Ί266863 九、發明說明： 【發明所屬之技術領域】 本發明係關於一種對薄膜進行缺陷檢查之方法，特別係關於 一種以薄膜作為基材之顯示器的薄膜缺陷檢查方法。 _ 【先前技術】 ， 隨著顯示器市場_化’輕型化的需求，薄膜被越來越多的 應用於電子設備中，尤其是有機薄膜應用越來越受到人們的重 籲視。對薄膜的應用從最初之電子組件如有機薄膜電容器，發展到 現今的顯示領域如有機發光二極體（0rganic _ Emitting Diodes，OLED)。 目如¥採用真空蒸鑛法、旋轉塗佈法或噴墨列印法製備單 層或多層薄膜。真空蒸鑛技術係藉由真空設備蒸鑛來進行成膜作 業。旋轉塗佈法係在高速旋轉的基板上滴上數滴液體，液體會因 為旋轉形成的離心力而呈薄膜狀分佈，從而達到成膜之目的。嘴 #墨列印技細係藉由裝有不同顏色高分子發光材料之喷墨列印設 備’依次將各色之聚合物質噴射於基板相應位置上而形成薄膜。 1惟，在成膜的製程中採用以上各種技術，在蒸鑛設備、基板 或疋喷腔内壁上不可避免會附著一些微小的雜質微粒，該雜質微 粒在薄膜上形小突域穿孔，影㈣_平整度，進而導致 =功能失效而影響產品良率。因此，對薄膜之缺陷檢查必不可 在習去薄膜製私中’通常採用強光燈檢查咖比⑽瓜叫 6 1266863 法對薄膜進行缺陷檢查。強光燈檢查法係藉由強光照射該薄膜表 面’則在有穿孔缺陷處會產生漏光現象，而在有突起缺陷處因不 透光產生全黑點，且漏光點或全黑點與穿孔或微粒突起大小對應 / 相 Π 再猎由 CCD 相機（Charge Coupled Device Camera 電荷輕 广合照相機）或肉眼觀測全黑點或漏光點，以達到檢查薄膜有無缺 陷之目的。CCD照相機係-種光電繼奐式圖像傳感器，其工作原 理係藉由光電轉換把圖像信息直接轉換成電訊號進而實現測量。 惟，由於漏光點與全黑點極其微小，且明暗變化趨勢也不易觀測， 易在檢查過財出現疏漏，導致存在缺陷之薄職繼續採用，進 而導致顯示組件失效而影響產品良率。 【發明内容】 有鑑於此，提供-種更有效地對薄膜進行缺陷檢查之方法· 為必要。 、Ί 266863 IX. Description of the Invention: [Technical Field] The present invention relates to a method for defect inspection of a film, and more particularly to a film defect inspection method for a display using a film as a substrate. _ [Prior Art] With the demand for lighterness in the display market, thin films are increasingly used in electronic devices, especially for organic film applications. Applications for thin films have evolved from the original electronic components such as organic film capacitors to today's display fields such as organic light-emitting diodes (OLEDs). For example, a single layer or a multilayer film is prepared by vacuum evaporation, spin coating or ink jet printing. The vacuum distillation technique is carried out by vacuuming equipment in a vacuum apparatus. In the spin coating method, a few drops of liquid are dropped on a substrate which is rotated at a high speed, and the liquid is distributed in a film form due to the centrifugal force formed by the rotation, thereby achieving the purpose of film formation. Mouth #墨列印工艺 The film is formed by sequentially ejecting the polymer materials of the respective colors onto the corresponding positions of the substrate by an ink jet printing device equipped with different color polymer luminescent materials. 1 However, in the process of film formation, the above various techniques are adopted, and some tiny impurity particles are inevitably attached to the inner wall of the steaming equipment, the substrate or the squirting cavity, and the impurity particles are perforated in the small-shaped region on the film, and the shadow (4) _ flatness, which in turn leads to = functional failure affecting product yield. Therefore, the defect inspection of the film must not be used in the film manufacturing process. The film is usually inspected by a strong light lamp (10). The glare inspection method irradiates the surface of the film with strong light, so that light leakage occurs at the perforated defect, and all black spots are generated due to opacity at the protrusion defect, and the light leakage point or all black spots and perforations Or the size of the particle protrusions corresponding to each other. The CCD camera (Charge Coupled Device Camera) or the black point or light leakage point is observed by the naked eye to check whether the film has defects. CCD camera system is a kind of photoelectric relay type image sensor. Its working principle is to convert image information into electrical signal by photoelectric conversion to realize measurement. However, since the light leakage point and the total black point are extremely small, and the trend of light and dark is not easy to observe, it is easy to check for omissions in the past, which leads to the continued use of defects, which in turn causes the display component to fail and affect the product yield. SUMMARY OF THE INVENTION In view of the above, it is necessary to provide a method for more effectively performing defect inspection on a film. ,
“一種賴之缺查方法，其包括：在待_膜表面形启 監穆爾薄膜；彻—光源照射該歸爾賊，觸發薄膜干涉； 察發干涉現象之藍_薄膜；依據薄膜干涉原理分_ ^之賴干频樣，在鱗狀彩色條辑應之待_膜處存在 陷’ ^無干涉條紋出現之對應待測薄膜處不存在缺陷。 之缺陷檢查方法補由沉積—藍_薄膜於待測 、处_發_干涉财進餓察。雜 陷處形成明鞀的工、本作“ 左從存膜有 战月摘干涉條紋，近似達到放大缺陷 於觀測該薄膜缺p、# i F用攸而更 寻膜缺陷，進—步翻更有效檢查之目的。 ⑧ 7 1266863 【實施方式】 請參閱第一圖，係本發明薄膜之 式之工序流程圖。首先，在該待-方法;'較佳實施方 序咖然後，利用-光源照射該藍移^一監穆爾薄膜（工 涉（工疼im v4爾厚膜表面，觸發薄膜干 搬）；依據薄膜干涉原理分析所產生之薄牛顿（工序 狀干涉條紋出現，則對應之待 在=圖樣’若有曲線 缺陷（工床刚處存在缺陷’若無則不存在 (工序綱）完畢後，處理該藍穆爾薄膜及該待測薄膜 上各轉，即可實現__之缺陷檢杳。 現以0LED半成品作為待測物，詳述其缺陷檢查方法： ⑴提供-QLED半成品作為待測物； =第二圖，係該0LED半成品之結構示意圖。該咖 声2Γ及-1括严:導電玻璃基板2〇、一透明陽極層21、一有機發光 曰 ^陰極層23。該透明陽極層21緊貼於該導電 板％，其通常為IT〇(IndiumTin〇xide，氧化姻錫）電極= 屬陰極層23係金屬薄膜，其具有較好的透紐，該有機發光層 22央於該翻陽極層21及該金級極層23之間，其係由旋轉^ 佈法或噴顯印絲叙有機細。當該透明 1¼'極層21、該有機 發光層22及該金屬陰極層23存在缺陷時，均會導致產品不良。 (2)在该OLED半成品2之表面沉積一藍穆爾薄膜（工序_ )，· 。月，閱第—圓，係該藍膜爾單分子層形成原理示意圖。該該 穆爾单分子層之形朗嗎了魏和性溶触有在有機溶劑 1266863 =液體界卿嫩狀雜。料，财細為一鄉 性洛劑，通常為正乙烷或三氣 " t 。茨無機液體通常選用純水， 该又親和性溶射溶於該無機液體，通常選科面活性劑。 以界面活_為例具體制錄_分子層之形成過程：在— 混合有界祕_ (圖衫）之域_ *喊人— 機溶劑（圖未示），則該界面活性劑分 埒 ^ , N刀于％將散佈於無機液體4 與該有機溶劑之界_，當該有機溶轉雜，該界面活性劑分 子30之親水基301位於液面5以下，其斥水基观位於液面$以 上。糟由二機械臂6沿水平方向相對推動該界面活性劑分子％， 減小各界面活性界分子30之間的間距，當各界面活性劑分子3〇 緊讀列時，即會在該無機㈣4表面形成—單分子層藍穆 膜3 〇 ”通常可藉㈣直提幵減法或辆㈣法將職_薄膜3 積於該OLED半成品2表面上。請參閱第四圖，係堅直提昇拉 膜法之不意®。觸OLED半成品m直方向浸人前述無機液 體4 ’再提昇該OLED半成品2，即可將該界面活性劑分子3〇從 “、、機液體4轉糊該qlED半成品2表面，即將該藍穆爾薄膜 、，積於為OLED半成品2上。多次重複以上步驟，即可在該"A method for the lack of investigation, which includes: in the surface of the film to be inspected by Moir film; the light source illuminates the thief, triggers the film interference; the blue film of the interference phenomenon is observed; according to the principle of thin film interference _ ^ depends on the dry frequency sample, in the scaly color strips should be treated _ there is a trap at the film ' ^ no interference fringes appear corresponding to the film to be tested there is no defect. The defect inspection method is supplemented by deposition - blue _ film To be tested, _ _ _ interference into the hungry inspection. The formation of alum in the miscellaneous, this work "Left from the film has a war of the month to extract interference fringes, approximately to achieve amplification defects in the observation of the film lack of p, # i F Use cockroaches to find film defects, and to improve the purpose of inspection. 8 7 1266863 [Embodiment] Please refer to the first drawing, which is a flow chart of the process of the film of the present invention. First, in the method of the standby method, the preferred embodiment of the coffee is then irradiated with the light source to illuminate the blue shifting film (the work surface (the surface of the thick film is triggered, the trigger film is dry); The thin Newton produced by the principle analysis of thin film interference (process-like interference fringes appear, then the corresponding pattern is to be = if there is a curve defect (there is a defect at the working bed), if it does not exist, the process is finished, the process is processed. The blue Moore film and the film to be tested can be rotated to realize the defect inspection of __. Now the 0LED semi-finished product is used as the object to be tested, and the defect inspection method is detailed: (1) The -QLED semi-finished product is provided as the object to be tested; The second figure is a schematic diagram of the structure of the 0LED semi-finished product. The coffee sound is 2Γ and -1: a conductive glass substrate 2〇, a transparent anode layer 21, and an organic light-emitting cathode layer 23. The transparent anode layer 21 is closely attached. % of the conductive plate, which is usually an IT 〇 (Indium Tin 〇 x ide) electrode = a cathode layer 23 metal film, which has a better permeable layer, and the organic luminescent layer 22 lands on the anodic layer 21 And between the gold level layer 23, which is rotated by Or the ink is printed on the organic thinner. When the transparent 11⁄4' pole layer 21, the organic light-emitting layer 22 and the metal cathode layer 23 are defective, the product may be defective. (2) Deposition on the surface of the OLED semi-finished product 2 A blue Moore film (process _ ), · month, read the first - circle, is the schematic diagram of the formation of the monolayer of the blue film. The shape of the Moore monolayer is wei? Solvent 1668863 = liquid boundary is tender and mixed. The material is a home-based agent, usually n-ethane or tri-gas. The inorganic liquid is usually pure water, and the affinity is dissolved in the inorganic Liquid, usually selected as a surfactant. Take the interface activity as an example. _Molecular layer formation process: in the domain of mixed-boundary secret _ (shirt) _ * shouting people - machine solvent (not shown), Then, the surfactant is separated, and the N-knife is dispersed in the boundary between the inorganic liquid 4 and the organic solvent. When the organic solvent is mixed, the hydrophilic group 301 of the surfactant molecule 30 is located below the liquid surface 5, Its water-repellent base is above the liquid level. The bad is pushed by the two robot arms 6 in the horizontal direction. % of surfactant molecules, reducing the spacing between the interface molecules 30 of each interface, when each surfactant molecule 3 is tightly read, it will form a monolayer blue film 3 〇 on the surface of the inorganic (4) 4" Usually, the film can be deposited on the surface of the OLED semi-finished product 2 by means of (4) direct 幵 subtraction method or vehicle (4) method. Please refer to the fourth figure, which is the method of straightening the lifting film method. After the inorganic liquid 4' is further raised by the OLED semi-finished product 2, the surfactant molecule 3〇 can be transferred from the liquid electrolyte 4 to the surface of the qlED semi-finished product 2, that is, the blue Moore thin film is accumulated as an OLED. Semi-finished product 2 on. Repeat the above steps multiple times, you can
OLED 半成品2表面職—多分子層_之歸爾薄膜。 >閱第五® ’係喷射減法之示意圖。將佈滿界面活性劑之 有機〜丨（圖未不）進行霧化處理H人—噴射裝置7。藉由該 1266863 喷射裝置7將該有機溶劑輕輕噴射於該〇led半成品a表面，待 該有機溶_發後’即可在該QLED半成品2之表面上形成一該 穆爾薄膜3 〇 孤 •⑶利用—光源照射該藍穆S薄膜3，觸發薄膜干涉（工序1〇1)。 、明—#參财六®及第七圖係檢查該〇腦半成品2薄膜缺 陷之光路分析圖。當―束白光a照射於無祕之_部份時，、由 於白光係複色光’其由各單色光疊加形威，故僅有頻率相同之 單色光才驗歸爾_ 3上下表面反卿成二相縣行之相干 光線。以相干光線b與c為例，該光線b與絲c相互平行射出。 由於該_細3厚度烟，且該QLED半成品2之薄膜不存 在缺Ui丨其他鮮之單色光赶之相干絲亦平行於光線b與 這二出射光線無法相豐力口而形成干涉條紋。因此，當該白光 a π射於無缺陷之薄膜部份時，無法產生干涉條紋。 >、介惟’當平行於白光3之白光3照射於藍穆爾薄膜3之穿孔221 f大起222處時，該白光d之入射角發生改變，其中一單色光經 口、=爾薄膜3之上下二表面反射形成二相干光e與f。惟在穿孔η $大起222處存在_具有一定厚度之藍穆爾薄膜I由於該藍穆爾 薄膜3之影響，人射錢之光路發生改變使相干光e與f成一定角 射則一相干光e與f將相交成像，從而在藍穆爾薄膜3 表面化成-明條紋或—暗條紋。惟有人射傾角姻之同頻率單色 光’其因光程差_，則會形朗—明條紋或暗條紋。同理，該 1266863 白光將會在穿孔221或突起222對應之藍穆爾薄膜3表面上，形 成複數曲線狀彩色條紋。 通常情況下，該光源係一強光燈，以便達到更高的檢查精度。 / (4)觀察該藍穆爾薄膜3 (工序102); 、 由於溥膜干涉作用所顯現之干涉條紋將該穿孔221及突起 222之衫像進行了放大，進而當藉由照相機或肉眼直接觀察 時，其影像更易辨別。 (5)分析所產生之薄膜干涉圖樣，得出檢查結果（工序1〇3); 分析該干涉圖樣，可見在出現該曲線狀彩色條紋處，其所對 應之QLED半成品2薄蹄在缺陷；反之，絲紋統處，其所 對應之OLED半成品2薄膜不存在缺陷。 八 ⑹仏查完畢後’處理該藍穆爾薄膜3及該〇led半成品2 (工序 104) 〇 鲁 檢查7°畢後若該OLED半成品2之薄膜不存在缺陷，則應 去除該藍穆爾薄膜3，以便進行封合等後續工序。由於該藍穆姻 膜3易溶於有機溶劑，故採用乙醇或異丙醇溶劑去除該藍穆爾薄 獏3即可。若該0LED半成品2之薄膜存在缺陷，則該〇咖半 成品2係不良品，應報廢。 *該OLED半成品2薄膜之缺陷檢查方法係藉由沉積—藍 薄膜3觸發薄膜干涉現象來實現檢查的。藉由薄膜干涉作用嗜 薄膜有缺陷處形成賴的干涉條紋，近似達到放大缺陷之作用。 11 1266863 該檢查方法贱前技術之_檢查方法更她測，能麟更有效 之檢查效果。 以上步驟’即可實現對〇LED半成品2之薄膜進行缺陷 .檢查。該檢查方法不僅適用於該〇LED半成品2之薄膜，亦可適 m ^ OTFT ( Organic Thin Film Transistor 膜。 綜上所述’本發明確已符合發明專利{要件，爰依法提出專 利申《月*淮，以上所述者僅為本發明之較佳實施方式，本發明之 範圍並不以上述實财式為限，舉凡„杨技藝之人士援依本 發明之精神所作之等效修飾紐化，皆應涵蓋於町申請專利範 圍内。 【圖示簡單說明】 第-圖係本發明_之缺陷檢查方法—較佳實施方式之工序流程 圖。 第二圖係第i所示方法所檢查之〇咖半成品之結構示意圖。 第二圖係藍穆爾薄膜分子層形成原理圖。 第四圖係堅直提昇拉膜法沉積藍穆爾薄膜之示意圖。 第五圖係噴射拉膜法沉積藍穆爾薄膜之示意圖。 第六圖係第二騎示存在_穿孔之⑽D半紅之光路分析 圖。 第七圖鱗二騎絲在薄駭起之QLED半成品之光路分析 12 1266863OLED semi-finished products 2 surface - multi-molecular layer _ _ _ _ film. > See the fifth ® ' schematic diagram of jet subtraction. The H-spraying device 7 is atomized by the organic 丨 (not shown) filled with the surfactant. The organic solvent is gently sprayed onto the surface of the 半led semi-finished product a by the 1668863 spraying device 7, and after the organic solvent is dissolved, a Moir film can be formed on the surface of the QLED semi-finished product 2 (3) The blue film S film 3 is irradiated with a light source to trigger film interference (step 1〇1). , Ming-#Shen Cai Liu® and the seventh figure are the optical path analysis diagrams for the film defects of the semi-finished products of camphor. When the white light a is irradiated to the untitled part, because the white light is colored light, which is superimposed by the monochromatic light, only the monochromatic light of the same frequency is inspected. The coherent light of Qingcheng Erxiang County. Taking coherent light rays b and c as an example, the light rays b and the wires c are emitted in parallel with each other. Because of the thin 3 thickness of the smoke, and the film of the QLED semi-finished product 2 does not exist, there is no Ui 丨 other fresh monochromatic light, and the coherent filament is parallel to the light b and the two outgoing rays cannot form a interference fringe. Therefore, when the white light a π is incident on the defect-free film portion, interference fringes cannot be generated. >, when only when the white light 3 parallel to the white light 3 is irradiated to the perforation 221 f of the blue mur film 3, the incident angle of the white light d changes, and a monochromatic light passes through the mouth, The lower surface of the film 3 is reflected to form two-coherent light e and f. However, in the case where the perforation η $ is large and 222 is present, the blue Moore film I having a certain thickness is affected by the blue moore film 3, and the light path of the human shot is changed so that the coherent light e and f form a certain angle are coherent. The lights e and f will be imaged to form a surface of the blue mur film 3 into a bright stripe or a dark stripe. However, some people who shoot the same frequency monochromatic light of the dip" will be shaped by the optical path difference _, which will be shaped like a bright stripe or a dark stripe. Similarly, the 1266863 white light will form a plurality of curved colored stripes on the surface of the blue mur film 3 corresponding to the perforation 221 or the protrusion 222. Usually, the light source is a strong light to achieve higher inspection accuracy. / (4) observing the blue mur film 3 (process 102); the interference fringes appearing due to the interference of the aponeurosis magnify the pattern of the perforations 221 and the protrusions 222, and then directly observe by the camera or the naked eye When the image is easier to distinguish. (5) analyzing the film interference pattern produced, and obtaining the inspection result (process 1〇3); analyzing the interference pattern, it can be seen that the QLED semi-finished product 2 thin hoof is in the defect at the occurrence of the curved color stripe; There is no defect in the OLED semi-finished product 2 film corresponding to the silk pattern. After the completion of the inspection (8), the blue mur film 3 and the 半led semi-finished product 2 are processed (process 104). If the film of the OLED semi-finished product 2 has no defects after the ° 检查 inspection, the blue mul film should be removed. 3, in order to carry out subsequent operations such as sealing. Since the blue mulberry film 3 is easily soluble in an organic solvent, the blue mulberry thin 貘 3 can be removed by using an ethanol or isopropyl alcohol solvent. If there is a defect in the film of the 0LED semi-finished product 2, the defective product of the sinter coffee product 2 should be scrapped. * The defect inspection method of the OLED semi-finished product 2 film is inspected by the deposition-blue film 3 triggering the film interference phenomenon. The interference fringes formed by the thin film interference at the defect of the film are approximately the effect of amplifying the defect. 11 1266863 The inspection method is based on the pre-technical method. The inspection method is more effective. The above steps can be used to perform defects on the film of the LED semi-finished product 2. The inspection method is not only applicable to the film of the 〇LED semi-finished product 2, but also suitable for m ^ OTFT (Organic Thin Film Transistor film. In summary, the invention has indeed met the invention patent {required, 提出 patent application "month* The above is only the preferred embodiment of the present invention, and the scope of the present invention is not limited to the above-mentioned real financial formula, and the equivalent modification of the spirit of the present invention is applied by All should be included in the scope of the application for the application of the town. [Simplified illustration of the drawing] The first drawing is a process flow chart of the defect inspection method of the present invention - the second embodiment is the inspection method of the method shown in the first embodiment. Schematic diagram of the semi-finished product of the coffee. The second figure is the schematic diagram of the formation of the molecular layer of the blue Moore film. The fourth picture is a schematic diagram of the deposition of the blue Moore film by the straight lifting film. The fifth picture is the deposition of the blue-mol Schematic diagram of the film. The sixth figure is the second riding show _ perforated (10) D semi-red light path analysis diagram. The seventh figure is the second light ray in the thin QID semi-finished product light path analysis 12 1266863
【主要元件符號說明】 OLED半成品 2 藍穆爾薄膜 3 導電玻璃基板 20 透明陽極層 21 有機發光層 22 金屬陰極層 23 穿孔 221 突起 222 界面活性劑分子 30 親木基 301 斥水基 302 無機液體 4 液面 5 機械臂 6 喷射裝置 7[Main component symbol description] OLED semi-finished product 2 Blue Moore film 3 Conductive glass substrate 20 Transparent anode layer 21 Organic light-emitting layer 22 Metal cathode layer 23 Perforation 221 Protrusion 222 Surfactant molecule 30 Pro-wood base 301 Water-repellent base 302 Inorganic liquid 4 Level 5 Manipulator 6 Spraying device 7
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