TWI266735B - The firm device of the wafer cassette - Google Patents

The firm device of the wafer cassette

Info

Publication number
TWI266735B
TWI266735B TW94134375A TW94134375A TWI266735B TW I266735 B TWI266735 B TW I266735B TW 94134375 A TW94134375 A TW 94134375A TW 94134375 A TW94134375 A TW 94134375A TW I266735 B TWI266735 B TW I266735B
Authority
TW
Taiwan
Prior art keywords
wafer
wafer cassette
firm device
cassette
firm
Prior art date
Application number
TW94134375A
Other languages
Chinese (zh)
Other versions
TW200711956A (en
Inventor
Johnny Dai
Original Assignee
King Yuan Electronics Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by King Yuan Electronics Co Ltd filed Critical King Yuan Electronics Co Ltd
Priority to TW94134375A priority Critical patent/TWI266735B/en
Application granted granted Critical
Publication of TWI266735B publication Critical patent/TWI266735B/en
Publication of TW200711956A publication Critical patent/TW200711956A/en

Links

Landscapes

  • Packaging Of Annular Or Rod-Shaped Articles, Wearing Apparel, Cassettes, Or The Like (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
  • Packaging For Recording Disks (AREA)

Abstract

A firm device of the wafer cassette is disclosed herein. The firm device is used to carry the wafer cassette. During the transportation of the wafer, the wheel of the firm device will support the wafer of the wafer cassette and keep it in the center position. The shaking during the transportation will not let the wafer seriously hit the supporting piece and cause the wafer broken.
TW94134375A 2005-09-30 2005-09-30 The firm device of the wafer cassette TWI266735B (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
TW94134375A TWI266735B (en) 2005-09-30 2005-09-30 The firm device of the wafer cassette

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
TW94134375A TWI266735B (en) 2005-09-30 2005-09-30 The firm device of the wafer cassette

Publications (2)

Publication Number Publication Date
TWI266735B true TWI266735B (en) 2006-11-21
TW200711956A TW200711956A (en) 2007-04-01

Family

ID=38191658

Family Applications (1)

Application Number Title Priority Date Filing Date
TW94134375A TWI266735B (en) 2005-09-30 2005-09-30 The firm device of the wafer cassette

Country Status (1)

Country Link
TW (1) TWI266735B (en)

Also Published As

Publication number Publication date
TW200711956A (en) 2007-04-01

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