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Application filed by Ind Tech Res InstfiledCriticalInd Tech Res Inst
Priority to TW93139909ApriorityCriticalpatent/TWI263850B/en
Publication of TW200622448ApublicationCriticalpatent/TW200622448A/en
Application grantedgrantedCritical
Publication of TWI263850BpublicationCriticalpatent/TWI263850B/en
The present provides a method for stabilizing a liquid crystal alignment layer, wherein the liquid crystal alignment layer is used in a liquid crystal display. The method of the present invention includes step of providing a substrate, forming a film on the substrate, and exposing the film to a plasma having an inert gas and a hydrogen-containing gas to align and passivate the film so as to form a passivated liquid crystal alignment layer.
TW93139909A2004-12-212004-12-21Method for stabilizing liquid crystal alignment layer
TWI263850B
(en)
Method for fabricating thin film pattern, device and fabricating method therefor, method for fabricating liquid crystal display, liquid crystal display, method for fabricating active matrix substrate, electro-optical apparatus, and electrical apparatus