係形成直徑比振動 板1 5的寬度還小（例如8成左右的）的圓形。反射板3 1的上 側的周緣部係倒角成圓弧狀。 如在第5(a)圖以實線所示，在物體16存在於與反射板31 的中心對應的位置之狀態下，在振動板1 5的激振時，由振 動板1 5發出的音波係對反射板3 1大致均等地被放射。而 且，振動板1 5與反射板3 1的間隔（間隙）也被確實地保持。 物體1 6由該狀態被移動到由與反射板3 1的中心對應的位 置偏離的位置。如第5(b)圖所示，在移動於兩反射板31之 間的狀態下，振動板1 5對反射板3 1的撓曲量在振動板1 5 -19- 1276588 的長方向中變成不均等。也就是說，物體1 6側其振動板1 5 的部分的撓曲量變大。在此狀態下，反射板3 1爲剛性不具 有可撓性的情形，將有振動板1 5變成與接近物體1 6側的 反射板3 1的端部的頂面，亦即與反射面3 1 a的端部接觸的 狀態之虞。但是，在本實施形態中因係反射板3 1具有可撓 性而構成，故若振動板1 5撓曲成接近反射面3 1 a，則因由 振動板15發出的音波的作用使反射板3 1撓曲。因此，即 使使振動板1 5燒曲成接近反射面3 1 a，振動板1 5與反射面 3 1 a的間隙也被保持，振動板1 5與反射面3 1 a的接觸被防 止。反射板3 1的撓曲量在與支柱3 0對應的部分爲零。物 體1 6側的反射板3 1的部分的撓曲變成比夾著支柱30在相 反側的反射板3 1的部分的撓曲還大。此外，撓曲量爲1 mm 以下。 在本實施形態中，除了具有與前述第一實施形態的（1)、 (2)、（4)〜（6)、（8)〜（10)—樣的優點外，還具有以下的優點。 (13) 、音波反射手段28具備保持反射面31a與振動板15 的間隙之間隙保持手段。因此，即使振動板1 5接近反射面 3 1 a而撓曲，振動板1 5與反射面3 1 a的間隙也被保持，振 動板1 5與反射面3 1 a的接觸也被防止。其結果，可防止振 動板15與反射板31的接觸造成的塵埃產生或異音的產 生。 (14) 、當作前述間隙保持手段的反射板31(反射構件）係以 可撓性的板材構成。因此，爲若振動板1 5撓曲，則反射板 3 1也對應此撓曲而撓曲此種簡單的構成，可保持振動板15 與反射面3 1 a的間隙。 -20- 1276588 (1 5 )、反射板31係由彈性率比振動板1 5還小的材料形 成。因此，對應振動板1 5的撓曲，撓曲成保持與振動板1 5 的間隙之狀態的反射板3 1，其形成變的容易。 (1 6)、因反射板3 1爲樹脂製，故對應振動板1 5的撓曲， 撓曲成保持與振動板1 5的間隙之狀態的反射板3 1，其材料 容易獲得。而且，與其他材料比較，反射板3 1的輕量化變 的容易。 其次，依照第6圖說明本發明的第四實施形態。在本實 施形態中，在與振動板1 5的振子1 9對應的側，也就是說 在振動板1 5面向振子1 9的側中使物體1 6浮昇此點與第一 實施形態大不相同。而且，對應上述，音波反射手段28的 反射面3 1 a的位置變成振動板1 5的下方此點與前述第一實 施形態不同。與第一實施形態同一的部分係附加同一符 號，省略詳細的說明。 如第6圖所示，物體浮昇傳送裝置5 1係對支持板1 4，以 喇叭形揚聲器17a、17b配置在下側，振子1 9配置於上側 的狀態下，振子1 9被固定於支持板1 4。振動板1 5係被固 定於喇叭形揚聲器17a、17b的下端。 音波反射手段28係配置於振動板1 5的下方中與振動板 1 5的長方向的大致中央對應的位置。也就是說，音波反射 手段2 8的反射面3 1 a係面對與對應振子1 9的振動板1 5的 頂面相反側的振動板1 5的底面。換言之，反射面3 1 a係面 對振動板1 5的第一面（底面），振子1 9係面向振動板1 5的 第二面（頂面）。 在本實施形態中，與習知的音波浮昇裝置不同’物體1 6 -21- 1276588 係藉由由面向振子19的振動板15的頂面（第二面）放射的音 波的放射壓浮昇，而在浮昇狀態下傳送。因此，其傳送範 圍變成兩喇叭形揚聲器1 7 a、1 7 b之間的範圍。 在本實施形態中，除了具有與前述第一實施形態的 (1)〜（10)—樣的優點外，還具有以下的優點。 (1 7)、如第一實施形態，在振子1 9配置於振動板1 5下方 的構成中，配置振動板1 5的位置即使最低也成爲比振子i 9 以及喇叭形揚聲器17a、17b的長度（高度）的合計還高的位 置。但是，在第四實施形態的構成中，振動板1 5的位置若 在振動板1 5的下方具有配設音波反射手段28的空間的話 較佳。因此，與振子1 9被配置於比振動板1 5還下方的構 成比較，可降低振動板1 5的位置。 本發明的實施形態不限定於前述，例如如以下構成也可 以。 間隙保持手段不限於將反射板3 1作成可撓性的構成。例 如反射板3 1以剛體形成，支持反射板3 1的支柱3 0採保持 振動板1 5與反射面3 1 a的間隙的方式而可傾斜移動地構成 也可以。如第7U)圖、第7(b)圖所示，保持支柱30於傾斜 移動位置與垂直位置的構成係在支柱3 0的下端突設圓板 狀的卡止部38，在形成分開成兩個的底板29a、29b形成可 與卡止部38卡合的限制槽39。限制槽39的下部係形成水 平，限制槽39的上部係形成隨著接近支柱30，與下部的距 離擴大的斜狀。在反射面3 1 a於垂直方向中大致均等地接 受由振動板1 5發出的音波的狀態下，支柱30被保持於對 底板29a、29b垂直的狀態，變成第7(a)圖的狀態。由振動 -22- 1276588 板1 5發出的音波對反射面3 1 a不均等地作用時，支柱30 傾斜移動，俾作用力強的反射面3丨a的部分朝下方移動， 以保持於該傾斜移動位置，變成第7(b)圖的狀態。若支柱 3 0傾斜移動，則變低的部分係指夾著支柱3 0相反側的反射 面3 1 a的部分變高。因此，支柱3 0的傾斜移動量係設定爲 隨著支柱3 0的傾斜移動，反射板3 1的變高的部分不與振 動板1 5接觸的値。此情形，物體1 6係存在於支柱30之間， 如第7 (b)圖所示，若藉由振動板1 5撓曲對反射板3 1傾斜， 振動板1 5接近反射板3 1，則因支柱3 0傾斜移動，故振動 板1 5與反射面3 1 a的間隙被保持。 保持支柱30於傾斜移動位置與垂直位置的構成不限於 卡止部38與前述限制槽39的組合。例如上述構成係在支 柱30的下端形成雄螺絲部，在底板29在背隙（back-lash) 大的狀態下形成螺合有支柱30的雄螺絲部的雌螺絲部也 可以。此情形，藉由背隙的間隙使支柱3 0的傾斜角度被限 制。 使支柱30傾斜移動而使反射面3 1 a傾斜的構成不限於前 述的構成，以橡膠等的彈性構件形成支柱3 0全體，或以彈 性構件形成支柱30的一部分，例如上端部、中間部或下端 部等也可以。此情形與利用限制槽39或螺絲的背隙之構成 比較，構造變的簡單。 除了作成支柱30可傾斜移動的構成外，如第三實施形 態，可撓性地構成反射構件（反射板3 1)也可以。此情形， 振動板1 5與反射面3 1 a的間隙可更確實地被保持。 間隙保持手段不使支柱30傾斜移動而作成可傾斜移動 -23- 1276588 反射板31的構成也可以。例如反射板31不爲單純的一片 構造，而是如第8(a)圖所示，作成在不具可撓性的材料製 的兩片板材31d之間中介存在橡膠製的板材31e之構成也 可以。而且，如第8(b)圖所示，以在不具可撓性的材料製 的兩片板材3 1 d之間中介存在橡膠製的柱狀材3 1 f之構成 也可以。在該等構成中，支柱30係經常被保持於垂直狀 態。在反射面3 1 a接受在垂直方向中大致均等地由振動板 1 5發出的音波的狀態下，反射面3 1 a被保持於水平狀態。 而且，由振動板1 5發出的音波對反射面3 1 a不均等地作用 的情形，係變成使作用力強的振動板1 5的部分朝下方移動 而使上側的板材3 1 d傾斜移動，反射面3 1 a與振動板1 5的 面對面的部分平行。因此，間隙被保持於振動板1 5與反射 面3 1 a不接觸的値。 令反射板3 1爲可傾斜移動的構成之間隙保持手段也可 以用不配設支柱30，而是直接隔著橡膠製的板材3 1 e或塊 (block)支持反射板31(反射構件）於底板29或支持板14上 之構成。而且，間隙保持手段也可以用隔著橡膠製的柱狀 材3 1 f支持於底板29或支持板1 4上等的構成。 令反射板3 1爲可撓性的情形，反射板3 1的厚度不限於 一定，例如也可以隨著遠離支柱30而變薄形成。 間隙保持手段不限於第一實施形態的構成，也能適用於 如第二實施形態具備凹部3 1 b的反射板3 1，或適用於如第 四實施形態在面向振動板1 5的振子1 9的側使物體1 6浮昇 的構成之物體浮昇傳送裝置5 1。 音波反射手段28具備可檢測作用於反射面3 1 a的壓力是 -24- 1276588 否爲預定壓力以上的壓力檢測手段也可以。壓力檢測手 也可以具備連續地可檢測作用於反射面3 1 a的壓力之壓 感測器。如第9(a)圖所示，在支柱30的下端與底板29 間配設荷重單元（loadcell) 32當作壓力檢測手段。此情形 藉由荷重單元32的輸出信號，可連續地檢測作用於反射 3 1 a的壓力，而可經常監測對音波浮昇裝置的物體1 6的 際的浮昇力。因此，不管是否由振盪器26正常地輸出激 電壓，可檢測振動板1 5的振動狀態有異常的情形。 可檢測作用於反射面3 U的壓力是否爲預定壓力以上 壓力檢測手段，可配設只能檢測前述壓力是否爲預定壓 以上的壓力檢測手段。例如如第9(b)圖所示，中空地構 支柱30，在對應支柱30的中空部33的位置中，在反射 31形成孔34。而且，在底板29於與面對面的中空部33 應的位置配設壓力開關35。此情形，若由振動板15放射 音波的放射壓超過預定的壓力，則壓力開關3 5會動作。 該此構成也能檢測對音波浮昇裝置的物體1 6之浮昇力 否超過預定的値。因此，藉由設定預定壓力爲適當的壓力 可利用於例如異常發生的檢測。 平行配置有複數個振動板1 5的情形，音波反射手段 係不限於反射板3 1共用於複數個振動板1 5的構成，配 依每一各振動板1 5獨立的音波反射手段28也可以。反 板3 1的形狀不限於四角形，若具備由反射面3 1 a反射的 波的壓力有效地作用於振動板1 5之必要的面積，則作成 意形狀均可。若反射板3 1的形狀作成圓形，則爲了反射 3 1 a的高度調整，即使採用使反射板3 1轉動的構成，反 段 力 之 ， 面 實 振 的 力 成 板 對 的 以 是 28 設 射 音 任 面 射 -25- 1276588 面3 1 a對於振動板1 5的投影像也一直成爲相同的形狀’不 會給予由反射面3 1 a反射的音波的狀態影響。因此，取代 在支柱3 0配設兩個位置的雄螺絲部3 Oc，不使反射板3 1 轉動，而使支柱30的一部分轉動以進行高度調整的構成， 如第10(a)圖所示，可採用在支柱30配設一個位置的雄螺 絲部之構成。此情形，高度調整用的構造變的簡單。而且， 此情形也可以將反射面3 1 a的端部倒角成圓弧狀。 也可以取代以手動操作進行反射板31的高度調整之構 成，採可將反射板31支持在電動氣缸、線性引動器（linear actuator)等，自動地進行高度調整的構成。 音波反射手段28爲不可進行反射板3 1的高度調整也可 以。 音波反射手段28係以當作反射板3 1的支持部之支柱30 藉由彈性構件支持的構成也可以。例如如第1 〇(b)圖所示， 在底板2 9配設支持筒3 6，在支柱3 0的下部可滑動地插通 於支持筒36的狀態下支撐，並且配設彈簧37當作彈性構 件。彈性構件也可以使用橡膠。此情況，大的力由振動板 1 5對反射面3 1 a作用的情形，衝擊可藉由彈性構件吸收。 固定振子1 9於支持板1 4的情形，也可以不配設塡隙片 23a，而在支持板14與凸緣23之間中介存在橡膠或彈簧等 的彈性手段，在彈性手段的彈性範圍內，在上下方向可移 動地固定振子1 9。此情形，當進行複數個音波浮昇單元 12a、12b的對準調整時，無須進行塡隙片23a的調整，使 對準調整作業變的更簡單。 振動板1 5的撓曲抑制作用的音波反射手段28的配設位 -26- 1276588 置不限於與振動板1 5的長方向的大致中央對應的位置。而 且，對一個振動板1 5配設複數個音波反射手段28也可以。 配置複數個的情形，對振動板1 5的中央配置成對稱的位置 較佳。 在串聯配置有複數個音波浮昇傳送裝置42的構成中，配 設於與音波浮昇傳送裝置42間的物體1 6的移載位置對應 的位置之音波反射手段28係在反射板31不具備凹部31b， 如第1 1圖所示反射面3 1 a爲平面也可以。即使反射面3 1 a 爲平面，在反射面3 1 a反射的音波的一部分也由接鄰的振 動板1 5之間朝上方前進，放射壓作用於移載途中的物體 1 6。但是，具有凹部3 1 b者其由音波的反射造成的效果變 大。 在串聯配置有複數個音波浮昇傳送裝置42的構成中，配 設於與音波浮昇傳送裝置42間的物體1 6的移載位置對應 的位置之音波反射手段28,不僅是爲了用以使由反射面31a 反射的音波提高物體1 6的舉力，也可以用以使接鄰的振動 板1 5的端部的對準調整簡單而配設。例如減小接鄰的振動 板1 5的端部間的間隙，使音波難以朝上方前進。 在串聯配置有複數個音波浮昇傳送裝置42的構成中，僅 配設音波反射手段28於與音波浮昇傳送裝置42的物體16 的移載位置對應的位置也可以。也就是說，在各音波浮昇 單元1 2 a、1 2 b的振動板1 5的長方向的中間部不配設音波 反射手段28。即使是此情形也能圓滑地進行物體16的移載 (換乘）。振動板1 5的撓曲抑制係以其他的方法進行。 在藉由進行波於浮昇狀態下傳送物體1 6之構成中，激振 -27- 1276588 手段爲取代可切換成產生進行波的狀態與產生駐波的狀態 之構成，也可以用僅能產生進行波的構成，在停止物體1 6 的移動時停止振動板1 5的激振之構成。 在利用進行波於浮昇狀態下傳送物體1 6之構成中，可選 擇性地分別連接配設於各振動板1 5兩端的振子1 9於振盪 器26與負荷電路27而構成。此情形，藉由進行連接於振 盪器26的狀態與連接於負荷電路27的狀態之切換，可選 擇物體1 6的傳送方向。而且，藉由快速進行前述連接狀態 的切換，可在浮昇狀態下保持物體1 6於大致一定的位置。 在浮昇狀態下傳送物體1 6之構成爲取代在振動板1 5使 進行波產生的構成，可以配設在振動板1 5使駐波產生，保 持物體1 6於浮昇狀態，賦予該狀態的物體1 6推進力之推 進力賦予手段。推進力賦予手段具有例如對物體1 6用力吹 壓縮氣體的噴嘴。此情形，與使進行波產生的構成比較， 激振手段的構成變的簡單。使駐波產生的構成的情形，也 可以取代在振動板1 5的兩側配設振子1 9的構成，而用僅 在振動板1 5的一端配設振子1 9，他端以喇叭形揚聲器支持 的構成。此情形，構造變的更簡單。 振動板1 5的數目不限於兩個，使寬度寬的物體1 6浮昇 的情形，更在振動板1 5之間平行地配置另外的振動板也可 以。另外的振動板非必需要以產生進行波的構成，以產生 駐波的構成也可以。此情形，由物體1 6的重量造成的物體 1 6自身的撓曲被抑制，可圓滑地在浮昇狀態下傳送物體 16 ° 音波浮昇裝置不限於僅完全以音波的放射壓浮昇保持物 -28- 1276588 體的構成。例如在傳送液晶面板的玻璃基板的情形， 爲1 mm以下，寬度爲1 m以上的大小者的情形中，對 滾子（roller)支撐寬方向兩端，並且防止中央的鬆弛， 於水平狀態，適用於利用音波的放射壓的音波浮昇裝 可以。 音波浮昇裝置不限於在水平狀態下浮昇保持物體 成。例如如第1 2圖所示，在台車5 2上配設可移動地 物體16的下端之支撐部（滾子）53與物體浮昇裝置54 以。物體浮昇裝置54係對被支撐於支撐部53的物體 予由振動板1 5產生的音波的放射壓，在非接觸狀態下 物體1 6於傾斜的狀態。構成物體浮昇裝置54的振子 被固定於固定於台車52上的框架（frame)55，音波反射 28也被支持於框架55。此情形因物體16的下端被支 支撐部5 3，故物體1 6嚴格上不在浮昇狀態，但物體 振動板1 5係被保持於浮昇狀態。 音波浮昇裝置不限於空氣中，也能使用於在水中的 的浮昇傳送。此情形如第四實施形態，若爲振子1 9配 振動板1 5的上方之構成，則振子1 9的防水處理變的售 音波浮昇裝置爲取代利用由振動板1 5發出的音波 射壓於物體的浮昇與振動板1 5的撓曲抑制之構成，也 利用由振動板1 5發出的音波的放射壓於物體的浮昇 波浮昇裝置自身的浮昇的兩方。例如如第四實施形態 振動板1 5的上側配設有振子1 9的構成之音波浮昇 中，作成在振動板1 5產生駐波的構成，並且令底面爲 反射手段28。而且，不以支柱13支持支持有振子19 厚度 於以 保持 置也 的構 支撐 也可 16賦 保持 19係 手段 撐於 16對 物體 設於 I單。 的放 可以 與音 ，在 裝置 音波 或振 -29- 1276588 盪器2 6等的支持板1 4，而成爲自由的狀態。在此構成中’ 若在振動板1 5的頂面載置有物體1 6的狀態下使振動板1 5 被激振，則藉由由振動板1 5放射的音波（駐波）的放射壓’ 使物體1 6對振動板1 5在浮昇狀態下被保持。而且’因在 振動板1 5的下方被放射的音波係在底面反射’給予振動板 1 5推壓作用，故振動板1 5被保持於對底面非接觸的狀態， 音波浮昇裝置自身被保持由底面浮昇的狀態。因此，若施 加朝橫方向的力於音波浮昇裝置，則可用小的力量使在浮 昇狀態下保持物體1 6的音波浮昇裝置移動。 取代以複數個振動板1 5浮昇保持物體1 6的構成，也可 以採利用一個振動板浮昇保持物體16的構成。例如浮昇傳 送寬度窄的物體1 6的情形係令振動板1 5爲一個也能穩定 地傳送。 複數個振子19共用振盪器26也可以。 喇叭形揚聲器17a、17b的形狀不限於扁平的長方體狀， 以圓柱狀或略圓錐台狀等前端側狹窄的形狀也可以。 被浮昇保持的物體1 6的形狀不限於四角形，以三角形或 其他的多角形或圓形等任意的形狀也可以。 固定於振動板1 5的喇叭形揚聲器1 7 a、1 7 b不限於利用 螺絲1 8的締結，也可以使用接著劑，或以銲接或熔接固 著。 振子1 9不限於郎格文（l a n g e v i η)形振子，也能使用其他 的振子。 【圖式簡單說明】 第1(a)圖是具體化本發明的第一實施形態的物體浮昇傳 -30- 1276588 送裝置的模式斜視圖，第1(b)圖是組裝於第1(a)圖的裝置 的音波浮昇單元的模式側視圖。 第2(a)圖是組裝於第1(a)圖的裝置的音波反射手段的模 式斜視圖，第2(b)圖是組裝於第1(a)圖的裝置的振子的固 定狀態的模式圖。 第3(a)圖、第3(b)圖是顯示第1(a)圖的裝置的作用之模 式圖。 第4U)圖是本發明的第二實施形態的物體浮昇傳送裝置 的模式側視圖，第4(b)圖是第4(a)圖的部分詳細圖。 第5 U)圖是本發明的第三實施形態的物體浮昇傳送裝置 的模式側視圖，第5(b)圖是說明第5(a)圖的裝置的作用的 部分模式側視圖。 第6圖是本發明的第四實施形態的物體浮昇傳送裝置的 模式側視圖。 第7(a)圖、第7(b)圖是本發明的其他實施形態的間隙保 持手段的模式側視圖。 第8(a)圖、第8(b)圖是本發明的其他實施形態的間隙保 持手段的模式側視圖。 第9(a)圖、第9(b)圖是具備壓力檢測手段之本發明的其 他實施形態的音波反射手段的模式側視圖。 第10U)圖是本發明的其他實施形態的音波反射手段的 模式斜視圖’第10(b)圖是本發明的其他實施形態的音波反 射手段的模式側視圖。 第11圖是本發明的其他實施形態的音波反射手段的模 式側視圖。 -31- 1276588 第1 2圖是本發明的其他實施形態的物體浮昇傳送裝置 的模式斜視圖。 元件符號說明】 11 物體浮昇傳送裝置 12a、 12b 音波浮昇單元 13 支柱 14 支持板 15 振動板 16 物體 17a、 17b 喇叭形揚聲器 18 螺絲 19 振子 20a ' 20b 壓電元件 21 電極板 22a ' 22b 金屬塊 23 凸緣 23a 塡隙片 24 螺栓 25a、 25b 配線 26 振盪器 27 負荷電路 27a 開關 28 音波反射手段 29 底板 29a ' 29b 底板1276588 IX. Description of the Invention: [Technical Field] The present invention relates to a sound wave lifting device that uses a radiation pressure of a sound wave to transmit an object in a floating state or in a floating state. [Prior Art] A glass substrate such as a liquid crystal or a PDP (plasma display) is increased in size, and has a substrate size of 1500 X 1 800 mm or more. In order to prevent the deflection of such a substrate or to prevent dirt from adhering to the substrate, a device for lifting the object is required. An object floating device for lifting an object in the air has been proposed to use a radiation pressure of sound waves. Further, by using a long flat vibrating body, the object is lifted by the radiation pressure of the sound wave caused by the vibration of the vibrating body, and the object that moves in the vibrating body that generates the wave and rises rises. A transfer device is proposed (for example, refer to Japanese Laid-Open Patent Publication No. 2002-181378). When a long vibration plate is used in order to increase the conveying distance of the object, the deflection of the vibration plate becomes large, and the height is changed at the end portion and the center of the vibration plate, and it is difficult to convey the object in a stable floating state. In the object floating conveyor disclosed in the above publication, in order to solve this problem, the intermediate portion in the longitudinal direction of the vibrating plate is placed in contact with the bottom surface of the vibrating plate to suppress the deflection of the vibrating plate. The deflection preventing member. However, in the object floating conveyor of the above-described publication, the deflection preventing member that abuts against the bottom surface of the diaphragm suppresses the increase in the deflection of the long oscillating plate, so that the vibration plate is used. Vibration, the vibration plate repeatedly abuts against the deflection preventing member, and the vibration plate or the deflection preventing member wears out. In order to suppress the wear and abut against the position where the vibration is small, the arrangement of the deflection preventing member is limited. 1276588 On the other hand, the case where the distance of the transport object is short can be transmitted by the object buoyant conveyor using a short vibrating plate, but the distance of the transport object is long, and a plurality of object buoyant conveyors are arranged in series to transport the object. However, in the case where a plurality of object floating conveyors are arranged in series to transport an object, in order to smoothly carry out the transfer of the object in the floating state by the vibration plate of one object floating conveyor to the object floating conveyor of the other object On the vibrating plate, the alignment of the two object floating conveyors is adjusted with high precision. Moreover, in the case of transmitting an object having a wide width, a plurality of object floating conveyors are arranged in parallel to carry out the lifting and conveying of the object, but in this case, the alignment adjustment of each object floating conveyor is also required with high precision. . Moreover, the more the number of object floating conveyors used, the more troublesome the adjustments are. SUMMARY OF THE INVENTION An object of the present invention is to provide a sound wave floating device capable of suppressing deflection of a vibration plate even when the length of the vibration plate is increased by using a long vibration plate to convey an object in a floating state, which is stable The object is transported in a floating state. Further, another object of the present invention is to provide a sound wave floating device which is used in a sound wave floating lifting device which uses a plurality of sound wave floating lifting devices having a long moving plate to transmit an object in a floating state. In between, the object can be transferred in a stable floating state. In order to achieve the foregoing object, the present invention provides a sound wave lifting device having a long vibrating plate and an excitation means. The sonic lifting device excites the vibrating plate by the excitation means to cause the acoustic wave to be generated by the vibrating plate, whereby the object is lifted by the radiated pressure of the acoustic wave. The sound wave reflecting means including the reflecting surface for reflecting the sound waves is disposed at a position where the sound wave is reversed 1276588 toward the vibrating plate to suppress the deflection of the vibrating plate. The present invention further provides a sound wave lifting device having a plurality of sonic floating transfer devices arranged in series. Each of the sonic lifting conveyors has a long diaphragm and an excitation means. Each of the sonic wave lifting and transporting devices excites the vibrating plate by the above-described exciting means, so that the sound waves are generated by the vibrating plate, and the object is transported in a floating state by the radiating pressure of the sound waves. Between the aforementioned sonic lifting conveyors, the object can be transferred in a floating state. The sound wave reflecting means including the reflecting surface for reflecting the sound wave is disposed at least at a position corresponding to the transfer position of the object between the sound wave lifting and transporting means. [Embodiment] Hereinafter, a first embodiment of the present invention will be described with reference to Figs. 1(a) to 3(b). As shown in Fig. 1(a) and Fig. 1(b), the object floating conveyor 11 as the sonic lifting device includes a plurality of (in the present embodiment, two) acoustic wave lifting units 12a and 12b. . . The sonic lifting units 12a, 12b are disposed on the support plate 14 supported by the support 13. Each of the acoustic wave lifting units 12a and 12b has a diaphragm 15 that is excited by the excitation means. The vibrating plate 15 is formed in a rectangular flat shape having a width narrower than the width of the object 16 to be conveyed in a floating state, and is disposed in parallel with each other, and can be held together with the object 16 to be conveyed in a floating state. Soaring. The object 16 is, for example, a thin plate-like object such as a glass substrate of a liquid crystal panel. The vibrating plate 15 is formed into a strip. The long strip means a length of 1 〇 or more of the wavelength at which the vibrating plate 15 vibrates. Each of the vibrating plates 15 is supported by horns 1 7a, 17b as two support portions. The horn loudspeakers 17a, 17b are formed in a flat, slightly rectangular parallelepiped shape, and a 1276588 knot is formed in the front end of each of the vibrating plates 15 by screws 18. The horn speakers 17a, 17b are attached to the respective vibrating plates 15 in a state of being perpendicular to the longitudinal direction in the vicinity of the long side portions thereof. The end of the vibrating plate 1 5 is a free end. Each of the horn loudspeakers 1 7 a, 17 b is fixed to the vibrator 19 in a plane on the opposite side to which the vibrating plate 15 is attached. The end faces of the horn loudspeakers 1 7a and 17b are formed in a plane perpendicular to the axial direction of the vibrator 19, and are disposed such that the horns 17a and 17b and the central axis of the vibrator 19 extend in the vertical direction. The vibrator 19 uses a so-called Langevin-shaped vibrator. The vibration is fixed to the pair of annular piezoelectric pieces 20a and 20b by bolts (not shown), and the annular electrode plates disposed between the piezoelectric elements 20a and 20b are disposed on the piezoelectric elements 20a and 20b. The gold 22a, 22b at the position where the outer side surface abuts is formed. The bolt is screwed to the screw hole (not shown) which forms the block 22a from the side of the metal block 22b. The two metal blocks 22a, 22b are in a state of being electrically connected to each other. A flange 23 (shown in FIG. 1(b)) is formed at the upper end of the metal block 22a, and the metal block 22a is fixed to the support plate by bolts 24 in a state of being fitted into the hole of the support plate 14. Further, a shim 23a (shown in Fig. 2(b)) is interposed between the support plate 14 and the flange 23 as needed. The vibrator 19 of the horn speaker 17a, which is connected to the first end of the vibrating plate 15, is connected to the oscillator 26. The electrode plate 21 is connected to the oscillator 26 via wiring. The ground terminal of the oscillator 26 is connected to the metal block 22b via wiring. The vibrator 19 that excites the shaped speaker 17b that is connected to the second end of the vibrating plate 15 is not connected to the oscillator 26, but is connected to both sides of the load as an energy conversion means composed of the resistor R and the coil L. The front speaker state 19 element 21, the block is formed in the gold by the screw flange 14 ° 塡 excitation t 25a 25b horn connected to the circuit 1276588 is equipped with open: 26 and segment. Oscillation control signal: Switch 27a is excited and is excited to open. Illustration of the second end. The reflector plate supported by the vibration 2(a) diagram is 15 5 formed on the bottom surface of the surface of the complex oscillator 19 which forms the moment 12b with the vibration 12b. In the middle of the wiring connecting the vibrator 19 and the load circuit 27, the switch 27a is provided. The horn speaker 17a, 17b, the vibrator 19, and the oscillating load circuit 27 are configured such that the oscillating hand 26 and the switch 27a for exciting the vibrating plate 15 are controlled by, for example, a control device number (not shown). Striped mode drive. In the present embodiment, in the on state of the mooring, the vibrating plate 15 causes the wave to be generated and the off switch 27a is turned off. The vibrating plate 15 generates the standing wave, and the first (a) For the sake of convenience of illustration, the vibrator 19 and the load circuit 27, the flange 23, and the bolt 24 on the side omitted are arranged on the support plate 14 so that the plate 15 is emitted when the vibrating plate 15 is excited. The sound wave reflection means 28 of the sound wave reflection. As shown in the above, the sound wave reflecting means 28 includes a bottom plate 29, a pillar 30 of the portion, and a reflection member 31 provided with the reflecting surface 31a, and the sound wave is reflected toward the diaphragm 15 The position of the suppressed deflection. In the present embodiment, the reflecting plate 31 is disposed at a position where the center of the plate 15 faces the surface in the longitudinal direction. The reflecting plate 3 1 has a shape, and the reflecting surface 3 1 a is disposed perpendicular to the two acoustic wave lifting units 12 2a and the plurality of vibrating plates 15 . The sound wave reflection means 28 It is disposed below the vibration plate 15 . In other words, the acoustic reflection bow reflecting surface 31a is formed in the first surface (bottom surface) which is the first surface of the vibrating plate 15 which is opposite to each other and the top surface which is the second surface. Facing the first side (bottom surface) of the vibrating plate 15. Both sides in the width direction of the top surface of the reflecting plate 31 are chamfered into an arc shape. However, the chamfering is omitted except for the second (a) drawing. The reflecting surface 31a preferably has a length equal to or longer than the wavelength of the sound wave emitted from the diaphragm 15 in the longitudinal direction of the vibration 1276588. In the present embodiment, the length of the reflecting surface 31a in the longitudinal direction of the vibrating plate 15, that is, the width of the reflecting surface 31a is about 100 mm. The reflecting surface 31a is adjustable in height. . In the present embodiment, as shown in Fig. 2(a), the support 30 is composed of a lower side portion 30a and an upper side portion 30b. A male screw portion 30c is formed at both ends of the lower side portion 30a. A female screw portion that is screwed to the male screw portion 30c is formed at the lower end of the upper side portion 30b. A female screw portion that is screwed to the male screw portion 30c is also formed in the bottom plate 29. The directions of the screws of the two male screws are reversed from each other. By rotating the lower side portion 30a in one direction, the male screw portion 30c is screwed to the female screw portion, and is rotated in the other direction to reduce the amount of screwing of the male screw portion 30c and the female screw portion. Therefore, by rotating the lower side portion 30a in a state where the reflecting plate 31 and the vibrating plate 15 are perpendicular to each other, the height of the reflecting plate 31, that is, the height of the reflecting surface 31a is adjusted. That is, the interval between the reflecting surface 31a and the diaphragm 15 is adjusted. Next, the action of the device constructed as described above will be explained. The vibrator 19 to which the horn loudspeakers 17a and 17b are connected is excited by a predetermined resonance frequency (e.g., about 20 kHz), and the diaphragm 15 is excited by the horn loudspeakers 17a and 17b to perform flexural vibration. The object 16 is caused to rise from the surface of the vibrating plate 15 by the radiation pressure of the sound wave generated (radiated) by the vibrating plate 15. The vibration of the vibrating plate 15 is transmitted from the horn speaker 17b to the vibrator 19 connected to the load circuit 27, and the vibration energy of the mechanical energy is converted into the vibration energy of the mechanical energy by the piezoelectric elements 20a, 20b constituting the vibrator 19 connected to the load circuit 27. Electrical energy. If the vibrating plate 15 is excited when the switch 27a is turned on, the electric energy is converted into Joule heat by the resistance R of the negative -1027588 load circuit 27 (Joule's, the vibration wave generated in each of the vibrating plates 15 In the case of a wave (the traveling wave which is advanced by the horn-shaped speaker 17a 17b in the present embodiment), the object 16 is conveyed by the both ends of the vibrating plate 15 in a floating state. Further, if the state is in the state of the vibrating plate 15 The vibration is maintained at a certain position in the floating state of the vibrating plate 15 16. In order to increase the multiplication by the one object floating conveyor 1, it is necessary to increase (length) the length of each of the vibrating plates 15. In the case where the vibrating plate 15 is supported at two positions to vibrate, as shown by the chain line in Fig. 1(b), it is difficult to transmit the object 16 in a stable state. The vibration of the vibrating plate 15 is reflected by the reflecting surface 3 1 a of the vibrating plate 15 of the plate 3 1 toward the vibrating plate 15. The radiation pressure of the sound wave reflected by the emitting surface 3 1 a is scratched by the non-contact plate 15 Further, if the vibrating plate 15 becomes long, when the vibrating plate 15 is excited in the state of no floating, there is a vibrating plate 1 5 ί 升 The frequency of the frequency used is different in frequency. However, by providing the reflecting surface 3 1 a, the production can be prevented. In order to make the sound wave plate 15 of the sound wave reflected by the reflecting surface 3 1 a, To accomplish the above-mentioned effects, it is necessary to have three portions of the reflecting surface. The width of the reflecting surface 31a is a shape of the aforementioned wavelength, and the shape of the reflecting surface 31a is diverged as shown in the third (b). As the direction advances toward the first end of the horn loudspeaker to the switch 27a, the standing wave is generated, and the transmission distance of the object 3 body 16 is, however, as in the conventional installation, if there is no deflection anti-vibration plate The grounding is that the sound wave emitted in the present embodiment is reversed, and the abnormal vibration of the object can be effectively caused by the vibration of the object 16 which is prevented from vibrating in the reverse state and the floating ground of the object 16. The center of the emotional direction around the abdominal half-wavelength of the 1 a-reflected sound wave is placed at a position where the abdomen portion of the sound wave is face-to-face at 1276588. In the case where only the standing wave is radiated by the vibrating plate 15, the abdomen portion of the acoustic wave is reflected by the reflecting surface 31a, but the case where the wave is radiated is also a state in which the abdomen portion of the acoustic wave is not reflected by the reflecting surface 31a. However, in the present embodiment, the length of the reflecting surface 31a in the longitudinal direction of the diaphragm 15 has a wavelength equal to or higher than that of the sound wave emitted from the diaphragm 15. Therefore, even if the position of the reflecting surface 31a is face-to-face with any position in the longitudinal direction of the vibrating plate 15, the sound wave is either a standing wave or a wave, and the abdomen portion of the sound wave must also become a reflecting surface. 3 1 a state of reflection. In the present embodiment, in order to transmit the object 16 having a wide width, two acoustic wave lifting units 12a and 12b are provided on the support plate 14. The two-sonic floating unit 1 2a, 1 2b collectively transports the object 16 in a floating state. At this time, for the floating transfer object 16 in the steady state, the alignment adjustment of the two-sonic floating unit 12a, 12b is performed, and the vibrating plate 15 of the two-sonic floating unit 12a, 12b causes the object 16 to float to the horizontal state. And transfer. In the present embodiment, when the alignment adjustment is performed, the two acoustic wave lifting units 1 2 a and 1 2 b are temporarily fixed to the support plate 14. The sound wave reflecting means 28 is fixed at a position corresponding to the substantially center of the longitudinal direction of the two vibrating plates 15 in a state where the reflecting plate 31 is perpendicular to the two vibrating plates 15 . Further, the bolt 24 of the fixed metal block 22a is loosened, and the vibrating plate 15 is excited in a state where the vibrator 19 is movable in the vertical direction. Further, the height of the reflecting surface 31a is adjusted, and the object 16 is caused to rise in a horizontal state at a desired lifting distance by the vibrating plate 15 of the two-sonic lifting units 12a, 12b. In this state, on the support board 14. After the sipe 23a is interposed between the top surface and the flange 23, the bolt 24 is locked, and the metal block 22a, that is, the vibrator 19 is fixed. Therefore, compared with the case where the respective acoustic wave lifting units 12a and 12b are alternately sipe-adjusted in the state of the non-sonic reflection means -12-1276588, it is easy to perform alignment adjustment with high precision. This embodiment has the following advantages. (1) The sound wave lifting device that excites the long vibration plate 15 by the excitation means and causes the object 16 to float by the radiation pressure of the sound wave from the diaphragm 15 is provided to reflect the sound wave The sound wave reflecting means 28 of the reflecting surface 3 1 a is disposed at a position where the sound wave is reflected toward the diaphragm 15 to suppress the deflection of the diaphragm 15 . Therefore, unlike the conventional deflection preventing device, the deflection of the vibration plate 15 can be suppressed in the non-contact state. Therefore, when the long-side vibrating plate 15 is used to transport the object 16 in the floating state, the deflection of the vibrating plate 15 can be suppressed even if the length of the vibrating plate 15 is increased, and the object can be transported in a stable floating state. 1 6. Since the deflection of the diaphragm 15 during the excitation is prevented in the non-contact state, the generation of the noise due to the repetition of the collision between the support portion and the diaphragm 15 can be prevented. Further, since it can prevent the generation of dust, it is suitable for use in a clean room or the like. Further, it is possible to prevent the vibration of the vibrating plate 15 from vibrating abnormally at a frequency different from the fundamental frequency of the frequency used for the lifting of the object 16 in a state where the object 16 should not be lifted. Further, since the length of the vibrating plate 15 can be increased, even if it is conventionally required to use two object floating conveyors having a short vibrating plate to transmit the distance, it can be transported by one object floating conveyor 11. (2) Since the amount of deflection at the time of excitation of the diaphragm 15 can be reduced, the stress applied to the joint portion between the diaphragm 15 and the horn loudspeakers 17a and 17b can be alleviated, and stable operation can be performed. (3) Since the reflecting surface 31a is disposed at a position corresponding to substantially the center of the long direction of the vibrating plate 15, the deflection of the vibrating plate 15 can be effectively prevented. -13- 1276588 (4) The reflection surface 31a has a length equal to or longer than the wavelength of the sound wave emitted from the diaphragm 15 in the longitudinal direction of the diaphragm 15. Therefore, even if the position of the reflecting surface 31a is disposed at an arbitrary position in the longitudinal direction of the vibrating plate 15, the abdomen portion of the acoustic wave must be reflected by the reflecting surface 31a, and the length of the reflecting surface 31a. The degree of freedom in the arrangement position of the sound wave reflection means 28 is higher than in the case where the wavelength is shorter than one wavelength. (5) The reflecting surface 31a is arranged to be adjustable in height. Therefore, the amount of deflection of the diaphragm 15 can be adjusted by adjusting the height of the reflecting surface 31a, that is, the distance between the reflecting surface 31a and the diaphragm 15. Further, by adjusting the height of the reflecting surface 31a, the diaphragm 15 is substantially horizontal, and the lifting distance of the object 16 can be made substantially constant. Moreover, the amount of deflection at the time of excitation of the diaphragm 15 can be reduced. (6) A plurality of (two in the present embodiment) vibrating plates 15 are arranged in parallel. These vibrating plates 15 are collectively raised to hold the object 16 . Therefore, even an object 16 having a wide width (e.g., a width of 1 m or more) can be transported in a stable floating state. (7) The reflecting surface 31a of the sound wave reflecting means 28 is disposed so as to intersect with the plurality of vibrating plates 15 (vertical in the present embodiment). Therefore, by performing the alignment adjustment of the respective vibrating plates 15 in the exciting state, it is possible to easily perform the alignment adjustment with high precision. (8) The sound wave lifting device is configured to transmit waves by the vibration plate 15 and to transport the object 16 in a floating state. Therefore, it is not necessary to separately provide the propulsive force imparting means for imparting the thrust to the floating state of the object 16 to make the configuration simple (9), and the sonic lifting device can be switched to the state in which the wave is generated by the vibrating plate 15. It is composed of a state in which a standing wave is generated. Therefore, by switching to the state in which the standing wave is generated by the vibration -14-1276588 moving plate 15, the object 16 can be held at a certain position in the floating state. (10) The both sides in the width direction of the top surface of the reflecting plate 31 are chamfered into an arc shape. Therefore, when the vibration of the vibrating plate 15 is started by the non-excited state in which the vibrating plate 15 is in contact with the reflecting surface 31a, the abnormal sound due to the collision of the vibrating plate 15 and the reflecting surface 3 1 a can be suppressed. produce. Next, a second embodiment of the present invention will be described in accordance with Figs. 4(a) and 4(b). In the sonic wave lifting device of the present embodiment, the long diaphragm 17 is excited by the excitation means, and the sound wave of the object 16 is lifted and raised in the floating state by the radiation pressure of the sound wave from the diaphragm 15. The apparatus is configured by arranging a plurality of devices in series, and the object 16 can be transferred in a floating state between the sonic floating conveyors. Further, the sound wave reflecting means 28 having the reflecting surface 31a is disposed at least at a position corresponding to the transfer position of the object 16 between the sonic wave lifting and transporting means. The same portions as those of the first embodiment are denoted by the same reference numerals, and detailed description thereof will be omitted. The figure of the male screw portion 30c of the support post 30 is omitted. As shown in Fig. 4(a), the object floating transfer device 41 as the sound wave floating device is formed by arranging a plurality of (in the present embodiment, two) acoustic wave floating transfer devices 42 in series. Each of the ultrasonic wave lifting and conveying devices 42 has the same configuration as the object floating and conveying device 1 1 of the first embodiment. That is, each of the sonic wave lifting and transporting devices 42 is formed by arranging a plurality of sound wave lifting units 12a and 1 2b in parallel. The sonic wave lifting unit 1 2b is disposed on the inner surface side in the fourth (a) diagram of the sound wave lifting unit 12a. The sound wave reflecting means 28 is disposed at a position corresponding to the transfer position of the object 16 between the sonic wave lifting and transporting means 42, and a rectangular -15-1276588 direction of the vibrating plate 15 of each of the ultrasonic wave lifting and transporting means 42. The approximate center position. Each of the sound wave reflection means 28 is configured to be used for the vibration plates 15 of the two floating units 12a and 12b which are arranged in parallel. The top surface of the reflecting plate 31 of the acoustic wave means 28 disposed at a position corresponding to the transfer position of the object 16 is formed as a portion 3 1 b as shown in Fig. 4(b), and is wide toward the reflecting plate 31. A portion of the sound wave radiated from each of the vibrating plates 15 is effectively opposed to the center of the direction. That is to say, the reflecting surface is not a flat surface, but a part has a concave surface. The interval between the respective vibrating plates 15 arranged in series is set such that the sound waves reflected by the reflecting surface 31a disposed at the position corresponding to the transfer position of the body 16 advance upward from the gap of the vibrating plate 15. In the case where the alignment adjustment of each of the sound raising units 12a and 12b is performed in the object floating and conveying device 4 1 of the present embodiment, first, one of the sonic wave lifting and conveying devices 42 is provided (for example, the fourth (a) Alignment adjustment of the sonic flotation conveyor 42 in the side of the figure. Specifically, as in the case of the first embodiment, the vibrating plate 15 is excited by the vibrator 19 in the up-and-down direction, and the object 16 is horizontally moved by the vibrating plate 15 of the two-sonic floating unit 12a. The height adjustment of the reflecting surface 31a is performed with the desired floating uplift. Next, the alignment adjustment adjustment of the other ultrasonic wave lifting and lowering device 42 is performed by the vibrating plate 15 in the state in which the vibrator 1 9 of the acoustic wave lifting unit 1 2a of the ultrasonic wave lifting and conveying device 42 is movable in the up and down direction. Further, the height of the surface 3 1a of the sound wave reflecting means 28 disposed in the center of the vibrating plate 15 is adjusted, and the object 15 is moved in the horizontal state by the two acoustic wave lifting units 12a and 12b. The desired float-up sound wave reflection has a concave shape by the 31a and the object is easy to wave two of the left-hand movements. 12b distance. The > 12b 0 and the reflected vibration drift -16 - 1276588 liters. Further, the height of the reflection surface 31a of the sound wave reflection means 28 disposed at the position corresponding to the transfer position is adjusted. In a state where the height of the reflecting surface 31a of the two-sonic reflecting means 28 is adjusted, the ferrule 23a is interposed between the top surface of the support plate 14 and the flange 23, and the bolt 24 is locked. The block 22a, that is, the vibrator 19 is fixed. Therefore, the alignment adjustment of each of the acoustic wave lifting units 1 2a and 12b is performed in a state where the sound wave reflecting means 28 is not provided at a position corresponding to the transfer position of the object 16 between the two-sonic floating transfer device 42. Accurate alignment adjustment is easy. Next, the action of the device constructed as described above will be explained. The object floating conveyor 41 of the present embodiment is simultaneously driven by the two-sonic soonic transfer device 42, and the vibrator 19 of the horn speaker 17a is excited at a predetermined resonance frequency (for example, about 20 kHz), and the sound waves are raised. The vibrating plates 15 of the units 12a, 12b are in the same vibration state. By the action of the load circuit 27, the vibration wave generated in each of the vibrating plates 15 is made to propagate in one direction (in the present embodiment, the wave is advanced from the horn speaker 17a toward the horn speaker 17b). The object 16 is transported from one end of the vibrating plate 15 to the other end in a floating state. A reflecting surface 31a is disposed at a position corresponding to the transfer position of the object 16 between the two-sonic lifting conveyor 42. Therefore, a part of the sound wave radiated from the diaphragm 15 is reflected on the reflecting surface 31a, and is radiated upward between the diaphragms 15. Therefore, the floating force acting on the object 16 by the one of the vibrating plates 15 is transferred to the other vibrating plate 15 as compared with the case where the reflecting surface 31a is not present. Therefore, the end portion of the object 16 does not interfere with the end portion of the vibrating plate 15, and the vibrating plate 15 which is transferred (transferred) by one of the vibrating plates 15 to the other side of the 1276588 can be smoothly performed. This embodiment has the following advantages in addition to the advantages of (1) to (10) of the first embodiment described above. (1 1 ) In order to increase the flying distance of the object 16 , a plurality of sonic lifting conveyors 42 are arranged in series to constitute an object floating conveyor 41 . A reflecting surface 31a is disposed at a position corresponding to the transfer position of the object 16 between the sonic lifting conveyor 42. Therefore, in a state where the vibrator 19 is movable in the vertical direction, the vibrating plate 15 of the two-sonic wave lifting and transporting device 42 is excited, and the two vibrating plates 15 can be held by the action of the reflecting surface 31a. The amplitude of the ends is in the same state. By utilizing this state, it is easy to rectify the alignment of the respective acoustic wave lifting units 12a, 12b of the adjacent ultrasonic wave lifting and transporting means 42. (12) In the plurality of sonic wave lifting and transporting devices 42 arranged in series, the reflecting surface 31a is disposed at a position corresponding to the transfer position of the object 16. The sound waves reflected on the reflecting surface 31a are radiated upward from between the vibrating plates 15. Therefore, the floating force of the object 16 that is transferred in the transfer position is increased. Therefore, the end portion of the object 16 does not interfere with the end portion of the vibrating plate 15, and the vibrating plate 15 that is transferred (transferred) by one of the vibrating plates 15 to the other side can be smoothly performed. Next, a third embodiment of the present invention will be described in accordance with Figs. 5(a) and 5(b). The object floating conveyor 1 1 as the acoustic wave lifting device of the present embodiment includes a gap holding means for holding a gap between the reflecting surface 31 a of the reflecting plate 31 and the diaphragm 115, and the first The implementation is different. The same portions as those in the first embodiment are denoted by the same reference numerals, and the detailed description is omitted, and the differences will be described. When the vibrating plate 15 becomes long, and the arrangement interval of the acoustic wave reflecting means 28 (the setting pitch 1276588 (pitch)) becomes large, when the vibrating plate 15 is greatly deflected, the vibrating plate 15 can contact the reflecting surface 3 1 a The possibility. [The arrangement interval (setting pitch) is large] means that the aforementioned pitch is 10 wavelengths or more of the vibration wavelength of the diaphragm 15 . In the present embodiment, a gap maintaining means for maintaining the gap between the vibrating plate 15 and the reflecting surface 31a is provided even if the vibrating plate 15 is deflected close to the reflecting surface 31a. As shown in Figs. 5(a) and 5(b), a plurality of (e.g., two) sound wave reflecting means 28 are disposed between the two flared speakers 17a, 17b. Screw portions are formed at both ends of the stay 30. The lower end of the strut 30 is screwed to the bottom plate 29. A nut 3 1 c is fixed to the bottom surface of the reflecting plate 31 as a reflecting member. The reflector 3 1 is fixed to the pillar 30 by the nut 3 1 c being screwed to the upper end of the strut 30. The reflecting plate 31 is composed of a flexible plate material. The reflector 3 1 is formed of a material having a lower modulus of elasticity than the diaphragm 15 . For example, the material of the vibrating plate 15 is made of an aluminum alloy, and the material of the reflecting plate 31 is made of a resin. The reflecting plate 31 is used in the range of elastic deformation. The reflecting plate 31 is formed of a flexible plate material to constitute a gap holding means. The reflecting plate 31 forms a circular shape having a diameter smaller than the width of the vibrating plate 15 (for example, about 80%). The peripheral portion of the upper side of the reflecting plate 31 is chamfered in an arc shape. As shown by the solid line in Fig. 5(a), in the state where the object 16 exists at a position corresponding to the center of the reflecting plate 31, the sound wave emitted from the vibrating plate 15 at the time of excitation of the vibrating plate 15 The reflection plate 31 is radiated substantially uniformly. Moreover, the interval (gap) between the vibrating plate 15 and the reflecting plate 31 is also surely maintained. The object 16 is moved from this state to a position deviated from the position corresponding to the center of the reflecting plate 31. As shown in Fig. 5(b), in a state of being moved between the two reflecting plates 31, the amount of deflection of the vibrating plate 15 against the reflecting plate 31 becomes in the longitudinal direction of the vibrating plate 1 5 -19 - 1276588. Not equal. That is, the amount of deflection of the portion of the vibrating plate 15 on the side of the object 16 becomes large. In this state, the reflecting plate 31 is rigid and has no flexibility, and the vibrating plate 15 is turned into a top surface close to the end of the reflecting plate 31 of the object 16 side, that is, the reflecting surface 3 The state of the end contact of 1 a. However, in the present embodiment, since the reflection plate 31 is configured to be flexible, when the vibration plate 15 is bent to approach the reflection surface 31a, the reflection plate 3 is caused by the action of the sound wave emitted from the vibration plate 15. 1 flexing. Therefore, even if the vibrating plate 15 is burned to approach the reflecting surface 31a, the gap between the vibrating plate 15 and the reflecting surface 31a is maintained, and the contact between the vibrating plate 15 and the reflecting surface 31a is prevented. The amount of deflection of the reflecting plate 31 is zero at the portion corresponding to the strut 30. The deflection of the portion of the reflecting plate 31 on the side of the object 16 becomes larger than the deflection of the portion of the reflecting plate 31 on the opposite side of the strut 30. In addition, the amount of deflection is 1 mm or less. In the present embodiment, in addition to the advantages of (1), (2), (4) to (6), and (8) to (10) of the first embodiment, the following advantages are obtained. (13) The sound wave reflection means 28 includes a gap holding means for maintaining a gap between the reflection surface 31a and the diaphragm 15. Therefore, even if the vibrating plate 15 is deflected close to the reflecting surface 31a, the gap between the vibrating plate 15 and the reflecting surface 31a is maintained, and the contact between the vibrating plate 15 and the reflecting surface 31a is also prevented. As a result, generation of dust or noise due to contact between the vibrating plate 15 and the reflecting plate 31 can be prevented. (14) The reflecting plate 31 (reflecting member) serving as the gap holding means is formed of a flexible plate material. Therefore, in the case where the vibrating plate 15 is deflected, the reflecting plate 31 is also configured to be flexed in accordance with the deflection, and the gap between the vibrating plate 15 and the reflecting surface 31a can be maintained. -20- 1276588 (1 5 ), the reflecting plate 31 is formed of a material having a lower modulus of elasticity than the diaphragm 15 . Therefore, in response to the deflection of the vibrating plate 15, the reflecting plate 3 1 which is in a state of being kept in a gap with the vibrating plate 15 is easily formed. (16) Since the reflecting plate 31 is made of a resin, the reflecting plate 3 1 which is deflected to maintain a gap with the diaphragm 15 in accordance with the deflection of the diaphragm 15 is easily obtained. Moreover, the weight reduction of the reflecting plate 31 is easier than that of other materials. Next, a fourth embodiment of the present invention will be described based on Fig. 6 . In the present embodiment, the object 16 is lifted on the side corresponding to the vibrator 19 of the vibrating plate 15, that is, in the side of the vibrating plate 15 facing the vibrator 19, which is larger than the first embodiment. the same. Further, in response to the above, the position of the reflecting surface 31a of the sound wave reflecting means 28 becomes lower than the vibration plate 15, which is different from the first embodiment. The same portions as those in the first embodiment are denoted by the same reference numerals, and detailed description thereof will be omitted. As shown in Fig. 6, the object floating conveyor 5 1 is attached to the support plate 14 with the flared speakers 17a and 17b disposed on the lower side, and the vibrator 19 is disposed on the upper side, and the vibrator 19 is fixed to the support plate. 1 4. The vibrating plate 15 is fixed to the lower ends of the horn speakers 17a, 17b. The sound wave reflection means 28 is disposed at a position corresponding to the substantially center of the long direction of the vibration plate 15 in the lower side of the vibration plate 15. That is, the reflecting surface 31a of the sound wave reflecting means 28 faces the bottom surface of the vibrating plate 15 on the side opposite to the top surface of the vibrating plate 15 of the corresponding vibrator 19. In other words, the reflecting surface 3 1 a faces the first surface (bottom surface) of the vibrating plate 15 , and the vibrator 19 faces the second surface (top surface) of the vibrating plate 15 . In the present embodiment, unlike the conventional acoustic wave lifting device, the object 1 6 -21 - 1276588 is lifted by the radiation pressure of the sound wave radiated from the top surface (second surface) of the vibrating plate 15 facing the vibrator 19. And transmit in a floating state. Therefore, its transmission range becomes a range between the two horn loudspeakers 1 7 a, 1 7 b. In the present embodiment, in addition to the advantages of (1) to (10) of the first embodiment, the following advantages are obtained. (17) In the first embodiment, in the configuration in which the vibrator 19 is disposed below the vibrating plate 15, the position of the vibrating plate 15 is set to be the minimum of the vibrator i9 and the trumpet speakers 17a and 17b. The total of the (height) is still high. However, in the configuration of the fourth embodiment, the position of the diaphragm 15 is preferably provided below the diaphragm 15 with a space in which the sound wave reflecting means 28 is disposed. Therefore, the position of the diaphragm 15 can be lowered as compared with the configuration in which the vibrator 19 is disposed below the diaphragm 15. The embodiment of the present invention is not limited to the above, and may be configured as follows, for example. The gap holding means is not limited to the configuration in which the reflecting plate 31 is made flexible. For example, the reflecting plate 31 may be formed of a rigid body, and the support 30 supporting the reflecting plate 31 may be configured to be tiltable so as to maintain a gap between the vibrating plate 15 and the reflecting surface 31a. As shown in Fig. 7U) and Fig. 7(b), the configuration of the holding stay 30 at the tilting position and the vertical position is such that a disc-shaped locking portion 38 is protruded from the lower end of the strut 30, and is formed into two. The bottom plates 29a, 29b form a restriction groove 39 engageable with the locking portion 38. The lower portion of the restricting groove 39 is formed in a horizontal shape, and the upper portion of the restricting groove 39 is formed in a diagonal shape in which the distance from the lower portion is increased as approaching the strut 30. In a state in which the sound wave emitted from the diaphragm 15 is substantially uniformly received in the vertical direction in the vertical direction, the support 30 is held in a state perpendicular to the bottom plates 29a and 29b, and becomes the state shown in Fig. 7(a). When the sound wave emitted from the vibration-22-1276588 plate 15 acts unevenly on the reflecting surface 31a, the pillar 30 moves obliquely, and the portion of the reflecting surface 3丨a having a strong 俾 force moves downward to maintain the inclination. The position is changed to the state of the 7th (b) figure. When the strut 30 is tilted, the portion which becomes lower means that the portion of the reflecting surface 31a opposite to the opposite side of the strut 30 becomes higher. Therefore, the amount of tilting movement of the strut 30 is set such that the portion where the reflecting plate 31 becomes higher does not contact the vibrating plate 15 as the strut 30 moves obliquely. In this case, the object 16 is present between the pillars 30. As shown in Fig. 7(b), if the deflector 31 is tilted by the vibration of the vibrating plate 15, the vibrating plate 15 approaches the reflector 31. Then, since the strut 30 is tilted, the gap between the vibrating plate 15 and the reflecting surface 31a is maintained. The configuration of the holding stay 30 in the tilting position and the vertical position is not limited to the combination of the locking portion 38 and the aforementioned restricting groove 39. For example, in the above configuration, the male screw portion is formed at the lower end of the column 30, and the female screw portion of the male screw portion to which the stay 30 is screwed may be formed in the bottom plate 29 in a state where the back-lash is large. In this case, the inclination angle of the strut 30 is restricted by the gap of the backlash. The configuration in which the support 30 is tilted and the reflection surface 31 1a is inclined is not limited to the above configuration, and the entire member of the support 30 is formed of an elastic member such as rubber, or a part of the support 30 is formed by an elastic member, for example, an upper end portion, an intermediate portion, or The lower end or the like is also acceptable. In this case, the configuration is simpler than the configuration using the restriction groove 39 or the backlash of the screw. In addition to the configuration in which the support post 30 is tiltably movable, as in the third embodiment, the reflection member (reflector 31) may be flexibly configured. In this case, the gap between the vibrating plate 15 and the reflecting surface 31a can be more surely maintained. The gap holding means may be configured such that the strut 30 is tilted and moved so as to be tiltable. -23 - 1276588 The reflecting plate 31 may be formed. For example, as shown in Fig. 8(a), the reflector 31 may be formed by interposing a rubber sheet 31e between two sheets 31d made of a material having no flexibility, as shown in Fig. 8(a). . Further, as shown in Fig. 8(b), a rubber columnar material 3 1 f may be interposed between the two sheets 3 1 d made of a material having no flexibility. In these configurations, the pillars 30 are often held in a vertical state. In a state where the reflecting surface 31a receives the sound waves emitted from the vibrating plate 15 substantially uniformly in the vertical direction, the reflecting surface 31a is held in a horizontal state. Further, when the sound wave emitted from the vibrating plate 15 acts unevenly on the reflecting surface 31a, the portion of the vibrating plate 15 having a strong urging force is moved downward, and the upper plate member 3d is moved obliquely. The reflecting surface 31a is parallel to the face-to-face portion of the vibrating plate 15. Therefore, the gap is held by the cymbal that the vibrating plate 15 does not contact the reflecting surface 31a. The gap holding means for causing the reflecting plate 31 to be tiltably movable may be provided with the reflecting plate 31 (reflecting member) directly on the bottom plate via the rubber plate 3 1 e or block without the support post 30. 29 or the structure on the support board 14. Further, the gap holding means may be supported by the bottom plate 29 or the support plate 14 by a columnar material 3 1 f made of rubber. In the case where the reflecting plate 31 is made flexible, the thickness of the reflecting plate 31 is not limited thereto, and may be formed thinner as long as it is away from the support 30. The gap holding means is not limited to the configuration of the first embodiment, and can be applied to the reflecting plate 31 having the concave portion 3 1 b as in the second embodiment or the vibrator 19 facing the vibrating plate 15 as in the fourth embodiment. The side of the object that floats the object 16 floats the conveyor 5 1 . The sound wave reflecting means 28 is provided with a pressure detecting means capable of detecting whether the pressure acting on the reflecting surface 31a is -24 - 1276588 or not. The pressure detecting hand may also be provided with a pressure sensor that continuously detects the pressure acting on the reflecting surface 31a. As shown in Fig. 9(a), a load cell 32 is disposed between the lower end of the strut 30 and the bottom plate 29 as a pressure detecting means. In this case, the pressure acting on the reflection 31a can be continuously detected by the output signal of the load cell 32, and the floating force to the object 16 of the soonic lifting device can be constantly monitored. Therefore, regardless of whether or not the exciting voltage is normally output by the oscillator 26, it is possible to detect that the vibration state of the diaphragm 15 is abnormal. It is possible to detect whether or not the pressure acting on the reflecting surface 3 U is equal to or higher than a predetermined pressure. The pressure detecting means can be provided with a pressure detecting means capable of detecting whether or not the pressure is equal to or higher than a predetermined pressure. For example, as shown in Fig. 9(b), the hollow structural strut 30 forms a hole 34 in the reflection 31 at a position corresponding to the hollow portion 33 of the strut 30. Further, a pressure switch 35 is disposed at a position of the bottom plate 29 at a position facing the hollow portion 33 facing each other. In this case, if the radiation pressure of the sound wave emitted from the diaphragm 15 exceeds a predetermined pressure, the pressure switch 35 operates. This configuration also detects whether the lifting force of the object 16 to the sonic lifting device exceeds a predetermined enthalpy. Therefore, it is possible to utilize, for example, the detection of abnormality by setting the predetermined pressure to an appropriate pressure. In the case where a plurality of vibrating plates 15 are arranged in parallel, the acoustic wave reflecting means is not limited to the configuration in which the reflecting plates 31 are commonly used for the plurality of vibrating plates 15, and the acoustic wave reflecting means 28 independent of each of the vibrating plates 15 may be used. . The shape of the counter plate 3 1 is not limited to a quadrangular shape, and if the pressure of the wave reflected by the reflecting surface 31a is effective to the area necessary for the vibrating plate 15, it may be a perfect shape. If the shape of the reflecting plate 31 is circular, in order to adjust the height of the reflection 3 1 a, even if the reflecting plate 31 is rotated, the force of the surface of the counter-force is set to 28. The radiographing surface -25 - 1276588 plane 3 1 a has always been the same shape for the projection image of the vibrating plate 1 'will not give the state of the sound wave reflected by the reflecting surface 31a. Therefore, instead of arranging the male screw portion 3 Oc at two positions in the support member 30, the reflector plate 3 is not rotated, and a part of the support post 30 is rotated to adjust the height, as shown in Fig. 10(a). A configuration in which a male screw portion is disposed at a position in the support post 30 can be employed. In this case, the configuration for height adjustment becomes simple. Further, in this case, the end portion of the reflecting surface 31a may be chamfered into an arc shape. Instead of the height adjustment of the reflecting plate 31 by manual operation, the reflecting plate 31 can be supported by an electric cylinder, a linear actuator, or the like, and the height can be automatically adjusted. The sound wave reflecting means 28 may not be able to adjust the height of the reflecting plate 31. The sound wave reflection means 28 may be configured to be supported by the elastic member as the support 30 of the support portion of the reflection plate 31. For example, as shown in Fig. 1(b), the support cylinder 3 is disposed on the bottom plate 29, supported in a state where the lower portion of the support 30 is slidably inserted into the support cylinder 36, and a spring 37 is disposed as Elastic member. Rubber can also be used for the elastic member. In this case, in the case where a large force acts on the reflecting surface 31a by the vibrating plate 15, the impact can be absorbed by the elastic member. In the case where the fixed vibrator 19 is supported by the support plate 14, the gusset sheet 23a may not be provided, and an elastic means such as rubber or spring is interposed between the support plate 14 and the flange 23, and within the elastic range of the elastic means, The vibrator 19 is movably fixed in the up and down direction. In this case, when the alignment adjustment of the plurality of acoustic wave lifting units 12a, 12b is performed, the adjustment of the crevice sheet 23a is not required, and the alignment adjustment operation becomes simpler. The arrangement position -26-1276588 of the sound wave reflection means 28 for suppressing the deflection of the diaphragm 15 is not limited to the position corresponding to the substantially center of the long direction of the diaphragm 15. Further, a plurality of sound wave reflecting means 28 may be disposed on one of the vibrating plates 15. In the case where a plurality of configurations are arranged, it is preferable to arrange the center of the vibrating plate 15 to be symmetrical. In the configuration in which a plurality of sonic wave lifting devices 42 are arranged in series, the sound wave reflecting means 28 disposed at a position corresponding to the transfer position of the object 16 between the sound wave lifting and transporting means 42 is not provided in the reflecting plate 31. The concave portion 31b may have a flat surface as shown in Fig. 1 as a flat surface. Even if the reflecting surface 31a is a flat surface, a part of the sound wave reflected by the reflecting surface 31a advances upward between the adjacent vibrating plates 15 and the radial pressure acts on the object 16 in the middle of the transfer. However, the effect of the reflection of the sound wave is increased by the concave portion 3 1 b. In the configuration in which a plurality of sonic wave lifting and lowering devices 42 are arranged in series, the sound wave reflecting means 28 disposed at a position corresponding to the transfer position of the object 16 between the sound wave lifting and conveying device 42 is not only used for The sound wave reflected by the reflecting surface 31a enhances the lifting force of the object 16 and can also be used to easily adjust the alignment of the end portions of the adjacent vibrating plates 15 . For example, the gap between the ends of the vibrating plates 15 adjacent to each other is reduced, so that it is difficult to advance the sound waves upward. In the configuration in which a plurality of sonic wave lifting and lowering devices 42 are arranged in series, only the sound wave reflecting means 28 may be disposed at a position corresponding to the transfer position of the object 16 of the sound wave lifting and conveying device 42. In other words, the acoustic wave reflecting means 28 is not disposed in the intermediate portion in the longitudinal direction of the vibrating plate 15 of each of the acoustic wave lifting units 1 2 a and 1 2 b. Even in this case, the transfer (transfer) of the object 16 can be smoothly performed. The deflection suppression of the vibrating plate 15 is performed by other methods. In the configuration in which the object 16 is transmitted in a floating state, the excitation -27- 1276588 means that the switching can be performed to generate a state in which the wave is generated and a state in which the standing wave is generated, and it is also possible to generate only The configuration of the wave is performed, and the configuration of the excitation of the diaphragm 15 is stopped when the movement of the object 16 is stopped. In the configuration in which the object 16 is transported by the wave in a floating state, the vibrator 19 disposed at both ends of each of the vibrating plates 15 is selectively connected to the oscillator 26 and the load circuit 27, respectively. In this case, the transfer direction of the object 16 can be selected by switching between the state connected to the oscillator 26 and the state connected to the load circuit 27. Further, by rapidly switching the aforementioned connection state, the object 16 can be held at a substantially constant position in the floating state. The configuration in which the object 16 is transported in the ascending state is a configuration in which the wave is generated in the diaphragm 15 , and the standing wave can be generated in the diaphragm 15 to hold the object 16 in a floating state, and the state is given. The object 1 6 propulsion force is given to the means. The propulsive force imparting means has, for example, a nozzle that strongly blows a compressed gas to the object 16. In this case, the configuration of the excitation means is simpler than the configuration for generating the wave. In the case of the configuration in which the standing wave is generated, instead of the configuration in which the vibrator 19 is disposed on both sides of the vibrating plate 15, the vibrator 1 9 is provided only at one end of the vibrating plate 15 and the trumpet speaker is provided at the other end. The composition of support. In this case, the construction becomes simpler. The number of the vibrating plates 15 is not limited to two, and it is also possible to arrange the other vibrating plates in parallel between the vibrating plates 15 in the case where the objects 16 having a wide width are floated. The other diaphragm is not necessarily required to have a configuration in which a wave is generated to generate a standing wave. In this case, the deflection of the object 16 itself caused by the weight of the object 16 is suppressed, and the object can be smoothly conveyed in the floating state. The acoustic wave floating device is not limited to the radiation pressure-sustaining holder which is only completely irradiated with sound waves. -28- 1276588 The composition of the body. For example, in the case of a glass substrate that conveys a liquid crystal panel, in the case of a size of 1 mm or less and a width of 1 m or more, the rollers are supported at both ends in the width direction, and the center is relaxed, in a horizontal state. It is suitable for the sonic lifting device that uses the radiation pressure of the sound wave. The sonic floating device is not limited to floating up and holding the object in a horizontal state. For example, as shown in Fig. 2, the support portion (roller) 53 of the lower end of the movable object 16 and the object floating device 54 are disposed on the carriage 52. The object floating device 54 applies a radiation pressure of the sound wave generated by the diaphragm 15 to the object supported by the support portion 53, and the object 16 is tilted in the non-contact state. The vibrator constituting the object floating device 54 is fixed to a frame 55 fixed to the bogie 52, and the sound wave reflection 28 is also supported by the frame 55. In this case, since the lower end of the object 16 is supported by the support portion 5 3, the object 16 is strictly not in the ascending state, but the object vibrating plate 15 is maintained in the floating state. The sonic lifting device is not limited to air, but can also be used for lifting in water. In this case, as in the fourth embodiment, when the vibrator 19 is disposed above the vibrating plate 15, the sound-absorbing wave floating device in which the vibrating process of the vibrator 19 is changed is used instead of the sound wave emitted from the vibrating plate 15. In the configuration in which the lifting of the object and the deflection of the vibrating plate 15 are suppressed, the radiation of the acoustic wave emitted from the vibrating plate 15 is also applied to both of the floating of the floating wave lifting device of the object. For example, in the acoustic wave floating structure in which the vibrator plate 9 is disposed on the upper side of the vibrating plate 15 as in the fourth embodiment, a standing wave is generated in the vibrating plate 15 and the bottom surface is the reflecting means 28. Further, the support of the vibrator 19 is not supported by the support member 13 to support the thickness of the vibrator 19, and the support can be held by the 16-series means. The release can be with the sound, in the device sound wave or vibration -29 - 1276588 squad 2 6 and so on the support board 1 4, and become a free state. In this configuration, when the vibrating plate 15 is excited in a state where the object 16 is placed on the top surface of the vibrating plate 15, the radiation pressure of the acoustic wave (standing wave) emitted from the vibrating plate 15 is radiated. 'The object 16 is held against the vibrating plate 15 in a floating state. Further, 'the sound wave radiated from the lower side of the vibrating plate 15 is reflected on the bottom surface', and the vibrating plate 15 is pressed, so that the vibrating plate 15 is held in a state of being non-contact with the bottom surface, and the acoustic wave lifting device itself is held. The state of being lifted from the bottom. Therefore, if the force in the lateral direction is applied to the sonic lifting device, the acoustic wave lifting device that holds the object 16 in the floating state can be moved with a small force. Instead of the configuration in which a plurality of vibrating plates 15 are used to float and hold the object 16, it is also possible to adopt a configuration in which the vibrating plate is used to lift and hold the object 16. For example, in the case where the object 16 having a narrow width is lifted, the vibration plate 15 is also stably transferred. The plurality of vibrators 19 may share the oscillator 26. The shape of the horn loudspeakers 17a and 17b is not limited to a flat rectangular parallelepiped shape, and may be a narrow shape such as a columnar shape or a slightly truncated cone shape. The shape of the object 16 to be held by the lift is not limited to a square shape, and may be any shape such as a triangle or other polygonal or circular shape. The horn-shaped speaker 1 7 a, 1 7 b fixed to the vibrating plate 15 is not limited to the use of the screw 18, and may be bonded using an adhesive or welded or welded. The vibrator 19 is not limited to the Langewen (l a n g e v i η) vibrator, and other vibrators can be used. BRIEF DESCRIPTION OF THE DRAWINGS Fig. 1(a) is a schematic perspective view showing an object floating transfer -30-1276588 feeding device according to a first embodiment of the present invention, and Fig. 1(b) is assembled in a first a) A schematic side view of the sonic buoy unit of the device of the figure. Fig. 2(a) is a schematic perspective view of the sound wave reflecting means incorporated in the apparatus of Fig. 1(a), and Fig. 2(b) is a mode of the fixed state of the vibrator incorporated in the apparatus of Fig. 1(a). Figure. Fig. 3(a) and Fig. 3(b) are diagrams showing the operation of the apparatus of Fig. 1(a). Fig. 4U is a schematic side view of the object floating conveyor of the second embodiment of the present invention, and Fig. 4(b) is a partial detailed view of Fig. 4(a). Fig. 5(u) is a schematic side view of the object floating conveyor of the third embodiment of the present invention, and Fig. 5(b) is a partial schematic side view for explaining the operation of the apparatus of Fig. 5(a). Figure 6 is a schematic side view of the object floating conveyor of the fourth embodiment of the present invention. Fig. 7(a) and Fig. 7(b) are schematic side views showing a gap maintaining means according to another embodiment of the present invention. Fig. 8(a) and Fig. 8(b) are schematic side views showing a gap maintaining means according to another embodiment of the present invention. Figs. 9(a) and 9(b) are schematic side views showing a sound wave reflecting means according to another embodiment of the present invention including a pressure detecting means. Fig. 10U is a schematic perspective view of a sound wave reflecting means according to another embodiment of the present invention. Fig. 10(b) is a schematic side view showing a sound wave reflecting means according to another embodiment of the present invention. Fig. 11 is a schematic side view showing a sound wave reflecting means according to another embodiment of the present invention. -31- 1276588 Fig. 1 is a schematic perspective view showing an object floating conveyor according to another embodiment of the present invention. DESCRIPTION OF SYMBOLS 11 Object floating conveyor 12a, 12b Acoustic lifting unit 13 Pillar 14 Supporting plate 15 Vibrating plate 16 Object 17a, 17b Flare speaker 18 Screw 19 Vibrator 20a ' 20b Piezoelectric element 21 Electrode plate 22a ' 22b Metal Block 23 Flange 23a Chute 24 Bolt 25a, 25b Wiring 26 Oscillator 27 Load circuit 27a Switch 28 Acoustic reflection means 29 Backplane 29a ' 29b Backplane
-32- 1276588 30 支 柱 30a 下 側 部 30b 上 側 部 30c 雄 螺 絲 部 3 1 反 射 板 31a 反 射 面 3 1b 凹 部 31c 螺帽 31d 、 31e 板 材 31f 柱 狀 材 32 荷 重 單 元 33 中 空 部 34 孔 35 壓 力 開 關 36 支 持 筒 37 彈 簧 38 卡 止 部 39 限 制 槽 41 物 m 浮 昇 傳 送 裝 置 42 音 波 浮 昇 傳 送 裝 置 51 物 體 浮 昇 傳 送 裝 置 52 台 車 53 支 撐 部 (滾子） 54 物 體 浮 昇 裝 置 55 框 架 -33--32- 1276588 30 Post 30a Lower side portion 30b Upper side portion 30c Male screw portion 3 1 Reflecting plate 31a Reflecting surface 3 1b Recessed portion 31c Nut 31d, 31e Plate 31f Column material 32 Load unit 33 Hollow portion 34 Hole 35 Pressure switch 36 Support cylinder 37 Spring 38 Locking portion 39 Restricting groove 41 Object m Floating conveyor 42 Acoustic buoyant conveyor 51 Object buoyant conveyor 52 Pallet 53 Support (roller) 54 Object buoyancy device 55 Frame-33-