TWI274032B - A tester of various kinds of glass substrates and the method for testing various kinds of glass substrates by using thereof - Google Patents
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1274032 九、發明說明： 【發明所屬之技術領域】 - 本發明係關於一種玻璃基板檢測裝置，特別係關於一種多種 - 玻璃基板檢測裝置及利用匕之多種玻璃基板檢測方法，在檢測玻 璃基板的雜質、浸滲及表面不良時，可以檢測多種尺寸的玻璃基 板。 【先前技術】 一般 CRT(Cathode Ray Tube)、LCD(Liquid Crystal Display)、 φ PDP(Plasma Dispiay Panel)等作為Tv和監視器那樣視覺上提供顯 不資訊的圖像介面裝置，在各個裝置上顯示圖像資訊的原理是不 - 同的，但是作為實現顯示核心的部件之一是使用玻璃基板。 、 例如，在製造 TFT-LCD(Thin Film Transit Uquid1274032 IX. Description of the Invention: [Technical Field] The present invention relates to a glass substrate detecting device, and more particularly to a plurality of - glass substrate detecting devices and a plurality of glass substrate detecting methods using the same, in detecting impurities of a glass substrate In the case of impregnation and surface defects, glass substrates of various sizes can be detected. [Prior Art] A CRT (Cathode Ray Tube), an LCD (Liquid Crystal Display), a φ PDP (Plasma Dispiay Panel), etc., which are visually providing visual information as a Tv and a monitor, are displayed on each device. The principle of image information is not the same, but one of the components that realizes the display core is the use of a glass substrate. For example, in the manufacture of TFT-LCD (Thin Film Transit Uquid
Display)的顯示裝置的過程巾，對於顯示裝置所使用的玻璃基板進 行部分的處理程序，顯示裝置所使用的玻璃基板，是從大尺寸的 玻璃基板切斷’切斷下的玻璃基板’要經過鉻塗層，黑色矩陣卿沈修 Matrix)塗層’ IT〇塗層等的很多部分的處理程序。在這樣的部分‘ 處_程序前後，在玻璃基板上，其表面上易因雜質和浸渗的產^ 生發生不良。而玻璃基板的雜質和浸滲等，可以 ^ 蝴彳湖。二 衣以各種頬不裝置前，必須利用玻璃基板檢測襞置，進行玻璃基 板檢測的裎序。 破璃基板檢測裝置，-般分為用肉眼搜查出雜質等的巨觀 6 1274032 (Macro)；^測衣置和利用顯微鏡仔細地搜出不良狀態的微觀(滿㈣ 檢測袭置。树根據麵專案必須選擇巨觀檢測和纖檢測。首 先，操作者關輯麵基板全體上_肺解的料狀態進 行檢測，_巨觀檢測結果，對需要細密檢測的部分，放大約乃 〜100倍後進行微觀檢測。 第1圖是已知的微觀檢測裝置的透視圖。如第i圖所示，已 知的微觀制裝置，包括絲著_基板等駐纟U ;用於支擇 主u 11等的（盤12，定盤12的—面上安裝的絲機構13 ;及像 顯微鏡照相機那樣的光學裝置(未圖示）。光源機構13，包括提供 、’勺光源’兵為了光學裳置觀測玻璃基板的表面狀態以及使光源 移送的光源移送機構。 主台11，包括形成框的主台架，在主台架的一面上具有可加 7真空壓的多個彈性吸附墊，通過人造手等的玻璃基板移送機構 C的固疋及支撐*置在主台H上的玻璃基板。 、疋盤12是由具有規定厚度的自然石構成，可以使得由於檢測 過程的發生的熱的熱膨脹最小化，將觸最小化，達到支樓檢测 裝置全體的作用。 。π的主σ #的内侧具有結合槽，在結合槽上，可以配置 毛、跨主口 11見度的玻璃杆(未圖示）。玻璃杆固定在主台架的下部 從下邛支撐玻璃基板，使得玻璃基板的平坦度保持一定，杆 、面向玻璃有夕數個的突出冑，是按照一定的間隔配置的，在各 1274032 大出部上，具有與玻璃基板的下部面接觸的可旋轉的球。 例如像顯微鏡照相機那樣的光學裝置，是在定般ο、立 祕左右軸’可精密地制玻絲板的不良等。光料置與^ 源同步，可與光源一起移動。 〃 上述技術的玻璃基板檢測裝置中，構成主台n的主台架的規 格被固定，可檢測的玻璃基板只是限制於與主台n匹配的玻璃基 板，所以在使用已知的玻璃基板檢測裝置，存在以下的問題，^ 測玻璃基㈣過財，祕檢測_玻璃基板屬料同型態時7 必須選擇適合玻璃基板尺寸駐台u進行替換，所以在操作時間 上造成沒有必要驗費’生産成本也顯著地增加。因此，微觀檢 測裝置的利用度舆檢測裝置的價值比較時，發現其不成正比，造 成敫益偏低的結果。 1. 【發明内容】 鑒於以上的問題，本發明主要提供一種多種玻璃基板檢測裝 置及利用它的多種玻璃基板檢測方法，除了單一尺寸以外的玻璃 基板，對於其它多種尺寸的玻璃基板也可以進行檢測，以解決上 述問題。 因此’本發明提供之多種玻璃基板檢測裝置，包含··主台， 包含主台架，配置在定盤上部，可安置玻璃基板的；一個以上的 動力產生部，可以生成調整玻璃基板位置的動力；位置調整支撐 部’連接在動力產生部，透過動力產生部可以被移送；位置調整 1274032 ' &杨置σ驗支撐部’纽朗基板的邊緣來調整玻 智基板的位置；及控制部，根據輸人的_基㈣尺寸資訊判斷 翻基板的尺寸，控制動力產生部及位置調整夹子部。 對置地同時可以遠離或者接近的平行義。位·整夾子部安裝 在對稱移動部的上部，透過開通訊號，可垂直、直立地夾住玻璃 基板的邊，透過關閉訊號傾斜成規定的角度。 按照上述多種玻璃基板檢測裝置的其他一較佳實施例，動力 按照上述多種玻璃基板檢測裝置的一較佳實施例，動力產生 部可以配置在定盤的上面。位㈣整支料具有至少兩個以上的 對稱移動部個至少連接動力產生部，而且至少另—個是相互 產生部可以配置在主台架上。位置調整支禮部，具有移動杆，每 個配置在各個主台架的邊上，垂直各個主台架的邊可向内侧移 動。位置調整夾子部安裝在移動杆上。 另一方面，按照本發明的另一較佳實施例，提供了一多種玻 璃基板之檢測綠，個上述之錢玻璃基板檢職置。檢測破 璃基板的多種玻璃基板檢測方法中，包括下列步驟··將上述破璃 基板的尺寸訊息汛號输入到上述控制部；控制部將預先設定的破 璃基板的尺寸吼息訊號和輸入的玻璃基板的尺寸訊息訊號進行比 對，判斷上述玻璃基板的尺寸；根據上述玻璃基板的尺寸，輪出 用於調整上述玻璃基板的位置控制訊號；根據来自控制部的输出 控制訊號’調整配置在上述主台上玻璃基板的位置。 1274032 有關本發明的特徵與實作，茲配合圖式作最佳實施例詳細說 明如下。 ϋ 【實施方式】 以下’錢關對本發明讀佳實施讎行詳細説明。 第2圖表示本發明一較佳實施例的多種玻璃基板檢測袭置的 L視圖如第2圖所示，按照本發明的多種玻璃基板檢測裳置， 包括主台500、動力產生部2〇〇、位置調整支樓部3〇〇、位置調整 夾子部400、控制部120、光學機構、玻璃杆等。為了從圖式中食^ 更清晰了解本發明，齡省略了光學機構及賴濟構成部件。 主台5〇〇包括了配置在定盤110上部，可安置玻璃基板的主 台架(參照510 ’第5Α圖）。在主台500的主台架上，對著主台芊 的内側中心配置有結合槽5〇1，在該結合槽5〇1上，配置著破璃杆 (未圖示）’可以橫跨與主台架相互對應的邊。作為玻璃杆(未圖示） 勺排歹〗方向的-胃把例是用虛線5〇2表示的，但是配置方向及玻 璃杆的構成不受此限制。在_杆的—面上，具有—端配置著支 撐球的支撐梢，可以支撐進人裝·玻璃基板。 主台500 ’也就是主台架51〇，透過主台支樓部，被支撐在定 盤110上，在第2 ®中’為了能更清楚綱本發明，省略了主台 支撐部的圖示部分。 立疋盤110的上面配置著—個以上的動力產生部2〇〇,動力產生 部200 ’連接在位置調整支撐部3〇〇。動力產生部可以直接配 ΐ2^4〇32 等=ΓΓ面’也可以配置在定盤iig—面上放置的板上 _生部的配置位置秘制於射的-個。位置調整 =部具有二個以上的對稱移動部31" :=移難連，在動力產生部— ,丨”力進灯祕。猎由動力產生部細移動的對稱移動部训，至 =其他的-個對卿_相輯置地啊雜或者接近地平行 和動。 :在如第2圖所示的本較佳實施例中，動力產生部，是在定罐 4 110的上面相互平行地配置著兩個。透過各個的動力產生部· 接受提高動力之位置調整支擇部，是由相互平行的二個的對稱. 移動部元件構成的’被對置_時遠_者接近地平行移動在 同-線上的二個對稱移動部。可是，動力產生部·，也可以在位 置調整支樓部300的各個對稱移動部31〇個別地具有對稱移動部 凡件，也可以進行相互垂直地配置等的多種變形。 位置調整夹子部4〇〇，分别安裝在對稱移動部的上部，透過開馨 通為虎垂直地giL，夾住玻璃基板的邊緣。排列玻璃基板的位置，. 根據關閉訊號傾斜成規定的角度，可以復原到原位置，對其他的 ‘ 構成要素的動作不會形成干擾。 控制部120連接在動力產生部2〇〇及位置調整夹子部4〇〇，根 據輸入控制部120的玻璃基板的尺寸資訊判斷玻璃基板的尺寸， 至少將控制訊號輸出到動力產生部200及位置調整夾子部4〇〇，排 11 1274032 列安置在主台上的_基板驗置。輸人到 訊，可以用多種方法剌。例如可透過配置在主 :=上或㈣湖上部的位置__樣物機構，得到 玻喊板·置㈣，糾㈣纽也可崎過使雜盤被 入貧訊。 以下對各個的構成部件進一步詳細說明。 <第一較佳實施例> 如第2圖及第3Α圖所示’按照本發明第—較佳實施例的動力 產生部，具有流體動作部21G以及包括動力產生氣缸221和動 力產生活塞222之動力產生氣缸驅動部220。 流體動作部210，將加壓了的工作流體傳遞給動力產生氣紅驅 動部220。工作流體，可以是例如為空氣、氮氣之氣體，也可以是 工作油液體等’根據設計可輯行綠的選擇。卫錢體用液體 構成時，為了防止動力產生氣缸221和動力產生活塞222之間冷 漏工作流體，在它們間更可裝有活塞環。 動力產生氣缸221是中空圓筒，動力產生氣缸221的外侧具 有複數個產生動力流出入口 223。產生動力流出入口 223的個數， 疋根據動力產生氣缸221的級數，也就是動作衝程個數來決定的， 產生動力流出入口 223的個數也可以為比動作衝程個數多的構成。 產生動力流出入口 223，透過連接軟管224，連接在流體動作 部210,可以將來自流體動作部21〇加壓後的流體流入到動力產生 12 1274032 體排出到流體動 氣缸221内或者將動力產生氣缸221内的工作流 作部210。流過複數個產生動力流出入α τ+ 」的工作流體的流出 口，可以是分別獨立的，根據各個的衝程也可以分段地進行夕種 變开j。 流入動力產生氣缸221 N及/或從動力產生氣紅221流出的工 作流體，引起動力產生氣缸221内動力產生活塞222 _侧的壓力 變動，使動力產生活塞222作直線運動。 動力產生活塞222的一端配置在動力產生氣缸221内，另一 端連接在位·整支料，，也就是對稱雜部3ω的_側。動 力產生活塞222透過作直線運動，使得與其連接的對稱移動部31〇 也-起作直線運動。在本實施例中，動力產生氣缸驅動部2⑻是 由多級氣缸驅動部構成的，所以動力產生活塞222的直線移動距 離限定在分成多級。動力產生活塞222的移動階段及移動距離， 是根據安置在主台架(參照別，第SA圖)上的被檢測體 ，即玻璃 基板的個數及尺寸而決定的。例如，如第2圖所示，按照本發明 的玻璃基板檢測裝置除了與主台·的主台架51()的規格匹配尺 寸的玻璃基板以外，翻整具有比其小的三麵其他尺寸玻璃基 板的位置％動力產生活塞222，分為3階段進行直線運動，在各 又的動力產生活基222的移動距離，是由對應的各個玻璃絲 、寸來$疋的。作為這樣的多級氣缸驅動部的動力產生氣缸驅 動P 〇由於刀成多個階段的各個衝程的動力產生活塞的移 13 1274032 動距離保持-定，所以在對稱移動部训的移射，可以正確地 進行控制。 動力產生氣紅驅動部220，除了多級氣紅驅動部以外，也可以 利用伺服繼，藉峰性控綱力產生活㈣，使得連接在動 力產生活塞222 -端的對稱移動部31〇連續地移動。此外，掉 明的動力綱，除蝴_動树，也可以由㈣ 產生電機鶴部構成，透職力私韻，安餘動力產生電機 的旋f吐的始輪，繞輪W㈣行直線往復運動 後，由-端連接在對稱移動部的齒條構成的。本發明的動力產生 部，不限制於第2圖及笫5A圄所矣- 種態樣。 $5A圖所表神那樣方式，可以為其它多 :調細部·，具_觸元㈣i。對稱移動部 ^包§二個相互平行地配置的對稱移動部3K);導執部 Ο*，可以導向對稱移動部元件則上_移動咖的移動； 可以使得構成元件的對稱移動部31〇相互且同時地靠 近或者返離地同步地移動。 ㈣圖表示了對稱移動部元件3〇1中其中—個對稱移動部的 放大圖。構成對稱移動部元件观的各個對稱移動部31〇，不是相 互對_配置，相互_具有_的構造，但是不受此限制。 疋盤110及/或定盤no的一面上所配置的板上，設置可以導 向對稱移動部則的導軌部32G。導執_，具有可以導向主對 14 1274〇32 稱移動部遍的主對稱移動部導執鳥以及用於導向輔助對稱 移動部3勘的輔助對稱移動部導執斑。在第犯圖中表示之對 稱移動部3K)具有主對稱移動部施、輔助對稱移動部现以及 安裝在主對稱移動部310a 一面上的主對稱移動部板耻，這些可 以分別地分離構成，也可以一體地構成。主對稱移動部職和辅 助對稱移動部现’可以是與導軌部320長度方向平行的平行線 上配置的構造，但是主對稱移動部施及辅助對稱移動部现， 移動方向是與導軌部32〇成為一直線的，但是也可以為配置在與 導執部320長度方向垂直的線上的構造，可包含多種態樣。 一主對稱移動部施的一側連接在動力產生活塞也的一端。 攻裏如第2圖及第3B圖所示，對稱移動部元件3〇1巾，只表示了 一個對稱移動部310連接在動力產技塞222的一端，但如前述， 具有對於對稱軸部31〇的個別動力產生驅動部跡對稱移動部 310也可以連接在各個動力產生活塞上。 主對稱移動部310a的下端，具有與主對稱移動部導軌3施 配合的主對稱移動部導向件道a，主對稱移動部聽的上面具 有用於安裝位置調整夾子部的對稱移動部板紙。 辅助對稱移動部鳩，透過連接部件與主對稱移動部通 的力侧連接’在獅賴雜部遍的上面，配置著位置調整夹 子4400的至少_部分。獅觸雜部遍的下面，具有獅 對姊動科向件3 iQ，b，辅助_移動部導向件训，b可以直接 15 1274032 配置在疋盤110的一面上或者透過板間接地與配置的辅助對稱移 動部導執310b配合。The process paper of the display device of the display device performs a partial processing procedure on the glass substrate used in the display device, and the glass substrate used in the display device is cut from the large-sized glass substrate by the 'cut glass substrate'. Chromium coating, black matrix edifice Matrix) coating 'IT 〇 coating and many other parts of the processing program. Before and after such a portion of the procedure, on the glass substrate, the surface is liable to be defective due to impurities and impregnation. The impurities and infiltration of the glass substrate can be used to lick the lake. Before the second coat is used, it is necessary to use a glass substrate to detect the device and perform the inspection of the glass substrate. The glass substrate detection device is generally divided into the giant view 6 1274032 (Macro) which is used to detect impurities such as the naked eye; ^ the clothing and the microscope are used to carefully search for the microscopic state of the bad state (full (four) detection attack. The project must select the giant inspection and the fiber inspection. First, the operator checks the material state of the whole surface of the surface substrate to detect the _ lung solution, and the result of the macro inspection is about ~100 times after the part requiring fine detection. Microscopic inspection. Fig. 1 is a perspective view of a known microscopic detection device. As shown in Fig. i, a known microscopic device includes a wire-like substrate, etc., for selecting a main u 11 or the like. (The disk 12, the wire mechanism 13 mounted on the surface of the platen 12; and an optical device (not shown) such as a microscope camera. The light source mechanism 13 includes a supply, a 'spoken light source' for observing the glass substrate for optical placement. The surface state and the light source transfer mechanism for transferring the light source. The main stage 11 includes a main gantry forming a frame, and a plurality of elastic adsorption pads capable of adding 7 vacuum pressure on one side of the main gantry are passed through the glass of the artificial hand or the like. Substrate transfer mechanism C The solid substrate and the support* are placed on the glass substrate on the main table H. The pan 12 is made of natural stone having a predetermined thickness, which can minimize the thermal expansion of the heat due to the detection process, and minimize the touch. The function of the entire building detection device. The inside of the main σ # of π has a coupling groove, and a glass rod (not shown) that is visible in the joint groove 11 can be disposed on the coupling groove. The glass rod is fixed to the main rod. The lower part of the gantry supports the glass substrate from the lower cymbal so that the flatness of the glass substrate is kept constant, and the rods and the protruding ridges facing the glass are arranged at regular intervals, and are provided on each of the 1274032 large portions. A rotatable ball that is in contact with the lower surface of the glass substrate. For example, an optical device such as a microscope camera is capable of accurately making a glass plate in a precise manner. It can move together with the light source. 玻璃 In the glass substrate detecting device of the above technique, the specification of the main gantry constituting the main stage n is fixed, and the measurable glass substrate is limited to the glass substrate matched with the main stage n. Therefore, in the case of using a known glass substrate detecting device, there are the following problems, and the glass substrate (four) is over-funded, and the glass substrate is the same as the glass substrate. There is no need for the inspection fee in the operation time, and the production cost is also significantly increased. Therefore, when the value of the microscopic detection device is compared with the value of the detection device, it is found to be inconsistent, resulting in a low benefit. In view of the above problems, the present invention mainly provides a plurality of glass substrate detecting devices and a plurality of glass substrate detecting methods using the same, and a glass substrate other than a single size can be detected for other glass substrates of various sizes to solve the above problems. Therefore, the present invention provides a plurality of glass substrate detecting devices, including a main table, including a main gantry, which is disposed on the upper portion of the fixed plate, and can be placed on the glass substrate; and one or more power generating portions can generate the position of the glass substrate. Power; position adjustment support 'connected to the power generation unit, through the power The raw part can be transferred; the position adjustment 1274032 ' & Yang set σ test support 'the edge of the New Zealand substrate to adjust the position of the BIC substrate; and the control part, according to the input _ base (four) size information to determine the size of the flip substrate The power generation unit and the position adjustment clip unit are controlled. Opposite to the ground can be away from or close to the parallel meaning. The position and the entire clip portion are mounted on the upper part of the symmetrical moving portion, and the side of the glass substrate can be vertically and erected by the communication number, and the signal can be tilted to a predetermined angle by the closing signal. According to another preferred embodiment of the plurality of glass substrate detecting devices described above, the power generating portion may be disposed on the upper surface of the fixed plate according to a preferred embodiment of the plurality of glass substrate detecting devices. The position (4) of the whole material has at least two or more symmetrical moving parts connected to at least the power generating portion, and at least one other of the mutually generating portions may be disposed on the main gantry. The position adjustment culturing portion has moving rods, each of which is disposed on the side of each main gantry, and the sides of the vertical main gantry are movable inward. The position adjustment clip portion is mounted on the moving rod. In another aspect, in accordance with another preferred embodiment of the present invention, a plurality of glass substrates are detected for green, and the above-described money glass substrates are inspected. The method for detecting a plurality of glass substrates for detecting a glass substrate includes the steps of: inputting a size information nickname of the glass substrate to the control unit; and the control unit suffocating the signal and inputting the size of the predetermined glass substrate The size information signal of the glass substrate is compared, and the size of the glass substrate is determined; according to the size of the glass substrate, a position control signal for adjusting the glass substrate is rotated; and the output control signal is adjusted according to an output from the control unit. The position of the glass substrate on the main stage. 1274032 The features and implementations of the present invention are described in detail with reference to the drawings. ϋ [Embodiment] The following is a detailed description of the implementation of the present invention. Fig. 2 is a view showing the L-view of various glass substrates in accordance with a preferred embodiment of the present invention. As shown in Fig. 2, a plurality of glass substrates according to the present invention are detected, including a main table 500 and a power generating unit 2''. The position adjustment branch portion 3, the position adjustment clip portion 400, the control portion 120, the optical mechanism, the glass rod, and the like. In order to more clearly understand the present invention from the drawings, the optical mechanism and the components are omitted. The main table 5 includes a main frame which is disposed on the upper portion of the fixed plate 110 and can be placed with a glass substrate (refer to 510 'Fig. 5). On the main gantry of the main table 500, a coupling groove 5〇1 is disposed on the inner center of the main table, and a glazing rod (not shown) is disposed on the coupling groove 5〇1. The main gantry corresponds to each other. The example of the stomach stem as a glass rod (not shown) is indicated by a broken line 5〇2, but the arrangement direction and the configuration of the glass rod are not limited thereto. On the surface of the _rod, there is a support tip with a support ball at the end, which can support the person-in-glass substrate. The main table 500', that is, the main gantry 51〇, is supported by the main table branch portion, and is supported by the fixed plate 110. In the second ® ', in order to clarify the invention, the illustration of the main table support portion is omitted. section. One or more power generating portions 2A are disposed on the upper surface of the vertical tray 110, and the power generating portion 200' is connected to the position adjusting support portion 3''. The power generating unit can be directly equipped with 2^4〇32, etc., or the surface of the board, which can be placed on the surface of the fixed plate iig. Position adjustment = part has two or more symmetrical moving parts 31 " := shifting difficult to connect, in the power generating part -, 丨" force into the light secret. Hunting by the power generating part of the fine movement of the symmetrical movement training, to = other - In the preferred embodiment as shown in Fig. 2, the power generating portions are arranged in parallel with each other on the upper surface of the fixed tank 4110. The position adjustment unit that receives the increased power through each of the power generation units is composed of two parallel symmetry. The 'opposing _ time _ _ _ _ _ _ _ _ _ - two symmetrical moving portions on the line. However, the power generating portion may have a symmetrical moving portion individually in each of the symmetrical moving portions 31 of the position adjusting branch portion 300, or may be arranged perpendicularly to each other. A plurality of deformations are provided. The position adjustment clip portions 4 are respectively mounted on the upper portion of the symmetrical moving portion, and the giL is vertically giL, and the edge of the glass substrate is sandwiched. The position of the glass substrate is arranged, and the inclination is adjusted according to the closing signal. of The angle can be restored to the original position, and the operation of the other 'components' does not interfere. The control unit 120 is connected to the power generating unit 2 and the position adjusting clip unit 4, and is based on the glass substrate of the input control unit 120. The size information determines the size of the glass substrate, and at least the control signal is output to the power generating portion 200 and the position adjusting clip portion 4, and the row 11 1274032 is placed on the main table for the _ substrate inspection. The method is 剌. For example, it can be arranged in the main:= or (4) position of the upper part of the lake __ sample object, get the glass board, set (four), and correct (four) New Zealand can also make the miscellaneous disk into the poor news. The constituent components are further described in detail. <First Preferred Embodiment> As shown in Figs. 2 and 3, the power generating portion according to the first preferred embodiment of the present invention has a fluid operating portion 21G and includes power. The power generating cylinder 221 and the power generating piston 222 generate the cylinder driving unit 220. The fluid operating unit 210 transmits the pressurized working fluid to the power generating magenta driving unit 220. The working fluid may be an example. It is a gas of air, nitrogen, or a working oil liquid, etc. The green color can be selected according to the design. When the money body is composed of a liquid, in order to prevent the power generation cylinder 221 and the power generating piston 222 from leaking the working fluid, A piston ring may be further disposed between them. The power generating cylinder 221 is a hollow cylinder, and the outer side of the power generating cylinder 221 has a plurality of power generating outflow inlets 223. The number of power outflow inlets 223 is generated, and the cylinder 221 is generated according to the power. The number of stages, that is, the number of operating strokes, may be set to be larger than the number of operating strokes. The power outflow inlet 223 is generated and connected to the fluid operating portion through the connecting hose 224. 210, the fluid pressurized from the fluid actuating portion 21 may be flown into the power generating unit 12 1274032 to be discharged into the fluid moving cylinder 221 or the working portion 210 in the power generating cylinder 221. The outflow ports through which a plurality of working fluids that generate power to flow into α τ + " may be independent of each other, and may be divided into sections in accordance with the respective strokes. The working fluid flowing into the power generating cylinder 221 N and/or the power generating gas red 221 causes a pressure fluctuation in the power generating piston 222 _ side of the power generating cylinder 221 to linearly move the power generating piston 222. One end of the power generating piston 222 is disposed in the power generating cylinder 221, and the other end is connected to the position/whole material, that is, the _ side of the symmetrical portion 3ω. The force generating piston 222 is moved linearly so that the symmetric moving portion 31 connected thereto also moves linearly. In the present embodiment, the power generating cylinder driving portion 2 (8) is constituted by a multi-stage cylinder driving portion, so that the linear movement distance of the power generating piston 222 is limited to be divided into a plurality of stages. The moving phase and the moving distance of the power generating piston 222 are determined based on the number of objects to be detected, that is, the number and size of the glass substrates placed on the main gantry (see FIG. For example, as shown in Fig. 2, the glass substrate detecting apparatus according to the present invention has a three-sided other size glass which is smaller than the glass substrate of the size of the main stage 51 () of the main stage. The position of the substrate % is generated by the piston 222, and the linear motion is divided into three stages, and the moving distance of the movable base 222 is generated by the corresponding glass filaments and inches. As the power of the multi-stage cylinder drive unit, the cylinder drive P 〇 is moved by the power of the respective strokes of the plurality of stages, and the movement of the piston is maintained, so that the movement in the symmetrical movement portion can be correct. Ground control. The power generation air red driving unit 220 may generate a live motion (four) by using a servo relay in addition to the multi-stage air red driving unit, so that the symmetric moving portion 31 connected to the end of the power generating piston 222 is continuously moved. . In addition, the power of the Ming Ming, in addition to the butterfly _ moving tree, can also be composed of (4) the motor crane, the full-fledged power, the safety wheel of the motor to generate the rotation of the motor, the winding W (four) line reciprocating motion After that, the end-end is connected to the rack of the symmetrical moving portion. The power generating portion of the present invention is not limited to the two aspects shown in Fig. 2 and Fig. 5A. The way of the $5A map is like the god, it can be more than the other: the fine part, with the _ touch element (four) i. The symmetric moving portion includes two symmetric moving portions 3K arranged in parallel with each other; the guiding portion Ο* can guide the movement of the symmetric moving portion element on the mobile phone; the symmetric moving portion 31 of the constituent elements can be made to each other At the same time, it moves synchronously close to or away from the ground. (4) The figure shows an enlarged view of one of the symmetric moving portions in the symmetric moving portion element 3〇1. The respective symmetrical moving portions 31 构成 constituting the symmetrical moving portion element view are not mutually opposed and have a configuration of _, but are not limited thereto. A guide rail portion 32G that can guide the symmetric moving portion is provided on the plate disposed on one side of the disk 110 and/or the fixed plate no. The guide _ has a main symmetry moving part guiding bird that can guide the main pair 14 1274 〇 32 and a moving part of the moving part, and an auxiliary symmetrical moving part guiding spot for guiding the auxiliary symmetrical moving part 3 . The symmetric moving portion 3K shown in the first map has a main symmetrical moving portion, an auxiliary symmetrical moving portion, and a main symmetrical moving portion, which is mounted on one side of the main symmetrical moving portion 310a, which can be separately separated and configured. It can be constructed in one piece. The main symmetrical moving part and the auxiliary symmetrical moving part may be configured to be arranged on a parallel line parallel to the longitudinal direction of the rail portion 320, but the main symmetrical moving portion applies the auxiliary symmetrical moving portion, and the moving direction is the same as the guide portion 32. It may be a straight line, but it may be a configuration disposed on a line perpendicular to the longitudinal direction of the guide portion 320, and may include various aspects. One side of a main symmetrical moving portion is connected to one end of the power generating piston. As shown in Figs. 2 and 3B, the symmetrical moving portion element 3 〇 1 towel only shows that one symmetrical moving portion 310 is connected to one end of the power generating plug 222, but has a symmetrical shaft portion 31 as described above. The individual power generating drive track symmetry moving portion 310 of the cymbal may also be coupled to each of the power generating pistons. The lower end of the main symmetrical moving portion 310a has a main symmetrical moving portion guide track a that is engaged with the main symmetrical moving portion guide 3, and the upper symmetrical moving portion is slidably covered with a symmetrical moving portion paper for attaching the position adjusting clip portion. The auxiliary symmetrical moving portion 连接 is connected to the force side through which the connecting member passes through the main symmetrical moving portion. At least the portion of the position adjusting clip 4400 is disposed on the upper side of the lion's ridge portion. Below the lion's tentacles, there are lion pairs to move the parts to the iQ, b, auxiliary _ moving part guides, b can be directly 15 1274032 on one side of the plate 110 or indirectly through the plate The auxiliary symmetrical moving portion guide 310b is engaged.
構成各個對稱移動部元件301的二個對稱移動部310的直線 運動，透過各個的皮帶部330達到同步化。如第2圖及第3C圖所· 不，皮帶部330具有二個以上的滑輪331及皮帶332。 I 滑輪331，是藉安裝在定盤11〇及/或定盤11〇 一面上的板上 的滑輪支撐體331b，以滑輪中心軸331a為中心可旋轉地被支撐 著。在圖中顯示了二個滑輪331，但實際應用上不受此限制，可有 鲁 個以上之多種態樣。二個滑輪331，可以在與對稱移動部元件 301及/或導執部32〇平行的平行線上配置，滑輪331的滑輪中心 、 軸331a是與定盤11〇平行的，與各個對稱移動部元件3〇ι的前進 _ 方向垂直。滑輪331的外周面，與皮帶332的内周面的至少一部 分接觸支撐著皮帶332。 為了將用滑輪331可旋轉支撐的皮帶332的張力保持在適當 的災平皮V部330進而可具有調整皮帶332張力的張緊器333。 修 張緊333與皮贡332的接觸位置，可以是皮帶332的上部332a， 也可以在皮帶332的下部332b等位置，包含多種態樣。 ‘ 用滑輪331支撐的皮帶332,藉對稱移動部元件3〇1的各個對 稱矛夕動邛310與皮帶連接機構334被連接著。也就是，如第2圖 及第3C圖所示，連接在動力產生活塞222上的對稱移動部3川， 透過皮帶連接機構334連接在皮帶332的上部332a。 16 1274032 另外，沒有連接在動力產生 训，藉皮帶連接機構334對稱地雜在皮帶=他物多動部 帶連接機構334,可以是各 下^ 3325。皮 動部3K)延邦仏 』、且°的構成讀，也可以是從對稱移 W、延長部，皮帶連接機構334和對稱移動1 31() 及/或皮帶332的連接，可馳私動部310 連接。 钱了以用柳接、螺栓等的多種結合機構進行 為了&南滑輪331和皮帶332夕p弓从么丄成 ^ 之間的動力傳遞，滑輪331的 二周面和心332的内周面可以是相互歲合的結構。也就是，如 弟jC圖所示，在皮帶332的&田I ’ Y 2的_面’具有螺 仙在滑輪知的外周面，具有與皮帶332的内周面形成 =出 邱有犬出部’而在皮帶332的内周面具有與其歲合的凹槽 邵0 這樣的位整支撐部· _作触如下。 赵部的動力產生活塞拉的直線運動，連接在 端的主對稱移動部職，在主對稱移動部導 執迦上，沿著主對稱移動部導執迦的長度方向作直線運動。 此％，連接在主軸軸部麻上關輯稱轉部娜，沿著 ^助對稱移動部導執3勸與主對稱移動部職—起作直線運 動’直間接地配置在主對鳐 牡馳私動# 310a及辅助對稱移動部3湯 上的位置調整夹子部彻也—起作直線運動。 17 1274032 藉動力產生活塞222作直線運動的對稱移動部3i〇的一侧， 經過皮f連接機構334連接在皮帶332的上端332a，皮帶332透 ’ 過對稱移動部310的運動一起運動。皮帶332藉滑輪331可旋轉 · 地被支樓著’皮帶332沿著配置在皮帶332内侧的滑輪331作旋· 轉運動。 在構成對稱移動部元件3()1的對稱移動部中，沒有連接在動 力產生活塞222上的其他對稱移動部·，藉皮帶連接機構辦 連接在皮帶332的下端现。沒有連接在動力產生活塞222的其鲁 他對稱移動部310和皮帶332下端332b的連接位置，是與連接在 動力產生活塞222上的對稱移動部和皮帶332上端迎的連接位 - 置對稱的。構成對稱移動部元件301的二個對稱移動部31〇，同時 - 以大約同樣的距離移動，同時相互地接近或者相互遠離的方向上 作直線運動。 位置調整夹子部400具有夾子部本體41〇、夾子部伸張機構 420及夾子430。第3B圖表示了夾子部伸張機構42〇關閉狀態時· 的位置調整夾子部4〇〇的概略部分透視圖，第圖表示了夹子部 - 伸張機構42〇開通狀態時的位置調整夾子部—的概略部分透視 · 圖。 夾子部本體410，在配置在主對稱移動部31〇a的一面的主對 稱移動部板310c上，以夾子部本體旋轉軸部412為中心可旋轉地 被安裝著。 18 !274〇32 夾子部伸張機構420，-端可旋轉地配置在對稱移動部3i〇， 具體的是配置在輔助對稱移動部31〇b的一面上，另一端可旋轉地 安裝在夾子部本體的·，根據是何輕，使得夾子部本 體彻垂直直立或者傾斜成規定的角度。如第3β圖所示，夹子部 伸張機構420，具有夾子部氣紅421及夾子部活塞纽。夹子部氣 缸421，在外側面上具有一個以上的夾子部流出入口切，失子部 流^入口 423透過連接軟管424連接流體動作部(未_。夹子部 私422的-端，配置在夾子部氣缸421内，另一端可旋轉地連 接者夾^部本體410 _端。藉來自控制部(參照第2圖標號_ 的L制《，㈣縣作部(未圖示)加壓之級經過連接軟管 424 ’通過夾子部流出入〇 423，流入到夾子部氣缸似，或者經 過反向過程，從夹子部氣缸421排出到流體動作部。央子部活塞 4一22 ’根據夾子部氣缸421内的流體勤變化伸張及/或收縮。: 晨，夹子部伸張機構’敍述了氣缸—活塞驅動機構的例子，但是， 例如夹子部旋轉電機’連接在夹子部旋轉電機中心軸的小歯輪及 小歯輪的旋轉、具有直線往復運動齒條的小齒輪型式等也可岸 用，本伽不受限於上述例子，可包含多_樣。 ^ 構42=30配置在夾子部本體410的端部。透過央子部伸張機 的伸張，夹子部本體對定盤110垂直地直立時，央子 430兵安置在主台500上的破璃基板的邊縁接觸。 夹子和玻璃基板的邊緣接觸時，為了防止破璃基板及夾 19 1274032 l !·生二耗及知^ ’可以含有帶彈性的彈性材料。這裏，作為 弹性材料，有多種材料可供選擇，例如贿 ㈣yetheretherketone)。PEEK在拉伸及彎曲強度，勒性及耐續變 (P脚频雜、彳钱触上㈣㈣，含有 PEEK的夾子430，7丨、/曰士 /、有耐磨耗性、耐熱性、耐蒸汽性、耐放 射性及阻燃性等。 另外夾子430,為了防止因絲產生的費用增大，在與夹子 ㈣的玻輸_的部分可以進而具核子墊43卜根據情況， 為了使夹子墊431容易安裝，夹子，在夹子彻的夾子塾糾 被安裝的健上可以形錢子墊_人槽432，好㈣丨具有可 以向插入槽432插入裝入之可更換構造。此外，夹子塾431，也可 、良的热淨电#寸性的無靜電墊構成，無靜電塾包括層麼合 板和氯丁二烯合成橡膠。 以下’對本發明第—較佳實施例的多種玻璃基板檢測裝置的 檢測方法進行說明。在第4A圖中，表示了本發明第一較佳實施例 的多種_基板檢财法巾玻板位置調整的過程，但是，為 了β疋地説明本發明的特徵’在玻璃基板檢測方法的中省略了玻 璃基板位置調整的過程後的檢測過程。 首先，將玻璃基板置入到上述的多種玻璃基板檢測裴置励 中。置入的玻璃基板的尺寸資訊輸入到控制部12〇(步驟沾⑻）。這 裏，玻璃基板的尺寸資訊可來自例如位置感測器的檢出機構，或 20 1274032 者也了以經由操作者的手動操作輸入。 根據輸人到控制部12〇的玻璃基板的尺寸資訊，與先設定尺 寸的玻每基板的訊號對比，判斷是否可行(步，驟s7〇〇)。而後，從 卩120輸出玻璃基板位置調整控制訊號(步驟“⑻）。 從才工制。卩120輸出的玻璃基板位置調整控制訊號，傳遞到動 力產生部及域錄調整好部·，纏置人玻璃基板的位 置(步驟S_)，而後透過光學裝置㈣置實施玻璃基板檢測。 第4B圖具體表示了對4種玻璃基板的玻璃基板檢測方法中玻 璃基板位置調整的-較佳實施例，為了較清楚的說明，在第4A圖 所表示的频S7⑻轉的過程巾，只是目稍錄玻璃基板位置 調整有關的部分。在本發明的多種玻璃基板檢測裝置中，玻璃基 板的位置調整即使對於玻璃基板的長度和寬度完全不同的多種的 玻璃基板也是適用的，但在本實施例中，只是對於一方邊緣長度 相同，另一邊緣具有長度變化的情況進行了說明。4種玻璃基板， 设疋了包含第1尺寸(1870x2200 mm)、第2尺寸(1870x1456 111111)、第3尺寸(1870又11〇〇111111)及第4尺寸(187(^728 111111)，但 是這些屬於任意選擇的尺寸，本發明的技術特徵，並不僅限於這 些玻璃基板尺寸。這裏，l870x2200 mm是與主台架51〇的規格 一致的。 首先’根據檢出機構等輸入的玻璃基板尺寸資訊，控制器12〇 比較及判斷投入的玻璃基板的尺寸是否與第丨尺寸一致(步驟 21 1274032 S710)。置入的玻璃基板的尺寸與第1尺寸一致時，則不向動力產 生部200及位置調整夾子部4〇〇輸出玻璃基板位置調整控制訊 號，在主台架510上，位置調整後(步驟S910)，進行玻璃基板的 檢測。 在步驟S710中，置入的玻璃基板的尺寸和第〗尺寸不一致 時，比較及順置人的綱基板的尺寸鮮2尺寸是^—致(步驟 S720)。玻璃基板的尺寸與第2尺寸一致時，控制器Do向動力產 生部200及位置調整夾子部働輸出玻璃基板位置調整控制訊號 (步驟S820)。根據輸入到動力產生部2〇〇的玻璃基板位置調整控 丄孔5虎’成為乡級氣缸形態的動力產生氣缸驅動部⑽進行1衝 私動作，使得連接在動力產生氣红驅動部22()上的對稱移動部剔 ，動大約1衝程的距離，經過皮帶部33()連接的其他的對稱移動 部310也移動大約！衝程的距離。如果對稱移動部31〇的移動結 束時’使位置調整夹子部4〇〇的夾子部伸張機構42〇動作，央子 财體410垂直於定盤110地直立後，使得錢子部本體彻的 -端具有的夾子與玻璃基板的邊緣的側面接觸，將玻璃基板 的位置與預先設定的中心位置匹配(步驟s叫玻璃基板的位置 被調整時，夹子部伸張機構伽_，夹子部本體以規定的 角度傾斜，作絲位置(步驟S922)，這是為 的微觀檢測，不盥光源13〗的穸叙放一々 敬與巷板 眼及/或縣裝置的玻璃基板表面檢測過程，可以用—般的方法實 22 1274032 施。 在步驟S720巾，置入的玻璃基板的尺寸與第2尺寸不一致 時’士比較及判斷玻璃基板的尺寸與第3尺寸是否一致(步驟s73〇)。 接續的過程’除動力產生氣缸驅動部22()的動作步驟(s93())，進行 了大約2衝程的距離的點外’輸出玻璃基板位置調整控制訊號的 步驟(步驟S83〇)、好部伸賴構的打開步撕步驟漏）、 及夹子部伸張機構42G _閉步驟(步驟败），是和置入的玻璃 基板的尺寸與第2尺寸一致時的過程是相同的。 在步驟S730巾，置入的玻璃基板的尺寸與第2尺寸不一致 時:比較及判斷玻璃基板的尺寸與第3尺寸是否一致涉驟s,。 接”1、的過孝玉除動力產生氣缸驅動部220的動作步驟(步驟〇) 進行了實施大約3衝程的距離點外，輸出玻璃基板位置調整控制 訊號的步驟(步驟S840)、夾子部伸張機構42〇的打開步飘步驟 S941)、及夹子部伸張機構42〇的關閉步驟(步驟沾犯），是和置入 的玻璃基板的尺寸與第2尺寸-致時的過程是相同的。 士在步驟S740巾，置入的玻璃基板的尺寸與第3尺寸不一致 b ’判斷置人的朗基板’與預先設定的尺寸的顧不一致時， 送出錯誤資訊(error message)(步驟S850)。 第4B圖所表示的流程圖，表示了判斷下降順序破璃基板的尺 寸的過程，但是判斷上升順序玻璃基板的尺寸後，也可以進行位 置凋整等，對於本發明的構成方法可以包含多種態樣。 23 1274032 <第二較佳實施例> 第5A職示了本發明第二較佳實施例的多種玻璃基板檢測 裝置的主台的概略部分透視圖。在主台5〇〇的主台架上，主 台架510的各個邊上具有配置著一個以上的動力產生部5加連接 動力產生部520的-端，透過動力產生部52〇產生的動力被移動 的位置調整支#部53〇;及安裝在位置輕支#部53Q上夾住玻璃 基板的邊緣，驗輕_基板位㈣位賴整好部54〇。 在本實施例中’敘述了在主台架510的各個邊上具有一個以 上的動力產生部52〇、位置調整支撐部·、及位置調整夹子部 但是本發明不限於此。也就是，動力產生部520等也可以只 是設置在主台架510的相互對置二個邊上。進而，配置在主台架 5K)的相互對置邊的動力產生部52()等，可以是相互對稱配置的構 造，也可以是非對稱的構造，為了使得人造手容易地置入玻璃基 板，也可將一部分構造設計成相互不同，包含多種態樣，在本較 佳實施例中’相互對置、二邊配置的動力產生部520，可認為幾乎 是相同的構造’以下以安裝在相互鄰接的二個邊上的構成要素等 為中心進行説明。 弟5B圖是第5A圖中表干沾^ 的主台500的一邊，用圖符號”A，， 表示的部分進行部分放大的透視 祝圖。動力產生部520a，可以用電 氣電機及油壓電機等的多種的方十 口万式構成的，但是在第5B圖所表示 的較佳實施例中，是由透過油空一 二餐進仃多級動作的多級氣缸型的 24 1274032 動力產生部而構成的’動力產生部520的一侧具有流出入口(未圖 示），透過外部的油壓動作部(未圖示)提供的流體經過流出入口傳 遞到多級氣缸型的動力產生部520，動力產生部520的活塞可以作 直線運動。The linear motion of the two symmetrical moving portions 310 constituting each of the symmetrical moving portion elements 301 is synchronized by the respective belt portions 330. As shown in FIGS. 2 and 3C, the belt portion 330 has two or more pulleys 331 and a belt 332. The I pulley 331 is a pulley support body 331b mounted on a plate on one side of the fixed plate 11 〇 and/or the fixed plate 11 ,, and is rotatably supported around the pulley central shaft 331a. Two pulleys 331 are shown in the figure, but the practical application is not limited to this, and there may be more than one of various aspects. The two pulleys 331 may be disposed on parallel lines parallel to the symmetric moving portion element 301 and/or the guiding portion 32A. The pulley center of the pulley 331 and the shaft 331a are parallel to the fixed plate 11A, and the respective symmetric moving portion elements. 3〇ι的前进_ Direction is vertical. The outer peripheral surface of the pulley 331 is in contact with at least a portion of the inner peripheral surface of the belt 332 to support the belt 332. In order to maintain the tension of the belt 332 rotatably supported by the pulley 331 at the appropriate level V portion 330, it is possible to have a tensioner 333 for adjusting the tension of the belt 332. The contact position of the tensioning 333 with the skin 332 may be the upper portion 332a of the belt 332 or the lower portion 332b of the belt 332, and the like, and may include various aspects. The belt 332 supported by the pulley 331 is connected to the belt connecting mechanism 334 by the respective symmetrical movements 310 of the symmetrical moving portion member 3〇1. That is, as shown in Figs. 2 and 3C, the symmetric moving portion 3 connected to the power generating piston 222 is connected to the upper portion 332a of the belt 332 via the belt connecting mechanism 334. 16 1274032 In addition, there is no connection to the power generation training, and the belt connecting mechanism 334 is symmetrically mixed with the belt=the other object moving portion belt connecting mechanism 334, which may be each lower 3325. The movement of the skin movement portion 3K) and the configuration of the angle may be the movement from the symmetric movement W, the extension portion, the belt connection mechanism 334, and the symmetrical movement 1 31 () and/or the belt 332. The part 310 is connected. The money is transmitted by a plurality of combination mechanisms such as a splicing joint, a bolt, etc., for the power transmission between the south pulley 331 and the belt 332, and the inner circumference of the pulley 331 and the inner circumference of the core 332. It can be a structure that is mutually old. That is, as shown in the figure jC, the _ face of the belt 332 & field I ' Y 2 has the outer peripheral surface of the pulley, and has an inner peripheral surface with the belt 332. The portion 'and the inner peripheral surface of the belt 332 has a positioning support portion such as the groove Shao 0 that is aged with the following. The power of the Zhao Department produces a linear motion of the piston pull, which is connected to the main symmetrical moving part of the end, and is guided by the main symmetrical moving part, and moves linearly along the length direction of the main symmetrical moving part. This %, connected to the main shaft of the main shaft, is called the rotating part, and along with the auxiliary symmetry moving part guide 3, persuading the main symmetrical moving part to act as a linear motion 'directly indirectly arranged in the main pair The position adjustment clip portion on the soup of the private movement #310a and the auxiliary symmetrical movement portion 3 is also linearly moved. 17 1274032 One side of the symmetrical moving portion 3i 借 by which the piston 222 is linearly moved is connected to the upper end 332a of the belt 332 via the leather f connecting mechanism 334, and the belt 332 is moved together by the movement of the supersymmetric moving portion 310. The belt 332 is rotatable by the pulley 331. The belt 332 is rotated and rotated along the pulley 331 disposed inside the belt 332. In the symmetrical moving portion constituting the symmetrical moving portion element 3 () 1, there is no other symmetrical moving portion connected to the power generating piston 222, and the lower end of the belt 332 is connected by the belt connecting mechanism. The connection position of the symmetry moving portion 310 and the lower end 332b of the belt 332, which are not connected to the power generating piston 222, is symmetrical with respect to the symmetrical moving portion connected to the power generating piston 222 and the upper end of the belt 332. The two symmetrical moving portions 31A constituting the symmetrical moving portion member 301 are simultaneously - moved at approximately the same distance while moving in a direction of being close to each other or away from each other. The position adjustment clip portion 400 has a clip portion body 41A, a clip portion extension mechanism 420, and a clip 430. Fig. 3B is a schematic partial perspective view showing the position adjusting clip portion 4A when the clip portion stretching mechanism 42 is closed, and the figure shows the position adjusting clip portion when the clip portion - the stretching mechanism 42 is opened. Outline part of the perspective · figure. The clip portion main body 410 is rotatably mounted around the clip portion main body rotating shaft portion 412 on the main symmetry moving portion plate 310c disposed on one surface of the main symmetrical moving portion 31A. 18!274〇32 clip portion stretching mechanism 420, the end is rotatably disposed on the symmetric moving portion 3i, specifically disposed on one side of the auxiliary symmetric moving portion 31b, and the other end is rotatably mounted on the clip portion body According to how light it is, the body of the clip portion is vertically erected or inclined at a predetermined angle. As shown in Fig. 3β, the clip portion stretching mechanism 420 has a clip portion gas red 421 and a clip portion piston button. The clip portion cylinder 421 has one or more clip portion outflow inlet cuts on the outer side surface, and the lost portion flow inlet port 423 is connected to the fluid operating portion through the connecting hose 424 (not the end portion of the clip portion private portion 422, and is disposed in the clip portion) The other end of the cylinder 421 is rotatably connected to the holder body 410 _ end. By the control unit (refer to the second icon number _ L system, (4) county department (not shown) pressure level is connected The hose 424' flows out into the crucible 423 through the clip portion, flows into the grip portion cylinder, or is discharged from the clip portion cylinder 421 to the fluid operating portion through a reverse process. The central sub-part piston 4-22' is based on the inside of the clip portion cylinder 421. The fluid is diligently stretched and/or shrunk.: In the morning, the clip extension mechanism describes an example of a cylinder-piston drive mechanism. However, for example, the clip portion rotary motor is connected to the small shaft and the small shaft of the center shaft of the clip motor. The rotation of the wheel, the pinion type having the linear reciprocating rack, and the like may also be used for the shore, and the gamma is not limited to the above example, and may include more than one. The structure 42=30 is disposed at the end of the clip portion body 410. Through the Central Division When the stretcher is stretched and the clip body is vertically erected to the fixed plate 110, the central 430 soldier is placed on the edge of the glass substrate on the main table 500. When the clip is in contact with the edge of the glass substrate, the glass substrate and the clip are prevented. 19 1274032 l !·生二耗和知^ ' can contain elastic materials with elasticity. Here, as an elastic material, there are a variety of materials to choose from, such as bribe (four) yetheretherketone). PEEK in tensile and bending strength, character and resistance Continued change (P-pin is complicated, money is touched (4) (4), clip 430 containing PEEK, 7丨, / gentleman /, wear resistance, heat resistance, steam resistance, radioactivity and flame retardancy. In order to prevent the increase in the cost due to the wire, the clip 430 may further have a nuclear pad 43 in the portion of the glass with the clip (4). In order to make the clip pad 431 easy to install, the clip is clipped in the clip. The mounted health-care money pad _ man slot 432, good (four) 丨 has a replaceable structure that can be inserted into the insertion slot 432. In addition, the clip 塾 431 can also be a good thermal net. No static mat, The electrostatic enthalpy includes a laminate and a chloroprene synthetic rubber. Hereinafter, a description will be given of a method for detecting various glass substrate detecting apparatuses according to a first preferred embodiment of the present invention. In Fig. 4A, a first preferred embodiment of the present invention is shown. The process of adjusting the position of the glass substrate of the various embodiments of the embodiment is described. However, the feature of the present invention is described for the purpose of β '. The detection process after the process of adjusting the position of the glass substrate is omitted in the method of detecting the glass substrate. The glass substrate is placed in the plurality of glass substrate detection devices described above, and the size information of the placed glass substrate is input to the control unit 12 (step (8)). Here, the size information of the glass substrate may be derived from, for example, a sense of position. The detector's detection mechanism, or 20 1274032, was also entered via manual operation by the operator. According to the size information of the glass substrate input to the control unit 12, the signal is compared with the signal of the substrate of the first set size to determine whether it is feasible (step, step s7). Then, the glass substrate position adjustment control signal is output from the 卩120 (step "(8)). From the production system, the glass substrate position adjustment control signal output from the 卩120 is transmitted to the power generation unit and the field recording adjustment unit, and the entangled person The position of the glass substrate (step S_), and then the glass substrate is detected by the optical device (4). Fig. 4B specifically shows the positional adjustment of the glass substrate in the method for detecting the glass substrate of the four kinds of glass substrates, in order to compare It is clear that the process paper of the frequency S7 (8) rotation shown in Fig. 4A is only the portion related to the position adjustment of the glass substrate. In the various glass substrate detecting devices of the present invention, the positional adjustment of the glass substrate is even for the glass substrate. A variety of glass substrates of different lengths and widths are also suitable, but in the present embodiment, only the case where one edge has the same length and the other edge has a length change has been described. Four kinds of glass substrates are provided. The first size (1870x2200 mm), the second size (1870x1456 111111), the third size (1870 and 11〇〇111111), and the fourth size (187 (^7) 28 111111), but these are arbitrarily selected sizes, and the technical features of the present invention are not limited to these glass substrate sizes. Here, the l870x2200 mm is in conformity with the specifications of the main gantry 51. First, 'in accordance with the input mechanism, etc. The glass substrate size information, the controller 12 compares and determines whether the size of the input glass substrate is the same as the size of the second layer (step 21 1274032 S710). When the size of the placed glass substrate matches the first size, the power is not applied. The generating unit 200 and the position adjusting clip unit 4 output the glass substrate position adjustment control signal, and after the position adjustment is performed on the main stage 510 (step S910), the glass substrate is detected. In step S710, the glass substrate is placed. When the size of the size is different from the size of the first dimension, the size of the panel of the substrate is compared with that of the second substrate (step S720). When the size of the glass substrate matches the second dimension, the controller Do is directed to the power generating unit 200. And a position adjustment clip unit 働 outputting a glass substrate position adjustment control signal (step S820). Adjusting the position of the glass substrate according to the input to the power generation unit 2〇〇 The boring 5 tiger' becomes the power of the town-level cylinder form, and the cylinder drive unit (10) performs a flushing operation, so that the symmetrical moving portion connected to the power generating gas-red driving portion 22() is moved by about 1 stroke. The other symmetrical moving portion 310 to which the belt portion 33 () is connected also moves by a distance of about ! stroke. If the movement of the symmetrical moving portion 31 结束 ends, the grip portion of the position adjusting clip portion 4 〇 is moved, and the center After the financial body 410 is erected perpendicularly to the fixed plate 110, the clip having the body end of the money body is in contact with the side surface of the edge of the glass substrate, and the position of the glass substrate is matched with a preset center position (step s is called glass). When the position of the substrate is adjusted, the clip portion stretches the mechanism gamma, and the clip portion body is inclined at a predetermined angle to make a wire position (step S922), which is for the microscopic detection, and the light source 13 is not smashed and respected. The surface inspection process of the glass substrate of the roadway eye and/or county device can be applied in a general way 22 1274032. In step S720, if the size of the placed glass substrate does not match the second size, it is judged whether or not the size of the glass substrate matches the third size (step s73). In the continuation process, except for the operation step (s93()) of the power generation cylinder drive unit 22 (), the step of outputting the glass substrate position adjustment control signal at the point of the distance of about 2 strokes (step S83 〇), the good part The step of opening the tearing step of the stretched structure and the clip stretching mechanism 42G_closing step (step failure) are the same as the case where the size of the placed glass substrate coincides with the second size. In step S730, when the size of the placed glass substrate does not match the second size, it is compared and judged whether or not the size of the glass substrate coincides with the third size. In the operation procedure of the power generation cylinder drive unit 220 (step 〇), the step of outputting the glass substrate position adjustment control signal (step S840) and the clip portion extension are performed after the distance point of about three strokes is performed. The opening step (S941) of the mechanism 42A and the closing step (step smearing) of the clip extension mechanism 42 are the same as the process of placing the glass substrate and the second dimension. In step S740, if the size of the placed glass substrate does not match the third size, and the size of the placed "long substrate" does not match the predetermined size, an error message is sent (step S850). The flowchart shown in the figure shows the process of determining the size of the glass substrate in the descending order. However, after determining the size of the glass substrate in the ascending order, the position may be reduced, and the configuration method of the present invention may include various aspects. 23 1274032 <Second Preferred Embodiment> FIG. 5A is a schematic partial perspective view showing a main stage of a plurality of glass substrate detecting apparatuses according to a second preferred embodiment of the present invention. On the main gantry of the cymbal, each side of the main gantry 510 has a position at which one or more power generating portions 5 are connected to the power generating portion 520, and the power generated by the power generating portion 52 is moved. #部分53〇; and mounted on the position light branch #53Q on the edge of the glass substrate, the light_substrate position (four) is located in the whole part 54〇. In the present embodiment, the description of the main gantry 510 One or more power generating portions 52A, a position adjusting support portion, and a position adjusting clip portion are provided on each side, but the present invention is not limited thereto. That is, the power generating portion 520 and the like may be provided only on the main gantry 510. Further, the power generating portions 52 () disposed on the opposite sides of the main gantry 5K) may be arranged symmetrically with each other, or may be asymmetric, in order to make the artificial hand easy. The glass substrate may be placed in a different manner, and a part of the structures may be designed to be different from each other, and include a plurality of aspects. In the preferred embodiment, the power generating portions 520 that are disposed opposite each other and disposed on both sides may be considered to be almost the same structure. Take The description will be centered on components and the like that are attached to the two adjacent sides. The fifth drawing is a side of the main table 500 in FIG. 5A, and the part indicated by the symbol "A," is partially performed. Magnified perspective view. The power generating unit 520a can be configured by a plurality of types such as an electric motor and a hydraulic motor. However, in the preferred embodiment shown in FIG. 5B, it is made by the oil-and-oil meal. The power generation unit 520 having a multi-stage cylinder type 24 1274032 power generation unit has an outflow inlet (not shown), and the fluid supplied through an external hydraulic operation unit (not shown) flows out. The inlet is transmitted to the multi-stage cylinder type power generating portion 520, and the piston of the power generating portion 520 can be linearly moved.
動力產生部520的活塞的一面上連接著位置調整支撐部 510，透過動力產生部520的活塞的直線運動，可以一起作直線運 動。位置調整支撐部530a具有移動杆531a，移動杆531a的一端 與動力產生部520a的-端連接著。如第5B圖所表示的那樣，藉 移動杆連接讀521a’雜杆531a的-端為㈣检緊目在動力產 生部52Ga的活塞上的構造，但是本發明不受這樣構成的限制。 移動杆531a根據動力產生部5施的動作，可以在垂直主△ 架5K)的方向移動。為了使得移動杆灿的移動滑順地進行，^ 與移動杆仙的下_置社台架施的-社具有移動杆導 向件施，職_杆導向件孤的軸杆灿的下面，The position adjustment support portion 510 is connected to one surface of the piston of the power generating portion 520, and the linear motion of the piston transmitted through the power generating portion 520 can be linearly moved together. The position adjustment support portion 530a has a movement lever 531a, and one end of the movement lever 531a is connected to the end of the power generation portion 520a. As shown in Fig. 5B, the end of the read 521a' miscellaneous rod 531a is connected by the moving rod to (4) the structure for checking the piston of the power generating portion 52Ga, but the present invention is not limited to such a configuration. The moving rod 531a is movable in the direction of the vertical main yoke 5K) in accordance with the operation of the power generating unit 5. In order to make the movement of the moving rods smoothly, ^ and the moving rods of the lower _ _ _ shi shi shi shi shi shi shi shi shi shi shi shi
移動杆導向件配合部伽。這裏，軸杆導向件配合部你，\ 滑動導執型，但是本發明不受此限制。 疋 移動杆灿的―面上具有位置調整失子部顺，透過移 mea—二衣？動杆I上的定位機構⑽卽 :&、义位機構541a可移動的定位杆（align ㈣池、及安餘定位杆处的—端岐子池。 25 1274032 定位機構541a是由油空壓動作的氣紅型定位機構所構成的， 但不’也可包細賴轉叙樣。粒機構池 的活基的-端連接在定位杆542a的_側。定购处，經由定位 機構54U的運動，與移練531a的運動社地與定位機構術 —起作直線運動。為了使定位杆5必的移動_地進行，在對應 定位杆542a下面的移動杆531a的一面上具有一個以上的定位杆 導向件545a，在與定位杆導向件池對應的定位杆处的下面 具有定位杆導向件配合部遍。這裏，定位杆導向件池和定位 杆導向件配合部5輪是由滑動導執型構成的，但是不受此限制， 也可以為其它多種態樣。 對著定位杆542a的内侧-側具有一個以上的夹子54如。央子 池與玻璃基板的邊緣接觸時，為了防止玻璃基板及夾子池的 磨耗及損傷，夾子542a可以為具有彈性的彈性材料。這樣的彈性 材料例如包括PEEK(p〇lyetheretherket㈣)。ρΕΕκ如上述較佳實施 載的拉伸秦曲強度、靭性及耐螺變㈣印)性之 與化學的特性及電氣的特性是優良的，含有P咖時，夾子43〇 可以具有耐雜性、耐熱性、耐蒸汽性、耐放射性、_性等。 、根據情況’如第5C _示，在夾子543a中，為了防止因磨 耗增加費用’與失子543a的玻璃基板接觸的部分進而可以具有夾 子墊544a。夾子墊544a，可為具有優良無靜電特性之無靜電墊， 無靜電墊可含有層壓合板和氯丁二烯合成橡膠，但是不受此限制。 26 1274032 為了使夾子墊544a的安裝較容易，在夾子543a的安裝夾子 墊544a的位置可形成夾子墊的插入槽543，a，使夾子墊431可在 失子墊的插入槽543，a中進行更換的構造。當然，在該情況下，失 子墊544a也可以用螺栓那樣的緊固機構544，a安裝在夾子 上0 夾子543a和定位杆542a的結合可以用多種的方式構成的， 如第5C圖所*，從失子543a的_側延長的夹子緊固部件 和定位杆542a的-側形成的夾子緊固具542，a結合構成。夾子緊 固部件543，a，在夾子緊固具542，a的内可移動地緊固時，它們之 間’藉由夾有彈性體547a的彈性部件，失子543與破璃基板的邊 緣接觸時，可以防止玻璃基板及夾子543的磨耗及損傷的發生。 核是，·體547a夾在好緊固部件543，a及料翻具54^ 時’由於是預先適當加麗的狀態下安裝的，所以夾子543乃至夾 子墊他和玻璃基板的邊緣接觸時，由於夹子543乃至夾子塾 池受到彈性加屢的構造，可以防止夹子543乃至夾子料如急 劇的接觸，而發生的玻璃基板及/或夾子543等的損傷。只是，^ 作為檢測體的玻璃基板的厚度是薄膜形態時，對於"加在^性體 5仏上的先加勤及雜體斯的係 玻璃基板上加上不必要之動値。 而叹疋不要在 第沁圖表示在第5A圖中主台·的其他 部分的部分放大紐圖。第见騎絲_力產均=b = 27 1274〇32 置調整支撐部530b及位置調整夹子部54〇b。與第5B圖的产、兄比 較，位置調整支撐部530b的移動杆531b具有多個，轉分別獨立 的動力產生部520b移動，除此以外，幾乎是相同的。 動力產生部520b也可由多級氣缸型的動力產生部構成，用、、由 空壓可進行多、_作，動力產生部52Gb的―有㈣人口 (未圖 示），由外部的油壓動作部(未圖示)提供的流體經過流出入口傳、= 到多級氣缸型_力產生部52〇b，動力產生部遍岐塞可以= 直線運動。 動力產生部52〇b的活塞的一側連接著位置調整支標部別， ^著動力產生部鑛的活塞-起直線運動。位置調整切部5勘 =移動杆现，移動杆531b的一端連接在動力產生部遍的 -端。如第5D圖所示，經過移動杆連接部件，移動杆遍 7端’也可為在動力產生部5施的活塞上緊固螺检的構造，但 疋本發明不限制於這樣的構成。 0、2使得移動杆通_地移動，在對著移動杆531b下面 9。木510b的-面上’具有移動杆導向件機，對應移動杆導 向件知b的移動杆遍的下面，具有移動杆導向件配合部遇。 私動杆531b的-面上具有位置調整夾子部獅，透過義杆 2的移動與位置調整夾子部54% —祕動。位置調整炎子部 ^有移動杆伽上安裝蚊位機構观；用定位機構遍 β的疋仇杆542b;及安裝在定位杆542b的-端的夾子543b。 28 1274032 定位機構541b是由氣虹型的定位機構構成，藉油㈣動作， 但不受此_，其也可為電鱗構成，包含多種態樣。定位機構 541b的活塞的一端連接在定位杆遍的一側。定仅杆遍藉定 位機構5仙的運動，與移動杆遍的運動獨立地，與定位_ 观-起作直線運動。為了使定位杆的移動滑順地進行，在 對應定位杆542b下面的移動杆5通的—面上具有_個以上的定 位杆導向件545b，與定位杆導向件545b對應的定位杆⑽的下 面具有定位杆導向件配合部。這裏，定位杆導向件⑽和定# 位杆導向件配合部湯是_導執型的構成，但是不受此限制， 可以包含多種態樣。 對著定位杆542b的内侧-側，具有一個以上的夾子。夾 子543b與玻璃基板的邊緣接觸時，為了防止玻璃基板及夹子卿 的磨耗及顯，含有PEEK_yethe磁她etQne)_·材料。 根據情況，夾子543b，可更具有夹子墊(未圖示)的構造，這 些與上述對失子543a的説明及構造幾乎是相同的。 · 以下對本發明第二較佳實施例的多種玻璃基板檢測裝置的動， 作過程進行説明。在第6A目及第6B目中，表示了本發明第二較· 佳實施例的主台的各個邊上安裝_力產生部、位置調整支 樓部、及位置調整機構（夕紗^巧、、力動作前狀態的概略部 刀放大平面圖’第7A圖及第7B圖表示動作後狀態的概略的部分 放大平面圖。這裏，移動杆導向件(532a，532b)和移動杆導向件配 29 1274032 合部〇33a ’ 533b) ’及定位杆導向件(545a，545的和定位杆導向件 配合部(546a，546b)用虛線表示。 首先’如第6A圖及第6B圖所示，在動力產生部(52〇a，52〇b) 及疋位機構(541a，541b)上，沒有輸入來自控制部12〇的玻璃基板 位置調整控娜號，轉在赫作狀態τ，動力產生部(5遍 ，520b) 及定位機構(541a，541b)的一端連接的移動杆(531a，531b)及定位 杆(542a，542b)為原位置。 而後’確定了置入的玻璃基板的尺寸及位置調整是否可以 牯，來自控制部12〇的輸出的玻璃基板位置調整控制訊號，傳遞 給動力產生部(520a，520b)及定位機構(541a，541b)，如第7A圖 及第7B圖所示，各個的動力產生部(52〇a，52〇b)及定位機構(541a， 541b)進行動作。動力產生部(52〇a，52〇b)動作時，動力產生部 (520a ’ 520b)—端所連接的移動杆(53ia，531b)，垂直主台架510 的各個邊地移動。移動杆(531a，531b)的移動透過移動杆(531a， 531b)下面安裝的移動杆導向件配合部(533a，533b)及主台架510 上女裝的移動杆導向件(532a，532b)可以更加穩定。 矛夕動杆(531a，531b)移動到用動力產生部(520a，520b)預先設 疋的位置後’定位機構(541a，541b)動作，移動杆(531a，531b)上 安裝的定位杆(542a，542b)垂直主台架510的邊的長度的方向移 動。定位杆(542a，542b)移動時，與移動杆(531a，531b)的移動相 同的，藉由定位杆(542a，542b)及主台架510上所配置的定位杆導 30 1274032 向件(545a，545b)及定位杆導向件配合部(546a，546b)可以更穩定。 這裏，移動杆(531a，531b)的移動和定位杆(542a，542b)的移動是 按照順序進行描述，但是本發明不限制於這些順序。 透過疋位杆(542a，542b)的移動，定位杆(542a，542b)—端所 連接的夾子(543a，543b)與玻璃基板(未圖示)邊緣的侧面接觸，藉 夹子(543a’ 543b)與玻璃基板一起移動，可以排列成預先設定的位 置。 上述的較佳實施例中，敍述的動力產生部及位置調整夾子部 是由夕級氣紅型及/或一端氣缸型構成的，但是本發明不受這些限 广例如，第，佳實施例中的位置調整切部㈣稱縣 部_，沒有驗各侧稱鶴部_職性馬達動力產生部移動 之皮帶部，具有為了感知祕性馬達動力產生部移動的對稱移動 :的位置的極限_及/或位置感·。但是，上述較佳實施例敛 =的多級及/或-端氣紅型的動力產生部及位置調整夾子部，從能 夠正確控制步驟之觀點著眼，使月匕 置為較佳。 $ u㈣触動襄 安壯rt在上述多種玻璃基板檢測裝置的較佳實施例中，是斜 女衣在疋Μ的情況和絲在主台上的敎 疋子 二種情況可以結合實施，在包含動力產生兄明，但 位置調整夾子部、之控 置=切部、 多種態樣。 ’本翻可包含 31 1274032 /、有上述構成的本發明，可以達到以下功效。 壯詈二，本發明多種玻璃基板檢測裝置可以用一玻璃基板檢測 ^〜多種的尺寸的玻·板進行表錢測，可最大化地提高 貝设備的利用性。 ^本發明多種玻璃基板檢測裝置可用一玻璃基板檢測裝 美-尺相玻璃基板進行表秘測，所以根據投入的玻璃 的尺寸，可以免去更齡台的賴程序， 省可以得到生産率提高的效果。彳烏柄間的即 本發明多種玻璃基板檢測裝置具有一端及/或多級氣缸 確的控制=及位置調整夹子部’可對破壤基板的位置進行正 第四’本㈣多種玻魏板檢·置，無論 縦橫方向如何，部ϋ— 士 士# 暴板的 細_絲的位置及簡，可以迅速 地對應多種尺寸玻璃基板的檢測要求。 、 本發明的多種破璃基板檢㈣置可以對使用在咖、 辦广Γ有機乱等平面顯示裝置所使用的多種尺寸破璃基板上 的知痕和缺陷進行檢測。 、雖然本發__之触實補鑛如上，麟並非用 疋本發明，任何孰習相 （ 内，者可齡/ #者，林聽本翻之精神和範圍 L作些权更動與濁饰，因此本發明之專利保護範圍須視 兄明書所社巾請專概_狀者為準。 、 32 1274032 【圖式簡單說明】 第1圖為已知技術玻璃基板檢測裝置的概略分解透視圖； 第2圖為本發明第一較佳實施例的多種玻璃基板檢測裝置的概略 分解透視圖； 第3A目為本發明第一較佳實施例的多種玻璃基板檢測裝置的動 力產生部的概略部分分解透視圖； 第3B圖為本發明第一較佳實施例的多種玻璃基板檢測裝置的位 置調整支#部及位置輕夾子_概略部分分解透視圖； 弟3C圖為本發明第—較佳實施例的多種玻璃基板檢測裝置的皮 f部的概略部分分解透視圖； 第圖為本毛明第—較佳實施例的多種玻璃基板檢測裝置的位 置調整夹子部_作狀態部分分解透視圖； 输測裝置的動 第4B圖為本發明第一較佳 狀態中的分解透視圖； 實施例的4種玻璃基板檢測裝置的 動作 崎娜軸崎雜 ==5a’a"區域的概略部分放大平面圖; Ί 5A目+主料子部的其他形H的部分放大透視£ 弟5D圖為第5a_,區域的概略部分放大平_ 33 1274032 第6A圖為本發明第一較佳實施例的多種玻璃基板檢測裝置的部 分動作狀態的部分放大平面圖； 第6B圖為本發明第一較佳實施例的多種玻璃基板檢測裝置的部 分動作狀態的部分放大平面圖； 第7A圖為本發明第一較佳實施例的多種玻璃基板檢測裝置的部 分動作狀態的部分放大平面圖；及 第7B圖為本發明第一較佳實施例的多種玻璃基板檢測装置的部 分動作狀態的部分擴大平面圖。 【主要元件符號說明】 11 主台 12 定盤 13 光源機構 110 定盤 120 控制部 131 光源 200 動力產生部 210 流體動作部 220 動力產生氣缸驅動部 221 動力產生氣缸 222 動力產生活塞 223 產生動力流出入口 34 1274032 224 連接軟管 300 位置調整支撐部 301 對稱移動部元件 310 對稱移動部 310a 主對稱移動部 310b 辅助對稱移動部 310，b 辅助對稱移動部導向件 310c 主對稱移動部板 320 導執部(rail part) 320a 主對稱移動部導執 320，a 主對稱移動部導向件 320b 辅助對稱移動部導執 330 皮帶部(belt part) 331 滑輪 331a 滑輪中心軸 331b 滑輪支撐體 332 皮帶 332a 皮帶上部 332b 皮帶下部 333 突出部 334 皮帶連接機構Move the rod guide to match the part. Here, the shaft guide fits you, the sliding guide type, but the invention is not limited thereto.疋 The movement of the lever on the surface has a position adjustment and the loss of the sub-section, through the shift mea - two clothes? The positioning mechanism (10) on the moving rod I: &, the movable positioning rod 541a movable positioning rod (aligning pool), and the rear positioning rod at the end of the positioning pocket. 25 1274032 positioning mechanism 541a is operated by oil air pressure The gas red type positioning mechanism is constructed, but not the same. The active end of the granular mechanism pool is connected to the _ side of the positioning rod 542a. The ordering position is via the movement of the positioning mechanism 54U, and The movement community of the 531a and the positioning mechanism are linearly moved. In order to make the positioning rod 5 move, the one or more positioning rod guides are provided on one side of the moving rod 531a below the corresponding positioning rod 542a. The 545a has a positioning rod guide fitting portion under the positioning rod corresponding to the positioning rod guide pool. Here, the positioning rod guide pool and the positioning rod guide fitting portion 5 are formed by a sliding guide type. However, it is not limited thereto, and may be in various other forms. There are more than one clip 54 on the inner side of the positioning rod 542a. For example, when the center sub-cell is in contact with the edge of the glass substrate, in order to prevent the grinding of the glass substrate and the clip pool. And the damage, the clip 542a may be an elastic material having elasticity. Such an elastic material includes, for example, PEEK (p〇lyetheretherket (4)). ρΕΕκ is a tensile strength, toughness, and snail resistance of the preferred embodiment. It is excellent in chemical properties and electrical properties. When P coffee is contained, the clip 43 can have noise resistance, heat resistance, steam resistance, radioactivity resistance, and the like. According to the case, as shown in Fig. 5C, in the clip 543a, a clip pad 544a may be further provided in order to prevent the portion from coming into contact with the glass substrate of the missing sub-543a due to the increase in wear. The clip pad 544a may be an electrostatic-free pad having excellent static-free properties, and the static-free pad may contain a laminate and a chloroprene synthetic rubber, but is not limited thereto. 26 1274032 In order to facilitate the mounting of the clip pad 544a, the insertion groove 543, a of the clip pad can be formed at the position of the clip 543a of the clip 543a, so that the clip pad 431 can be inserted in the insertion groove 543, a of the sub-pad. Replacement construction. Of course, in this case, the lost sub-pad 544a can also be mounted on the clip by a fastening mechanism 544 such as a bolt. The combination of the clip 543a and the positioning rod 542a can be constructed in various ways, as shown in Fig. 5C. The clip fastening member 542, a formed by the side of the clip fastening member extended from the side of the lost child 543a and the side of the positioning lever 542a is combined. The clip fastening members 543, a are movably fastened within the clip fastening members 542, a between them by the elastic member sandwiching the elastic body 547a, and the missing member 543 is in contact with the edge of the glass substrate. At this time, abrasion and damage of the glass substrate and the clip 543 can be prevented. The core is that the body 547a is clamped to the good fastening member 543, a and the material changer 54^', since it is installed in a state in which it is properly preliminarily attached, so that the clip 543 or the clip pad is in contact with the edge of the glass substrate, Since the clip 543 and the clip pool are elastically and repeatedly configured, it is possible to prevent damage of the glass substrate and/or the clip 543 or the like which occurs when the clip 543 or the clip material is in sharp contact. However, when the thickness of the glass substrate as the sample is in the form of a film, unnecessary movement is added to the glass substrate of the first addition and the miscellaneous body added to the body. And the sigh does not indicate a partial enlargement of the other parts of the main table in the fifth diagram in the fifth diagram. First, the riding wire _ force production = b = 27 1274 〇 32 The adjustment support portion 530b and the position adjustment clip portion 54 〇 b. In comparison with the production and the brother of Fig. 5B, the movement lever 531b of the position adjustment support portion 530b has a plurality of movement levers 520b that are independently rotated, and is almost the same. The power generation unit 520b may be configured by a multi-stage cylinder type power generation unit, and may be operated by a plurality of air pressures, and the (fourth) population (not shown) of the power generation unit 52Gb is operated by external hydraulic pressure. The fluid supplied from the portion (not shown) passes through the outflow inlet, the pressure to the multi-stage cylinder type_force generating portion 52〇b, and the power generating portion can be linearly moved. One side of the piston of the power generating portion 52〇b is connected to the position adjustment branch portion, and the piston of the power generating portion is linearly moved. The position adjustment cut portion 5 is a moving rod, and one end of the moving rod 531b is connected to the end of the power generating portion. As shown in Fig. 5D, the moving rod connecting member may be configured to fasten the thread on the piston applied to the power generating portion 5 via the moving rod connecting member. However, the present invention is not limited to such a configuration. 0, 2 causes the moving rod to move to the ground, below the moving rod 531b. The 'face' of the wood 510b has a moving rod guide, corresponding to the moving rod of the moving rod guide member b, with a moving rod guide mating portion. The position of the lever 531b has a position adjustment clip lion, and the movement of the lever 2 and the position adjustment clip portion 54% are secret. Position adjustment inflammation section ^There is a moving rod gamma on the installation of the mosquito position mechanism; the positioning mechanism is used to pass the 疋 杆 rod 542b; and the clip 543b is attached to the end of the positioning rod 542b. 28 1274032 The positioning mechanism 541b is composed of a gas-colored positioning mechanism, and is operated by oil (4), but it is not subject to this. It may also be composed of electric scales and includes various aspects. One end of the piston of the positioning mechanism 541b is connected to one side of the positioning rod. The movement of the rod-only positioning mechanism of 5 sen is determined, and the movement of the moving rod is independent of the movement, and the positioning is performed linearly. In order to smoothly move the positioning rod, there are more than one positioning rod guide 545b on the surface of the moving rod 5 below the corresponding positioning rod 542b, below the positioning rod (10) corresponding to the positioning rod guide 545b. The positioning rod guide has a fitting portion. Here, the positioning rod guide (10) and the positioning rod guide fitting portion are configured as a guide type, but are not limited thereto and may include various aspects. There are more than one clip facing the inside-side of the positioning rod 542b. When the clip 543b is in contact with the edge of the glass substrate, the PEEK_yethe magnetic material is contained in order to prevent abrasion and display of the glass substrate and the clip. Depending on the case, the clip 543b may have a configuration of a clip pad (not shown), which is almost the same as the description and structure of the above-described loser 543a. The operation of the various glass substrate detecting devices of the second preferred embodiment of the present invention will be described below. In the sixth and sixth aspects, it is shown that the _ force generating portion, the position adjusting branch portion, and the position adjusting mechanism are mounted on the respective sides of the main table of the second preferred embodiment of the present invention. [Surveyed plan view of the outline of the state before the force operation] FIGS. 7A and 7B are schematic partial enlarged plan views showing the state after the operation. Here, the moving rod guides (532a, 532b) and the moving rod guides are equipped with 29 1274032. The portion 〇 33a ' 533b) 'and the positioning rod guides 545a, 545 and the positioning rod guide fitting portions (546a, 546b) are indicated by broken lines. First, as shown in Figs. 6A and 6B, in the power generating portion (52〇a, 52〇b) and the clamp mechanism (541a, 541b), the glass substrate position adjustment control number from the control unit 12〇 is not input, and the power generation unit τ, the power generation unit (5 times, 520b) and the positioning rods (531a, 531b) and the positioning rods (542a, 542b) connected to one end of the positioning mechanism (541a, 541b) are in the original position. Then, it is determined whether the size and position adjustment of the placed glass substrate can be adjusted. , glass substrate position adjustment control from the output of the control unit 12A No., transmitted to the power generating unit (520a, 520b) and the positioning mechanism (541a, 541b), as shown in Figs. 7A and 7B, the respective power generating portions (52A, 52〇b) and the positioning mechanism ( 541a, 541b). When the power generating unit (52〇a, 52〇b) operates, the power generating unit (520a '520b) is connected to the moving rods (53ia, 531b) and the vertical main rack 510. Moving sideways. The movement of the moving rods (531a, 531b) is transmitted through the moving rod guide fitting portions (533a, 533b) installed under the moving rods (531a, 531b) and the moving rod guides (532a) of the women's clothes on the main table 510. , 532b) can be more stable. The lance mechanism (531a, 531b) moves to the position set in advance by the power generating portion (520a, 520b), and the positioning mechanism (541a, 541b) operates to move the rod (531a, 531b). The upper mounted positioning rods (542a, 542b) move in the direction of the length of the side of the main main frame 510. When the positioning rods (542a, 542b) move, the movement of the moving rods (531a, 531b) is the same as by the positioning rod (542a, 542b) and the positioning rod guide 30 1274032 of the main gantry 510 (545a, 545b) and the positioning rod guide fitting portion ( 546a, 546b) may be more stable. Here, the movement of the moving rods (531a, 531b) and the movement of the positioning rods (542a, 542b) are described in order, but the invention is not limited to these sequences. , 542b), the positioning rod (542a, 542b) - the clip (543a, 543b) connected to the end is in contact with the side of the edge of the glass substrate (not shown), and is moved by the clip (543a' 543b) together with the glass substrate. Can be arranged in a preset position. In the above preferred embodiment, the power generating portion and the position adjusting clip portion are formed by a gradation gas red type and/or an end cylinder type, but the present invention is not limited by these limitations. For example, in the preferred embodiment, The position adjustment cut portion (4) is called the county department _, and the belt portion that moves on the side of the crane part _ occupational motor power generation unit is not inspected, and has a limit of the position of the symmetrical movement for sensing the movement of the secret motor power generation unit _ and / Or a sense of position. However, in the above-described preferred embodiment, the multi-stage and/or --end gas-red type power generating portion and the position adjusting clip portion are preferable from the viewpoint of enabling a correct control step. $ u (4) Touching the rt rt rt In the preferred embodiment of the above various glass substrate detecting devices, the case of the slanting smock in the case of the scorpion and the scorpion of the wire on the main table can be implemented in combination, including The power produces the brother, but the position adjustment clip part, the control set = the cut part, a variety of aspects. The present invention, which has the above constitution, can achieve the following effects. In addition, the various glass substrate detecting devices of the present invention can use a glass substrate to detect a plurality of sizes of glass plates for surface measurement, thereby maximizing the utilization of the shell equipment. The various glass substrate detecting devices of the present invention can detect the beauty-scale glass substrate by using a glass substrate for table top measurement. Therefore, according to the size of the glass to be input, the process of the older platform can be eliminated, and the productivity can be improved. effect. Between the stalks and the stalks, the various glass substrate detecting devices of the present invention have one end and/or multi-stage cylinders. The control = and the position adjusting clip portion can perform positive fourth 'this (four) various kinds of glass plate inspection on the position of the broken substrate. ·Set, regardless of the horizontal direction, the position of the _ 士 士 暴 暴 暴 暴 暴 暴 暴 暴 暴 暴 暴 暴 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 The various glass substrate inspections (4) of the present invention can detect the flaws and defects on the various sizes of the glass substrate used in the flat display device such as coffee, office, and the like. Although the hair of the hair __ is as above, the lining is not used for the invention, and any ignorant phase (inside, the age of the person / #, the spirit of the body and the scope of the L to make some weights and turbidity Therefore, the scope of patent protection of the present invention is subject to the general information of the brothers and sisters. 32 1274032 [Simple description of the drawings] Fig. 1 is a schematic exploded perspective view of a known glass substrate detecting device 2 is a schematic exploded perspective view of a plurality of glass substrate detecting devices according to a first preferred embodiment of the present invention; FIG. 3A is a schematic view of a power generating portion of a plurality of glass substrate detecting devices according to a first preferred embodiment of the present invention; 3B is a perspective view of a position adjustment branch portion and a position light clip of a plurality of glass substrate detecting devices according to a first preferred embodiment of the present invention; FIG. 3C is a first preferred embodiment of the present invention; A schematic partial exploded perspective view of a portion f of a plurality of glass substrate detecting devices of the present invention; the first partial exploded perspective view of the position adjusting clip portion of the plurality of glass substrate detecting devices of the present invention. 4B is an exploded perspective view of the first preferred state of the present invention; the operation of the four kinds of glass substrate detecting devices of the embodiment is abundance ==5a'a" Ί 5A mesh + partial enlargement perspective of other shapes H of the main material subsection. The 5D diagram is 5a_, and the outline of the area is enlarged _ 33 1274032. FIG. 6A shows the detection of various glass substrates according to the first preferred embodiment of the present invention. A partially enlarged plan view of a part of the operation state of the device; FIG. 6B is a partially enlarged plan view showing a part of the operation state of the plurality of glass substrate detecting devices according to the first preferred embodiment of the present invention; FIG. 7A is a first preferred embodiment of the present invention A partially enlarged plan view showing a part of an operation state of a plurality of glass substrate detecting devices; and FIG. 7B is a partially enlarged plan view showing a part of an operation state of the plurality of glass substrate detecting devices according to the first preferred embodiment of the present invention. Table 12 Fixed plate 13 Light source mechanism 110 Fixed plate 120 Control unit 131 Light source 200 Power generating unit 210 Fluid operating unit 220 Power generating cylinder drive Portion 221 Power generating cylinder 222 Power generating piston 223 Generating power outflow inlet 34 1274032 224 Connecting hose 300 Position adjusting support portion 301 Symmetrical moving portion element 310 Symmetrical moving portion 310a Main symmetric moving portion 310b Auxiliary symmetric moving portion 310, b Auxiliary symmetric movement Part guide 310c main symmetrical moving part plate 320 rail part 320a main symmetrical moving part guide 320, a main symmetrical moving part guide 320b auxiliary symmetrical moving part guide 330 belt part 331 pulley 331a Pulley central shaft 331b Pulley support 332 Belt 332a Belt upper 332b Belt lower part 333 Projection 334 Belt connection mechanism
35 位置調整夾子部 失子部本體(clamping part body) 失子部伸張機構(clamping part extension means) 爽子部氣缸 夾子部活塞 夾子部流出入口 連接軟管 夾子 夾子墊 插入槽 主台(main stage) 結合槽 玻璃杆一實施例 主台架(main stage frame) 主台架 主台架 動力產生部 動力產生部 動力產生部 移動杆連接元件 移動杆連接部件 36 1274032 530 位置調整支撐部 530a 位置調整支撐部 530b 位置調整支撐部 531a 移動杆(moving bar) 531b 移動杆 532a 移動杆導向件 532b 移動杆導向件 533a 移動杆導向件配合部 533b 移動杆導向件配合部 540 位置調整夾子部 540a 位置調整夾子部 540b 位置調整夾子部 541a 定位機構(alignment means) 541b 定位機構 542a 定位杆 542b 定位杆 542，a 夾子緊固具 543 夾子(clamper) 543a 爽子 543b 夾子 543，a 插入槽35 Positioning clip part Clamping part body Clamping part extension means Shuangzi part Cylinder clip part Piston clip part Outflow connection Hose clamp Clamp pad Inserting slot main stage (main stage) Combination Groove glass rod-an embodiment main stage frame main stage main stage power generation part power generation part power generation part moving rod connection element moving rod connection part 36 1274032 530 position adjustment support part 530a position adjustment support part 530b Position adjustment support portion 531a Moving bar 531b Moving rod 532a Moving rod guide 532b Moving rod guide 533a Moving rod guide fitting portion 533b Moving rod guide fitting portion 540 Position adjusting clip portion 540a Position adjusting clip portion 540b Position Adjusting clip portion 541a Alignment means 541b Positioning mechanism 542a Positioning rod 542b Positioning rod 542, a Clip fastener 543 Cliper 543a Shuangzi 543b Clip 543, a Inserting groove
37 1274032 544a 544，a 545a 545b 546a 546b 547a 夾子墊 緊固機構 定位杆導向件 定位杆導向件 ^ 定位杆導向件配合部 · 定位杆導向件配合部 彈性體37 1274032 544a 544,a 545a 545b 546a 546b 547a Clip pad Fastening mechanism Positioning rod guide Positioning rod guide ^ Positioning rod guide fitting · Positioning rod guide fitting Elastomer
3838
Claims (1)
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| KR1020040059369A KR100648468B1 (en) | 2004-07-28 | 2004-07-28 | Tester Inspecting Many Kinds of Glass and The Method thereof |
| KR1020040067819A KR100648467B1 (en) | 2004-08-27 | 2004-08-27 | Tester for Inspecting Many Kinds of Glass |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| TW200604084A TW200604084A (en) | 2006-02-01 |
| TWI274032B true TWI274032B (en) | 2007-02-21 |
Family
ID=38623016
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| TW93141228A TWI274032B (en) | 2004-07-28 | 2004-12-29 | A tester of various kinds of glass substrates and the method for testing various kinds of glass substrates by using thereof |
Country Status (1)
| Country | Link |
|---|---|
| TW (1) | TWI274032B (en) |
-
2004
- 2004-12-29 TW TW93141228A patent/TWI274032B/en not_active IP Right Cessation
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| Publication number | Publication date |
|---|---|
| TW200604084A (en) | 2006-02-01 |
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