1260400 九、發明說明： 【發明所屬之技術領域】 本發明涉及一種掃描熱顯微鏡探針。 【先前技#ί】 近年來，隨著奈米科學技術之飛速發展，一系列可針對奈米材料之測量技術 f運而生，其中最引人注目之技術係原子力顯微鏡技術，其具有極高之解析度。 —熱顯微鏡技術係於原子力顯微鏡技術基礎上發展起來，其通過於原子力顯微 2針上製作微鋪電偶’ _溫差電動勢來測量奈米材料之溫度與表面結構。 ，同日溯原子力顯微鏡卓越之空間分辨能力來實現對溫度空間分佈讀確測量。 掃描熱顯微獻量測材料之表面結構時，首先將探針穩定於樣品表面，並向 流絲加熱，當探舰失耻齡之熱封於電雜供之能量時，尖端 ，這_峨^度_。當探針接猶品時，敎量向 卿=端熱糖繩也隨之下降。通職饋轉調節探針 襄:間隙’從而控制恒溫掃描，可獲得材料之表面起伏情况。 掃描熱顯微餘量測材料表面之溫度分 表面，利用材料表面不同位置溫度之不同，相庫所觸材料 而可測量奈料才料溫度空間分佈狀况。 --動勢也不同，從 其中所、所述第—金屬層與第二金屬層之間之-絕缘；， 、中所知-金屬層、絕緣層及第二金騎在某 心象層’ 所述第—金屬層與第二金屬層在探針尖：：°大起’形成-探針， 所述探針之空間 s &連’從而構成微型熱電偶。然而， 鑒域’提供一種具有高空間解析度之 又、 【内容】 ‘熱命政知探針實爲必要。 6 1260400 以下^以實施例說明—種具有高空間解析度之掃描熱顯微鏡探針。 -種掃描熱顯纖探針’其包括:—懸臂;一第一導電層，形成於所述懸臂 表面；-絕緣層，覆於所述第—導電層表面，其具有—通孔；—第二導電声，覆 於所述絕緣層表面，所述第—導電層與第二導電層在所述通孔處相連形成, 偶區；以及-奈純管，其戰於所職電偶區，—端與飾 層相連，另一端為自由端。 乐一导电 子；先她fY所物彳4顯繼探針，將奈米碳管置於掃雜顯微鏡探 針尖端，瓣繼之微小尺寸與軸向高熱傳導性能，可以顯著提高掃描鱗1260400 IX. Description of the Invention: [Technical Field of the Invention] The present invention relates to a scanning thermal microscope probe. [Previous technology #ί] In recent years, with the rapid development of nanotechnology, a series of measurement techniques for nanomaterials have emerged. The most eye-catching technology is atomic force microscopy, which is extremely high. Resolution. The thermal microscopy technique was developed on the basis of atomic force microscopy techniques, which were used to measure the temperature and surface structure of nanomaterials by making a micropile ’ _ thermoelectromotive force on an atomic force microscopy. On the same day, the atomic force microscope's superior spatial resolution capability is used to achieve accurate measurement of temperature spatial distribution. When scanning the surface structure of the thermal microscopy material, firstly stabilize the probe on the surface of the sample and heat it to the filament. When the heat of the ship is lost in the heat of the electric miscellaneous energy, the tip is 尖端^度_. When the probe is connected to the yoke, the amount of sputum is also reduced. The on-the-job feed adjustment probe 襄: gap ′ thus controls the constant temperature scan to obtain the surface undulation of the material. Scanning the thermal microscopy to measure the temperature of the surface of the material, and using the different temperature of the material surface to measure the spatial distribution of the temperature of the material. - the momentum is also different, from the middle, between the first metal layer and the second metal layer - insulation;, known, the metal layer, the insulating layer and the second gold ride in a heart layer The first metal layer and the second metal layer form a probe at the probe tip::°, and the space s & of the probe constitutes a micro thermocouple. However, Jianyu' provides a kind of high spatial resolution, and [content] ‘hot-life awareness probe is really necessary. 6 1260400 The following is a description of a scanning thermal microscope probe with high spatial resolution. a scanning thermal fiber-optic probe comprising: a cantilever; a first conductive layer formed on the surface of the cantilever; and an insulating layer covering the surface of the first conductive layer, having a through hole; a conductive sound covering the surface of the insulating layer, wherein the first conductive layer and the second conductive layer are connected at the through hole to form an even region; and the neat tube is in the galvanic region. The end is connected to the finish and the other end is the free end. Le-conductor; first her fY object 4 display relay, the carbon nanotubes are placed at the tip of the scanning microscope probe, the valve followed by the small size and axial high thermal conductivity, can significantly improve the scanning scale
度，且祕她_提供之彳___ 用不米候s做滅’耻對熱電偶區域無鎌確測，從而可减小蝴難产，從 而降低成本。另外’由於奈米碳管具有良好纖生能，使得概方案二供 之掃描熱顯微鏡探針耐磨不易損壞。 ^ 【實施方式】 " 下面結合_對本發明作進-步詳細說明。‘ 石請2第一圖，爲本發明實施例提供之掃描熱顯微鏡探針10，其包括：一懸 j16 ’第‘電層11，形成於所述懸臂16表面；一絕緣層12，覆於所述第一導 、曾兩表/、具有通孔，一第二導電層u，覆於所述絕緣層12表面，所述第 ,¾層11與第一導電層在所述通孔處相連形成一熱電偶區μ;以及一奈米碳 s山、4成於所述熱電偶區14，一端與熱電偶區14處之第二導電層^相連，另 而為自由。優選地，奈米碳管15基本垂直於熱電偶區1怕外延伸。 …所述熱二偶區^爲第一導電層n與第二導電層U在絕緣層^之通孔處相連 ^成述第—導電層11與第二導電層13在絕緣層12之通孔處相連之方式包括： $導電層11局部由通孔中突出所述絕緣層12外，與第二導電層13相連；第二導 『通過通孔向第—導電層U突起，與第電層11相連。本實施例中第 ‘電曰1局邛由通孔中突出所述絕緣層12外，與第二導電層13相連。 所述第—導電層U使用之材料可選㈣、銅、喊鎂中之-種或幾種之混 7 1260400 . 二導電層13使用之材料可選自金、鎳或鉻中之_種或幾種之混合。所 ' 可爲單壁奈米碳管或多壁奈米碳管，優選地，所述奈米碳管】5爲單 壁不米綠，由於轉絲碳管之直_、，鼠使辟㈣ 顯微鏡探針K)獲得更高之空間解析度，達卿奈米以下。 … 岛所述奈米碳管15之形成方法可舰接生長法與組裝法，直接生長法包括化 子乳相沈触鱗減電鱗直接在鱗趣4上生糾奈米赖5。组裝法包 2於電場侧下把絲碳f 15吸_鍵偶_，錢使聰合鋪來將奈米碟 官15連接到熱電偶區丨4。 • 本貝_中採用化學氣相沈積法直接於熱電偶區生長奈求碳管，其步驟包 括： ' 步驟一：提供—掃描熱顯微鏡探針，其包括：-第-導電層；-絕緣層，覆 於二述第-導電層表面；_第二導電層，覆於所述絕表面，所述第一導電層 與第-導電層局部相連形成一熱電偶區。所述第一導電層使用之材料可選自嫣、 銅石夕或鎮巾之-種或幾種之混合。所述第二導電層使用讀料可選自金、錄或 鉻中之一種或幾種之混合。 … 、、步驟二：於所述_偶區形絲米碳管。本實施例中，首先沈讎化劑於所 φ 述…、毛偶區。催化劑層之厚度爲5〜30奈米，催化劑層沈積之方法可選用真空熱蒸 娜無法’也可選用電子束蒸發法。催化劑之材料可選用鐵、#、錄或其合金， 本貫施例巾雜餘化繼料，其沈狀厚度制奈米。織，通人碳源氣， 於…、私偶區生長奈米石反官。具體地，將帶有催化劑層之熱電偶區置於空氣中，於 300 C下退火，以使催化劑層氧化、收縮成爲奈米級之催化劑顆粒。待退火完畢， 再將分佈有催化·粒之_麵置於反應賴未細，通人碳職乙块，利 用化學亂相沈積法，於上述催化劑顆粒上生長奈米碳管，碳源氣也可選用其他含 碳之氣體，如乙稀等。採用上述方法形成之奈米碳管可爲單壁奈米碳管或多壁奈 米石反官’所述奈米碳管之生長高度可通過反應時間來控制，反應時間越長，奈米 碳官長度越長，反應時間越短，則奈米碳管越短。 8 1260400 ^十於先月)技術所述掃福熱顯微鏡探針，將奈米碳 針尖端，瓣瓣之彳⑹、___ =_微鏡探 微鏡之空嶋度達鮮㈣，且由於梢 =提綱熱顯 用车半石卢总做，丨、☆山m 木捉^、之知描熱顯微鏡探針利 y'AB 士熱電偶區域無需精確控制，從而可减小蝕刻難戶，從 而降低成本。且由於奈米碳管具有良好域械性能，使得本技術方宰==: 描熱顯微鏡探針耐磨不易損壞。 >、/、之~ 练上所迷，本發明確已符合發明專利之要件，爱依法提出專利申請。惟，以 上所述者僅林發㈣之紐實財^，本侧之細並砂上述實 舉凡熟習本錄藝之人士援依本發明讀神所作之等效修飾或變化，皆應、、=、’ 以下申請專利範圍内。 〜/M盍於 【圖式簡單說明】 第一圖係本發明之實施例所提供之掃描熱顯微鏡探針示意圖。 【主要元件符號說明】 掃描熱顯彳敬鏡探針 10 第一導電層 11 絕緣層 12 第二導電層 13 熱電偶區 14 奈米碳管 15Degree, and secret _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ In addition, because the carbon nanotubes have good fibrillation energy, the scanning thermal microscope probe for the second scheme is not easily damaged. ^ [Embodiment] " The following is a detailed description of the present invention in conjunction with _. A first embodiment of the present invention is a scanning thermal microscope probe 10 according to an embodiment of the present invention, comprising: a suspension j16 'electrical layer 11 formed on the surface of the cantilever 16; an insulating layer 12 covering The first conductive layer and the second surface/having a through hole, and a second conductive layer u covering the surface of the insulating layer 12, the third layer 11 is connected to the first conductive layer at the through hole A thermocouple region μ is formed; and a nanocarbon s mountain is formed in the thermocouple region 14, and one end is connected to the second conductive layer at the thermocouple region 14, and is free. Preferably, the carbon nanotubes 15 extend substantially perpendicularly to the thermocouple region 1 . The hot dipole region ^ is the first conductive layer n and the second conductive layer U are connected at the through hole of the insulating layer ^ to form the through hole of the first conductive layer 11 and the second conductive layer 13 in the insulating layer 12. The manner of being connected includes: a conductive layer 11 partially protrudes from the through hole and is connected to the second conductive layer 13; and a second guide “projects through the through hole to the first conductive layer U, and the electrical layer 11 connected. In the present embodiment, the first "electrode 1" protrudes from the through hole and is connected to the second conductive layer 13. The material used for the first conductive layer U may be selected from the group consisting of (4), copper, and magnesium, or a mixture of several kinds of 7 1260400. The material used for the second conductive layer 13 may be selected from gold, nickel or chromium. A mixture of several. The 'can be a single-walled carbon nanotube or a multi-walled carbon nanotube. Preferably, the carbon nanotubes 5 are single-walled non-beige green, due to the straightening of the carbon nanotubes, and the mouse (4) The microscope probe K) achieves a higher spatial resolution below Daqing Nano. The formation method of the carbon nanotubes 15 described in the island can be carried out by the ship growth method and the assembly method, and the direct growth method includes the chemical emulsion of the scales, and the scales are reduced directly on the scales. In the assembly method package 2, the wire carbon f 15 is sucked under the electric field side, and the money is used to connect the nano-disc 15 to the thermocouple region 丨4. • The chemical vapor deposition method is used to directly grow the carbon nanotubes in the thermocouple region. The steps include: 'Step 1: Providing - Scanning thermal microscope probes, including: - first conductive layer; - insulating layer Covering the surface of the second conductive layer; a second conductive layer covering the absolute surface, the first conductive layer and the first conductive layer being partially connected to form a thermocouple region. The material used for the first conductive layer may be selected from the group consisting of strontium, copper or scotch or a mixture of several. The second conductive layer using the read material may be selected from a mixture of one or more of gold, nickel or chromium. ..., step 2: in the _ even area shape of the rice carbon tube. In this embodiment, the sinking agent is first described in the φ, ..., matte area. The thickness of the catalyst layer is 5 to 30 nm, and the method of depositing the catalyst layer may be carried out by vacuum heat evaporation. Alternatively, electron beam evaporation may be used. The material of the catalyst can be selected from iron, #, 录 or its alloy, and the waste of the present embodiment is made of waste material, and the thickness of the catalyst is made into nanometer. Weaving, passing through the carbon source gas, growing the nano-stone anti-official in the private area. Specifically, the thermocouple region with the catalyst layer was placed in air and annealed at 300 C to oxidize and shrink the catalyst layer into nanometer-sized catalyst particles. After the annealing is completed, the catalyzed granules are placed in the reaction zone, and the carbonaceous carbon tube is grown on the catalyst particles by chemical chaotic phase deposition method. Other carbon-containing gases such as ethylene can be used. The carbon nanotube formed by the above method can be a single-walled carbon nanotube or a multi-walled nano-carbon stone. The growth height of the carbon nanotube can be controlled by the reaction time, and the longer the reaction time, the nano carbon The longer the length of the official, the shorter the reaction time, the shorter the carbon nanotubes. 8 1260400 ^10 至前月) The technology of the Sweeping Thermomicroscope probe, the tip of the nano carbon needle, the valance of the valve (6), ___ = _ micro-mirror microscopic mirror openness (four), and because of the tip = The outline heat show car is made of semi-stone Lu, 丨, ☆ mountain m wood catching ^, the knowledge of the thermal microscope probe y y'AB thermocouple area does not need precise control, which can reduce the difficulty of etching, thereby reducing costs . And because the carbon nanotubes have good mechanical properties, the technology is slaughtered ==: The heat-sensitive microscope probe is not easily damaged by wear. >, /, ~ ~ 练 fascinated, the invention has indeed met the requirements of the invention patent, love to file a patent application according to law. However, the above mentioned only the Linfa (four) of the new real wealth ^, the side of the fine sand and the above-mentioned actual people who are familiar with the recording of the art according to the invention of the equivalent modification or change made by God, should =, = , 'The scope of the following patent application. 〜/M盍 [Simplified description of the drawings] The first figure is a schematic diagram of a scanning thermal microscope probe provided by an embodiment of the present invention. [Main component symbol description] Scanning heat show mirror probe 10 First conductive layer 11 Insulation layer 12 Second conductive layer 13 Thermocouple area 14 Carbon nanotubes 15