TWI268221B - Fluid injection device and method of fabricating the same - Google Patents
Fluid injection device and method of fabricating the sameInfo
- Publication number
- TWI268221B TWI268221B TW095108131A TW95108131A TWI268221B TW I268221 B TWI268221 B TW I268221B TW 095108131 A TW095108131 A TW 095108131A TW 95108131 A TW95108131 A TW 95108131A TW I268221 B TWI268221 B TW I268221B
- Authority
- TW
- Taiwan
- Prior art keywords
- injection device
- fluid injection
- substrate
- same
- fabricating
- Prior art date
Links
Landscapes
- Chemically Coating (AREA)
Abstract
A fluid injection device and method fabricating of the same are provided. The fluid injection device comprises a substrate having a first surface, and a manifold is created through the substrate. A conductive polymer layer is formed on the first surface of the substrate. A metal structural layer is formed on the conductive polymer layer. A chamber is formed between the first surface of the substrate and the metal structural layer. A nozzle is created through the conductive layer and the metal structural layer communicating with the chamber. The fluid injection device may further comprise a chemical resistant metal film covering the metal structural layer and extending in the nozzle.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
TW095108131A TWI268221B (en) | 2006-03-10 | 2006-03-10 | Fluid injection device and method of fabricating the same |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
TW095108131A TWI268221B (en) | 2006-03-10 | 2006-03-10 | Fluid injection device and method of fabricating the same |
Publications (2)
Publication Number | Publication Date |
---|---|
TWI268221B true TWI268221B (en) | 2006-12-11 |
TW200734186A TW200734186A (en) | 2007-09-16 |
Family
ID=57913333
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
TW095108131A TWI268221B (en) | 2006-03-10 | 2006-03-10 | Fluid injection device and method of fabricating the same |
Country Status (1)
Country | Link |
---|---|
TW (1) | TWI268221B (en) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN107757127A (en) * | 2017-10-30 | 2018-03-06 | 苏州工业园区纳米产业技术研究院有限公司 | Nozzle structure, the preparation method of nozzle structure and micro electronmechanical ink jet-print head |
-
2006
- 2006-03-10 TW TW095108131A patent/TWI268221B/en active
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN107757127A (en) * | 2017-10-30 | 2018-03-06 | 苏州工业园区纳米产业技术研究院有限公司 | Nozzle structure, the preparation method of nozzle structure and micro electronmechanical ink jet-print head |
Also Published As
Publication number | Publication date |
---|---|
TW200734186A (en) | 2007-09-16 |
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