九、發明說明： 【發明所屬之技術領域】 本發明係關於一種誤差補償系統及方法，尤其係關於一種三座桿 剛量機床誤差補償系統及方法。 $ 【先前技術】 二座標測量機(Coordinate Measurement Machine)，係目前使用最麽 泛的大型通用檢測儀器，主要有龍門式、立柱式、機器臂式等幾種二 三座標測量機用於零件和部件的尺寸誤差和形位誤差的測量，對保證 産品之品質起著重要的作用。 … 1 了n示州里械D别罝精度較晋逋置具測量準確，但其必定存在、、則 量誤差。隨著生産的發展，對測量精度的要求也越來越高。因此，= 了使三座標測量機的測量結果最大限度地滿足機械設計、製造、檢驗 的需要，必須分析三座標測量機測量誤差産生之原因。通常，三； 剩量機之測量誤差主要分爲五個方面，即·方法誤差、測量 ^測量人員誤差、被測轉本身誤差及三鋪測量機設備誤差= 中，測量方法誤差侧爲·者所選_檢_則不正確 _ 2完善、不職、不確_緣故。·魏誤差 :易得，:因三座標測量機敝 …、、後對測m料進行分析計算得㈣彳量絲 矣 ίίΐ 件，必須要使轉表面祕度與尺讀度、形狀= =置精度桃配。由於光柵尺讀數系統祕差和 月: 構加工裝配誤差（如導執系統的不完 滅床峨 因此，需要-種系統可以在二座^曰拖/ 1政果不明顯。 誤差及形位誤差時對誤差進行良 測量時間。 貝杈回測里之準確度及縮短 【發明内容】 本發明較佳實施例提供一種二 種—座&測置機床誤差補償系統，該系 1258566 ^入/輪出模組，用於資料獲取和輸出誤差補償結果；一計算 =抖、目丨ΐ妓猶計算和返回前座標_計算；—資料安全模組， 二=朴計算過程㈣讀進行加密和解密，以顧文標的安全 L^—Γ钭存儲模組，用於測量計算過程中所產生的各種結果文樓 的曰存，其包括各項參數及補償文檔的存儲。IX. INSTRUCTIONS: [Technical Field] The present invention relates to an error compensation system and method, and more particularly to a three-seat rigid-machine tool error compensation system and method. $ [Prior Art] Coordinate Measurement Machine is the most widely used large-scale universal measuring instrument. It mainly has two kinds of two-three coordinate measuring machines such as gantry type, column type and robot arm type for parts and The measurement of the dimensional error and shape error of the component plays an important role in ensuring the quality of the product. ... 1 The accuracy of the n-state machine D is better than that of the Jinci tool, but it must exist, and the quantity error. With the development of production, the requirements for measurement accuracy are getting higher and higher. Therefore, = the measurement results of the three-coordinate measuring machine are maximized to meet the needs of mechanical design, manufacturing, and inspection, and the cause of the measurement error of the three-coordinate measuring machine must be analyzed. Usually, three; the measurement error of the remaining machine is mainly divided into five aspects, namely, method error, measurement ^ measurement personnel error, measured rotation itself error and three shop measuring machine equipment error = medium, measurement method error side is Selected _ check _ is not correct _ 2 perfect, ineffective, not true _ sake. ·Wei error: easy to get, because the three coordinate measuring machine 敝..., and then the analysis of the measured m material (four) 矣 矣 矣 , ΐ , , , , , , , , 秘 秘 秘 秘 秘 秘 秘 秘 秘 秘 秘 秘Precision peach match. Due to the difference between the grating scale reading system and the month: the processing assembly error (such as the unfinished bed of the guiding system, therefore, the need for a system can be in the two ^ ^ drag / 1 political fruit is not obvious. Error and shape error The time is good for the error measurement time. The accuracy and shortening of the Beckham back test [SUMMARY OF THE INVENTION] The preferred embodiment of the present invention provides a two-seat & measuring machine tool error compensation system, the system 1258566 ^ in / round The module is used for data acquisition and output error compensation results; one calculation = shaking, the target is calculated and returned to the front coordinate _ calculation; - the data security module, the second = the simple calculation process (four) read for encryption and decryption, Gu Wenbiao's secure L^-Γ钭 storage module is used to measure the inventory of various results in the calculation process, including the storage of various parameters and compensation documents.
方φίΐΓ較佳實施例還提供—種三座標測量機床誤差補償方法，該 並;被二:下步驟·（a)建立系紐學翻；（b)採用校正鮮設備檢測 二述誤差包括三座標測量機床的位置度誤差、直線 ^用旦’（e)對上述所測得誤差的座標值進行誤差補償；（d) 輸入stir標準件得到4測實際數值；（e)將上述量測實際數值 =产的，妓難（g账侧、 i u (§2)若上述偏差大於精度規格，職複檢測機床誤差並 校正=1細，所述三座標測量機床誤差補償系統及方法，利用 過補ρ 了 #干涉儀，測得機構和光柵尺讀數的原始誤差，« 差、娜彳#财_嗜雜變㈣定位誤 言，且差、肢動誤差麵直縣。其婦範圍廣，速度 争低了機構的加工成本，提高了機台量測精度。 L貫施方式】The preferred embodiment also provides a method for compensating the error of a three-coordinate measuring machine tool, which is: second: the next step, (a) establishing a system to learn to flip; (b) using the calibration fresh device to detect two errors including three coordinates Measure the position error of the machine tool, use the line ^(e) to compensate the coordinate value of the above-mentioned measured error; (d) Enter the standard standard of the stir to get the actual value of 4; (e) Calculate the actual value of the above measurement = production, martyrdom (g account side, iu (§ 2) If the above deviation is greater than the accuracy specification, the occupational complex detection machine tool error and correction = 1 fine, the three coordinate measurement machine tool error compensation system and method, using over-compensation ρ ## Interferometer, measured the original error of the reading of the mechanism and the grating ruler, «差, Na彳#财_杂杂性(4) positioning misunderstanding, and the difference between the limb and the limb error is straight county. The range of women is wide, the speed is low The processing cost of the mechanism has improved the accuracy of the measurement of the machine.
例二二3示:tr三座標測量機床誤差補償系統較佳實施 量機床=====床誤差補償系統4包括—三座標測 ,杈正私準设備2及至少一用戶端電腦3。二座椤測旦嬙& 1G，辦致三細舰地 -操作介®，田雜度和角擺誤差。肝端電腦3提供 _IM〇 y於二錄職機床誤細償之相_作，其包括-量 ’輸丨軟體3G 測量標準件（如塊規等）得到量測實里際 7 1258566 < 士第si所tf’係本發明二座標測量機床誤賴償系統用戶端* 腌之功能模組圖。該用戶端電腦3包括一輸入/輸出模組仙、一= 組42、-貢料安全模組44及—資料存儲模組46 二、 獲取和輸出誤差補償結果，其中，資料獲取包括原始誤二 集^性餘糊倾獲取，所述縣誤差指直接驗軒涉二 j準设備2測得三座標測量機床丨的位置度誤差、直線度誤差和^ =差’所述線性係數相_料指量測軟體％透過測試三 ，i W標準件（如塊規等）得到的結果。計算模組42，用於 仏计异和座標值返回計算。誤差補償計算包括單項誤差 南 =計算減縣計算。其巾，錄料賴錄 $Example 2:3 shows: tr three-coordinate measuring machine tool error compensation system better implementation machine tool ===== bed error compensation system 4 includes - three-station test, Yongzheng private device 2 and at least one user computer 3. Two 椤 椤 嫱 嫱 & 1G, to the three fine ship - operation media, field noise and angular pendulum error. The liver end computer 3 provides _IM〇y in the second recording machine tool for the fine compensation phase, which includes - quantity 'transmission software 3G measurement standard parts (such as block gauges, etc.) to get the measured real time 7 1258566 < Shisi Si's tf' is a functional module diagram of the user's two-coordinate measuring machine tool misunderstanding system. The client computer 3 includes an input/output module, a group 42, a tribute security module 44, and a data storage module 46. The acquisition and output error compensation results, wherein the data acquisition includes the original error 2 The collection of the stagnation is obtained, and the county error refers to the positional error, straightness error and ^=difference of the linear coordinate coefficient of the three-coordinate measuring machine tool. Refers to the results obtained by testing the software % through the test 3, i W standard parts (such as block gauges, etc.). The calculation module 42 is configured to calculate the return value of the coordinate and the coordinate value. The error compensation calculation includes a single term error. Its towel, recording material
;二戶 三座標測量機床1的X、γ、z垂直度誤= 二差、鶴產生的錄誤差、自轉誤差、職縣 ^直度誤差計算採用直線擬合函數，使用最小二乘法計算； =把早賴差㈣直度黯按相互影義鱗算出來，例如》， 觸，爲X轴自轉誤差，w轴;:二X = 由6、俯仰々差’ Μσ L爲垂直度誤差，則X軸總誤差 ^ = Dyx -£>„ -Y*Sxy-Z*S2x +Rxz +Z*(^-Ry) 座標值返回計算採用多次逼近之方法。資料^全模組44 ^位:貝料流加密補償文檑，確保文檔的安全性。料安 用於制量和計算驗巾產生的文槪行加密和解H安入 核，包括三項内容，即加密參數設定、資料加密及資料解密。王， j茶數設定主要是密餘和減化向量、加密籍和加密^法等 设定。三座酬量機床誤差補儀統4巾的加密鮮雜ϋ曾 ^，該對稱演算法在加密及解密資料時使用相同之密輪和初=异 密和解密指首先把文_成文標流，然後轉換爲加約i， 取後轉換成m骸。資料存讎組46，用 産生的各繼敎狀暫存，魏括各齡數及·讀 如弟二圖所示，係本發明三座標測量機床誤差補償方法較佳實施 8 1258566The X, γ, z verticality error of the two-seat three-coordinate measuring machine tool 1 = two differences, the recording error generated by the crane, the rotation error, the occupational straightness error calculation using the straight line fitting function, using the least squares method; Calculate the straightness of the difference (four) and the scale of the mutual image, for example, ", touch, for the X-axis rotation error, w axis;: two X = by 6, pitch ' difference Μ σ L is the verticality error, then X Total axis error ^ = Dyx -£>„ -Y*Sxy-Z*S2x +Rxz +Z*(^-Ry) Coordinate value return calculation using multiple approximation method. Data ^Full module 44 ^bit: Bay The stream encryption compensation document ensures the security of the document. The material is used for the production and calculation of the data generated by the wipes and the encryption and solution of the H-input core, including three items, namely encryption parameter setting, data encryption and data decryption. Wang, j tea number setting is mainly set of density and subtraction vector, encryption and encryption method. The three-receiving machine tool error compensation system 4 towel encryption fresh miscellaneous ^, the symmetric algorithm in When encrypting and decrypting data, use the same secret wheel and initial=distinct and decryption fingers to first classify the text into a text, then convert it to add i, after taking Changed to m骸. The data storage group 46, using the generated secondary shape temporary storage, Wei Wei each age and reading as shown in the second figure, is the preferred method for the error compensation method of the three-coordinate measuring machine tool of the present invention 8 1258566
例之作業流程圖。首先，透過數學方法建立系統數學模型（步驟S200)。 並用錯射干涉儀等校正標準設備2檢測三座標測量機床1之位置度誤 差、直線度誤差和角擺誤差（步驟S202)。對上述誤差之座標值進行誤 差補償（步驟S204)。透過量測軟體30在三座標測量機床1上測試標 準件得到量測實際數值，上述測試標準件指塊規等（步驟S206)。將: 述夏測實際數值輸入到輸入/輸出模組40 (步驟S208)。計算模組42 計算量測數值偏差和補償係數，該量測數值偏差指量測實際數值與標 準件的真貫值之差，所述補償係數包含線性變你的光學尺位置誤差和 兩軸間的垂直誤差係數，例如，xy、yz、zx之間的垂直度（步驟 S210)。驗證精度是否合格，即比較量測數值偏差與設備廠商提供^機 ，，度規格’若量測數值偏差小於該精度規格，則認爲驗證精度合格； 若量測數值偏差大於上職度規格，則返时驟S2G2，飾對^床^ =行檢.補償，制驗職度合格（倾S212 )。精度驗合格後i 加岔並存儲上述驗證結果文檔（步驟S214)。 獅’係本發肛鍊測4機賴差麵找較佳實施 。__2所檢_機床誤差數 (步驟_2)。值輸入到輸入/輸出模㈣ 之方料I鉢值在u步驟s2_4)。使用線性插補 J=(〇-〇5-a〇3)/30*^3〇H〇-〇3 (Example of the operation flow chart. First, a system mathematical model is established by a mathematical method (step S200). The positional error, the straightness error, and the angular pendulum error of the three-coordinate measuring machine 1 are detected by the calibration standard device 2 such as a misalignment interferometer (step S202). Error compensation is performed on the coordinate value of the above error (step S204). The actual value is measured by testing the standard member on the three-coordinate measuring machine 1 through the measuring software 30, and the above-mentioned test standard means a block gauge or the like (step S206). The summer measured actual value is input to the input/output module 40 (step S208). The calculation module 42 calculates the measurement value deviation and the compensation coefficient, and the measurement value deviation refers to the difference between the actual value and the true value of the standard piece, the compensation coefficient includes linearly changing the position error of the optical ruler and between the two axes The vertical error coefficient, for example, the perpendicularity between xy, yz, zx (step S210). Whether the verification accuracy is qualified, that is, the deviation of the comparison measurement value is provided by the equipment manufacturer, and the degree specification 'if the deviation of the measurement value is less than the accuracy specification, the verification accuracy is considered to be qualified; if the deviation of the measurement value is greater than the upper-level specification, Then return to the time S2G2, decorated with ^ bed ^ = line inspection. Compensation, the system is qualified (pipping S212). After the accuracy check is passed, i is added and the above verification result document is stored (step S214). The lion's system is an anal chain test 4 machine Lai surface to find a better implementation. __2 checked _ machine error number (step _2). The value of the value input to the input/output mode (4) is the value of the value I in step s2_4). Use linear interpolation J=(〇-〇5-a〇3)/30*^3〇H〇-〇3 (
(步(步驟_8)。各座標值加上E得到N 以驟S20410)。然後N乘以各軸 仔a N 驟S20412)。 你數传到補償後的座標值（步 如第五圖所示，係本發明三座標 例之返回補償前座標值作業流糊。返回t=方法較佳實施 娜量機床之誤差補償沒有直接意義，其=座j本身對三座標 仃。返回補償前雜值_多次逼近之=私測量機床之運 偏的編·购㈣，補償後的值爲 9 1258566 100.1，第一次執行完返回補償前座標值後得到1〇〇〇5，則需要第二次 i^回補4貝’直到得到原始值100。首先，讀取上述補償過後的座標值（步 知S300)。將其輸入到輸入/輸出模組4〇 (步驟幻〇2)。計算該座標值 所在區間（步驟S3〇4)。使用線性插補的方法計算單項誤差（步驟 异各健標值之總誤差E (轉S3G8)。用各座標值除以線 =谢W步驟S31G)，減去總誤差到返賴償前的座 (步驟 S312)。(Step (step_8). Each coordinate value plus E gives N to step S20410). Then N is multiplied by each axis a N step S20412). The number of coordinates that you pass to the compensation is as shown in the fifth figure. It is the work of the three coordinates of the invention to return the compensation of the front coordinate value. The return t= method is better to implement the error compensation of the machine tool. , = its seat j itself to the three coordinates. Return to the pre-compensation miscellaneous value _ multiple approximation = private measurement machine tool migration and purchase (four), the value of the compensation is 9 1258566 100.1, the first execution of the return compensation After the front coordinate value is 1〇〇〇5, the second i^replenishment is required until the original value is 100. First, the above compensated coordinate value is read (step S300). Input it to the input. / Output module 4 〇 (step illusion 2). Calculate the interval where the coordinate value is located (step S3 〇 4). Calculate the single item error using the linear interpolation method (the total error E of each parameter value in the step (to S3G8) By dividing each coordinate value by the line = X (step S31G), the total error is subtracted from the seat before the return (step S312).
^驟S2_6和步驟S3G6中，單項誤差指三座標測量機床χ、γ、 位差，其包括位置度誤差、直線度誤差和舰誤差。上述 貝座制量機床所使_光栅尺_數純誤差和阿 差1述=:=線和光柵尺不在同-直 ΐ 轴移動時，會産生¥和2方向的直線度誤 ί的心母個軸運動時，繞三根軸自轉、俯仰和偏擺所産 【圖式簡單說明】 。㈣本發明二鍊婦機床縣麵純較佳實補之硬體 I組ί 了圖係本發明二座標測量機床誤差補齡關戶端電腦之功能In step S2_6 and step S3G6, the single term error refers to the three-coordinate measuring machine tool χ, γ, and the position difference, which includes the position error, the straightness error, and the ship error. The above-mentioned shell-seat machine tool makes the _grating ruler_number pure error and the difference of the difference === the line and the scale are not in the same-straight axis. When the axis moves, it will produce the straightness of the straight line in the ¥ and 2 directions. When the axes move, the three axes are rotated, pitched and yawed [simplified illustration]. (4) The hardware of the two-chain women's machine tool of the invention is pure and better. The group I ί diagram is the function of the two-coordinate measuring machine tool error compensation age-setting computer of the invention
第三圖係本發明 流程圖。 二座標測量機床誤差補償方法較佳實施例之作業 第四圖係本發明三 誤差補償作業流程圖。 弟五圖係本發明三 補償前座標值作業流程 【主要元件符號說明】 座標測量機床誤差補償方法較佳 座標測量機床誤差補償方法較佳 圖。 實施例之機床 實施例之返回 三座標測量機床 校正標準設備 2 10 1258566 用戶端電腦 3 三座標測量機床誤差補償系統 4 導執糸統 10 量測軟體 30 輸入/輸出模組 40 計鼻模組 42 資料安全模組 44 資料存儲模組 46 11The third figure is a flow chart of the present invention. The operation of the preferred embodiment of the two-coordinate measuring machine error compensation method is the flow chart of the third error compensation operation of the present invention. The fifth figure is the operation flow of the three compensation front coordinate values of the present invention. [Main component symbol description] Coordinate measurement machine tool error compensation method is better Coordinate measurement machine tool error compensation method is better. Example of Machine Tool Embodiment Return Three Coordinate Measuring Machine Calibration Standard Equipment 2 10 1258566 User Computer 3 Three-coordinate Measuring Machine Error Compensation System 4 Guide System 10 Measuring Software 30 Input/Output Module 40 Metering Module 42 Data security module 44 data storage module 46 11