TWI256661B - Sputter ion pump - Google Patents

Sputter ion pump

Info

Publication number
TWI256661B
TWI256661B TW94123160A TW94123160A TWI256661B TW I256661 B TWI256661 B TW I256661B TW 94123160 A TW94123160 A TW 94123160A TW 94123160 A TW94123160 A TW 94123160A TW I256661 B TWI256661 B TW I256661B
Authority
TW
Taiwan
Prior art keywords
pump
sputter ion
vacuum pump
ion pump
aperture
Prior art date
Application number
TW94123160A
Other languages
Chinese (zh)
Other versions
TW200703411A (en
Inventor
Li Qian
Jie Tang
Liang Liu
Jing Qi
Pi-Jin Chen
Original Assignee
Hon Hai Prec Ind Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hon Hai Prec Ind Co Ltd filed Critical Hon Hai Prec Ind Co Ltd
Priority to TW94123160A priority Critical patent/TWI256661B/en
Application granted granted Critical
Publication of TWI256661B publication Critical patent/TWI256661B/en
Publication of TW200703411A publication Critical patent/TW200703411A/en

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  • Electron Tubes For Measurement (AREA)

Abstract

A sputter ion pump includes a vacuum pump, two anode poles, and a device of cold cathode. The vacuum pump includes at least one aperture set on the wall of the vacuum pump for injecting electron. The two anode poles are set into the vacuum pump, and they are symmetrical along the axis of the pump. The device of cold cathode is set on outboard wall of the aperture of the pump.
TW94123160A 2005-07-08 2005-07-08 Sputter ion pump TWI256661B (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
TW94123160A TWI256661B (en) 2005-07-08 2005-07-08 Sputter ion pump

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
TW94123160A TWI256661B (en) 2005-07-08 2005-07-08 Sputter ion pump

Publications (2)

Publication Number Publication Date
TWI256661B true TWI256661B (en) 2006-06-11
TW200703411A TW200703411A (en) 2007-01-16

Family

ID=37614739

Family Applications (1)

Application Number Title Priority Date Filing Date
TW94123160A TWI256661B (en) 2005-07-08 2005-07-08 Sputter ion pump

Country Status (1)

Country Link
TW (1) TWI256661B (en)

Also Published As

Publication number Publication date
TW200703411A (en) 2007-01-16

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