TWI263032B - Speckle sizing and sensor dimensions in optical positioning device - Google Patents

Speckle sizing and sensor dimensions in optical positioning device

Info

Publication number
TWI263032B
TWI263032B TW094116525A TW94116525A TWI263032B TW I263032 B TWI263032 B TW I263032B TW 094116525 A TW094116525 A TW 094116525A TW 94116525 A TW94116525 A TW 94116525A TW I263032 B TWI263032 B TW I263032B
Authority
TW
Taiwan
Prior art keywords
array
speckle
sizing
positioning device
optical positioning
Prior art date
Application number
TW094116525A
Other languages
Chinese (zh)
Other versions
TW200607985A (en
Inventor
Clinton B Carlisle
Jahja I Trisnadi
Charles B Roxlo
David A Lehoty
Original Assignee
Silicon Light Machines Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from US11/128,988 external-priority patent/US7042575B2/en
Application filed by Silicon Light Machines Corp filed Critical Silicon Light Machines Corp
Publication of TW200607985A publication Critical patent/TW200607985A/en
Application granted granted Critical
Publication of TWI263032B publication Critical patent/TWI263032B/en

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
    • G01D5/00—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
    • G01D5/26—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light
    • G01D5/32—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light
    • G01D5/34—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light the beams of light being detected by photocells
    • G01D5/347—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light the beams of light being detected by photocells using displacement encoding scales
    • G01D5/34707—Scales; Discs, e.g. fixation, fabrication, compensation
    • G01D5/34715—Scale reading or illumination devices
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/002—Measuring arrangements characterised by the use of optical techniques for measuring two or more coordinates
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
    • G01P3/00—Measuring linear or angular speed; Measuring differences of linear or angular speeds
    • G01P3/36—Devices characterised by the use of optical means, e.g. using infrared, visible, or ultraviolet light
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
    • G01P3/00—Measuring linear or angular speed; Measuring differences of linear or angular speeds
    • G01P3/64—Devices characterised by the determination of the time taken to traverse a fixed distance
    • G01P3/80—Devices characterised by the determination of the time taken to traverse a fixed distance using auto-correlation or cross-correlation detection means
    • G01P3/806—Devices characterised by the determination of the time taken to traverse a fixed distance using auto-correlation or cross-correlation detection means in devices of the type to be classified in G01P3/68
    • G—PHYSICS
    • G06—COMPUTING; CALCULATING OR COUNTING
    • G06F—ELECTRIC DIGITAL DATA PROCESSING
    • G06F3/00—Input arrangements for transferring data to be processed into a form capable of being handled by the computer; Output arrangements for transferring data from processing unit to output unit, e.g. interface arrangements
    • G06F3/01—Input arrangements or combined input and output arrangements for interaction between user and computer
    • G06F3/03—Arrangements for converting the position or the displacement of a member into a coded form
    • G06F3/0304—Detection arrangements using opto-electronic means
    • G06F3/0317—Detection arrangements using opto-electronic means in co-operation with a patterned surface, e.g. absolute position or relative movement detection for an optical mouse or pen positioned with respect to a coded surface

Landscapes

  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • General Physics & Mathematics (AREA)
  • General Engineering & Computer Science (AREA)
  • Theoretical Computer Science (AREA)
  • Electromagnetism (AREA)
  • Power Engineering (AREA)
  • Human Computer Interaction (AREA)
  • Length Measuring Devices By Optical Means (AREA)
  • Position Input By Displaying (AREA)

Abstract

One embodiment relates to an optical displacement sensor for sensing transverse displacement of a data input device relative to a surface by determining displacement of optical features in a succession of frames. The sensor includes at least a coherent light source, illumination optics to illuminate a portion of the surface, imaging optics, and a first array of photosensitive elements having a periodic distance. The illuminator and the detector are configured to produce on the first array of photosensitive elements an intensity pattern of light reflected from the illuminated portion of the surface. The intensity pattern comprises a plurality of speckles having an average speckle diameter which is between one half and two times the periodic distance of the array.
TW094116525A 2004-05-21 2005-05-20 Speckle sizing and sensor dimensions in optical positioning device TWI263032B (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US57306204P 2004-05-21 2004-05-21
US11/128,988 US7042575B2 (en) 2004-05-21 2005-05-13 Speckle sizing and sensor dimensions in optical positioning device

Publications (2)

Publication Number Publication Date
TW200607985A TW200607985A (en) 2006-03-01
TWI263032B true TWI263032B (en) 2006-10-01

Family

ID=35428985

Family Applications (1)

Application Number Title Priority Date Filing Date
TW094116525A TWI263032B (en) 2004-05-21 2005-05-20 Speckle sizing and sensor dimensions in optical positioning device

Country Status (5)

Country Link
EP (1) EP1756512A2 (en)
JP (1) JP2008500557A (en)
KR (1) KR100877005B1 (en)
TW (1) TWI263032B (en)
WO (1) WO2005114097A2 (en)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP5534162B2 (en) * 2009-12-08 2014-06-25 株式会社リコー Detection apparatus and image forming apparatus

Family Cites Families (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5422848A (en) * 1977-07-22 1979-02-21 Nippon Chemical Ind Space frequency component extraction device for optical images
JPS59137505U (en) * 1983-03-04 1984-09-13 横河電機株式会社 pattern detection device
DE3930632A1 (en) * 1989-09-13 1991-03-14 Steinbichler Hans METHOD FOR DIRECT PHASE MEASUREMENT OF RADIATION, IN PARTICULAR LIGHT RADIATION, AND DEVICE FOR CARRYING OUT THIS METHOD
US5907152A (en) * 1992-10-05 1999-05-25 Logitech, Inc. Pointing device utilizing a photodetector array
JP3368961B2 (en) * 1993-12-27 2003-01-20 株式会社小野測器 Displacement gauge
US6642506B1 (en) * 2000-06-01 2003-11-04 Mitutoyo Corporation Speckle-image-based optical position transducer having improved mounting and directional sensitivities

Also Published As

Publication number Publication date
WO2005114097A3 (en) 2006-04-06
KR100877005B1 (en) 2009-01-09
JP2008500557A (en) 2008-01-10
WO2005114097A2 (en) 2005-12-01
EP1756512A2 (en) 2007-02-28
TW200607985A (en) 2006-03-01
KR20070020084A (en) 2007-02-16

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Legal Events

Date Code Title Description
MM4A Annulment or lapse of patent due to non-payment of fees