9411824894118248
1275789 案號 五、發明說明（1) 【發明所屬之技術領域】 本發明係關於一種濕度感測器 、生 於利用一摻雜無機鹽類之感測居了二7 = ί，特別是關 圍，藉此提弁、、Sθ Έϊ二、9 ，以杧加電容值之變化範 、能之濕度感測器及其製造方法二 '，有效楗南早位成本效 【先前技術】 / 近年來由於精密科技相關領域蓬勃發展 的恆定也相對重要，尤里在、、w 義益使用衣i兄 快速摘測其變化方面’必須要能夠 Γ則濕度資訊的工具，是使用各種型式的 。：:::♦以：到環境的相對濕度資訊’在許多種類的 /…、又Ϊ /、态，白用之濕度感測器通常係以不同之量測方 法作為分類之依據，其中以電容式濕度感測器由於呈有較 佳的線性度與較低的製作成本，故最為廣泛使用，其原理 就是利用濕度感測器吸收環境水氣分子後，電容值產生變 =、，以獲得濕度-電容值訊息，此種方法已逐漸成為濕度 t測方法之主流。電容式濕度感測器不僅提供高靈敏度之 檢測方法，並可克服傳統濕度感測器之結構複雜、製作流 程繁瑣耗時且效能不佳等問題。 丨習用製作電容式濕度感測器之方法可歸納為下列幾種： 〔1〕平面偵測電極結構：在一玻璃或矽基板等基材上 鑛上一層金屬電極層，將該金屬電極經由光刻、顯影、蝕 刻荨程序後形成彳貞測電極，並在該彳貞測電極上塗佈一或多 層吸濕材質作為一感測層，經由該感測層吸收水氣後，由 -電容值之改變得到濕度的資訊1275789 Case No. V, Invention Description (1) Technical Field of the Invention The present invention relates to a humidity sensor, which is derived from the use of a doped inorganic salt, and has a sensitivity of 7 = ί, especially In order to improve the value of the capacitance value, the humidity sensor of the energy and the method of manufacturing the same, the effective cost of the early morning cost [previous technology] / in recent years due to The constant development of precision science and technology related fields is also relatively important. Yuri is using the various tools in the form of “we must check the humidity information.” ::::♦:: Relative humidity information to the environment 'In many types of /..., Ϊ /, state, white humidity sensors are usually based on different measurement methods, including capacitance The humidity sensor is most widely used because of its better linearity and lower production cost. The principle is that after the humidity sensor absorbs the ambient water and gas molecules, the capacitance value changes to get the humidity. - Capacitance value message, this method has gradually become the mainstream of humidity t measurement method. Capacitive humidity sensors not only provide high-sensitivity detection methods, but also overcome the problems of complex structure of traditional humidity sensors, cumbersome and time-consuming production processes, and poor performance. The method for making a capacitive humidity sensor can be summarized as follows: [1] Planar detecting electrode structure: a metal electrode layer is cast on a substrate such as a glass or a ruthenium substrate, and the metal electrode is passed through the light. After the engraving, developing, and etching process, a detecting electrode is formed, and one or more layers of moisture absorbing material are coated on the detecting electrode as a sensing layer, and the moisture is absorbed by the sensing layer, and the -capacitance value is obtained. Change the information obtained by humidity
C:\Logo-5\Five Continents\PK9807a.ptc 第6頁 修正 T2757RQ 案號 941182^ 五、發明說明（2) :2〕立體電極結構：將一立體電極設計形成不同之立 -，欠’並在其結構中填充一吸濕材料作為一感測層，經 由4感測層吸收水氣後，由電容值之改變得漁度的 訊0 、 〔3〕懸臂樑結構：將一吸濕材質作為一感測層，塗佈 在一懸臂樑上，藉由該懸臂樑與一基板之平行電極形成一 電容結構。利用該感測層吸收水氣後因體積變化具有呈現 捲曲之特性，因而造成該懸臂樑彎曲，並藉由該懸臂樑之 ’奇曲，而使得一對平行板之距離縮短，以得到電容值之改 變而得到濕度的資訊。 I然而，在實際運用上，上述〔丨〕平面偵測電極結構之 主要關鍵為感測層〔吸濕層〕之材料，習用之電容式濕度 感測器之感測層的材質不僅成分複雜，且因取得困難故價 錢叩貝’〔2〕立體電極結構的立體結構及〔3〕懸臂樑結 構的懸臂樑構造’大都必須藉由使用一複雜之微機電製程 或半導體製程以完成該感測器主體，不僅较良粜柄、制 程費用昂貴且費時’同時單位成本效能亦不佳，而習用^ 容式濕度感測器靈敏度之規格通常只在幾個奸至數十個^ 之範圍，若需增加電容式濕度感測器靈敏度之規格至數百 個pF之範圍’必須要更複雜的製程與特殊的化學配方，以 致成本大幅提升。基於上述原因，其確實仍有必要進一步 改良上述濕度感測器及其製造方法。 有鑑於此，本發明改良上述之缺點，其採用低成本之一 感測層配方及一快速I私。4 I私係利用一感光性聚醢亞 -胺〔po 1 y i m i de〕光阻材料搭配一可潮解性無機_ _化人C:\Logo-5\Five Continents\PK9807a.ptc Page 6 Amendment T2757RQ Case No. 941182^ V. Invention Description (2) : 2] Stereo Electrode Structure: A stereo electrode design is formed into a different stand-up In the structure, a hygroscopic material is filled as a sensing layer, and after the moisture is absorbed by the 4 sensing layer, the degree of the fish is changed by the capacitance value, and [3] the cantilever structure: a moisture absorbing material is used A sensing layer is coated on a cantilever beam, and a capacitive structure is formed by the cantilever beam and a parallel electrode of a substrate. After the moisture absorption of the sensing layer, the volume change has a curling property, thereby causing the cantilever beam to bend, and the distance between the pair of parallel plates is shortened by the 'singular curvature of the cantilever beam to obtain a capacitance value. Change the information to get the humidity. I However, in practical application, the main key of the above-mentioned [丨] plane detecting electrode structure is the material of the sensing layer [hygroscopic layer], and the material of the sensing layer of the conventional capacitive humidity sensor is not only complicated in composition, And because of the difficulty, the three-dimensional structure of the two-dimensional electrode structure and the cantilever structure of the cantilever beam structure must be completed by using a complicated micro-electromechanical process or semiconductor process to complete the sensor. The main body is not only better than the handle, the process is expensive and time-consuming, and the unit cost performance is also poor. However, the sensitivity of the conventional humidity sensor is usually only in the range of several to dozens of ^, if necessary Increasing the sensitivity of capacitive humidity sensors to hundreds of pF ranges requires more complex processes and special chemical formulations, resulting in significant cost increases. For the above reasons, it is indeed necessary to further improve the above humidity sensor and its manufacturing method. In view of the above, the present invention improves the above disadvantages, which employs a low cost one sensing layer formulation and a fast I private. 4 I privately utilizes a photosensitive poly-imine-amine [po 1 y i m i de] photoresist material with a deliquescent inorganic _ _ person
1275789 案號 94118248 曰 五 ^ 發明說明（3) 物，製作一複合式感測層。藉此，， ~ 料，搭配簡易的製程技術所製作 ^用現成容易取得之材 使靈敏度提升至達到幾個nF ^私丄濕度感測器，即可輕易 “王歎十個 果可比習用之濕度感測器在單位成 祀圍’其偵測結 效能。不需複雜之設備及程序，制^ p’至少提高十倍之 少，且該技術内容之操作簡單，=二二s與成本花費甚 ，因此，本發明確實可大幅降低製:=易進行技術轉移。 單位成本效能。 乍成本及時間，進而提升 【發明内容】 本發明之主要目的儀接徂 ^ ^ 法，其係利用-感光其J造方 化合物混合形成一感測層，使本發明以；=鹽類 敏度之功效。 /、有提回濕度感測靈 本本；：之次要目的係提供-種濕度感測器及其製造方 低；；St製作成本’使本發明具有降低成本 法，用一簡：的感測器及其製造方 、速且極低成本之濕度感測器製造方 法，使本發明具有提高單位成本效能之功效。 衣&方 本：：二再一目的係提供一種濕度感測器及其製造方 =，其係利用一感光性聚醯亞胺之感測層，使本發明 ϊ :以藉ΐ標準光刻程序任意定義一預定之感測層形 I域’ U提向感測器之設計性及製作彈性，使本 具有增加設計裕度之功效。 X月 t據本發明之濕i感測器及其製造方法，其包含步驟： rilfXiiWi LC/QIKi'V1 TVimtfiH' ii · Hi — 第8頁 C:\Logo-5\Five C〇ntinents\PK9807a.ptc 1275彻案號. 94118248 年气月4曰 ____.^一 五、發明說明（4) 利用一基板製作一彳貞測電極；調配一感測層之塗料，益將 該感測層之塗料旋轉塗佈於該偵測電極上；將該感測層進 行曝光，加熱該感測層，使該感測層固化於該彳貞刹電極 上，以完成一感濕器。該感測層之塗料係利用一光卩且浪 (感光性聚醯亞胺）混合一可潮解性無機鹽類化合物製 得，其可增加電容值之變化範圍，以提升濕度感測之靈敏 -度。 【實施方式】 為了讓本發明之上述及其他目的、特徵、優點能更明顯 易懂，下文將特舉本發明較佳實施例，並配合所附圖武’ 作詳細說明如下。 請參照第1至7圖所示，本發明較佳實施例之濕度感測11 及其製造方法包含步驟： 、〔1〕、利用一基板1製作一偵測電極1 1 ; 〔2〕、調配一感測層2之塗料，並將該感測層2之塗料 旋轉塗佈於該偵測電極11上； 〔3〕、將該感測層2進行曝光；及 〔4〕、加熱該感測層2，使該感測層2固化於該偵測電 極11上，以完成一感濕器。 請參照第1及2 A圖所示，本發明之濕度感測器及其製造 方法第一步驟係：〔1〕、利用一基板1製作一偵測電極11 (interdigitated electrode〕，以作為量測電容值之導 體，該基板1較佳選自玻璃、聚碳酸酯塑膠 〔po 1 ycarbonate，PC〕、聚甲基丙烯酸甲酯 •〔poly-methylmethacrylate，PMMA，俗稱有機玻璃或壓1275789 Case No. 94118248 曰 5 ^ Invention Description (3) The object is a composite sensing layer. In this way, ~ material, with simple process technology to make ^ use the ready-made material to increase the sensitivity to a few nF ^ private humidity sensor, you can easily "wang sigh ten fruit comparable to the humidity The sensor is in the unit of the surrounding area's detection performance. No complicated equipment and procedures, the system ^ p' is increased by at least ten times, and the operation of the technical content is simple, = 22 s and cost is very expensive Therefore, the present invention can significantly reduce the system: = easy to transfer technology. Unit cost effectiveness. 乍 cost and time, and then improve [invention] The main purpose of the present invention is to use the method of sensitizing The J compound compound is mixed to form a sensing layer, so that the invention has the effect of the salt sensitivity; /, the refreshing humidity sensor; and the secondary purpose is to provide a humidity sensor and The manufacturing cost is low; the St manufacturing cost makes the invention have a cost reduction method, and the invention has a simple unit sensor, a manufacturer thereof, and a fast and extremely low-cost humidity sensor manufacturing method, so that the present invention has an increase in unit cost. Efficacy衣&方本:: 二再一目 provides a humidity sensor and its manufacturer=, which utilizes a photosensitive polyimide polyimide sensing layer to make the invention ϊ: by standard lithography The program arbitrarily defines a predetermined sensing layer I domain 'U to the sensor design and manufacturing flexibility, so that this has the effect of increasing the design margin. X month t according to the present invention, the wet i sensor and Manufacturing method comprising the steps of: rilfXiiWi LC/QIKi'V1 TVimtfiH' ii · Hi - Page 8 C:\Logo-5\Five C〇ntinents\PK9807a.ptc 1275 Case number. 94118248 Year of the month 4曰____ ^5, invention description (4) using a substrate to make a test electrode; a coating of a sensing layer, the coating of the sensing layer is spin coated on the detecting electrode; the sensing The layer is exposed, the sensing layer is heated, and the sensing layer is cured on the brake electrode to complete a moisture sensor. The coating layer of the sensing layer utilizes a diaphragm and a wave (photosensitive poly Amine) is prepared by mixing a deliquescent inorganic salt compound, which increases the range of capacitance values to enhance humidity sensing. The above and other objects, features, and advantages of the present invention will become more apparent and understood. Referring to FIGS. 1-7, the humidity sensing 11 and the manufacturing method thereof according to the preferred embodiment of the present invention comprise the steps of: [1], using a substrate 1 to fabricate a detecting electrode 1 1; [2], blending a sensing layer 2 coating, and the coating of the sensing layer 2 is spin-coated on the detecting electrode 11; [3], exposing the sensing layer 2; and [4], heating the sensing Layer 2, the sensing layer 2 is cured on the detecting electrode 11 to complete a moisture sensor. Referring to FIGS. 1 and 2A, the first step of the humidity sensor and the method of manufacturing the same according to the present invention is: [1], using an substrate 1 to form an interdigitated electrode 11 as a measurement. The substrate of the capacitor value is preferably selected from the group consisting of glass, polycarbonate plastic (PC), polymethyl methacrylate (PMMA), commonly known as plexiglass or pressure.
C:\Logo-5\Five Continents\PK9807a. ptc 第9頁 五、發明說明（5) 克力〕及矽晶圓基板。首先，以Piranha溶液（h2〇2 : h2S04 - 1 · 3〕將一玻璃基板1清洗乾淨，再將 基板1以電子搶蒸鑛〔E，an〕之方式錄丄 之厚度約為5 0 0 X，該鉻層係作為金屬電極之黏著層；接 著鑛上一層導電層，該導電層之厚度約為2 0 0 0 A，^該導電 層選自金屬如金〔Au〕、鉻〔（^〕及其他可導電之金屬或 •非金屬，如銦錫氧化物（IT0)等。在完成該導電層後， 利用▲一 正光阻（ΑΖ4620，Clariant Corp· ， USA〕旋轉塗 佈在該導電層上，再利用一光蝕刻技術搭配一光罩將該光 阻曝光，在曝光後利用一AZ40 0K顯影液，將曝光之該光阻 移去’此時光罩上的偵測電極圖形就轉移到該光阻上；最 後再利用金蝕刻與Cr —7金屬飯刻溶液進行金與鉻之蝕刻， 接著將該光阻以一氫氧化鈉溶液去除，即得到如第2 A圖之 該偵測電極11，每一偵測寬度及間距均為5〇um，且該偵測 電極11較佳形成指叉狀。 請參照第1及2B圖所示，本發明之濕度感測器及其製造 方法第二步驟係：調配一感測層2之塗料，並將該感測層2 之塗料旋轉塗佈於該偵測電極11上。該感測層2之成分為 感光性光阻材料，例如感光性聚酿亞胺〔負型， P〇lyimide7320，Arch chemical Inc· ，USA〕21 以及可潮 解性無機鹽類化合物，其中該感測層2之可潮解性無機鹽 類選自驗金族之鐘、納、卸與鹼土族之錢、妈之化合物， 例如氣化鈉〔NaCl〕22粉末。上述二成分之混合比例分別 可選擇為（1 ml :1.7xl0-3 mole〕、〔1 ml :5·Οχ1〇-3 ，mole〕或（1 m 1 : 8· 5 x 1 Ο·3 mo 1 e〕，該感測層2之面積較C:\Logo-5\Five Continents\PK9807a. ptc Page 9 V. INSTRUCTIONS (5) 克力〕 and 矽 wafer substrate. First, a glass substrate 1 is cleaned with a Piranha solution (h2〇2: h2S04 - 1 · 3), and the thickness of the substrate 1 is recorded as an electron rush (E, an) of about 5,000 X. The chromium layer is used as an adhesive layer of the metal electrode; then a conductive layer is deposited on the layer, the conductive layer has a thickness of about 200 A, and the conductive layer is selected from the group consisting of metals such as gold [Au] and chromium [(^] And other conductive metals or non-metals, such as indium tin oxide (IT0), etc. After the conductive layer is completed, it is spin-coated on the conductive layer by using a positive photoresist (ΑΖ4620, Clariant Corp., USA). Then, using a photo-etching technique and a mask to expose the photoresist, after exposure, an AZ40 0K developer is used to remove the exposed photoresist. At this time, the detecting electrode pattern on the mask is transferred to the light. Finally, the gold etching and the Cr-7 metal rice etching solution are used for etching the gold and chromium, and then the photoresist is removed by a sodium hydroxide solution to obtain the detecting electrode 11 as shown in FIG. 2A. Each detection width and spacing is 5 〇 um, and the detecting electrode 11 preferably forms a finger Referring to Figures 1 and 2B, the second step of the humidity sensor of the present invention and the method of manufacturing the same is to: mix a coating of the sensing layer 2, and spin-coat the coating of the sensing layer 2 The detecting electrode 11 is composed of a photosensitive photoresist material such as photosensitive polyimide (negative type, P〇lyimide 7320, Arch Chemical Inc., USA) 21 and deliquescent inorganic salt. a compound, wherein the deliquescent inorganic salt of the sensing layer 2 is selected from the group consisting of a gold-receiving clock, a nano, an unaltered earth, a mother's compound, such as a sodium carbonate [NaCl] 22 powder. The mixing ratio can be selected as (1 ml: 1.7xl0-3 mole), [1 ml: 5·Οχ1〇-3, mole] or (1 m 1 : 8· 5 x 1 Ο·3 mo 1 e), The area of the sensing layer 2 is
C:\Logo-5\Five Continents\PK9807a. ptc 修正 1275789 案號 五、發明說明（6) 隹約為1· 5 cm X 1· 7 cm。再利用一旋轉塗佈機（未標 不）將混合後的配方以旋轉塗佈的方式，塗佈於第2A圖之 该偵測電極11上。旋轉塗佈的轉速參數設定為兩個階段， 第一階段之轉速為1 0 〇 〇 r · ρ · Μ ·，進行7秒，第二階段之轉 速為7 5 0 R · Ρ · Μ ·,進行1 〇秒；此一塗佈轉速參數可得到厚 度約1 0 Oum之該感測層2，利用感光性光阻材料所製作之感 測層，可依照預定之光罩圖案，定義出預定之感測層圖 案、區域範圍’其較佳為陣列式感測層圖案。 請參照第1及2 C圖所示，本發明之濕度感測器及其製造 方法第三步驟係：將該感測層2進行曝光。為了製得單一 穩定之感測性質’利用波長為365nm之曝光機（ST-2600 5 0 0-R1，晶博科技〕對該感測層2進行曝光，曝光能量為 60 0 mJ/cm2。該感測層之平面區域形狀以曝光方式定義， 因此可以配合光罩製作出一預定形狀的感測器表面，並可 藉由多層曝光方式之辅助，製作出立體感測層結構。 ¥參照第1及2D圖所示，本發明之濕度感測器及其製造 方法第四步驟係：加熱該感測層2，使該感測層2固化於該 偵測電極11上。本發明係在一加熱板上以1 5 0 °C恆溫1 0分 鐘之條件加熱該感測層2，以去除該感測層2中之殘餘溶 劑，使得該感測層2穩固附著於該偵測電極11上。藉此， 該感測層2之感光性聚醯亞胺及氯化鈉成分即有利於提高 該偵測電極11之水氣吸收效率，以完成一感測器成品，每 一感測器之面積較佳約為1 · 6cm X 2 · 4cm。 請再參照第3至6圖所示，本發明之濕度感測器及其製造 方法之水氣吸收效率比較圖。如第3圖所示’該感測層2僅C:\Logo-5\Five Continents\PK9807a. ptc Amendment 1275789 Case No. 5. Invention Description (6) 隹 is approximately 1·5 cm X 1·7 cm. The mixed formulation was applied to the detecting electrode 11 of Fig. 2A by spin coating using a spin coater (not shown). The rotational speed parameter of the spin coating is set to two stages. The first stage speed is 10 〇〇r · ρ · Μ · for 7 seconds, and the second stage speed is 7 5 0 R · Ρ · Μ · 1 〇 second; the coating speed parameter can obtain the sensing layer 2 with a thickness of about 10 Oum, and the sensing layer made of the photosensitive photoresist material can define a predetermined feeling according to a predetermined reticle pattern. The layer pattern, the area range 'is preferably an array type sensing layer pattern. Referring to Figures 1 and 2C, the third step of the humidity sensor of the present invention and the method of manufacturing the same is to expose the sensing layer 2. In order to obtain a single stable sensing property, the sensing layer 2 was exposed using an exposure machine having a wavelength of 365 nm (ST-2600 520-R1, Crystal Technology), and the exposure energy was 60 0 mJ/cm 2 . The shape of the planar area of the measuring layer is defined by the exposure mode, so that the sensor surface of a predetermined shape can be formed with the reticle, and the three-dimensional sensing layer structure can be produced by the aid of the multi-layer exposure mode. As shown in FIG. 2D, the fourth step of the humidity sensor of the present invention and the method of manufacturing the same is: heating the sensing layer 2 to cure the sensing layer 2 on the detecting electrode 11. The present invention is applied to a heating plate. The sensing layer 2 is heated at a constant temperature of 150 ° C for 10 minutes to remove the residual solvent in the sensing layer 2, so that the sensing layer 2 is firmly attached to the detecting electrode 11. The photosensitive polyimide and sodium chloride component of the sensing layer 2 is beneficial to improve the water vapor absorption efficiency of the detecting electrode 11 to complete a sensor finished product, and the area of each sensor is better. It is about 1 · 6cm X 2 · 4cm. Please refer to the figures 3 to 6 again, the humidity sense of the present invention. FIG efficiency is a method of manufacturing and its moisture absorption. As shown in FIG. 3 'of the sensing layer 2 only
C:\Logo_5\Five Continents\PK9807a.ptc 第11頁 1275789案號94118248 年彳月/曰 修π：_ 五、發明說明（7) 香純感光性聚酿亞胺之濕度-電容值關係圖，圖中可明顯 看出水氣吸收與釋放曲線皆近似線性，但其電容值變化範 圍僅在0 · 1〜0 · 1 2 nF左右。如第4圖所示，該感測層2含有 比例為1 m 1 : 1 · 7 X 1 0-3mo 1 e之感光性聚醯亞胺與氣化鈉 〔NaC 1〕粉末之混合層，由第4圖之濕度-電容值關係圖可 以發現摻雜氣化鈉粉末後，其電容值變化範圍可提升至〇. ‘ 1〜0 · 1 6 nF。如第5圖所示，該感測層2含有比例為1 m 1 : 5. 0 X 10_3mole之感光性聚醯亞胺與氣化鈉〔NaCl〕粉末之混 合層，由第5圖之濕度-電容值關係圖可以發現摻雜較多氯 化鈉粉末後，其電容值變化範圍可大幅提升至〇. 〇1〜〇. 4 nF。如第6圖所示，該感溫層2含有比例為lml : 8. 5 X 10-3 mole之感光性聚醯亞胺與氣化鈉〔NaCl〕粉末之混合層， 由第6圖之濕度-電容值關係圖可發現摻雜更多氣化鈉粉末 後，其電容值變化範圍可大幅提升至0. (Π〜1. 4 nF左右； .由上述該感測層2之不同成分混合比例之濕度-電容值關係 圖可以說明以感光性聚醯亞胺摻雜氣化鈉粉末之該感測層 2，於氯化鈉濃度增大時，其電容值變化範圍可以提高至 少1 0倍，且由於氣化鈉取得容易且價格便宜，因此可有效 降低製造成本，並提高該感測器之單位成本效能。 \如上所述，相較於習用之濕度感測器的材質不僅成分複 雜，且因取得困難故價錢昂貴，同時其製造方法大都必須 藉由使用一複雜之微機電製程或半導體製程以完成該感測 器主體，不僅製程良率低、製程費用昂貴且費時，同時單 位成本效能亦不佳，而高成本之習用電容式濕度感測器靈 -敏度之規格通常只在幾個pF至數十個pF之範圍等缺點。因C:\Logo_5\Five Continents\PK9807a.ptc Page 11 1275789 Case No. 94118248 彳月/曰修π:_ V. Description of invention (7) Humidity-capacitance of the photosensitive polyimide It can be clearly seen that the water vapor absorption and release curves are approximately linear, but the capacitance value varies only from 0 · 1 to 0 · 1 2 nF. As shown in FIG. 4, the sensing layer 2 contains a mixed layer of photosensitive polyimide and sodium carbonate (NaC 1 ) powder in a ratio of 1 m 1 : 1 · 7 X 1 0-3 mol 1 e. The humidity-capacitance value relationship diagram in Fig. 4 shows that the capacitance value range can be increased to 〇. '1~0 · 1 6 nF after doping the gasified sodium powder. As shown in Fig. 5, the sensing layer 2 contains a mixed layer of photosensitive polyimide and sodium carbonate (NaCl) powder in a ratio of 1 m 1 : 5. 0 X 10_3 mole, and the humidity of Fig. 5 - The capacitance value relationship diagram can be found that the capacitance value range can be greatly increased to 〇. 〇1~〇. 4 nF after doping more sodium chloride powder. As shown in Fig. 6, the temperature sensing layer 2 contains a mixed layer of photosensitive polyimide and sodium carbonate (NaCl) powder in a ratio of 1 ml : 8. 5 X 10-3 mole, and the humidity of Fig. 6 - Capacitance value relationship diagram can be found that after the more gasified sodium powder is doped, the capacitance value range can be greatly increased to 0. (Π~1. 4 nF or so; the mixing ratio of the different components of the sensing layer 2 described above The humidity-capacitance value relationship diagram can explain that the sensing layer 2 of the gasified sodium powder is doped with photosensitive polyimide, and the capacitance value can be increased by at least 10 times when the concentration of sodium chloride is increased. Moreover, since the vaporized sodium is easy to obtain and inexpensive, the manufacturing cost can be effectively reduced, and the unit cost efficiency of the sensor can be improved. As described above, the material of the humidity sensor is not only complicated but also complicated. Because of the difficulty, it is expensive, and most of its manufacturing methods must complete the sensor body by using a complicated MEMS process or semiconductor process, which not only has low process yield, expensive process and time-consuming, but also unit cost performance. Bad, but high cost Capacitive humidity sensor Ling - Specifications of the sensitivity is usually only a few pF to several ten pF range of drawbacks due like.
C:\Logo-5\Five c〇ntinents\PK9807a. ptc 第12頁 1275789 案號 94HS24R_彳月4曰 修正__ 五、發明說明（8) 此，第1及2圖之本發明藉由力cr入低成本之可潮解性無機鹽 類化合物〔例如氣化鈉〕於/光阻液混合而得一感測層， 其確實可使得電容值之變化範圍增加。藉此，可提升濕度 感測之靈敏度，並有效增加該感測器之單位成本效能。 本發明已利用前述較佳實施例詳細揭示，然其並非用以 限定本發明’任何熟習此技藝者，在不脫離本發明之 和範圍内’當可作各種之更動與修改，因此本發 == 範圍當視後附之申請專利範圍所界定者為準。X 呆遵C:\Logo-5\Five c〇ntinents\PK9807a. ptc Page 12 1275789 Case No. 94HS24R_彳月曰4曰Amendment__ V. Description of Invention (8) Therefore, the invention of Figures 1 and 2 is by force Cr is incorporated into a low-cost deliquescent inorganic salt compound (such as sodium hydride) in a / photoresist solution to obtain a sensing layer, which does increase the range of capacitance values. Thereby, the sensitivity of the humidity sensing can be improved, and the unit cost performance of the sensor can be effectively increased. The present invention has been described in detail with reference to the preferred embodiments of the present invention, and it is not intended to limit the invention, and the invention may be modified and modified without departing from the scope of the invention. = Scope is subject to the definition of the scope of the patent application. X stays in compliance
C:\Logo-5\Five Continents\PK9807a. ptc 第14頁 1275789 案號 94118248 圖式簡單說明 ‘1 基板 2 1 聚醯亞胺 _….,,,__ 11 指叉狀偵測電極 2 感測層 22 氣化鈉粉末 sr^i ΐϋϋί C:\Logo-5\Five Continents\PK9807a.ptc 第15頁C:\Logo-5\Five Continents\PK9807a. ptc Page 14 1275789 Case No. 94118248 Schematic description '1 Substrate 2 1 Polyimine _....,,,__ 11 Finger-shaped detection electrode 2 Sensing Layer 22 gasified sodium powder sr^i ΐϋϋί C:\Logo-5\Five Continents\PK9807a.ptc Page 15