TWI268221B - Fluid injection device and method of fabricating the same - Google Patents

Fluid injection device and method of fabricating the same

Info

Publication number
TWI268221B
TWI268221B TW095108131A TW95108131A TWI268221B TW I268221 B TWI268221 B TW I268221B TW 095108131 A TW095108131 A TW 095108131A TW 95108131 A TW95108131 A TW 95108131A TW I268221 B TWI268221 B TW I268221B
Authority
TW
Taiwan
Prior art keywords
injection device
fluid injection
substrate
same
fabricating
Prior art date
Application number
TW095108131A
Other languages
Chinese (zh)
Other versions
TW200734186A (en
Inventor
Yi-Zhi Hong
Wei-Lin Chen
Wen-Pin Chuang
Original Assignee
Benq Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Benq Corp filed Critical Benq Corp
Priority to TW095108131A priority Critical patent/TWI268221B/en
Application granted granted Critical
Publication of TWI268221B publication Critical patent/TWI268221B/en
Publication of TW200734186A publication Critical patent/TW200734186A/en

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  • Chemically Coating (AREA)

Abstract

A fluid injection device and method fabricating of the same are provided. The fluid injection device comprises a substrate having a first surface, and a manifold is created through the substrate. A conductive polymer layer is formed on the first surface of the substrate. A metal structural layer is formed on the conductive polymer layer. A chamber is formed between the first surface of the substrate and the metal structural layer. A nozzle is created through the conductive layer and the metal structural layer communicating with the chamber. The fluid injection device may further comprise a chemical resistant metal film covering the metal structural layer and extending in the nozzle.
TW095108131A 2006-03-10 2006-03-10 Fluid injection device and method of fabricating the same TWI268221B (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
TW095108131A TWI268221B (en) 2006-03-10 2006-03-10 Fluid injection device and method of fabricating the same

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
TW095108131A TWI268221B (en) 2006-03-10 2006-03-10 Fluid injection device and method of fabricating the same

Publications (2)

Publication Number Publication Date
TWI268221B true TWI268221B (en) 2006-12-11
TW200734186A TW200734186A (en) 2007-09-16

Family

ID=57913333

Family Applications (1)

Application Number Title Priority Date Filing Date
TW095108131A TWI268221B (en) 2006-03-10 2006-03-10 Fluid injection device and method of fabricating the same

Country Status (1)

Country Link
TW (1) TWI268221B (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN107757127A (en) * 2017-10-30 2018-03-06 苏州工业园区纳米产业技术研究院有限公司 Nozzle structure, the preparation method of nozzle structure and micro electronmechanical ink jet-print head

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN107757127A (en) * 2017-10-30 2018-03-06 苏州工业园区纳米产业技术研究院有限公司 Nozzle structure, the preparation method of nozzle structure and micro electronmechanical ink jet-print head

Also Published As

Publication number Publication date
TW200734186A (en) 2007-09-16

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