TWI256662B - Excimer lamp device - Google Patents

Excimer lamp device

Info

Publication number
TWI256662B
TWI256662B TW092124765A TW92124765A TWI256662B TW I256662 B TWI256662 B TW I256662B TW 092124765 A TW092124765 A TW 092124765A TW 92124765 A TW92124765 A TW 92124765A TW I256662 B TWI256662 B TW I256662B
Authority
TW
Taiwan
Prior art keywords
excimer lamp
tube
side direction
outside
lamp device
Prior art date
Application number
TW092124765A
Other languages
Chinese (zh)
Other versions
TW200406805A (en
Inventor
Noritaka Takezoe
Kenichi Hirose
Original Assignee
Ushio Electric Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Ushio Electric Inc filed Critical Ushio Electric Inc
Publication of TW200406805A publication Critical patent/TW200406805A/en
Application granted granted Critical
Publication of TWI256662B publication Critical patent/TWI256662B/en

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J61/00—Gas-discharge or vapour-discharge lamps
    • H01J61/02—Details
    • H01J61/30—Vessels; Containers

Landscapes

  • Fastening Of Light Sources Or Lamp Holders (AREA)
  • Vessels And Coating Films For Discharge Lamps (AREA)

Abstract

The present invention relates to an excimer lamp device of substantially a bar shape, which is connected to plural dual structures toward a long-side direction. When assembling an illuminating device, the operation is easy and the uneven illuminating distribution of each excimer lamp is reduced, so that the illumination in the long side direction is as uniform as possible. The excimer lamp device is composed of plural bar-shaped excimer lamps, which is characterized in that: the excimer lamp arranges its outside tube with a large diameter and inside tube with a small diameter on the same axis to provide a dual structure. One electrode is arranged on the outside of the outside tube and another electrode is arranged on the inside of the inside tube. Discharge gas is sealed between the outside tube and inside tube. The excimer lamp device includes a supporting base for arranging and supporting each excimer lamp. Each excimer lamp is installed on the supporting base by a fixing device for being integrally connected toward the long side direction.
TW092124765A 2002-10-29 2003-09-08 Excimer lamp device TWI256662B (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2002314665A JP3938010B2 (en) 2002-10-29 2002-10-29 Excimer lamp device

Publications (2)

Publication Number Publication Date
TW200406805A TW200406805A (en) 2004-05-01
TWI256662B true TWI256662B (en) 2006-06-11

Family

ID=32458918

Family Applications (1)

Application Number Title Priority Date Filing Date
TW092124765A TWI256662B (en) 2002-10-29 2003-09-08 Excimer lamp device

Country Status (3)

Country Link
JP (1) JP3938010B2 (en)
KR (1) KR100720245B1 (en)
TW (1) TWI256662B (en)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR102207678B1 (en) * 2019-04-24 2021-01-26 주식회사 원익큐엔씨 Uv lamp for implant surface treatment
WO2022116366A1 (en) * 2020-12-04 2022-06-09 广明源光科技股份有限公司 Excimer lamp

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2789557B2 (en) * 1996-02-09 1998-08-20 ウシオ電機株式会社 Light source device using dielectric barrier discharge

Also Published As

Publication number Publication date
KR100720245B1 (en) 2007-05-22
JP2004152545A (en) 2004-05-27
TW200406805A (en) 2004-05-01
KR20040038637A (en) 2004-05-08
JP3938010B2 (en) 2007-06-27

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Legal Events

Date Code Title Description
MM4A Annulment or lapse of patent due to non-payment of fees